Support assembly, lens module and semiconductor device

Abstract

The application relates to the optical technical field and discloses a support assembly, a lens module and a semiconductor device. The support assembly comprises a first plate, a second plate and at least one connecting piece. The first plate comprises opposite first and second surfaces, and the position of the first surface is fixed. The second plate is arranged on the side of the first plate close to the second surface and is oppositely arranged with the first plate. The connecting piece is connected between the first plate and the second plate. The thermal expansion coefficient of at least one of the first plate, the second plate and the connecting piece in the thickness direction is positive, the thermal expansion coefficient of at least one of the first plate, the second plate and the connecting piece in the thickness direction is negative, and the thermal expansion coefficients of the connecting piece in the thickness direction are of the same sign. Through the combination design of the positive / negative thermal expansion coefficients, the thickness deformation amounts of the first plate, the second plate and the connecting piece can offset each other, the displacement amount of the lens mounting surface of the lens module after thermal deformation is small, the displacement amount of the lens in the thickness direction is small, and the heat-induced light beam deviation can be improved.

Description

Technical Field

[0001] This application relates to the field of optical technology, and in particular to a support component, a lens module, and a semiconductor device. Background Technology

[0002] High-power optical systems are used in industrial production and large-scale scientific facilities. These systems have strict requirements for beam pointing control; excessive beam pointing deviation will cause the beam to deviate from the target position, affecting the coupling efficiency with the target. Among the main factors causing beam pointing deviation, beam pointing deviation caused by ambient heat and the optical system's own heating (i.e., thermally induced beam pointing deviation) is characterized by its large amplitude and long period. Therefore, how to effectively improve the thermally induced beam pointing deviation of optical systems has become an urgent problem to be solved. Summary of the Invention

[0003] This application discloses a support component, a lens module, and a semiconductor device for improving thermally induced beam pointing deviation in an optical path system.

[0004] In a first aspect, embodiments of this application provide a support component, including a first plate, a second plate, and N connectors. The first plate includes a first surface and a second surface facing each other, with the first surface serving as the fixing surface of the support component. The second plate is located on the side of the first plate closer to the second surface and is disposed opposite to the first plate. The N connectors connect the first plate and the second plate, where N is a positive integer. At least one of the first plate, the second plate, and the connectors has a positive coefficient of thermal expansion along the thickness direction, and at least one of them has a negative coefficient of thermal expansion along the thickness direction. The coefficients of thermal expansion of the N connectors along the thickness direction are either all positive or all negative. The thickness direction is perpendicular to the first surface. In this embodiment, by ensuring that at least one of the first plate, the connectors, and the second plate has a positive coefficient of thermal expansion and at least one has a negative coefficient of thermal expansion, the combined design of positive and negative coefficients allows the thickness deformation of the first plate, the second plate, and the connectors after heating to partially cancel each other out, resulting in a smaller displacement of the surface of the second plate facing away from the first plate after the lens module undergoes thermal deformation. By configuring the signs of the thermal expansion coefficients of all connectors to be the same—either all positive or all negative—the deformation directions of each connector and the first plate are either the same or different. This arrangement makes it easier to ensure that the surface of the second plate facing away from the first plate does not undergo changes in position or orientation. Consequently, the displacement along the thickness direction of the lens mounted on the surface of the second plate facing away from the first plate at each connector is smaller. This results in less deviation in the direction of the emitted beam, making the beam more stable and thus helping to improve thermally induced beam deflection.

[0005] In one possible implementation, the first plate has a first initial thickness d at the i-th connector. 1iThe second plate has a first thermal expansion coefficient a1 along the thickness direction; the second plate has a second initial thickness d at the i-th connector. 2i And a2, a second coefficient of thermal expansion along the thickness direction; the i-th connector among the N connectors has a third initial thickness d along the thickness direction. 3i and the third coefficient of thermal expansion along the thickness direction, a 3i The first plate, the second plate, and the i-th connector among the N connectors satisfy the following relationship: |d 1i a1+d 2i a2+d 3i a 3i |≤thr i Where 1≤i≤N,thr i Let be the i-th threshold, and let thr be the i-th threshold. i Greater than or equal to 0, and less than or equal to the first absolute value |d 1i a1|、Second absolute value|d 2i a2|and the third absolute value|d 3i a 3i The maximum value in |.

[0006] In this embodiment, the position of the first surface is fixed, while the second surface is not constrained. Therefore, when the support assembly is heated, the first plate can expand upwards or contract downwards as a whole, and the second surface will not bend or deform, thus meeting the corresponding product requirements. In this embodiment, the above relationship can be equivalent to: |d 1i a1 ΔT +d 2i a2 ΔT +d 3i a 3i ΔT |≤thr i ΔT, where ΔT represents the temperature increment of the environment in which the supporting component is located. The left side of the inequality in this relationship is the absolute value of the algebraic sum of the thickness deformation of the first plate at the i-th connector, the thickness deformation of the second plate at the i-th connector, and the thickness deformation of the i-th connector, which is also the absolute value of the displacement along the thickness direction of the surface of the second plate facing away from the first plate at the i-th connector. This algebraic sum or displacement can be positive or negative. The right side of the inequality in this relationship is the product of the i-th threshold thri and the temperature increment ΔT, which is the i-th thickness deformation threshold. The i-th thickness deformation threshold is set to not exceed the maximum value among the absolute values ​​of the thickness deformation of the first plate at the i-th connector, the absolute values ​​of the thickness deformation of the second plate at the i-th connector, and the absolute values ​​of the thickness deformation of the i-th connector. The meaning of this first relation is: by ensuring that at least one of the three components—the first plate, the second plate, and the i-th connector—has a positive coefficient of thermal expansion and at least one has a negative coefficient of thermal expansion, that is, through the combined design of the positive / negative coefficients of the first plate, the second plate, and the i-th connector, at least one component's thermal expansion direction is opposite to the thermal expansion direction of the component with the largest absolute value of deformation. This results in the absolute value of the thickness deformation formed by the first plate, the second plate, and the i-th connector at the position of the i-th connector (i.e., the absolute value of the displacement of the surface of the second plate facing away from the first plate) being less than the absolute value of the largest thickness deformation among the three components. This reduces the displacement of the lens along the thickness direction at the i-th connector, resulting in a smaller deviation in the direction of the emitted beam and a more stable beam, thus improving thermally induced beam deflection. In this embodiment, some i from 1 to N may satisfy this relation, or each i may satisfy this relation.

[0007] In one possible implementation, the N connectors include a first connector, a second connector, and a third connector. The first, second, and third connectors are arranged in pairs at intervals, and their projections onto the first plate are not collinear along the thickness direction of the first plate. In this embodiment, the three connectors together form a stable triangular support structure. This structure effectively disperses and transfers loads (such as pressure, tension, or torsion) from different directions on the second plate to the first plate through the three connection points, thereby significantly reducing stress concentration at individual connection points. The structural design of this triangularly arranged connector, through its inherent geometric stability, enables the connection between the first and second plates to exhibit higher rigidity and stronger resistance to deformation under complex working conditions, achieving a more reliable and durable connection.

[0008] In one possible implementation, the first plate has a uniform thickness, and / or the second plate has a uniform thickness. In this embodiment, the uniform thickness of the first and second plates simplifies the design, manufacturing, and assembly processes of the support assembly, and allows for a more uniform initial thickness d at each connector. 1i Second initial thickness d 2i The same principle applies, which helps to simplify the design and solution process of the thermal deformation equation.

[0009] In one possible implementation, the third initial thickness of each connector is the same, and / or the third coefficient of thermal expansion of each connector is the same. In this implementation, by limiting the initial height and coefficient of thermal expansion of each connector to be the same, the design, manufacturing, and assembly processes of the support assembly can be simplified, and the design and processing costs of the parts can be reduced. In addition, using uniform connector parameters helps to simplify the design and solution process of the thermal deformation equation, and also makes the thermodynamic behavior of each connector consistent, thereby improving the reliability and stability of thermal compensation.

[0010] In one possible implementation, when the first plate is not fixed, the first plate has a uniform thickness along its thickness direction, and has a first initial thickness d1 and a first coefficient of thermal expansion a1 along its thickness direction. The second surface is provided with a first fixing part and a second fixing part spaced apart, which are used to fix the second surface. The first fixing part and the second fixing part are located on both sides of a first plane and are symmetrical about the first plane, wherein the first plane is perpendicular to the first surface. The second plate has a second initial thickness d at the i-th connector. 2i And a2, a second coefficient of thermal expansion along the thickness direction. The i-th connector among the N connectors has a third initial thickness d along the thickness direction. 3i and the third coefficient of thermal expansion along the thickness direction, a 3i Where N≥2, 1≤i≤N. The first plate, the second plate, and the i-th connector among the N connectors satisfy the following relationship: |2 d1 a1 [(L r -L i ) / L r ] +d 2i a2+d 3i a 3i |≤thr i , where L r L is the first reference distance between the first fixed part and the first plane. i The second reference distance between the i-th connector and the first plane is thr i Let be the i-th threshold, and let thr be the i-th threshold.i Less than or equal to the fourth absolute value |2 d1 a1 [(L r -L i ) / L r |、Second absolute value|d 2i a2|and the third absolute value|d 3i a 3i The maximum value in |. In this embodiment, the second surface of the first plate has multiple fixing parts, which are used to fix the second surface, thus improving the firmness and reliability of the first plate and meeting the corresponding product requirements. In this embodiment, the above relationship can be equivalent to: |2 d1 a1 ΔT [(Lr-Li) / Lr] +d2i a2 ΔT+d3i a3i ΔT|≤thri ΔT, where ΔT represents the temperature increment of the environment in which the supporting component is located. The left side of the inequality in this relationship is the absolute value of the algebraic sum of the thickness deformation of the first plate at the i-th connector, the thickness deformation of the second plate at the i-th connector, and the thickness deformation of the i-th connector, which is also the absolute value of the displacement along the thickness direction of the surface of the second plate facing away from the first plate at the i-th connector. This algebraic sum or displacement can be positive or negative. The right side of the inequality in this relationship is the product of the i-th threshold thri and the temperature increment ΔT, which is the i-th thickness deformation threshold. The i-th thickness deformation threshold is set to not exceed the maximum value among the absolute values ​​of the thickness deformation of the first plate at the i-th connector, the absolute values ​​of the thickness deformation of the second plate at the i-th connector, and the absolute values ​​of the thickness deformation of the i-th connector. The meaning of the first relation is: by making at least one of the three components (the first plate, the second plate, and the i-th connector) have a positive coefficient of thermal expansion and at least one has a negative coefficient of thermal expansion, that is, by combining the positive and negative coefficients of thermal expansion of the first plate, the second plate, and the i-th connector, at least one component has a thermal expansion direction opposite to that of the component with the largest absolute value of deformation. This makes the absolute value of the thickness deformation formed by the first plate, the second plate, and the i-th connector at the position of the i-th connector (i.e., the absolute value of the displacement of the surface of the second plate facing away from the first plate) less than the absolute value of the largest thickness deformation among the three components. This reduces the displacement of the lens along the thickness direction at the i-th connector, resulting in a smaller deviation in the direction of the emitted beam and a more stable beam, which is beneficial for improving thermal beam deviation.

[0011] In one possible implementation, the first fixing part includes one or more first through holes, and the second fixing part includes one or more second through holes. In this embodiment, the above design can define the implementation method of the first fixing part and the second fixing part to meet product requirements. Thus, mechanical connectors such as screws can be used to fix the second surface through the through holes, making the fixation of the second surface more secure and reliable.

[0012] In one possible implementation, the i-th threshold thr i The threshold value is zero. In this embodiment, by making the i-th threshold thri equal to 0, the displacement of the lens along the thickness direction at each connector is zero, thereby ensuring a more stable beam direction and significantly improving thermally induced beam deflection. Furthermore, by making the displacement of the surface of the second plate facing away from the first plate along the thickness direction at each connector zero, the bending deformation of the surface of the second plate facing away from the first plate can also be improved, thereby reducing the risk of angular deflection of the lens and further improving thermally induced beam deflection.

[0013] In one possible implementation, the first plate, the second plate, and the j-th and (j+1)-th connectors among the N connectors satisfy the following relationship: d 2j +d 3j =d 2（j+1） +d 3（j+1） , where d 2j Let d be the second initial thickness of the second plate at the j-th connector. 3j Let be the third initial thickness of the j-th connector, where j is an integer, 1 ≤ j ≤ N-1. In this embodiment, by ensuring that the support assembly satisfies this relationship, it can be guaranteed that under normal temperature conditions (e.g., ambient temperature of 25°C), the surface of the second plate facing away from the first plate is itself a plane parallel to the first plate, and the two are not relatively inclined. Combined with the principle of thermal deformation, this means that throughout the entire process of the support assembly from room temperature to operating temperature, the surface of the second plate facing away from the first plate can maintain a high degree of positional consistency, which simplifies the design and solution process of the thermal deformation equation and facilitates obtaining the parameters of each component that meet the product requirements.

[0014] In one possible implementation, the first fixing part includes a plurality of first through holes arranged sequentially along a direction parallel to the first plane, and the second fixing part includes a plurality of second through holes arranged sequentially along a direction parallel to the first plane. In this implementation, by fixing the first plane on both sides of the second surface at multiple points along a direction parallel to the first plane, the thermal expansion and bending of the first plate can be limited in a direction symmetrical about the first plane, which is beneficial for obtaining parameters of each component that meet the needs of the product.

[0015] In one possible implementation, the N connectors include a first connector, a second connector, and a third connector. The first and second connectors are symmetrical about a first plane, and the third connector is penetrated by the first plane. "The third connector is penetrated by the first plane" can mean that the center of the third connector is penetrated by the first plane, or that any position of the third connector off-center is penetrated by the first plane. In this implementation, by making the first and second connectors symmetrically arranged, it is beneficial to reduce assembly errors of the support assembly and to maintain a symmetrical deformation mode of the second plate when heated, which is beneficial to the stability of the beam direction. The third connector being penetrated by the first plane not only makes the three connectors triangularly distributed to achieve better support for the second plate, but also makes the layout shape of the three connectors symmetrical about the first plane, which is beneficial to make the force on the second plate more uniform. In one possible implementation, the first thermal expansion coefficient a1 and the second thermal expansion coefficient a2 are both positive values, and the third thermal expansion coefficient a... 3i The value is negative. In this embodiment, by making the first thermal expansion coefficient a1 and the second thermal expansion coefficient a2 both positive, the third thermal expansion coefficient a... 3iA negative value allows smaller connectors to use materials with a negative thermal expansion coefficient (NTE), while the larger first and second plates can use materials with a positive thermal expansion coefficient. This reduces the amount of expensive NTE material used, thereby helping to reduce the production cost of the support components.

[0016] In one possible implementation, the first thermal expansion coefficient a1 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10; and / or, the second thermal expansion coefficient a2 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10. In this embodiment, by making the first thermal expansion coefficient a1 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10, which allows the first plate and the connector to be on the same order of magnitude in terms of expansion. This reduces the risk that the thermal deformation of one component will differ too much from that of other components, making it easier for the first plate, connector, and second plate to achieve thermal deformation compensation along the thickness direction. Furthermore, NTE materials generally have a low coefficient of thermal expansion; therefore, within this ratio range, the coefficient of thermal expansion of the first plate will not be too large. This makes the first plate less sensitive to temperature changes, reducing the risk that excessive thermal deformation of the first plate will affect the thermal stability of the support assembly. In this embodiment, by making the second coefficient of thermal expansion a2 and the third coefficient of thermal expansion a... 3i The absolute value of the ratio is between 0.1 and 10, which ensures that the second plate and the connector are on the same order of magnitude in terms of expansion. This reduces the risk that the thermal deformation of one component will differ significantly from that of other components, making it easier for the first plate, connector, and second plate to achieve thermal deformation compensation along the thickness direction. Furthermore, NTE materials generally have a low coefficient of thermal expansion; therefore, within this ratio range, the coefficient of thermal expansion of the second plate will not be too large. This makes the second plate less sensitive to temperature changes, reducing the risk that excessive thermal deformation of the second plate could affect the thermal stability of the support assembly.

[0017] In one possible implementation, N ≥ 2, and the thermal expansion coefficients of all the connectors have the same sign. In this implementation, the first plate has the same thermal expansion coefficient (first thermal expansion coefficient) at different connectors, and its deformation direction at different connectors is the same, while the deformation amount may be the same or different. The second plate has the same thermal expansion coefficient (second thermal expansion coefficient) at different connectors, and the second plate is a free element, therefore its deformation direction and deformation amount at different connectors are the same. If the thermal expansion coefficients of different connectors have different signs, the deformation amount of the surface of the second plate away from the first plate at the connectors with different thermal expansion coefficients will also be different, because one of the two connectors with different thermal expansion coefficients has the same deformation direction as the first plate, and the other has a different deformation direction than the second plate. In contrast, in this embodiment, the signs of the thermal expansion coefficients of each connector are configured to be the same, that is, all are positive thermal expansion coefficients or all are negative thermal expansion coefficients. Therefore, the deformation directions of each connector and the first plate are the same or different. This setting makes it easier to ensure that the second plate does not undergo changes in position or orientation on the surface away from the first plate, thereby making it more convenient to solve for the initial thickness and thermal expansion coefficients of the first plate, the second plate and each connector.

[0018] Secondly, embodiments of this application provide a lens module, including a lens and any of the support components provided in the first aspect. The lens is fixed to the side of a second plate facing away from the first plate. In this embodiment, the lens is mounted on any of the aforementioned support components. The position and angle of the lens mounting surface in the thickness direction are passively adjusted by the support components at different temperatures. This eliminates the need for a complex mechanical control system, resulting in a simple structure and a good improvement in beam pointing deviation.

[0019] Thirdly, embodiments of this application provide a semiconductor device including a light source and a lens module provided in the second aspect, wherein the light source is used to emit light toward the lens. In embodiments of this application, by configuring the aforementioned lens module in the semiconductor device, the thermally induced beam pointing deviation of the light beam emitted by the light source can be improved, thereby enhancing the processing or measurement precision of the semiconductor device. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a structural block diagram of a semiconductor device in one embodiment of this application; Figure 2 This is a three-dimensional structural diagram of the lens module in the first embodiment; Figure 3 for Figure 2 A cross-sectional structural diagram of the lens module in the image; Figure 4 for Figure 3 A cross-sectional view of the supporting components; Figure 5 This is a top view of the structure of the first plate and the connector; Figure 6 A cross-sectional view of the supporting component after thermal deformation; Figure 7 This is a cross-sectional view of the support components and mechanical connectors in the second embodiment; Figure 8 for Figure 7 A top view of the first plate, connectors, and mechanical connectors in the middle. Figure 9 This is a top view of the first plate, connector, and mechanical connector in another embodiment; Figure 10 A cross-sectional view of the supporting component after thermal deformation; Figure 11 This is a schematic diagram illustrating the calculation principle of the thermal deformation of the first plate.

[0022] Explanation of reference numerals in the attached figures: 1-Semiconductor equipment; 10 - Optical path system; 20 - Mounting bracket; 11-Light source; 12-Lens Module; 121-Lens; 1211 - Reflective surface; 122 - Support components; 1221 - First plate; 12211 - First surface; 12212 - Second surface; 12213 - Symmetry plane; 12214 - First plane; 12215 - Second plane; 1222 - Second side; 12221 - Third side; 12222 - Fourth side; 1223 - Connector; 12231 - First connector; 12232 - Second connector; 12233 - Third connector; 1224 - First fixing part; 12241 - First through hole; 1225 - Second fixing part; 12251 - Second through hole; 13-lens; 14-Mechanical connectors; 2-Workpiece; d1 - the initial thickness of the first plate; d 11- The first initial thickness of the first plate at the first connector; d 12 - The first initial thickness of the first plate at the second connector; d 13 - The first initial thickness of the first plate at the third connector; d 21 - The second initial thickness of the second plate at the first connector; d 22 - The second initial thickness of the second plate at the second connection; d 23 - The second initial thickness of the second plate at the third connector; d 31 - The third initial thickness of the first connector; d 32 - The third initial thickness of the second connector; d 33 - The third initial thickness of the third connector; L r L1 - First reference distance from the first fixing part or the second fixing part to the first plane; L2 - Second reference distance from the first connector to the first plane; L3 - Second reference distance from the second connector to the first plane; L4 - Second reference distance from the third connector to the first plane; h m - The thickness deformation of the fixed plate when the second surface of the fixed plate is unconstrained; h n - When the fixed plate has multiple fixing parts, the thickness deformation at the first plane of the fixed plate; h1- When the fixed plate has multiple fixing parts, the thickness deformation at the first connecting member of the fixed plate; h2- When the fixed plate has multiple fixing parts, the thickness deformation at the second connecting member of the fixed plate; h3- When the fixed plate has multiple fixing parts, the thickness deformation at the third connecting member of the fixed plate. Detailed Implementation

[0023] This application provides an industrial device that may include an optical path system for performing processes or operations on a workpiece. This industrial device includes, but is not limited to, semiconductor equipment, processing equipment, large scientific facilities, and measurement equipment. For example, it can be used for photoreactive deposition, optical inspection, etc.

[0024] The following description uses semiconductor equipment as an example of industrial equipment. It should be understood that this is merely an example and not a limitation on the embodiments of this application.

[0025] Figure 1 This is a structural block diagram of a semiconductor device 1 in one embodiment of this application.

[0026] like Figure 1 As shown, the semiconductor device 1 may include a mounting base 20 and an optical path system 10, the optical path system 10 being mounted on the mounting base 20.

[0027] This embodiment does not limit the structure of the fixing base 20. The fixing base 20 can be a single component or a fixing assembly composed of multiple components. For example... Figure 1 As shown, for example, the mounting base 20 can be a fixed base plate or a support platform.

[0028] The optical path system 10 can be used to output a beam that meets the required specifications. For example... Figure 1 As shown, the optical path system 10 may include a light source 11, a lens module 12, and a lens 13, etc.

[0029] like Figure 1 As shown, in one example of this embodiment, the light source 11 can be a laser source, and the light emitted by the light source 11 can be a laser. In another example of this embodiment, the light source 11 can also be a light source other than a laser source. In another embodiment, the light source 11 can be independent of the optical path system 10, and the optical path system 10 itself does not contain the light source 11.

[0030] like Figure 1 As shown, the lens module 12 can be fixed to the mounting base 20. The lenses of the lens module 12 can face the light source 11 to receive and process the light beam emitted by the light source 11. For example, the light beam emitted by the light source 11 is incident on the lens module 12 at an oblique angle of incidence and reflected by the lens module 12 to another direction. In another embodiment, the light beam emitted by the light source 11 can also be incident perpendicularly on the lens module 12; for example, a beam splitter is disposed between the light source 11 and the lens module 12. The laser emitted from the light source 11 is split into a first beam and a second beam by the beam splitter. The first beam is reflected by the beam splitter, and the second beam is transmitted through the beam splitter to the lens module 12, reflected back to the beam splitter by the lens module 12, and further reflected in a direction different from the first beam by the beam splitter. For example, the lenses of the lens module 12 can be reflectors, which can be used to reflect the light beam emitted by the light source 11. In another embodiment, the lenses of the lens module 12 can also be lenses, which can be used to refract the light beam emitted by the light source 11.

[0031] Understandable, Figure 1 The number of lens modules 12 shown is only one; this is merely an illustrative example. In another embodiment, there may be multiple lens modules 12, which can reflect or refract the light beam emitted by the light source 11 multiple times to meet corresponding product requirements.

[0032] like Figure 1 As shown, lens 13 can be used to focus the light beam from lens module 12 and project it onto workpiece 2 for processing or measurement. In another embodiment, optical path system 10 may not have lens 13, and the light beam emitted from lens module 12 can be directly projected onto workpiece 2.

[0033] During the operation of the optical path system 10, fluctuations in ambient temperature and the self-heating of the optical path system 10 can cause thermal deformation of the lens module 12. This thermal deformation causes a shift in the position and angle of the lens module 12, thereby altering the optical path and causing thermal beam pointing deviation, resulting in the emitted beam deviating from the target position. This not only reduces the stability and processing / measurement accuracy of the optical path system 10, but also seriously affects the performance and reliability of the semiconductor device 1. Therefore, this application embodiment improves the structure of the lens module 12 to mitigate thermal beam pointing deviation.

[0034] The specific structure of the lens module 12 is illustrated below.

[0035] Figure 2 This is a three-dimensional structural diagram of the lens module 12 in the first embodiment. Figure 3 for Figure 2 A schematic diagram of the AA cross-sectional structure of the lens module 12 is shown. For ease of explanation, an XYZ coordinate system can be defined, where the X-axis represents the width direction of the lens module 12, the Y-axis represents the length direction of the lens module 12, and the Z-axis represents the thickness direction of the lens module 12.

[0036] like Figure 2 and Figure 3 As shown, the lens module 12 may include a lens 121 and a support assembly 122, and the lens 121 may be fixed to the support assembly 122. The structures of the support assembly 122 and the lens 121 will be described first, and then the assembly structure of the support assembly 122 and the lens 121 will be described.

[0037] Figure 4 for Figure 3 A cross-sectional view of the support component 122. Figure 5 This is a top view of the structure of the first plate 1221 and the connector 1223.

[0038] like Figure 4 As shown, in the first embodiment, the support component 122 may include a first plate 1221, a second plate 1222, and one or more connectors 1223, for example... Figure 4 The diagram shows three connectors 1223, which can be referred to as the first connector 12231, the second connector 12232, and the third connector 12233 for easy distinction.

[0039] like Figure 4As shown, in the first embodiment, the first plate 1221 may include a first surface 12211 and a second surface 12212 facing each other. The first surface 12211 may be a fixed surface of the supporting component 122, and the second surface 12212 may be a free surface. That is, the first surface 12211 is arranged towards the structure to which the first plate 1221 is fixed, the position of the first surface 12211 is fixed, and the position of the second surface 12212 is unrestricted. The second surface 12212 may be displaced when the first plate 1221 expands or contracts due to heat. Figure 1 As shown, the first surface 12211 can be fixed to the fixing base 20.

[0040] Combination Figure 1 and Figure 4 As shown, for example, the first surface 12211 can be fixed to the fixing base 20 entirely, that is, the first surface 12211 and the fixing base 20 form a face-to-face fixed connection. For example, the first surface 12211 can be glued to the fixing base 20 entirely. In another embodiment, the first surface 12211 can also be fixed to the fixing base 20 at multiple points, that is, multiple spaced-apart positions on the first surface 12211 are fixed to the fixing base 20, while other positions are not fixedly connected to the fixing base 20. For example, multiple spaced-apart positions on the first surface 12211 can be glued to the fixing base 20, or can be fixed to the fixing base 20 by multiple pins.

[0041] like Figure 4 As shown, for example, the thickness of the first plate 1221 can be uniform, wherein the thickness direction is perpendicular to the first surface 12211, and the thickness direction can be, for example, [missing information]. Figure 4 In the Z-axis direction, "uniform thickness" means that the thickness of the first plate 1221 is consistent at different locations under normal temperature (25°C) or operating temperature. This simplifies the design, manufacturing, and assembly process of the support assembly 122. In another embodiment, the thickness distribution of the first plate 1221 may not be limited in this way; for example, the local thickness of the first plate 1221 may be greater than the thickness of other parts.

[0042] like Figure 4 As shown, the first plate 1221 may have a first coefficient of thermal expansion α1 along its thickness direction. For example, the material of the first plate 1221 may be 4J42 alloy, and the first coefficient of thermal expansion α1 may be 4.0 × 10⁻⁶. -6 / ℃. The coefficient of thermal expansion of the first plate 1221 in any direction parallel to the first surface 12211 is not limited. 4J42 is a grade in the Chinese national standard (GB / T), representing a nickel-based precision alloy with constant thermal expansion. Due to its controllable thermal expansion properties and good machinability, 4J42 alloy is widely used in semiconductor equipment. For example... Figure 4As shown, the second plate 1222 can be located on the side of the first plate 1221 near the second surface 12212 and is disposed opposite to the first plate 1221. For example, the second plate 1222 may include a third surface 12221 and a fourth surface 12222 disposed opposite to each other, wherein the third surface 12221 faces the first plate 1221 and the fourth surface 12222 faces away from the first plate 1221.

[0043] Understandable, Figure 4 The fourth surface 12222 shown is a plane, and the fourth surface 12222 is parallel to the third surface 12221. This is just an illustration. In another embodiment, the fourth surface 12222 may not be parallel to the third surface 12221, and the shape of the fourth surface 12222 is not limited.

[0044] like Figure 4 As shown, for example, the second plate 1222 can be arranged parallel to and spaced apart from the first plate 1221. Here, "parallel and spaced apart" means that the third surface 12221 of the second plate 1222 is spaced apart from the second surface 12212 of the first plate 1221, and the third surface 12221 is parallel or substantially parallel to the second surface 12212. In another embodiment, the second plate 1222 and the first plate 1221 may not be parallel.

[0045] like Figure 4 As shown, for example, the thickness of the second plate 1222 can be uniform. "Uniform thickness" means that the thickness of the second plate 1222 is consistent at different locations at room temperature (25°C) or operating temperature. This simplifies the design, manufacturing, and assembly process of the support assembly 122. In another embodiment, the thickness of the second plate 1222 may not be limited in this way.

[0046] like Figure 4 As shown, the second plate 1222 may have a second coefficient of thermal expansion a2 along its thickness direction. For example, the material of the second plate 1222 may be 4J42 alloy, and the second coefficient of thermal expansion a2 may be 4.0 × 10⁻⁶. -6 The coefficient of thermal expansion of the second plate 1222 in any direction parallel to the first surface 12211 is not limited.

[0047] like Figure 4 and Figure 5 As shown, the first connector 12231, the second connector 12232, and the third connector 12233 can all be connected between the first plate 1221 and the second plate 1222. The first connector 12231, the second connector 12232, and the third connector 12233 can be arranged in pairs at intervals. Along the thickness direction of the first plate 1221, the projections of the first connector 12231, the second connector 12232, and the third connector 12233 on the first plate 1221 are not collinear.

[0048] like Figure 4 and Figure 5 As shown, the three connectors 1223 together form a stable triangular support structure. This structure can effectively distribute and transfer loads (such as pressure, tension, or torsion) from different directions on the second plate 1222 to the first plate 1221 through the three connection points, thereby significantly reducing stress concentration at individual connection points. The triangular arrangement of the connectors 1223, through their inherent geometric stability, enables the connection between the first plate 1221 and the second plate 1222 to exhibit higher rigidity and stronger resistance to deformation under complex working conditions, achieving a more reliable and durable connection.

[0049] like Figure 4 and Figure 5 As shown, exemplarily, the first connector 12231 and the second connector 12232 can be symmetrical about the plane of symmetry 12213 of the first plate 1221, and the third connector 12233 can be passed through the plane of symmetry 12213. The plane of symmetry 12213 passes through the geometric center of the first plate 1221, and the plane of symmetry 12213 can be perpendicular to the first surface 12211. Exemplarily, the normal direction of the plane of symmetry 12213 can be along the width direction of the first plate 1221 (e.g.,...). Figure 4 and Figure 5 (in the X direction). This design allows for a more even distribution of the three connectors 1223, which helps improve the reliability of the connection between the connectors 1223 and the first plate 1221 and the second plate 1222. In another embodiment, the arrangement of the three connectors 1223 is not limited to this.

[0050] Understandable, Figure 4 The third surface 12221 of the second plate 1222 shown is a plane, and the connector 1223 is fixed to the plane. This is just an illustrative example. In another embodiment, the third surface 12221 of the second plate 1222 may be provided with a plurality of grooves / protrusions corresponding to the connectors 1223, and each connector 1223 may be fixed in one groove / protrusion.

[0051] Understandable, Figure 4 and Figure 5 The number of connectors 1223 shown is three, and the three connectors 1223 form a triangular support structure. This is only an illustrative example and is not intended to limit the scope of this embodiment. For example, in this embodiment, the number of connectors 1223 can be N, where N is a positive integer, such as N=1, 2, 3, 4, 5... When the number of connectors 1223 is one, the volume of connector 1223 can be larger to provide sufficient support area and support force.

[0052] The following explanation will continue with the example of three connectors 1223.

[0053] In this application embodiment, the initial thickness of a component refers to the thickness of the component under normal temperature conditions (e.g., ambient temperature of 25°C) or under conditions where no thermal expansion has occurred.

[0054] like Figure 4 As shown, the i-th connector among the N connectors 1223 can have a third initial thickness d. 3i and the third coefficient of thermal expansion along the thickness direction, a 3i For example, the first connector 12231 may have a third initial thickness d. 31 and the third coefficient of thermal expansion along the thickness direction, a 31 The second connector 12232 may have a third initial thickness d. 32 and the third coefficient of thermal expansion along the thickness direction, a 32 The third connector 12233 may have a third initial thickness d 33 and the third coefficient of thermal expansion along the thickness direction, a 33 .

[0055] like Figure 4 As shown, for example, the third initial thickness d corresponding to each connector 1223 3i They can be the same, for example, the third initial thickness d of the first connector 12231 31 The third initial thickness d of the second connector 12232 32 The third initial thickness d of the third connector 12233 33 The initial thicknesses of the connectors 1223 can be the same. By limiting the initial thickness of each connector 1223 to be the same, it is beneficial to simplify the design, manufacturing, and assembly process of the support assembly 122, and reduce the design and processing costs of the connectors 1223. In another embodiment, the initial thickness d of the first connector 12231 is... 31 The initial thickness d of the second connector 12232 32 The initial thickness d of the third connector 12233 33 They don't have to be exactly the same.

[0056] like Figure 4 As shown, for example, the third coefficient of thermal expansion α corresponding to each connector 1223 3i They can be the same, for example, the third coefficient of thermal expansion α. 31 The third coefficient of thermal expansion, a 32 and the third coefficient of thermal expansion a 33 They can be the same. For example, the material of each connector 1223 can be zirconium tungstate (ZrW2O8) functional ceramic, with a third thermal expansion coefficient α. 3i It can be 8.7×10 -6 Approximately / ℃. By ensuring that the coefficient of thermal expansion along the thickness direction is the same for each connector 1223, the design, manufacturing, and assembly processes of the support assembly 122 can be simplified, and the design and processing costs of the connectors 1223 can be reduced. In another embodiment, the third coefficient of thermal expansion α corresponding to each connector 1223 is... 3i They don't have to be exactly the same.

[0057] like Figure 4 As shown, in some embodiments, the third initial thickness d corresponding to each connector 1223 3i and the third coefficient of thermal expansion a 3i The fact that they can all be the same is beneficial to further simplify the design, manufacturing and assembly process of the support component 122 and reduce the design and processing costs of the connector 1223.

[0058] like Figure 4 As shown, at least one of the first plate 1221, the second plate 1222, and the N connecting parts 1223 has a positive coefficient of thermal expansion along the thickness direction, and at least one of them has a negative coefficient of thermal expansion along the thickness direction. That is, the first coefficient of thermal expansion a1, the second coefficient of thermal expansion a2, and the third coefficient of thermal expansion a... 3iAt least one of the values ​​must be positive, and at least one must be negative. It should be noted that when the support assembly 122 includes multiple connectors 1223, the signs of the third thermal expansion coefficients of the different connectors 1223 should be the same, such as all connectors 1223 having negative third thermal expansion coefficients, or all connectors 1223 having positive third thermal expansion coefficients. The first plate 1221 has the same first thermal expansion coefficient at different connectors 1223, and its deformation direction at different connectors 1223 is the same, while the deformation amount may be the same or different. The second plate 1222 has the same second thermal expansion coefficient at different connectors 1223, and the second plate 1222 is a free element; therefore, its deformation direction and deformation amount at different connectors 1223 are the same. If the thermal expansion coefficients of different connectors 1223 have different signs, the deformation of the surface of the second plate 1222 away from the first plate 1221 at the positions of connectors 1223 with different thermal expansion coefficients will also be different, because one of the two connectors 1223 with different thermal expansion coefficients has the same deformation direction as the first plate 1221, while the other has a different direction. In contrast, in this embodiment, the signs of the thermal expansion coefficients of each connector 1223 are configured to be the same, that is, both are positive thermal expansion coefficients or both are negative thermal expansion coefficients. Therefore, the deformation directions of each connector 1223 and the first plate 1221 are either the same or different. This setting makes it easier to ensure that the second plate 1222 does not undergo changes in position or orientation on the surface away from the first plate 1221, thereby making it more convenient to solve for the initial thickness and thermal expansion coefficients of the first plate 1221, the second plate 1222, and each connector 1223.

[0059] Combination Figure 3 and Figure 4 As shown, the lens 121 can be fixed to the side of the second plate 1222 of the support assembly 122 facing away from the first plate 1221, for example, it can be fixed to the fourth surface 12222 of the second plate 1222, which can also be referred to as the lens mounting surface of the support assembly 122. For example, the lens 121 can be a reflector, which can be made of a metal material with high thermal conductivity. The reflector itself is not sensitive to heat, which is beneficial for maintaining the stability of the beam direction. The lens 121 can be laid flat on the fourth surface 12222, with the reflective surface 1211 of the lens 121 facing away from the second plate 1222. In another embodiment, the lens 121 can also be a lens, which can be erected on the fourth surface 12222.

[0060] The principle of how the support component 122 improves the pointing deviation of the thermally induced beam is explained below with reference to the accompanying drawings and the parameters of each component.

[0061] Figure 6 This is a cross-sectional view of the support component 122 after thermal deformation. Figure 6The two dashed lines above and below indicate the positions of the third surface 12221 and the second surface 12212 of the support component 122 when no thermal deformation has occurred. (Combined with...) Figure 4 and Figure 6 As shown, when the support assembly 122 is heated, each component of the support assembly 122 will undergo a certain degree of thermal deformation. Since the position of the first surface 12211 of the first plate 1221 is fixed and the second surface 12212 is not constrained, the first plate 1221 can expand upward or contract downward as a whole, while the second surface 12212 will not undergo bending deformation. Since the third surface 12221 and the fourth surface 12222 of the connector 1223 and the second plate 1222 are not constrained, the connector 1223 and the second plate 1222 can expand upward or contract downward as a whole without bending deformation.

[0062] Figure 6 This illustration only shows an exemplary case of thermal deformation of the support assembly 122: the first plate 1221 and the second plate 1222 are made of materials with a positive coefficient of thermal expansion, and the connector 1223 is made of a material with a negative coefficient of thermal expansion (NTE). Under elevated temperature conditions, the first plate 1221 and the second plate 1222 increase in size due to positive thermal expansion, while the connector 1223 shrinks in size due to negative thermal expansion. This illustration does not represent any limitation on the actual materials, exact temperature changes, or final deformation of the components of the support assembly 122.

[0063] Combination Figure 4 and Figure 6 As shown, when the temperature increment is ΔT, the deformation along the thickness direction of the first plate 1221 at the i-th connector 1223 (hereinafter referred to as the thickness deformation) is d. 1i a1 ΔT, the thickness deformation of the second plate 1222 at the i-th connector 1223 is d 2i a2 ΔT, the thickness deformation of the i-th connector 1223 is d 3i a 3i ΔT. Where, d 1i Let d be the first initial thickness of the first plate 1221 at the i-th connector. 2i d represents the second initial thickness of the second plate 1222 at the i-th connector. 3i The third initial thickness is the i-th connector 1223.

[0064] like Figure 4As shown, the first plate 1221, the second plate 1222, and the i-th connector 1223 can satisfy the following relationship: |d 1i a1 ΔT +d 2i a2 ΔT +d 3i a 3i ΔT|≤thr i ΔT (first relation), where i = 1, 2, ..., N, thr i For the i-th threshold, thr i Greater than or equal to 0, and less than or equal to the first absolute value |d 1i a1|、Second absolute value|d 2i a2|and the third absolute value|d 3i a 3i The maximum value in |.

[0065] It should be noted here that d 1i d 2i d 3i and a 3i In this case, i can be between 1 and N, and d 1i d 2i d 3i and a 3i The value of i in the equation is the same, so that the deformation at the same connector 1223 can be calculated based on the polynomial on the left side of the first relation above; the same applies below, and will not be repeated.

[0066] Among them, the first thermal expansion coefficient a1 of the first plate 1221, the second thermal expansion coefficient a2 of the second plate 1222, and the third thermal expansion coefficient a of each connecting member 1223 are... 3i The initial thickness d of the first plate 1221 at the i-th connector 1223 can be determined based on the materials of the first plate 1221, the second plate 1222, and each connector 1223; 1i The second initial thickness d of the second plate 1222 at the i-th connector 1223 2i The third initial thickness d of the i-th connector 1223 3iThis can be determined based on product requirements. Those skilled in the art can set the material of each component and the thickness of each component at different locations to satisfy the first relationship. For example, the materials of the first plate 1221, the second plate 1222, and each connector 1223 can be determined first, as well as the initial thickness of the first plate 1221 and the second plate 1222 at each connector 1223, and then the initial thickness of each connector can be determined so that the support assembly 122 satisfies the first relationship.

[0067] It is understandable that ΔT in the first equation is non-zero when thermal expansion or contraction occurs. Therefore, ΔT in the first equation can be simplified to obtain the first equivalent equation as follows: |d 1i a1+d 2i a2+d 3i a 3i |≤thr i The relations that appear below can also be simplified to obtain the corresponding equivalent relations.

[0068] Combination Figure 3 , Figure 4 and Figure 6 As shown, in this embodiment, the left side of the inequality sign in the first relation is the absolute value of the algebraic sum of the thickness deformation of the first plate 1221 at the i-th connector 1223, the thickness deformation of the second plate 1222 at the i-th connector 1223, and the thickness deformation of the i-th connector 1223, which is also the absolute value of the displacement of the fourth surface 12222 at the i-th connector 1223 along the thickness direction. This algebraic sum, or the displacement, can be positive or negative. The right side of the inequality sign in the first relation is the i-th threshold thr i The product of the temperature increment ΔT is the i-th thickness deformation threshold, which is set to not exceed the maximum value among the absolute values ​​of the thickness deformation of the first plate 1221 at the i-th connector 1223, the absolute values ​​of the thickness deformation of the second plate 1222 at the i-th connector 1223, and the absolute values ​​of the thickness deformation of the i-th connector 1223.

[0069] The meaning of the first relation is: by making at least one of the three components, namely the first plate 1221, the second plate 1222, and the i-th connector 1223, have a positive coefficient of thermal expansion and at least one has a negative coefficient of thermal expansion, that is, by combining the positive / negative coefficients of thermal expansion of the first plate 1221, the second plate 1222, and the i-th connector 1223, the thermal expansion direction of at least one component is opposite to the thermal expansion direction of the component with the largest absolute value of deformation among the three components. This makes the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222, and the i-th connector 1223 at the position of the i-th connector 1223 (i.e., the absolute value of the displacement of the fourth surface 12222) less than the absolute value of the largest thickness deformation among the three components. This has the effect of reducing the displacement of the lens 121 along the thickness direction at the i-th connector 1223. This makes the direction deviation of the beam emitted by the lens 121 smaller and the beam more stable, thus helping to improve the thermal beam direction deviation.

[0070] In other embodiments, the i-th threshold thr i It can also be less than or equal to the first absolute value |d 1i a1|、Second absolute value|d 2i a2|and the third absolute value|d 3i a 3i The minimum value among the three (i.e., the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222, and the i-th connector 1223 at the position of the i-th connector 1223, i.e., the absolute value of the displacement of the fourth surface 12222) is less than the absolute value of the minimum thickness deformation among the three, thereby significantly reducing the displacement of the lens 121 along the thickness direction at the i-th connector 1223. This results in a smaller deviation in the direction of the beam emitted from the lens 121, making the beam more stable, and thus significantly improving the thermal beam direction deviation. Figure 4 As shown, exemplarily, when the support assembly 122 includes three connectors 1223, the first plate 1221, the second plate 1222, the first connector 12231, the second connector 12232, and the third connector 12233 can satisfy the following relationship: |d 11 a1 ΔT +d 21 a2 ΔT +d 31 a 31 ΔT|≤thr1 ΔT (Second relation); |d 12 a1 ΔT +d 22 a2 ΔT +d 32 a 32 ΔT|≤thr2 ΔT (Third relation); |d 13 a1 ΔT +d 23 a2 ΔT +d 33 a 33 ΔT|≤thr3 ΔT (Fourth relation).

[0071] Where, d 11 d represents the first initial thickness of the first plate 1221 at the first connector 12231. 21 d represents the second initial thickness of the second plate 1222 at the first connector 12231. 31 The third initial thickness of the first connector 12231 is given by thr1, which is a first threshold value. thr1 is greater than or equal to 0 and less than or equal to the first absolute value |d. 11 a1|、Second absolute value|d 21 a2|and the third absolute value|d 31 a 31 The maximum value in | d 12 d represents the first initial thickness of the first plate 1221 at the second connector 12232. 22 d represents the second initial thickness of the second plate 1222 at the second connector 12232. 32 The third initial thickness of the second connector 12232 is given by thr2, which is a second threshold value. thr2 is greater than or equal to 0 and less than or equal to the first absolute value |d. 12 a1|、Second absolute value|d 22 a2|and the third absolute value|d 32 a 32 The maximum value in | d 13d represents the initial thickness of the first plate 1221 at the third connector 12233. 23 d represents the second initial thickness of the second plate 1222 at the third connector 12233. 33 The third initial thickness of the third connector 12233 is given by thr3, which is the third threshold value. thr3 is greater than or equal to 0 and less than or equal to the first absolute value |d. 13 a1|、Second absolute value|d 23 a2|and the third absolute value|d 33 a 33 The maximum value in |.

[0072] Combination Figure 3 , Figure 4 and Figure 6 As shown, the left side of the inequality sign in the second relation is the absolute value of the algebraic sum of the thickness deformation of the first plate 1221 at the first connector 12231, the thickness deformation of the second plate 1222 at the first connector 12231, and the thickness deformation of the first connector 12231, which is also the absolute value of the displacement of the fourth surface 12222 at the first connector 12231 along the thickness direction. This algebraic sum or displacement can be positive or negative. The right side of the inequality sign in the first relation is the product of the first threshold thr1 and the temperature increment ΔT, which is the first thickness deformation threshold. The first thickness deformation threshold is set to not exceed the maximum value among the absolute values ​​of the thickness deformation of the first plate 1221 at the first connector 12231, the absolute values ​​of the thickness deformation of the second plate 1222 at the first connector 12231, and the absolute values ​​of the thickness deformation of the first connector 12231.

[0073] The meaning of the second relation is: by making at least one of the three components, the first plate 1221, the second plate 1222, and the first connector 12231, have a positive coefficient of thermal expansion and at least one has a negative coefficient of thermal expansion, that is, by combining the positive / negative coefficients of thermal expansion of the first plate 1221, the second plate 1222, and the first connector 12231, the thermal expansion direction of at least one component is opposite to the thermal expansion direction of the component with the largest absolute value of deformation among the three components. This makes the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222, and the first connector 12231 at the position of the first connector 12231 (i.e., the absolute value of the displacement of the fourth surface 12222) less than the absolute value of the largest thickness deformation among the three components, thereby reducing the displacement of the lens 121 along the thickness direction at the first connector 12231.

[0074] Similarly, the meaning of the third relationship is: through the combined design of the positive / negative thermal expansion coefficients of the first plate 1221, the second plate 1222 and the second connector 12232, the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222 and the first connector 12231 at the position of the second connector 12232 is less than the absolute value of the maximum thickness deformation among the above three, thereby reducing the displacement of the lens 121 along the thickness direction at the second connector 12232.

[0075] Similarly, the meaning of the fourth relation is: through the combined design of the positive / negative thermal expansion coefficients of the first plate 1221, the second plate 1222 and the third connector 12233, the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222 and the third connector 12233 at the position of the third connector 12233 is less than the absolute value of the maximum thickness deformation among the above three, thereby reducing the displacement of the lens 121 along the thickness direction at the third connector 12233.

[0076] Combination Figure 3 , Figure 4 and Figure 6 As shown, by making the support component 122 satisfy the second, third and fourth relational expressions, the displacement of the fourth surface 12222 of the lens module 12 at each connector 1223 can be small after the lens module 12 is deformed by heat. This results in a small displacement of the lens 121 at each connector 1223 along the thickness direction, which in turn results in a small deviation in the direction of the beam emitted from the lens 121 and a more stable beam. Therefore, it is beneficial to further improve the thermal beam direction deviation.

[0077] Combination Figure 3 , Figure 4 and Figure 6 As shown, for example, the i-th threshold thr i The threshold can be equal to 0; for example, the first threshold thr1, the second threshold thr2, and the third threshold thr3 can all be equal to 0. This is achieved by making the i-th threshold thr... iSetting the threshold values ​​to 0, for example, the first threshold thr1, the second threshold thr2, and the third threshold thr3 all equal to 0, ensures that the displacement of the lens 121 along the thickness direction at each connector 1223 is zero, thereby guaranteeing a more stable beam direction and significantly improving thermally induced beam direction deviation. Simultaneously, this also makes it easier to solve for the initial thickness and thermal expansion coefficient of the first plate 1221, the second plate 1222, and the connector 1223 during the design phase. Specifically, after setting the right-hand side of the aforementioned second, third, and fourth relations to zero, for each relation independently, specific values ​​can be given for three of the six physical quantities: the first initial thickness, the second initial thickness, the third initial thickness, the first thermal expansion coefficient, the second thermal expansion coefficient, and the third thermal expansion coefficient. This allows the solution for the other three physical quantities.

[0078] Combination Figure 4 and Figure 6 As shown, for example, the first thermal expansion coefficient a1 and the second thermal expansion coefficient a2 can both be positive values, and the third thermal expansion coefficient a... 3i It is a negative value, for example, the third coefficient of thermal expansion α. 31 The third coefficient of thermal expansion, a 32 and the third coefficient of thermal expansion a 33 Both can be negative. By making the first thermal expansion coefficient a1 and the second thermal expansion coefficient a2 both positive, the third thermal expansion coefficient a... 3i A negative value allows the smaller connector 1223 to use NTE material, while the larger first plate 1221 and second plate 1222 use materials with a positive coefficient of thermal expansion, reducing the amount of high-cost NTE material used, thereby helping to reduce the production cost of the support assembly 122.

[0079] Combination Figure 4 and Figure 6 As shown, for example, the first thermal expansion coefficient a1 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10. For example, the first coefficient of thermal expansion, a1, can be 8.7 × 10⁻⁶. -7 / ℃, third thermal expansion coefficient a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |=0.1; For example, the first coefficient of thermal expansion a1 can be 4.0×10 -6 / ℃, third thermal expansion coefficient a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |≈0.46; For example, the first coefficient of thermal expansion a1 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a3i It can be 4.0×10 -6 / ℃,|a1 / a 3i |≈1.89; For example, the first coefficient of thermal expansion a1 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a 3i It can be 8.7×10 -7 / ℃,|a1 / a 3i |=10. By making the first thermal expansion coefficient a1 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10, which allows the first plate 1221 and the connector 1223 to be on the same order of magnitude in terms of expansion. This reduces the risk that the thermal deformation of one component will differ too much from that of other components, making it easier for the first plate 1221, connector 1223, and second plate 1222 to achieve thermal deformation compensation along the thickness direction. Furthermore, NTE materials generally have a low coefficient of thermal expansion. Therefore, within this ratio range, the coefficient of thermal expansion of the first plate 1221 will not be too large. This makes the first plate 1221 less sensitive to temperature changes, reducing the risk that excessive thermal deformation of the first plate 1221 may affect the thermal stability of the support assembly 122.

[0080] Combination Figure 4 and Figure 6 As shown, exemplarily, the second thermal expansion coefficient a2 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10. For example, the second coefficient of thermal expansion, a2, can be 8.7 × 10⁻⁶. - 7 / ℃, third coefficient of thermal expansion a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |=0.1; For example, the second coefficient of thermal expansion a2 can be 4.0×10 -6 / ℃, third thermal expansion coefficient a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |≈0.46; For example, the second coefficient of thermal expansion a2 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a 3i It can be 4.0×10 -6 / ℃,|a1 / a 3i |≈1.89; For example, the second coefficient of thermal expansion a2 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a 3i It can be 8.7×10 -7 / ℃,|a1 / a 3i|=10. By making the second thermal expansion coefficient a2 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10, which allows the second plate 1222 and the connector 1223 to be on the same order of magnitude in terms of expansion. This reduces the risk that the thermal deformation of one component will differ too much from that of other components, making it easier for the first plate 1221, connector 1223, and second plate 1222 to achieve thermal deformation compensation along the thickness direction. Furthermore, NTE materials generally have a low coefficient of thermal expansion; therefore, within this ratio range, the coefficient of thermal expansion of the second plate 1222 will not be too large. This makes the second plate 1222 itself insensitive to temperature changes, reducing the risk that excessive thermal deformation of the second plate 1222 may affect the thermal stability of the support assembly 122.

[0081] Combination Figure 4 and Figure 6 As shown, by example, by making the thickness of the first plate 1221 uniform, the first initial thickness d of the first plate 1221 at each connector 1223 can be made uniform. 1i All of them are the same, for example, they can all be the first initial thickness d1, which is equivalent to reducing the three unknowns in the three relations from the second to the fourth relation to one unknown, which is beneficial to simplifying the design and solution process of the second to the fourth relation.

[0082] Combination Figure 4 and Figure 6 As shown, by example, by making the thickness of the second plate 1222 uniform, the second initial thickness d of the second plate 1222 at each connector 1223 can be made. 2i All of them are the same, for example, they can all be the second initial thickness d2, which is equivalent to reducing the three unknowns in the three relations from the second to the fourth relation to one unknown, which is beneficial to simplifying the design and solution process of the second to the fourth relation.

[0083] Combination Figure 4 and Figure 6 As shown, for example, by making the third initial thickness d corresponding to each connector 1223 3i The same, for example, can all be the third initial thickness d3, which is equivalent to reducing the three unknowns in the second to fourth relations to one unknown, which is beneficial to simplifying the design and solution process of the second to fourth relations.

[0084] Combination Figure 4 and Figure 6 As shown, for example, by making the third thermal expansion coefficient α corresponding to each connector 1223 3iThe coefficients are the same; for example, both can be the third thermal expansion coefficient, a3. This is equivalent to reducing the three unknowns in the second to fourth relations to a single unknown, which simplifies the design and solution process of the second to fourth relations. Combined with... Figure 4 and Figure 6 As shown, for example, by making the third initial thickness d corresponding to each connector 1223 3i and the third coefficient of thermal expansion a 3i The fact that all components are identical ensures that the thermodynamic behavior of each connector 1223 is consistent, thereby improving the reliability and stability of thermal compensation.

[0085] As described above, by setting the right-hand side of the inequalities in the second to fourth relations to zero, and by configuring the first plate 1221 and the second plate 1222 to have uniform thickness, and ensuring that the third initial thickness and third thermal expansion coefficient of each connector 1223 are the same, these three relations are equivalent to an updated second relation: |d1 a1 ΔT +d2 a2 ΔT +d3 a3 ΔT|=0 (the updated second relation).

[0086] The updated second relation includes six unknowns. Further, by providing specific design values ​​for five of these six unknowns, the remaining unknown can be solved. For example, by providing the first initial thickness d1, the first coefficient of thermal expansion a1, the second initial thickness d2, the second coefficient of thermal expansion a2, and the third coefficient of thermal expansion a3, the third initial thickness d3 of the connector 1223 can be solved, thereby obtaining the design parameters for all structures in the support assembly 122. For instance, let d1 = d2 = 4.35 mm and a1 = a2 = 4.0 × 10⁻⁶ mm. -6 / ℃、a3= 8.7×10 -6 / ℃, then d3=4mm.

[0087] Understandable, Figures 2-6In the illustrated embodiment, the second surface 12212 of the first plate 1221 is unconstrained. When the support assembly 122 is heated, the second surface 12212 of the first plate 1221 only displaces along the thickness direction without bending; this is merely an illustrative example. In another embodiment, the second surface 12212 of the first plate 1221 may have multiple fixing parts, and the first plate 1221 is fixed to the fixing base 20 by multiple fixing parts. When the support assembly 122 is heated, since the fixing parts are constrained and fixed to the fixing base 20, the second surface 12212 does not expand substantially in the thickness direction at that location. However, when thermal expansion occurs in the area of ​​the second surface 12212 outside the fixing parts, it will compensate by bending because this area will not shear through the fixing parts. That is to say, when the first plate 1221, which is partially fixed by the fixing parts, undergoes thermal expansion, the second surface 12212 will undergo thermal expansion bending, as described below with reference to the accompanying drawings.

[0088] Figure 7 This is a cross-sectional view of the support component 122 and the mechanical connector 14 in the second embodiment. Figure 8 for Figure 7 A top view of the structure of the first plate 1221, the connector 1223 and the mechanical connector 14.

[0089] like Figure 7 As shown, in the second embodiment, when the first plate 1221 is not fixed, the first plate 1221 has a uniform thickness along the thickness direction, and the first plate 1221 may have a first initial thickness d1 along the thickness direction and a first coefficient of thermal expansion a1 along the thickness direction. When the first plate 1221 is not fixed, it is at room temperature (e.g., ambient temperature of 25°C), and the environment in which the support assembly 122 is located does not experience temperature changes. That is, the thickness of the first plate 1221 is uniform before thermal expansion occurs.

[0090] like Figure 7 and Figure 8 As shown, in the second embodiment, the second surface 12212 of the first plate 1221 may be provided with a first fixing part 1224 and a second fixing part 1225 spaced apart. The first fixing part 1224 and the second fixing part 1225 are used to fix the second surface 12212, thereby fixing the first plate 1221. The first fixing part 1224 and the second fixing part 1225 are provided on both sides of the first plane 12214 and are symmetrical about the first plane 12214. The first plane 12214 may be perpendicular to the first surface 12211. For example, the normal direction of the first plane 12214 may be along the width direction of the first plate 1221 (e.g., Figure 8 (in the X direction).

[0091] like Figure 7 and Figure 8 As shown, for example, the first plane 12214 may coincide with the symmetry plane 12213 of the first plate 1221. That is, the first plane 12214 is the symmetry plane 12213 of the first plate 1221, which helps to improve the fixed symmetry and stability of the second plane 12212. In another embodiment, the first plane 12214 may not coincide with the symmetry plane 12213.

[0092] like Figure 7 and Figure 8 As shown, for example, the first fixing part 1224 and the second fixing part 1225 can be spaced apart along a first direction. The first direction is perpendicular to the thickness direction, and for example, it can be... Figure 7 and Figure 8 The X-direction in the middle.

[0093] like Figure 1 , Figure 7 and Figure 8 As shown, the first fixing part 1224 may include one or more first through holes 12241, and the second fixing part may include one or more second through holes 12251. The first through hole 12241 can penetrate both the second surface 12212 and the first surface 12211, and the second through hole 12251 can also penetrate both the second surface 12212 and the first surface 12211. In this way, mechanical connectors 14, such as screws, can be used to pass through the through holes to fix the second surface 12212 and the first surface 12211 to the fixing base 20, making the fixation of the second surface 12212 more secure and reliable.

[0094] like Figure 7 and Figure 8 As shown, exemplarily, the first fixing part 1224 may include a plurality of first through holes 12241, which may be arranged sequentially along a direction parallel to the first plane 12214; the second fixing part 1225 may include a plurality of second through holes 12251, which may be arranged sequentially along a direction parallel to the first plane 12214. Exemplarily, the first through holes 12241 and the second through holes 12251 may be arranged sequentially along a second direction, which is perpendicular or approximately perpendicular to the first direction. For example, the second direction may be... Figure 8 The Y-direction in the middle. The above design allows both sides of the first plane 12214 of the second surface 12212 to be fixed at multiple points along a direction parallel to the first plane 12214, which can limit the thermal expansion and bending of the second surface 12212 in a direction symmetrical about the first plane 12214, which is beneficial to obtaining the parameters of each component that meet the needs of the product.

[0095] like Figure 1 and Figure 9As shown, in some embodiments, there can be two first through holes 12241 and two second through holes 12251. For example, the two first through holes 12241 can be symmetrical about the second plane 12215, and the two second through holes 12251 can be symmetrical about the second plane 12215. The second plane 12215 can be perpendicular to the first plane 12214 and the first surface 12211. The mechanical connector 14 can pass through each through hole to fix the second surface 12212 and the first surface 12211 to the fixing base 20. This arrangement helps to simplify the structure of the support assembly 122 while limiting the direction of thermal expansion deformation of the second surface 12212, and ensures the reliability of fixing the second surface 12212.

[0096] Understandable, Figures 7-9 The structure and fixing method of the first fixing part 1224 and the second fixing part 1225 shown are merely illustrative examples and are not intended to limit this embodiment. In other embodiments, the first fixing part 1224 and the second fixing part 1225 may also be connecting features such as blind holes or protrusions on the second surface 12212, which can be connected to the connecting features using mechanical connectors to fix the second surface 12212 to a fixed position in the lens module 12; or, the first fixing part 1224 and the second fixing part 1225 may also be additional fasteners (such as rivets) or connecting materials (such as adhesives or solder) provided on the second surface 12212. In these cases, the first surface 12211 and the second surface 12212 are not connected by the same mechanical connector.

[0097] In this embodiment, the structure of the second plate 1222 can be referred to Figure 4 As mentioned above, it will not be repeated here. Figure 7 As shown, the second plate 1222 may have a second coefficient of thermal expansion a2 along the thickness direction.

[0098] like Figure 7 and Figure 8 As shown, the first connector 12231, the second connector 12232 and the third connector 12233 can all be connected between the first plate 1221 and the second plate 1222.

[0099] like Figure 7 and Figure 8 As shown, for example, the first connector 12231 and the second connector 12232 can be symmetrical about the first plane 12214, and the third connector 12233 can be passed through the first plane 12214. Here, "the third connector 12233 being passed through the first plane 12214" can mean that the center of the third connector 12233 is passed through the first plane 12214, or it can mean that any position of the third connector 12233 off from the center is passed through the first plane 12214.

[0100] like Figure 7 and Figure 8 As shown, by symmetrically arranging the first connector 12231 and the second connector 12232, the design of the support assembly 122 is simplified, and the second plate 1222 maintains a symmetrical deformation mode when heated, which is beneficial to the stability of the beam direction. The third connector 12233 is passed through the first plane 12214. While arranging the three connectors 1223 in a triangular distribution to achieve better support for the second plate 1222, it also makes the layout shape of the three connectors 1223 symmetrical about the first plane 12214, which is beneficial to make the second plate 1222 more evenly stressed by the three connectors 1223. In another embodiment, the arrangement of the first connector 12231, the second connector 12232 and the third connector 12233 is not limited to this. They only need to be spaced apart in pairs, and their projections on the first plate 1221 along the thickness direction are not collinear.

[0101] Understandable, Figure 7 and Figure 8 The number of connectors 1223 shown is three, and the three connectors 1223 form a triangular support structure. This is just an illustrative example. In this embodiment, the number of connectors 1223 can be N, where N is an integer and N≥2, for example, N=2, 3, 4, 5... When the number of connectors is two, the first connector 12231 and the second connector 12232 can be located on both sides of the first plane 12214, which is beneficial for providing more balanced support for the second plate 1222.

[0102] The following explanation will continue with the example of three connectors 1223.

[0103] like Figure 7 As shown, the i-th connector among the N connectors 1223 can have a third initial thickness d. 3i and the third coefficient of thermal expansion along the thickness direction, a 3i For example, the first connector 12231 may have a third initial thickness d. 31 and the third coefficient of thermal expansion along the thickness direction, a 31 The second connector 12232 may have a third initial thickness d. 32 and the third coefficient of thermal expansion along the thickness direction, a 32 The third connector 12233 may have a third initial thickness d 33 and the third coefficient of thermal expansion along the thickness direction, a 33 .

[0104] like Figure 7 As shown, for example, the third initial thickness d corresponding to each connector 1223 3iThey can be the same, or the third coefficient of thermal expansion α corresponding to each connector 1223 can be the same. 3i They can be the same. This is achieved by defining the third initial thickness d of each connector 1223. 3i Or the third coefficient of thermal expansion, a 3i Similarly, this simplifies the design, manufacturing, and assembly process of the support component 122, and reduces the design and processing costs of the connector 1223. In another embodiment, the third initial thickness d of each connector 1223... 3i The third thermal expansion coefficient α of each connector 1223 may be different or not entirely the same. 3i They can also be different or not entirely the same.

[0105] like Figure 7 As shown, at least one of the first plate 1221, the second plate 1222, and the N connecting parts 1223 has a positive coefficient of thermal expansion along the thickness direction, and at least one of them has a negative coefficient of thermal expansion along the thickness direction. That is, the first coefficient of thermal expansion a1, the second coefficient of thermal expansion a2, and the third coefficient of thermal expansion a... 3i At least one of them is positive and at least one is negative. It should be noted that when the support assembly 122 includes multiple connectors 1223, the signs of the third thermal expansion coefficients of different connectors 1223 should be the same, such as all connectors 1223 having negative thermal expansion coefficients, or all connectors 1223 having positive thermal expansion coefficients.

[0106] The principle of how the support component 122 improves the pointing deviation of the thermally induced beam is explained below with reference to the accompanying drawings and the parameters of each component.

[0107] Figure 10 This is a cross-sectional view of the support component 122 after thermal deformation. Figure 10 The two dashed lines above and below indicate the positions of the third surface 12221 and the second surface 12212 of the support component 122 when no thermal deformation has occurred. (Combined with...) Figure 8 and Figure 10 As shown, when the support assembly 122 is heated, each component of the support assembly 122 will undergo a certain degree of thermal deformation. Since the second surface 12212 is fixed at the first fixing part 1224 and the second fixing part 1225, the second surface 12212 cannot expand upwards or contract downwards at the first fixing part 1224 and the second fixing part 1225. The area between the first fixing part 1224 and the second fixing part 1225 can expand upwards or contract downwards, causing the second surface 12212 to undergo bending deformation while expanding upwards or contracting downwards. Since the third surface 12221 and the fourth surface 12222 of the connector 1223 and the second plate 1222 are not constrained, the connector 1223 and the second plate 1222 can expand upwards or contract downwards as a whole without bending deformation.

[0108] Figure 10 This illustration only shows an exemplary case of thermal deformation of the support assembly 122: the first plate 1221 and the second plate 1222 are made of materials with a positive coefficient of thermal expansion, and the connector 1223 is made of NTE material. Under elevated temperature conditions, the first plate 1221 and the second plate 1222 increase in size due to positive thermal expansion, while the connector 1223 shrinks in size due to negative thermal expansion. This illustration does not represent any limitation on the actual materials, exact temperature changes, or final deformation of the components of the support assembly 122.

[0109] Combination Figure 7 and Figure 10 As shown, when the temperature increment is ΔT, the thickness deformation of the second plate 1222 at the i-th connector 1223 is d. 2i a2 ΔT, the thickness deformation of the i-th connector 1223 is d 3i a 3i ΔT.

[0110] Figure 11 This is a schematic diagram illustrating the calculation principle of the thermal deformation of the first plate 1221. The left diagram represents the thermal deformation of the first plate 1221 when the second surface 12212 is not constrained, and the right diagram represents the thermal deformation of the first plate 1221 in this embodiment. The unshaded area represents the initial shape of the first plate 1221, and the shaded area represents the increased part after the thermal deformation of the first plate 1221.

[0111] like Figure 11 As shown, when the temperature increment is ΔT, and the second surface 12212 is unconstrained, the thickness deformation of the first plate 1221 is uniform. The thickness deformation h of the first plate 1221... m For: h m =d1 a1 ΔT, the thermal deformation area S1 of the first plate 1221 satisfies the fifth relation: S1=d1 a1 ΔT 2 L r , where L r The first reference distance is between the first fixed part 1224 and the first plane 12214.

[0112] like Figure 11As shown, when the first fixing part 1224 and the second fixing part 1225 of the second surface 12212 are constrained, the second surface 12212 undergoes thermal expansion and bending. Its bent shape is arc-shaped or approximately arc-shaped. According to the principle of small approximation, this arc shape can be approximated as a triangle. The thermal deformation area S2 of the first plate 1221 satisfies the sixth relation: S2 = h n 2 L r , where h n The thickness deformation of the first plate 1221 at the first plane 12214.

[0113] like Figure 11 As shown, when the second surface 12212 is not constrained and when the second surface 12212 is constrained by the first fixing part 1224 and the second fixing part 1225, the thermal deformation area of ​​the first plate 1221 is the same, thus the seventh relation can be obtained: S1=S2. Combining the fifth, sixth and seventh relations, we can obtain: h n =2 d1 a1 ΔT.

[0114] like Figure 11 As shown, according to the principle of similar triangles, the thickness deformation h of the first plate 1221 at the i-th connector 1223 is... i The thickness deformation h of the first plate 1221 at the first plane 12214 n It can satisfy the eighth relation: h i :h n =(L r -L i ) / L r , where L i Let h be the second reference distance between the i-th connector 1223 and the first plane 12214. Substitute h n The value is used to calculate the thickness deformation h of the first plate 1221 at the i-th connector 1223. i 2 d1 a1 ΔT [(L r -L i ) / L r )).

[0115] like Figure 11 As shown, for example, the thickness deformation h1 of the first plate 1221 at the first connector 12231 is 2. d1 a1 ΔT [(L r -L1) / L r [], where L1 is the second reference distance between the first connector 12231 and the first plane 12214; the thickness deformation h2 of the first plate 1221 at the second connector 12232 is 2 d1 a1 ΔT [(L r -L2) / L r [], where L2 is the second reference distance between the second connector 12232 and the first plane 12214; the thickness deformation h3 of the first plate 1221 at the third connector 12233 is 2. d1 a1 ΔT [(L r -L3) / L r )], where L3 is the second reference distance between the second connector 12232 and the first plane 12214.

[0116] like Figure 7 As shown, the first plate 1221, the second plate 1222, and each connecting piece 1223 can satisfy the following relationship: |2 d1 a1 ΔT [(L r -L i ) / L r ] +d 2i a2 ΔT +d 3i a 3i ΔT|≤thr i ΔT (Ninth Relation), where d1 is the first initial thickness of the first plate 1221, d 2i d represents the second initial thickness of the second plate 1222 at the i-th connector 1223. 3i For the third initial thickness of the i-th connector 1223, thr i For the i-th threshold, thr i Greater than or equal to 0, and less than or equal to the fourth absolute value |2 d1 a1 [(L r -L i ) / L r|、Second absolute value|d 2i a2|and the third absolute value|d 3i a 3i The maximum value in |. It should be noted here that d 2i d 3i a 3i and L i In this case, i can be between 1 and N, but d 2i d 3i a 3i and L i The 'i' in the equation has the same value.

[0117] Among them, the first thermal expansion coefficient a1 of the first plate 1221, the second thermal expansion coefficient a2 of the second plate 1222, and the third thermal expansion coefficient a of each connecting member 1223 are... 3i The initial thickness d1 of the first plate 1221, the second plate 1222, and each connector 1223 can be determined based on their materials; the initial thickness d1 of the first plate 1221 and the initial thickness d2 of the second plate 1222 at the i-th connector 1223 can be determined based on their materials. 2i The third initial thickness d of the i-th connector 1223 3i The first reference distance L between the first fixing part 1224 and the first plane 12214 r and the second reference distance L between each connector 1223 and the first plane 12214 i This can be determined based on product requirements. Those skilled in the art can set the materials of each component, the thickness of each component at different locations, and the distances between the first fixing part and each connector and the first plane 12214 to satisfy the ninth relation. For example, the materials of the first plate 1221, the second plate 1222, and each connector 1223, the thicknesses of the first plate 1221 and the second plate 1222 at each connector 1223, and the first reference distance L can be determined first. r Second reference distance L i Then, the thickness of each connector 1223 is determined so that the support assembly 122 satisfies the ninth relation. Combined Figure 3 , Figure 7 , Figure 10 and Figure 11As shown, in this embodiment, the left side of the inequality sign in the ninth relation is the absolute value of the algebraic sum of the thickness deformation of the first plate 1221 at the i-th connector 1223, the thickness deformation of the second plate 1222 at the i-th connector 1223, and the thickness deformation of the i-th connector 1223, which is also the absolute value of the displacement of the fourth surface 12222 at the i-th connector 1223 along the thickness direction. This algebraic sum or displacement can be positive or negative. The right side of the inequality sign in the ninth relation is the i-th threshold thr i The product of the temperature increment ΔT is the threshold value of the i-th thickness deformation. The threshold value of the i-th thickness deformation is set to not exceed the maximum value of the absolute value of the thickness deformation of the first plate 1221 at the i-th connector 1223, the absolute value of the thickness deformation of the second plate 1222 at the i-th connector 1223, and the absolute value of the thickness deformation of the i-th connector 1223.

[0118] The meaning of the ninth relation is: by making at least one of the three components, namely the first plate 1221, the second plate 1222, and the i-th connector 1223, have a positive coefficient of thermal expansion and at least one has a negative coefficient of thermal expansion, that is, by combining the positive / negative coefficients of thermal expansion of the first plate 1221, the second plate 1222, and the i-th connector 1223, the thermal expansion direction of at least one component is opposite to the thermal expansion direction of the component with the largest absolute value of deformation among the three components. This makes the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222, and the i-th connector 1223 at the position of the i-th connector 1223 (i.e., the absolute value of the displacement of the fourth surface 12222) less than the absolute value of the largest thickness deformation among the three components. This has the effect of reducing the displacement of the lens 121 along the thickness direction at the i-th connector 1223. This makes the direction deviation of the beam emitted by the lens 121 smaller and the beam more stable, thus helping to improve the thermal beam direction deviation.

[0119] like Figure 7 As shown, exemplarily, when the support component 122 includes three connectors, the first plate 1221, the second plate 1222, the first connector 12231, the second connector 12232, and the third connector 12233 can satisfy the following relationship: |2 d1 a1 ΔT [(L r -L1) / L r ] +d 21 a2 ΔT +d 31 a31 ΔT|≤thr1 ΔT (tenth relation); |2 d1 a1 ΔT [(L r -L2) / L r ] +d 22 a2 ΔT +d 32 a 32 ΔT|≤thr2 ΔT (eleventh relation); |2 d1 a1 ΔT [(L r -L3) / L r ] +d 23 a2 ΔT +d 33 a 33 ΔT|≤thr3 ΔT (the twelfth relation).

[0120] Where d1 is the first initial thickness of the first plate 1221, d 21 d represents the second initial thickness of the second plate 1222 at the first connector 12231. 31 The third initial thickness of the first connector 12231 is given by thr1, which is a first threshold value. The first threshold thr1 is greater than or equal to 0 and less than or equal to a fourth absolute value |2. d1 a1 [(L r -L1) / L r |、Second absolute value|d 21 a2|and the third absolute value|d 31 a 31 The maximum value in | d 22 d represents the second initial thickness of the second plate 1222 at the second connector 12232. 32 The third initial thickness of the second connector 12232 is given by thr2, which is a second threshold value. The second threshold thr2 is greater than or equal to 0 and less than or equal to the fourth absolute value |2. d1 a1 [(L r -L2) / L r |、Second absolute value|d 22 a2|and the third absolute value|d 32 a 32 The maximum value in | d 23 d represents the second initial thickness of the second plate 1222 at the third connector 12233. 33 The third initial thickness of the third connector 12233 is given by thr3, which is the third threshold value. The third threshold thr3 is greater than or equal to 0 and less than or equal to the fourth absolute value |2. d1 a1 [(L r -L3) / L r |、Second absolute value|d 23 a2|and the third absolute value|d 33 a 33 The maximum value in |.

[0121] Combination Figure 3 , Figure 7 , Figure 10 and Figure 11 As shown, the left side of the inequality sign in the tenth relation is the absolute value of the algebraic sum of the thickness deformation of the first plate 1221 at the first connector 12231, the thickness deformation of the second plate 1222 at the first connector 12231, and the thickness deformation of the first connector 12231, which is also the absolute value of the displacement of the fourth surface 12222 at the first connector 12231 along the thickness direction. This algebraic sum or displacement can be positive or negative. The right side of the inequality sign in the tenth relation is the product of the first threshold thr1 and the temperature increment ΔT, which is the first thickness deformation threshold. The first thickness deformation threshold is set to not exceed the maximum value among the absolute values ​​of the thickness deformation of the first plate 1221 at the first connector 12231, the absolute values ​​of the thickness deformation of the second plate 1222 at the first connector 12231, and the absolute values ​​of the thickness deformation of the first connector 12231.

[0122] The meaning of the tenth relation is: by making at least one of the three components, the first plate 1221, the second plate 1222, and the first connector 12231, have a positive coefficient of thermal expansion and at least one has a negative coefficient of thermal expansion, that is, by combining the positive / negative coefficients of thermal expansion of the first plate 1221, the second plate 1222, and the first connector 12231, the thermal expansion direction of at least one component is opposite to the thermal expansion direction of the component with the largest absolute value of deformation among the three components. This makes the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222, and the first connector 12231 at the position of the first connector 12231 (i.e., the absolute value of the displacement of the fourth surface 12222) less than the absolute value of the largest thickness deformation among the three components, thereby reducing the displacement of the lens 121 along the thickness direction at the first connector 12231.

[0123] Similarly, the meaning of the eleventh relation is: through the combined design of the positive / negative thermal expansion coefficients of the first plate 1221, the second plate 1222 and the second connector 12232, the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222 and the first connector 12231 at the position of the second connector 12232 is less than the absolute value of the maximum thickness deformation among the above three, thereby reducing the displacement of the lens 121 along the thickness direction at the second connector 12232.

[0124] Similarly, the meaning of the twelfth relation is: through the combined design of the positive / negative thermal expansion coefficients of the first plate 1221, the second plate 1222 and the third connector 12233, the absolute value of the thickness deformation formed by the first plate 1221, the second plate 1222 and the third connector 12233 at the position of the third connector 12233 is less than the absolute value of the maximum thickness deformation among the above three, thereby reducing the displacement of the lens 121 along the thickness direction at the third connector 12233.

[0125] Combination Figure 3 , Figure 7 and Figure 10 and Figure 11 As shown, by making the support component 122 satisfy the tenth, eleventh and twelfth relations, the displacement of the fourth surface 12222 of the lens module 12 at each connector 1223 is small after thermal deformation. This results in a smaller displacement of the lens 121 along the thickness direction at each connector 1223, which in turn reduces the deflection of the beam direction emitted by the lens 121 and makes the beam more stable. Therefore, it is beneficial to further improve the thermal beam direction deviation.

[0126] Combination Figure 3 , Figure 7 , Figure 10 and Figure 11As shown, for example, the i-th threshold thr i The threshold can be equal to 0; for example, the first threshold thr1, the second threshold thr2, and the third threshold thr3 can all be equal to 0. This is achieved by making the i-th threshold thr... i Setting the value to zero ensures that the displacement of lens 121 along the thickness direction at each connector 1223 is zero, thereby guaranteeing a more stable beam direction and significantly improving thermally induced beam direction deviation. Simultaneously, this makes it easier to solve for the initial thickness and thermal expansion coefficient of the first plate 1221, the second plate 1222, and the connector 1223 during the design phase. Specifically, after setting the tenth, eleventh, and twelfth relations to zero on the right-hand side of the inequality, for each relation independently, specific values ​​can be given for five of the eight physical quantities: first initial thickness, second initial thickness, third initial thickness, first thermal expansion coefficient, second thermal expansion coefficient, third thermal expansion coefficient, first reference distance, and second reference distance. This allows for the solution of the other three physical quantities. Furthermore, by ensuring that the displacement of the fourth surface 12222 along the thickness direction at each connector 1223 is zero, the bending deformation of the fourth surface 12222 can be improved, thereby reducing the risk of angular deflection of lens 121 and further improving thermally induced beam direction deviation.

[0127] Combination Figure 7 , Figure 10 and Figure 11 As shown, for example, the first plate 1221, the second plate 1222, the j-th connector 1223, and the (j+1)-th connector 1223 can satisfy the thirteenth relation: d 2j +d 3j =d 2（j+1） +d 3（j+1） , where d 2j d represents the second initial thickness of the second plate 1222 at the j-th connector 1223. 3j Let d be the third initial thickness of the j-th connector 1223. 2（j+1） d represents the second initial thickness of the second plate 1222 at the (j+1)th connector 1223. 3（j+1） Let be the third initial thickness of the (j+1)th connector 1223, where j is an integer, 1 ≤ j ≤ N-1. For example, when the support assembly 122 includes three connectors 1223, the thirteenth relation may include two sub-relations: d 21 +d 31 =d 22 +d 32 ;d 22 +d 32 =d 23 +d 33By ensuring that the support component 122 satisfies the thirteenth relation, it can be guaranteed that, at room temperature, the fourth surface 12222 of the second plate 1222 is a plane parallel to the first surface 12211, and the two are not relatively inclined. Combining the tenth to twelfth relations, this means that the fourth surface 12222 of the support component 122 maintains a high degree of positional consistency throughout the entire process from room temperature to operating temperature.

[0128] Combination Figure 7 , Figure 10 and Figure 11 As shown, for example, the first thermal expansion coefficient a1 and the second thermal expansion coefficient a2 can both be positive values, and the third thermal expansion coefficient a... 3i It is a negative value, for example, the third coefficient of thermal expansion α. 31 The third coefficient of thermal expansion, a 32 and the third coefficient of thermal expansion a 33 Both can be negative. By making the first thermal expansion coefficient a1 and the second thermal expansion coefficient a2 both positive, the third thermal expansion coefficient a... 3i A negative value allows the smaller connector 1223 to use NTE material, while the larger first plate 1221 and second plate 1222 use materials with a positive coefficient of thermal expansion, reducing the amount of high-cost NTE material used, thereby helping to reduce the production cost of the support component 122.

[0129] Combination Figure 7 , Figure 10 and Figure 11 As shown, for example, the first thermal expansion coefficient a1 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10. For example, the first coefficient of thermal expansion, a1, can be 8.7 × 10⁻⁶. -7 / ℃, third thermal expansion coefficient a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |=0.1; For example, the first coefficient of thermal expansion a1 can be 4.0×10 -6 / ℃, third thermal expansion coefficient a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |≈0.46; For example, the first coefficient of thermal expansion a1 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a 3i It can be 4.0×10 -6 / ℃,|a1 / a 3i |≈1.89; For example, the first coefficient of thermal expansion a1 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a3i It can be 8.7×10 -7 / ℃,|a1 / a 3i |=10. By making the first thermal expansion coefficient a1 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10, which ensures that the first plate 1221 and the connector 1223 are on the same order of magnitude in terms of expansion. This reduces the risk that the thermal deformation of one component will differ too much from that of other components, making it easier for the first plate 1221, connector 1223, and second plate 1222 to achieve thermal deformation compensation along the thickness direction. Furthermore, NTE materials generally have a low coefficient of thermal expansion. Therefore, within this ratio range, the coefficient of thermal expansion of the first plate 1221 will not be too large. This makes the first plate 1221 less sensitive to temperature changes, reducing the risk that excessive thermal deformation of the first plate 1221 will affect the thermal stability of the support assembly 122.

[0130] Combination Figure 7 , Figure 10 and Figure 11 As shown, exemplarily, the second coefficient of thermal expansion a2 is related to the coefficient of thermal expansion a. 3i The absolute value of the ratio is between 0.1 and 10. For example, the first coefficient of thermal expansion, a1, can be 8.7 × 10⁻⁶. -7 / ℃, third thermal expansion coefficient a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |=0.1; For example, the first coefficient of thermal expansion a1 can be 4.0×10 -6 / ℃, third thermal expansion coefficient a 3i It can be -8.7×10 -6 / ℃,|a1 / a 3i |≈0.46; For example, the first coefficient of thermal expansion a1 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a 3i It can be 4.0×10 -6 / ℃,|a1 / a 3i |≈1.89; For example, the first coefficient of thermal expansion a1 can be -8.7×10 -6 / ℃, third thermal expansion coefficient a 3i It can be 8.7×10 -7 / ℃,|a1 / a 3i |=10. By making the second thermal expansion coefficient a2 equal to the thermal expansion coefficient a 3iThe absolute value of the ratio is between 0.1 and 10, which ensures that the second plate 1222 and the connector 1223 are on the same order of magnitude in terms of expansion. This reduces the risk that the thermal deformation of one component will differ too much from that of other components, making it easier for the first plate 1221, connector 1223, and second plate 1222 to achieve thermal deformation compensation along the thickness direction. Furthermore, NTE materials generally have a low coefficient of thermal expansion; therefore, within this ratio range, the coefficient of thermal expansion of the second plate 1222 will not be too large. This makes the second plate 1222 itself insensitive to temperature changes, reducing the risk that excessive thermal deformation of the second plate 1222 may affect the thermal stability of the support assembly 122.

[0131] Combination Figure 7 , Figure 10 and Figure 11 As shown, by example, by symmetrically arranging the first connector 12231 and the second connector 12232, and having the third connector 12233 passed through the first plane 12214, the second reference distance L corresponding to the first connector 12231 and the second connector 12232 can be made possible. i Since L1=L2, the second reference distance L3 corresponding to the third connector 12233 is 0, which is equivalent to reducing the three unknowns in the tenth and twelfth relations to one unknown, which is beneficial to simplifying the design and solution process of the tenth to twelfth relations.

[0132] Combination Figure 7 , Figure 10 and Figure 11 As shown, for example, by making the third initial thickness d corresponding to each connector 1223 3i The same can be used, for example, both can be the third initial thickness d3, which is equivalent to reducing the three unknowns in the second to fourth relations to one unknown, which is beneficial to simplifying the design and solution process of the tenth to twelfth relations.

[0133] Combination Figure 7 , Figure 10 and Figure 11 As shown, for example, by making the third thermal expansion coefficient α corresponding to each connector 1223 3i If they are the same, for example, they can all be the third thermal expansion coefficient a3, which is equivalent to reducing the three unknowns in the second to fourth relations to one unknown, which is beneficial to simplifying the design and solution process of the tenth to twelfth relations.

[0134] As described above, by setting the right-hand side of the inequalities in the tenth to twelfth relations to zero, and configuring the third thermal expansion coefficient α of each connector 1223... 3iSimilarly, the second reference distance L corresponding to the first connector 12231 and the second connector 12232 is... i After the second reference distance L3 corresponding to the third connector 12233 is equal (L1=L2), the tenth to twelfth relations can be equivalent to the updated tenth to twelfth relations. Combining with the thirteenth relation, the following system of equations can be obtained: |2 d1 a1 ΔT [(L r -L1) / L r ] +d 21 a2 ΔT +d 31 a3 ΔT|=0 (updated tenth relation); |2 d1 a1 ΔT [(L r -L1) / L r ] +d 22 a2 ΔT +d 32 a3 ΔT|=0 (updated eleventh relation); |2 d1 a1 ΔT +d 23 a2 ΔT +d 33 a3 ΔT|=0 (updated twelfth relation); d 21 +d 31 =d 22 +d 32 (The first sub-relation of the thirteenth relation); d 22 +d 32 =d 23 +d 33 (The second sub-relation of the thirteenth relation); The system of equations includes 12 unknowns and 5 equations. Therefore, specific design values ​​for 7 of the 12 unknowns can be given, and the remaining 5 unknowns can then be solved. For example, the first reference distance Lr, the second reference distance L1, the first initial thickness d1, and the third initial thickness d of the third connector 12233 can be given. 33 Given the first thermal expansion coefficient a1, the second thermal expansion coefficient a2, and the third thermal expansion coefficient a3, the second initial thickness d can be determined. 21 Second initial thickness d 22 Second initial thickness d 23 Third initial thickness d 31 and the third initial thickness d 32 The solution is then performed to obtain the design parameters for all structures in the support component 122. For example, let d1 = 5 mm, d... 33 =5 mm, a1=a2=4.0×10 -6 / ℃、a3= 8.7×10 -6 / ℃, L r =5 cm, L1=4 cm, then d 21 =d 22 ≈3.3947 mm, d 31 =d 32 ≈2.4803 mm, d 23 =0.875 mm.

[0135] In a conventional approach, beam pointing is typically corrected by adjusting the position and angle of the support components using mechanical structures. However, this approach not only increases hardware and software costs but also enhances the structural complexity of the optical path system and semiconductor components. Furthermore, excessive adjustments can lead to concentrated beam energy that burns devices, posing a safety risk. Another conventional approach involves depositing a non-thermal conductive gel (NTE) film on the lens surface to control the lens's thermal deformation. However, due to lens size limitations, the NTE film thickness is typically only on the micrometer scale, and this method cannot suppress the thermal deformation of the support components, thus its effectiveness in improving beam pointing deviation is limited.

[0136] Combination Figures 1-11As shown in the embodiment of this application, by combining the positive and negative thermal expansion coefficients of the first plate 1221, the second plate 1222, and the connector 1223, the displacement of the fourth surface 12222 of the lens module 12 after thermal deformation is small, thereby reducing the displacement of the lens 121. This results in a smaller deviation in the direction of the beam emitted from the lens 121, leading to a more stable beam and thus improving thermally induced beam direction deviation. The solution in this embodiment can achieve passive adjustment of beam direction deviation without the need for a complex mechanical control system, resulting in a simple structure and a good improvement in beam direction deviation.

[0137] In the description of the embodiments in this application, unless otherwise stated, "multiple" means two or more.

[0138] The terms "first," "second," etc., are used for descriptive purposes only and should not be construed as implying or suggesting relative importance or implicitly indicating the number of technical features indicated. Features specified as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0139] In the embodiments of this application, unless otherwise stated, "connection" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. "Fixing" should also be interpreted broadly. For example, "fixing" can be direct fixing or indirect fixing through an intermediate medium.

[0140] The directional terms mentioned in the embodiments of this application, such as "upper," "lower," "front," "rear," "left," "right," "inner," "outer," "side," "top," and "bottom," are only for reference to the directions in the accompanying drawings. These directional terms are used to better and more clearly explain and understand the embodiments of this application, and are not intended to explicitly or implicitly suggest that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, etc., and therefore should not be construed as limiting the embodiments of this application.

[0141] In the description of the embodiments in this application, unless otherwise stated, "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone.

[0142] The foregoing preferred embodiments have further illustrated the objectives, technical solutions, and advantages of the present invention. It should be understood that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A support component, characterized in that, include: The first plate includes a first surface and a second surface opposite to each other, wherein the first surface is the fixing surface of the support component; The second plate is located on the side of the first plate closer to the second surface and is disposed opposite to the first plate; and, N connectors are used to connect the first plate and the second plate, where N is a positive integer; The coefficient of thermal expansion along the thickness direction of at least one of the first plate, the second plate, and the N connectors is positive, and the coefficient of thermal expansion along the thickness direction of at least one of them is negative. The coefficients of thermal expansion along the thickness direction of the N connectors are all positive or all negative, wherein the thickness direction is perpendicular to the first surface.

2. The support component according to claim 1, characterized in that, The first plate has a first initial thickness d at the i-th connector. 1i , and a first coefficient of thermal expansion a1 along the thickness direction; The second plate has a second initial thickness d at the i-th connector. 2i , and a2, a2, along the thickness direction; The i-th connector among the N connectors has a third initial thickness d along the thickness direction. 3i and the third coefficient of thermal expansion α along the thickness direction 3i ; The first plate, the second plate, and the i-th connector among the N connectors satisfy the following relationship: |d 1i a1+d 2i a2 +d 3i a 3i |≤thr i Where 1≤i≤N,thr i Let be the i-th threshold, and the i-th threshold thr i Less than or equal to the first absolute value |d 1i a1|、Second absolute value|d 2i a2|and the third absolute value|d 3i a 3i The maximum value in |.

3. The support component according to claim 2, characterized in that, The N connectors include a first connector, a second connector, and a third connector. The first connector, the second connector, and the third connector are arranged in pairs at intervals. Along the thickness direction, the projections of the first connector, the second connector, and the third connector on the first plate are not collinear.

4. The support component according to any one of claims 1 to 3, characterized in that, The first plate has a uniform thickness, and / or the second plate has a uniform thickness.

5. The support component according to any one of claims 2 to 4, characterized in that, The third initial thickness of each of the connectors is the same, and / or the third coefficient of thermal expansion of each of the connectors is the same.

6. The support component according to claim 1, characterized in that: When the first plate is not fixed, the thickness of the first plate is uniform along the thickness direction. The first plate has a first initial thickness d1 along the thickness direction and a first thermal expansion coefficient a1 along the thickness direction. The second surface is provided with a first fixing part and a second fixing part that are spaced apart. The first fixing part and the second fixing part are used to fix the second surface. The first fixing part and the second fixing part are located on both sides of the first plane and are symmetrical about the first plane. The first plane is perpendicular to the first surface. The second plate has a second initial thickness d at the i-th connector. 2i , and a2, a2, along the thickness direction; The i-th connector among the N connectors has a third initial thickness d along the thickness direction. 3i and the third coefficient of thermal expansion α along the thickness direction 3i Where N≥2, 1≤i≤N; The first plate, the second plate, and the i-th connector among the N connectors satisfy the following relationship: |2 d1 a1 [(L r -L i ) / L r ] +d 2i a2 +d 3i a 3i |≤thr i , where L r L is the first reference distance between the first fixing part and the first plane. i The second reference distance between the i-th connector and the first plane is thr i Let be the i-th threshold, and the i-th threshold thr i Less than or equal to the fourth absolute value |2 d1 a1 [(L r -L i ) / L r |、Second absolute value|d 2i a2|and the third absolute value|d 3i a 3i The maximum value in |.

7. The support component according to any one of claims 2 to 6, characterized in that, The i-th threshold thr i It equals zero.

8. The support component according to any one of claims 6 to 7, characterized in that, The first plate, the second plate, and the j-th and (j+1)-th connectors among the N connectors satisfy the following relationship: d 2j +d 3j =d 2（j+1） +d 3（j+1） , where d 2j d is the second initial thickness of the second plate at the j-th connector. 3j Let be the third initial thickness of the j-th connector, where j is an integer, 1≤j≤N-1.

9. The support component according to claim 6, characterized in that, The first fixing part includes one or more first through holes, and the second fixing part includes one or more second through holes.

10. The support component according to claim 9, characterized in that, The first fixing part includes a plurality of first through holes arranged sequentially along a direction parallel to the first plane, and the second fixing part includes a plurality of second through holes arranged sequentially along a direction parallel to the first plane.

11. The support component according to any one of claims 6 to 10, characterized in that, The N connectors include a first connector, a second connector, and a third connector. The first connector and the second connector are symmetrical about the first plane, and the third connector is passed through the first plane.

12. The support component according to any one of claims 2 to 11, characterized in that, The first thermal expansion coefficient a1 and the second thermal expansion coefficient a2 are both positive values, and the third thermal expansion coefficient a... 3i It is a negative value.

13. The support component according to claim 12, characterized in that, The first thermal expansion coefficient a1 and the third thermal expansion coefficient a 3i The absolute value of the ratio is between 0.1 and 10; And / or, the second coefficient of thermal expansion a2 and the third coefficient of thermal expansion a 3i The absolute value of the ratio is between 0.1 and 10.

14. A lens module, characterized in that, include: The lens and the support assembly according to any one of claims 1-13, wherein the lens is fixed to the side of the second plate facing away from the first plate.

15. A semiconductor device, characterized in that, include: The light source and the lens module of claim 14, wherein the light source is used to emit light toward the lens.

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