A system and method for producing electronic grade hydrogen chloride

Abstract

This invention provides a system and method for preparing electronic-grade hydrogen chloride, relating to the field of polycrystalline silicon preparation. The preparation system includes: a raw material pretreatment unit; a core reaction unit connected to the raw material pretreatment unit for catalyzing the reaction to generate hydrogen chloride in a carbon-free environment; and a product processing unit connected to the core reaction unit. All components inside the core reaction unit that come into contact with the process medium are made of corrosion-resistant metal or ceramic materials that do not contain carbon elements, and it includes at least one structured plate. The structured plate includes parallel hydrogen microchannels and chlorine microchannels, and a composite catalytic function that forms physical isolation between the hydrogen and chlorine microchannels and possesses catalytic and hydrogen atom conduction functions. This application can eliminate carbon pollution at the source, achieve an inherently safe production process, and obtain high-purity reaction products, thereby solving the long-standing purity bottleneck and safety risks in traditional processes.

Description

Technical Field

[0001] This invention relates to the field of polycrystalline silicon preparation, and more specifically, to a system and method for preparing electronic-grade hydrogen chloride. Background Technology

[0002] Polycrystalline silicon has wide applications in solar cells, semiconductor devices, and other fields. During polycrystalline silicon production, carbon is a harmful impurity that must be strictly controlled. Excessive carbon content accelerates carrier recombination in solar cells, reduces minority carrier lifetime, and directly affects cell conversion efficiency. In semiconductor devices, excessive carbon content leads to abnormal resistivity fluctuations, affecting the electrical consistency of the device. During single-crystal pulling, excessive carbon content disrupts the stability of the single-crystal interface, resulting in increased crystal pulling defects.

[0003] Hydrogen chloride synthesis is a crucial step in polysilicon production. Currently, the mainstream method for producing hydrogen chloride in the chlor-alkali industry is the direct combustion of hydrogen and chlorine, typically carried out in steel or graphite synthesis furnaces, with the reaction heat removed by jacketed cooling water. However, this traditional technology faces the following problems when upgrading to electronic-grade purity standards: 1. To resist the strong corrosiveness of chlorine and hydrogen chloride, traditional processes extensively utilize graphite equipment (such as graphite synthesis furnaces, graphite heat exchangers, and graphite falling film absorbers). Graphite materials may experience slight wear, peeling, or permeation in the high-temperature hydrogen chloride environment, introducing organic and inorganic carbon impurities into the product, failing to meet the stringent requirements of the semiconductor and photovoltaic industries for total organic carbon (TOC) and particulate matter in hydrogen chloride. 2. The combustion method carries an explosion risk during start-up, shutdown, and fluctuations in operating conditions. Furthermore, the reaction is a violently exothermic flame reaction, and uneven heat removal can easily lead to localized overheating and side reactions, affecting product purity stability. 3. Large reactors have high thermal inertia and slow load adjustment response, making them unable to be flexibly coupled with the fluctuating hydrogen production of green energy.

[0004] Existing improvement technologies mostly focus on optimizing the combustion process, but fail to address the contradiction between carbon pollution and safety and efficiency from the perspective of the nature of the reaction and the root cause of the equipment. Summary of the Invention

[0005] The purpose of this invention is to provide a system and method for preparing electronic-grade hydrogen chloride, which can overcome the shortcomings of traditional hydrogen chloride synthesis processes, such as carbon pollution, high safety risks, and difficulty in process control. It can stably produce electronic-grade pure hydrogen chloride and is inherently safe, efficient, and energy-saving.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: A system for preparing electronic-grade hydrogen chloride, comprising: The raw material pretreatment unit is used to preheat hydrogen and chlorine. The core reaction unit, connected to the raw material pretreatment unit, is used to receive preheated hydrogen and chlorine and catalyze their reaction to produce hydrogen chloride in a carbon-free environment. The product processing unit, connected to the core reaction unit, is used to cool, purify, and collect the generated hydrogen chloride. The core reaction unit contains all components that come into contact with the process medium, all of which are made of corrosion-resistant metal or ceramic materials that do not contain carbon. It includes at least one structured plate. The structured plate includes parallel hydrogen microchannels and chlorine microchannels, and a composite catalytic function that forms a physical isolation between the hydrogen microchannels and the chlorine microchannels and has catalytic and hydrogen atom conduction functions.

[0007] Furthermore, the core reaction unit also includes a pressure-bearing shell, which houses multiple stacked structured plates; the pressure-bearing shell is provided with a hydrogen inlet communicating with the hydrogen microchannel, a chlorine inlet communicating with the chlorine microchannel, and an outlet for discharging hydrogen chloride gas.

[0008] Furthermore, the pressure-bearing shell is also integrated with a heat exchange jacket for introducing a heat exchange medium to control the reaction temperature of the structured plates.

[0009] Furthermore, the corrosion-resistant metal material is a nickel-based corrosion-resistant alloy, and the ceramic material is reaction-sintered silicon carbide.

[0010] Furthermore, the composite catalytic functional membrane is a nanocomposite membrane, comprising a porous ceramic nanowire network framework and atomically dispersed catalytic active centers supported on the framework.

[0011] Furthermore, the inlet and / or outlet of the hydrogen microchannel and / or chlorine microchannel are provided with a multi-level branched tree-like flow channel structure for uniform gas distribution.

[0012] Furthermore, the product processing unit includes an integrated condensation-absorption tower for producing electronic-grade hydrochloric acid, wherein the components in contact with the process medium are made of perfluoropolymer; or, The product processing unit includes an all-metal cryogenic unit for producing electronic-grade hydrogen chloride gas, with an operating temperature below -40°C.

[0013] A preparation method based on the aforementioned preparation system includes the following steps: The purified hydrogen and chlorine are preheated to a first specified temperature according to a specified molar ratio; Preheated hydrogen gas is introduced into the hydrogen microchannel of the core reaction unit, and preheated chlorine gas is introduced into the chlorine microchannel to carry out the reaction; a heat exchange medium is introduced into the heat exchange jacket of the core reaction unit to control the reaction temperature at a second specified temperature; wherein, hydrogen gas is catalytically dissociated into hydrogen active species on one side of the composite catalytic functional membrane, and the hydrogen active species diffuse through the composite catalytic functional membrane to the other side of the surface, where they react with chlorine gas to generate hydrogen chloride gas; The generated hydrogen chloride gas is extracted, cooled, and purified to obtain electronic-grade hydrogen chloride product.

[0014] Further, the purification process includes: Hydrogen chloride gas is absorbed by counter-current contact with high-purity deionized water to obtain electronic-grade hydrochloric acid with a total organic carbon content of less than 10 ppb; or, Hydrogen chloride gas was subjected to cryogenic dehydration at temperatures below -40°C to obtain electronic-grade hydrogen chloride gas with a purity higher than 99.9995% and a total metal impurity content of less than 1 ppb.

[0015] Further, the specified molar ratio is 1.005:1-1.02:1, the first specified temperature is 120℃-200℃, and the second specified temperature is 280℃-350℃.

[0016] The present invention has at least the following advantages or beneficial effects: This invention preheats hydrogen and chlorine through a raw material pretreatment unit, providing energy-activated reactants for subsequent atomic-level surface reactions, reducing the activation energy required and improving reaction efficiency. By using carbon-free, corrosion-resistant metal or ceramic materials for all components in the core reaction unit that come into contact with the process medium, the introduction of carbon is completely eliminated at the source, avoiding organic and inorganic carbon contamination caused by wear, peeling, or seepage in traditional graphite equipment, thus laying a purity foundation for the production of electronic-grade hydrogen chloride. By setting parallel and physically isolated hydrogen and chlorine microchannels in the structured plates, microscopic separation of hydrogen and chlorine can be achieved, fundamentally preventing macroscopic mixing of the two gases, eliminating the explosion risk inherent in combustion processes, and realizing an inherently safe production process. By setting a composite catalytic membrane with both catalytic and hydrogen atom conduction functions between hydrogen and chlorine microchannels, catalytic dissociation of hydrogen, selective diffusion transport of hydrogen active species, and atomic-level surface reactions of hydrogen and chlorine at the membrane interface can be achieved. This pathway completely replaces the traditional gas-phase free radical chain combustion reaction, making the reaction process milder and more controllable, effectively suppressing side reactions, and thus ensuring high product purity. By setting up a product processing unit to cool, purify, and collect the generated hydrogen chloride, the reaction product can be further refined to ultimately obtain electronic-grade hydrogen chloride products that meet the requirements of advanced semiconductor processes. This application can eliminate carbon pollution at the source, achieve an inherently safe production process, and obtain high-purity reaction products, thereby solving the long-standing purity bottlenecks and safety risks in traditional processes. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A structural block diagram of the electronic-grade hydrogen chloride preparation system provided in the application embodiments; Figure 2 A schematic diagram of the core reaction unit provided in the application embodiments; Figure 3 A structural schematic diagram of the structured plate provided in the embodiment of the application; Figure 4 A cross-sectional view of the core reaction unit provided in the application embodiment; Figure 5 A schematic diagram of the multi-level branched tree-like flow channel structure provided in the application embodiment.

[0019] Reference numerals: 100, Raw material pretreatment unit; 200, Core reaction unit; 210, Structured plate; 211, Hydrogen microchannel; 212, Chlorine microchannel; 213, Composite catalytic functional membrane; 220, Pressure-bearing shell; 221, Hydrogen inlet; 222, Chlorine inlet; 223, Outlet; 224, Heat exchange jacket; 300, Product processing unit; 400, Multi-level branched tree-like flow channel structure. Detailed Implementation Example

[0020] Please refer to Figures 1-5 The figure shown is a schematic diagram of the electronic-grade hydrogen chloride preparation system in an embodiment of the present invention. This embodiment provides a system for preparing electronic-grade hydrogen chloride. The system is designed from two aspects: equipment materials and reaction principle, ensuring that the final product meets electronic-grade purity standards. Specifically, the system includes a raw material pretreatment unit 100, a core reaction unit 200, and a product processing unit 300 connected in sequence. The raw material pretreatment unit 100 preheats hydrogen and chlorine to provide stable and controllable raw material gas conditions for subsequent reactions. The core reaction unit 200 is connected to the raw material pretreatment unit 100 and receives the preheated hydrogen and chlorine, catalyzing their reaction to produce hydrogen chloride in a completely carbon-free environment. The product processing unit 300 is connected to the core reaction unit 200 and cools, purifies, and collects the generated hydrogen chloride to obtain the final electronic-grade hydrogen chloride product.

[0021] The aforementioned core reaction unit 200 serves as the reaction module of this application. All components within it that come into contact with the process medium are made of corrosion-resistant metal or ceramic materials that do not contain carbon, completely eliminating the use of graphite or any carbon-containing materials in traditional processes, thus preventing the introduction of carbon impurities at the source. The core reaction unit 200 includes at least one structured plate 210, which is the basic unit for the reaction. Specifically, the structured plate 210 contains parallel hydrogen microchannels 211 and chlorine microchannels 212, physically isolated from each other by a composite catalytic functional membrane 213. This composite catalytic functional membrane 213 has dual functions of catalysis and hydrogen atom conduction: on the hydrogen microchannel 211 side, the membrane surface catalyzes the dissociation of hydrogen into hydrogen active species (such as hydrogen atoms H). + The hydrogen-active species can selectively diffuse through the membrane to the other side of the surface, where it reacts with chlorine in the chlorine microchannel 212 to generate hydrogen chloride. Through the design of physical isolation + atomic transport + interfacial reaction, macroscopic mixing of hydrogen and chlorine is fundamentally avoided, the combustion reaction path is eliminated, and intrinsically safe atomic-level surface synthesis is achieved.

[0022] As an example, in terms of material selection, the preferred corrosion-resistant metal material is a nickel-based corrosion-resistant alloy, such as Hastelloy C-276 or C22; the preferred ceramic material is reaction-bonded silicon carbide (RBSiC). These materials not only contain no carbon, but also have excellent corrosion resistance to chlorine and hydrogen chloride, ensuring long-term stable operation of the system under harsh conditions.

[0023] As an example, the aforementioned composite catalytic functional membrane 213 is a nanocomposite membrane with a thickness of 10-100 nanometers, and its structure includes a porous ceramic nanowire network framework and atomically dispersed catalytic active centers supported on the framework.

[0024] The porous ceramic nanowire network framework is further preferably made of yttrium-stabilized zirconia (YSZ), which possesses excellent chemical stability and mechanical strength, providing a stable support for the catalytic active centers. The catalytic active centers are preferably platinum-iridium (Pt-Ir) bimetallic active centers, atomically dispersed and loaded onto the nanowire framework, significantly improving the utilization efficiency of the noble metal. Through the design of the nanocomposite structure, the catalytic membrane possesses high catalytic activity, high selectivity, and excellent hydrogen atom conductivity.

[0025] In this embodiment, the core reaction unit 200 further includes a pressure-bearing housing 220, which internally houses multiple stacked structured plates 210. By stacking and assembling dozens to hundreds of structured plates 210, large-scale integration of the reaction unit can be achieved, meeting the capacity requirements of industrial production. The pressure-bearing housing 220 is provided with a hydrogen inlet 221 communicating with a hydrogen microchannel 211, a chlorine inlet 222 communicating with a chlorine microchannel 212, and an outlet 223 for discharging hydrogen chloride gas, ensuring that the gas flows along a predetermined path.

[0026] As an example, the aforementioned pressure-bearing housing 220 is made of high-performance metal or ceramic materials resistant to hydrogen chlorine corrosion, and the inner wall can be electrolytically polished or specially passivated to reduce the risk of media adsorption and corrosion.

[0027] To further precisely control this highly exothermic reaction, a heat exchange jacket 224 is integrated into the pressure shell 220. This jacket is used to introduce a heat exchange medium to precisely control the reaction temperature of the structured plates 210. The heat exchange medium can be a high-purity molten salt to achieve precise temperature control. Through the circulation of the heat exchange medium, the heat generated by the reaction can be instantly removed, achieving isothermal operation, avoiding local overheating, and thus ensuring product purity and catalyst stability.

[0028] Furthermore, to optimize fluid distribution and ensure uniform gas flow within each microchannel, the structured plate 210 is equipped with a multi-level branched tree-like flow channel structure 400 at the inlet and / or outlet 223 of the hydrogen microchannel 211 and / or chlorine microchannel 212 for uniform gas distribution. This structure adopts a biomimetic design, enabling gas to enter each microchannel uniformly and stably through step-by-step flow distribution, avoiding local reaction runaway or conversion rate reduction caused by uneven flow.

[0029] In this embodiment, the product processing unit 300 can be configured in two different forms to meet different product requirements. One form is a condensation-absorption integrated tower for producing electronic-grade hydrochloric acid, in which the components in contact with the process medium are made of perfluoropolymers (such as PFA) to avoid metal ion contamination. The other form is an all-metal cryogenic cooler for producing electronic-grade hydrogen chloride gas, with an operating temperature below -40°C, which obtains high-purity anhydrous hydrogen chloride gas through deep cooling and dehydration.

[0030] This invention also provides a preparation method based on any of the above-mentioned preparation systems, the method comprising the following steps: S110. Preheat the purified hydrogen and chlorine to the first specified temperature according to the specified molar ratio; S120. Preheated hydrogen gas is introduced into the hydrogen microchannel 211 of the core reaction unit 200, and preheated chlorine gas is introduced into the chlorine microchannel 212 to carry out the reaction; and a heat exchange medium is introduced into the heat exchange jacket 224 of the core reaction unit 200 to control the reaction temperature at a second specified temperature; wherein, hydrogen gas is catalytically dissociated into hydrogen active species on one side of the composite catalytic functional membrane 213, and the hydrogen active species diffuse through the composite catalytic functional membrane 213 to the other side of the surface, where it reacts with chlorine gas to generate hydrogen chloride gas; S130. The generated hydrogen chloride gas is extracted, cooled, and purified to obtain electronic-grade hydrogen chloride product.

[0031] In the above methods, the purification process can be tailored to different target products. For electronic-grade hydrochloric acid, hydrogen chloride gas is reacted with high-purity deionized water in a counter-current manner to obtain electronic-grade hydrochloric acid with a total organic carbon (TOC) content of less than 10 ppb. For electronic-grade hydrogen chloride gas, the hydrogen chloride gas is cryogenically dehydrated at temperatures below -40°C to obtain electronic-grade hydrogen chloride gas with a purity higher than 99.9995% and a total metal impurity content of less than 1 ppb.

[0032] In the above methods, precise control of reaction conditions is crucial to product quality.

[0033] Specifically, the specified molar ratio (H2:Cl2) is preferably 1.005:1-1.02:1, with a slight excess of hydrogen to ensure complete chlorine reaction and avoid residual free chlorine. The first specified temperature (preheating temperature) is preferably 120℃-200℃, as proper preheating helps activate reactant molecules.

[0034] The second specified temperature (reaction temperature) is preferably 280℃-350℃. Within this temperature range, the activity and selectivity of the catalytic membrane reach the best balance, which can ensure a high reaction rate and avoid the occurrence of side reactions.

[0035] It should be noted that the reaction temperature is precisely controlled within a low-temperature range of 280-350℃ by circulating high-purity molten salt within the jacket. The large specific surface area of ​​the microchannels ensures instantaneous and isothermal removal of the reaction heat, with a heat recovery efficiency greater than 97%. The high-grade heat energy produced as a byproduct can be used to drive the system itself or external processes. For example, the recovered high-grade heat energy can be used to drive the raw material preheater or supplied to external processes, thereby achieving efficient energy utilization.

[0036] The specific embodiments of the present invention will be described in detail below with reference to specific examples. These examples are for illustrative purposes only and are not intended to limit the scope of the invention. Example

[0037] First, ultra-high purity raw materials are prepared. Hydrogen and chlorine are separately passed into a deep purification unit to remove harmful impurities such as metals, moisture, and organic matter. The purified hydrogen and chlorine are then passed through a raw material gas mass flow meter, with the molar ratio H2:Cl2 = 1.01:1 precisely controlled. They are then fed into an electric preheater made of Hastelloy C-276 material, where the hydrogen and chlorine are heated to 180°C respectively.

[0038] Then, a surface reaction takes place. The pressure-bearing shell 220, structured plates 210, and pipe valves (such as valves controlling a multi-level branched tree-like flow channel structure) of the core reaction unit 200 are all made of Hastelloy C-276 after electrolytic polishing, with 200 structured plates 210 integrated internally. The composite catalytic functional membrane 213 uses a YSZ nanowire framework to support atomically dispersed Pt-Ir catalyst (Pt:Ir atomic ratio = 4:1, total loading 0.5 wt%), with a membrane thickness of approximately 50 nm. Preheated hydrogen and chlorine are introduced into the hydrogen microchannel 211 and chlorine microchannel 212 of the core reaction unit 200, respectively. Hydrogen gas is catalytically dissociated into hydrogen atoms (H⁺) on one side of the nanocomposite catalytic functional membrane 213. The hydrogen atoms migrate rapidly to the other side of the membrane through the surface diffusion mechanism inside the membrane. Chlorine gas is activated into chlorine atoms (Cl) on the other side of the membrane. Hydrogen atoms and chlorine atoms undergo a heterogeneous reaction at the membrane-chlorine interface to generate hydrogen chloride (HCl) molecules.

[0039] Meanwhile, through the high-purity molten salt heat exchange jacket 224 of the core reaction unit 200, high-purity molten salt is circulated to precisely control the reaction temperature within a low-temperature range of 300±5℃; then, by utilizing the huge specific surface area of ​​the structured microchannels, instantaneous and isothermal removal of reaction heat is achieved, with a heat recovery efficiency of ≥97%; the recovered high-grade heat energy can be used to drive the raw material preheater or supplied to external processes, achieving efficient energy utilization.

[0040] Next, the product is processed. An all-metal cryogenic apparatus with an operating temperature of -50°C is used for dehydration and drying.

[0041] Finally, after the system had been running stably for 2000 hours, samples of the hydrogen chloride gas were taken for analysis. ICP-MS (Inductively Coupled Plasma Mass Spectrometry) was used to detect the content of metallic impurities, and a TOC analyzer was used to detect the total organic carbon content. The results showed that: HCl purity > 99.9995%, total metallic impurities (Na, K, Fe, Cr, Ni, etc.) < 0.5 ppb, TOC < 5 ppb, and water content < 1 ppm. All indicators exceeded the requirements of SEMI C8.1 standard for electronic-grade hydrogen chloride. The energy consumption per unit product was reduced by 42% compared to a traditional graphite unit with the same capacity. Example

[0042] This embodiment is used to verify the adaptability of the system of the present invention to fluctuating loads.

[0043] In the apparatus of Example 1, a fluctuating input scenario for photovoltaic hydrogen production was simulated. Over 12 hours, the commanded load changed according to the following curve: it decreased from 100% to 30% over 4 hours, then increased from 30% to 120% over 2 hours and remained there for 2 hours, before finally decreasing steadily to 80% over the last 4 hours.

[0044] Execution result: The entire system automatically tracks the commanded load by adjusting the feed gas mass flow meter and the molten salt circulation rate. Recorded data shows that the deviation between the actual load and the commanded load is less than ±1%. No nitrogen purging or safety protection gas was used throughout the process. Samples were taken and analyzed at load points of 30%, 80%, 100%, and 120%. Product purity remained stable, with free chlorine content consistently below 2 ppm, and no significant changes in TOC and metal impurity content.

[0045] This embodiment demonstrates that the system of the present invention possesses excellent flexibility in direct coupling with fluctuating new energy sources, and can stably produce qualified products within a wide load range.

[0046] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A system for preparing electronic-grade hydrogen chloride, characterized in that, include: The raw material pretreatment unit is used to preheat hydrogen and chlorine. The core reaction unit, connected to the raw material pretreatment unit, is used to receive preheated hydrogen and chlorine and catalyze their reaction to produce hydrogen chloride in a carbon-free environment. The product processing unit, connected to the core reaction unit, is used to cool, purify, and collect the generated hydrogen chloride. The core reaction unit contains all components that come into contact with the process medium, all of which are made of corrosion-resistant metal or ceramic materials that do not contain carbon. It includes at least one structured plate. The structured plate includes parallel hydrogen microchannels and chlorine microchannels, and a composite catalytic membrane that forms a physical barrier between the hydrogen microchannels and the chlorine microchannels and has catalytic and hydrogen atom conduction functions.

2. The electronic-grade hydrogen chloride preparation system according to claim 1, characterized in that, The core reaction unit also includes a pressure-bearing shell, which houses multiple stacked structured plates. The pressure-bearing shell is provided with a hydrogen inlet communicating with the hydrogen microchannel, a chlorine inlet communicating with the chlorine microchannel, and an outlet for discharging hydrogen chloride gas.

3. The electronic-grade hydrogen chloride preparation system according to claim 2, characterized in that, The pressure-bearing shell is also integrated with a heat exchange jacket for introducing a heat exchange medium to control the reaction temperature of the structured plates.

4. The electronic-grade hydrogen chloride preparation system according to claim 1, characterized in that, The corrosion-resistant metal material is a nickel-based corrosion-resistant alloy, and the ceramic material is reaction-sintered silicon carbide.

5. The electronic-grade hydrogen chloride preparation system according to claim 1, characterized in that, The composite catalytic functional membrane is a nanocomposite membrane, comprising a porous ceramic nanowire network framework and atomically dispersed catalytic active centers supported on the framework.

6. The system for preparing electronic-grade hydrogen chloride according to claim 1, characterized in that, The hydrogen microchannel and / or chlorine microchannel are provided with a multi-level branched tree-like flow channel structure for uniform gas distribution at their inlets and / or outlets.

7. The system for preparing electronic-grade hydrogen chloride according to claim 1, characterized in that, The product processing unit includes an integrated condensation-absorption tower for producing electronic-grade hydrochloric acid, wherein the components in contact with the process medium are made of perfluoropolymer; or, The product processing unit includes an all-metal cryogenic unit for producing electronic-grade hydrogen chloride gas, with an operating temperature below -40°C.

8. A preparation method based on the preparation system according to any one of claims 1-7, characterized in that, Includes the following steps: The purified hydrogen and chlorine are preheated to a first specified temperature according to a specified molar ratio; Preheated hydrogen gas is introduced into the hydrogen microchannel of the core reaction unit, and preheated chlorine gas is introduced into the chlorine microchannel to carry out the reaction; a heat exchange medium is introduced into the heat exchange jacket of the core reaction unit to control the reaction temperature at a second specified temperature; wherein, hydrogen gas is catalytically dissociated into hydrogen active species on one side of the composite catalytic functional membrane, and the hydrogen active species diffuse through the composite catalytic functional membrane to the other side of the surface, where they react with chlorine gas to generate hydrogen chloride gas; The generated hydrogen chloride gas is extracted, cooled, and purified to obtain electronic-grade hydrogen chloride product.

9. The preparation method according to claim 8, characterized in that, The purification process includes: Hydrogen chloride gas is absorbed by counter-current contact with high-purity deionized water to obtain electronic-grade hydrochloric acid with a total organic carbon content of less than 10 ppb; or, Hydrogen chloride gas was subjected to cryogenic dehydration at temperatures below -40°C to obtain electronic-grade hydrogen chloride gas with a purity higher than 99.9995% and a total metal impurity content of less than 1 ppb.

10. The preparation method according to claim 8, characterized in that, The specified molar ratio is 1.005:1-1.02:1, the first specified temperature is 120℃-200℃, and the second specified temperature is 280℃-350℃.

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