基于光束汇聚的光纤法珀传感器及其制作方法
By employing a stacked structure of film layers, intermediate layers, and bottom layers in the fiber optic Fabry-Perot sensor, combined with micro-nano antireflection and collimation structures, the problems of high sensor fabrication complexity and low signal-to-noise ratio were solved, achieving efficient optical signal coupling and stable detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ZHONGBEI UNIV
- Filing Date
- 2026-05-27
- Publication Date
- 2026-07-17
AI Technical Summary
Existing fiber optic Fabry-Perot sensors suffer from problems such as low signal-to-noise ratio, low spectral contrast, complex fabrication process, and high cost during manufacturing.
By employing a stacked structure of film layers, intermediate layers, and bottom layers, grooves are formed on the film layers and bottom layers, and micro-nano antireflection structures and micro-nano collimation structures are formed on the surface of the intermediate layer, forming a beam converging system, simplifying the fabrication process and improving the optical signal coupling efficiency.
It significantly improves the optical signal coupling efficiency and detection performance of the sensor, reduces the manufacturing complexity and cost, and enhances the stability and applicability of the sensor, making it suitable for fields such as aerospace, energy, and industrial monitoring.
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Figure CN122258961B_ABST
Abstract
Citation Information
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