一种Ⅱ类超晶格中波红外探测器及其制作方法
By employing a fabrication method for a type II superlattice mid-wave infrared detector, and utilizing techniques such as deep isolation trench physical blocking, gradient doping, and integrated metallization, the crosstalk and leakage problems of mid-wave infrared multi-element detectors in the railway field have been solved, improving the accuracy and reliability of the device and meeting the application requirements of the railway environment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 山西创芯光电科技有限公司
- Filing Date
- 2026-05-18
- Publication Date
- 2026-07-17
AI Technical Summary
Existing mid-wave infrared multi-element detectors have problems in railway applications, such as difficulty in effectively suppressing electrical crosstalk between multiple pixels, large leakage current on the device surface, and poor process adaptability, which affect their accuracy and reliability in railway fault diagnosis.
The fabrication method of a type II superlattice mid-wave infrared detector is adopted, including epitaxial wafer growth, self-aligned double-layer hard mask preparation, step-by-step dry etching, composite passivation layer deposition and integrated metallization. Through physical blocking of deep isolation trenches, gradient doping of absorption regions and shorting of PN junctions in invalid regions, combined with precise etching and surface treatment, a three-layer stepped mesa structure and a composite passivation layer are formed.
It effectively reduces the inter-pixel crosstalk ratio to below 0.8%, reduces dark current density by more than 50%, improves process adaptability and device yield, enhances the accuracy of rail fault diagnosis and photoelectric performance, and meets the service requirements of complex rail environments.
Smart Images
Figure CN122206004B_ABST