台阶型耦合锗电吸收调制器

By employing a stepped coupling structure and a gradient intrinsic region design in the germanium electroabsorption modulator, the problems of unreasonable silicon transition layer height design and fixed intrinsic region width are solved, achieving synergistic optimization of extinction ratio and insertion loss and bandwidth improvement.

CN122194509BActive Publication Date: 2026-07-17ANHUI UNIV

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ANHUI UNIV
Filing Date
2026-05-18
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing germanium electroabsorption modulators suffer from poor silicon transition layer height design, making it difficult to optimize extinction ratio and insertion loss in a coordinated manner. Furthermore, the fixed intrinsic region width makes it impossible to simultaneously suppress space charge effects and maintain high bandwidth.

Method used

A stepped coupling structure is adopted. By connecting silicon tape structures to both ends of the germanium absorption layer, the height of the silicon tape structure is optimized so that the optical mode field gradually shifts to the germanium absorption layer. A gradient intrinsic region is set at the bottom of the germanium absorption layer, with its width gradually increasing along the light propagation direction. This enhances the electric field at the incident end, weakens the space charge effect, and reduces the junction capacitance at the output end.

Benefits of technology

It achieves a significant improvement in extinction ratio while maintaining low insertion loss, balancing high extinction ratio and high bandwidth, thus optimizing device performance.

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Abstract

本发明提供了台阶型耦合锗电吸收调制器,属于硅基光电子器件领域,包括自下而上依次堆叠的硅衬底层、硅氧化下包层、薄硅层、硅氧化上包层、金属电极,锗吸收层位于薄硅层和硅氧化上包层之间,金属电极通过通孔结构连接于薄硅层,锗吸收层的两端分别连接有硅Taper结构,硅Taper结构位于薄硅层上且硅Taper结构的高度大于锗吸收层露出薄硅层部分的高度,薄硅层中P型掺杂区与N型掺杂区之间为渐变本征区,渐变本征区位于锗吸收层的正下方,渐变本征区的宽度沿光的入射端到光的出射端的逐渐增大;解决硅过渡层高度设计不合理而导致的消光比与插入损耗难以协同优化的问题,以及本征区宽度沿传播方向固定,无法同时抑制空间电荷效应和保持带宽需求的问题。
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