Emergency power supply system and method for circulating water pump

Abstract

This invention discloses an emergency power supply system and method for circulating water pumps. The disclosed emergency power supply system for circulating water pumps includes: an energy storage module, an energy storage converter module, and a load matching module. The energy storage module is composed of multiple lithium iron phosphate battery packs connected in parallel. The DC side of the energy storage converter module is connected to the energy storage module, and the AC side of the energy storage converter module is connected to the mains power input terminal and the power supply terminal of each group of circulating water pumps respectively through a dual power supply switching unit. The load matching module includes an inrush current compensation unit and a dynamic load adjustment unit. The inrush current compensation unit is connected in parallel with the energy storage module. The dynamic load adjustment unit includes a current power sensor and a PID closed-loop control module. The current power sensor is connected to the power supply circuit of the circulating water pump, and the PID closed-loop control module is connected to the current power sensor and the energy storage converter module. Thus, this invention improves the real-time performance, reliability, and stability of emergency power supply.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to an emergency power supply system and method for a circulating water pump. Background Technology

[0002] In the semiconductor wafer manufacturing process, circulating water pumps are the core power equipment ensuring process cooling and constant equipment temperature operation. This circulating water pump system must operate continuously without interruption. If a power outage causes the circulating water pumps to stop, it can lead to wafer scrapping, equipment damage, and even safety accidents, with daily economic losses exceeding ten million yuan. Therefore, the emergency power supply system for the circulating water pumps must guarantee millisecond-level switching, high-power load adaptability, and high reliability.

[0003] In some scenarios, diesel generators are commonly used in the industry as emergency power supply equipment for circulating water pumps. However, for the actual operating conditions of multiple high-power circulating water pumps, traditional diesel generators generally suffer from long start-up response times, and the concentrated impact load when multiple circulating water pumps start simultaneously can easily cause a sudden drop in the output voltage of the diesel generator and unstable power supply. Therefore, traditional diesel generators, as emergency power supply equipment for circulating water pumps, have low real-time performance, reliability, and stability, and cannot meet the requirements of millisecond-level switching, high-power load adaptation, and high reliability of emergency power supply systems for circulating water pumps. Summary of the Invention

[0004] This invention discloses an emergency power supply system for circulating water pumps to solve the problems of low real-time performance, reliability, and stability of emergency power supply in traditional circulating water pump emergency power supply equipment.

[0005] To solve the above-mentioned technical problems, the present invention is implemented as follows:

[0006] This application discloses an emergency power supply system for a circulating water pump. The disclosed emergency power supply system includes: an energy storage module, an energy storage converter module, and a load adaptation module. The energy storage module consists of multiple lithium iron phosphate battery packs connected in parallel. The DC side of the energy storage converter module is connected to the energy storage module, and the AC side of the energy storage converter module is connected to the mains power input terminal and the power supply terminal of each group of circulating water pumps respectively through a dual power switching unit. This is used to convert the DC power from the energy storage module to AC power through switching of the dual power switching unit when the mains power fails. The load adaptation module includes an impact... The system includes a current compensation unit and a dynamic load regulation unit. The impact current compensation unit is connected in parallel with the energy storage module to compensate for the concentrated impact load of the circulating water pump when it starts up. The dynamic load regulation unit includes a current power sensor and a PID closed-loop control module. The current power sensor is connected to the power supply circuit of the circulating water pump to collect the operating current and power data of the circulating water pump. The PID closed-loop control module is connected to the current power sensor and the energy storage converter module to adjust the output voltage and frequency of the energy storage converter module according to the operating current and power data.

[0007] Optionally, the dual power supply switching unit includes a mechanical-electronic composite dual power supply switching unit, which is connected to the mains power input terminal and the AC output terminal of the energy storage converter module, respectively. The common output terminal of the dual power supply switching unit is connected to the power supply terminal of each group of circulating water pumps.

[0008] Optionally, the inrush current compensation unit includes a supercapacitor bank and a bidirectional DC / DC converter, which is connected in series with the supercapacitor bank and then in parallel with the energy storage module.

[0009] Optionally, the current power sensor includes: a three-phase current power sensor; the input terminal of the three-phase current power sensor is connected to the power supply circuit of the circulating water pump, the output terminal of the three-phase current power sensor is connected to the input terminal of the PID closed-loop control module, and the output terminal of the PID closed-loop control module is connected to the control terminals of the inrush current compensation unit and the energy storage converter module respectively.

[0010] Optionally, the emergency power supply system for the circulating water pump also includes: a control module; the control module includes a controller and a communication interface, the controller being connected to the energy storage converter module, the load adaptation module, the battery management system of the energy storage module, and the frequency converter controller of the water pump through the communication interface; the control module is used to automatically cut off the auxiliary water pump power supply circuit when the energy storage SOC value of the energy storage module drops to a set threshold, and send a frequency reduction command to the frequency converter controller of the circulating water pump to extend the emergency power supply time of the circulating water pump.

[0011] Optionally, the emergency power supply system for the circulating water pump also includes an environmental adaptation module; the environmental adaptation module includes a temperature and humidity sensor, a heater, a dehumidifier, and a cooling fan. The temperature and humidity sensor, heater, dehumidifier, and cooling fan are all connected to the control module and arranged inside the energy storage module's housing to maintain the temperature and humidity inside the energy storage module's housing within a set range.

[0012] Optionally, the power supply terminals of each group of circulating water pumps are connected to each group of independent power supply circuits of the load-side distribution cabinet, and each group of independent power supply circuits is connected to a group of circulating water pumps, with each group of independent power supply circuits connected in parallel.

[0013] This application also discloses a control method for an emergency power supply system for a circulating water pump. The emergency power supply system for the circulating water pump is the same as the emergency power supply system for the circulating water pump of the first aspect. The control method includes: when the mains power supply is normally supplying power to multiple circulating water pumps, controlling the energy storage converter module to operate in rectification mode to convert the mains power into DC power for float charging of the energy storage module; when the mains voltage is detected to be lower than a first threshold and the duration reaches a second threshold, controlling the energy storage converter module to switch to energy storage module to convert the DC power of the energy storage module into AC power to supply the circulating water pump; and controlling the load adaptation module when the circulating water pump starts to compensate for the concentrated impact load of the circulating water pump.

[0014] Optionally, when the circulating water pump starts, the load adaptation module is controlled to compensate for the concentrated impact load of the circulating water pump. This includes: the impact current compensation unit of the load adaptation module releasing a large instantaneous current to compensate for the impact load when the circulating water pump starts; when all circulating water pumps are in the starting state, the current and power sensors in the dynamic load adjustment unit of the load adaptation module collect the operating data of the circulating water pumps, and adjust the output voltage and frequency of the energy storage converter module through the PID closed-loop control module in the dynamic load adjustment unit to adapt to the dynamic power fluctuation of the circulating water pumps.

[0015] Optionally, after controlling the energy storage converter module to switch to the energy storage module to convert the DC power of the energy storage module into AC power to supply the circulating water pump, the method further includes: obtaining the SOC value of the energy storage module and the operating data of the circulating water pump; issuing an early warning when the SOC value drops to the third threshold; cutting off the power supply circuit of the auxiliary water pump and sending a frequency reduction command to the frequency converter controller of the circulating water pump when the SOC value drops to the fourth threshold and the mains power has not been restored, so as to extend the emergency power supply time of the circulating water pump; and controlling the energy storage converter module to synchronize the power supply voltage and frequency of the energy storage module with the mains power when the mains power is restored to the fifth threshold and the continuous stable time reaches the sixth threshold, and then controlling the dual power supply switching unit to seamlessly switch to the mains power to supply power to the circulating water pump.

[0016] After the mains power is restored, a reset command is sent to the frequency converter controller of the circulating water pump to restore the normal mains power supply to all circulating water pumps, and the energy storage converter module is controlled to switch back to rectification mode to float charge the energy storage module.

[0017] The technical solution adopted in this invention can achieve the following technical effects:

[0018] The emergency power supply system for the circulating water pump disclosed in this application uses an energy storage module composed of multiple lithium iron phosphate battery packs connected in parallel as the emergency power supply module. The energy storage module has instantaneous discharge capability, and the energy storage converter module has rapid switching capability. In the instant of mains power failure, a dual power supply switching unit can switch between mains power and the energy storage module, quickly converting the DC power from the energy storage module into AC power required by the circulating water pump. Through this structure, the switching process can achieve millisecond-level response, improving the real-time performance of emergency power supply. Furthermore, the inrush current compensation unit in the load adaptation module of this embodiment is connected in parallel with the energy storage module, rapidly outputting a compensation current at the moment the circulating water pump starts, offsetting the impact of concentrated inrush loads on the power supply circuit, and avoiding the sudden drop in output voltage or even shutdown of traditional diesel generators due to inrush loads. Simultaneously, the energy storage module composed of multiple lithium iron phosphate battery packs connected in parallel has sufficient capacity reserve and power output capability, and can stably support the simultaneous start-up load of multiple high-power circulating water pumps, thereby improving the adaptability of the emergency power supply system to high-power loads. Furthermore, the dynamic load regulation unit collects real-time current and power data during the operation of the circulating water pump via current and power sensors, and feeds this data back to the PID closed-loop control module. Based on the collected real-time data, the PID closed-loop control module adjusts the output voltage and frequency of the energy storage converter module, ensuring that the power supply parameters always match the operating requirements of the circulating water pump. This addresses power supply fluctuations caused by load fluctuations during pump operation, preventing voltage and frequency deviations, improving the stability and reliability of emergency power supply, reducing the risk of pump failures due to unstable power supply, and extending equipment lifespan. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the emergency power supply system for the first circulating water pump disclosed in an embodiment of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of the emergency power supply system for the second type of circulating water pump disclosed in an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of the emergency power supply system for the third type of circulating water pump disclosed in an embodiment of the present invention;

[0022] Figure 4This is a flowchart of a control method for an emergency power supply system for a circulating water pump disclosed in an embodiment of the present invention. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0024] This application discloses an emergency power supply system for a circulating water pump. The technical solutions disclosed in various embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0025] Please refer to Figures 1 to 3 This invention discloses an emergency power supply system for a circulating water pump. The disclosed emergency power supply system for the circulating water pump includes: an energy storage module 10, an energy storage converter module 20, and a load adaptation module 30.

[0026] The energy storage module 10 consists of multiple lithium iron phosphate battery packs connected in parallel. The DC side of the energy storage converter module 20 is connected to the energy storage module 10, and the AC side of the energy storage converter module 20 is connected to the mains power input terminal and the power supply terminal of each group of circulating water pumps 40 through a dual power switching unit 201. This dual power switching unit 201 is used to convert the DC power of the energy storage module 10 into AC power when the mains power fails. The load adaptation module 30 includes an inrush current compensation unit 301 and a dynamic load adjustment unit 302. The inrush current compensation unit 301 is connected in parallel with the energy storage module 10. The connection is used to compensate for the concentrated impact load of the circulating water pump 40 when it starts; the dynamic load adjustment unit 302 includes a current power sensor 3020 and a PID closed-loop control module 3021. The current power sensor 3020 is connected to the power supply circuit of the circulating water pump 40 and is used to collect the operating current and power data of the circulating water pump 40. The PID closed-loop control module 3021 is connected to the current power sensor 3020 and the energy storage converter module 20 and is used to adjust the output voltage and frequency of the energy storage converter module 20 according to the operating current and power data.

[0027] Specifically, the energy storage module 10 is the core of the emergency power supply system, employing a lithium iron phosphate battery pack. This battery pack features high safety, long cycle life, and stable charge / discharge performance, making it suitable for high-power emergency power supply needs. For example, the specifications of the lithium iron phosphate battery pack are as follows: 3.2V / 280Ah per cell, 120 cells connected in series to form a 384V DC bus, and eight 100kWh battery packs connected in parallel to form a total capacity of 800kWh. This is sufficient to provide continuous emergency power for 2 hours to five core 75kW circulating water pumps (total power 375kW), with a 10% power loss margin reserved.

[0028] Furthermore, the energy storage module 10 is equipped with a high-precision battery management system for real-time monitoring of the voltage, temperature, and state of charge (SOC) of each battery pack, and features quadruple protection against overcharge, over-discharge, over-temperature, and overcurrent. The battery management system also supports automatic balancing control of individual cells, effectively extending the battery pack's lifespan to over 8 years. For ease of maintenance, the energy storage module 10 adopts a modular parallel installation method, with the eight battery packs arranged independently, facilitating routine inspections, fault replacement, and system expansion.

[0029] Furthermore, the energy storage converter module 20 includes a power conversion system (PCS), whose DC side is connected to the energy storage module 10, and whose AC side is connected to the mains power input and the power supply terminals of each group of circulating water pumps 40 respectively through a dual power switching unit 201. It supports both ballast float charging and inverter power supply modes. When the mains power is normal, it operates in rectification mode, converting the mains power into DC power for float charging of the energy storage module 10. When the mains power fails, the dual power switching unit 201 switches the DC power from the energy storage module 10 to a stable 380V three-phase AC power supply to the circulating water pumps 40. For example, the rated capacity of the energy storage converter module 20 is 560kW, which is 1.5 times the total power of the five core water pumps (375kW), providing good load adaptability. Its input / output design is as follows:

[0030] Mains power incoming line connection: The 0.4kV low-voltage mains bus in the plant area is connected point-to-point to the mains side incoming terminal (L1 / L2 / L3 / N / PE) of the dual power supply switching unit 201 via the incoming line isolating switch and surge protector, which is the conventional main power supply circuit; the electronic sampling circuit is synchronously connected to the mains incoming terminal to monitor the mains power supply quality in real time.

[0031] Energy storage side incoming line connection: The AC output terminal of the energy storage converter module 20 is connected to the energy storage side incoming line terminal (L1' / L2' / L3' / N' / PE) of the dual power supply switching unit 201 via the outgoing line reactor and harmonic filter unit, which is an emergency power supply backup circuit; the electronic sampling circuit is synchronously connected in parallel to the energy storage side incoming line terminal to monitor the stability of the energy storage power supply output voltage and frequency.

[0032] Load-side outgoing wiring: The common outgoing terminal of the dual power supply switching unit 201 is directly connected to the main incoming power distribution cabinet busbar, and supplies power to 10 circulating water pumps 40 through grouped branch circuits, realizing the choice between mains power and energy storage module 10 for power supply.

[0033] Furthermore, as an optional embodiment of the present invention, the dual power supply switching unit includes a mechanical-electronic composite dual power supply switching unit, which is connected to the mains power input terminal and the AC output terminal of the energy storage converter module, respectively, and the common output terminal of the dual power supply switching unit is connected to the power supply terminal of each group of circulating water pumps.

[0034] Specifically, in the mechanical-electronic composite dual power supply switching unit of this invention, the electronic switch achieves fast switching of ≤20ms, while the mechanical switch undertakes steady-state power supply, avoiding long-term aging of the electronic switch under load.

[0035] More specifically, the mechanical-electronic hybrid dual power supply switching unit includes: a mechanical switching module, mainly composed of electromagnetic or motor-driven mechanical switches. Under normal mains power supply, this mechanical switching module prioritizes connecting the mains input terminal and the common output terminal. An electronic switching module, mainly composed of high-power thyristors and other power electronic devices, is primarily used to handle emergencies such as voltage dips and momentary power outages. A control unit includes a voltage sampling circuit, a phase detection circuit, and a logic controller. This control unit monitors the voltage, frequency, and phase of the two input power supplies in real time. When the mains power is normal, the control unit controls the mechanical switching module to close, connecting the mains input terminal and the common output terminal. At this time, the circulating water pump is powered by the mains. The electronic switching module is in a standby blocking state and does not participate in conduction, avoiding continuous losses from the power electronic devices. When the control unit detects an abnormality in the mains power, it quickly triggers the electronic switching module to conduct, switching the power path from the mains to the energy storage converter side in a very short time, ensuring uninterrupted operation of the circulating water pump motor and preventing production accidents caused by power outages. After the electronic switching module establishes a connection, the control unit sends a trip command to the mechanical switching module to disconnect it from the mains power supply; simultaneously, it sends a closing command to the mechanical switching module connected to the energy storage converter. Once the mechanical switching module connected to the energy storage converter has closed and its state is stable, the control unit cancels the trigger signal to the electronic switching module, shutting it down. At this point, the power supply task is taken over by the mechanical switching module, and the electronic switching module returns to standby mode.

[0036] Furthermore, the load adaptation module 30 includes an inrush current compensation unit 301 and a dynamic load adjustment unit 302. The inrush current compensation unit 301 is connected in parallel with the energy storage module 10 and is used to compensate for the concentrated inrush load when the circulating water pump 40 starts. This unit consists of a 1000F / 400V supercapacitor bank and a 200kW bidirectional DC / DC converter. Utilizing the characteristics of supercapacitors—fast charging and discharging speed and strong high-current output capability—when the circulating water pump 40 starts, the inrush current compensation unit 301 releases a large instantaneous current within 10ms, which is superimposed with the output current of the energy storage module 10 to compensate for the starting impact of 2.5 times the rated current of the 75kW water pump, controlling the starting current fluctuation of a single water pump to within 1.2 times the rated current. This unit supports sequential compensation of the inrush current of multiple core water pumps starting at different times, avoiding power instability caused by concentrated impacts.

[0037] Furthermore, the dynamic load adjustment unit 302 is used to adjust the output parameters of the energy storage converter module 20 in real time to adapt to the dynamic power fluctuations of the circulating water pump 40. Its composition and connection relationship are as follows: Current power sensor 3020: connected to the power supply circuit of the circulating water pump 40, using a three-phase current power sensor, transmits the collected current and power data to the PID closed-loop control module 3021 via a shielded signal line. PID closed-loop control module 3021: connected to the current power sensor 3020 and the energy storage converter module 20, after receiving the sensor data, dynamically adjusts the output voltage and frequency of the energy storage converter module 20 through a PID closed-loop control algorithm, accurately adapting to the dynamic power fluctuations of a single water pump within the range of 60% to 110% of its rated power, ensuring that the power supply voltage fluctuation is ≤±0.5% and the frequency fluctuation is ≤±0.1Hz. The PID closed-loop control module 3021 and the inrush current compensation unit 301 are also linked: the PID closed-loop control module can send control commands to the inrush current compensation unit 301, and the compensation unit feeds back the operating signal to the PID closed-loop control module, forming a closed-loop linkage; at the same time, the PID closed-loop control module is interconnected with the energy storage converter module 20 through the communication bus, and sends coordination commands. The inrush current compensation unit 301 is connected in parallel to the 384V DC bus, indirectly cooperating with the energy storage converter module 20 to stabilize the voltage.

[0038] Furthermore, as an optional embodiment of the present invention, the impact current compensation unit 301 includes a supercapacitor bank and a bidirectional DC / DC converter, wherein the bidirectional DC / DC converter is connected in series with the supercapacitor bank and then connected in parallel with the energy storage module.

[0039] Specifically, the inrush current compensation unit 301 is used to suppress the current surge of several times the rated current generated when the 75kW high-power circulating water pump 40 starts, avoiding the risk of voltage drop or overload on the energy storage converter module 20 and the power supply network. This unit consists of a supercapacitor bank connected in series with a bidirectional DC / DC converter, and the whole unit is connected in parallel to the 384V DC bus of the energy storage module 10.

[0040] For example, in this embodiment of the invention, the inrush current compensation unit 301 can be composed of a 1000F / 400V supercapacitor bank connected in series with a 200kW bidirectional DC / DC converter, and then connected in parallel with the energy storage module. The supercapacitor bank has millisecond-level charge and discharge response capability, and can instantly release thousands of amperes of current, thereby matching the inrush demand of 2.5 times the rated current (approximately 468A) when the water pump starts. By reasonably configuring the capacity of the capacitor bank, the cumulative impact of multiple water pumps starting sequentially can be continuously compensated, ensuring that the bus voltage drop at the moment of each water pump's start-up is controlled within the allowable range. The bidirectional DC / DC converter has a rated power of 200kW and adopts a high-frequency isolated topology. One end is electrically connected to the supercapacitor bank, and the other end is directly connected to the 384V DC bus. The converter integrates a digital signal processor to detect the bus voltage, capacitor bank voltage, and current in real time, and automatically switches the operating mode according to the upper-level control commands. When the starting signal of the circulating water pump 40 is detected, the converter immediately controls the supercapacitor bank to release electrical energy to the DC bus. The discharge current rises rapidly at a preset slope, reaching its peak within 10ms, and is superimposed with the output current of the energy storage module 10 to meet the pump's starting impact requirements. The converter employs a constant power or constant current control strategy to ensure a smooth discharge process that does not exceed the safe range of the capacitor bank. After the circulating water pump 40 has started or when the system is in standby mode, the converter switches to charging mode, drawing electrical energy from the DC bus to supplement the charging of the supercapacitor bank. The charging process is monitored in conjunction with the power management system to prevent overvoltage and overcurrent, and can automatically adjust the charging rate according to bus voltage fluctuations to avoid placing an additional burden on the energy storage module. The supercapacitor bank voltage is typically maintained in the 380V~400V range to respond to the next impact.

[0041] In summary, the inrush current compensation unit 301 utilizes the characteristics of supercapacitors—fast charging and discharging speed and strong high-current output capability—to release a large instantaneous current within 10ms when the circulating water pump starts. This current is superimposed on the output current of the energy storage module 10 to compensate for the starting impact of 2.5 times the rated current of the 75kW circulating water pump, keeping the starting current fluctuation of a single circulating water pump within 1.2 times the rated current. It also supports sequential compensation of the inrush current when multiple circulating water pumps start at different times, avoiding power instability caused by concentrated impacts.

[0042] More specifically, the inrush current compensation unit 301 is linked with the dynamic load regulation unit 302 and the energy storage converter module 20. The PID closed-loop control module 3021 sends the compensation current reference value to the bidirectional DC / DC converter in real time via the communication bus, and simultaneously receives real-time current, voltage, and fault status feedback from the converter, forming a closed-loop regulation. When multiple circulating water pumps start at different times, the PID closed-loop control module allocates the compensation current for each inrush according to the starting sequence and the current bus status, ensuring reasonable energy distribution of the supercapacitor bank and avoiding over-discharge. The bidirectional DC / DC converter has built-in overcurrent, overtemperature, and short-circuit protection functions and has a hard-wired interlock interface with the power management system. Once the supercapacitor bank voltage is abnormal or the temperature exceeds the limit, the converter immediately locks the output and uploads an alarm signal to the linkage control module, while simultaneously notifying the energy storage converter module 20 to adjust the operating strategy to ensure system safety.

[0043] Furthermore, as an optional embodiment of the present invention, the current power sensor includes: a three-phase current power sensor; the input terminal of the three-phase current power sensor is connected to the power supply circuit of the circulating water pump, the output terminal of the three-phase current power sensor is connected to the input terminal of the PID closed-loop control module, and the output terminal of the PID closed-loop control module is connected to the control terminals of the inrush current compensation unit and the energy storage converter module respectively.

[0044] Specifically, in this embodiment of the invention, the three-phase current and power sensor transmits the collected current and power data to the PID closed-loop control module via a shielded signal line; the two are directly connected by the sampling signals. It is directly connected to the inrush current compensation unit 301. The PID closed-loop control module outputs control commands to the inrush current compensation unit 301, and the inrush current compensation unit 301 feeds back operating signals to the PID closed-loop control module, forming a closed-loop linkage. It is also connected to the energy storage converter module via a communication bus, issuing coordination commands. The inrush current compensation unit 301 is connected in parallel to the 384V DC bus of the energy storage module, indirectly cooperating with the energy storage converter for voltage regulation.

[0045] More specifically, the input terminal of the three-phase current power sensor is connected to the power supply circuit 51 of the circulating water pump 40. Specifically, the three-phase current power sensor can be connected in series with the main circuit of the pump motor to collect parameters such as three-phase current, voltage, and power factor during pump operation in real time, thereby calculating instantaneous active and reactive power. After converting the physical analog quantity into a standard industrial signal, the sensor transmits it to the input terminal of the PID closed-loop control module 3021 through its output terminal. The PID closed-loop control module 3021 can employ a dedicated controller based on a microcontroller unit or a programmable logic controller. This module has pre-set proportional, integral, and derivative control algorithms optimized for the circulating water pump's operating conditions. The module receives the real-time power / current signal from the sensor 10 and compares it with the internally set target power value (i.e., the desired current value) to calculate the deviation. The output terminal of the PID closed-loop control module 3021 is divided into two paths: the first path is connected to the control terminal of the impact current compensation unit 301; the second path is connected to the control terminal of the energy storage converter module 20.

[0046] More specifically, after the system is powered on, the three-phase current and power sensors continuously monitor the operating status of the circulating water pump 40. When the pump is running normally, the sensors feed back the real-time current / power signal to the PID closed-loop control module 3021. The comparator inside the PID closed-loop control module 3021 compares the real-time value with a user-set threshold. This threshold is typically set to 100%-120% of the pump's rated current, or a safety upper limit is set based on the grid capacity. When the circulating water pump 40 starts or grid fluctuations cause a sharp increase in current, the current value detected by the sensor 10 rises rapidly. Once the real-time value exceeds the set threshold, the PID closed-loop control module 3021 is immediately triggered. The PID closed-loop control module 3021 performs rapid calculations based on the magnitude and trend of the deviation (derivative action). The P parameter determines the response speed, the I parameter eliminates steady-state error, and the D parameter is used to suppress current overshoot. Based on the PID calculation results, the PID closed-loop control module 3021 simultaneously issues commands to two execution units:

[0047] Controlling the inrush current compensation unit 301: When a current surge is detected, the PID closed-loop control module 3021 first sends a trigger signal to the inrush current compensation unit 301. This inrush current compensation unit 301 internally contains a power capacitor or supercapacitor module. Upon receiving the signal, it immediately injects reactive current into the power grid or provides instantaneous active power support through its output circuit to fill the current spike and clamp the total current of the power supply circuit within a safe range.

[0048] Controlling the energy storage converter module 20: While the inrush current compensation unit 301 performs instantaneous compensation, the PID closed-loop control module 3021 also sends adjustment commands to the energy storage converter module 20. The energy storage converter module 20 is connected to a battery pack or energy storage device. According to the commands, the energy storage converter module 20 adjusts the switching duty cycle of its power transistors to achieve bidirectional energy flow: during current surges, it controls the energy storage device to discharge, assisting the motor operation; during current dips or motor braking, it controls the energy storage device to absorb excess energy.

[0049] During the compensation process, the three-phase current power sensor continuously monitors the current change. When the current value is pulled back to within the threshold, the PID closed-loop control module 3021 gradually reduces the output signal through its integral action. First, it shuts down the instantaneous compensation of the inrush current compensation unit 301, and then adjusts the energy storage converter module 20 to restore it to standby or charging state, and the system enters steady-state operation.

[0050] For example, in this embodiment of the invention, the operating current and power data of each core 75kW water pump are collected in real time. Through the PID closed-loop control algorithm, the output voltage and frequency of the energy storage converter are dynamically adjusted to accurately adapt to the dynamic power fluctuation of a single water pump of 60%-110% (45-82.5kW), ensuring that the power supply voltage fluctuation is ≤±0.5% and the frequency fluctuation is ≤±0.1Hz.

[0051] Furthermore, such as Figure 2 As shown, the emergency power supply system for the circulating water pump in this embodiment of the invention further includes: a control module 50; the control module includes a controller and a communication interface, the controller being connected to the energy storage converter module 20, the load adaptation module 30, the battery management system of the energy storage module 10, and the water pump frequency converter controller (not shown in the figure) through the communication interface; the control module is used to automatically cut off the auxiliary water pump power supply circuit when the energy storage SOC value of the energy storage module drops to a set threshold, and send a frequency reduction command to the frequency converter controller of the circulating water pump to extend the emergency power supply time of the circulating water pump.

[0052] Specifically, the controller of control module 50 can be a microcontroller or an embedded industrial computer. The communication interface can support various industrial communication protocols, such as CAN bus, RS485, and Ethernet. Control module 50 connects to the energy storage converter module to acquire its operating status and send control commands. Control module 50 connects to the load adapter module, which typically connects to non-critical auxiliary loads. The control module monitors the load status through this connection and can cut off power to it when necessary. Control module 50 connects to the battery management system (BMS) of the energy storage module, which is typically composed of battery packs and integrates the BMS. The control module reads key data reported by the BMS in real time through the communication interface, including but not limited to: SOC, battery voltage, charging / discharging current, individual cell temperature, and State of Health (SOH). Control module 50 connects to the frequency converter controller of the circulating water pump, which is a key device driving the circulating water pump motor. The control module sends frequency adjustment commands to the frequency converter through this connection to change the pump motor's speed and power consumption.

[0053] More specifically, when the mains power is interrupted and the system switches to emergency mode powered by the energy storage module, the control module 50 can execute a priority power supply strategy based on the remaining power of the energy storage module to extend the emergency power supply duration of the circulating water pump. Upon detecting a mains power failure, the system enters emergency power supply mode. The energy storage converter module 40 inverts the DC power from the energy storage module into AC power to supply the circulating water pump and necessary auxiliary loads. At this time, the control module 50 continuously and in real-time reads the SOC value of the energy storage module from the battery management system via the communication interface, while simultaneously monitoring the operating status of each load circuit. The control module 50 has one or more preset SOC action thresholds. For example, a first-level alarm threshold (e.g., SOC drops to 40%) and a second-level emergency action threshold (e.g., SOC drops to 20%) can be set. When the control module 50 detects through comparison that the real-time SOC value continues to decrease and reaches the preset threshold (taking the second-level emergency action threshold as an example), it triggers the energy preservation procedure. After triggering the preservation procedure, the control module 50 first identifies non-critical auxiliary loads according to a preset load priority list. Subsequently, the control module 50 sends a disconnect command to the load adaptation module via the communication interface. The switching devices inside the load adaptation module activate, automatically cutting off the power supply circuits to non-core loads such as auxiliary water pumps, immediately reducing the system's total power consumption. Simultaneously with the disconnection of auxiliary loads, the control module 50 sends a frequency reduction command to the variable frequency controller of the circulating water pump via the communication interface. This command is typically a specific frequency value or a frequency reduction rate. Upon receiving the command, the variable frequency controller smoothly reduces the power frequency output to the water pump motor. According to the similarity law of fans / pumps, the motor's power consumption is proportional to the cube of its speed; therefore, appropriately reducing the speed can significantly reduce energy consumption.

[0054] Furthermore, such as Figure 3 As shown, as an optional embodiment of the present invention, the emergency power supply system of the circulating water pump further includes: an environmental adaptation module 60; the environmental adaptation module 60 includes a temperature and humidity sensor, a heater, a dehumidifier and a cooling fan, the temperature and humidity sensor, the heater, the dehumidifier and the cooling fan are all connected to the control module 50 and arranged in the housing of the energy storage module 10, so as to maintain the temperature and humidity inside the housing of the energy storage module 10 within a set range.

[0055] Furthermore, as an optional embodiment of the present invention, the power supply terminals of each group of circulating water pumps are respectively connected to each group of independent power supply circuits of the load-side distribution cabinet, each group of independent power supply circuits is connected to a group of circulating water pumps, and the groups of independent power supply circuits are connected in parallel.

[0056] Specifically, each independent power supply circuit is connected to a set of circulating water pumps, providing a dedicated power path for each pump. These independent power supply circuits are connected in parallel. This parallel independent power supply structure ensures that if any pump and its power supply circuit loses power due to a fault or maintenance, the pumps in the remaining parallel circuits can continue to operate normally without interference. This significantly improves the power supply reliability and operational flexibility of the entire circulating water system, preventing a complete system shutdown due to a single point of failure.

[0057] Based on the same inventive concept as the emergency power supply system for the circulating water pump described above, this embodiment of the invention also provides an emergency power supply method for the circulating water pump, such as... Figure 4 The emergency power supply method for the circulating water pump, as shown, includes:

[0058] Step S401: When the mains power supply is normally supplying power to multiple circulating water pumps, control the energy storage converter module to work in rectification mode, convert the mains power into DC power for float charging of the energy storage module.

[0059] Step S402: When the mains voltage is detected to be lower than the first threshold and the duration reaches the second threshold, the energy storage converter module is controlled to switch to the energy storage module to convert the DC power of the energy storage module into AC power to supply the circulating water pump. When the circulating water pump starts, the load adaptation module is controlled to compensate for the concentrated impact load of the circulating water pump.

[0060] Specifically, by monitoring the mains voltage in real time, when the mains voltage is detected to be below a first threshold and the duration of this state reaches a second threshold, it is determined that the mains power is lost or severely undervoltage. The control module immediately sends a switching command to the energy storage converter module, controlling it to switch to the energy storage module power supply mode, inverting the DC power from the energy storage module into AC power to provide emergency power for the circulating water pump. When starting the circulating water pump in energy storage power supply mode, to avoid large current surges, the control module simultaneously sends a compensation command to the load adaptation module. The load adaptation module engages its buffer or compensation unit to smooth out concentrated impact loads during startup, ensuring stable operation of the energy storage system and extending the emergency power supply duration.

[0061] The first threshold and the second threshold can be selected according to the actual scenario, and the embodiments of the present invention are not limited thereto.

[0062] Furthermore, as an optional embodiment of the present invention, when the circulating water pump starts, the control load adaptation module compensates for the concentrated impact load of the circulating water pump by: the impact current compensation unit of the control load adaptation module releasing a large instantaneous current to compensate for the impact load when the circulating water pump starts; when all circulating water pumps are in the starting state, the current power sensor in the dynamic load adjustment unit of the control load adaptation module collects the operating data of the circulating water pump, and adjusts the output voltage and frequency of the energy storage converter module through the PID closed-loop control module in the dynamic load adjustment unit to adapt to the dynamic power fluctuation of the circulating water pump.

[0063] Specifically, at the moment the circulating water pump starts, the control module sends a command to the inrush current compensation unit of the load adaptation module, controlling it to instantaneously release a large current to compensate for the startup inrush load and prevent overload of the energy storage converter. After all circulating water pumps have completed startup and entered steady-state operation, the control module switches to dynamic adjustment mode. At this time, the current and power sensors in the dynamic load adjustment unit collect water pump operating data in real time, and the PID closed-loop control module dynamically adjusts the output voltage and frequency of the energy storage converter module according to the feedback signal, accurately adapting to the real-time power fluctuations of the circulating water pumps and ensuring stable operation of the system within the high-efficiency range.

[0064] Furthermore, as an optional embodiment of the present invention, after controlling the energy storage converter module to switch to the energy storage module to convert the DC power of the energy storage module into AC power to supply the circulating water pump, the method further includes: acquiring the SOC value of the energy storage module and the operating data of the circulating water pump; issuing an early warning when the SOC value drops to the third threshold; cutting off the power supply circuit of the auxiliary water pump when the SOC value drops to the fourth threshold and the mains power has not been restored, and sending a frequency reduction command to the frequency converter controller of the circulating water pump to extend the emergency power supply time of the circulating water pump; when the mains power is restored to the fifth threshold and the continuous stable time reaches the sixth threshold, controlling the energy storage converter module to synchronize the power supply voltage and frequency of the energy storage module with the mains power, and then controlling the dual power supply switching unit to seamlessly switch to the mains power to supply power to the circulating water pump; after the mains power is restored and switched, sending a reset command to the frequency converter controller of the circulating water pump to restore the normal mains power supply to all circulating water pumps, and controlling the energy storage converter module to switch back to rectification mode to float charge the energy storage module.

[0065] Specifically, the control module acquires the SOC value of the energy storage module and the operating data of the circulating water pump in real time. When the SOC drops to the third threshold, an early warning is issued; if it continues to drop to the fourth threshold and the mains power has not been restored, the auxiliary water pump power supply circuit is automatically cut off, and a frequency reduction command is sent to the frequency converter controller to extend the emergency power supply duration. When the mains power recovers to the fifth threshold and the stable duration reaches the sixth threshold, the control module instructs the energy storage converter module to synchronize its output voltage and frequency with the mains power, and then controls the dual power supply switching unit to seamlessly switch to mains power supply. After the switch is completed, a reset command is sent to the frequency converter controller to restore normal power supply to all water pumps, and simultaneously controls the energy storage converter module to switch back to rectification mode for float charging of the energy storage module.

[0066] The specific values ​​of the third to sixth thresholds can be determined according to the actual scenario, and are not limited in this embodiment of the invention.

[0067] It is worth noting that the emergency power supply method for circulating water pumps provided in this embodiment of the invention and the emergency power supply system for circulating water pumps described above belong to the same or similar inventive concept. Their technical solutions or technical effects are the same or similar and can be referred to each other. The embodiments of the invention will not be described again here.

[0068] The emergency power supply system and method provided in this embodiment of the invention will be described below in the context of a specific semiconductor factory application scenario:

[0069] The mains power supply provides normal power to 10 75kW circulating water pumps. The PCS bidirectional converter module operates in rectification mode, converting 380V mains power to 384V DC power for float charging of the energy storage module. The BMS battery management system monitors the battery status in real time, accurately maintaining the SOC value between 80% and 90%. When SOC ≤ 80%, float charging is automatically started, and when SOC ≥ 90%, charging is stopped to avoid overcharging. The environmental adaptation module operates continuously, maintaining the internal temperature and humidity of the energy storage equipment enclosure at 15-35℃ and 40%-60%RH. The mains power supply provides normal power to 10 75kW circulating water pumps. The PCS bidirectional converter module operates in rectification mode, converting 380V mains power to 384V DC power for float charging of the energy storage module. The BMS battery management system monitors the battery status in real time, accurately maintaining the SOC value between 80% and 90%. When SOC ≤ 80%, float charging is automatically started, and when SOC ≥ 90%, charging is stopped to avoid overcharging. The environmental adaptation module operates continuously, maintaining the internal temperature and humidity of the energy storage equipment enclosure at 15-35℃ and 40%-60%RH.

[0070] Furthermore, the control module monitors the mains power status in real time through the three-phase voltage monitoring unit. When the mains three-phase voltage is detected to be ≤323V (380V×85%) and the duration is ≥5ms, it immediately determines that the mains power is lost and completes the command transmission within 1ms: ① Sends a power supply switching command to the PCS bidirectional converter module; ② Sends an inrush current compensation preparation command to the load adaptation module.

[0071] Furthermore, after receiving the switching command, the PCS bidirectional converter module completes the switching between mains power disconnection and energy storage inverter power supply within 20ms through the mechanical-electronic composite dual power supply switching unit, converting the 384V DC power from the energy storage module into a stable 380V three-phase AC power to supply the core water pumps. If any core water pumps are in the starting state at this time, the 1000F / 400V supercapacitor bank of the load adaptation module immediately releases the instantaneous large current to compensate for the starting impact load and ensure that the water pumps do not stop or overload. If all core water pumps are in the running state, the dynamic load adjustment unit collects the water pump operating data in real time and adjusts the PCS output parameters through the PID algorithm to adapt to dynamic power fluctuations.

[0072] Furthermore, during emergency power supply, the control module collects data such as the SOC value of the energy storage module, the operating power of the water pumps, and ambient temperature and humidity in real time, and uploads this data to the semiconductor production line PLC system via industrial communication protocols. When the energy storage SOC value drops to 50%, a first-level warning signal is sent, prompting production line personnel to prepare for process buffering and shutdown. When the energy storage SOC value drops to 20% and the mains power has not yet been restored, a second-level warning signal is sent, immediately and automatically cutting off the power supply circuits of the five auxiliary water pumps, and simultaneously sending a frequency reduction command to the core water pump frequency converter controller to reduce the operating frequency. The frequency is reduced from 50Hz to 30-40Hz, the power of a single core water pump is reduced from 75kW to 30-40kW, and the total power of 5 core water pumps is reduced to 150-200kW. This significantly extends the emergency power supply time of the core water pumps and provides a buffer time of ≥2 hours for the safe switching of core processes in the production line. If faults such as overheating, over-discharge of the energy storage module, or overload of the water pump occur during operation, the linkage control module immediately sends an alarm signal to the substation monitoring system and simultaneously activates the backup protection mechanism to cut off the power supply circuit of the faulty water pump, ensuring the normal operation of the remaining core water pumps.

[0073] Furthermore, the control module continuously monitors the mains power status. When the mains three-phase voltage is detected to be ≥342V (380V×90%) and remains stable for ≥30s, it is determined that the mains power has been restored. The PCS bidirectional converter module first synchronizes the voltage and frequency of the energy storage power supply with the mains power, and then seamlessly switches back to mains power supply within 20ms through the mechanical-electronic composite dual power supply switching unit. During the switching process, the core water pump does not stop, there is no voltage fluctuation, and there is no frequency fluctuation.

[0074] Furthermore, after the mains power is restored and switched back, the linkage control module sends a reset command to the water pump frequency converter controller to restore the normal mains power supply to the 10 75kW circulating water pumps; the PCS bidirectional converter module switches back to rectification mode to float charge the energy storage module, and the BMS battery management system maintains the SOC value at 80%-90% float charge state; the environmental adaptation module continues to maintain the internal temperature and humidity of the energy storage device to meet the standards, and the system returns to the standby float charge state, waiting for the next emergency power supply demand.

[0075] The above embodiments of the present invention focus on describing the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be described in detail here.

[0076] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, the present invention is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of the present invention without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of the present invention.

Claims

1. An emergency power supply system for a circulating water pump, characterized in that, include: Energy storage module, energy storage converter module and load matching module; The energy storage module is composed of multiple lithium iron phosphate battery packs connected in parallel. The DC side of the energy storage converter module is connected to the energy storage module, and the AC side of the energy storage converter module is connected to the mains power input terminal and the power supply terminal of each group of circulating water pumps respectively through a dual power supply switching unit. This is used to convert the DC power of the energy storage module to AC power through the switching of the dual power supply switching unit when the mains power fails. The load adaptation module includes an inrush current compensation unit and a dynamic load adjustment unit. The inrush current compensation unit is connected in parallel with the energy storage module and is used to compensate for the concentrated inrush load of the circulating water pump when the circulating water pump starts. The dynamic load adjustment unit includes a current power sensor and a PID closed-loop control module. The current power sensor is connected to the power supply circuit of the circulating water pump and is used to collect the operating current and power data of the circulating water pump. The PID closed-loop control module is connected to the current power sensor and the energy storage converter module and is used to adjust the output voltage and frequency of the energy storage converter module according to the operating current and power data.

2. The emergency power supply system for the circulating water pump according to claim 1, characterized in that, The dual power supply switching unit includes a mechanical-electronic composite dual power supply switching unit. The dual power supply switching unit is connected to the mains power input terminal and the AC output terminal of the energy storage converter module, respectively. The common output terminal of the dual power supply switching unit is connected to the power supply terminal of each group of circulating water pumps.

3. The emergency power supply system for the circulating water pump according to claim 1, characterized in that, The inrush current compensation unit includes a supercapacitor bank and a bidirectional DC / DC converter. The bidirectional DC / DC converter is connected in series with the supercapacitor bank and then in parallel with the energy storage module.

4. The emergency power supply system for the circulating water pump according to claim 1, characterized in that, The current power sensor includes: a three-phase current power sensor; The input terminal of the three-phase current power sensor is connected to the power supply circuit of the circulating water pump, the output terminal of the three-phase current power sensor is connected to the input terminal of the PID closed-loop control module, and the output terminal of the PID closed-loop control module is connected to the control terminals of the impact current compensation unit and the energy storage converter module, respectively.

5. The emergency power supply system for the circulating water pump according to claim 1, characterized in that, The emergency power supply system for the circulating water pump also includes: a control module; The control module includes a controller and a communication interface. The controller is connected to the energy storage converter module, the load adaptation module, the battery management system of the energy storage module, and the water pump frequency converter through the communication interface. The control module is used to automatically cut off the power supply circuit of the auxiliary water pump when the SOC value of the energy storage module drops to a set threshold, and send a frequency reduction command to the frequency converter of the circulating water pump to extend the emergency power supply time of the circulating water pump.

6. The emergency power supply system for the circulating water pump according to claim 5, characterized in that, The emergency power supply system for the circulating water pump also includes: an environmental adaptation module; The environmental adaptation module includes a temperature and humidity sensor, a heater, a dehumidifier, and a cooling fan. The temperature and humidity sensor, heater, dehumidifier, and cooling fan are all connected to the control module and arranged inside the energy storage module's housing to maintain the temperature and humidity inside the energy storage module's housing within a set range.

7. The emergency power supply system for the circulating water pump according to claim 1, characterized in that, The power supply terminals of each group of circulating water pumps are connected to the independent power supply circuits of the load-side distribution cabinet. Each group of independent power supply circuits is connected to one group of circulating water pumps, and the independent power supply circuits are connected in parallel.

8. An emergency power supply method for a circulating water pump, characterized in that, Based on the emergency power supply system for the circulating water pump according to any one of claims 1-7, the emergency power supply method for the circulating water pump includes: When the mains power supply is normally supplying power to multiple circulating water pumps, the energy storage converter module is controlled to work in rectification mode to convert the mains power into DC power for float charging of the energy storage module; When the mains voltage is detected to be lower than the first threshold and the duration reaches the second threshold, the energy storage converter module is controlled to switch to the energy storage module to convert the DC power of the energy storage module into AC power to supply the circulating water pump. When the circulating water pump starts, the load adaptation module is controlled to compensate for the concentrated impact load of the circulating water pump.

9. The emergency power supply method for a circulating water pump according to claim 8, characterized in that, The load adaptation module controlled when the circulating water pump starts compensates for the concentrated impact load of the circulating water pump, including: The inrush current compensation unit of the load adaptation module is controlled to release a large instantaneous current to compensate for the impact load when the circulating water pump starts. With all circulating water pumps in the start-up state, the current and power sensors in the dynamic load adjustment unit of the load adaptation module collect the operating data of the circulating water pumps, and adjust the output voltage and frequency of the energy storage converter module through the PID closed-loop control module in the dynamic load adjustment unit to adapt to the dynamic power fluctuations of the circulating water pumps.

10. The emergency power supply method for a circulating water pump according to claim 8, characterized in that, After the method controls the energy storage converter module to switch to the energy storage module to convert the DC power of the energy storage module into AC power to supply the circulating water pump, the method further includes: Obtain the SOC value of the energy storage module and the operating data of the circulating water pump; An early warning is issued when the SOC value drops to the third threshold. When the SOC value drops to the fourth threshold and the mains power is not restored, the power supply circuit of the auxiliary water pump is cut off, and a frequency reduction command is sent to the frequency converter of the circulating water pump to extend the emergency power supply time of the circulating water pump. When the mains power recovers to the fifth threshold and remains stable for a duration that reaches the sixth threshold, the energy storage converter module is controlled to synchronize the power supply voltage and frequency of the energy storage module with the mains power, and then the dual power supply switching unit is controlled to seamlessly switch to the mains power to supply power to the circulating water pump. After the mains power is restored, a reset command is sent to the frequency converter controller of the circulating water pump to restore the normal mains power supply to all circulating water pumps, and the energy storage converter module is controlled to switch back to rectification mode to float charge the energy storage module.

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