A method for preparing a molybdenum oxide / nickel oxide composite target

Abstract

This invention discloses a method for preparing molybdenum oxide / nickel oxide composite targets. The disclosed method includes heating an ammonium molybdate solution with pH=6-6.5 to 60°C, adding an external dopant to the ammonium molybdate solution while stirring, then adding ammonia water to adjust the pH value to approximately 8.0; subsequently, rapidly cooling to below -10°C while stirring; filtering and drying the crystals containing nickel hydroxide / tantalum hydroxide / niobium hydroxide that crystallize out during cooling, followed by thermal decomposition under a N2 atmosphere; and finally, pressing and hot isostatic pressing to obtain the molybdenum oxide / nickel oxide composite target. This invention provides a method for preparing large-size molybdenum oxide / nickel oxide composite targets with uniform composition.

Images