A location triggering method, electronic device and medium

Abstract

This application relates to a position triggering method, electronic device, and medium, belonging to the field of high-precision motion control technology. The method includes: acquiring at least two digital signals output by an analog-to-digital converter (ADC) in real time, wherein the input of the ADC is an analog signal output by a position sensor; performing real-time position calculation on the digital signals to obtain raw position data; comparing and processing the raw position data with preset trigger position data in real time; and directly generating a trigger signal when the comparison result meets the triggering conditions. This application synchronously oversamples the analog signal output by the position sensor using an ADC, and integrates the position calculation and trigger comparison functions within the same dedicated digital processor, achieving ultra-high position update rate, position calculation resolution, and extremely low trigger response delay, significantly improving position trigger synchronization accuracy and meeting the needs of nanometer-level high-precision motion control.

Description

Technical Field

[0001] This application relates to the field of high-precision motion control technology, and in particular to a position triggering method, electronic device and medium. Background Technology

[0002] In the field of high-precision motion control, such as semiconductor lithography and wafer inspection, the motion stage not only needs to achieve nanometer-level positioning, but also needs to achieve high-precision synchronous triggering with external systems such as optics and electro-optics at specific spatial positions during the motion process.

[0003] Currently, the most widely used position triggering method in industry is the pulse counting triggering method based on dedicated interpolation chips. This scheme utilizes the precision comparator array integrated within the dedicated interpolation chip to convert the quadrature analog signal output from the position sensor into A / B phase square wave pulses. The system achieves position sensing and triggering by counting these pulses. The specific workflow is as follows: After the sine and cosine analog signals output from the position sensor enter the interpolation chip, the chip's internal comparator array compares the continuous waveform with equally spaced voltage thresholds. When the waveform crosses each threshold, a pulse edge is generated. These pulse edges are encoded into A-phase and B-phase pulses for output, with each pulse corresponding to a fixed displacement equivalent. This pulse signal is transmitted via cable to a host controller or motion control card. During each servo cycle interruption, the controller reads the accumulated value of the quadrature decoding counter and compares it with a preset trigger count value. When the condition is met, a trigger signal is generated through the digital output module.

[0004] However, the above-mentioned solutions have the following drawbacks: First, the interpolation multiple of the dedicated interpolation chip is rigidly determined by the number of its internal comparators. Limited by the hardware-fixed interpolation multiple, the displacement equivalent corresponding to each pulse is large, and the system cannot obtain microscopic position information within the pulse equivalent, resulting in low position resolution. Second, the controller only reads the pulse count value once for position update during each servo cycle interruption. The position update rate is forcibly locked by the servo cycle, resulting in insufficient position update rate. Third, the trigger decision depends on the position subdivision time delay and the internal comparison signal processing scheme, resulting in large delays, and direct comparison is easily affected by occasional pulse noise signals. These problems collectively lead to low position trigger synchronization accuracy in existing technologies, making it difficult to meet the requirements of nanosecond-level high-precision motion control. Summary of the Invention

[0005] In view of this, it is necessary to provide a position triggering method, electronic device and medium to solve the technical problem that the position triggering synchronization accuracy in the prior art is insufficient and cannot meet the requirements of nanometer-level high-precision motion control.

[0006] To address the aforementioned problems, firstly, this application provides a location-triggered method, comprising: The system acquires at least two digital signals output from the analog-to-digital converter in real time, wherein the input of the analog-to-digital converter is the analog signal output from the position sensor. The digital signal is subjected to real-time position calculation to obtain the raw position data; The original location data is compared and processed in real time with the preset trigger location data. When the comparison result meets the trigger condition, a trigger signal is generated directly.

[0007] In one implementation, real-time position calculation is performed on the digital signal to obtain raw position data, including: Phase resolution is performed on the digital signal to obtain real-time phase subdivision values; The home analog signal of the position sensor is acquired, and at the moment the home analog signal is acquired, the current uncalibrated position raw data is calculated based on the current real-time phase subdivision value, the physical displacement corresponding to a single signal cycle of the position sensor, and the current uncalibrated accumulated whole signal cycle number. Based on the uncalibrated original location data, the preset absolute location of the home point, and the physical displacement, the calibration offset of the total signal cycle count is calculated. Based on the calibration offset and the uncalibrated accumulated total signal cycle count, the calibrated accumulated total signal cycle count is obtained. Based on the real-time phase subdivision value, the physical displacement, and the calibrated accumulated whole signal cycles, the calibrated original position data is obtained.

[0008] In one implementation, phase calculation is performed on the digital signal to obtain real-time phase subdivision values, including: Divide the sine signal value in the digital signal by the cosine signal value to obtain the real-time tangent value; Extract the two nearest tangent values ​​and their corresponding nearest phase values ​​that are closest to the absolute value of the real-time tangent value from the pre-stored arctangent lookup table; Interpolation calculations are performed on the real-time tangent value, the nearest tangent value, and the nearest phase value to obtain the subdivided phase value; Based on the signs of the sine and cosine signal values, the subdivided phase values ​​are quadrant-extended to obtain the desired result.

[0009] In one implementation, the accumulated number of whole signal cycles is obtained in real time by counting the periodic pulses generated by the analog signal output by the position sensor from the FPGA internal counter.

[0010] In one embodiment, after acquiring at least two digital signals output by the analog-to-digital converter in real time, the method further includes: performing error correction on the digital signals to obtain corrected digital signals, wherein the error correction includes amplitude correction, bias correction and quadrature phase correction.

[0011] In one implementation, the comparison result satisfies the trigger condition, including: when the previous original location data is less than a preset trigger location data, and the current original location data is greater than or equal to the preset trigger location data, and combining existing historical location data and future location predictions, performing signal processing to determine that the comparison result satisfies the trigger condition.

[0012] In one implementation, the digital processor employs a field-programmable gate array (FPGA) chip.

[0013] In one embodiment, the position sensor is a grating ruler.

[0014] Secondly, this application also provides an electronic device, including a memory and a processor; The memory is used to store programs; The processor, coupled to the memory, is used to execute the program stored in the memory to implement the steps of the location triggering method described above.

[0015] Thirdly, this application also provides a computer-readable storage medium storing a program or instructions that, when executed by a processor, implement the steps of the location triggering method described above.

[0016] The beneficial effects of this application are as follows: The position triggering method provided in this application uses an analog-to-digital converter to synchronously oversample the analog signal output by the position sensor to obtain high-resolution sampling points. Then, the position calculation and trigger comparison functions are integrated into the same dedicated digital processor. The position update rate is determined solely by the digital processor's operating clock, achieving ultra-high position update rate and ultra-high position calculation resolution. Simultaneously, the trigger decision position is moved from the controller side to the signal source end, and the trigger comparison is directly based on the real-time calculated raw position data within the digital processor. The signal transmission path is extremely short, achieving ultra-low latency hardware real-time triggering. Through the aforementioned collaborative mechanism of high-resolution sampling, real-time position calculation, and local trigger decision-making, this application achieves ultra-high position calculation resolution in the spatial dimension and ultra-low trigger response latency and ultra-high position update rate in the temporal dimension, ultimately significantly improving the position triggering synchronization accuracy and meeting the requirements of nanometer-level high-precision motion control. Attached Figure Description

[0017] Figure 1 A flowchart illustrating the location triggering method provided in an embodiment of this application; Figure 2 This is a flowchart illustrating step S12 in an embodiment of this application; Figure 3 This is a flowchart illustrating step S121 in an embodiment of this application; Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0018] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0019] It should be understood that the illustrative drawings are not drawn to scale. The flowcharts used in this application illustrate operations implemented according to some embodiments of this application. It should be understood that the operations in the flowcharts may be implemented out of order, and steps without logical contextual relationships may be reversed or performed simultaneously. Furthermore, those skilled in the art, guided by the content of this application, may add one or more other operations to the flowcharts, or remove one or more operations from the flowcharts. Some block diagrams shown in the drawings are functional entities and do not necessarily correspond to physically or logically independent entities. These functional entities may be implemented in software, in one or more hardware modules or integrated circuits, or in different network and / or processor systems and / or microcontroller systems.

[0020] The terms "first," "second," etc., used in the embodiments of this application are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a technical feature specified with "first" or "second" may explicitly or implicitly include at least one of those features. "And / or" describes the relationship between related objects, indicating that three relationships may exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone.

[0021] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0022] This application provides a location triggering method, an electronic device, and a medium, which are described below.

[0023] Figure 1 This is a flowchart illustrating a position triggering method provided in an embodiment of this application. The position triggering method is applied to a digital processor, such as... Figure 1 As shown, the method includes: S11. Acquire at least two digital signals output by the analog-to-digital converter in real time. The input of the analog-to-digital converter is the analog signal output by the position sensor.

[0024] It should be noted that the analog-to-digital converter (ADC) uses a high-speed ADC, which has a high sampling rate (far higher than the position sensor signal frequency to provide sufficient oversampling rate), low jitter, and high signal-to-noise ratio. The high-speed ADC converts the analog signal output by the position sensor into a synchronous, discretized, and digitized instantaneous voltage value sequence (digital signal), providing data for subsequent digital processing.

[0025] In a preferred embodiment, at least two digital signals include a sine signal value, a cosine signal value, and a home analog signal. The sine and cosine signal values ​​can be directly calculated without coordinate transformation, resulting in low calculation latency, low hardware resource consumption, and, as an industry standard interface, compatibility with mainstream grating rulers.

[0026] It should be noted that the embodiments of this application do not limit the number of digital signals. At least two digital signals can be two orthogonal signals, three 120° phase difference signals, four differential signals, or any other combination of multiple signals with a fixed known phase difference. Regardless of the number of analog signals, as long as they meet the conditions of at least two and a fixed phase difference, they are acceptable. For three 120° signals, the phase can be calculated directly based on their digital sample values ​​through Clarke transform or direct arctangent calculation. For four differential signals, the phase can be calculated after generating two single-ended orthogonal signals through differential merging. For any multiple signals, the phase can be calculated by mapping them to two orthogonal signals through linear transformation.

[0027] In a preferred embodiment, the position sensor is a grating ruler. The grating ruler directly outputs a high-purity orthogonal sine / cosine analog signal, which can be directly oversampled by the high-speed analog-to-digital converter of this application without any demodulation or transformation.

[0028] It should be noted that the embodiments of this application do not limit the type of position sensor. In addition to the above-mentioned grating ruler, the position sensor can also be a grating ruler, a magnetic grating ruler, or an inductive synchronizer, etc. When the position sensor is a grating ruler or a magnetic grating ruler, the output analog signal can be used directly. When the position sensor is an inductive synchronizer, the output phase modulated carrier signal needs to be demodulated before subsequent processing.

[0029] Considering the non-ideal characteristics of analog front-end circuits and the manufacturing differences of position sensors, various systematic errors will be introduced into the two digital signals obtained by analog-to-digital conversion, which will directly affect the accuracy of subsequent position calculation. Among these errors, the main ones include amplitude imbalance (the peak voltages of SIN and COS signals are not equal), DC bias (the signal center deviates from 0V), and quadrature phase error (the phase difference between the two signals is not exactly 90 degrees).

[0030] To compensate for the aforementioned errors and improve signal quality and system robustness, in a preferred embodiment, after step S11, the method further includes: Based on a digital processor, error correction is performed on the digital signal to obtain the corrected digital signal; the error correction includes amplitude correction, bias correction and quadrature phase correction.

[0031] In a preferred embodiment, a step-by-step correction method is adopted: first, bias correction is performed to eliminate the DC component of the two digital signals; then, amplitude correction is performed to normalize the peak values ​​of the two digital signals; finally, quadrature phase correction is performed to compensate for the phase deviation to 90°. This method is simple to implement and converges quickly.

[0032] It should be noted that the specific implementation algorithms for amplitude correction, bias correction and quadrature phase correction in the embodiments of this application are not limited. Step-by-step correction can be adopted, or algorithms based on recursive least squares, Kalman filtering, etc. can be adopted.

[0033] S12. Perform real-time position calculation on the digital signal to obtain the raw position data.

[0034] In a preferred embodiment, such as Figure 2 As shown, step S12 includes: S121. Perform phase calculation on the digital signal to obtain the real-time phase raw value.

[0035] In a preferred embodiment, the phase calculation employs a combination of an arctangent lookup table and linear interpolation. Specifically, as follows: Figure 3 As shown, step S121 includes: S1211. Divide the sine signal value in the digital signal by the cosine signal value to obtain the real-time tangent value.

[0036] S1212. Extract the two nearest tangent values ​​and their corresponding nearest phase values ​​that are closest to the absolute value of the real-time tangent value from the pre-stored arctangent lookup table.

[0037] It should be noted that the arctangent lookup table is pre-calculated and burned into the digital processor's memory during the system design phase. This table adopts a quarter-period table structure and only stores phase values. The mapping relationship between the absolute value of the tangent and the phase within a certain range can be recovered by utilizing the periodicity and symmetry of the tangent function through quadrant expansion. The full-cycle phase value, the depth (number of entries) and width (data bit width) of the lookup table determine the accuracy of the base value, which can be adjusted as needed in practical applications.

[0038] It should also be noted that the nearest tangent values ​​are the two tangent value entries in the lookup table that are closest to the absolute value of the real-time tangent value. The nearest tangent values ​​include the first nearest tangent value and the second nearest tangent value, and the corresponding nearest phase values ​​include the first nearest phase value and the second nearest phase value. The real-time tangent value is between the first nearest tangent value and the second nearest tangent value.

[0039] S1213. Interpolate the real-time tangent, the nearest tangent, and the nearest phase value to obtain the subdivided phase value.

[0040] Specifically, ,in, Indicates the subdivision phase value, Indicates the real-time tangent value. Indicates the first nearest tangent value. Indicates the second nearest tangent value. Indicates the first nearest phase value. This represents the second nearest phase value.

[0041] S1214. Based on the signs of the sine and cosine signal values, quadrant expansion is performed on the subdivided phase values ​​to obtain the original real-time phase values.

[0042] Specifically, the formula for calculating the real-time phase raw value is as follows: ; In the formula, This represents the raw value of the real-time phase, and its range is [range missing]. , This represents the subdivision phase value, with a range of values. , Represents the value of a sinusoidal signal. This represents the cosine signal value.

[0043] The aforementioned arctangent interpolation phase calculation method avoids storage explosion by using a small table and replaces iterative convergence with interpolation. It combines the extremely low latency of pure table lookup with the high precision and scalability of pure computation, achieving high-resolution continuous calculation of the phase of analog signals from position sensors. It also has comprehensive advantages in terms of calculation latency, hardware resources, and precision scalability.

[0044] It should be noted that the specific implementation method of phase calculation in this application embodiment is not limited. In addition to the above-mentioned arctangent interpolation phase calculation method, phase calculation can also be performed by interpolation method, direct calculation of arctangent function, polynomial approximation method, or any other numerical method that can extract instantaneous phase from at least two digital signals with a fixed phase difference.

[0045] S122. Acquire the home analog signal from the position sensor, and at the moment of acquiring the home analog signal, calculate the current uncalibrated position data based on the current real-time phase raw value, the preset physical displacement corresponding to a single signal cycle of the position sensor, and the current uncalibrated accumulated whole signal cycle number.

[0046] Specifically, the formula for calculating the uncalibrated location raw data is as follows: ; In the formula, Indicates the time when the home analog signal was acquired. express Uncalibrated position raw data express The number of accumulated whole signal cycles that are not calibrated at any given time (obtained in real time by counting the periodic pulses generated by the analog signal output by the position sensor from the counter inside the FPGA). express Real-time phase raw value This represents the physical displacement corresponding to a single signal cycle from the position sensor. The proportional coefficient representing the angle to the cycle.

[0047] S123. Based on the uncalibrated original position data, the preset absolute position of the home point, and the physical displacement, calculate the calibration offset of the total signal cycle count. Based on the calibration offset and the uncalibrated accumulated total signal cycle count, obtain the calibrated accumulated total signal cycle count.

[0048] Specifically, the formula for calculating the accumulated number of whole signal cycles after calibration is as follows: ; ; In the formula, This represents the raw data of the uncalibrated location. This indicates the absolute location of the home point. Represents the amount of physical displacement. The calibration offset represents the number of cycles of the complete signal. This indicates the number of uncalibrated, accumulated integer signal cycles. Indicates the accumulated number of whole signal cycles after calibration. S124. Based on the real-time original phase value, physical displacement, and the number of accumulated whole signal cycles after calibration, the calibrated original position data is obtained.

[0049] Specifically, the formula for calculating the calibrated original position data is as follows: ; In the formula, express The original position data after time calibration express The number of accumulated whole signal cycles after time calibration. express Real-time phase raw value This represents the physical displacement corresponding to a single signal cycle from the position sensor.

[0050] in, Represents the raw location data. This represents the original real-time phase value within the current signal period. It represents the physical displacement (physical pitch of the grating ruler) corresponding to a single signal cycle. This indicates the number of accumulated whole signal cycles.

[0051] It should be noted that the specific implementation method of position calculation in the embodiments of this application is not limited. In addition to the arctangent interpolation method mentioned above, phase-locked loop tracking method, polynomial approximation method, or other calculation methods that can calculate the original position data from digital signals can also be used.

[0052] S13. Compare and process the original location data with the preset trigger location data in real time. When the comparison result meets the trigger condition, generate a trigger signal directly.

[0053] Specifically, this application employs edge-triggered discrimination logic: the digital processor compares the current position's raw data and the previous position's raw data with the preset trigger position data in real time. When the previous position's raw data is less than the preset trigger position data, and the current position's raw data is greater than or equal to the preset trigger position data, signal processing is performed in conjunction with existing historical position data and future position predictions to determine if the motion platform is crossing the trigger position in a positive direction. If the comparison result meets the trigger condition, a single-pulse trigger signal is immediately generated to drive the external device to move synchronously. Specifically, when the previous position's raw data is less than the preset trigger position data, and the current position's raw data is greater than or equal to the preset trigger position data, it is initially determined to be a positive crossing event. To eliminate false triggers caused by noise or minor platform jitter, the system further combines historical position data for trend confirmation: for example, if multiple consecutive sampling points show a monotonically increasing trend and cross the trigger point, it is determined to be a valid movement; if it immediately swings back after crossing, it is determined to be jitter and is not triggered. Simultaneously, to compensate for the inherent delay from trigger detection to external device response, the system predicts future positions based on the current movement speed: if it predicts that the platform will cross the target position when the trigger signal actually takes effect, it issues the trigger signal in advance to ensure that the external device moves synchronously when the platform accurately reaches the trigger position. Finally, through the aforementioned trend judgment based on historical data and delay compensation based on future predictions, the system performs comprehensive signal processing on the original comparison results to generate a high-precision, low-jitter trigger signal. If reverse triggering is required, it can be set that when the original data of the previous position is greater than the preset trigger position data, and the original data of the current position is less than or equal to the preset trigger position data, combined with existing historical position data and future position predictions, signal processing is performed to determine if the motion platform crosses the trigger position in the reverse direction. If the comparison result meets the trigger conditions, a single-pulse trigger signal is immediately generated to drive the external device to move synchronously.

[0054] In a preferred embodiment, the digital processor employs a field-programmable gate array (FPGA). FPGAs offer the advantage of hardware parallel processing architecture, enabling position calculation and trigger comparison to be completed synchronously within each clock cycle. The position update rate is determined solely by the system clock frequency, resulting in low trigger latency. Simultaneously, the reconfigurable nature of FPGAs allows for online upgrades of the aforementioned correction algorithm, position calculation algorithm, and trigger logic, adapting to different accuracy requirements or position sensor types without hardware replacement, significantly improving the system's flexibility and maintainability.

[0055] It should be noted that the phase calculation, position synthesis and trigger comparison functions of this application are all integrated into the digital processor. The embodiments of this application do not limit the type of digital processor. The digital processor can be a field programmable gate array (FPGA), a digital signal processor (DSP), an application-specific integrated circuit (ASIC) or other general or special processors with digital signal processing capabilities.

[0056] Compared with existing technologies, the position triggering method provided in this application uses an analog-to-digital converter to synchronously oversample the analog signal output by the position sensor to obtain high-resolution sampling points. Then, the position calculation and trigger comparison functions are integrated into the same dedicated digital processor. The position update rate is determined solely by the digital processor's clock speed, achieving ultra-high position update rate and ultra-high position calculation resolution. Simultaneously, the trigger decision position is moved from the controller side to the signal source end, and the trigger comparison is directly based on the real-time calculated raw position data within the digital processor. The signal transmission path is extremely short, achieving ultra-low latency hardware real-time triggering. Through the aforementioned collaborative mechanism of high-resolution sampling, real-time position calculation, and local trigger decision-making, this application achieves ultra-high position calculation resolution in the spatial dimension and ultra-low trigger response latency and ultra-high position update rate in the temporal dimension, ultimately significantly improving position trigger synchronization accuracy and meeting the requirements of nanometer-level high-precision motion control.

[0057] like Figure 4 As shown, this application also provides an electronic device. This electronic device includes at least a processor 401 and a memory 402.

[0058] Processor 401 may include one or more processing cores, such as a quad-core processor, an octa-core processor, etc. Processor 401 may be implemented using at least one hardware form selected from DSP (Digital Signal Processing), FPGA (Field-Programmable Gate Array), and PLA (Programmable Logic Array). Processor 401 may also include a main processor and a coprocessor. The main processor, also known as a CPU (Central Processing Unit), is used to process data in the wake-up state; the coprocessor is a low-power processor used to process data in the standby state. In some embodiments, processor 401 may integrate a GPU (Graphics Processing Unit), which is responsible for rendering and drawing the content to be displayed on the screen. In some embodiments, processor 401 may also include an AI (Artificial Intelligence) processor, which is used to handle computational operations related to machine learning.

[0059] The memory 402 may include one or more computer-readable storage media, which may be non-transitory. The memory 402 may also include high-speed random access memory and non-volatile memory, such as one or more disk storage devices or flash memory devices. In some embodiments, the non-transitory computer-readable storage media in the memory 402 are used to store at least one instruction, which is executed by the processor 401 to implement the position-triggered method provided in the method embodiments of this application.

[0060] In some embodiments, the electronic device may also optionally include: a peripheral device interface and at least one peripheral device. The processor 401, memory 402, and peripheral device interface can be connected via a bus or signal line. Each peripheral device can be connected to the peripheral device interface via a bus, signal line, or circuit board. Indicatively, peripheral devices include, but are not limited to: radio frequency circuitry, a touch display screen, audio circuitry, and a power supply.

[0061] Of course, electronic devices may also include fewer or more components, and this embodiment does not limit this.

[0062] Accordingly, embodiments of this application also provide a computer-readable storage medium for storing computer-readable programs or instructions. When the programs or instructions are executed by a processor, they can implement the steps or functions of the location triggering methods provided in the above-described method embodiments.

[0063] Those skilled in the art will understand that all or part of the processes of the methods described in the above embodiments can be implemented by a computer program instructing related hardware, and the program can be stored in a computer-readable storage medium. The computer-readable storage medium may be a disk, optical disk, read-only memory, or random access memory, etc.

[0064] The above provides a detailed description of a location triggering method provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

[0065] The above description is merely a preferred embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

Claims

1. A method of location triggering, characterized by, Applied to digital processors, including: The system acquires at least two digital signals output from the analog-to-digital converter in real time, wherein the input of the analog-to-digital converter is the analog signal output from the position sensor. The digital signal is subjected to real-time position calculation to obtain the raw position data; The original location data is compared and processed in real time with the preset trigger location data. When the comparison result meets the trigger condition, a trigger signal is generated directly.

2. The position triggering method according to claim 1, characterized in that, Real-time position calculation is performed on the digital signal to obtain raw position data, including: The digital signal is subjected to phase calculation to obtain the real-time raw phase value; The home analog signal of the position sensor is acquired, and at the moment the home analog signal is acquired, the current uncalibrated position raw data is calculated based on the current real-time phase raw value, the preset physical displacement corresponding to a single signal cycle of the position sensor, and the current uncalibrated accumulated whole signal cycle number. Based on the uncalibrated original location data, the preset absolute location of the home point, and the physical displacement, the calibration offset of the total signal cycle count is calculated. Based on the calibration offset and the uncalibrated accumulated total signal cycle count, the calibrated accumulated total signal cycle count is obtained. Based on the real-time phase raw value, the physical displacement, and the calibrated accumulated whole signal cycles, the calibrated raw position data is obtained.

3. The position triggering method according to claim 2, characterized in that, Phase calculation is performed on the digital signal to obtain the real-time raw phase value, including: Divide the sine signal value in the digital signal by the cosine signal value to obtain the real-time tangent value; Extract the two nearest tangent values ​​and their corresponding nearest phase values ​​that are closest to the absolute value of the real-time tangent value from the pre-stored arctangent lookup table; Interpolation calculations are performed on the real-time tangent value, the nearest tangent value, and the nearest phase value to obtain the subdivided phase value; Based on the signs of the sine and cosine signal values, the subdivided phase values ​​are quadrant-expanded to obtain the real-time original phase values.

4. The position triggering method according to claim 2, characterized in that, The accumulated number of whole signal cycles is obtained in real time by counting the periodic pulses generated by the analog signal output by the position sensor by the counter inside the FPGA.

5. The position triggering method of claim 1, wherein, After acquiring at least two digital signals output by the analog-to-digital converter in real time, the method further includes: performing error correction on the digital signals to obtain corrected digital signals, wherein the error correction includes amplitude correction, bias correction and quadrature phase correction.

6. The position triggering method of claim 1, wherein, The comparison result satisfies the trigger condition, including: when the original location data of the previous location is less than the preset trigger location data, and the original location data of the current location is greater than or equal to the preset trigger location data, and combined with the existing historical location data and future location prediction, signal processing is performed to determine that the comparison result satisfies the trigger condition.

7. The position triggering method of claim 1, wherein, The digital processor uses a field-programmable gate array (FPGA) chip.

8. The position triggering method according to claim 1, characterized in that, The position sensor is a grating ruler.

9. An electronic device, characterized in that, Including memory and processor; The memory is used to store programs; The processor, coupled to the memory, is used to execute the program stored in the memory to implement the steps of the position triggering method according to any one of claims 1 to 8.

10. A computer-readable storage medium, characterized in that, The readable storage medium stores a program or instructions that, when executed by a processor, implement the steps of the position triggering method described in any one of claims 1 to 8.

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