Differential pressure sensor based on integrated resonant structure

Abstract

The application discloses a differential pressure sensor based on an integrated resonant structure and relates to the technical field of differential pressure sensors, and aims to solve the technical problems that a diaphragm is easily damaged and detection is inaccurate during long-term use of non-clean media. Through a multi-stage progressive protection system of dynamic anti-adhesion, directional flow guide, opening and closing collection and long-acting impurity reduction, the application completely solves the industry bottlenecks of diaphragm damage, measurement distortion and response lag caused by viscous, particle-containing and easily-crystallized media; the structure relies on trace pressure compensation self-driving throughout the whole process, and no electronic components, external power and static pressure field are damaged, and the core detection principle of the sensor is not changed; while the advantages of high precision and high stability are retained, the medium adaptation range is greatly widened, the service life of the sensor is prolonged, and the maintenance frequency and replacement cost are reduced.

Description

Technical Field

[0001] This invention relates to the field of differential pressure sensor technology, and more specifically, to a differential pressure sensor based on an integrated resonant structure. Background Technology

[0002] Integrated resonant differential pressure sensors are core components for industrial parameter measurement. They sense pressure differences through an integrated resonant structure including a resonant beam and diaphragm, utilizing the pressure-induced elastic deformation of the structure to change the inherent resonant frequency. The differential pressure value is then retrieved through signal processing. With advantages such as high measurement accuracy and strong anti-interference capabilities, they are widely used in petrochemical, metallurgical, power, food, and pharmaceutical industries to monitor key parameters such as flow rate, level, and density. However, under complex media conditions, the integrated resonant structure design of existing differential pressure sensors has significant shortcomings. It cannot adapt to the actual needs of using viscous, particulate, or easily crystallizing media, becoming a key bottleneck restricting its industrial application range and long-term measurement reliability.

[0003] For viscous media, high-viscosity media tend to form a retention layer on the diaphragm surface. This retention layer forms a "thermal and pressure barrier," hindering the accurate transmission of medium pressure to the resonant structure. This leads to a decrease in pressure transmission efficiency and measurement lag, especially under low differential pressure conditions, where the error can be significantly amplified to several times the design value. At the same time, the long-term accumulation of the retention layer can easily breed microorganisms, further altering the medium properties and exacerbating measurement deviations. For media containing particles, the suspended solid particles in the medium will impact the diaphragm and resonant beam surfaces during pressure transmission, causing continuous wear. After long-term operation, the flatness of the diaphragm is damaged, and the cross-sectional size of the resonant beam is reduced, directly changing the sensor's inherent resonant frequency, leading to frequency acquisition distortion and a sharp decline in measurement accuracy. Furthermore, particles can easily clog the pressure tapping channel and fluid flow path, causing sensor response sluggishness or even no signal output. The hazards of easily crystallizing media are more insidious and far-reaching. Media easily crystallize and form scale on the diaphragm, pressure tapping port, and resonant structure surfaces. This scale layer alters the sensor's mass distribution and elastic modulus, causing zero-point drift and range drift, resulting in long-term measurement data distortion. More seriously, the scale layer generates uneven stress during temperature and pressure changes, continuously compressing the diaphragm and easily causing micro-deformation. This micro-deformation is irreversible damage, significantly reducing the sensor's linearity and sensitivity, or even causing complete failure, posing a significant threat to the stable operation and measurement accuracy of industrial production. Therefore, we propose a differential pressure sensor based on an integrated resonant structure. Summary of the Invention

[0004] The purpose of this invention is to provide a differential pressure sensor based on an integrated resonant structure to solve the technical problems of diaphragm wear and inaccurate detection during long-term use in non-clean media.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a differential pressure sensor based on an integrated resonant structure, comprising a display output unit, a housing protection component, and a signal processing module, wherein a sensing and detection unit is provided below the signal processing module; The sensing and detection unit includes a central base connected to the outer casing protective assembly. A central diaphragm is provided at the center of the central base. A resonant beam is provided on the central diaphragm. Isolation diaphragms are provided on both sides of the central diaphragm. A pressure transmitting medium is provided on one side of the isolation diaphragm. Clamping plates are provided on both sides of the central base. The area between the clamping plates and the isolation diaphragms is provided as a pressure-inducing cavity. A dispersing structure is provided on the side of the pressure-inducing cavity near the isolation diaphragm. The dispersing structure includes a dispersing component that uses a small amount of pressure as power. The dispersing component consists of a ring shell and multiple spiral fan blades fixed to the ring shell. The ring shell has a fan blade bushing connected to the spiral fan blades at its center. The inner circumference of the fan blade bushing has an auxiliary structure that drives the dispersing component to rotate in a spiral concave-convex manner. At least one pressure sensor is provided on one side of the auxiliary structure. The pressure sensor includes a pressure-sensitive plate for actuating the movement of the auxiliary structure. The pressure-sensitive plate is made of a material that can deform under small amount of pressure.

[0006] Preferably, the outer periphery of the annular shell is provided with a positioning sleeve fixed to the pressure chamber, and the outer periphery of the annular shell is provided with an annular groove with an annular trajectory. Multiple positioning rods are slidably limited in the annular groove, and the other end of the positioning rods is connected to the positioning sleeve.

[0007] Preferably, the auxiliary structure includes a one-way bearing, the outer ring of the one-way bearing is fixed to the inner circumference of the fan blade bushing, the inner ring of the one-way bearing is integrally formed with multiple curved balls, the inner ring of the one-way bearing is provided with a protruding post, the outer circumference of the protruding post is provided with a curved groove of the same size as the curved balls, a limit plate is fixed on one side of the curved groove, a fixing plate is provided on one side of the limit plate and positioned and fixed with the central base, and a through-pin that passes through the fixing plate and is not cylindrical is connected to the center of the limit plate.

[0008] Preferably, the pressure-sensitive sheet has a wavy structure, and its two ends are connected to a fixing plate and a limiting plate, respectively.

[0009] Preferably, the distance between the spiral fan blades and the isolation diaphragm is smaller than the distance between the annular shell and the isolation diaphragm, and the annular shell has an integrally formed side guide arc on the side close to the isolation diaphragm. The outer ring of the annular shell has a first outer guide arc with a gradually changing curvature, and the inner ring of the positioning sleeve has a second outer guide arc. A guide narrow channel is formed between the second outer guide arc and the first outer guide arc. Multiple inclined spiral fan blades are fixed on the first outer guide arc.

[0010] Preferably, a collection shell is provided on one side of the guide narrow channel, and an annular outer baffle ring extends from one side of the collection shell. Multiple leakage cavities are provided on the collection shell.

[0011] Preferably, the inner ring of the collecting shell is fitted with a sealing ring, the sealing ring has a sealing cavity corresponding to the position of the leakage cavity, multiple outer edges are installed on the side of the sealing ring, and a paperclip is fixed on the side of the outer edge, the paperclip has a locking opening.

[0012] Preferably, the pressure sensing element further includes a pressure-sensing liner connected to the pressure-sensing sheet. A spring sheet is fixed on one side of the pressure-sensing liner. The spring sheet has a multi-wave structure and is made of elastic material. A straight hook that engages with the locking hole is provided on the side of the spring sheet. The size of the overlapping wave shape of the spring sheet is adapted to the inner circumference of the loop clip.

[0013] Preferably, the inside of the collection shell is provided with a blocking step ring, the cross-section of the blocking step ring is a ring structure with progressively increasing steps, and a convex blocking arc is installed on the blocking step ring to pass through the leakage cavity, the convex blocking arc being an arc-shaped structure for guidance.

[0014] Preferably, the clamp is equipped with a pressure tap that communicates with the pressure chamber, and the clamp is arranged at an angle.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. This invention addresses the problem of viscous, particulate, and easily crystallizing media forming a retention layer on the surface of isolation diaphragms, causing particle wear and crystallization compression. It utilizes a micro-pressure booster to drive a low-speed rotation of a spiral fan blade, instantly disrupting the retention layer on the diaphragm and dispersing solid particles and crystalline impurities near the diaphragm. Combined with a highly elastic nickel-titanium alloy pressure-sensitive element, it precisely responds to instantaneous pressure surges, achieving a stable driving method that operates only during pressure boosting and remains stationary during leakage. The rotation process is non-contact and involves no additional force, does not alter the diaphragm deformation state or static pressure field, and does not affect differential pressure detection accuracy or resonant beam frequency acquisition. It reduces damage to the diaphragm from media adhesion, particle impact, and scale compression at the source, providing basic protection for the sensor and significantly improving short-term operational stability under harsh media conditions.

[0016] 2. This invention achieves directional impurity flow and physical isolation of the diaphragm area: Based on the basic rotational dispersion, a narrow guiding channel formed by the side guide arc, the first outer guide arc, and the second outer guide arc directs the ejected particles and impurities along a fixed path. This, combined with the auxiliary rotation of the outer fan blades, enhances the disturbance effect and prevents disorderly diffusion of impurities. An outer baffle ring radially blocks impurities, and the impurity leakage cavity provides initial collection and temporary storage, preventing impurities from approaching the isolation diaphragm again along their movement path, effectively separating the diaphragm's working area from the impurity area. This design solves the problem of media disorder caused by simple rotational disturbance, upgrading protection from "passive dispersion" to "active flow guidance and isolation," further reducing the probability of impurities contacting the diaphragm and improving the reliability and continuity of diaphragm protection.

[0017] 3. This invention addresses the drawback of normally open leakage chambers, which are prone to impurity backflow. It achieves an automatic cycle of "micro-pressure replenishment for collection and micro-leakage closure for slag locking" through a pressure-sensing element linked to a closed-loop structure. During pressure replenishment, the closed chamber aligns with the leakage chamber, allowing impurities to smoothly enter the collection shell. During static pressure and leakage stages, the chambers are completely staggered and sealed, trapping collected impurities within the shell for natural settling, preventing backflow to the main area of ​​the pressure-inducing chamber. This design upgrades impurity collection from "temporary storage" to "reliable sealing," preventing separated impurities from re-contaminating the membrane, significantly improving impurity collection efficiency and slag retention capacity, and providing crucial assurance for long-term stable operation.

[0018] 4. This invention, through the periodic operation of the opening and closing collection structure, continuously collects and seals particles and crystalline impurities in the pressure chamber inside the collection shell while the sensor is working normally. This causes the number of impurities in the chamber to decrease continuously with the extension of the operating time. The continuous reduction in impurity concentration can effectively alleviate multiple problems such as particle wear, media adhesion, and crystallization and scaling. It also reduces the workload and uneven stress on the isolation diaphragm, avoids irreversible micro-deformation of the diaphragm caused by scale stress, maintains the flatness, elasticity and pressure transmission efficiency of the diaphragm, and enables the sensor to maintain high accuracy and low drift even when used in non-clean media for a long time.

[0019] 5. This invention completely solves industry bottlenecks such as membrane wear, measurement distortion, and response lag caused by viscous, particulate, and easily crystallizing media through a multi-level progressive protection system of dynamic anti-sticking, directional flow guidance, on-off collection, and long-term impurity reduction. The structure relies entirely on micro-pressure compensation for self-drive, without electronic components, external power, or disruption of the static pressure field, and without changing the core detection principle of the sensor. While retaining the advantages of high precision and high stability, it significantly expands the range of media adaptability, extends the service life of the sensor, and reduces maintenance frequency and replacement costs. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2This is a schematic diagram of the internal structure of the sensing and detection unit in this invention; Figure 3 This is a half-section structural diagram of the sensing and detection unit in this invention; Figure 4 This is a half-sectional schematic diagram of the dispersing structure and auxiliary structure during the micro-pressure replenishment process of the present invention. Figure 5 This is a half-section diagram of the dispersing structure and the auxiliary structure during the micro-pressure replenishment process of the present invention from another angle. Figure 6 This is a schematic diagram of a single dispersing structure in this invention; Figure 7 This is a half-sectional schematic diagram of a single dispersing structure in this invention; Figure 8 For the present invention Figure 7 Enlarged view of the structure at point A in the middle; Figure 9 This is a schematic diagram of the cooperation structure between the auxiliary structure and the pressure sensing element during the micro-pressure compensation process of the present invention; Figure 10 This is a schematic diagram of the structure of a single pressure sensing element in this invention; Figure 11 This is a half-section diagram of the structure between the pressure sensing element and the collection shell during the micro-pressure replenishment process of the present invention. Figure 12 For the present invention Figure 11 Enlarged view of the structure at point B; Figure 13 This is a half-section structural diagram of the pressure sensing element and the collecting shell under normal static pressure conditions according to the present invention. Figure 14 For the present invention Figure 13 Enlarged view of the structure at point C.

[0021] Explanation of the labels in the diagram: 1. Display output unit; 2. Housing protection assembly; 3. Signal processing module; 4. Sensing and detection unit; 401. Central base; 402. Central diaphragm; 403. Isolation diaphragm; 404. Clamping plate; 405. Pressure tap; 5. Dispersion structure; 51. Dispersion component; 511. Ring shell; 5111. Side guide arc; 5112. First outer guide arc; 512. Spiral fan blade; 513. Positioning sleeve; 5131. Second outer guide arc; 514. Positioning rod; 502. Fan blade bushing; 6. Auxiliary structure; 6 01. One-way bearing; 602. Curved ball; 603. Protruding post; 604. Curved groove; 605. Limiting plate; 606. Fixing plate; 607. Through-clamp post; 7. Pressure sensing element; 701. Pressure sensing plate; 702. Pressure sensing strip; 703. Spring plate; 704. Straight hook; 8. External rotating fan blade; 9. Collection shell; 91. Outer retaining ring; 92. Impurity leakage cavity; 10. Sealing ring; 101. Sealing cavity; 11. Outer extension edge; 12. Ring clip; 13. Blocking step ring; 14. Protruding blocking arc; 15. Connecting rod. Detailed Implementation

[0022] like Figures 1 to 14 As shown, the present invention relates to a differential pressure sensor based on an integrated resonant structure, including a display output unit 1, a housing protection component 2, and a signal processing module 3. The display output unit 1, the housing protection component 2, and the signal processing module 3 are not design points, and their internal components and installation connection methods can adopt existing technologies. A sensing detection unit 4 is provided below the signal processing module 3.

[0023] The sensing and detection unit 4 includes a central base 401 connected to the housing protection assembly 2. A central diaphragm 402 is provided at the center of the central base 401. A resonant beam is provided on the central diaphragm 402. The resonant beam is connected to the signal processing module 3. Isolation diaphragms 403 are provided on both sides of the central diaphragm 402. A pressure transmitting medium, such as silicone oil, is filled between the isolation diaphragm 403 and the central diaphragm 402. Clamping plates 404 are fixed to both sides of the central base 401 by bolts. The area between the clamping plate 404 and the isolation diaphragm 403 is set as a pressure-inducing cavity. A pressure tap 405 communicating with the pressure-inducing cavity is installed on the clamping plate 404. The pressure tap 405 is arranged at an angle. A dispersing structure 5 is provided on the side of the pressure-inducing cavity near the isolation diaphragm 403.

[0024] The dispersing structure 5 includes a dispersing component 51 that uses a small amount of pressure as power. The dispersing component 51 consists of an annular shell 511 and multiple spiral fan blades 512. The multiple spiral fan blades 512 are similar to propellers. When one side is impacted by the medium fluid, they can rotate. One end of the multiple spiral fan blades 512 is fixed to the inner circumference of the annular shell 511. The annular shell 511 is a hollow ring structure. Through the hollow design, the dispersing component 51 as a whole is made of lightweight material, which can greatly reduce the resistance during driving. The center of the annular shell 511 is provided with a fan blade bushing 502 that is connected to the spiral fan blades 512.

[0025] The inner circumference of the fan blade bushing 502 is provided with an auxiliary structure 6 that drives the dispersing component 51 to rotate in a spiral concave-convex manner. The auxiliary structure 6 includes a one-way bearing 601. The outer ring of the one-way bearing 601 is fixed to the inner circumference of the fan blade bushing 502. The inner ring of the one-way bearing 601 is integrally formed with multiple curved balls 602. The inner ring of the one-way bearing 601 is provided with a protrusion 603. The outer circumference of the protrusion 603 is provided with a curved groove 604 of the same size as the curved ball 602. A limit plate 605 is fixed on one side of the curved groove 604. A fixing plate 606 is provided on one side of the limit plate 605 and is positioned and fixed to the central base 401. The position of the fixing plate 606 is relatively fixed to the pressure chamber and is fixed by a connecting rod 15. A through-clamping post 607 that passes through the fixing plate 606 and is not cylindrical is connected to the center of the limit plate 605.

[0026] The auxiliary structure 6 is provided with at least one pressure sensor 7 on one side. The design itself adopts five evenly distributed components to improve stability. The pressure sensor 7 includes a pressure-sensitive plate 701 for pushing the auxiliary structure 6 to move. The pressure-sensitive plate 701 is made of a material that can sense a small amount of pressure and deform. The pressure-sensitive plate 701 has a wave-shaped structure. The two ends of the pressure-sensitive plate 701 are connected to the fixed plate 606 and the limiting plate 605, respectively.

[0027] The pressure-sensitive pad 701 is preferably made of shape memory alloy (superelastic nickel-titanium alloy NiTi). Its material characteristics are that it is "insensitive to slow pressure changes but sensitive to sudden pressure changes". When there is a micro-leakage, the pressure drops very slowly. NiTi is in a stable elastic state and does not produce visible deformation. When a small amount of pressure is added, the pressure rises slightly and the stress rate triggers a pseudo-elastic plateau, producing stable and controllable micro-bending / micro-torsion. After the pressure is added and the pressure is balanced, it automatically rebounds.

[0028] Working principle: Under normal static pressure conditions, the medium inside the pressure-sensing chamber is in static pressure equilibrium. The resonant differential pressure sensor transmits the pressure difference to the central diaphragm 402 and the resonant beam through the isolation diaphragm 403 and the pressure-transmitting medium, realizing the normal detection of the differential pressure signal. At this time, there is only a slow and minute amount of sealing leakage in the pressure-sensing chamber, and the pressure shows an extremely slow downward trend. The pressure sensing element 7 uses a wave-shaped pressure sensing plate 701 made of super-elastic nickel-titanium alloy NiTi, which is not sensitive to this type of slow pressure change and always maintains a stable elastic state without obvious deformation. The dispersing element 51 and the auxiliary structure 6 both remain stationary.

[0029] When a leak in the seal causes a small pressure difference between the pressure-sensing chamber and the pipeline, the medium inside the pipeline will momentarily replenish the pressure in the pressure-sensing chamber. The replenishing medium enters the pressure-sensing chamber through the inclined pressure tap 405. On the one hand, the weak fluid formed by the replenishing medium directly impacts the spiral fan blades 512 of the dispersing component 51, providing the dispersing component 51 with initial rotational driving force. On the other hand, the instantaneous pressure change caused by the micro-replenishment will trigger the pseudo-elastic platform of the hyperelastic nickel-titanium alloy pressure-sensing plate 701, causing the wave-shaped pressure-sensing plate 701 to produce stable and controllable micro-bending deformation, thereby driving it to move towards its... The connecting limiting plate 605 moves axially, and the limiting plate 605 drives the protrusion 603 to move synchronously. The curved groove 604 on the outer periphery of the protrusion 603 and the curved ball 602 on the inner ring of the one-way bearing 601 form a helical concave-convex fit, which converts the axial linear motion into a circumferential rotational driving force (at this time, the one-way bearing 601 is in the limiting direction). This rotational force is transmitted to the fan blade bushing 502 and the ring shell 511 through the one-way bearing 601. Thus, it is superimposed in the same direction with the torque of the fluid-driven spiral fan blade 512, which greatly enhances the rotational power and speed of the dispersing component 51, making it rotate stably.

[0030] The rotating dispersing component 51 agitates the medium on the surface of the isolation diaphragm 403 through the spiral fan blade 512, breaking up the viscous medium that is about to form a stagnant layer in real time, thus preventing the stagnant layer from blocking pressure transmission; at the same time, it disperses solid particles and crystalline impurities near the isolation diaphragm 403, preventing particles from impacting, scratching, and wearing the isolation diaphragm 403, and preventing the adhesion and compression of the crystalline scale layer from causing micro-deformation of the diaphragm. After the micro-pressure replenishment is completed, the pressure-sensing chamber restores the static pressure balance, and the pressure-sensing plate 701 automatically rebounds and resets under the action of superelasticity. The limit plate 605 and the protrusion 603 return, and the one-way bearing 601 achieves one-way clutch (at this time it is the free end, so it will not drive the spiral fan blade 512 to rotate), avoiding reverse motion interference. The dispersing component 51 stops rotating as the fluid power disappears, and the pressure-sensing chamber returns to the static pressure environment.

[0031] It is worth mentioning that the rotational power of the spiral fan blade 512 comes only from the instantaneous micro-pressure replenishment from the pipeline to the pressure chamber. The flow rate and velocity of the replenishing medium are extremely small, which can only drive the fan blade to rotate at low speed and small amplitude. It will not form macroscopic flow or obvious flow field in the pressure chamber. The pressure chamber maintains a static pressure environment. A small gap is maintained between the spiral fan blade 512 and the isolation diaphragm 403, which is a close but non-contact arrangement. When the spiral fan blade 512 rotates, it only causes a slight disturbance to the medium near the diaphragm surface. It does not exert any additional force on the diaphragm or change its deformation state. The essence of micro-pressure replenishment is that after the pressure in the pressure chamber drops slightly due to micro-leakage, the medium in the pipeline automatically replenishes the medium to restore the pressure balance. The pressure in the pressure chamber before and after replenishment only has a momentary and slight restorative change, and it does not introduce a new differential pressure component. Micro-pressure replenishment is an instantaneous process. The rotation of the dispersing component 51 only occurs briefly at the moment of replenishment and stops immediately after replenishment. The differential pressure acquisition of the sensor is a continuous steady-state acquisition. The momentary weak rotation will not affect the natural frequency detection of the resonant beam.

[0032] Furthermore, although the above-mentioned method can drive rotation during micro-pressure replenishment, causing micro-movement of the non-clean medium near the isolation membrane 403, greatly reducing the possibility of its adhesion and affecting membrane detection, the agitated medium is in a disordered state. When dealing with non-clean media containing particles, the particulate impurities may still approach the membrane again, which is not conducive to the protection of the membrane. In view of this point...

[0033] The outer periphery of the ring shell 511 is provided with a positioning sleeve 513 fixed to the pressure chamber. The outer periphery of the ring shell 511 is provided with an annular groove with an annular trajectory. Multiple positioning rods 514 are slidably limited in the annular groove, and the other end of the positioning rods 514 is connected to the positioning sleeve 513.

[0034] The distance between the spiral fan blade 512 and the isolation diaphragm 403 is smaller than the distance between the annular shell 511 and the isolation diaphragm 403, and the annular shell 511 has an integrally formed side guide arc 5111 on the side close to the isolation diaphragm 403. The outer ring of the annular shell 511 has a first outer guide arc 5112 with a gradually changing arc. The inner ring of the positioning sleeve 513 has a second outer guide arc 5131 integrally formed. A guide narrow channel is formed between the second outer guide arc 5131 and the first outer guide arc 5112. Multiple inclined spiral fan blades 8 are fixed on the first outer guide arc 5112. A collection shell 9 is provided on one side of the guide narrow channel. An annular outer baffle ring 91 extends from one side of the collection shell 9. Multiple leakage cavities 92 are opened on the collection shell 9.

[0035] Working principle: During the rotation of the micro-pressure-driven dispersing component 51, the spiral fan blade 512 throws the medium on the diaphragm surface outward in a circumferential direction. The side guide arc 5111 on the inner side of the annular shell 511 smoothly guides the medium and impurities to the outer side of the annular shell 511, preventing impurities from flowing back to the central area of ​​the diaphragm. The first outer guide arc 5112 on the outer ring of the annular shell 511 and the second outer guide arc 5131 on the inner ring of the positioning sleeve 513 cooperate to form a guide narrow channel, which constrains and guides the thrown-out particles and crystalline impurities, causing them to move along a fixed path towards the collection area. At the same time, the outer rotating fan blade 8 set on the first outer guide arc 5112 generates an auxiliary rotational torque under the action of the medium flow, which is consistent with the rotation direction of the spiral fan blade 512, further improving the rotational stability and disturbance capability of the dispersing component 51.

[0036] A collection shell 9 is provided on the outside of the guide narrow channel. The outer baffle ring 91 extending from the collection shell 9 forms a radial barrier against impurities moving along the guide narrow channel, preventing impurities from escaping outward under the action of centrifugal force. The blocked impurities enter the interior of the collection shell 9 through the leakage cavity 92 opened on the collection shell 9 under the continuous guiding action, realizing the preliminary collection and temporary storage of particulate and crystalline impurities, and blocking the possibility of impurities approaching the isolation membrane 403 again from the movement path.

[0037] Furthermore, although the above can achieve guidance and collection, after collection, impurities will generate micro-flow, and the leakage cavity 92 is normally open, which may cause the collected impurities to flow out again. To address this point.

[0038] The inner ring of the collection shell 9 is fitted with a sealing ring 10. The sealing ring 10 has a sealing cavity 101 corresponding to the position of the leakage cavity 92. Multiple outer edges 11 are installed on the side of the sealing ring 10. A paperclip 12 is fixed on the side of the outer edge 11. The paperclip 12 has a locking opening.

[0039] The pressure sensing element 7 also includes a pressure sensing plate 702 connected to the pressure sensing plate 701. A spring plate 703 is fixed on one side of the pressure sensing plate 702. The spring plate 703 has a multi-wave structure and is made of elastic material. The side of the spring plate 703 is provided with a straight hook 704 that engages with the locking hole. The size of the overlapping wave shape of the spring plate 703 is adapted to the inner circumference of the loop clip 12.

[0040] Working principle: A sealing ring 10 is attached to the inner ring of the collecting shell 9. The sealing ring 10 has a sealing cavity 101 corresponding to the leakage cavity 92. During the static pressure balance and micro-leakage stage, the sealing ring 10 is in the initial position, and the sealing cavity 101 and the leakage cavity 92 are completely intersected. The leakage cavity 92 is blocked by the solid part of the sealing ring 10. Impurities entering the collecting shell 9 are sealed inside the shell and cannot flow out. Under the action of their own weight, they naturally settle inside the collecting shell 9, preventing impurities from flowing back to the main area of ​​the pressure-inducing cavity.

[0041] When entering the micro-pressure replenishment stage, the pressure sensing plate 701 of the pressure sensing element 7 deforms under the action of instantaneous pressure change, driving the pressure sensing plate 702 to move axially synchronously; the pressure sensing plate 702 pulls the multiple wave-shaped spring plate 703 to produce elastic displacement, and the spring plate 703 is locked with the loop clip 12 through the edge hook 704, pulling the closed ring 10 to produce a small circumferential displacement, so that the closed cavity 101 on the closed ring 10 and the leakage cavity 92 of the collection shell 9 correspond one-to-one and are connected, and the particles and crystal impurities in the pressure-inducing cavity can smoothly enter the interior of the collection shell 9 through the leakage cavity 92 to complete the collection.

[0042] After the micro-pressure replenishment is completed, the pressure chamber returns to a static pressure environment. The pressure-sensing plate 701 rebounds and resets under the action of superelasticity, and the spring plate 703 drives the sealing ring 10 back to its initial position. The leakage chamber 92 is sealed again, and the collected impurities are locked in the collection shell 9 and continue to settle. During long-term operation, the total amount of impurities in the pressure chamber can be gradually reduced by the cycle of pressure replenishment to open the collection and leakage sealing to prevent slag. This reduces the damage to the isolation diaphragm 403 caused by particle wear, crystallization extrusion and media retention from the source, and significantly improves the service life and detection stability of the sensor under non-clean media conditions.

[0043] Furthermore, in order to enhance the collection function, a blocking ring 13 is provided inside the collection shell 9. The cross-section of the blocking ring 13 is a ring structure with progressively increasing steps. A convex blocking arc 14 that passes through the leakage cavity 92 is installed on the blocking ring 13. The convex blocking arc 14 is an arc-shaped structure used for guidance.

[0044] The multiple steps of the barrier ring 13 help reduce the outflow of impurities, while the arc design of the convex barrier arc 14 can guide impurities in.

[0045] The embodiments disclosed in this invention are preferred embodiments, but are not limited thereto. Those skilled in the art can easily understand the spirit of this invention based on the above embodiments and make different extensions and variations, but as long as they do not depart from the spirit of this invention, they are all within the protection scope of this invention.

Claims

1. A differential pressure sensor based on an integrated resonant structure, characterized in that, It includes a display output unit (1), a housing protection component (2) and a signal processing module (3), with a sensing and detection unit (4) located below the signal processing module (3); The sensing and detection unit (4) includes a central base (401) connected to the outer casing protection assembly (2). A central diaphragm (402) is provided at the center of the central base (401). A resonant beam is provided on the central diaphragm (402). Isolation diaphragms (403) are provided on both sides of the central diaphragm (402). A pressure transmitting medium is provided on one side of the isolation diaphragm (403). A clamping plate (404) is provided on both sides of the central base (401). The area between the clamping plate (404) and the isolation diaphragm (403) is provided as a pressure-inducing cavity. A dispersing structure (5) is provided on the side of the pressure-inducing cavity near the isolation diaphragm (403). The dispersing structure (5) includes a dispersing component (51) that uses a small amount of pressure as power. The dispersing component (51) consists of an annular shell (511) and a plurality of spiral fan blades (512) fixed to the annular shell (511). The annular shell (511) has a fan blade bushing (502) connected to the spiral fan blades (512) at its center. The inner circumference of the fan blade bushing (502) is provided with an auxiliary structure (6) that drives the dispersing component (51) to rotate in a spiral concave-convex manner. At least one pressure sensor (7) is provided on one side of the auxiliary structure (6). The pressure sensor (7) includes a pressure-sensitive plate (701) for pushing the auxiliary structure (6) to move. The pressure-sensitive plate (701) is made of a material that can deform when a small amount of pressure is applied.

2. The differential pressure sensor based on an integrated resonant structure according to claim 1, characterized in that, The outer periphery of the ring shell (511) is provided with a positioning sleeve (513) fixed to the pressure chamber. The outer periphery of the ring shell (511) is provided with an annular groove with an annular trajectory. Multiple positioning rods (514) are slidably limited in the annular groove. The other end of the positioning rod (514) is connected to the positioning sleeve (513).

3. A differential pressure sensor based on an integrated resonant structure according to claim 2, characterized in that, The auxiliary structure (6) includes a one-way bearing (601). The outer ring of the one-way bearing (601) is fixed to the inner circumference of the fan blade bushing (502). The inner ring of the one-way bearing (601) is integrally formed with multiple curved balls (602). The inner ring of the one-way bearing (601) is provided with a protrusion (603). The outer circumference of the protrusion (603) is provided with a curved groove (604) of the same size as the curved ball (602). A limiting plate (605) is fixed on one side of the curved groove (604). A fixing plate (606) is provided on one side of the limiting plate (605) and is fixed to the central base (401). A through-pin (607) that passes through the fixing plate (606) and is not cylindrical is connected to the center of the limiting plate (605).

4. A differential pressure sensor based on an integrated resonant structure according to claim 3, characterized in that, The pressure-sensitive plate (701) has a wavy structure, and its two ends are connected to the fixing plate (606) and the limiting plate (605) respectively.

5. A differential pressure sensor based on an integrated resonant structure according to claim 4, characterized in that, The distance between the spiral fan blades (512) and the isolation diaphragm (403) is smaller than the distance between the annular shell (511) and the isolation diaphragm (403), and the annular shell (511) has an integrally formed side guide arc (5111) on the side close to the isolation diaphragm (403). The outer ring of the annular shell (511) is provided with a first outer guide arc (5112) with a gradually changing arc. The inner ring of the positioning sleeve (513) has an integrally formed second outer guide arc (5131). A guide narrow channel is formed between the second outer guide arc (5131) and the first outer guide arc (5112). Multiple inclined spiral fan blades (8) are fixed on the first outer guide arc (5112).

6. A differential pressure sensor based on an integrated resonant structure according to claim 5, characterized in that, A collection shell (9) is provided on one side of the guide narrow channel, and an annular outer baffle ring (91) extends from one side of the collection shell (9). Multiple leakage cavities (92) are provided on the collection shell (9).

7. A differential pressure sensor based on an integrated resonant structure according to claim 6, characterized in that, The inner ring of the collection shell (9) is fitted with a sealing ring (10), the sealing ring (10) has a sealing cavity (101) corresponding to the position of the leakage cavity (92), the sealing ring (10) has multiple outer edges (11) installed on the side, the outer edges (11) are fixed with a paperclip (12), and the paperclip (12) has a locking opening.

8. A differential pressure sensor based on an integrated resonant structure according to claim 7, characterized in that, The pressure sensing element (7) also includes a pressure sensing plate (702) connected to the pressure sensing plate (701). A spring plate (703) is fixed on one side of the pressure sensing plate (702). The spring plate (703) has a multi-wave structure and is made of elastic material. The side of the spring plate (703) is provided with a straight hook (704) that engages with the locking hole. The size of the overlapping wave shape of the spring plate (703) is adapted to the inner circumference of the loop clip (12).

9. A differential pressure sensor based on an integrated resonant structure according to claim 8, characterized in that, The collection shell (9) is provided with a blocking step ring (13) inside. The cross section of the blocking step ring (13) is a ring structure with progressively increasing steps. A convex blocking arc (14) that passes through the leakage cavity (92) is installed on the blocking step ring (13).

10. A differential pressure sensor based on an integrated resonant structure according to any one of claims 1-9, characterized in that, The clamp (404) is equipped with a pressure tap (405) that connects to the pressure chamber, and the clamp (404) is arranged at an angle.

Images