Degradation apparatus for non-biodegradable substances using ultrasonic waves and degradation method thereof

Abstract

According to an embodiment of the present invention, an ultrasonic degradation device for recalcitrant substances may include: a sample inlet for receiving a sample containing a recalcitrant substance; a sample circulation section connected in communication with the sample inlet and having a circulation space for circulating the sample that moves through the sample inlet; and an ultrasonic vibration section that surrounds at least a portion of the sample circulation section and is spaced apart from the outer surface of the sample circulation section, generates ultrasonic waves, and provides ultrasonic waves to the sample circulating within the sample circulation section, thereby degrading the recalcitrant substance in the sample.

Description

Technical Field

[0001] This invention relates to an ultrasonic device and method for degrading recalcitrant substances, and more specifically, to a device and method for directly supplying ultrasonic waves to a sample containing recalcitrant substances such as perfluorinated compounds, thereby enabling the direct degradation of recalcitrant substances with a high degradation rate within the sample circulation section. Due to the uncomplicated structure of the device, it is easy to mass-produce such an ultrasonic device and method for degrading recalcitrant substances. Background Technology

[0002] In recent years, the harmfulness of perfluorinated compounds (PFAS), environmental pollutants known as "eternal chemicals" because they cannot be naturally degraded, has been seriously discussed.

[0003] Perfluorinated compounds are substances synthesized from carbon and fluorine, and are endocrine disruptors that affect ecosystems and human hormones. These perfluorinated compounds are heat-resistant and water- or oil-repellent, and are used in fluoropolymer coatings (pots or pans, etc.), packaging, and waterproofing materials. Due to their high residual and cumulative properties, they have been found in the human body environment.

[0004] These perfluorinated compounds cause problems such as carcinogenicity, developmental toxicity, and reproductive toxicity. Furthermore, existing technologies for removing perfluorinated compounds have limitations, and the mass production of degradation devices also faces limitations.

[0005] In other words, conventional technologies for removing perfluorinated compounds include nanofiltration-electrochemical cathode technology. While methods for removing PFHxA contaminated water have been attempted, they are limited to scales of less than 1 liter, making them unusable in real-world applications.

[0006] On the other hand, while PFOS can be removed to a considerable extent by using granulated activated carbon technology, there is a problem that the activated carbon used for removal cannot be safely and properly disposed of.

[0007] Alternatively, there is a nanofiltration-photocatalytic oxidation-ultrafiltration approach. While this may allow for on-site purification of contaminated water, it presents the challenge of requiring additional measures, such as recirculating the final wastewater, to remove residual PFOA.

[0008] That is, although there are various existing technologies for removing perfluorinated compounds, there is actually no technology for direct degradation and mass production.

[0009] Therefore, there is a need to develop degradation devices and methods for directly removing perfluorinated compounds. Summary of the Invention

[0010] Technical issues The embodiments of the present invention provide an ultrasonic degradation device and degradation method for recalcitrant substances containing perfluorinated compounds and other recalcitrant substances that can be directly applied to a sample containing such recalcitrant substances in a sample circulation section with a high degradation rate. Since the structure of the device is not complicated, it is easy to mass-produce such a device and method for degradation of recalcitrant substances using ultrasonic waves.

[0011] The problems to be solved by the present invention are not limited to those mentioned above, and those skilled in the art can clearly understand other problems not mentioned through the following description.

[0012] Problem-solving methods According to an embodiment of the present invention, an ultrasonic degradation device for recalcitrant substances may include: a sample inlet for receiving a sample containing a recalcitrant substance; a sample circulation section connected in communication with the sample inlet and having a circulation space for circulating the sample that moves through the sample inlet; and an ultrasonic vibration section that surrounds at least a portion of the sample circulation section and is spaced apart from the outer surface of the sample circulation section, generates ultrasonic waves, and provides ultrasonic waves to the sample circulating within the sample circulation section, thereby degrading the recalcitrant substance in the sample.

[0013] Furthermore, the degradation apparatus according to an embodiment of the present invention may further include a sample outflow section, which is disposed on one side of the sample circulation section opposite to the sample inflow section, for discharging a sample containing a recalcitrant substance degraded by the ultrasonic vibration section from the sample circulation section.

[0014] Furthermore, the degradation apparatus according to an embodiment of the present invention may further include a cooling section, which is configured to pass through the center of the sample inflow section, the sample circulation section and the sample outflow section, and moves along a moving path formed therein to cool the sample circulating in the sample circulation section.

[0015] Furthermore, the ultrasonic vibration section according to an embodiment of the present invention may include: a first vibration member having a hollow semi-circular cross-section, disposed in a spaced manner on a portion of the outer surface of the sample circulation section; and a second vibration member having a hollow semi-circular cross-section, disposed opposite to the first vibration member and in a spaced manner on another portion of the outer surface of the sample circulation section, together with the first vibration member forming a hollow circular cross-section.

[0016] Furthermore, the first and second vibration components according to embodiments of the present invention can be made of piezoelectric ceramics.

[0017] Furthermore, the frequency range of the ultrasonic waves irradiated into the sample circulation section by the ultrasonic vibration section according to the embodiment of the present invention can be from 350 kHz to 700 kHz.

[0018] Furthermore, according to an embodiment of the present invention, the two ends of the sample circulation section forming the circulation space are provided with inclined portions facing the oblique direction, thereby allowing the negative pressure that interferes during sample circulation to be concentrated towards the center.

[0019] Furthermore, the tilt angle of the tilted portion according to the embodiments of the present invention can be from 10 degrees to 80 degrees.

[0020] On the other hand, the degradation method of the recalcitrant substance degradation apparatus according to embodiments of the present invention may include: a sample inflow step, wherein a sample containing a recalcitrant substance is inflowed through a sample inflow section; a sample circulation step, wherein the sample moving from the sample inflow section is circulated in a circulation space through a sample circulation section connected in communication with the sample inflow section; and a degradation step, wherein ultrasonic waves are provided to the sample in the sample circulation section through an ultrasonic vibration section surrounding at least a portion of the sample circulation section, thereby degrading the recalcitrant substance contained in the sample.

[0021] Furthermore, the degradation method according to an embodiment of the present invention may further include an effluent step, which is performed after the degradation step, wherein a sample containing the recalcitrant substance degraded by the ultrasonic vibration unit flows out from the sample circulation section through a sample effluent section disposed on one side of the sample circulation section opposite to the sample inflow section.

[0022] Furthermore, the degradation method according to an embodiment of the present invention may further include a cooling step, which is performed simultaneously with the sample circulation step, wherein the sample passing through the sample circulation step is cooled by a cooling substance that moves along a moving path formed inside a cooling section that runs through the center of the sample circulation section.

[0023] Furthermore, in the degradation step according to an embodiment of the present invention, the frequency range of the ultrasonic waves transmitted to the sample circulation section through the ultrasonic vibration section can be from 350 kHz to 700 kHz.

[0024] Furthermore, the ultrasonic vibration unit that generates ultrasonic waves during the degradation step according to an embodiment of the present invention may include: a first vibration member having a hollow semi-circular cross-section, disposed in a manner that separates it from a portion of the outer surface of the sample circulation section; and a second vibration member having a hollow semi-circular cross-section, disposed opposite to the first vibration member and separated from it from another portion of the outer surface of the sample circulation section, forming a hollow circular cross-section together with the first vibration member, wherein the first vibration member and the second vibration member may be made of piezoelectric ceramic.

[0025] On the other hand, a cleaning method of the cleaning apparatus according to an embodiment of the present invention may include: an inflow step, wherein a cleaning object flows in through an inflow section; a circulation step, wherein the cleaning object transmitted from the inflow section is circulated within a circulation space in the circulation section by a circulation section connected to the inflow section; a cleaning step, wherein ultrasonic waves are transmitted to the cleaning object in the circulation section through an ultrasonic vibration section surrounding at least a portion of the circulation section to clean the cleaning object; and an outflow step, wherein the cleaning object cleaned by the ultrasonic vibration section flows out of the circulation section through an outflow section disposed on one side of the circulation section opposite to the inflow section.

[0026] Furthermore, the cleaning object according to embodiments of the present invention may be a substrate including a semiconductor wafer.

[0027] Invention Effects According to an embodiment of the present invention, ultrasonic waves are directly applied to a sample containing recalcitrant substances such as perfluorinated compounds, thereby enabling the recalcitrant substances to be directly degraded at a high degradation rate within the sample circulation section. Since the structure of the device is not complex, it can be easily mass-produced. Attached Figure Description

[0028] Figure 1 This is a perspective view of a device for degrading recalcitrant substances using ultrasound according to an embodiment of the present invention.

[0029] Figure 2 It is shown schematically. Figure 1 A three-dimensional projection of the internal structure of the degradation device.

[0030] Figure 3 It is shown Figure 2 A cross-sectional view of the internal structure of the degradation device shown.

[0031] Figure 4 yes Figure 1 The diagram shows a three-dimensional view of the ultrasonic vibrating part.

[0032] Figure 5 This is a graph showing the degradation rate results based on the frequency range of ultrasound generated from the ultrasonic vibration unit in a recalcitrant substance degradation apparatus according to an embodiment of the present invention.

[0033] Figure 6 This is a flowchart of a degradation method using a device for degrading recalcitrant substances according to an embodiment of the present invention. Detailed Implementation

[0034] The advantages and / or features of the present invention, as well as the methods of implementing them, will become apparent from the embodiments described in detail below with reference to the accompanying drawings.

[0035] However, the present invention is not limited to the embodiments disclosed below, but can be implemented in many different forms. This embodiment is provided only to make the disclosure of the present invention more complete and to fully inform those skilled in the art of the scope of the invention. The present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0036] The embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

[0037] Figure 1 This is a perspective view of a device for degrading recalcitrant substances using ultrasound according to an embodiment of the present invention. Figure 2 It is shown schematically. Figure 1 A three-dimensional projection of the internal structure of the degradation device. Figure 3 It is shown Figure 2 The diagram shows a cross-sectional view of the internal structure of the degradation device. Figure 4 yes Figure 1 The diagram shows a three-dimensional view of the ultrasonic vibrating part.

[0038] Reference Figures 1 to 3 According to an embodiment of the present invention, the ultrasonic degradation device 100 for recalcitrant substances is an apparatus for degrading recalcitrant substances such as perfluorinated compounds using ultrasonic waves. It may include a sample inflow section 120, a sample circulation section 110, an ultrasonic vibration section 130, a sample outflow section 160, and a cooling section 140.

[0039] Firstly, such as Figure 1 As shown, the sample inlet 120 of this embodiment is used for the inflow of a sample containing a recalcitrant substance, and it may be in the shape of a hollow cylinder. Although not shown, an inlet for the sample to flow in is provided on one side of the sample inlet 120, and the sample flowing in through the inlet can be transferred to the next sample circulation section 110 through the movement path formed in the sample inlet 120.

[0040] like Figure 1 and Figure 2 As shown, in this embodiment, the sample circulation section 110 is connected in communication with the sample inflow section 120 and has a circulation space 110S for circulating the sample that moves through the sample inflow section 120.

[0041] like Figure 2 and Figure 3 As shown, the sample circulation section 110 can be generally shaped as a hollow cylinder, and one end of the sample inflow section 120 is disposed on one side of the sample circulation section 110. The sample inflow section 120 and the sample circulation section 110 can have a connected structure. The sample inflow section 120, the sample circulation section 110 and the sample outflow section 160 can be formed as a single unit.

[0042] That is, the sample flowing in through the inlet of the sample inlet section 120 is transferred to the sample circulation section 110, and while circulating in the circulation space 110S of the sample circulation section 110, it can undergo a degradation process.

[0043] Reference Figure 3 Inclined portions 115 facing the oblique direction may be provided at both ends of the circulation space 110S constituting the sample circulation section 110. That is, with Figure 3 Based on this, if the circulation space 110S of the sample circulation section 110 is a hollow cylindrical shape as a whole, then the two ends have a shape with a gradually decreasing inner diameter, so that the sample circulation section 110 can have an inclined portion 115.

[0044] With this inclined portion 115, the negative pressure that interferes with the sample circulation can be concentrated in the center within the sample circulation section 110, thereby improving the degradation efficiency.

[0045] The tilt angle α of the tilted portion 115, based on the inner surface of the circulation space 110S constituting the sample circulation portion 110, can be from 10 degrees to 80 degrees. However, the tilt angle α of the tilted portion 115 is not limited to this.

[0046] On the other hand, such as Figures 1 to 4 As shown, the ultrasonic vibration unit 130 of this embodiment is arranged around the sample circulation unit 110 in such a way that it is separated from the central part of the sample circulation unit 110, and generates ultrasonic waves in the circulation space 110S direction of the sample circulation unit 110, thereby providing ultrasonic waves to the sample circulating in the sample circulation unit 110 to degrade the recalcitrant substances contained in the sample.

[0047] like Figure 2 and Figure 4 As shown, this ultrasonic vibration section 130 may include: a first vibration member 131 having a hollow semi-circular cross-section, which is spaced apart from a portion of the outer surface of the sample circulation section 110; and a second vibration member 135 having a hollow semi-circular cross-section, which is opposite to the first vibration member 131 and spaced apart from another portion of the outer surface of the sample circulation section 110, forming a hollow circular cross-section together with the first vibration member 131.

[0048] That is, the first vibration member 131 and the second vibration member 135 are generally circular ring-shaped, but have a shape with their ends spaced apart. They are made of piezoelectric ceramic, so as to generate ultrasonic waves and provide them to the sample circulation section 110.

[0049] In this way, by separating the first vibration member 131 and the second vibration member 135 from the outer surface of the sample circulation section 110, the internal electrode 150 provided in the sample circulation section 110 can be protected, and since it has a structure that is separated from the internal electrode 150 by a predetermined interval, it can generate uniform energy.

[0050] In this embodiment, the ultrasonic vibration unit 130 is described as including a first vibration member 131 and a second vibration member 135 in a semi-circular shape. However, it is not limited to this. Of course, three or more vibration members can form a ring shape that is spaced apart from each other.

[0051] The frequency range of the ultrasonic waves irradiated by the ultrasonic vibration unit 130 into the circulation space 110S of the sample circulation unit 110 can be, for example, from 350kHz to 700kHz.

[0052] In this regard, refer to Figure 5 Please provide an explanation.

[0053] Figure 5 This is a graph showing the degradation rate results based on the frequency range of ultrasound generated from the ultrasonic vibration unit in a recalcitrant substance degradation apparatus according to an embodiment of the present invention.

[0054] As shown in the figure, when the ultrasonic waves generated by the ultrasonic vibrating unit 130 are, for example, 340 kHz, the degradation rate of methylene blue is about 7.1%, at 700 kHz the degradation rate is about 38%, but at 400 kHz the degradation rate is about 85.6%.

[0055] That is, it can be seen that when the frequency of the ultrasonic waves generated by the ultrasonic vibration unit 130 is between 350 kHz and 700 kHz, it can have an excellent degradation rate, and in particular, it can be seen that the degradation rate is optimal at 400 kHz.

[0056] On the other hand, refer to Figure 1 and Figure 2 In this embodiment, the sample outflow section 160 is provided on one side of the sample circulation section 110 in a manner opposite to the sample inflow section 120, so that the sample containing the recalcitrant substance degraded by the ultrasonic vibration section 130 can flow out of the sample circulation section 110.

[0057] The sample outlet 160 may have a hollow cylindrical shape corresponding to the sample inlet 120. Although not shown, it has an outlet on one side to discharge the degraded sample to the outside.

[0058] On the other hand, such as Figure 1 and Figure 2 As shown, the recalcitrant degradation device 100 of this embodiment may further include a cooling unit 140 for cooling to improve the degradation rate.

[0059] In this embodiment, the cooling section 140, as shown... Figure 1 and Figure 2 As shown in the schematic, a cooling substance for cooling the sample circulating in the sample circulation section 110 is movable along a moving path formed inside the sample inflow section 120, sample circulation section 110, and sample outflow section 160, which is configured to pass through the center of the sample inflow section 120, sample circulation section 110, and sample outflow section 160.

[0060] Therefore, the sample circulating in the circulation space 110S of the sample circulation section 110 exchanges heat with the cooling substance of the cooling section 140, thereby lowering the temperature of the sample. As a result, ultrasonic waves are provided from the ultrasonic vibration section 130 to the sample whose temperature has dropped, thereby better achieving the degradation of recalcitrant substances in the sample.

[0061] On the other hand, the degradation method of the recalcitrant substance degradation device 100 having the above structure will be described below with reference to the accompanying drawings.

[0062] Figure 6 This is a flowchart of a degradation method using a device for degrading recalcitrant substances according to an embodiment of the present invention.

[0063] As shown in the figure, the degradation method of the degradation device 100 for recalcitrant substances in this embodiment may include a sample inflow step S100, a sample circulation step S200, a degradation step S400, and an outflow step S500. Furthermore, it may also include a cooling step S300 that can be performed simultaneously during the sample circulation step S200.

[0064] To explain each step, firstly, in the sample inflow step S100 of this embodiment, a sample containing a recalcitrant substance can flow in through the sample inflow section 120.

[0065] In the sample circulation step S200 of this embodiment, the sample moving from the sample inflow section 120 can be circulated in the circulation space 110S by the sample circulation section 110 which is connected in communication with the sample inflow section 120.

[0066] At this time, the cooling step S300 can be performed simultaneously. During the cooling step S300, the sample that has passed through the sample circulation step S200 can be cooled by using a cooling substance that moves along a moving path formed inside the cooling section 140 in the center of the through sample circulation section 110.

[0067] In the degradation step S400 of this embodiment, ultrasonic waves of 350 kHz to 700 kHz are provided to the sample in the sample circulation section 110 by the ultrasonic vibration section 130 surrounding the sample circulation section 110, thereby degrading the recalcitrant substances contained in the sample.

[0068] Next, in the outflow step S500 of this embodiment, the sample containing recalcitrant substances that has been degraded by the ultrasonic vibration unit 130 in the sample circulation unit 110 can be outflowed to the outside through the sample outflow unit 160.

[0069] As described above, according to one embodiment of the present invention, for example, ultrasonic waves are directly applied to a sample containing recalcitrant substances such as perfluorinated compounds, thereby enabling the recalcitrant substances to be directly degraded at a high degradation rate within the sample circulation section 110. Since the structure of the device is not complex, it can be easily mass-produced.

[0070] On the other hand, a cleaning method using an ultrasonic cleaning apparatus according to another embodiment of the present invention will be described below. However, descriptions of methods substantially corresponding to the degradation method of the degradation apparatus described in the above embodiment will be omitted.

[0071] A cleaning method of a cleaning apparatus according to another embodiment of the present invention may include: an inflow step, wherein a cleaning object flows in through an inflow section; a circulation step, wherein the cleaning object, which is transmitted from the inflow section through a circulation section connected to the inflow section, circulates within a circulation space in the circulation section; a cleaning step, wherein an ultrasonic vibration section is used to transmit ultrasonic waves to the cleaning object in the circulation section to clean the cleaning object by means of an ultrasonic vibration section surrounding at least a portion of the circulation section; and an outflow step, wherein the cleaning object cleaned by the ultrasonic vibration section flows out of the circulation section through an outflow section disposed on one side of the circulation section in a manner opposite to the inflow section.

[0072] Here, the object to be cleaned can be a substrate, including semiconductor wafers.

[0073] Thus, in this embodiment, ultrasonic waves can be used to clean semiconductor wafers and the like efficiently and accurately.

[0074] The specific embodiments of the present invention have been described above, but various modifications can be made without departing from the scope of the invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined by the appended claims and their equivalents.

[0075] As described above, although the present invention has been illustrated with specific embodiments and accompanying drawings, the present invention is not limited to the above embodiments. Those skilled in the art can make various modifications and variations based on this description. Therefore, the spirit of the present invention should be grasped only through the appended claims, and all equivalent or related variations fall within the scope of the present invention.

Claims

1. A device for degrading recalcitrant substances using ultrasound, characterized in that, include: The sample inlet section is for samples containing recalcitrant substances to flow in; A sample circulation section, connected in communication with the sample inlet section, includes a circulation space for the sample circulation that allows the sample to move through the sample inlet section; and An ultrasonic vibration section, spaced apart from the outer surface of the sample circulation section, surrounds at least a portion of the sample circulation section and generates ultrasonic waves to provide ultrasonic waves to the sample circulating within the sample circulation section, thereby degrading the recalcitrant substance in the sample.

2. The ultrasonic degradation device for recalcitrant substances according to claim 1, characterized in that, It also includes a sample outflow section, which is disposed on one side of the sample circulation section opposite to the sample inflow section, for the sample containing a recalcitrant substance degraded by the ultrasonic vibration section to flow out from the sample circulation section.

3. The ultrasonic degradation device for recalcitrant substances according to claim 2, characterized in that, It also includes a cooling section, which is configured to pass through the center of the sample inlet section, the sample circulation section and the sample outlet section, and moves along a moving path formed inside it to cool the sample circulating in the sample circulation section.

4. The device for degrading recalcitrant substances using ultrasound according to claim 1, characterized in that, The ultrasonic vibration unit includes: A first vibrating component, having a hollow semi-circular cross-section, is disposed at a distance from a portion of the outer surface of the sample circulation section; and The second vibration member has a hollow semi-circular cross-section and is disposed opposite to the first vibration member and spaced apart on another part of the outer surface of the sample circulation section, so as to form a hollow circular cross-section together with the first vibration member.

5. The ultrasonic degradation device for recalcitrant substances according to claim 4, characterized in that, The first and second vibrating components are made of piezoelectric ceramics.

6. The ultrasonic degradation device for recalcitrant substances according to claim 4, characterized in that, The frequency range of the ultrasonic waves irradiated into the sample circulation section through the ultrasonic vibration section is 350 kHz to 700 kHz.

7. The device for degrading recalcitrant substances using ultrasound according to claim 1, characterized in that, The two ends of the sample circulation section forming the circulation space are provided with inclined portions facing the oblique direction, thereby accumulating the negative pressure that interferes with the sample circulation towards the center.

8. The device for degrading recalcitrant substances using ultrasound according to claim 7, characterized in that, The tilt angle of the tilted portion is between 10 degrees and 80 degrees.

9. A degradation method for recalcitrant substances using an ultrasonic degradation device, characterized in that, include: The sample inflow step involves the inflow of a sample containing recalcitrant substances through the sample inflow section. The sample circulation step involves circulating the sample moving from the sample inlet within the circulation space via a sample circulation section that is connected in communication with the sample inlet. as well as The degradation step involves providing ultrasonic waves to the sample within the sample circulation section via an ultrasonic vibration section surrounding at least a portion of the sample circulation section, thereby degrading the recalcitrant substance contained in the sample.

10. The degradation method of the recalcitrant substance degradation device utilizing ultrasound according to claim 9, characterized in that, It also includes an outflow step, which is performed after the degradation step, in which a sample containing recalcitrant substances degraded by the ultrasonic vibration unit flows out from the sample circulation section through a sample outflow section disposed on one side of the sample circulation section opposite to the sample inflow section.

11. The degradation method of the recalcitrant substance degradation device utilizing ultrasound according to claim 2, characterized in that, It also includes a cooling step, which is performed simultaneously with the sample circulation step, using a cooling substance that moves along a moving path formed inside a cooling section that runs through the center of the sample circulation section to cool the sample after the sample circulation step.

12. The degradation method of the recalcitrant substance degradation device utilizing ultrasound according to claim 1, characterized in that, In the degradation step, the frequency range of the ultrasonic waves transmitted to the sample circulation section through the ultrasonic vibration section is 350 kHz to 700 kHz.

13. The degradation method of the recalcitrant substance degradation device utilizing ultrasound according to claim 12, characterized in that, The ultrasonic vibrating part that generates ultrasonic waves during the degradation step includes: The first vibrating member has a hollow semi-circular cross-section and is arranged to be separated from a portion of the outer surface of the sample circulation section; and The second vibrating member has a hollow semi-circular cross-section, positioned opposite the first vibrating member and spaced apart from it on another portion of the outer surface of the sample circulation section, forming a hollow circular cross-section together with the first vibrating member. The first and second vibrating components are made of piezoelectric ceramics.

14. A cleaning method using an ultrasonic cleaning device, characterized in that, include: In the inflow step, the object to be cleaned flows in through the inflow section; The circulation step involves circulating the cleaning object delivered from the inflow section within the circulation space of the circulation section via a circulation section connected to the inflow section. The cleaning step involves transmitting ultrasonic waves to the object to be cleaned within the circulation section via an ultrasonic vibrating section surrounding at least a portion of the circulation section. as well as In the outflow step, the object being cleaned by the ultrasonic vibration unit is allowed to flow out of the circulation section through an outflow section located on one side of the circulation section opposite to the inflow section.

15. The cleaning method using an ultrasonic cleaning apparatus according to claim 14, characterized in that, The objects to be cleaned are substrates, including semiconductor wafers.

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