A high-precision decoupled three-axis MEMS gyroscope

Abstract

The application relates to the technical field of gyroscopes, and discloses a high-precision decoupling type three-axis MEMS gyroscope, which comprises four execution frames which are symmetrically distributed along a first direction and a second direction; four decoupling frames which are symmetrically distributed along a third direction and a fourth direction; four first sensitive mass blocks which are symmetrically distributed along the third direction and the fourth direction; and a fifth direction detection assembly which comprises two second sensitive mass blocks, and each second sensitive mass block is connected with two decoupling frames; the four decoupling frames are configured to drive the second sensitive mass block arranged along the first direction to make detection movement along the second direction when detecting the angular velocity around the fifth direction, or are configured to drive the second sensitive mass block arranged along the second direction to make detection movement along the first direction when detecting the angular velocity around the fifth direction. The high-precision decoupling type three-axis MEMS gyroscope disclosed by the application reduces the detection error of the gyroscope and improves the detection precision and stability of the gyroscope.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and in particular to a high-precision decoupled three-axis MEMS gyroscope. Background Technology

[0002] Currently, existing triaxial gyroscopes on the market have the following shortcomings in structural design. Firstly, existing triaxial gyroscopes with simple structures typically employ a one-to-one configuration of the actuator frame, decoupling frame, and sensitive mass. While this structure can achieve multi-axis angular velocity detection, its detection accuracy is low, making it difficult to meet the demands of high-precision applications. Secondly, because there is a direct correspondence between the actuator frame and the sensitive mass, errors generated by any actuator frame during the driving process will be transmitted to the corresponding sensitive mass via the decoupling frame, causing deviations in the detection signal and further affecting the overall measurement accuracy. Summary of the Invention

[0003] Based on the above, the purpose of this invention is to provide a high-precision decoupled three-axis MEMS gyroscope. By optimizing the structure of the high-precision decoupled three-axis MEMS gyroscope, the problems of large error and low detection accuracy of existing three-axis gyroscopes are solved.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A high-precision decoupled three-axis MEMS gyroscope, comprising: Four execution frames are orthogonally and symmetrically distributed along a first direction and a second direction, and the four execution frames are configured to perform reciprocating driving motion along the contraction direction and the expansion direction; Four decoupling boxes are orthogonally and symmetrically distributed along the third and fourth directions. The four decoupling boxes and four execution boxes are arranged alternately in sequence. Each decoupling box is connected to two execution boxes. The first direction, the second direction, the third direction, and the fourth direction are located in the same plane, and the angle between the third direction and the first direction is 45°. Four first sensitive mass blocks are orthogonally and symmetrically distributed along the third and fourth directions, respectively corresponding to the four decoupling frames. Each first sensitive mass block is elastically connected to one of the decoupling frames. The two decoupling frames arranged along the fourth direction are configured to drive the first sensitive mass blocks connected to them to perform detection motion along the fifth direction when detecting the angular velocity around the third direction; the two decoupling frames arranged along the third direction are configured to drive the first sensitive mass blocks connected to them to perform detection motion along the fifth direction when detecting the angular velocity around the fourth direction. The fifth-direction detection component includes two second sensitive mass blocks, which are arranged along either the first or the second direction. Each second sensitive mass block is connected to two decoupling frames. The four decoupling frames are configured to drive the second sensitive mass blocks arranged along the first direction to perform detection motion along the second direction when detecting angular velocity around the fifth direction, or the four decoupling frames are configured to drive the second sensitive mass blocks arranged along the second direction to perform detection motion along the first direction when detecting angular velocity around the fifth direction.

[0005] As a preferred embodiment of a high-precision decoupled triaxial MEMS gyroscope, the high-precision decoupled triaxial MEMS gyroscope further includes: A first sensitive electrode is disposed on two first sensitive mass blocks distributed along the fourth direction, and the first sensitive electrode is configured to detect angular velocity about the third direction; The second sensitive electrode is disposed on two of the first sensitive mass blocks distributed along the third direction, and the second sensitive electrode is configured to detect the angular velocity about the fourth direction; A third sensitive electrode is disposed on the second sensitive mass block, and the third sensitive electrode is configured to detect angular velocity about the fifth direction.

[0006] As a preferred embodiment of a high-precision decoupled three-axis MEMS gyroscope, the number of the fifth direction detection components is two, and the four second sensitive mass blocks of the two fifth direction detection components are orthogonally and symmetrically distributed along the first direction and the second direction. The four second sensitive mass blocks and the four first sensitive mass blocks are distributed sequentially at intervals, and each decoupling frame is connected to two second sensitive mass blocks.

[0007] As a preferred embodiment of a high-precision decoupled triaxial MEMS gyroscope, the high-precision decoupled triaxial MEMS gyroscope further includes: The first execution decoupling beam has its two ends connected to the first sensitive mass block and the decoupling frame, respectively, and the first execution decoupling beam can deform along the driving direction of the decoupling frame connected to it. The sensitive coupling beam has its two ends connected to the two first sensitive mass blocks, respectively.

[0008] As a preferred embodiment of a high-precision decoupled triaxial MEMS gyroscope, the second sensitive mass block is connected to the decoupling frame via a second execution decoupling beam. Each second sensitive mass block is connected to two decoupling frames via two second execution decoupling beams, and the second execution decoupling beams include connected components: The first decoupling sub-beam extends along the third or fourth direction and is connected to the decoupling frame. The second execution decoupling sub-beam extends along the first direction or the second direction and is connected to the second sensitive mass block. The angle between the second execution decoupling sub-beam and the first execution decoupling sub-beam is 135°.

[0009] As a preferred embodiment of a high-precision decoupled three-axis MEMS gyroscope, the decoupling frame and the execution frame are connected by sensitive decoupling beams. Each decoupling frame is connected to two execution frames via two sensitive decoupling beams, and the sensitive decoupling beams include connected components: The first sensitive decoupling sub-beam extends along the third or fourth direction and is connected to the decoupling frame; The second sensitive decoupling sub-beam extends along the first direction or the second direction and is connected to the execution frame. The angle between the second sensitive decoupling sub-beam and the first sensitive decoupling sub-beam is 135°.

[0010] As a preferred embodiment of a high-precision decoupled three-axis MEMS gyroscope, the execution frame defines an execution mounting cavity, which is provided with an execution anchor point and an execution connecting beam. The execution anchor point is fixed on the substrate, one end of the execution connecting beam is fixed on the execution anchor point, and the other end is connected to the execution frame. The execution connecting beam can deform along the driving direction of the execution frame.

[0011] As a preferred embodiment of a high-precision decoupled triaxial MEMS gyroscope, a sensitive mounting cavity is defined within the second sensitive mass block. The sensitive mounting cavity is provided with a sensitive anchor point and a sensitive connecting beam. The sensitive anchor point is fixed on the substrate, and one end of the sensitive connecting beam is fixed on the sensitive anchor point, while the other end is connected to the second sensitive mass block. The sensitive connecting beam can deform along the detection direction of the second sensitive mass block.

[0012] As a preferred embodiment of a high-precision decoupled triaxial MEMS gyroscope, the high-precision decoupled triaxial MEMS gyroscope further includes a central anchor point and a central movable component. The central anchor point is fixed on the substrate, and the central movable component is simultaneously connected to four first sensitive mass blocks and the central anchor point. The central movable component can deform along the third direction, the fourth direction, and the fifth direction.

[0013] As a preferred embodiment of a high-precision decoupled triaxial MEMS gyroscope, the central movable component includes: The first movable frame is simultaneously connected to four of the first sensitive mass blocks; The second movable frame is located within the first movable frame; Two first deformable straight beams and two second deformable straight beams, the two first deformable straight beams being distributed along the third direction and each of the first deformable straight beams extending along the third direction, the two second deformable straight beams being distributed along the fourth direction and each of the second deformable straight beams extending along the fourth direction, the first movable frame and the second movable frame being connected by one of the first deformable straight beams and the second deformable straight beams, and the second movable frame being connected to the center anchor point by the other of the first deformable straight beams and the second deformable straight beams.

[0014] The beneficial effects of this invention are as follows: This invention discloses a high-precision decoupled three-axis MEMS gyroscope, in which each decoupled frame is connected to two execution frames, effectively improving the consistency of the motion of the four decoupled frames and avoiding displacement differences caused by inconsistent driving forces of the execution frames. This eliminates the detection error caused by the inconsistency of the driving forces of the execution frames, thus significantly improving detection accuracy and anti-interference capability. When detecting angular velocity around a third direction, the first sensitive mass block arranged along the fourth direction moves along the fifth direction. When detecting angular velocity around the fourth direction, the two first sensitive mass blocks arranged along the third direction move along the fifth direction. When detecting angular velocity around the fifth direction, each second sensitive mass block is connected to two decoupled frames and moves under the drive of the two decoupled frames. This connection method can distribute and reduce the impact of the detection motion of a single decoupled frame on a single second sensitive mass block, thereby effectively improving detection accuracy. In addition, given a fixed chip surface area, the high-precision decoupled three-axis MEMS gyroscope with this structure proposed in this invention has a larger detection amplitude, higher accuracy, and better stability, making it suitable for high-precision application scenarios. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of a high-precision decoupled three-axis MEMS gyroscope provided in a specific embodiment of the present invention; Figure 2 This is a partial structural diagram of the execution frame, driving electrode, driving detection electrode, and sensitive decoupling beam of the high-precision decoupled triaxial MEMS gyroscope provided in a specific embodiment of the present invention. Figure 3This is a partial structural diagram of the second sensitive mass block, the third sensitive electrode, and the second execution decoupling beam of the high-precision decoupled triaxial MEMS gyroscope provided in a specific embodiment of the present invention. Figure 4 This is a schematic diagram of the center anchor point and center movable component of a high-precision decoupled three-axis MEMS gyroscope provided in a specific embodiment of the present invention; Figure 5 This is a schematic diagram of a high-precision decoupled three-axis MEMS gyroscope in driving mode provided in a specific embodiment of the present invention; Figure 6 This is a schematic diagram of a high-precision decoupled three-axis MEMS gyroscope detecting angular velocity around the X-axis, provided in a specific embodiment of the present invention. Figure 7 This is a schematic diagram of a high-precision decoupled three-axis MEMS gyroscope detecting angular velocity around the Y-axis, provided in a specific embodiment of the present invention. Figure 8 This is a schematic diagram of a high-precision decoupled three-axis MEMS gyroscope used in a specific embodiment of the present invention to detect angular velocity around the Z-axis.

[0017] In the picture: 11. Execution frame; 1101. First execution sub-frame; 1102. Second execution sub-frame; 1103. Third execution sub-frame; 1104. Fourth execution sub-frame; 111. Execution mounting cavity; 112. Execution anchor point; 113. Execution connecting beam; 12. Drive electrode; 13. Drive detection electrode; 21. Decoupling box; 2101. First decoupling sub-box; 2102. Second decoupling sub-box; 2103. Third decoupling sub-box; 2104. Fourth decoupling sub-box; 31. First sensitive mass block; 3101. First sensitive sub-mass block; 3102. Second sensitive sub-mass block; 3103. Third sensitive sub-mass block; 3104. Fourth sensitive sub-mass block; 32. Second sensitive mass block; 3201. Fifth sensitive sub-mass block; 3202. Sixth sensitive sub-mass block; 3203. Seventh sensitive sub-mass block; 3204. Eighth sensitive sub-mass block; 321. Sensitive mounting cavity; 322. Sensitive anchor point; 323. Sensitive connecting beam; 33. First sensitive electrode; 34. Second sensitive electrode; 35. Third sensitive electrode; 41. First execution decoupling beam; 42. Sensitive coupling beam; 43. Second execution decoupling beam; 431. First execution decoupling sub-beam; 432. Second execution decoupling sub-beam; 44. Sensitive decoupling beam; 441. First sensitive decoupling sub-beam; 442. Second sensitive decoupling sub-beam; 51. Center anchor point; 52. Center movable component; 521. First movable frame; 522. Second movable frame; 523. First deformable straight beam; 524. Second deformable straight beam; 61. Decoupling anchor point; 62. Decoupling elastic beam. Detailed Implementation

[0018] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0020] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0021] This embodiment provides a high-precision decoupled three-axis MEMS gyroscope, such as Figures 1 to 8As shown, the assembly includes four execution blocks 11, four decoupling blocks 21, four first sensitive mass blocks 31, and two fifth-direction detection components. The four execution blocks 11 are orthogonally symmetrically distributed along the first and second directions, and are configured to perform reciprocating driving motion along the contraction and expansion directions. The four decoupling blocks 21 are orthogonally symmetrically distributed along the third and fourth directions, and are alternately arranged with the four execution blocks 11. Each decoupling block 21 is connected to two execution blocks 11. The first, second, third, and fourth directions are located in the same plane, and the angle between the third direction and the first direction is 45°. The four first sensitive mass blocks 31 are orthogonally symmetrically distributed along the third and fourth directions, corresponding to the four decoupling blocks 21 respectively. Each first sensitive mass block 31 is elastically connected to one decoupling block 21. The two decoupling blocks 21 arranged along the fourth direction are configured to drive the connected first sensitive mass blocks 31 to perform detection motion along the fifth direction when detecting the angular velocity around the third direction. The two decoupling blocks 21 set along the third direction are configured to drive the first sensitive mass block 31 connected to them to perform detection motion along the fifth direction when detecting the angular velocity about the fourth direction.

[0022] like Figure 1 As shown, in this embodiment, each fifth-direction detection component includes two second sensitive mass blocks 32. The two second sensitive mass blocks 32 of one fifth-direction detection component are arranged along the first direction, and the two second sensitive mass blocks 32 of the other fifth-direction detection component are arranged along the second direction. The four second sensitive mass blocks 32 are orthogonally and symmetrically distributed along the first and second directions. The four second sensitive mass blocks 32 and four first sensitive mass blocks 31 are sequentially spaced apart. Each second sensitive mass block 32 is connected to two decoupling frames 21, and each decoupling frame 21 is connected to two second sensitive mass blocks 32. The four decoupling frames 21 are configured to drive the second sensitive mass blocks 32 arranged along the first direction to perform detection motion when detecting angular velocity around the fifth direction. The four decoupling frames 21 are also configured to drive the second sensitive mass blocks 32 arranged along the second direction to perform detection motion when detecting angular velocity around the fifth direction. The structure of the four second sensitive mass blocks 32 in the two fifth-direction detection components can increase the detection accuracy and precision of the high-precision decoupled three-axis MEMS gyroscope.

[0023] It should be noted that in other embodiments of the present invention, if the accuracy requirement for the detection in the fifth direction is not high, the number of fifth-direction detection components can also be one, and the two second sensitive mass blocks 32 of the fifth-direction detection component are arranged along the first direction or the second direction. Specifically, if the two second sensitive mass blocks 32 of the fifth-direction detection component are arranged along the first direction, when detecting the angular velocity around the fifth direction, the four decoupling frames 21 can drive the two second sensitive mass blocks 32 to perform detection movement along the second direction; if the two second sensitive mass blocks 32 of the fifth-direction detection component are arranged along the second direction, when detecting the angular velocity around the fifth direction, the four decoupling frames 21 can drive the two second sensitive mass blocks 32 to perform detection movement along the first direction.

[0024] Specifically, such as Figure 1 As shown, in this embodiment, the first direction is the A-axis direction, the second direction is the B-axis direction, the third direction is the X-axis direction, the fourth direction is the Y-axis direction, and the fifth direction is the Z-axis direction. The A-axis direction is perpendicular to the B-axis direction, and the X-axis direction, Y-axis direction, and Z-axis direction are all perpendicular to each other. The A-axis direction, B-axis direction, X-axis direction, and Y-axis direction are located in a plane, and the angle between the A-axis direction and the X-axis direction is 45°.

[0025] The high-precision decoupled three-axis MEMS gyroscope provided in this embodiment has the following characteristics: In the driving mode, each decoupled frame 21 is driven by two execution frames 11, and the driving motion amplitude of the decoupled frame 21 is greater than the motion amplitude of the execution frames 11; In the detection mode, each second sensitive mass block 32 is driven by two decoupled frames 21, and the motion amplitude of the second sensitive mass block 32 is greater than the motion amplitude of the decoupled frame 21, thereby improving the detection accuracy of the high-precision decoupled three-axis MEMS gyroscope.

[0026] like Figure 1 As shown, the high-precision decoupled triaxial MEMS gyroscope of this embodiment also includes decoupling anchor points 61 and decoupling elastic beams 62. The decoupling anchor points 61 are fixed on the substrate. One end of the decoupling elastic beam 62 is connected to the decoupling anchor points 61, and the other end of the decoupling elastic beam 62 is connected to the decoupling frame 21. Each decoupling frame 21 corresponds to two decoupling anchor points 61 and two decoupling elastic beams 62. The decoupling elastic beam 62 connected to the two decoupling frames 21 set along the X-axis can deform along the X-axis to ensure that the two decoupling frames 21 set along the X-axis can perform driving motion along the X-axis. The decoupling elastic beam 62 connected to the two decoupling frames 21 set along the Y-axis can deform along the Y-axis to ensure that the two decoupling frames 21 set along the Y-axis can perform driving motion along the Y-axis.

[0027] The high-precision decoupled three-axis MEMS gyroscope provided in this embodiment connects each decoupling frame 21 to two execution frames 11, effectively improving the consistency of the motion of the four decoupling frames 21. This avoids displacement differences in the decoupling frames 21 caused by inconsistent driving forces of the execution frames 11, thereby eliminating detection errors and significantly improving detection accuracy and anti-interference capability. When detecting angular velocity around a third direction, the first sensitive mass block 31 arranged along the fourth direction moves along the fifth direction; when detecting angular velocity around the fourth direction, the two first sensitive mass blocks 31 arranged along the third direction move along the fifth direction; when detecting angular velocity around the fifth direction, each second sensitive mass block 32 is connected to two decoupling frames 21 and moves under the drive of the two decoupling frames 21. This connection method can distribute and reduce the impact of the detection motion of a single decoupling frame 21 on a single second sensitive mass block 32, thereby effectively improving detection accuracy. Furthermore, given a fixed chip surface area, the high-precision decoupled three-axis MEMS gyroscope with this structure proposed in this embodiment has a larger detection amplitude, higher accuracy, and better stability, making it suitable for high-precision application scenarios.

[0028] like Figure 1 As shown, the high-precision decoupled triaxial MEMS gyroscope of this embodiment further includes a first sensitive electrode 33, a second sensitive electrode 34, and a third sensitive electrode 35. The first sensitive electrode 33 is disposed on two first sensitive mass blocks 31 distributed along the fourth direction and is configured to detect the angular velocity around the third direction. The first sensitive electrode 33 is composed of... Figure 1 The dashed area on the first sensitive mass block 31, positioned along the Y-axis, and the substrate directly opposite it are formed. A second sensitive electrode 34 is disposed on the two first sensitive mass blocks 31 distributed along a third direction and configured to detect angular velocity about a fourth direction. This second sensitive electrode 34 is composed of… Figure 1 The dashed area on the first sensitive mass block 31, positioned along the X-axis, and the substrate directly opposite it are formed. A third sensitive electrode 35 is disposed on the second sensitive mass block 32, and is configured to detect angular velocity about a fifth direction. The third sensitive electrode 35 is... Figure 1 The inertial comb electrode shown is provided on each of the second sensitive mass blocks 32.

[0029] like Figure 1As shown, the high-precision decoupled triaxial MEMS gyroscope of this embodiment also includes a first execution decoupling beam 41 and a sensitive coupling beam 42. The two ends of the first execution decoupling beam 41 are connected to a first sensitive mass block 31 and a decoupling frame 21, respectively. The first execution decoupling beam 41 can deform along the driving direction of the decoupling frame 21 connected to it. The two ends of the sensitive coupling beam 42 are connected to two first sensitive mass blocks 31, respectively. Specifically, the first execution decoupling beam 41 connected to the two decoupling frames 21 arranged along the X-axis can deform along the X-axis, and the second execution decoupling beam 43 connected to the two decoupling frames 21 arranged along the Y-axis can deform along the Y-axis. The first execution decoupling beam 41 is a first U-shaped beam, and each decoupling frame 21 is connected to a first sensitive mass block 31 through two first U-shaped beams. There are four sensitive coupling beams 42, each of which is a second U-shaped beam, with its two ends connected to two first sensitive mass blocks 31, respectively.

[0030] In this embodiment, the second sensitive mass block 32 is connected to the decoupling frame 21 via the second execution decoupling beam 43. Each second sensitive mass block 32 is connected to two decoupling frames 21 via two second execution decoupling beams 43, such as... Figure 3 As shown, the second execution decoupling beam 43 includes a first execution decoupling sub-beam 431 and a second execution decoupling sub-beam 432 connected together. The first execution decoupling sub-beam 431 extends along a third or fourth direction and is connected to the decoupling frame 21. The second execution decoupling sub-beam 432 extends along a first or second direction and is connected to the second sensitive mass block 32. The angle between the second execution decoupling sub-beam 432 and the first execution decoupling sub-beam 431 is 135°. This structure of the second execution decoupling beam 43 not only isolates the driving motion of the decoupling frame 21 from being transmitted to the second sensitive mass block 32, but also transmits the detected motion of the decoupling frame 21 detecting the angular velocity around the Z-axis to the second sensitive mass block 32.

[0031] In this embodiment, the decoupling block 21 and the execution block 11 are connected by sensitive decoupling beams 44, and each decoupling block 21 is connected to two execution blocks 11 through two sensitive decoupling beams 44. Figure 2 As shown, the sensitive decoupling beam 44 includes a first sensitive decoupling sub-beam 441 and a second sensitive decoupling sub-beam 442 connected together. The first sensitive decoupling sub-beam 441 extends along a third or fourth direction and is connected to the decoupling frame 21. The second sensitive decoupling sub-beam 442 extends along a first or second direction and is connected to the execution frame 11. The angle between the second sensitive decoupling sub-beam 442 and the first sensitive decoupling sub-beam 441 is 135°. This structure of the sensitive decoupling beam 44 not only isolates the detection motion of the decoupling frame 21 from being transmitted to the execution frame 11, but also transmits the driving motion of the execution frame 11 to the decoupling frame 21.

[0032] like Figure 2As shown, in this embodiment, the execution frame 11 defines an execution mounting cavity 111. The execution mounting cavity 111 contains an execution anchor point 112 and an execution connecting beam 113. The execution anchor point 112 is fixed to the substrate. One end of the execution connecting beam 113 is fixed to the execution anchor point 112, and the other end of the execution connecting beam 113 is connected to the execution frame 11. The execution connecting beam 113 can deform along the driving direction of the execution frame 11 to ensure that the execution frame 11 performs driving motion relative to the substrate. The execution frame 11 also contains a driving electrode 12 and a driving detection electrode 13. The driving electrode 12 can drive the corresponding execution frame 11 to perform driving motion. The driving detection electrode 13 can detect the driving motion of the execution frame 11 in real time and feed it back to the driving electrode 12 to adjust the driving motion of the execution frame 11 in real time, ensuring that the execution frame 11 performs smooth driving motion.

[0033] like Figure 3 As shown, the second sensitive mass block 32 in this embodiment defines a sensitive mounting cavity 321. The sensitive mounting cavity 321 is provided with a sensitive anchor point 322 and a sensitive connecting beam 323. The sensitive anchor point 322 is fixed on the substrate. One end of the sensitive connecting beam 323 is fixed on the sensitive anchor point 322, and the other end of the sensitive connecting beam 323 is connected to the second sensitive mass block 32. The sensitive connecting beam 323 can deform along the detection direction of the second sensitive mass block 32 to ensure that the second sensitive mass block 32 performs detection movement relative to the substrate.

[0034] like Figure 1 and Figure 4 As shown, the high-precision decoupled triaxial MEMS gyroscope of this embodiment also includes a central anchor point 51 and a central movable component 52. The central anchor point 51 is fixed on the substrate, and the central movable component 52 is simultaneously connected to four first sensitive mass blocks 31 and one central anchor point 51. The central movable component 52 can deform along the third, fourth and fifth directions.

[0035] Specifically, such as Figure 4As shown, the central movable component 52 includes a first movable frame 521, a second movable frame 522, two first deformable straight beams 523, and two second deformable straight beams 524. The first movable frame 521 is simultaneously connected to four first sensitive mass blocks 31. The second movable frame 522 is located inside the first movable frame 521. The two first deformable straight beams 523 are distributed along the X-axis direction and each first deformable straight beam 523 extends along the X-axis direction. The two second deformable straight beams 524 are distributed along the Y-axis direction and each second deformable straight beam 524 extends along the Y-axis direction. The first movable frame 521 and the second movable frame 522 are connected through the second deformable straight beams 524. The second movable frame 522 is connected to the central anchor point 51 through the first deformable straight beams 523. At this time, the first movable frame 521 and the second deformable straight beam 524 can isolate the angular velocity around the X-axis, while the second movable frame 522 and the first deformable straight beam 523 can isolate the angular velocity around the Y-axis.

[0036] It should be noted that, in other embodiments of the present invention, the first movable frame 521 and the second movable frame 522 may be connected by a first deformable straight beam 523, and the second movable frame 522 may be connected to the center anchor point 51 by a second deformable straight beam 524. In this case, the first movable frame 521 and the first deformable straight beam 523 isolate the angular velocity in the Y-axis direction, and the second movable frame 522 and the first deformable straight beam 523 isolate the angular velocity in the X-axis direction.

[0037] It should be noted that, under the condition that the capacitance value of the first sensitive electrode 33 is positively correlated with the surface area of ​​the two first sensitive mass blocks 31 along the Y-axis, the capacitance value of the second sensitive electrode 34 is positively correlated with the surface area of ​​the two first sensitive mass blocks 31 along the X-axis, and the driving displacement of the decoupling frame 21 remains unchanged and the detection frequency is fixed, under the limited area constraint of the chip design, that is, when the sum of the surface areas of the four decoupling frames 21, the four first sensitive mass blocks 31, and the four second sensitive mass blocks 32 is a constant, the mass of the decoupling frame 21 in this embodiment is equal to the mass of the first sensitive mass block 31, which can improve the angular velocity sensitivity of the high-precision decoupled triaxial MEMS gyroscope in the X-axis and Y-axis directions; the mass of the decoupling frame 21 is equal to the mass of the second sensitive mass block 32, which can improve the angular velocity sensitivity of the triaxial MEMS gyroscope in the Z-axis direction.

[0038] like Figure 5As shown, the four execution blocks 11 in this embodiment are defined as the first execution sub-block 1101, the second execution sub-block 1102, the third execution sub-block 1103, and the fourth execution sub-block 1104, respectively; the four decoupling blocks 21 are defined as the first decoupling sub-block 2101, the second decoupling sub-block 2102, the third decoupling sub-block 2103, and the fourth decoupling sub-block 2104, respectively; the four first sensitive mass blocks 31 are defined as the first sensitive sub-mass block 3101, the second sensitive sub-mass block 3102, the third sensitive sub-mass block 3103, and the fourth sensitive sub-mass block 3104, respectively; and the four second sensitive mass blocks 32 are defined as the fifth sensitive sub-mass block 3201, the sixth sensitive sub-mass block 3202, the seventh sensitive sub-mass block 3203, and the eighth sensitive sub-mass block 3204, respectively. Along the positive X-axis, the first decoupling sub-frame 2101, the first sensitive sub-mass block 3101, the second sensitive sub-mass block 3102, and the second decoupling sub-frame 2102 are arranged sequentially. Along the positive Y-axis, the third decoupling sub-frame 2103, the third sensitive sub-mass block 3103, the fourth sensitive sub-mass block 3104, and the fourth decoupling sub-frame 2104 are arranged sequentially. Along the positive A-axis, the first execution sub-frame 1101, the fifth sensitive sub-mass block 3201, the sixth sensitive sub-mass block 3202, and the second execution sub-frame 1102 are arranged sequentially. Along the positive B-axis, the third execution sub-frame 1103, the seventh sensitive sub-mass block 3203, the eighth sensitive sub-mass block 3204, and the fourth execution sub-frame 1104 are arranged sequentially.

[0039] like Figure 5 As shown, in the driving mode, when the first execution sub-frame 1101 moves along the negative A-axis, the second execution sub-frame 1102 moves along the positive A-axis, the third execution sub-frame 1103 moves along the negative B-axis, and the fourth execution sub-frame 1104 moves along the positive B-axis. That is, the four execution frames 11 perform driving motion along the expansion direction. At this time, the first decoupling sub-frame 2101 moves along the negative X-axis under the drive of the first execution sub-frame 1101 and the fourth execution sub-frame 1104, the second decoupling sub-frame 2102 moves along the positive X-axis under the drive of the second execution sub-frame 1102 and the third execution sub-frame 1103, the third decoupling sub-frame 2103 moves along the negative Y-axis under the drive of the first execution sub-frame 1101 and the third execution sub-frame 1103, and the fourth decoupling sub-frame 2104 moves along the positive Y-axis under the drive of the second execution sub-frame 1102 and the fourth execution sub-frame 1104.

[0040] In the driving mode, when the first execution sub-frame 1101 moves along the positive A-axis, the second execution sub-frame 1102, the third execution sub-frame 1103, and the fourth execution sub-frame 1104 all move in their respective opposite directions, i.e., the four execution frames 11 perform a contraction driving motion. Simultaneously, the first decoupling sub-frame 2101, the second decoupling sub-frame 2102, the third decoupling sub-frame 2103, and the fourth decoupling sub-frame 2104 all perform driving motions in their respective opposite directions. It should be noted that in the driving mode, the first execution decoupling beam 41 connected to the first and second decoupling sub-frames 2101 and 2102 deforms along the X-axis, and the first execution decoupling beam 41 connected to the third and fourth decoupling sub-frames 2103 and 2104 deforms along the Y-axis. This prevents the first sensitive mass block 31 from moving with the decoupling frame 21, causes the second execution decoupling beam 43 to deform, and similarly prevents the second sensitive mass block 32 from moving with the decoupling frame 21.

[0041] like Figure 6 As shown, when detecting the angular velocity around the X-axis, due to the Coriolis effect, the third decoupling sub-frame 2103 and the fourth decoupling sub-frame 2104 are subjected to a Coriolis force in the opposite direction along the Z-axis, causing them to move in opposite directions along the Z-axis. Driven by the first execution decoupling beam 41, the third sensitive sub-mass block 3103 and the fourth sensitive sub-mass block 3104 move in opposite directions along the Z-axis. It should be noted that when detecting the angular velocity around the X-axis, the sensitive decoupling beam 44 and the second execution decoupling beam 43 connected to the third decoupling sub-frame 2103 and the fourth decoupling sub-frame 2104 both deform, and the four execution frames 11 and the four second sensitive mass blocks 32 do not move along the Z-axis with the third decoupling sub-frame 2103 and the fourth decoupling sub-frame 2104.

[0042] like Figure 7 As shown, when detecting the angular velocity around the Y-axis, due to the Coriolis effect, the first decoupling sub-frame 2101 and the second decoupling sub-frame 2102 are subjected to a Coriolis force in the opposite direction along the Z-axis, causing them to move in opposite directions along the Z-axis. Driven by the first execution decoupling beam 41, the first sensitive sub-mass block 3101 and the second sensitive sub-mass block 3102 move in opposite directions along the Z-axis. It should be noted that when detecting the angular velocity around the Y-axis, the sensitive decoupling beam 44 and the second execution decoupling beam 43 connected to the first decoupling sub-frame 2101 and the second decoupling sub-frame 2102 both deform, and the four execution frames 11 and the four second sensitive mass blocks 32 do not move along the Z-axis with the first decoupling sub-frame 2101 and the second decoupling sub-frame 2102.

[0043] like Figure 8As shown, when detecting the angular velocity around the Z-axis, due to the Coriolis effect, the first decoupling sub-frame 2101 and the second decoupling sub-frame 2102 move in opposite directions along the Y-axis, and the third decoupling sub-frame 2103 and the fourth decoupling sub-frame 2104 move in opposite directions along the X-axis. At this time, the four decoupling frames 21 move in either a clockwise or counterclockwise direction. Driven by the second execution decoupling beam 43, the fifth sensitive sub-mass block 3201 and the sixth sensitive sub-mass block 3202 move in opposite directions along the B-axis, and the seventh sensitive sub-mass block 3203 and the eighth sensitive sub-mass block 3204 move in opposite directions along the A-axis. The four second sensitive mass blocks 32 also move in either a clockwise or counterclockwise direction. It should be noted that when detecting the angular velocity around the Z-axis, the sensitive decoupling beam 44 connected to the four decoupling frames 21 deforms, causing the four execution frames 11 to not move with the four decoupling frames 21.

[0044] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A high-precision decoupled three-axis MEMS gyroscope, characterized in that, include: Four execution frames are orthogonally and symmetrically distributed along a first direction and a second direction, and the four execution frames are configured to perform reciprocating driving motion along the contraction direction and the expansion direction; Four decoupling boxes are orthogonally and symmetrically distributed along the third and fourth directions. The four decoupling boxes and four execution boxes are arranged alternately in sequence. Each decoupling box is connected to two execution boxes. The first direction, the second direction, the third direction, and the fourth direction are located in the same plane, and the angle between the third direction and the first direction is 45°. Four first sensitive mass blocks are orthogonally and symmetrically distributed along the third and fourth directions, respectively corresponding to the four decoupling frames. Each first sensitive mass block is elastically connected to one of the decoupling frames. The two decoupling frames arranged along the fourth direction are configured to drive the first sensitive mass blocks connected to them to perform detection motion along the fifth direction when detecting the angular velocity around the third direction; the two decoupling frames arranged along the third direction are configured to drive the first sensitive mass blocks connected to them to perform detection motion along the fifth direction when detecting the angular velocity around the fourth direction. The fifth direction detection component includes two second sensitive mass blocks, which are arranged along either the first or the second direction. Each second sensitive mass block is connected to two decoupling frames. The four decoupling frames are configured to drive the second sensitive mass blocks arranged along the first direction to perform detection motion along the second direction when detecting angular velocity around the fifth direction; or, the four decoupling frames are configured to drive the second sensitive mass blocks arranged along the second direction to perform detection motion along the first direction when detecting angular velocity around the fifth direction. The first direction is the A-axis direction, the second direction is the B-axis direction, the third direction is the X-axis direction, the fourth direction is the Y-axis direction, and the fifth direction is the Z-axis direction. The A-axis direction is perpendicular to the B-axis direction, and the X-axis direction, the Y-axis direction, and the Z-axis direction are all perpendicular to each other. The A-axis direction, the B-axis direction, the X-axis direction, and the Y-axis direction are located in a plane, and the angle between the A-axis direction and the X-axis direction is 45°.

2. The high-precision decoupled triaxial MEMS gyroscope according to claim 1, characterized in that, The high-precision decoupled triaxial MEMS gyroscope also includes: A first sensitive electrode is disposed on two first sensitive mass blocks distributed along the fourth direction, and the first sensitive electrode is configured to detect angular velocity about the third direction; The second sensitive electrode is disposed on two of the first sensitive mass blocks distributed along the third direction, and the second sensitive electrode is configured to detect the angular velocity about the fourth direction; A third sensitive electrode is disposed on the second sensitive mass block, and the third sensitive electrode is configured to detect angular velocity about the fifth direction.

3. The high-precision decoupled three-axis MEMS gyroscope according to claim 1, characterized in that, The number of the fifth direction detection components is two. The four second sensitive mass blocks of the two fifth direction detection components are orthogonally and symmetrically distributed along the first direction and the second direction. The four second sensitive mass blocks and the four first sensitive mass blocks are distributed alternately. Each decoupling box is connected to two second sensitive mass blocks.

4. The high-precision decoupled three-axis MEMS gyroscope according to claim 1, characterized in that, The high-precision decoupled triaxial MEMS gyroscope also includes: The first execution decoupling beam has its two ends connected to the first sensitive mass block and the decoupling frame, respectively, and the first execution decoupling beam can deform along the driving direction of the decoupling frame connected to it. The sensitive coupling beam has its two ends connected to the two first sensitive mass blocks, respectively.

5. The high-precision decoupled triaxial MEMS gyroscope according to claim 1, characterized in that, The second sensitive mass block is connected to the decoupling frame via a second execution decoupling beam. Each second sensitive mass block is connected to two decoupling frames via two second execution decoupling beams. The second execution decoupling beams include connected components: The first decoupling sub-beam extends along the third or fourth direction and is connected to the decoupling frame. The second execution decoupling sub-beam extends along the first direction or the second direction and is connected to the second sensitive mass block. The angle between the second execution decoupling sub-beam and the first execution decoupling sub-beam is 135°.

6. The high-precision decoupled three-axis MEMS gyroscope according to claim 1, characterized in that, The decoupling block and the execution block are connected by sensitive decoupling beams. Each decoupling block is connected to two execution blocks by two sensitive decoupling beams. The sensitive decoupling beams include the following connected components: The first sensitive decoupling sub-beam extends along the third or fourth direction and is connected to the decoupling frame; The second sensitive decoupling sub-beam extends along the first direction or the second direction and is connected to the execution frame. The angle between the second sensitive decoupling sub-beam and the first sensitive decoupling sub-beam is 135°.

7. The high-precision decoupled triaxial MEMS gyroscope according to claim 1, characterized in that, The execution frame defines an execution mounting cavity, which is provided with an execution anchor point and an execution connecting beam. The execution anchor point is fixed on the substrate, one end of the execution connecting beam is fixed on the execution anchor point, and the other end is connected to the execution frame. The execution connecting beam can deform along the driving direction of the execution frame.

8. The high-precision decoupled three-axis MEMS gyroscope according to claim 1, characterized in that, The second sensitive mass block defines a sensitive mounting cavity, which is provided with a sensitive anchor point and a sensitive connecting beam. The sensitive anchor point is fixed on the substrate, one end of the sensitive connecting beam is fixed on the sensitive anchor point, and the other end is connected to the second sensitive mass block. The sensitive connecting beam can deform along the detection direction of the second sensitive mass block.

9. The high-precision decoupled triaxial MEMS gyroscope according to claim 1, characterized in that, The high-precision decoupled triaxial MEMS gyroscope also includes a central anchor point and a central movable component. The central anchor point is fixed on the substrate, and the central movable component is simultaneously connected to four first sensitive mass blocks and the central anchor point. The central movable component can deform along the third direction, the fourth direction, and the fifth direction.

10. The high-precision decoupled three-axis MEMS gyroscope according to claim 9, characterized in that, The central movable component includes: The first movable frame is simultaneously connected to four of the first sensitive mass blocks; The second movable frame is located within the first movable frame; Two first deformable straight beams and two second deformable straight beams, the two first deformable straight beams being distributed along the third direction and each of the first deformable straight beams extending along the third direction, the two second deformable straight beams being distributed along the fourth direction and each of the second deformable straight beams extending along the fourth direction, the first movable frame and the second movable frame being connected by one of the first deformable straight beams and the second deformable straight beams, and the second movable frame being connected to the center anchor point by the other of the first deformable straight beams and the second deformable straight beams.

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