Anti-magnetic suspension electromagnetic micro-plane XYZ three-axis precision positioning platform

Abstract

This invention discloses an antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform, comprising a permanent magnet array mover (100), an FPC conductor layer stator (200), and an antimagnetic pyrolytic graphite plate (3). The antimagnetic pyrolytic graphite plate (3) is located on the FPC conductor layer stator (200), and the permanent magnet array mover (100) is located on the antimagnetic pyrolytic graphite plate (3). The antimagnetic pyrolytic graphite plate (3) can generate an antimagnetic force on the permanent magnet array mover (100), thereby achieving contactless levitation of the permanent magnet array mover (100). This invention innovatively adopts a double-layer flexible printed circuit board orthogonal serpentine wiring design, combined with a phase and amplitude control strategy for four independent alternating currents. At the same time, by reducing the stacking of multiple layers of circuits, the uneven magnetic field distribution caused by this is improved, ultimately achieving continuous smooth motion and high-precision stable control of the mover in the X, Y, and Z degrees of freedom.

Description

Technical Field

[0001] This invention belongs to the field of precision drive and positioning technology, specifically relating to an antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform. Background Technology

[0002] With the technological advancements in cutting-edge fields such as precision operation, precision manufacturing, and life sciences, increasingly stringent requirements are being placed on the motion range and positioning accuracy of core actuators. High-precision planar motors, as core components for achieving precision movements in these fields, must simultaneously meet the dual technical demands of wide-range motion and ultra-precision positioning. Wide-range motion capability determines the equipment's adaptability to complex tasks and its operational coverage, while high-precision positioning performance directly affects the equipment's operational accuracy, operational stability, and overall system reliability, becoming a core indicator for evaluating planar motor performance. Antimagnetic levitation technology, with its inherent frictionless and low-energy consumption characteristics, can fundamentally avoid the friction, hysteresis, and backlash errors caused by traditional contact transmission structures. Furthermore, its technology system can achieve equipment miniaturization through lightweight and integrated structural design, perfectly meeting the core application requirements of various precision fields for miniaturized, high-precision, and high-stability actuators. It also provides a new technical approach to overcoming the technical limitations of existing precision positioning platforms. Therefore, developing antimagnetic levitation micro-precision positioning platforms based on antimagnetic levitation technology has become a key direction for adapting to the development needs of cutting-edge precision fields. Foreign four-layer stator drive schemes employ digital stepper control logic, relying on a preset fixed current sequence to drive the mover displacement. This results in discrete point-to-point transitions, making it impossible to achieve continuous, smooth motion along arbitrary trajectories and failing to meet the demands of precision operations for motion continuity. Furthermore, the multi-layered circuit stacking design easily leads to uneven spatial distribution of the magnetic field, and the magnetic field decays rapidly. The coordination process of multiple superimposed regions can easily generate discontinuities at magnetic field boundaries, causing instability issues such as stuttering and speed fluctuations during mover movement.

[0003] Currently, the research and development of micro precision positioning platforms in China is still in the exploratory stage. There is no mature technical solution that combines single-sided drive and miniaturized integrated design. There are obvious gaps in related technology research and development, which makes it difficult to meet the actual application needs of high-precision positioning platforms in fields such as precision manufacturing and life sciences in China. Summary of the Invention

[0004] To address the shortcomings and deficiencies of existing technologies, this invention proposes an antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform. By optimizing the magnetic flux density distribution and drive structure design, it improves motor thrust while reducing drive current energy consumption, and simplifies the assembly method of permanent magnet array, thus adapting to the application requirements of high-precision micro-positioning.

[0005] The technical solution adopted in this invention is:

[0006] A magnetically levitated electromagnetic micro-planar XYZ three-axis precision positioning platform includes a permanent magnet array mover, an FPC conductive layer stator, and a pyrolytic graphite plate made of antimagnetic material;

[0007] The antimagnetic pyrolytic graphite plate is located on the stator of the FPC conductor layer, and the permanent magnet array mover is located on the antimagnetic pyrolytic graphite plate. The antimagnetic pyrolytic graphite plate can generate antimagnetic force on the permanent magnet array mover, thereby achieving contactless levitation of the permanent magnet array mover.

[0008] Furthermore, the permanent magnet array mover is composed of M N-pole square permanent magnets and M S-pole square permanent magnets, where M≥2. The magnetic polarities of the N-pole square permanent magnets and the S-pole square permanent magnets are opposite. The magnetization direction of the N-pole permanent magnets is along the positive Z-axis, and the magnetization direction of the S-pole permanent magnets is along the negative Z-axis.

[0009] Furthermore, the N-pole square permanent magnets and S-pole square permanent magnets achieve self-assembly and adaptation through their own magnetic properties, and adjacent permanent magnets can form a seamless splicing structure. The permanent magnets surrounding each N-pole square permanent magnet are all S-pole square permanent magnets, and the permanent magnets surrounding each S-pole square permanent magnet are all N-pole square permanent magnets, thereby forming an M×M two-dimensional Halbach array.

[0010] Furthermore, the areas of the FPC conductor layer stator and the pyrolytic graphite plate of the antimagnetic material are both larger than the area of ​​the permanent magnet array mover.

[0011] Furthermore, the FPC conductor layer stator includes a first force-generating body and a second force-generating body arranged in a first axial direction, and a third force-generating body and a fourth force-generating body arranged along a second axial direction. The first axial direction is perpendicular to the second axial direction, and the third force-generating body and the fourth force-generating body are above or below the first force-generating body and the second force-generating body.

[0012] Further, the first power generating body includes a first conductor, which is arranged in a serpentine manner in both the first and second axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the first conductor in the second axial direction is p. The second power generating body includes a second conductor, which is also arranged in a serpentine manner in both the first and second axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the second conductor in the second axial direction is p, and the spacing between adjacent lines of the first and second conductors in the second axial direction is p / 2. The third power generating body includes a third conductor, which is arranged in a serpentine manner in both the second and first axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the third conductor in the first axial direction is p. The fourth power generating body includes a fourth conductor, which is arranged in a serpentine manner in both the second and first axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the fourth conductor in the first axial direction is p, and the spacing between adjacent lines of the third and fourth conductors in the first axial direction is p / 2.

[0013] Furthermore, the first and second conductors are each supplied with independent alternating currents, and the phase difference between the two independent currents in the first and second conductors is 90 degrees; the third and fourth conductors are each supplied with independent alternating currents, and the phase difference between the two independent currents in the third and fourth conductors is 90 degrees.

[0014] Furthermore, each independent AC current is equipped with an independent current driver for drive control. After the first and second power generating bodies are energized, they can generate X-direction thrust and Z-direction thrust on the permanent magnet array mover. After the third and fourth power generating bodies are energized, they can generate Y-direction thrust and Z-direction thrust on the permanent magnet array mover.

[0015] Furthermore, the first wire input terminal A1 and the second wire input terminal B1 are connected to the positive terminal of the corresponding current driver output terminal, and the first wire output terminal A2 and the second wire output terminal B2 are connected to the negative terminal of the current driver output terminal; the third wire input terminal C1 and the fourth wire input terminal D1 are connected to the positive terminal of the corresponding current driver output terminal, and the third wire output terminal C2 and the fourth wire output terminal D2 are connected to the negative terminal of the current driver output terminal.

[0016] Furthermore, the center-to-center distance between two adjacent N-pole square permanent magnets in the permanent magnet array mover is p, the center-to-center distance between two adjacent S-pole square permanent magnets is p, and the two diagonal directions of the permanent magnet array mover are the first axial direction and the second axial direction.

[0017] The beneficial effects of the present invention are: (1) The permanent magnet array of the present invention adopts a square structure and is arranged in an NS checkerboard pattern. Adjacent permanent magnets can be seamlessly assembled by their own attraction without the need for external force assistance. This greatly simplifies the array assembly process, optimizes the magnetic flux density distribution, and effectively improves the magnetic flux density, laying the foundation for increasing the thrust of the motor; (2) Flexible printed circuit boards are used for the wires and a two-layer power generation structure is constructed, making the overall structure more compact and significantly improving the integration. It can also significantly reduce the energy consumption of the drive current and achieve efficient control of energy consumption; (3) Each layer of power generation is equipped with two independent serpentine wires. Each of the four wires is driven by an independent current driver. The electrical angle of the current passing through the two wires in the same layer differs by 90 degrees. (3) The magnetic field distribution can be precisely controlled by matching the spacing parameters of the permanent magnet array and the wire, which can further improve the driving performance and control accuracy of the positioning platform; (4) The antimagnetic material is pyrolytic graphite, which has the excellent performance of high antimagnetic susceptibility at room temperature and the characteristics of low cost and easy processing. It is connected to the flexible printed circuit board by industrial glue, and the assembly process is simple, which can effectively control the overall manufacturing cost of the motor; (5) By reducing the number of layers of stator circuit stacking, the present invention adopts double-layer flexible printed circuit board orthogonal serpentine wiring and four independent AC current real-time control to realize the continuous movement of the mover, which greatly improves the continuity and stability of the movement.

[0018] In addition to the objectives, features, and advantages described above, the present invention has other objectives, features, and advantages. The invention will now be described in further detail with reference to the figures. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of the present invention;

[0020] Figure 2 This is a planar view showing the relative positions of the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of the present invention;

[0021] Figure 3 This is a schematic diagram of the permanent magnet array structure of the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of the present invention;

[0022] Figure 4 This is a schematic diagram of the conductor structure of the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of the present invention;

[0023] Figure 5 This is a cross-sectional view of the conductor structure of the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of the present invention;

[0024] Figure 6 This is a connection view of the upper layer conductor of the power generating body of the present invention;

[0025] Figure 7This is a connection view of the lower layer conductor of the power generating body of the present invention;

[0026] Figure 8 This is a hardware block diagram of the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of the present invention. Detailed Implementation

[0027] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0028] like Figure 1 As shown, the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of the present invention includes: a permanent magnet array mover 100, an FPC conductor layer stator 200, and an antimagnetic pyrolytic graphite plate 3 disposed above the FPC conductor layer stator 200. The antimagnetic pyrolytic graphite plate 3 generates an antimagnetic force on the permanent magnet array mover 100, thereby realizing the non-contact levitation of the permanent magnet array mover 100.

[0029] like Figure 2 As shown, this device adopts a three-layer stacked structure design. The permanent magnet array mover 100, the FPC conductor layer stator 200, and the pyrolytic graphite plate 3 are stacked sequentially in the vertical direction. The areas of the FPC conductor layer stator 200 and the pyrolytic graphite plate 3 are both larger than the area of ​​the permanent magnet array mover 100. The arrangement of the permanent magnet array mover 100 is optimized by directional optimization, with the diagonal direction of each square permanent magnet in the array arranged parallel to the extension direction of the conductor in the FPC conductor layer stator 200. Through the above directional layout design, the single conductor in the FPC conductor layer stator 200 can always correspond to the permanent magnet pole with the same polarity in the permanent magnet array mover 100 on its extension path. This provides a stable and consistent magnetic field environment for the subsequent interaction between the magnetic field and the current, realizing continuous smooth motion and high-precision stable control of the mover in the X, Y, and Z degrees of freedom.

[0030] like Figure 3As shown, the permanent magnet array mover 100 is composed of a plurality of N-pole square permanent magnets 101 and a plurality of S-pole square permanent magnets 102. The magnetic polarities of the N-pole square permanent magnets 101 and the S-pole square permanent magnets 102 are opposite. The magnetization direction of the N-pole permanent magnets is along the positive Z-axis and the magnetization direction of the S-pole permanent magnets is along the negative Z-axis. Preferably, the aforementioned N-pole square permanent magnet 101 and S-pole square permanent magnet 102 can achieve self-assembly and adaptation by means of their own magnetic properties, and adjacent permanent magnets can form a seamless splicing structure. The permanent magnets surrounding each N-pole square permanent magnet 101 are all S-pole square permanent magnets 102, and the permanent magnets surrounding each S-pole square permanent magnet 102 are all N-pole square permanent magnets 101, thereby forming an M×M two-dimensional Halbach array, where M≥2. After the permanent magnet array mover 100 is assembled, there are no gaps, effectively eliminating the magnetic flux loss problem caused by array gaps, thereby significantly enhancing the overall magnetic flux density of the permanent magnet array.

[0031] like Figure 4 As shown, the FPC conductor layer stator 200 includes a first axial direction ( Figure 4 The first power generating body 201a and the second power generating body 201b, which are arranged vertically, and along the second axis direction ( Figure 4 The third force-generating body 202a and the fourth force-generating body 202b are arranged in a horizontal direction. The first axial direction is perpendicular to the second axial direction. The third force-generating body 202a and the fourth force-generating body 202b are above or below the first force-generating body 201a and the second force-generating body 201b.

[0032] Furthermore, in combination Figure 5 ( Figure 5Figure (a) shows a cross-sectional view of the first and second conductors, and Figure (b) shows a cross-sectional view of the third and fourth conductors. The first power generating body 201a includes a first conductor, which is arranged in a serpentine manner in the first and second axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the first conductor in the second axial direction is p. The second power generating body 201b includes a second conductor, which is arranged in a serpentine manner in the first and second axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the second conductor in the second axial direction is p. The spacing between adjacent lines of the first and second conductors in the second axial direction is p / 2. The third power generating body 202a includes a third conductor. The third conductor is arranged in a serpentine pattern in both the second and first axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the third conductor in the first axial direction is p. The fourth power generating body 202b includes a fourth conductor, which is also arranged in a serpentine pattern in both the second and first axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the fourth conductor in the first axial direction is p, and the spacing between adjacent lines of the third and fourth conductors in the first axial direction is p / 2. The number of bends of the conductors can be adjusted according to actual application requirements to change the overall coverage shape of the conductors. The first and second conductors are each supplied with independent alternating currents, and the phase difference between the two independent currents in the first and second conductors is 90°. The third and fourth conductors are each supplied with independent alternating current, and the phase difference between the two independent currents in the third and fourth conductors is 90 degrees. Each independent alternating current is equipped with an independent current driver for driving control. After the first power source 201a and the second power source 201b are energized, they can generate X-direction thrust and Z-direction thrust on the permanent magnet array mover 100. After the third power source 202a and the fourth power source 202b are energized, they can generate Y-direction thrust and Z-direction thrust on the permanent magnet array mover 100.

[0033] Furthermore, combined Figure 3 In the permanent magnet array mover 100, the center-to-center distance between two adjacent N-pole square permanent magnets 101 is p, and the center-to-center distance between two adjacent S-pole square permanent magnets 102 is p. The two diagonal directions of the permanent magnet array mover 100 are the first axial direction and the second axial direction, so that the permanent magnet poles with the same polarity always correspond to the extension path of a single conductor, providing a stable and consistent magnetic field environment.

[0034] Furthermore, such as Figure 6 As shown, the first wire input terminal A1 and the second wire input terminal B1 are connected to the positive output terminal of the current driver, and the first wire output terminal A2 and the second wire output terminal B2 are connected to the negative output terminal of the current driver. Similarly, as... Figure 7As shown, the third wire input terminal C1 and the fourth wire input terminal D1 are connected to the positive output terminal of the current driver, and the third wire output terminal C2 and the fourth wire output terminal D2 are connected to the negative output terminal of the current driver. Each wire requires one current driver, therefore, each force-generating body requires two current drivers.

[0035] The following is combined Figure 8 The working principle of the present invention will be further explained.

[0036] The hardware system of the antimagnetic levitation electromagnetic micro planar XYZ three-axis precision positioning platform of this invention achieves efficient operation through the coordinated work of a series of precision components. The data acquisition card reads the digital voltage signal generated by the computer and transmits it to the power amplifier. The power amplifier converts the voltage signal into current, providing driving current for the stator of the FPC conductor layer 200. After the conductor is energized, the permanent magnet array mover 100 is displaced under the action of Ampere force. The computer, as the control center, completes the construction of the control system, program writing and debugging with the help of Simulink Realtime. At the same time, it realizes system operation status monitoring, data recording and operation command input, ensuring the high-precision and stable operation of the platform. The FPC conductor layer stator 200 uses four independent current controls to achieve circuit connection and motion drive. The input terminals of the conductors of the first, second, third, and fourth power generating bodies are connected to the positive terminal of the current driver output, and the output terminals are connected to the negative terminal. Each of the four conductors is driven by an independent current driver, and the electrical angles of the two independent currents of each conductor layer differ by 90 degrees. After the FPC conductor layer 200 is energized, the first and second power generating bodies generate X and Z thrusts on the permanent magnet array mover 100, while the third and fourth power generating bodies generate Y and Z thrusts. Combined with the antimagnetic force generated by the pyrolytic graphite plate 3 on the permanent magnet array, the mover achieves three degrees of freedom motion along the X, Y, and Z axes through the distribution control of thrust in each direction. At the same time, with the help of the independent current control of the four power generating bodies, the magnitude and direction of the thrust can be precisely adjusted to ensure the accuracy and flexibility of motion control.

[0037] This invention innovatively employs a double-layer flexible printed circuit board orthogonal serpentine wiring design, coupled with a four-channel independent AC current phase and amplitude control strategy. Simultaneously, by reducing multi-layer circuit stacking, it improves the resulting uneven magnetic field distribution, ultimately achieving continuous, smooth motion and high-precision stable control of the mover in the X, Y, and Z degrees of freedom. This invention achieves a unified approach of structural simplification and multi-degree-of-freedom decoupled control, significantly reducing platform size, current requirements, and manufacturing costs. It enables centimeter-level XY plane motion, sub-micron-level positioning accuracy, and high-resolution Z-axis displacement adjustment, making it suitable for high-precision micro-positioning applications such as precision manufacturing and micromanipulation.

[0038] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A magnetically levitation electromagnetic micro-planar XYZ three-axis precision positioning platform, characterized in that, It includes a permanent magnet array mover (100), an FPC conductor layer stator (200), and a pyrolytic graphite plate (3) of antimagnetic material; The antimagnetic pyrolytic graphite plate (3) is located on the FPC conductor layer stator (200), and the permanent magnet array mover (100) is located on the antimagnetic pyrolytic graphite plate (3). The antimagnetic pyrolytic graphite plate (3) can generate antimagnetic force on the permanent magnet array mover (100) to achieve contactless levitation of the permanent magnet array mover (100).

2. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 1, characterized in that, The permanent magnet array mover (100) is composed of M N-pole square permanent magnets (101) and M S-pole square permanent magnets (102), where M≥2. The magnetic poles of the N-pole square permanent magnets (101) and the S-pole square permanent magnets (102) have opposite polarities. The magnetization direction of the N-pole permanent magnets is along the positive Z-axis, and the magnetization direction of the S-pole permanent magnets is along the negative Z-axis.

3. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 2, characterized in that, The N-pole square permanent magnet (101) and the S-pole square permanent magnet (102) achieve self-assembly and adaptation by means of their own magnetic properties, and the adjacent permanent magnets can form a seamless splicing structure. The permanent magnets around each N-pole square permanent magnet (101) are all S-pole square permanent magnets (102), and the permanent magnets around each S-pole square permanent magnet (102) are all N-pole square permanent magnets (101), thus forming an M×M two-dimensional Halbach array.

4. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 3, characterized in that, The areas of the FPC conductor layer stator (200) and the antimagnetic pyrolytic graphite plate (3) are both larger than the area of ​​the permanent magnet array mover (100).

5. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 3 or 4, characterized in that, The FPC conductor layer stator (200) includes a first force-generating body (201a) and a second force-generating body (201b) arranged in a first axial direction, and a third force-generating body (202a) and a fourth force-generating body (202b) arranged along a second axial direction. The first axial direction is perpendicular to the second axial direction, and the third force-generating body (202a) and the fourth force-generating body (202b) are above or below the first force-generating body (201a) and the second force-generating body (201b).

6. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 5, characterized in that, The first power generating body (201a) includes a first conductor, which is arranged in a serpentine manner in both the first and second axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the first conductor in the second axial direction is p. The second power generating body (201b) includes a second conductor, which is arranged in a serpentine manner in both the first and second axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the second conductor in the second axial direction is p, and the spacing between adjacent lines of the first and second conductors in the second axial direction is p / 2. The third power generating body (202a) includes a third conductor, which is arranged in a serpentine manner in both the second and first axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the third conductor in the first axial direction is p. The fourth power generating body (202b) includes a fourth conductor, which is arranged in a serpentine manner in both the second and first axial directions, forming a tortuous path through multiple bends. The spacing between adjacent lines of the fourth conductor in the first axial direction is p, and the spacing between adjacent lines of the third and fourth conductors in the first axial direction is p / 2.

7. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 6, characterized in that, The first and second conductors are each supplied with an independent alternating current, and the phase difference between the two independent currents in the first and second conductors is 90 degrees; the third and fourth conductors are each supplied with an independent alternating current, and the phase difference between the two independent currents in the third and fourth conductors is 90 degrees.

8. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 7, characterized in that, Each independent AC current is equipped with an independent current driver for drive control. After the first force generator (201a) and the second force generator (201b) are energized, they can generate X-direction thrust and Z-direction thrust on the permanent magnet array mover (100). After the third force generator (202a) and the fourth force generator (202b) are energized, they can generate Y-direction thrust and Z-direction thrust on the permanent magnet array mover (100).

9. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to claim 8, characterized in that, The first wire input terminal A1 and the second wire input terminal B1 are connected to the positive terminal of the corresponding current driver output terminal, and the first wire output terminal A2 and the second wire output terminal B2 are connected to the negative terminal of the current driver output terminal; the third wire input terminal C1 and the fourth wire input terminal D1 are connected to the positive terminal of the corresponding current driver output terminal, and the third wire output terminal C2 and the fourth wire output terminal D2 are connected to the negative terminal of the current driver output terminal.

10. The antimagnetic levitation electromagnetic micro-planar XYZ three-axis precision positioning platform according to any one of claims 7-9, characterized in that, The center-to-center distance between two adjacent N-pole square permanent magnets (101) in the permanent magnet array mover (100) is p, the center-to-center distance between two adjacent S-pole square permanent magnets (102) is p, and the two diagonal directions of the permanent magnet array mover (100) are the first axial direction and the second axial direction.

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