基于内共振的机械耦合MEMS谐振加速度计及其检测方法
The mechanically coupled MEMS resonant accelerometer, which utilizes the internal resonance to excite the mechanical frequency lock-in (MFL) phenomenon, solves the problems of insufficient sensitivity and frequency stability of MEMS resonant accelerometers, and achieves high-resolution and robust acceleration detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANDONG UNIV OF TECH
- Filing Date
- 2026-05-18
- Publication Date
- 2026-07-17
AI Technical Summary
Existing MEMS resonant accelerometers have limited sensitivity, poor frequency stability, and insufficient robustness, making it difficult to effectively improve their resolution and detection accuracy using traditional methods.
A mechanically coupled MEMS resonant accelerometer based on internal resonance is adopted. The mechanical frequency lock (MFL) phenomenon is excited by 1:1 internal resonance. By using a movable mass block and force amplification lever, combined with driving electrodes, detection electrodes and stiffness adjustment electrodes, energy exchange and frequency lock between resonant beams are realized, thereby improving detection resolution and robustness.
It effectively suppresses Allen bias at the resonant frequency, improves the minimum resolution of the accelerometer to 3.7µg, enhances the ability to detect weak acceleration signals, overcomes the influence of nonlinear vibration, and achieves synergistic optimization of sensitivity and stability.
Smart Images
Figure CN122193629B_ABST