Image template matching method for wafer image and related product

By using a machine learning-based algorithm to extract wafer image feature information and automatically selecting the best algorithm combination for image template matching, the problem of low efficiency and unstable accuracy in existing technologies is solved, and efficient and accurate wafer image matching is achieved.

CN122244475APending Publication Date: 2026-06-19DONGFANG JINGYUAN ELECTRON LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
DONGFANG JINGYUAN ELECTRON LTD
Filing Date
2026-03-30
Publication Date
2026-06-19

AI Technical Summary

⚠Technical Problem

Existing wafer image template matching methods rely on human experience, resulting in low efficiency and unstable accuracy.

⚗Method used

A machine learning-based algorithm is used to select a model to extract feature information from wafer images, and the combination with the highest matching accuracy is selected from multiple candidate algorithm combinations for image template matching.

🎯Benefits of technology

It improves the efficiency and accuracy of wafer image template matching, reduces human intervention, and the output results are not affected by subjective experience. Furthermore, the accuracy can be continuously improved through training.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention provides an image template matching method and related products for wafer images. The image template matching method includes acquiring a template image of the target wafer and a detection image to be matched; using a machine learning-based algorithm selection model to extract feature information from the template image and the detection image; and based on the extracted feature information, determining one or more combinations with the highest matching accuracy among multiple candidate image processing algorithm combinations as the target algorithm combination; and using the target algorithm combination to perform image template matching on the template image and the detection image. This method significantly improves the matching efficiency and accuracy of wafer image template matching.
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