Detection device

Abstract

This invention provides a detection device, relating to the field of precision instrument technology. The detection device includes: a microscopic apparatus, comprising a sample stage suitable for holding a sample, an optical component and a first imaging component spaced apart from the sample stage in the height direction; a Raman detection device, disposed between the optical component and the first imaging component, and sharing a common optical path with the microscopic apparatus; and a switching device suitable for switching the detection device between multiple states, including: a microscopic state allowing the first imaging component to perform microscopic imaging of the sample placed on the sample stage through the common optical path; an imaging state allowing laser light generated by the Raman detection device to irradiate the sample through the common optical path to obtain a Raman image of the sample; and a focusing state allowing laser light to irradiate the sample through the common optical path and utilizing the Raman detection device to receive a first light signal with the same wavelength as the laser light reflected from the sample for laser focusing.

Description

Technical Field

[0001] At least one embodiment of the present invention relates to the field of precision instrument technology, and more particularly to a testing device. Background Technology

[0002] In fields such as materials analysis, biomedicine, and chemical detection, it is often necessary to simultaneously acquire microscopic morphology and Raman spectral information of samples to achieve accurate characterization of sample composition, structure, and distribution. In traditional detection equipment, the microscopic imaging module and the Raman detection module usually use independent optical path systems, which are set in different locations. During use, manual switching or refocusing is required, which not only results in complex equipment structure, large size, and high cost, but also cumbersome operation and low detection efficiency. Summary of the Invention

[0003] In view of this, the present invention provides a detection device capable of switching between multiple states.

[0004] As one aspect of the present invention, a detection device is provided, comprising: a microscopic device including a sample stage suitable for holding a sample, an optical component and a first imaging component disposed at a height distance from the sample stage; a Raman detection device disposed between the optical component and the first imaging component, and having a shared optical path with the microscopic device; and a switching device adapted to switch the detection device between multiple states, the multiple states including: a microscopic state in which the first imaging component is allowed to perform microscopic imaging of the sample disposed on the sample stage through the shared optical path; an imaging state in which a laser generated by the Raman detection device is allowed to irradiate the sample through the shared optical path to obtain a Raman image of the sample; and a focusing state in which the laser is allowed to irradiate the sample through the shared optical path, and the Raman detection device receives a first light signal with the same wavelength as the laser reflected by the sample for laser focusing.

[0005] According to an embodiment of the present invention, the Raman detection device includes: a first housing having a cavity; a laser disposed within the cavity and adapted to emit the laser light; a second imaging component disposed within the first housing and located outside the cavity, adapted to receive the first optical signal for laser focusing based on the first optical signal; and a Raman spectrometer disposed outside the first housing, adapted to receive the Raman scattering of the sample under irradiation of at least a portion of the laser light, generating a scattered light signal containing molecular vibration information of the sample, and generating the Raman image based on the scattered light signal.

[0006] According to an embodiment of the present invention, the first housing has a first through hole formed on its bottom wall facing the common optical path, and a second through hole formed on its top wall facing the first through hole; the switching device includes: a first reflector disposed in the cavity; and a first switching component configured to drive the first reflector to move between a first position and a second position; in the first position, the first reflector is positioned on the first optical path of the laser to change the propagation path of the laser, allowing the laser to pass through the first through hole and couple to the common optical path; and to change the propagation path of the scattered light signal or the first light signal; in the second position, the first reflector is offset from the first optical path to avoid the first through hole and the second through hole, allowing the light signal reflected by the sample to pass through the first through hole and the second through hole sequentially and be incident on the first imaging component for the first imaging component to perform the microscopic imaging.

[0007] According to an embodiment of the present invention, the first switching component includes: a slider, on which the first reflector is disposed; and a driving part disposed on the bottom wall, adapted to drive the slider to translate, so that the first reflector translates between the first position and the second position.

[0008] According to an embodiment of the present invention, the switching device further includes: a first beam splitter disposed within the cavity; a second switching component configured to drive the first beam splitter to move between a third position and a fourth position; in the third position, the first beam splitter is in the first optical path, and at least a portion of the laser light passes through the first beam splitter and irradiates the sample; and the first optical signal is reflected back to the first beam splitter by the first reflector, and the first beam splitter transmits the first optical signal to the second imaging component; in the fourth position, the first beam splitter is disconnected from the first optical path, and the scattered light signal is reflected back to the Raman spectrometer by the first reflector.

[0009] According to an embodiment of the present invention, the plurality of the above states further include: a blocking state that prevents the laser from entering the common optical path; the switching device further includes: a blocking plate, which is disposed at a distance from the first beam splitter in the second switching assembly, and is shifted between a fifth position and a sixth position; in the fifth position, the blocking plate is in the first optical path, preventing the laser from irradiating the first reflector; in the sixth position, the blocking plate is disengaged from the first optical path, allowing the laser to couple to the common optical path through the first reflector.

[0010] According to an embodiment of the present invention, there are multiple lasers, and the wavelengths of the lasers emitted by the multiple lasers are configured to be different; the Raman detection device further includes: a rotating platform disposed in the cavity; and multiple filter units, each matched with the wavelength of the multiple lasers, and arranged at circumferential intervals on the rotating platform, so as to drive the rotating platform to rotate based on the target wavelength of the target laser among the multiple lasers, so that the target filter unit matched with the target wavelength is disposed in the first optical path to reflect the laser emitted by the target laser.

[0011] According to an embodiment of the present invention, the plurality of the above states further include: a near-infrared detection state; the detection device further includes: a near-infrared detection device disposed between the first imaging component and the Raman detection device, or disposed between the optical component and the Raman detection device, wherein the near-infrared detection device is configured to acquire the near-infrared spectrum of the sample.

[0012] According to an embodiment of the present invention, the near-infrared detection device includes: a housing having an internal cavity; a light source disposed in the cavity and adapted to emit near-infrared light; a second beam splitter and a second reflector arranged sequentially along the second optical path of the near-infrared light; and a near-infrared spectrometer disposed outside the housing. When the first reflector is in the second position, the near-infrared light is reflected by the second reflector, focused by the optical components, and then irradiates the sample. A second optical signal carrying information about the sample is focused by the optical components, reflected by the second reflector, and then transmitted to the second beam splitter. The second beam splitter transmits at least a portion of the second optical signal to the near-infrared spectrometer, which then acquires the near-infrared spectrum.

[0013] According to an embodiment of the present invention, the switching device further includes: a third switching component configured to drive the second reflector to move between a reflecting position and an off-center position; in the reflecting position, the second reflector is located within the second optical path and is adapted to reflect the near-infrared light and the second optical signal; in the off-center position, the second reflector is disengaged from the second optical path; when the first reflector is in the second position and the second reflector is in the off-center position, the first imaging component is capable of performing microscopic imaging on the sample.

[0014] The detection device provided in this invention, by setting a switching device, allows the microscopic device and the Raman detection device to share the same optical path and flexibly switch between microscopic, imaging, and focusing states. This simplifies the device structure, reduces its size, lowers manufacturing costs, and avoids the positional calibration problems associated with independent optical paths. In focusing state, the device directly uses the same wavelength laser generated by the Raman detection device to irradiate the sample and receives the reflected first light signal for laser focusing. No additional focusing sensor is required, achieving in-situ precise focusing based on the Raman signal optical path itself. This effectively eliminates focusing errors introduced by optical path separation (or independent optical paths), ensures spatial consistency between microscopic imaging and Raman imaging, and improves the quality of Raman images and the reliability of detection results. Attached Figure Description

[0015] The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:

[0016] Figure 1 A perspective view of a detection device according to an embodiment of the present invention is shown;

[0017] Figure 2 It shows Figure 1 A three-dimensional view of the internal structure of the testing equipment shown;

[0018] Figure 3 A side view of a Raman detection apparatus according to an embodiment of the present invention is shown;

[0019] Figure 4 A partial first top view of a Raman detection apparatus according to an embodiment of the present invention is shown;

[0020] Figure 5 A partial second top view of a Raman detection apparatus according to an embodiment of the present invention is shown;

[0021] Figure 6 A perspective view of a first switching component according to an embodiment of the present invention is shown;

[0022] Figure 7 A perspective view of a second switching component according to an embodiment of the present invention is shown;

[0023] Figure 8 A side view of a near-infrared detection device according to an embodiment of the present invention is shown;

[0024] Figure 9 A partial top view of a near-infrared detection device according to an embodiment of the present invention is shown;

[0025] Figure 10 A perspective view of a processor according to an embodiment of the present invention is shown.

[0026] The annotations in the attached figures are explained as follows:

[0027] 1. Microscopic apparatus; 11. Sample stage; 12. First imaging assembly; 13. Optical assembly;

[0028] 2. Raman spectroscopy device;

[0029] 21. Raman spectrometer; 22. Laser; 23. Filter unit; 231. First long-pass filter; 232. Second long-pass filter; 24. First mirror; 25. Second imaging assembly; 26. First beam splitter; 27. Shielding plate; 28. First switching assembly; 281. Drive unit; 282. First slide rail; 283. Slider; 29. ​​Second switching assembly; 291. Second motor; 292. Second slide rail; 293. Mounting block; 201. First housing; 2011. First through hole; 202. Third mirror; 203. First focusing mirror; 204. First compensating mirror; 205. First aperture; 206. Rotating platform; 207. Dichroic mirror; 208. Fourth mirror; 209. Second focusing mirror;

[0030] 3. Processor; 31. Display; 32. Control box housing; 33. Microscope base card; 34. Raman detection card; 35. Near-infrared detection card; 36. Hub; 37. Power supply; 38. Motor driver;

[0031] 4. Near-infrared detection device;

[0032] 41. Light source; 42. Second beam splitter; 43. Second reflector; 44. Near-infrared spectrometer; 45. Second compensating mirror; 47. Second aperture; 48. First adjustable lens; 49. First interface component; 401. Second interface component; 402. Second housing; 404. Second adjustable lens; 405. Third switching assembly;

[0033] 5. Supporting device;

[0034] 51. Bracket; 52. Outer shell. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0036] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0037] All terms used herein, including technical and scientific terms, have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0038] When using expressions such as "at least one of A, B, and C," the meaning should generally be interpreted according to the understanding of someone skilled in the art. For example, "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C. Similarly, when using expressions such as "at least one of A, B, or C," the meaning should generally be interpreted according to the understanding of someone skilled in the art. For example, "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C.

[0039] It should also be noted that the directional terms mentioned in the embodiments, such as "up," "down," "front," "back," "left," and "right," are only for reference to the directions in the accompanying drawings and are not intended to limit the scope of protection of the present invention. Throughout the accompanying drawings, the same elements are represented by the same or similar reference numerals. Conventional structures or constructions will be omitted where they may cause confusion in understanding the present invention.

[0040] In realizing this invention, it was discovered that Raman detection requires precisely focusing a laser beam onto the sample surface (or at a certain depth) to excite the sample to generate a Raman scattering signal. However, the Raman scattering signal is typically only one millionth of the intensity of the incident laser.

[0041] When a laser beam is precisely focused, the spot converges to the diffraction-limited size (typically in the micrometer or even sub-micrometer range). At this point, the laser power density per unit area is highest, the sample is most strongly excited at the focal point, and the resulting Raman scattering signal is also the strongest. Conversely, once the beam defocuses, the laser spot area rapidly expands, and the power density decreases in an inverse square relationship. This leads to a reduction in the number of excited molecules per unit volume of sample, resulting in a significant attenuation of the Raman signal intensity. In Raman detection, where the signal-to-noise ratio is already extremely low, this attenuation often causes the weak signal to be directly drowned out by noise.

[0042] Furthermore, the spatial resolution of Raman images essentially depends on the size of the excitation spot, because only the signal at the focal point can represent the sample information at that location. When out of focus, the spot enlarges, and signals from adjacent regions alias, making it impossible for the Raman image to distinguish the fine structure of the sample, thus degrading the spatial resolution. Therefore, only by maintaining precise focus can high-quality Raman detection be achieved in both signal intensity and spatial resolution.

[0043] Laser focusing in Raman detection often relies on additional focusing devices (such as confocal pinholes or external position sensors). These additional components further increase the difficulty of optical path adjustment and system errors. They also cannot utilize the characteristics of the Raman signal optical path itself to achieve precise focusing. They are prone to focusing deviations due to sample surface undulations or optical path drift, affecting the spatial resolution of Raman images and the accuracy of signal acquisition.

[0044] Figure 1 A perspective view of a detection device according to an embodiment of the present invention is shown. Figure 2 It shows Figure 1 A three-dimensional view of the internal structure of the testing equipment shown. Figure 3 A side view of a Raman detection apparatus according to an embodiment of the present invention is shown. Figure 4 A partial first top view of the Raman detection apparatus and switching device according to an embodiment of the present invention is shown.

[0045] As one aspect of the present invention, a detection device is provided. For example... Figures 1 to 4 As shown, the detection device includes a microscopic device 1, a Raman detection device 2, and a switching device. The microscopic device 1 includes a sample stage 11 suitable for holding a sample, an optical component 13 and a first imaging component 12 spaced apart from the sample stage 11 in the height direction. The Raman detection device 2 is disposed between the optical component 13 and the first imaging component 12 and shares a common optical path with the microscopic device 1. The switching device is suitable for switching the detection device between multiple states, including: a microscopic state in which the first imaging component 12 is allowed to perform microscopic imaging of the sample placed on the sample stage 11 through the common optical path; an imaging state in which the laser generated by the Raman detection device 2 is allowed to irradiate the sample through the common optical path to obtain a Raman image of the sample; and a focusing state in which the laser is allowed to irradiate the sample through the common optical path, and the Raman detection device 2 is used to receive a first light signal with the same wavelength as the laser reflected from the sample for laser focusing.

[0046] According to an embodiment of the present invention, the common optical path is the common path from the sample stage 11 through the optical component 13, the Raman detection device 2 to the first imaging component 12.

[0047] According to an embodiment of the present invention, the detection device further includes a processor 3. The processor 3 can be communicatively connected to the switching component to drive the switching device to switch between multiple states.

[0048] Processor 3 may include a central processing unit (CPU), a field-programmable gate array (FPGA), a digital signal processor (DSP), etc.

[0049] like Figure 1 As shown, the detection equipment also includes a support device 5. The support device 5 includes a bracket 51 and a housing 52. The microscopic device 1, the Raman detection device 2, and the processor 3 can be mounted on the bracket 51 and covered by the housing 52. It should be understood that the housing 52 may include an openable door to facilitate the installation, adjustment, maintenance, or replacement of consumables for the components housed within the housing 52. As an example, the door may be located on at least one of the front, rear, top, and side walls of the housing 52. The door and the housing 52 may be connected by a hinge, a sliding connection, or a detachable magnetic connection. A transparent observation window may be provided on the door to observe the sample stage 11 and the focusing status without opening the housing 52.

[0050] According to embodiments of the present invention, the sample can be a chemical sample or a biological sample.

[0051] According to an embodiment of the present invention, the sample stage 11 can be configured to be able to run along the length direction (e.g., Figure 2 (as shown in the X direction), width direction (e.g.) Figure 2 (as shown in the Y direction) and height direction (e.g.) Figure 2 The movement is in the Z direction (or longitudinal direction).

[0052] In some illustrative embodiments, the sample stage 11 may include an XY-axis motorized stage and a Z-axis motor. The XY-axis motorized stage is used to carry the sample and, driven by the processor 3, translates along the length or width direction. The Z-axis motor, driven by the processor 3, drives the XY-axis motorized stage to translate along the height direction (longitudinal direction).

[0053] According to an embodiment of the present invention, the first imaging component 12 can cooperate with the optical component 13 to perform microscopic imaging of a sample disposed on the sample stage 11. The optical component 13 may include an illumination source, a condenser, an aperture, an objective lens, etc.

[0054] In some illustrative embodiments, the microscopic device 1 can be a standard upright metallurgical microscope. The first imaging component 12 can be the original camera of the standard upright metallurgical microscope. It should be understood that the embodiments of the present invention are not limited thereto; for example, the microscopic device 1 can also be a confocal microscope, and the first imaging component 12 can also be a charge-coupled device (CCD) camera.

[0055] In the process of realizing this invention, it was discovered that existing multifunctional integrated microscopes, due to their physical function stacking design, suffer from high prices, limited functionality, and complex structures. This results in an exponential positive correlation between functional expandability and system complexity and manufacturing cost. Simultaneously, the highly customized optical components and electronic control systems lead to persistently high manufacturing costs, limiting widespread application. As an example, the processor 3 can be configured to drive the sample stage 11 to move along the length, width, and height (longitudinal) directions respectively during imaging, causing the Raman detection device 2 to scan the sample point by point. This acquires Raman spectral data for each point based on the scattered light signal, and records the three-dimensional coordinates of each point. Based on multiple Raman spectral data and multiple three-dimensional coordinates, a three-dimensional Raman distribution image is generated.

[0056] The detection device according to embodiments of the present invention, by adding a displacement mechanism in the height direction, enables the detection device to have a three-dimensional imaging function, allowing for three-dimensional imaging and Raman depth scanning of samples. Furthermore, by adjusting the focal plane of the microscope, different depths of the sample can be scanned layer by layer to acquire Raman spectral data at each depth. Subsequently, two-dimensional images at different depths are superimposed to form a three-dimensional Raman distribution image. This three-dimensional Raman distribution image can characterize the chemical composition and / or molecular structure distribution of samples at the micrometer or nanometer scale, and is suitable for the analysis of complex samples such as multilayer pharmaceutical preparations, food packaging materials, and composite materials. Through three-dimensional imaging, the spatial distribution and interactions of different components can be visually displayed, providing important evidence for the structural analysis of complex samples.

[0057] According to embodiments of the present invention, the molecular structure and / or chemical composition of a sample can be determined by analyzing Raman spectroscopy data.

[0058] According to an embodiment of the present invention, the processor 3 is further configured to: map at least one of Raman characteristic peak intensities, spectral matching degrees, and chemical component concentration ratios contained in multiple Raman spectral data into color gradient values ​​of three-dimensional coordinates, and generate a colored three-dimensional Raman distribution image through a volume rendering algorithm.

[0059] According to an embodiment of the present invention, under microscopic conditions, imaging light (e.g., white light) emitted from the illumination source of the optical component 13 illuminates the sample. The reflected imaging light, after being reflected by the sample, is focused by the optical component 13, passes through the Raman detection device 2, and is acquired by the first imaging component 12 to obtain a microscopic image of the sample. The processor 3 controls the sample stage 11 to move along the length, width, and height directions respectively, so that the microscopic device 1 scans the sample point by point, thereby enabling two-dimensional or three-dimensional microscopic imaging.

[0060] In microscopic mode, processor 3 can drive the sample to move along the width and length directions, acquire multiple microscopic images, and stitch the images together using an algorithm. The stitched image has higher resolution and a larger field of view than a single image.

[0061] Furthermore, within a certain plane area (the plane formed by the width and length directions), the area is divided into a finite number of points. The processor 3 drives the sample stage 11 to move by a Z-axis motor that can drive the sample stage 11 to translate along the height direction, so as to adjust the distance between the sample and the first imaging component 12. At the same time, the depth (height) information of all points is collected, and the depth information is added to the microscopic imaging results. This can present a three-dimensional effect on the two-dimensional plane of the image, thereby realizing three-dimensional microscopic imaging.

[0062] In microscopic conditions, laser autofocus can be achieved by adjusting the distance between the sample and the first imaging component 12 and comparing the effects of microscopic imaging through an algorithm.

[0063] According to an embodiment of the present invention, the Raman detection device 2 includes a first housing 201, a laser 22, a second imaging component 25, and a Raman spectrometer 21. The first housing 201 has a cavity. The laser 22 is disposed within the cavity and is adapted to emit laser light. The second imaging component 25 is disposed within the first housing 201 and located outside the cavity, and is adapted to receive a first optical signal for laser focusing based on the first optical signal. The Raman spectrometer 21 is disposed outside the first housing 201 and is adapted to receive Raman scattering of the sample under at least a portion of the laser irradiation, generating a scattered light signal (Raman Stokes scattering light) containing molecular vibrational information of the sample, and generating a Raman image based on the scattered light signal.

[0064] The laser 22 is built into the first housing 201. The heat generated by the laser 22 during operation is blocked by the housing, making it difficult to conduct to the external second imaging component 25 and Raman spectrometer 21. It can also effectively isolate the influence of dust, stray light and temperature fluctuations in the external environment on the stability of the laser 22, ensuring the power and wavelength stability of the emitted laser and improving the repeatability and signal-to-noise ratio of Raman detection.

[0065] The second imaging component 25 is disposed in the first housing 201 and located outside the cavity, avoiding direct sharing of the internal cavity space with the laser 22, reducing the interference of the heat generated by the laser 22 during operation on the second imaging component 25, and also allowing the second imaging component 25 to be flexibly arranged in a position that is convenient for receiving the first optical signal (i.e., the elastic scattered light of the same wavelength as the laser reflected by the sample), without having to penetrate the housing or go through a complex light guide structure, thereby simplifying the optical path design, reducing signal loss, and achieving efficient and accurate laser focusing.

[0066] According to embodiments of the present invention, such as Figure 3 and Figure 4 As shown, the first housing 201 has a first through hole 2011 formed on its bottom wall facing the common optical path, and a second through hole facing the first through hole 2011 formed on its top wall. The switching device includes a first reflector 24 and a first switching assembly 28. The first reflector 24 is disposed within the cavity. The first switching assembly 28 is configured to drive the first reflector 24 to a first position (e.g., Figure 4 The first reflector 24 moves between its current position and its second position. When the first reflector 24 is in its first position, it is positioned on the first optical path of the laser, thereby changing the propagation path of the laser and allowing it to pass through the first through-hole 2011 and couple to the common optical path; and changing the propagation path of the scattered light signal or the first optical signal.

[0067] When the first reflector 24 is in the second position, the first reflector 24 is offset from the first optical path to avoid the first through hole 2011 and the second through hole, so that the light signal reflected by the sample can pass through the first through hole 2011 and the second through hole in sequence and be incident on the first imaging component 12 for microscopic imaging.

[0068] like Figure 3 As shown, the bottom wall is constructed into a groove-shaped structure, defining a cavity between the bottom wall and the top wall. A first through-hole 2011 is formed on the bottom wall along the first optical path. A second through-hole is formed on the top cover facing the first through-hole 2011. The laser light reflected by the first reflecting mirror 24 passes through the first through-hole 2011 and is transmitted to the optical component 13.

[0069] A quick-release dovetail male connector (or quick-release dovetail female connector) is provided in the first through hole 2011. A quick-release dovetail female connector (or quick-release dovetail male connector) is provided in the second through hole.

[0070] The bottom wall can be designed as a single piece to ensure its strength. The bottom wall and the top cover are connected by threads (or by any detachable connection method such as snap-fit ​​or locking) to form a first housing 201 with a cavity, protecting the components (such as the first reflector 24) located within the cavity. The quick-release dovetail male connector located in the first through hole 2011 can be stacked and fixedly mounted on the upper part of other modules such as the optical component 13. The quick-release dovetail female connector located in the second through hole can be stacked and mounted on other modules.

[0071] According to an embodiment of the present invention, when the first reflector 24 is in a first position, the detection device is allowed to be in an imaging state or a focusing state; when the first reflector 24 is in a second position, the detection device is allowed to be in a microscopic state.

[0072] According to embodiments of the present invention, such as Figure 4As shown, the Raman detection device 2 also includes a filter unit 23. The filter unit 23 is disposed inside the first housing 201 and is arranged between the laser 22 and the first reflector 24 along the optical path of the laser.

[0073] According to an embodiment of the present invention, the cutoff wavelength of the filter unit 23 is matched with the laser wavelength. For example, if the laser wavelength is 532 nanometers, the cutoff wavelength of the filter unit 23 is 532 nanometers.

[0074] According to embodiments of the present invention, such as Figure 4 As shown, the filtering unit 23 includes a first long-pass filter 231. The first long-pass filter 231 is disposed in the first optical path and is used to reflect laser light with a wavelength lower than the cutoff wavelength of the first long-pass filter 231, so that the reflected laser light irradiates the sample.

[0075] According to embodiments of the present invention, such as Figure 4 As shown, the filtering unit 23 includes a second long-pass filter 232. The second long-pass filter 232 is disposed in the optical path of the scattered light signal to filter out Rayleigh scattered light with the same wavelength as the corresponding scattered light signal and reflected light reflected after the laser irradiates the sample.

[0076] The first long-pass filter 231 and the second long-pass filter 232 form an angle. The normal of the first long-pass filter 231 forms an angle with the first optical path of the laser, allowing the laser to be reflected by the first long-pass filter 231 to the first reflecting mirror 24. The normal of the second long-pass filter 232 is parallel to the optical path of the scattered light signal, allowing the scattered light signal reflected by the first reflecting mirror 24 to be transmitted through the second long-pass filter 232. This allows the second long-pass filter 232 to filter out Rayleigh scattered light of the same wavelength as the corresponding scattered light signal and the reflected light reflected after the laser irradiates the sample.

[0077] Furthermore, along the optical path of the scattered light signal, the second long-pass filter 232 is disposed at the rear end of the first long-pass filter 231. In this way, since the normal of the first long-pass filter 231 is inclined to the optical path of the scattered light signal, the first long-pass filter 231 will not completely block the Rayleigh scattered light and the reflected light reflected after the laser irradiates the sample from passing through. This allows a portion of the Rayleigh scattered light and the reflected light reflected after the laser irradiates the sample to pass through the first long-pass filter 231 and be incident on the second long-pass filter 232 for further filtering.

[0078] The cutoff wavelength of the first long-pass filter 231 can be the same as the cutoff wavelength of the second long-pass filter 232.

[0079] When the detection device is in imaging mode, such as Figure 4In the direction indicated by the solid arrow, the laser emitted from the laser 22 is reflected by the filter unit 23 to the first reflecting mirror 24, and the first reflecting mirror 24 causes at least a portion of the laser to irradiate the sample. Figure 4 In the direction indicated by the dashed arrow, the scattered light signal, after being reflected by the first reflecting mirror 24, has a wavelength greater than the cutoff wavelength of the filter unit 23. The scattered light signal then passes through the filter unit 23 and is incident on the Raman spectrometer 21, where Raman spectral data is acquired.

[0080] In some illustrative embodiments, during imaging, a certain planar area (the plane formed by the width and length directions) is divided into grids. The processor 3 drives the sample stage 11 to translate according to the grid, causing the sample to undergo Raman single-point detection point by point along a preset path to obtain Raman spectral data. After signal processing (including baseline correction, noise filtering, and spectral normalization) of the Raman spectral data, a two-dimensional Raman image can be generated, realizing Raman surface scanning. By using the fitting calculation results of multi-dimensional parameters (including but not limited to Raman characteristic peak intensity, spectral matching degree, and chemical component concentration ratio) as the Z-axis and the detection position as the X and Y axes, color and pseudo-3D Raman distribution images can be generated.

[0081] In some illustrative embodiments, in imaging mode, the three-dimensional imaging function of the microscope device 1 is combined with Raman spectroscopy to divide a certain depth (height) region into a finite number of points. The sample is then driven point by point by the XY-axis motorized stage and the Z-axis motor to perform Raman single-point detection. After signal processing, the final Raman depth scan result is generated. The single-point collaborative scanning mode and the overall mapping scanning mode can be freely switched according to experimental requirements.

[0082] The single-point collaborative scanning mode acquires the three-dimensional coordinates and single-point Raman spectral data (Raman spectrum) of each target point in turn by switching between microscopic and imaging states in real time.

[0083] The overall mapping scanning mode first obtains the overall three-dimensional coordinates of the sample under microscopic conditions. Then, in imaging mode, the XY-axis motorized stage performs point-by-point Raman detection along a preset path. After the detection is completed, the data processing program of processor 3 preprocesses the Raman spectral data (including baseline correction, noise filtering, and spectral normalization) and maps multi-dimensional parameters (including but not limited to Raman characteristic peak intensity, spectral matching degree, and chemical component concentration ratio) into color gradient values ​​of three-dimensional spatial coordinates (X, Y, Z). A color 3D Raman distribution image is then generated through a volume rendering algorithm.

[0084] The Raman detection device 2 also includes a transmission unit. The Raman spectrometer 21 receives the scattered light signal through the transmission unit.

[0085] like Figure 3 As shown, the transmission unit may include a tubular component and multiple third reflectors 202. The multiple third reflectors 202 are used to change the transmission path of the scattered light signal, so that the scattered light signal is transmitted to the Raman spectrometer 21.

[0086] The transmission unit also includes at least one first focusing mirror 203. The first focusing mirror 203 is disposed on the tubular component and is used to converge the scattered light signal.

[0087] In some illustrative embodiments, such as Figure 3 As shown, the transmission unit includes a tubular component, two third reflectors 202, and a first focusing mirror 203. The first focusing mirror 203 is disposed between the two third reflectors 202.

[0088] The first focusing mirror 203 is mounted on a focusing mirror adjustment frame and connected via a tubular component of the frame. The focusing position of the frame can be adjusted along its axial direction. The scattered light signal is focused into the Raman spectrometer 21 through the first focusing mirror 203.

[0089] Figure 5 A partial second top view of a Raman detection apparatus according to an embodiment of the present invention is shown.

[0090] According to an embodiment of the present invention, the Raman detection device 2 further includes a first beam splitter 26. The first beam splitter 26 is movably disposed between the filter unit 23 and the first reflector 24.

[0091] In focusing mode, the first beam splitter 26 is in the first optical path (e.g., Figure 5 The position of the first beam splitter 26), the first reflecting mirror 24 is located in the first optical path (e.g., Figure 5 The position of the first reflector 24 (in the middle) enables the first reflector 24 to reflect the laser.

[0092] A laser beam is emitted from laser 22, and at least a portion of it is reflected by filter unit 23. This portion then passes through first beam splitter 26, is reflected by first reflector 24, and finally illuminates the sample via optical assembly 13. At least a portion of the laser beam is reflected by the sample, forming reflected light. This reflected light sequentially passes through optical assembly 13, first reflector 24, and first beam splitter 26. First beam splitter 26 transmits at least a portion of the reflected light to second imaging assembly 25, enabling second imaging assembly 25 to obtain a laser image based on this reflected light. Processor 3 is configured to perform laser focusing based on the laser image.

[0093] In some illustrative embodiments, the first beam splitter 26 may be a beam splitting wedge.

[0094] The second imaging assembly 25 includes a focusing lens, a charge-coupled device (CCD) camera, and a camera mounting sleeve. The focusing lens is mounted on the bottom wall via a focusing lens mounting bracket; the CCD camera is mounted on the side of the bottom wall away from the cavity via the camera mounting sleeve, and the position of the CCD camera can be adjusted along the axis of the sleeve. When the first beam splitter 26 reflects 50% of the reflected light into the second imaging assembly 25, the reflected light is focused onto the CCD camera through the focusing lens for laser imaging, thereby acquiring a laser image through the CCD camera.

[0095] In the focusing state, the processor 3 can drive the sample stage 11 to move along the height direction, acquire multiple laser images of the sample at different depths (heights), and complete laser autofocus by comparing the effects of the laser images through an algorithm.

[0096] According to an embodiment of the present invention, the Raman detection device 2 further includes a first compensation mirror 204.

[0097] The first beam splitter 26 and the first compensating mirror 204 are respectively mounted on two micro-adjustment frames (e.g., frameless micro-adjustment frames). The micro-adjustment frames are standard products and can finely adjust the positions of the first beam splitter 26 and the first compensating mirror 204 in multiple dimensions. The micro-adjustment frames, the shielding plate 27, and the second switching assembly 29 (described in detail later) are threaded together to ensure connection strength.

[0098] Figure 6 A perspective view of a first switching component according to an embodiment of the present invention is shown.

[0099] According to an embodiment of the present invention, the first switching component 28 includes a slider 283 and a driving unit 281. A first reflector 24 is disposed on the slider 283. The driving unit 281 is disposed on the bottom wall and is adapted to drive the slider 283 to translate, thereby translating the first reflector 24 between a first position and a second position.

[0100] The drive unit 281 may include a linear motor, a cylinder, or a hydraulic cylinder, etc. It should be understood that the embodiments of the present invention are not limited thereto. For example, the drive unit 281 may also employ a stepper motor in conjunction with a lead screw, a voice coil motor, or a manual adjustment mechanism.

[0101] As an example, the drive unit 281 includes a first slide rail 282 and a first motor. The bottom of the slider 283 has a groove that mates with the first slide rail 282. Driven by the first motor, the slider 283 translates along the guide of the first slide rail 282.

[0102] In imaging or focusing mode, the first reflector 24 is located in the first optical path. In microscopic or near-infrared detection mode (which will be further described later in conjunction with the near-infrared detection device 4), the first reflector 24 is disconnected from the first optical path.

[0103] The first reflector 24 is mounted on a micro-adjustment bracket, which is a standard product and allows for multi-dimensional fine-tuning of the position of the first reflector 24. The micro-adjustment bracket and the first slider 283 are connected by threads to ensure connection strength.

[0104] The first slide rail 282 is connected to the bottom wall through a long hole, which facilitates the adjustment of the optical path.

[0105] The first reflecting mirror 24 is at a horizontal angle of 45° to the bottom wall.

[0106] In imaging or focusing mode, the first switching component 28 drives the first reflector 24 to the first position. The light transmitted through the first through hole 2011 (e.g., reflected light or scattered light signal) is reflected by the first reflector 24 into the cavity of the first housing 201.

[0107] In microscopic or near-infrared detection mode, the first switching component 28 drives the first reflector 24 to the second position. When the first reflector 24 is completely away from the top of the first through hole 2011, the light transmitted through the first through hole 2011 (e.g., reflected imaging light) will not enter the cavity of the first housing 201.

[0108] Figure 7 A perspective view of a second switching component according to an embodiment of the present invention is shown.

[0109] According to an embodiment of the present invention, the switching device further includes a first beam splitter 26 and a second switching assembly 29. The first beam splitter 26 is disposed within the cavity. The second switching assembly 29 is configured to drive the first beam splitter 26 to move between a third position and a fourth position. In the third position, the first beam splitter 26 is in the first optical path, and at least a portion of the laser light passes through the first beam splitter 26 to irradiate the sample; and the first optical signal is reflected by the first reflector 24 to the first beam splitter 26, and the first beam splitter 26 transmits the first optical signal to the second imaging assembly 25; in the fourth position, the first beam splitter 26 is disconnected from the first optical path, and the scattered light signal is reflected by the first reflector 24 to the Raman spectrometer 21.

[0110] According to an embodiment of the present invention, the multiple states further include a blocking state that prevents the laser from entering the common optical path. The switching device further includes a blocking plate 27. The blocking plate 27 is disposed at a distance from the first beam splitter 26 in the second switching assembly 29, and is shiftable between a fifth position and a sixth position. In the fifth position, the blocking plate 27 is in the first optical path, preventing the laser from illuminating the first reflector 24; in the sixth position, the blocking plate 27 is disengaged from the first optical path, allowing the laser to couple to the common optical path through the first reflector 24.

[0111] The shielding plate 27 is movably disposed between the filter unit 23 and the first reflector 24. The second switching component 29 is connected to the first beam splitter 26 and the shielding plate 27, and the second switching component 29 is configured to drive the first beam splitter 26 and the shielding plate 27 to translate.

[0112] With the shielding plate 27 in the first optical path, the detection device is in a shielded state. In the shielded state, the shielding plate 27 prevents the laser from passing through, and the first reflecting mirror 24 is moved to the second position, allowing the second imaging component 25 to perform microscopic imaging of the sample. After microscopic imaging is completed, by moving the first reflecting mirror 24 to the first position, the shielding plate 27 is disengaged from the first optical path, and the detection device is placed in an imaging or focusing state.

[0113] The second switching component 29 is used to drive the translation of the first beam splitter 26 and the shield 27. When both the first beam splitter 26 and the shield 27 are deviated from the first optical path, the Raman detection device 2 is in imaging mode.

[0114] like Figure 7 As shown, the second switching component 29 includes a drive mechanism and a mounting block 293. The first beam splitter 26, the first compensation mirror 204, and the shielding plate 27 are all disposed on the mounting block 293, and the drive mechanism drives the mounting block 293 to translate.

[0115] The drive mechanism may include a linear motor, a pneumatic cylinder, or a hydraulic cylinder, etc. It should be understood that the embodiments of the present invention are not limited thereto; for example, the drive mechanism may also employ a stepper motor in conjunction with a lead screw, a voice coil motor, or a manual adjustment mechanism.

[0116] As an example, the drive unit 281 includes a second slide rail 292 and a second motor 291. The bottom of the mounting block 293 forms a groove that mates with the second slide rail 292. Guided by the second slide rail 292, the mounting block 293 moves in a direction perpendicular to the first optical path located between the second reflector 43 and the filter assembly, so that the first beam splitter 26 and the first compensating mirror 204 can be simultaneously in the first optical path, or the shielding plate 27 can be in the first optical path, or the first beam splitter 26, the first compensating mirror 204 and the shielding plate 27 can all be disengaged from the first optical path.

[0117] Along the direction of slider 283 toward the first optical path, the shielding plate 27 is disposed at the front end of the first beam splitter 26 and the first compensation mirror 204.

[0118] The second slide rail 292 can be connected to the bottom wall through an elongated hole, facilitating the adjustment of the optical path. The first beam splitter 26 and the first compensating mirror 204 can be at a 90° angle, and at a 45° angle to the first optical path, respectively.

[0119] In the focusing state, the second switching component 29 drives the first beam splitter 26 and the first compensation mirror 204 to be located in the first optical path. The first beam splitter 26 reflects 50% of the light from the first optical path into the second imaging component 25 on one side. The first compensation mirror 204 can compensate for the deviation caused by the first beam splitter 26.

[0120] In the occlusion state, the second switching component 29 drives the occlusion plate 27 to be located in the first optical path, and all light rays (i.e., laser) in the first optical path are blocked.

[0121] In imaging mode, the second switching component 29 drives the first beam splitter 26, the first compensation mirror 204 and the blocking plate 27 to completely leave the first optical path.

[0122] According to an embodiment of the present invention, there are multiple lasers 22, and the wavelengths of the lasers emitted by the multiple lasers 22 are configured to be different. The Raman detection device 2 also includes a rotating platform 206 and multiple filter units 23. The rotating platform 206 is disposed in a cavity. The multiple filter units 23 are respectively matched with the wavelengths of the multiple lasers and are arranged at circumferential intervals on the rotating platform 206. Based on the target wavelength of the target laser among the multiple lasers 22, the rotating platform 206 is driven to rotate, so that the target filter unit 23 matched with the target wavelength is disposed in the first optical path to reflect the laser emitted by the target laser.

[0123] Furthermore, the processor 3 drives the rotary motor to make the rotary platform 206 rotate clockwise or counterclockwise.

[0124] The rotating platform 206 and the rotating motor can be housed within the first housing 201.

[0125] According to embodiments of the present invention, the number of lasers 22 may include any value among 1, 2, 3, 4, and 5.

[0126] In some illustrative embodiments, the Raman detection device 2 includes three lasers 22, namely a 532 nm laser, a 638 nm laser, and a 785 nm laser. The three lasers 22 are respectively mounted on the first housing 201 via heat dissipation bases.

[0127] In such embodiments, the 532 nm laser 22 can be used for Raman detection of certain specific materials, such as certain fluorescent substances or materials sensitive to other wavelengths of laser light. The 638 nm laser 22 can be used for Raman detection of most materials, exhibiting good versatility. The 785 nm laser 22 can be used for Raman detection of certain materials sensitive to short-wavelength laser light, such as biological samples or organic materials.

[0128] Furthermore, multiple lasers 22 are mounted on multiple heat sinks, and the three heat sinks are threadedly connected to the bottom wall of the first housing 201. The heat sinks use solid heat sinks to avoid the influence of fan vibration on the first optical path. The three lasers 22 can provide lasers of different wavelengths for Raman detection according to different samples.

[0129] Multiple first long-pass filters are mounted on a micro-adjustment frame and a fixed mounting frame, respectively. The micro-adjustment frame uses a standard product and can finely adjust the position of the first long-pass filters in multiple dimensions. The micro-adjustment frame, the fixed mounting frame, and the rotating platform are connected by a 206 thread.

[0130] The rotating platform 206 can rotate 360°, driving the three sets of filter units 23 to different positions. The filter units 23 of different wavelengths can filter out Rayleigh scattered light and reflected light of the same wavelength as the corresponding Raman-Stokes scattered light. When using lasers 22 of different wavelengths, the rotating platform 206 drives the filter units 23 corresponding to the wavelength of the laser 22 to rotate into the first optical path and the optical path of the scattered light signal. Depending on the laser 22, these positions are designated as 532 nm, 638 nm, and 785 nm. When the rotating platform 206 drives all the filter units 23 to rotate away from the first optical path and the optical path of the scattered light signal, it is in an empty position.

[0131] According to an embodiment of the present invention, the Raman detection device 2 further includes a plurality of fourth reflectors 208. The plurality of fourth reflectors 208 are disposed in the first housing 201, and a portion of the plurality of fourth reflectors 208 are used to change the transmission direction of the laser, and another portion is used to change the transmission direction of the scattered light signal.

[0132] Multiple fourth reflectors 208 are mounted on multiple micro-adjustment mounts. Frameless or frameless micro-adjustment mounts are selected depending on the application scenario. The micro-adjustment mounts are standard products and allow for multi-dimensional fine-tuning of the fourth reflector 208's position. The micro-adjustment mounts and the lens frame connectors are connected via threads to ensure connection strength. The lens frame connectors connect to the elongated through-hole on the bottom wall for convenient optical path adjustment.

[0133] The Raman detection device 2 also includes at least one dichroic mirror 207. The at least one dichroic mirror 207 is disposed in the first housing 201.

[0134] In some illustrative embodiments, such as Figure 4 As shown, the Raman detection device 2 includes seven fourth mirrors 208 and two dichroic mirrors 207.

[0135] The dichroic mirror 207 can be mounted on a micro-adjustment frame (e.g., a frameless micro-adjustment frame). The micro-adjustment frame uses a standard product and allows for multi-dimensional fine-tuning of the dichroic mirror 207's position. The micro-adjustment frame and the mirror frame connector are connected via threads to ensure connection strength. The mirror frame connector is connected to the bottom wall via an elongated hole, facilitating optical path adjustment. Different dichroic mirrors 207 can be used to incorporate lasers of different wavelengths into the first optical path without affecting other lasers.

[0136] The Raman detection device 2 also includes a plurality of first apertures 205. The plurality of first apertures 205 are respectively disposed in the first housing 201.

[0137] Multiple first apertures 205 are mounted on the bottom wall of the first housing 201 via aperture mounting brackets, allowing for adjustment of the small hole positions of the first apertures 205 in multiple dimensions.

[0138] At least one of the plurality of first apertures 205 may be disposed in the first optical path between the laser 22 and the filter unit 23 for filtering out stray light.

[0139] The Raman detection device 2 also includes a second focusing lens 209. The second focusing lens 209 is disposed between the first aperture 205 and the second imaging component 25 along the optical path. It is used to focus the first optical signal (i.e., the elastic scattered light with the same wavelength as the laser reflected by the sample) after passing through the first aperture 205 onto the photosensitive surface of the second imaging component 25, so as to reduce the spot size and increase the light intensity per unit area, thereby enhancing the clarity and contrast of the laser image acquired by the second imaging component 25, and thus improving the accuracy and repeatability of laser focusing.

[0140] Figure 8 A side view of a near-infrared detection device according to an embodiment of the present invention is shown. Figure 9 A partial top view of a near-infrared detection device according to an embodiment of the present invention is shown.

[0141] According to embodiments of the present invention, the multiple states also include a near-infrared detection state. The detection device further includes a near-infrared detection device 4. The near-infrared detection device 4 is disposed between the first imaging component 12 and the Raman detection device 2, or between the optical component 13 and the Raman detection device 2, and the near-infrared detection device 4 is configured to acquire the near-infrared spectrum of the sample.

[0142] According to an embodiment of the present invention, the near-infrared detection device 4 includes a second housing 402, a light source 41, a second beam splitter 42 and a second reflector 43 arranged sequentially along the second optical path of near-infrared light, and a near-infrared spectrometer 44. A receiving cavity is formed inside the second housing 402, and the light source 41 is disposed within the receiving cavity, suitable for emitting near-infrared light. The near-infrared spectrometer 44 is disposed outside the second housing 402. When the first reflector 24 is in the second position, the near-infrared light is reflected by the second reflector 43, focused by the optical component 13, and then irradiates the sample. The second light signal carrying the sample information is focused by the optical component 13, reflected by the second reflector 43 to the second beam splitter 42, and the second beam splitter 42 transmits at least a portion of the second light signal to the near-infrared spectrometer 44, which then acquires the near-infrared spectrum.

[0143] The near-infrared detection device 4 can be modular and disposed between the first imaging component 12 and the optical component 13 of the microscopic device 1. Further, the near-infrared detection device 4 can be disposed between the Raman detection device 2 and the first imaging component 12, i.e., the near-infrared detection device 4 is disposed above the Raman detection device 2. It is understood that the near-infrared detection device 4 can also be disposed between the Raman detection device 2 and the optical component 13, i.e., the near-infrared detection device 4 is disposed below the Raman detection device 2.

[0144] According to embodiments of the present invention, the near-infrared detection device 4 can detect the molecular structure and chemical composition of a sample, especially substances that have characteristic absorption of near-infrared light. The physical properties and chemical information of the sample can be obtained by analyzing the absorption, transmission, or reflection spectra of near-infrared light through near-infrared spectroscopy. The chemical information may include chemical functional groups, molecular structure, and chemical composition; the physical properties may include the sample's density, particle size, and crystallinity.

[0145] The Raman detection device 2, the near-infrared detection device 4, and the microscopic device 1 work together to enable the detection equipment to have any of the following states: microscopic state, imaging state, focusing state, occlusion state, and near-infrared detection state.

[0146] According to an embodiment of the present invention, the wavelength range of near-infrared light is approximately 780 nm to 2526 nm.

[0147] According to an embodiment of the present invention, the near-infrared detection device 4 includes a near-infrared spectrometer 44, a light source 41, a second beam splitter 42 and a second reflector 43 arranged sequentially along the second optical path of near-infrared light. The light source 41 is suitable for emitting near-infrared light.

[0148] In near-infrared detection mode, the first reflector 24 is in the second position, see [reference]. Figure 9In the direction indicated by the solid arrow in the figure, near-infrared light is reflected by the second reflecting mirror 43, focused by the optical component 13, and then irradiates the sample. Referring to the direction indicated by the dashed arrow in the figure, the second light signal carrying the sample information is focused by the optical component 13, reflected by the second reflecting mirror 43 to the second beam splitter 42, and the second beam splitter 42 transmits at least a portion of the second light signal to the near-infrared spectrometer 44, where the near-infrared spectrum is acquired.

[0149] In this embodiment, the second beam splitter 42 splits the incident near-infrared light into two beams. One part of the near-infrared light passes through the second beam splitter 42 and illuminates the sample to excite the sample to generate a near-infrared spectral signal. The other part of the near-infrared light is reflected and can be used as a reference optical path to monitor the stability of the light source 41 or to perform background subtraction, thereby improving the accuracy of detection.

[0150] According to an embodiment of the present invention, the switching device further includes a third switching component 405. The third switching component 405 is configured to drive the second reflecting mirror 43 to move between a reflecting position and an off-center position. In the reflecting position, the second reflecting mirror 43 is located within the second optical path and is suitable for reflecting near-infrared light and the second optical signal; in the off-center position, the second reflecting mirror 43 is disengaged from the second optical path. When the first reflecting mirror 24 is in the second position and the second reflecting mirror 43 is in the off-center position, the first imaging component 12 is capable of performing microscopic imaging of the sample.

[0151] With the first reflector 24 in the second position and the second reflector 43 in the reflecting position, the detection device is in near-infrared detection mode.

[0152] The third switching component 405 includes a driving unit and a moving block. The third reflector 202 is disposed on the moving block. The driving unit drives the moving block to move in a direction perpendicular to the second optical path, so that the second reflector 43 can be in or out of the second optical path. The structure of the third switching component 405 can be similar to that of the first switching component 28, and can be understood by referring to the figures and the first switching component 28, and will not be described again here.

[0153] The second housing 402 includes a main body and a cover plate disposed on the main body. The main body is configured as a groove-shaped structure, and the cover plate is closable and disposed on the main body, forming a receiving cavity with the main body. The second beam splitter 42, the third switching assembly 405, and the second reflector 43 are all disposed in the receiving cavity.

[0154] The main body features a one-piece design to ensure strength. It can be connected to the cover plate via threads (or snap-fit) to form a second housing 402, protecting the components located within the receiving cavity. A quick-release dovetail male connector (located in the third through hole, which will be described in detail later) is installed on the bottom wall of the main body facing the cover plate, allowing for the stacking and fixing of the microscope module and other modules. A quick-release dovetail female connector can be installed on the cover plate facing the quick-release dovetail male connector for stacking and mounting other modules.

[0155] The second reflector 43 is mounted on an adjustment frame, which uses a standard product and allows for multi-dimensional fine-tuning of the position of the second reflector 43. The adjustment frame and the third switching assembly 405 have two threaded connections to ensure connection strength. The third slide rail connects to the bottom wall via an elongated hole for easy adjustment of the optical path. The second reflector 43 forms a 45° angle with the bottom wall, and the main body has a third through-hole along the second optical path. The third through-hole faces the first through-hole 2011.

[0156] In near-infrared detection mode, the third switching component 405 drives the second reflector 43 to be positioned directly above the third through hole, and the light rays (e.g., the second light signal) entering and exiting through the third through hole are refracted into the second housing 402.

[0157] In microscopic mode, the third switching component 405 drives the second reflector 43 to completely move away from directly above the third through hole, so that light rays (e.g., the second light signal) entering or exiting through the third through hole will not enter the interior of the second housing 402.

[0158] The second beam splitter 42 is mounted on an adjustment frame (e.g., a frameless adjustment frame). The adjustment frame uses a standard product and allows for multi-dimensional fine-tuning of the position of the second beam splitter 42. The adjustment frame and the second compensating mirror 45 are mounted together on a beam splitter mounting base, which is threaded to the main body. The second beam splitter 42 and the second compensating mirror 45 are at a 90° angle to each other and at a 45° angle to the main optical path. The second compensating mirror 45 can compensate for the deviation caused by the second beam splitter 42. The second beam splitter 42 reflects 50% of the near-infrared light from the light source 41 of the near-infrared detection device 4 into the second optical path, while simultaneously transmitting 50% of the near-infrared light from the second optical path into the first interface component 49, thereby connecting the light source 41 to the second optical path without affecting the detection.

[0159] The near-infrared detection device 4 also includes a first interface component 49. The first interface component 49 connects the light source 41 to the second housing 402. The first interface component 49 includes a first adjustable lens 48, a first optical fiber connector, and a first mounting sleeve. The first optical fiber connector is mounted on the first mounting sleeve and, together with the first adjustable lens 48, is mounted on the main body. The first optical fiber connector is connected to the light source 41 via a first optical fiber. The first adjustable lens 48 can adjust its focusing position back and forth, converting the light source 41 at the first optical fiber connector into parallel light that enters the second optical path for near-infrared detection.

[0160] The near-infrared detection device 4 also includes a second interface component 401. The second interface component 401 connects the near-infrared spectrometer 44 to the second housing 402. The second interface component 401 includes a second adjustable lens 404, a second fiber optic connector, and a second adjustable mounting bracket. The second fiber optic connector is mounted on the second adjustable mounting bracket and is installed on the main body together with the second adjustable lens 404. The second fiber optic connector is connected to the near-infrared spectrometer 44 via a second optical fiber. The second adjustable mounting bracket can adjust the XY axis position of the second fiber optic connector, and simultaneously, the second adjustable lens 404 can adjust the front and rear focusing positions of the lens, focusing the second optical path light onto the second fiber optic connector and into the second optical fiber for near-infrared detection. The light source 41 is connected to the first interface component 49 via a first optical fiber and is used for near-infrared detection of the light source 41.

[0161] The near-infrared detection device 4 also includes a second aperture 47. The second aperture 47 is disposed in the second optical path and is mounted on the main body via an aperture mounting bracket, allowing for multi-dimensional adjustment of the aperture aperture position. The second aperture 47 is located in the second optical path and is used to filter out stray light.

[0162] In near-infrared detection mode, the third switching component 405 drives the second reflector 43 to be positioned within the second optical path. When the light source 41 is turned on, near-infrared light is converted into parallel light through the first optical fiber and the first interface component 49, entering the second housing 402. The second beam splitter 42 reflects 50% of the near-infrared light into the second optical path. After stray light is filtered out by the second aperture 47, the near-infrared light is reflected by the second reflector 43, passing through the third through-hole and entering the optical component 13 directly below the third through-hole. The near-infrared light is then focused onto the sample surface through the objective lens. The second light signal is collected by the objective lens, converted into parallel light, and returns along the same path. It is reflected by the second reflector 43, passes through the second aperture 47 and the second compensation mirror 45, and 50% of the second light signal passes through the second beam splitter 42 into the second interface component 401. It is focused onto the second optical fiber connector and enters the second optical fiber, then through the second optical fiber into the near-infrared spectrometer 44. By comparing the reference spectrum and the dark background spectrum, near-infrared detection of the sample's reflectance, absorbance, etc., is completed.

[0163] Furthermore, a certain plane region (the plane formed by the width and length directions) on the sample surface can be meshed, and the XY-axis motorized stage can drive the sample to perform near-infrared single-point detection point by point. The result of multi-dimensional parameter fitting calculation can be used as the Z-axis, and the detection position as the XY-axis to generate color and pseudo-3D near-infrared detection images.

[0164] Using the detection equipment provided in this embodiment of the invention, the same sample can be subjected to microscopic imaging, Raman spectroscopy detection, and near-infrared spectroscopy detection, thus completing multi-dimensional detection of the sample.

[0165] In one illustrative embodiment, in the focusing state, taking a 785nm laser as an example, the rotating platform 206 rotates the filter unit 23 to the 785nm position. At this time, the first long-pass filter of 785nm is located in the first optical path, and the second long-pass filter of 785nm is located in the optical path of the scattered signal light. The second switching component 29 drives the first beam splitter 26 and the first compensation mirror 204 to be located in the first optical path; the first switching component 28 drives the first reflector 24 to be located in the first optical path. Other lasers 22 are turned off, and the 785nm laser 22 is turned on. The laser emitted by the nanolaser 22 is completely reflected by the dichroic mirror 207. After the laser passes through the first aperture 205 to filter out stray light, it is reflected by the fourth mirror 208. The laser illuminates the center of the first long-pass filter with a wavelength of 785 nm at an angle, filtering out stray light slightly larger than 785 nm. The vast majority of the laser light with a wavelength of less than or equal to 785 nm is reflected. The reflected laser light passes through another first aperture 205 to filter out stray light again. 50% of the laser light passes through the first beam splitter 26 and the first compensation mirror 204, and is reflected by the first mirror 24 out of the first housing 201. It then enters the optical module located directly below the first housing 201 and is focused onto the sample surface by the objective lens.

[0166] The reflected light from the sample is collected by the objective lens, converted into parallel light rays, and returns along the same path to the first housing 201. The parallel light rays are reflected by the first reflecting mirror 24 and pass through the first compensation mirror 204. 50% of the reflected light passes through the first beam splitter 26 and enters the second imaging component 25. The reflected light is then focused onto the CCD camera by the focusing mirror, completing laser imaging. An automatic adjustment Z-axis motor adjusts the distance between the sample and the objective lens, and an algorithm compares the laser imaging effect to achieve automatic laser focusing. When using laser imaging with other wavelengths, the corresponding wavelength laser 22 is activated, and the rotating platform 206 is rotated to the corresponding position.

[0167] In imaging mode, taking a 785 nm wavelength laser as an example, the rotating platform 206 rotates to the 785 nm position, meaning the 785 nm filter unit 23 is located in both the first optical path and the optical path of the scattered light signal. Specifically, the first long-pass filter 231 is located in the first optical path, and the second long-pass filter 232 is located in the optical path of the scattered light signal. The first beam splitter 26, the first compensation mirror 204, and the blocking plate 27 are completely removed from the first optical path. The first switching component 28 drives the first reflecting mirror 24 to be located within the first optical path. Other lasers 22 are turned off, and the 785 nm laser 22 is turned on. The laser emitted by the 785 nm laser 22 is completely reflected by the dichroic mirror 207. After the laser passes through the first aperture 205 to filter out stray light, it is reflected by the fourth mirror 208 and illuminates the center of the first long-pass filter of 785 nm at an angle. The stray light slightly larger than 785 nm is filtered out, and the vast majority of the laser light less than or equal to 785 nm is reflected out. The reflected laser light passes through another first aperture 205 to filter out stray light again, and is reflected by the first mirror 24 out of the first housing 201 and enters the optical component 13 located directly below the first housing 201. The laser light is focused onto the sample surface through the objective lens.

[0168] The Raman-Stokes scattered light, Rayleigh scattered light, and reflected light excited by the sample are collected by the objective lens, converted into parallel light rays, and return to the first housing 201 along the same path. After being reflected by the first reflecting mirror 24 and filtered out by the first aperture 205, the parallel light rays pass through the first long-pass filter (785 nm) and illuminate the center of the second long-pass filter (785 nm). All Rayleigh scattered light and reflected light are reflected by the second long-pass filter because their wavelengths are less than or equal to 785 nm. The portion of the Raman-Stokes scattered light less than or equal to 785 nm is reflected, and only the portion slightly larger than 785 nm is transmitted. This portion is then filtered and reflected again by the 785 nm long-pass filter, leaving behind the stray light less than or equal to 785 nm that was not filtered out in the previous step. The Raman-Stokes scattered light slightly larger than 785 nm is reflected out of the first housing 201 by the two fourth reflecting mirrors 208 and focused into the Raman spectrometer 21 by the transmission unit for Raman detection. Qualitative and quantitative analysis of the sample is performed by measuring the frequency difference (i.e., Raman shift) between the Raman-Stokes scattered light and the 785 nm laser. When using lasers of other wavelengths for detection, simply turn on the corresponding wavelength laser 22 and rotate the rotating platform 206 to the corresponding position.

[0169] This invention integrates multiple functions such as microscopic imaging, Raman spectroscopy, and near-infrared spectroscopy, enabling comprehensive sample analysis and overcoming the limitations of existing microscopes that cannot simultaneously meet the diverse needs of qualitative and quantitative sample analysis. Furthermore, through a specially designed optical path and the addition of a Z-axis displacement mechanism, this invention possesses three-dimensional imaging capabilities, allowing for three-dimensional imaging and Raman depth scanning of samples, providing a more powerful detection tool for fields such as biomedicine, materials science, and chemical analysis.

[0170] Figure 10 A perspective view of a processor according to an embodiment of the present invention is shown.

[0171] like Figure 1 and Figure 10 As shown, the processor 3 includes a display 31, a control box housing 32, and a microscope base card 33, a Raman detection card 34, a near-infrared detection card 35, a hub 36, a power supply 37, and a motor driver 38, all housed within the control box housing 32. The control box housing 32 is mounted on a bracket 51. The microscope base card 33 is installed inside the control box housing 32. The Raman detection card 34 and the near-infrared detection card 35 are installed in the slots of the microscope base card 33. The microscope base card 33 has reserved slots to add or remove detection cards according to the number of detection modules required. The Raman detection card 34 controls the Raman detection module via a cable, and the near-infrared detection card 35 controls the near-infrared detection module via a cable. The hub 36, installed inside the control box housing 32, connects all devices via cables and receives control from the host computer (display 31).

[0172] The motor driver 38 can be used to drive the motor movement of the first motor, the second motor 291, the third motor and the rotating platform 206.

[0173] Power supply 37 powers the entire detection equipment by converting 220V AC power into DC power of different voltage amplitudes (e.g., 24V DC power) through a step-down and voltage-regulating circuit to provide power to each module. In this embodiment, power supply 37 powers the sample stage 11, the second imaging component 25, the Raman spectrometer 21, the laser 22, the first motor, the second motor 291, the third motor, the rotating platform 206, the motor driver 38, the display 31, the near-infrared light source 41, and the near-infrared spectrometer 44.

[0174] This invention integrates the overall control functions and data processing and analysis functions of the equipment by developing a systematic host computer software. Operators can easily control the operating parameters of each detection module, reducing the difficulty of operation and enabling non-professionals to quickly master the use of the equipment, thus improving its ease of use and widespread adoption.

[0175] The detection device provided in this embodiment of the invention is a modular, multi-dimensional detection device. The processor 3 enables the detection device to switch between imaging mode, microscopic mode, focusing mode, occlusion mode, and near-infrared detection mode. Through modular design and multi-module, multi-dimensional detection, it overcomes the limitations of existing microscopes, such as limited functionality, high cost, and lack of scalability.

[0176] This invention employs a modular design for different detection devices, incorporating various detection functions (such as microscopic imaging, Raman spectroscopy, and near-infrared spectroscopy) into independent functional modules. This design allows different microscopic devices to select and combine different functional modules according to actual needs, improving the flexibility and scalability of the detection equipment and overcoming the limitations of existing microscopes that are single-function and lack scalability. Users can customize the equipment according to different detection requirements, enhancing its versatility and practicality.

[0177] This invention reduces production costs by adopting a modular design and standardized components, overcoming the shortcomings of existing high-end microscopes, which are expensive and not conducive to widespread application.

[0178] The embodiments of the present invention have been described above. However, these embodiments are merely illustrative and not intended to limit the scope of the invention. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. The scope of the invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the invention, and all such substitutions and modifications should fall within the scope of the invention.

Claims

1. A testing device, characterized in that, include: The microscopic apparatus includes a sample stage suitable for holding a sample, an optical component and a first imaging component spaced apart from the sample stage in the height direction; A Raman detection device is disposed between the optical component and the first imaging component, and shares an optical path with the microscopic device; A switching device is suitable for switching a detection device between multiple states, including: The microscopic state that allows the first imaging component to perform microscopic imaging of the sample placed on the sample stage through the shared optical path; The laser generated by the Raman detection device is allowed to illuminate the sample through the common optical path to obtain the imaging state of the Raman image of the sample; The laser is allowed to irradiate the sample through the common optical path, and the Raman detection device is used to receive the first light signal reflected by the sample with the same wavelength as the laser to perform laser focusing. The common optical path is located between the sample stage and the first reflecting mirror of the switching device; The switching device includes: The first housing has a cavity; A laser, disposed within the cavity, is adapted to emit the laser; The second imaging component is disposed in the first housing and located outside the cavity, and is adapted to receive the first optical signal in order to perform laser focusing based on the first optical signal; A Raman spectrometer, disposed outside the first housing, is adapted to receive Raman scattering of the sample under irradiation by at least a portion of the laser, generating a scattered light signal containing molecular vibrational information of the sample, so as to generate the Raman image based on the scattered light signal; The first beam splitter is disposed within the cavity; The second switching component is configured to drive the first beam splitter to move between a third position and a fourth position; At the third position, the first beam splitter is located in the first optical path of the laser, and at least a portion of the laser passes through the first beam splitter to irradiate the sample; and the first optical signal is reflected by the first mirror to the first beam splitter, and the first beam splitter transmits the first optical signal to the second imaging component; At the fourth position, the first beam splitter is disconnected from the first optical path, and the scattered light signal is reflected to the Raman spectrometer via the first reflecting mirror.

2. The detection device according to claim 1, characterized in that, The first housing has a first through hole formed on its bottom wall facing the common optical path, and a second through hole formed on its top wall facing the first through hole; The switching device includes: A first reflecting mirror is disposed within the cavity; A first switching component is configured to drive the first reflector to move between a first position and a second position; At the first position, the first reflector is positioned on the first optical path of the laser to change the propagation path of the laser, allowing the laser to pass through the first through-hole and couple to the common optical path; and to change the propagation path of the scattered light signal or the first light signal; In the second position, the first reflector is offset from the first optical path to avoid the first through hole and the second through hole, so that the light signal reflected by the sample can pass through the first through hole and the second through hole in sequence and be incident on the first imaging component, so that the first imaging component can perform the microscopic imaging.

3. The detection device according to claim 2, characterized in that, The first switching component includes: A slider, wherein the first reflector is disposed on the slider; A driving unit, disposed on the bottom wall, is adapted to drive the slider to translate, so that the first reflector translates between the first position and the second position.

4. The detection device according to claim 1, characterized in that, The multiple states also include: a blocking state that prevents the laser from entering the shared optical path; The switching device further includes: A blocking plate is disposed at a distance from the first beam splitter in the second switching assembly to translate between the fifth and sixth positions; At the fifth position, the shielding plate is positioned in the first optical path, preventing the laser from illuminating the first reflector; At the sixth position, the shielding plate is disengaged from the first optical path, allowing the laser to couple to the common optical path through the first reflector.

5. The detection device according to claim 1, characterized in that, The number of lasers is multiple, and the wavelengths of the lasers emitted by the multiple lasers are configured to be different; The Raman detection device further includes: A rotating platform is disposed within the cavity; Multiple filter units, each matched to the wavelength of a plurality of lasers, are arranged at circumferential intervals on the rotating platform. Based on the target wavelength of the target laser among the plurality of lasers, the rotating platform is driven to rotate, so that the target filter unit matched with the target wavelength is placed in the first optical path to reflect the laser emitted by the target laser.

6. The detection device according to claim 2, characterized in that, The plurality of states also includes: near-infrared detection state; the detection device further includes: A near-infrared detection device is disposed between the first imaging component and the Raman detection device, or between the optical component and the Raman detection device, wherein the near-infrared detection device is configured to acquire the near-infrared spectrum of the sample.

7. The detection device according to claim 6, characterized in that, The near-infrared detection device includes: The shell has an internal cavity for receiving the contents; A light source, disposed in the receiving cavity, is suitable for emitting near-infrared light; A second beam splitter and a second reflecting mirror are arranged sequentially along the second optical path of the near-infrared light; A near-infrared spectrometer is disposed outside the housing; When the first reflector is in the second position, the near-infrared light is reflected by the second reflector, focused by the optical component, and then irradiates the sample. The second light signal carrying the information of the sample is focused by the optical component, reflected by the second reflector, and then sent to the second beam splitter. The second beam splitter transmits at least a portion of the second light signal to the near-infrared spectrometer, which then acquires the near-infrared spectrum.

8. The detection device according to claim 7, characterized in that, The switching device further includes: A third switching component is configured to drive the second reflector to move between a reflecting position and an off-center position; At the reflection position, the second reflector is located within the second optical path and is suitable for reflecting the near-infrared light and the second optical signal; At the offset position, the second reflector is disengaged from the second optical path; With the first mirror in the second position and the second mirror in the offset position, the first imaging component is capable of performing microscopic imaging on the sample.

Images