Valve and fluid control device

Abstract

The valve (1) has a housing (10) and a valve diaphragm (30). The housing (10) has a first housing component (11) and a second housing component (12). The first housing component (11) has: a first end component (111) having a first surface (F1111) and a second surface (F1112); and an annular first sidewall component (112) directly or indirectly connected to the first end component (111), having a third surface (F1122) on the side opposite to the side connected to a portion of the second surface (F1112). The second housing component (12) includes: a second end component (121) having a fourth surface (F2111) and a fifth surface (F2112) opposing a portion of the second surface (F1112); and an annular second sidewall component (122) directly or indirectly connected to the second end component (121), having a sixth surface (F2121) opposing or engaging a portion of the fifth surface (F2112) and a seventh surface (F2122) opposing or engaging a portion of the third surface (F1122) of the first sidewall component (112). The first end component (111) includes: a plurality of first vent holes (21) communicating with the first surface (F1111) and the second surface (F1112); and a first valve seat (19) connected to the second surface (F1112) and disposed within the annulus of the first sidewall component (112) when viewed from above. The first valve seat (19) has a first top surface (F19). The first top surface (F19) is located in the thickness direction of the first housing member (11) closer to the fifth surface (F2112) than the second surface (F1112). The second end member (121) has a second vent (22) communicating with the fourth surface (F2111) and the fifth surface (F2112). The second sidewall member (122) has: a third vent (23) communicating with the seventh surface (F2122); and a second valve seat (29) disposed between the inner side surface (F220) of the ring of the second sidewall member (122) and the third vent (23) when viewed from the front of the fourth surface (F2111), and has a second top surface (F29) on the seventh surface (F2122) side. The valve diaphragm (30) is fixed to the housing (10) in a deformable state, at least partially, within the ring of the first sidewall member (112) or the ring of the second sidewall member (122). Viewed along the height direction of the arrangement of the first housing member (11) and the second housing member (12), it has a first portion (31) overlapping the first valve seat (19) and a second portion (32) overlapping the second valve seat (29). The valve diaphragm (30) and the first valve seat (19) constitute a check valve, and the valve diaphragm (30) and the second valve seat (29) constitute an exhaust valve. Viewed along the height direction, the exhaust valve is positioned to surround the check valve.

Description

Technical Field

[0001] The present invention relates to a valve for rectifying fluids such as gases, and a fluid control device comprising the valve and a pump. Background Technology

[0002] Patent Document 1 describes a fluid control valve. The fluid control valve in Patent Document 1 includes an upper housing, a lower housing, and a valve diaphragm. The valve diaphragm is sandwiched between the upper housing and the lower housing, dividing the space surrounded by the upper housing and the lower housing into an upper housing side and a lower housing side.

[0003] The space on the lower housing side is connected to the pump. The space on the upper housing side is connected to the air bladder through the air bladder hole and to the outside of the upper housing through the exhaust hole.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2020-153404

[0005] However, in the existing fluid control valve (valve) as shown in Patent Document 1, when the pump stops and the space on the lower housing side drops to atmospheric pressure, a differential pressure is generated between the space on the lower housing side and the space on the upper housing side.

[0006] This differential pressure is applied to the valve diaphragm. The valve diaphragm may be damaged due to the differential pressure. Summary of the Invention

[0007] Therefore, the purpose of this invention is to suppress differential pressure caused by the switching of valve operating states and to suppress valve diaphragm damage.

[0008] One embodiment of the present invention relates to a valve comprising a housing and a valve diaphragm. The housing comprises a first housing component and a second housing component. The first housing component comprises: a first end component having a first surface and a second surface; and an annular first sidewall component directly or indirectly connected to the first end component, having a third surface on the side opposite to the side connected to a portion of the second surface. The second housing component comprises: a second end component having a fourth surface and a fifth surface opposite to a portion of the second surface; and an annular second sidewall component directly or indirectly connected to the second end component, having a sixth surface opposite to or engaged with a portion of the fifth surface and a seventh surface opposite to or engaged with a portion of the third surface of the first sidewall component.

[0009] The first end member includes: a plurality of first vent holes communicating with a first surface and a second surface; and a first valve seat connected to the second surface and disposed within a ring of the first sidewall member when viewed from above. The first valve seat has a first top surface. The first top surface is located closer to the fifth surface than the second surface in the thickness direction of the first housing member. The second end member includes a second vent hole communicating with the fourth surface and the fifth surface. The second sidewall member includes: an exhaust hole communicating with a seventh surface; and a second valve seat disposed between the inner surface of the ring of the second sidewall member and the exhaust hole when viewed from the front of the fourth surface, and has a second top surface on the seventh surface side.

[0010] The valve diaphragm is fixed to the housing in a deformable state, at least partially, within the ring of the first sidewall component or the ring of the second sidewall component. Viewed along the height direction of the arrangement of the first and second housing components, it has a first portion overlapping the first valve seat and a second portion overlapping the second valve seat. The valve diaphragm and the first valve seat constitute a check valve, and the valve diaphragm and the second valve seat constitute an exhaust valve. Viewed along the height direction, the exhaust valve is positioned to surround the check valve.

[0011] In this structure, when the valve is viewed along the height direction, the vent valve, which includes a vent port communicating with the outside of the housing, overlaps near the outer peripheral end of the valve diaphragm. The vent port communicates with the outside of the housing, thus becoming approximately atmospheric pressure. When the pressure drops to atmospheric pressure on the first vent side, the differential pressure between the two sides of the valve diaphragm (the first vent side and the vent side) decreases.

[0012] According to the present invention, differential pressure generated by the switching of valve operating states can be suppressed, and valve diaphragm rupture can be suppressed. Attached Figure Description

[0013] Figure 1 This is a side sectional view showing the structure of the valve according to the first embodiment.

[0014] Figure 2 This is an exploded perspective view of the valve involved in the first embodiment.

[0015] Figure 3 This is an exploded perspective view of the valve involved in the first embodiment.

[0016] Figure 4 (A) is a diagram showing the state before the valve diaphragm is clamped by the first housing component and the second housing component. Figure 4 (B) is a diagram showing the state after the valve diaphragm is clamped by the first housing component and the second housing component.

[0017] Figure 5 (A) Figure 5 (B) is a side sectional view of the valve structure in the state of valve operation.

[0018] Figure 6This is a side sectional view showing the structure of the valve according to the second embodiment.

[0019] Figure 7 This is an exploded perspective view of the valve involved in the second embodiment.

[0020] Figure 8 (A) is a side sectional view showing the structure of the valve according to the third embodiment. Figure 8 (B) is a side cross-sectional view showing another structure of the valve according to the third embodiment.

[0021] Figure 9 This is an exploded perspective view of the valve according to the third embodiment.

[0022] Figure 10 This is an exploded perspective view of the valve according to the third embodiment.

[0023] Figure 11 This is an exploded perspective view of the valve according to the fourth embodiment.

[0024] Figure 12 This is an exploded perspective view of the valve according to the fourth embodiment.

[0025] Figure 13 This is a side sectional view showing the structure of the valve according to the fifth embodiment.

[0026] Figure 14 This is an exploded perspective view of the valve according to the fifth embodiment.

[0027] Figure 15 This is an exploded perspective view of the valve structure according to the sixth embodiment.

[0028] Figure 16 This is an exploded perspective view of the valve structure according to the sixth embodiment.

[0029] Figure 17 This is an exploded perspective view of the valve structure according to the seventh embodiment.

[0030] Figure 18 This is an exploded perspective view of the valve structure according to the seventh embodiment.

[0031] Figure 19 (A) is a top view of the second housing component. Figure 19 (B) means Figure 19 A sectional view of section A-A of (A).

[0032] Figure 20 (A) is a top view of the second housing component. Figure 20 (B) means Figure 20 A sectional view of section B-B of (A).

[0033] Figure 21 (A) is a top view of the second housing component. Figure 21 (B) means Figure 21 A sectional view of section C-C of (A).

[0034] Figure 22 (A) Figure 22 (B) is a cross-sectional view of the valve according to the eighth embodiment.

[0035] Figure 23 This is an exploded perspective view of the valve structure according to the ninth embodiment.

[0036] Figure 24 This is an exploded perspective view of the valve structure according to the ninth embodiment.

[0037] Figure 25 This is a side sectional view showing the structure of the valve according to the ninth embodiment.

[0038] Figure 26 This is a side cross-sectional view showing the structure of the fluid control device according to the tenth embodiment.

[0039] Figure 27 This is a side cross-sectional view showing the structure of the fluid control device with an airbag according to the tenth embodiment.

[0040] Figure 28 This is an exploded perspective view of the fluid control device according to the tenth embodiment.

[0041] Figure 29 This is an exploded perspective view of the fluid control device according to the eleventh embodiment.

[0042] Figure 30 (A) Figure 30 (B) is a side sectional view of a derived example representing the shape of the airbag. Detailed Implementation

[0043] [First Implementation]

[0044] The valve according to the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a side sectional view showing the structure of the valve according to the first embodiment. Figure 2 , Figure 3 This is an exploded perspective view of the valve involved in the first embodiment. Figure 2 This is an exploded perspective view taken from the side of the second housing component. Figure 3 This is an exploded perspective view taken from the side of the first housing component.

[0045] like Figure 1 , Figure 2 , Figure 3 As shown, valve 1 includes a housing 10 and a valve diaphragm 30. The housing 10 includes a first housing component 11 and a second housing component 12. The first housing component 11 and the second housing component 12 are arranged in the height direction of valve 1 and housing 10. The first housing component 11 and the second housing component 12 have a structure described later, such that housing 10 has an internal space surrounded by the first housing component 11 and the second housing component 12. The valve diaphragm 30 is disposed in the internal space.

[0046] The first housing component 11 has a circular three-dimensional shape when viewed in the height direction. The first housing component 11 includes a first space 210, a plurality of first vent holes 21, a first valve seat 19, and a recess 1110. The recess 1110 corresponds to the "first component recess" of the present invention.

[0047] More specifically, the first housing component 11 includes a first end component 111 and a first sidewall component 112. The first end component 111 and the first sidewall component 112 are integrally formed.

[0048] The first end member 111 is circular in shape when viewed in the height direction. The first end member 111 has a first surface F1111 and a second surface F1112. The first sidewall member 112 is circular in shape when viewed in the height direction. The first sidewall member 112 is connected to the second surface F1112, and has a third surface F1122 on the side opposite to the connecting surface. The first housing member 11, integrally formed from the first end member 111 and the first sidewall member 112, has an outer surface F1113.

[0049] Through this structure, the space within the ring of the first sidewall component 112 becomes the first space 210 of the first housing component 11.

[0050] The first space 210 is circular when viewed in the height direction and is formed by a recess in the third surface F1122, with the second surface F1112 serving as the bottom surface. The first space 210 opens into the third surface F1122. When viewed in the height direction, the center of the first space 210 is the same as or approximately the same as the center of the first housing component 11.

[0051] The first end component 111 has a plurality of first vent holes 21. The plurality of first vent holes 21 extend between the first surface F1111 and the second surface F1112. The plurality of first vent holes 21 communicate with the first space 210. The plurality of first vent holes 21 are oblong when viewed in the height direction.

[0052] Viewed along the height direction, the first housing component 11 has multiple first vent holes 21 arranged radially with the center of the first housing component 11 as a reference.

[0053] The recess 1110 is a shape recessed from the third surface F1122. Viewed in the height direction, the recess 1110 is annular and communicates with the outer peripheral end of the first space 210. The depth of the recess 1110 is less than the thickness of the valve diaphragm 30. Furthermore, when the valve diaphragm 30 is fixed to the bottom surface of the recess 1110 using an adhesive or the like, the depth of the recess 1110 can be set taking into account the thickness of the adhesive.

[0054] The first valve seat 19 is cylindrical. The first valve seat 19 protrudes from the second surface F1112 towards the third surface F1122. The first valve seat 19 is disposed within the first space 210. The first valve seat 19 has a circular first top surface F19 at its front end protruding from the second surface F1112 (the bottom surface formed with the first space 210). The first top surface F19 is positioned approximately at the same height as the third surface F1122 in the height direction of the housing 10.

[0055] The second housing component 12 has a circular three-dimensional shape when viewed in the height direction. The second housing component 12 includes a second space 220, a second vent 22, a third vent 23, and a second valve seat 29. The third vent 23 corresponds to the "exhaust port" of the present invention.

[0056] More specifically, the second housing component 12 includes a second end component 121 and a second sidewall component 122. The second end component 121 and the second sidewall component 122 are formed separately.

[0057] The second end member 121 is circular in shape when viewed in the height direction. The second end member 121 has a fourth surface F2111 and a fifth surface F2112. The second sidewall member 122 is circular in shape when viewed in the height direction. The second sidewall member 122 has a sixth surface F2121 and a seventh surface F2122. The sixth surface F2121 is connected to the fifth surface F2112. The sixth surface F2121 and the fifth surface F2112 can be directly connected (joined) by abutment, or they can be indirectly connected (joined) via other components. The second housing member 12 has an outer surface F2123 and an inner surface F220 facing the space inside the ring.

[0058] Through this structure, the space within the ring of the second sidewall component 122 becomes the second space 220 of the second housing component 12.

[0059] The second space 220 is circular when viewed in the height direction and opens towards the seventh surface F2122. When viewed in the height direction, the center of the second space 220 is the same as or approximately the same as the center of the second housing component 12.

[0060] The diameter of the second space 220 (the diameter of the circle formed by the inner surface F220 of the second sidewall component 122) when viewed along the height direction is smaller than the diameter of the first space 210 (the diameter of the circle formed by the inner surface of the first sidewall component 112) when viewed along the height direction. The diameter of the second space 220 is larger than the diameter of the first valve seat 19 (first top surface F19) when viewed along the height direction.

[0061] The second end component 121 has a second vent 22. The second vent 22 extends between the fourth surface F2111 and the fifth surface F2112. The second vent 22 communicates with the second space 220. The second vent 22 is a circular cylindrical shape when viewed in the height direction.

[0062] The diameter of the second vent 22 is smaller than the diameter of the second space 220 when viewed along the height direction. When viewed along the height direction of the second housing component 12, the second vent 22 is positioned at a point overlapping the center of the second space 220.

[0063] Viewed along the height direction, the second housing component 12 has multiple third vents 23 positioned closer to the outer side than the inner surface F220. Each of the multiple third vents 23 has a longitudinal hole 231 and a transverse hole 232.

[0064] The longitudinal hole 231 is a hole extending along the height direction of the housing 10. The longitudinal hole 231 is formed at a predetermined distance from the inner surface F220 forming the second space 220, close to the outer side. One end of the longitudinal hole 231 opens towards the seventh surface F2122. The transverse hole 232 is a hole extending in a direction orthogonal to the height direction of the housing 10. The transverse hole 232 is formed by a groove recessed from the sixth surface F2121 of the second sidewall member 122 and the fifth surface F2112 of the second end member 121 covering the groove. One end of the transverse hole 232 communicates with the other end of the longitudinal hole 231. The transverse hole 232 opens towards the outer surface F2123. Through this structure, a plurality of third vent holes 23 connect the seventh surface F2122 and the outer surface F2123 in the second housing member 12.

[0065] The second valve seat 29 is annular when viewed in the height direction. Viewed along the height direction of the second housing component 12, the second valve seat 29 is a three-dimensional shape between the inner surface F220 forming the second space 220 and the circle circumscribed by the plurality of third vent holes 23. With this configuration, the second valve seat 29 has a second top surface F29 at a position approximately the same as the seventh surface F2122 in the height direction of the housing 10.

[0066] The first housing component 11 and the second housing component 12 are connected by opposing third surface F1122 and seventh surface F2122. The third surface F1122 and the seventh surface F2122 can be directly connected or indirectly connected via other components. This constitutes the housing 10. At this time, when viewing the housing 10 along the height direction, the opening on the seventh surface F2122 side of the third vent 23 overlaps with the first vent 21.

[0067] The first space 210 and the second space 220 are connected to form the internal space of the valve 1. In addition, the first space 210 is connected to a plurality of third vent holes 23. At this time, the openings of the seventh surface F2122 side of the longitudinal holes 231 of the plurality of third vent holes 23 are connected to a position in the first space 210 that is closer to the outer peripheral end (the inner surface of the first sidewall component 112) than the center.

[0068] The valve diaphragm 30 is circular when viewed from above. The valve diaphragm 30 has a through-hole 300 at its center when viewed along the height direction. The valve diaphragm 30 is composed of a metal membrane, a soft polymer membrane, or the like, which can deform with airflow. The valve diaphragm 30 includes a first portion 31, a second portion 32, and an outer end portion 330.

[0069] The outer end portion 330 of the valve diaphragm 30 is annular and is received in the recess 1110. The outer end portion 330 of the valve diaphragm 30 is held by the bottom surface of the recess 1110 and the seventh surface F2122 of the second sidewall member 122 of the second housing member 12. Thus, the valve diaphragm 30 is fixed to the housing 10 in a state where the center side is deformable compared to the outer end portion 330. At this time, the valve diaphragm 30 is configured to divide the internal space of the housing 10 into a first vent 21 side and a second vent 22 side.

[0070] The first portion 31 is a circular portion that includes a center when viewed in the height direction and includes the area forming the through hole 300. The second portion 32 is an annular portion located closer to the outer end 330 of the first portion 31. When viewed in the height direction, the valve diaphragm 30, the second portion 32 is separate from the first portion 31 and surrounds the first portion 31.

[0071] Viewed along the height of the housing 10, the first part 31 overlaps with the first valve seat 19. Viewed along the height of the housing 10, the second part 32 overlaps with the second valve seat 29.

[0072] The valve diaphragm 30 is shaped such that, in the height direction of the housing 10, the first portion 31 protrudes further towards the second vent 22 than the second portion 32. The valve diaphragm 30 is also shaped such that, in the height direction of the housing 10, the second portion 32 is recessed further towards the first vent 21 than the outer end portion (the portion received in the recess 1110). In other words, viewed laterally orthogonal to the height direction of the housing 10, the valve diaphragm 30 is curved such that the second portion 32 is closer to the first surface F1111 than the first portion 31.

[0073] Such a shape of the valve diaphragm 30 can be achieved, for example, during the assembly of the valve 1. Figure 4 (A) is a diagram showing the state before the valve diaphragm is clamped by the first housing component and the second housing component. Figure 4 (B) is a diagram showing the state after the valve diaphragm is clamped by the first housing component and the second housing component.

[0074] like Figure 4 As shown in (A), the depth D1110 of the recess 1110 is narrower than the thickness D30 of the valve diaphragm 30 (at least the thickness of the outer end portion 330). In this relationship, when the valve diaphragm 30 is housed in the recess 1110, if it is clamped by the first housing member 11 and the second housing member 12, the outer end portion 330 is crushed by the first housing member 11 and the second housing member 12. Thus, as Figure 4 As shown in (B), the thickness of the outer end 330 of the valve diaphragm 30 decreases. As a result, the valve diaphragm 30 is pushed towards the central side by the amount of reduced volume in the outer end 330. Through this pushing, the portion of the valve diaphragm 30 closer to the inner side than the outer end 330 relaxes.

[0075] Near the center of the recess 1110, the first housing component 11 opens through the first space 210, and the second housing component 12 is connected to the seventh surface F2122. Therefore, the slack portion in the valve diaphragm 30 extends toward the first space 210. Moreover, the first portion 31 of the valve diaphragm 30 contacts the valve diaphragm 30 from the first housing component 11 side, so the valve diaphragm 30 bends into a second portion 32 that bulges toward the first space 210.

[0076] With this structure, when gas is not flowing into the first vent 21 (the stopped state (included in the second state)), the first portion 31 of the valve diaphragm 30 contacts the first valve seat 19, and the second portion 32 separates from the second valve seat 29. Therefore, when gas is not flowing into the first vent 21, valve 1 can more reliably connect the second vent 22 and the third vent 23. In other words, when valve 1 is in a state where its function is stopped, valve 1 can more reliably connect the second vent 22 and the third vent 23.

[0077] Valve 1 with this structure operates as follows. Figure 5 (A) Figure 5 (B) is a side sectional view of the valve structure in the state of valve operation. Figure 5 (A) is a diagram showing the state of the valve diaphragm in the first state, where gas flows in from the first vent. Figure 5 (B) is a diagram showing the state of the valve diaphragm in another state, representing the second state in which gas flows in from the second vent.

[0078] (First state)

[0079] If gas flows in through the first vent 21 using a pump or the like described later, the gas (airflow) passes through the first space 210 and encounters the valve diaphragm 30. The valve diaphragm 30 is pressed towards the second space 220 by the gas (airflow).

[0080] As a result, the valve diaphragm 30 separates from the first valve seat 19. Consequently, the first space 210 and the second space 220 become connected. As a result, the first vent 21 connects to the second vent 22 through the first space 210 and the second space 220. That is, the valve 1 can eject the gas flowing into the first vent 21 from the outside of the first surface F1111 towards the outside of the fourth surface F2111.

[0081] At this time, the valve diaphragm 30 is pressed towards the second housing component 12 by the gas flowing into the first space 210. As a result, the second portion 32 of the valve diaphragm 30 abuts against the second top surface F29 of the second valve seat 29.

[0082] Therefore, the second space 220 and the third vent 23 become disconnected. As a result, valve 1 can prevent gas flowing from the first space 210 into the second space 220 from leaking into the third vent 23. Consequently, valve 1 can prevent a decrease in the efficiency of gas transport from the outside of the first surface F1111 to the outside of the fourth surface F2111.

[0083] (The exhaust states included in the second state)

[0084] If gas flows in from the second vent 22 due to exhaust from the airbag (described later), the gas (airflow) passes through the second space 220 and encounters the valve diaphragm 30. The valve diaphragm 30 is pressed towards the first space 210 by the gas (airflow).

[0085] As a result, the second portion 32 of the valve diaphragm 30 separates from the second valve seat 29 and moves into the first space 210. Consequently, the second space 220 and the third vent 23 become connected. As a result, the second vent 22 communicates with the third vent 23 through the second space 220 (which also includes a part of the first space 210). That is, the valve 1 can eject the gas flowing into the second vent 22 from the outside of the fourth surface F2111 to the outside of the outer surface F2123.

[0086] At this time, the valve diaphragm 30 is pressed towards the first housing component 11 by the gas flowing into the second space 220. As a result, the first portion 31 of the valve diaphragm 30 abuts against the first top surface F19 of the first valve seat 19.

[0087] Therefore, the second space 220 and the first space 210 become disconnected. As a result, valve 1 can suppress the leakage of gas flowing into the second space 220 from the second vent 22 to the first vent 21. Consequently, valve 1 can suppress the reduction in the efficiency of gas transport from the outside of the fourth surface F2111 to the outside of the outer surface F2123.

[0088] In this way, the valve diaphragm 30 and the first valve seat 19 constitute a check valve. The valve diaphragm 30 and the second valve seat 29 constitute an exhaust valve.

[0089] As described above, valve 1 can reliably connect the second vent 22 and the third vent 23 (exhaust port) when gas is not supplied from the first vent 21 in a steady state.

[0090] Furthermore, valve 1 can more reliably switch between a first state that connects the first vent 21 and the second vent 22, and a second state that connects the second vent 22 and the third vent 23 (exhaust port).

[0091] Furthermore, when viewing the housing 10 along the height direction, the first vent 21 and the third vent 23 overlap. As a result, during exhaust, the valve diaphragm 30 displaces more towards the first surface F1111. Therefore, the distance between the valve diaphragm 30 and the second valve seat 29 during exhaust can be increased. Consequently, the valve 1 widens the gas flow path during exhaust, resulting in more rapid exhaust.

[0092] Furthermore, the outer periphery of the valve diaphragm 30 is connected to the outside (atmosphere) of the housing 10 via a third vent 23. Therefore, the third vent 23 is at approximately atmospheric pressure. Consequently, when the inflow of gas from the first vent 21 ceases, and the pressure at the first vent 21 and the first space 210 drops to the external pressure (atmospheric pressure), the differential pressure across the valve diaphragm 30 is small, and the area near the outer periphery is not pressurized. Therefore, the valve 1 can suppress the differential pressure applied to the valve diaphragm 30 caused by the change between these two states, and can prevent damage to the valve diaphragm 30.

[0093] Furthermore, observing valve 1 along the height direction, the second valve seat 29 surrounds the first valve seat 19. In other words, observing valve 1 along the height direction, the exhaust valve is positioned to surround the check valve. Moreover, observing valve 1 along the height direction, the central axis of the valve diaphragm 30 is approximately aligned with the center of the first valve seat 19.

[0094] Therefore, in the exhaust state, the gas flowing from the second vent 22 to the third vent 23 flows evenly relative to the central axis of the valve diaphragm 30. Thus, the valve 1 suppresses leakage from the second vent 22 to the first vent 21, improving check valve performance and reliably venting the gas.

[0095] Furthermore, in valve 1, when viewed along the height direction, the openings (connecting to the first space 210) on the fourth surface F2111 side of the plurality of third vent holes 23 are arranged on concentric circles centered on the central axis of valve diaphragm 30. Moreover, the central axis of valve diaphragm 30 passes through the midpoint connecting the openings (connecting to the first space 210) on the fourth surface F2111 side of the plurality of third vent holes 23. That is, when viewed along the height direction, the openings (connecting to the first space 210) on the fourth surface F2111 side of the plurality of third vent holes 23 are arranged symmetrically with respect to the check valve.

[0096] Therefore, the stress exerted on the valve diaphragm 30 by the gas flowing into the multiple third vents 23 is approximately the same with respect to the central axis. As a result, the stress on the valve diaphragm 30 is less likely to be uneven, and the valve 1 can perform stable exhaust and suppress local damage to the valve diaphragm 30.

[0097] Furthermore, the above structure shows a case where there are two third vent holes 23, but it is not limited to two. When there are three or more third vent holes 23, it is more preferable that the multiple third vent holes 23 are arranged at equal angular intervals on concentric circles with the central axis of the valve diaphragm 30 as the center point.

[0098] In such a valve 1 structure, for example, the thickness D30N of the outer end portion 330, which is held between the first housing member 11 and the second housing member 12, relative to the thickness near the through hole 300 (first portion 31) in the valve diaphragm 30 (refer to...). Figure 4 (B) is thinner, thus enabling detection. Alternatively, the depth D1110 of the recess 1110 can be used instead of the thickness D30N of the outer end 330. The height of the recess 1110 can be measured, for example, by X-ray transmission observation or by observing the cross-section after cutting.

[0099] [Second Implementation]

[0100] The valve according to the second embodiment of the present invention will be described with reference to the accompanying drawings. Figure 6 This is a side sectional view showing the structure of the valve according to the second embodiment. Figure 7 This is an exploded perspective view of the valve involved in the second embodiment. Figure 7 This is an exploded perspective view taken from the side of the second housing component.

[0101] like Figure 6 , Figure 7As shown, the valve 1A according to the second embodiment differs from the valve 1 according to the first embodiment in the fixing structure of the valve diaphragm 30. The other structures of the valve 1A according to the second embodiment are the same as those of the valve 1 according to the first embodiment, and descriptions of identical parts are omitted. Furthermore, effects obtained by the valve 1A according to the second embodiment that are the same as those obtained by the valve 1 according to the first embodiment are omitted from description.

[0102] The first housing component 11A has a plurality of protrusions 119. The plurality of protrusions 119 are hemispherical in shape. The plurality of protrusions 119 protrude from the second surface F1112 (the bottom surface forming the first space 210) toward the third surface F1122 in the height direction. The protrusions 119 correspond to the "second protrusion" of the present invention.

[0103] Multiple protrusions 119 are disposed near the inner surface of the first housing component 11A forming the first space 210. Furthermore, when viewing the valve 1A along the height direction, the multiple protrusions 119 are disposed on the seventh surface F2122 closer to the outer side than the openings of the multiple third vent holes 23. The multiple protrusions 119 are arranged at equal angular intervals on a concentric circle centered on the center of the first valve seat 19 (the central axis of the valve diaphragm 30). That is, when viewed along the height direction, the multiple protrusions 119 are arranged in a ring shape, equally spaced along the extension direction of the ring.

[0104] The distance between the multiple protrusions 119 in the height direction and the seventh surface F2122 is narrower than the thickness of the valve diaphragm 30. Therefore, when the valve diaphragm 30 is fixed to the housing 10A, the multiple protrusions 119 bite into the valve diaphragm 30. As a result, the valve diaphragm 30 is not easily detached from the housing 10A during operation.

[0105] Furthermore, multiple protrusions 119 are arranged in a ring shape and are equally spaced along the extension direction of the ring, thereby evenly fixing the valve diaphragm 30 along its outer periphery. As a result, the valve 1A can more stably fix the valve diaphragm 30.

[0106] [Third Implementation]

[0107] The valve according to the third embodiment of the present invention will be described with reference to the accompanying drawings. Figure 8 (A) Figure 8 (B) is a side sectional view showing the structure of the valve according to the third embodiment. Figure 9 , Figure 10 This is an exploded perspective view of the valve according to the third embodiment. Figure 9 This is an exploded perspective view taken from the side of the second housing component. Figure 10 This is an exploded perspective view taken from the side of the first housing component.

[0108] like Figure 8 (A) Figure 9, Figure 10 As shown, the valve 1B according to the third embodiment differs from the valve 1 according to the first embodiment in the fixing structure of the valve diaphragm 30. The other structures of the valve 1B according to the third embodiment are the same as those of the valve 1 according to the first embodiment, and descriptions of identical parts are omitted. Furthermore, effects obtained by the valve 1B according to the third embodiment that are the same as those obtained by the valve 1 according to the first embodiment are omitted from description.

[0109] The first housing component 11B includes a protrusion 18. Viewed along the height direction, the protrusion 18 is annular. Viewed along the height direction, the protrusion 18 is positioned closer to the outer side than the opening on the seventh surface F2122 side of the plurality of third vent holes 23. In the housing 10B, the protrusion 18 protrudes beyond the third surface F1122 in the height direction. The protrusion 18 corresponds to the "first protrusion" of the present invention. A groove 113, which is annular when viewed from above, is formed on the outer side of the protrusion 18.

[0110] The second housing component 12B includes a recess 123. Viewed along the height direction, the recess 123 is annular. The recess 123 is recessed from the seventh surface F2122. Viewed along the height direction, the recess 123 is positioned closer to the outer side than the openings of the plurality of third vent holes 23 on the seventh surface F2122 side. The recess 123 corresponds to the "second component side recess" of the present invention.

[0111] Viewing the housing 10B along the height direction, the recess 123 and the protrusion 18 overlap, and the recess 123 and the groove 113 at least partially overlap. The bottom surface of the recess 123 in the height direction (in...) Figure 7 The distance between the upper side of the concave portion and the front end of the protrusion 18 is narrower than the thickness of the valve diaphragm 30.

[0112] The outer peripheral end of the valve diaphragm 30 is received in the groove 113. The portion of the valve diaphragm 30 between the outer peripheral end and the second part 32 is held by the bottom surface of the recess 123 and the protrusion 18. At this time, the protrusion 18 bites into the portion of the valve diaphragm between the outer peripheral end and the second part 32. As a result, the valve diaphragm 30 is not easily disengaged from the housing 10B when it is in operation.

[0113] Furthermore, in this structure, the valve diaphragm 30 is shaped to extend obliquely downward from the bottom surface of the recess 123 and the fixing portion formed by the protrusion 18 toward the first space 210. As a result, the valve 1B can easily maintain the shape in which the second portion 32 of the valve diaphragm 30 is closer to the first surface F1111 than the first portion 31.

[0114] Furthermore, the groove 113 can be omitted from valve 1B. However, by including the groove 113, the outer peripheral end of the valve diaphragm 30 can be fixed more reliably.

[0115] Figure 8 The valve 1BX shown in (B) differs from valve 1B in that the recess 123 of the second sidewall component 122B is omitted and in the height of the protrusion 18X. The other structures of valve 1BX are the same as those of valve 1B, and descriptions of the same parts are omitted.

[0116] The valve 1BX housing 10BX includes a first housing component 11BX. The first housing component 11BX includes a protrusion 18X. Viewed along the height direction, the protrusion 18X is positioned near the outer peripheral end of the opening on the seventh surface F2122 side of the third vent 23 of the second housing component 12, and overlaps with the seventh surface F2122. The protrusion 18X has a top surface that is closer to the second surface F1112 in the height direction than the third surface F1122. Viewed along the height direction, the protrusion 18X is annular or partially annular. The distance between the top surface of the protrusion 18X and the seventh surface F2122 is narrower than the thickness of the valve diaphragm 30.

[0117] Viewed along the height direction, the groove 113 is positioned closer to the outer surface F1113 than the protrusion 18X. Viewed along the height direction, the groove 113 is an annular or partially annular shape recessed from the third surface F1122.

[0118] The outer peripheral end of the valve diaphragm 30 is received in the groove 113. A portion of the valve diaphragm 30 is held by the seventh surface F2122 and the protrusion 18X.

[0119] [Fourth Implementation]

[0120] The valve according to the fourth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 11 , Figure 12 This is an exploded perspective view of the valve according to the fourth embodiment. Figure 11 This is an exploded perspective view taken from the side of the second housing component. Figure 12 This is an exploded perspective view taken from the side of the first housing component.

[0121] like Figure 11 , Figure 12 As shown, the valve 1C according to the fourth embodiment differs from the valve 1 according to the first embodiment in the plurality of auxiliary holes 124. The other structures of the valve 1C according to the fourth embodiment are the same as those of the valve 1 according to the first embodiment, and descriptions of identical parts are omitted. Furthermore, effects obtained by the valve 1C according to the fourth embodiment that are the same as those obtained by the valve 1 according to the first embodiment are omitted from description.

[0122] The second housing component 12C has a plurality of auxiliary holes 124. The plurality of auxiliary holes 124 are formed in the region of the second sidewall component 122 corresponding to the second valve seat 29, in a shape that extends through the second sidewall component 122 in the height direction. In other words, the second valve seat 29 has a plurality of auxiliary holes 124.

[0123] One end of each of the multiple auxiliary holes 124 is connected to the second space 220 via a hole 1250, and the other end opens toward the second top surface F29.

[0124] Observing valve 1C along the height direction, multiple auxiliary holes 124 are arranged in the middle of the formation position of the opening of multiple third vent holes 23 toward the seventh surface F2122 in the circumferential direction of the circle with the center of the second side wall component 122 as the center point.

[0125] For example, when stationary, the valve diaphragm 30 is sometimes in close contact with the second top surface F29 in the inner wall surface (side surface of the second valve seat 29) forming the second space 220. However, with the structure having valve 1C, the position in the second space 220 near the second vent 22 is connected to the first space 210 side of the second top surface F29 and the third vent 23 through a plurality of holes 1250 and a plurality of auxiliary holes 124.

[0126] Thus, valve 1C can reliably connect the second vent 22 and the third vent 23 (exhaust port) when gas is not supplied from the first vent 21 in a steady state.

[0127] Furthermore, the other ends of the plurality of auxiliary holes 124 open toward the second top surface F29. In this case, when gas flows in from the first vent hole 21, the valve diaphragm 30 abuts against the second top surface F29 of the second valve seat 29. As a result, the plurality of auxiliary holes 124 are blocked by the valve diaphragm 30. Therefore, the valve 1C can suppress gas leakage from the first vent hole 21 to the third vent hole 23 caused by the presence of the plurality of auxiliary holes 124.

[0128] [Fifth Implementation]

[0129] The valve according to the fifth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 13 This is a side sectional view showing the structure of the valve according to the fifth embodiment. Figure 14 This is an exploded perspective view of the valve according to the fifth embodiment. Figure 14 This is an exploded perspective view taken from the side of the first housing component.

[0130] like Figure 13 , Figure 14As shown, the valve 1D according to the fifth embodiment differs from the valve 1 according to the first embodiment in that it includes a second housing component 12D. The other structures of the valve 1D according to the fifth embodiment are the same as those of the valve 1 according to the first embodiment, and descriptions of identical parts are omitted. Furthermore, effects obtained by the valve 1D according to the fifth embodiment that are the same as those obtained by the valve 1 according to the first embodiment are omitted from description.

[0131] The housing 10D of valve 1D includes a second housing component 12D. The second housing component 12D is constructed by integrally forming the second end component 121 and the second sidewall component 122 of the second housing component 12 shown in the first embodiment.

[0132] The second housing component 12D has a protrusion 125 within the second space 220. The protrusion 125 protrudes from the fifth surface F2112 (the bottom surface forming the second space 220) toward the seventh surface F2122. The protrusion 125 corresponds to the "third protrusion" of the present invention.

[0133] The protrusion 125 is, for example, a cylinder. The protrusion 125 is integrally formed with other parts of the second housing component 12D.

[0134] By providing such a protrusion 125, when abnormal vibration of the valve diaphragm 30 is to occur, the valve diaphragm 30 contacts the protrusion 125 before contacting the bottom surface (fifth surface F2112) of the second space 220. As a result, the valve 1D can suppress abnormal vibration of the valve diaphragm 30 and suppress noise caused by abnormal vibration.

[0135] Furthermore, when the second end member 121 and the second sidewall member 122 are formed separately, the protrusion 125 can also be disposed in the second space 220 by being formed on the second end member 121.

[0136] [Sixth Implementation]

[0137] The valve according to the sixth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 15 , Figure 16 This is an exploded perspective view of the valve structure according to the sixth embodiment. Figure 15 This is an exploded perspective view taken from the side of the second housing component. Figure 16 This is an exploded perspective view taken from the side of the first housing component.

[0138] like Figure 15 , Figure 16As shown, the valve 1E according to the sixth embodiment differs from the valve 1C according to the fourth embodiment in the number of first vent holes 21 in the first housing component 11E, the number of third vent holes 23 in the second housing component 12E, and the number of groups of auxiliary holes 124 and holes 1250. The other structures of the valve 1E are the same as those of the valve 1C, and the description of the same parts is omitted.

[0139] Eight first vent holes 21 are formed in the first housing component 11E. The eight first vent holes 21 are arranged symmetrically with reference to the center of the first housing component 11E when viewed along the height direction.

[0140] The second housing component 12E has four third vent holes 23 and four sets of auxiliary holes 124 and holes 1250. The four third vent holes 23 are point-symmetrically arranged with the center of the second housing component 12E as a reference point when viewed along the height direction. The four sets of auxiliary holes 124 and holes 1250 are point-symmetrically arranged with the center of the second housing component 12E as a reference point when viewed along the height direction. The four third vent holes 23 and the four sets of auxiliary holes 124 and holes 1250 are arranged alternately and at equal intervals along a circumferential circle centered on the reference point.

[0141] With this structure, valve 1E can achieve the same effect as valve 1C.

[0142] [Seventh Implementation]

[0143] The valve according to the seventh embodiment of the present invention will be described with reference to the accompanying drawings. Figure 17 , Figure 18 This is an exploded perspective view of the valve structure according to the seventh embodiment. Figure 17 This is an exploded perspective view taken from the side of the second housing component. Figure 18 This is an exploded perspective view taken from the side of the first housing component. Figure 19 (A) is a top view of the second housing component. Figure 19 (B) means Figure 19 A sectional view of section A-A of (A). Figure 20 (A) is a top view of the second housing component. Figure 20 (B) means Figure 20 A sectional view of section B-B of (A). Figure 21 (A) is a top view of the second housing component. Figure 21 (B) means Figure 21 A sectional view of section C-C of (A).

[0144] like Figure 17 , Figure 18 , Figure 19 (A) Figure 19 (B) Figure 20(A) Figure 20 (B) Figure 21 (A) Figure 21 As shown in (B), the valve 1F according to the seventh embodiment differs from the valve 1C according to the fourth embodiment in that it has a second housing member 12F with a housing 10F. The other structures of the valve 1F are the same as those of the valve 1C, and the description of the same parts is omitted.

[0145] The second housing component 12F of valve 1F includes a second sidewall component 122F. The second sidewall component 122F has a plurality of protrusions 126 on its inner surface F220. Along the circumferential direction of the inner surface F220, the positions of the plurality of protrusions 126 differ from the positions of the plurality of third vent holes 23. The plurality of protrusions 126 are arranged, for example, at equal intervals along the circumferential direction of the inner surface F220, positioned at the midpoint of adjacent third vent holes 23 in the circumferential direction.

[0146] Multiple protrusions 126 are configured to be coplanar with respect to the sixth surface F2121. The multiple protrusions 126 are thinner than the second sidewall member 122F.

[0147] Multiple protrusions 126 are in planar overlapping contact with the fifth surface F2112 of the second end member 121.

[0148] In this structure, in valve 1F, the overlapping portion of the plurality of protrusions 126 and the second end member 121 is thicker than the second end member 121. Therefore, valve 1F has a thicker portion around the second vent 22, which increases its rigidity. As a result, valve 1F can suppress the increase in pressure loss.

[0149] More specifically, based on the following principle: When the fourth surface F2111 of the second end member 121 of valve 1F faces the enclosed space (e.g., the airbag 3 described later), if gas (fluid) continuously flows from the first vent 21 to the second vent 22, the pressure within the enclosed space increases. If the pressure within the enclosed space increases, the second end member 121 deforms due to pressure applied from the fourth surface F2111 side. This deformation of the second end member 121 narrows the space of the second space 220.

[0150] If the second space 220 narrows, it hinders the displacement of the valve diaphragm 30. Therefore, the flow path formed between the first valve seat 19 and the valve diaphragm 30 narrows, and the pressure loss increases.

[0151] However, by incorporating the structure of valve 1F, the rigidity of the second end member 121 can be increased. Therefore, even when pressure is applied from the outside of valve 1F, deformation of the second end member 121 can be suppressed. Thus, valve 1F can suppress the increase in pressure loss without hindering the displacement of the valve diaphragm 30.

[0152] Furthermore, due to the presence of multiple protrusions 126, the second sidewall component 122F has multiple recesses 217F1 and multiple recesses 217F2 in the areas where the multiple protrusions 126 are not present. The multiple recesses 217F2 have cutouts CO12.

[0153] like Figure 20 (A) Figure 20 As shown in (B), a plurality of recesses 217F1 are arranged in the same position as a plurality of third vents 23 in the circumferential direction of the inner side surface F220.

[0154] Because it has multiple recesses 217F1, there are no protrusions 216 near the multiple first vents 21 and the multiple third vents 23. Therefore, the displacement of the valve diaphragm 30 is not obstructed near the multiple first vents 21 and the multiple third vents 23, and the valve 1F can suppress the increase of pressure loss. In particular, the valve diaphragm 30 is a highly flexible component, so if the multiple protrusions 216 are not on the same line relative to the multiple first vents 21 or the multiple third vents 23 in a top view, they can be sufficiently displaced. Therefore, the valve 1F can suppress pressure loss.

[0155] like Figure 21 (A) Figure 21 As shown in (B), multiple recesses 217F2 are disposed at positions different from the multiple third vent holes 23 in the circumferential direction of the inner surface F220. By having multiple recesses 217F2, valve 1F can also suppress the obstruction of the displacement of valve diaphragm 30, thereby suppressing pressure loss.

[0156] Furthermore, when stationary, the valve diaphragm 30 is sometimes in close contact with the second top surface F29 in the inner wall surface (side surface of the second valve seat 29) forming the second space 220. However, with the structure having valve 1F, the position in the second space 220 near the second vent 22 is connected to the first space 210 side of the second top surface F29 and the third vent 23 through multiple cuts CO12.

[0157] Thus, valve 1F can reliably connect the second vent 22 and the third vent 23 (exhaust port) when gas is not supplied from the first vent 21 in a steady state.

[0158] Furthermore, the other ends of the multiple cut-out CO12 openings open towards the second top surface F29. In this case, when gas flows in from the first vent 21, the valve diaphragm 30 abuts against the second top surface F29 of the second valve seat 29. Thus, the multiple cut-out CO12 openings are blocked by the valve diaphragm 30. Therefore, valve 1F can suppress gas leakage from the first vent 21 to the third vent 23 caused by the presence of multiple cut-outs.

[0159] [Eighth Implementation]

[0160] The valve according to the eighth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 22 (A) Figure 22 (B) is a cross-sectional view of the valve according to the eighth embodiment.

[0161] Figure 22 The valve 1G1 shown in (A) differs from the valve 1 according to the first embodiment in that it has a second housing component 12G1 with a housing 10G1. The other structures of the valve 1G1 are the same as those of the valve 1, and descriptions of the same parts are omitted.

[0162] The second housing component 12G1 includes a second end component 121G. The second end component 121G differs from the second end component 121 according to the first embodiment in that it has a thick-walled portion 217.

[0163] The thick-walled portion 217 is formed by protruding from the fifth surface F2112. When the second end member 121G is combined with the second side wall member 122, or in other words, when it forms the second housing member 12G1, the thick-walled portion 217 is embedded in the second space 220.

[0164] By providing such a thick-walled portion 217, the rigidity of the part of the second end member 121G that connects with the second space 220 can be increased. As a result, the valve 1G1 can suppress deformation of the second end member 121G and suppress the increase in pressure loss caused by changes in the shape of the second space 220.

[0165] Figure 22 The valve 1G2 shown in (B) differs from the valve 1 according to the first embodiment in that it has a second housing component 12G2 comprising a housing 10G2. The other structures of the valve 1G2 are the same as those of the valve 1, and descriptions of the same parts are omitted.

[0166] The second housing component 12G2 includes a second sidewall component 122G. The second sidewall component 122G differs from the second sidewall component 122 according to the first embodiment in that it has a thick wall portion 218.

[0167] The thick-walled portion 218 is formed by a shape that protrudes from the inner side surface F220 toward the second space 220. The thick-walled portion 218 is preferably coplanar with the sixth surface F2121, but this is not a limitation as long as it is close to the sixth surface F2121.

[0168] By providing such a thick-walled portion 218, the rigidity of the second sidewall component 122G can be increased. As a result, the valve 1G2 can suppress the deformation of the second sidewall component 122G and suppress the increase in pressure loss caused by the shape change of the second space 220.

[0169] [Ninth Implementation]

[0170] The valve according to the ninth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 23 , Figure 24 This is an exploded perspective view of the valve structure according to the ninth embodiment. Figure 23 This is an exploded perspective view taken from the side of the second housing component. Figure 24 This is an exploded perspective view taken from the side of the first housing component. Figure 25 This is a side sectional view showing the structure of the valve according to the ninth embodiment.

[0171] like Figure 23 , Figure 24 , Figure 25 As shown, the valve 1H according to the ninth embodiment differs from the valve 1 according to the first embodiment in that it has the adhesive tape 40. The other structures of the valve 1H are the same as those of the valve 1, and the description of the same parts is omitted.

[0172] Valve 1H includes an adhesive tape 40. The adhesive tape 40 is ring-shaped. The adhesive tape 40 is disposed between the valve diaphragm 30 and the second housing component 12. The adhesive tape 40 adheres to the outer end 330 of the valve diaphragm 30 and the seventh surface F2122 of the second housing component 12.

[0173] With this structure, valve 1H can perform the same function as valve 1. Furthermore, even if the height of the recess 1110 is greater than the thickness of the valve diaphragm 30 due to manufacturing errors, the valve diaphragm 30 can be fixed more stably. Also, the protrusion 119 of valve 1A in the second embodiment may not be required.

[0174] [Tenth Implementation]

[0175] The fluid control device according to the tenth embodiment of the present invention will be described with reference to the accompanying drawings. Figure 26 This is a side cross-sectional view showing the structure of the fluid control device according to the tenth embodiment. Figure 27 This is a side cross-sectional view showing the structure of the fluid control device with an airbag according to the tenth embodiment. Figure 28 This is an exploded perspective view of the fluid control device according to the tenth embodiment. Figure 28 This is an exploded perspective view taken from the side of the second housing component.

[0176] The fluid control device 2I according to the tenth embodiment includes a valve 1I and a pump 80.

[0177] Valve 1I has the same structure as valve 1 in the first embodiment, except that its shape is rectangular when viewed from above and that the first housing component 11 forms part of pump 80. Description omitted.

[0178] An airbag 3 is installed on the fourth side F2111 of valve 1I. The airbag 3 has a cylindrical neck 301. The internal space of the airbag 3 communicates with the second vent 22 of valve 1I through the hollow part of the neck 301.

[0179] Pump 80 includes a main plate 811, a frame 812, multiple connecting parts 813, a piezoelectric element 82, a side wall part for pump housing 83, a flow path forming part 84, a base plate 85, wiring electrodes 86, and a flexible part 87. The first housing part 11 of valve 1I is also formed as part of pump 80.

[0180] The main plate 811 is circular when viewed along its height. The frame 812 is configured to surround the main plate 811 when viewed along its height. Multiple connecting components 813, in the shape of beams, are positioned between the main plate 811 and the frame 812. The multiple connecting components 813 vibratoryly support the main plate 811 relative to the frame 812. The main plate 811, frame 812, and multiple connecting components 813 are integrally formed from metal or the like.

[0181] The piezoelectric element 82 is circular when viewed from above. The piezoelectric element 82 includes a piezoelectric body and a driving conductor. The piezoelectric element 82 is disposed on one main surface of the main plate 811. When viewed along the height direction, the center of the piezoelectric element 82 is approximately aligned with the center of the main plate 811.

[0182] The pump housing sidewall component 83 is annular with a hollow center 830. The pump housing sidewall component 83 is disposed between the frame 812 and the first housing component 11 of the valve 1I.

[0183] The wiring electrode 86 has an annular portion and a winding portion. The winding portion is a shape that extends along the inner side surrounded by the annular portion. The wiring electrode 86 is disposed between the pump housing sidewall member 83 and the first housing member 11. The winding portion of the wiring electrode 86 is connected to the driving body of one main surface of the piezoelectric element 82.

[0184] In the height direction, a flexible member 87, a flow path forming member 84, and a substrate 85 are arranged on the side opposite to the mounting surface of the piezoelectric element 82 in the plate consisting of the main plate 811, the frame 812, and a plurality of connecting members 813.

[0185] The flexible component 87 has a through hole 870. The flow path forming component 84 has a through hole 840. The substrate 85 has a plurality of through holes 88. The through holes 88, 840, and 870 are interconnected and communicate with a plurality of through holes 814 formed between the plurality of connecting components 813.

[0186] The piezoelectric element 82 is deformed by a driving voltage applied to a component consisting of a main plate 811, a frame 812, multiple connecting parts 813, and wiring electrodes 86. As a result, the main plate 811 vibrates.

[0187] Through this vibration, pump 80 draws in gas from through hole 88 and ejects it into first vent hole 21 of valve 1I. In this state, valve diaphragm 30 separates from first valve seat 19 and abuts against second valve seat 29. Thus, valve 1I achieves its first state. In this state, valve 1I supplies gas flowing in from first vent hole 21 to air bag 3 through second vent hole 22.

[0188] On the other hand, if the pump 80 stops driving, the inflow of gas from the pump 80 to the first vent 21 of the valve 1I stops.

[0189] In this case, gas flows into valve 1I from the air bladder 3 through the second vent 22. The valve diaphragm 30 separates from the second valve seat 29 and abuts against the first valve seat 19. Thus, the exhaust state of the second state of valve 1I is achieved.

[0190] Thus, the fluid control device 2I, by having valve 1I, can achieve the same effect as valve 1.

[0191] [Eleventh Implementation Method]

[0192] The fluid control device according to the eleventh embodiment of the present invention will be described with reference to the accompanying drawings. Figure 29 This is an exploded perspective view of the fluid control device according to the eleventh embodiment. Figure 29 This is an exploded perspective view taken from the side of the second housing component.

[0193] like Figure 29 As shown, the fluid control device 2J according to the eleventh embodiment differs from the fluid control device 2I according to the tenth embodiment in the structure of the pump 80J. The other structures of the fluid control device 2J according to the eleventh embodiment are the same as those of the fluid control device 2I according to the tenth embodiment; descriptions of identical parts are omitted.

[0194] The fluid control device 2J is a structure that combines valve 1J and pump 80J. Valve 1J has the same structure as valve 1I.

[0195] Pump 80J includes a main plate 811J, a frame 812J, a connecting part 813J, a piezoelectric element 82J, a side wall part for pump housing 83J, a base plate 85J, a wiring electrode 86J, and a flexible part 87J. The first housing part 11 of valve 1J is also formed as part of pump 80J.

[0196] The main plate 811J and the frame 812J are rectangular when viewed along the height direction. Multiple connecting parts 813J are arranged between the main plate 811J and the frame 812J. The multiple connecting parts 813J vibratoryly support the main plate 811J relative to the frame 812J.

[0197] The flexible component 87J has a through hole 870J.

[0198] The substrate 85J has a groove 850J and a plurality of through holes 88. The groove 850J and the plurality of through holes 88 are connected. The substrate 85J is a component that implements the functions of the substrate 85 and the flow path forming component 84 in the pump 80 according to the tenth embodiment.

[0199] With this structure, pump 80J can achieve the same function as pump 80. Therefore, fluid control device 2J, by having pump 80J and valve 1J, can perform the same function as valve 1, just like fluid control device 2.

[0200] Furthermore, in the above-described embodiments, the valve diaphragm 30 can also be displaced along the height direction of the internal space by the gas flowing in the internal space while maintaining the shape of the first part 31 and the shape of the second part 32, or it can be deformed and displaced at the same time.

[0201] In the above embodiment, the shape of the valve diaphragm 30 when viewed along the height direction is circular, and the shape of the internal space when viewed along the height direction is also circular. However, the shape of the valve diaphragm 30 when viewed along the height direction and the shape of the internal space when viewed along the height direction can also be elliptical, oblong, or polygonal (especially regular polygonal).

[0202] In the above embodiment, the first top surface F19 may also be located on the side closer to the second vent 22 than the fourth surface F2111 in the height direction of the housing 10. In this case, the valve diaphragm 30 more reliably abuts against the first top surface F19 in the exhaust state.

[0203] In the above embodiment, the edges of the outer periphery of the first top surface F19 of the first valve seat 19 and the edges of the second top surface F29 of the second valve seat 29 are preferably chamfered. Thus, the valve 1 can suppress damage to the valve diaphragm 30 by ensuring that the valve diaphragm 30 does not come into contact with sharp shapes.

[0204] (A derivative example of the structure of an airbag)

[0205] Figure 30 (A) Figure 30 (B) is a side sectional view of a derived example representing the shape of the airbag.

[0206] exist Figure 30In the structure shown in (A), the airbag 3 does not have a cylindrical neck, but is connected to the fluid control device 2K. Figure 30 In the structure shown in (B), the opening area of ​​the neck 301 of the airbag 3 is larger than the opening area of ​​the second vent 22.

[0207] Thus, as long as the internal space of the airbag 3 is connected to the second vent 22, the shape of the airbag 3 can be varied.

[0208] Explanation of reference numerals in the attached figures

[0209] 1, 1A, 1B, 1BX, 1C, 1D, 1E, 1F, 1G1, 1G2, 1H, 1I, 1J… Valves; 2I, 2J… Fluid control devices; 3… Airbag; 10, 10A, 10B, 10BX, 10D, 10F, 10G1, 10G2… Housings; 11, 11A, 11B, 11BX… First housing components; 12, 12B, 12C, 12D, 12E, 12F, 12G1, 12G2… Second housing components; 18, 18X… Protrusions; 19… First valve seat; 21… The… 1. Vent hole; 22… Second vent hole; 23… Third vent hole; 29… Second valve seat; 30… Valve diaphragm; 31… First part; 32… Second part; 40… Adhesive tape; 80, 80J… Pump; 82, 82J… Piezoelectric element; 83, 83J… Sidewall component for pump housing; 84… Flow path forming component; 85, 85J… Substrate; 86, 86J… Wiring electrode; 87, 87J… Flexible component; 88… Through hole; 111… First end component; 112… First sidewall component; 121, 121G… Second end component Components; 122, 122F, 122G… Second sidewall component; 1110… Recess; 119… Protrusion; 113… Groove; 123… Recess; 124… Auxiliary hole; 125… Protrusion; 126… Protrusion; 217F1, 217F2… Recess; 210… First space; 220… Second space; 231… Longitudinal hole; 232… Transverse hole; 300… Through hole; 301… Neck; 330… Outer end; 811, 811J… Main plate; 812, 812J… Frame; 813, 813J… Connecting component ; 814… Through hole; 830… Hollow; 831… Side wall component for pump housing; 840… Through hole; 850J… Groove; 870… Through hole; 1250… Hole; CO12… Cut; F1111… First surface; F1112… Second surface; F1113… Outer surface; F1122… Third surface; F2111… Fourth surface; F2112… Fifth surface; F2121… Sixth surface; F2122… Seventh surface; F2123… Outer surface; F220… Inner surface; F19… First top surface; F29… Second top surface.

Claims

1. A valve comprising: shell; and Valve diaphragm, The housing includes a first housing component and a second housing component. The first housing component includes: The first end component has a first surface and a second surface; and A ring-shaped first sidewall component is directly or indirectly connected to the first end component, and has a third surface on the side opposite to the side connected to a portion of the second surface. The second housing component includes: The second end member has a fourth surface and a fifth surface opposite a portion of the second surface; and The second sidewall component, in the shape of a ring, is directly or indirectly connected to the second end component, and has a sixth surface that opposes or engages with a portion of the fifth surface and a seventh surface that opposes or engages with a portion of the third surface of the first sidewall component. The first end component includes: Multiple first vents, connecting the first surface and the second surface; and The first valve seat is connected to the second surface and, when viewed from above, is disposed within the ring of the first sidewall component. The first valve seat has a first top surface. The first top surface is located closer to the fifth surface than the second surface in the thickness direction of the first housing component. The second end component has a second vent hole connecting the fourth and fifth surfaces. The second sidewall component includes: An exhaust port, communicating with the seventh surface; and The second valve seat, when viewed from the front of the fourth side, is disposed between the inner wall surface of the ring of the second sidewall component and the exhaust port, and has a second top surface on the seventh side. The valve diaphragm is fixed to the housing in a deformable state, at least partially, within the ring of the first sidewall component or the ring of the second sidewall component. Viewed along the height direction of the arrangement of the first housing component and the second housing component, the valve diaphragm has a first portion overlapping the first valve seat and a second portion overlapping the second valve seat. The valve diaphragm and the first valve seat constitute a check valve. The valve diaphragm and the second valve seat constitute an exhaust valve. Viewed along the height direction, the exhaust valve is positioned to surround the check valve.

2. The valve according to claim 1, wherein, The exhaust port has multiple parts. Viewed along the height direction, the plurality of vent holes are arranged in a symmetrical position with respect to the check valve.

3. The valve according to claim 1 or 2, wherein, Viewed along the height direction, the second sidewall component has a second sidewall component recess that extends from the seventh surface, closer to the outer side than the vent hole. Viewed along the height direction, the first housing component has a first protrusion at the position where it overlaps with the side recess of the second sidewall component. A portion of the valve diaphragm is held between the bottom surface of the side recess of the second sidewall component and the first protrusion.

4. The valve according to claim 1 or 2, wherein, The first housing component includes: The first protrusion, when viewed along the height direction, has a top surface at a position overlapping with the seventh surface and at a position closer to the second surface than the third surface in the height direction; as well as The groove is positioned closer to the outer side than the first protrusion and is recessed from the third surface. The outer peripheral end of the valve diaphragm is received in the groove, and a portion of the valve diaphragm is held by the seventh surface and the first protrusion.

5. The valve according to claim 1 or 2, wherein, The first housing component has a second protrusion that projects from the second surface toward the third surface. A portion of the valve diaphragm is held between the second protrusion and the seventh surface.

6. The valve according to claim 5, wherein, It has multiple second protrusions, Viewed along the height direction, the plurality of second protrusions are arranged in a ring at equal intervals.

7. The valve according to any one of claims 1 to 6, wherein, Viewed along the height direction, the opening surface of the seventh surface in the exhaust port and the first vent have an overlapping portion.

8. The valve according to any one of claims 1 to 7, wherein, The second valve seat has an auxiliary hole with one end communicating with the inner ring of the second side wall component and the other end opening into the second top surface.

9. The valve according to any one of claims 1 to 8, wherein, The second housing component has a third protrusion that protrudes from the fifth surface toward the valve diaphragm side.

10. A fluid control device, comprising: The valve as described in any one of claims 1 to 9; and The pump has an outlet that communicates with the first vent.

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