A CMP polishing apparatus for the internal flow channels of pipe fittings

Abstract

This invention discloses a CMP polishing device for the inner flow channel of pipe fittings, relating to the field of precision pipe machining technology. It includes a polishing mechanism with both linear and curved distribution configurations, comprising a first motor and connecting parts for rotary polishing, which adjusts at curved sections. The output end of the first motor is connected to a first flexible tube. The connecting parts are evenly distributed on the outer wall of the first flexible tube, and one end of the first flexible tube is fixedly connected to a connector. Polishing is performed directly on the inner wall of the pipe fitting using a polishing wheel. However, this method lacks angle adjustment and is inconvenient for adjusting to different pipe fitting shapes during polishing. In this invention, the polishing mechanism employs a flexible hinge structure with a first flexible tube, multiple sets of connecting parts, side-mounted parts, and U-shaped connectors, combined with adaptive reset of spring components. This allows the device to operate in both linear and curved states, flexibly adapting to various complex pipe fitting structures such as straight, curved, and right-angled shapes.

Description

Technical Field

[0001] This invention relates to the field of precision machining technology for pipe fittings, specifically to a CMP polishing device for the internal flow channel of pipe fittings. Background Technology

[0002] Chemical mechanical polishing (CMP) is currently the core technology for achieving ultra-precision surface smoothing of materials. Through the synergistic effect of chemical etching and mechanical grinding, it can obtain surfaces with extremely low roughness and is widely used in high-end manufacturing fields such as semiconductors, aerospace, and precision instruments.

[0003] In the prior art, such as the patent publication number CN207858573U "A novel pipe fitting inner wall polishing device", a base plate, a slide rail, a cantilever, a rotating shaft and a rotary drive mechanism, a polishing wheel, and a cantilever clamping and positioning mechanism are included. The bottom of the base plate is provided with a sliding groove, which is longitudinally slidably matched with the slide rail provided below the base plate. The cantilever is installed on the base plate through the clamping and positioning mechanism. The rotating shaft is rotatably supported on the cantilever, and the polishing wheel is fixedly fitted to the end of the rotating shaft. The cantilever clamping and positioning mechanism includes a chuck for clamping the end of the cantilever and a handle provided on the chuck for adjusting the clamping tightness, as well as a tip and a tip longitudinal reciprocating translation mechanism. The chuck and the tip are respectively placed on the front and rear sides of the base plate and are arranged along the same axis.

[0004] In pipe fitting processing, the surface quality of its internal flow channels directly affects fluid flow characteristics, sealing performance, and service life. Therefore, polishing of the internal flow channels is necessary. Existing technologies address this issue primarily by using a polishing wheel to directly polish the inner wall of the pipe fitting. However, during operation, pipe fittings can be straight, curved, or right-angled. When polishing pipe fittings of different shapes, the polishing wheel is prone to jamming at curved or right-angled positions and cannot fully conform to the corners of the inner wall of the pipe fitting. This results in polishing blind spots at the corners of the inner wall of the pipe fitting, making it impossible to effectively remove burrs, protrusions, and other defects. This leads to large differences in the surface roughness of the internal flow channels. At the same time, the jamming of the polishing wheel generates impact loads, which can easily scratch the inner wall of the pipe fitting, accelerate the wear of the polishing wheel, and significantly reduce polishing efficiency and processing stability. This approach cannot meet the precision polishing requirements of the internal flow channels of complex-shaped pipe fittings. Summary of the Invention

[0005] The purpose of this invention is to provide a CMP polishing apparatus for the internal flow channels of pipes to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a CMP polishing device for the internal flow channel of pipe fittings, comprising:

[0007] The polishing mechanism has two configurations: a straight-line distribution and a curved distribution. It includes a first motor and connecting parts for rotary polishing and can be adjusted at curved sections. The output end of the first motor is connected to a first flexible tube. The connecting parts are evenly distributed on the outer wall of the first flexible tube. One end of the first flexible tube is fixedly connected to a connector. Side fittings are symmetrically arranged between two adjacent connecting parts. The side of the side fitting has a rotating part that is rotatably connected to the outside of the first flexible tube. U-shaped connectors are symmetrically and movably installed on the side fittings. One end of the U-shaped connector is rotatably connected to a rotating seat. The connector is located at the end of the first flexible tube away from the first motor and is located on the side of one of the connecting parts. Several springs are evenly distributed along the circumferential direction between two adjacent connecting parts.

[0008] A polishing sleeve mechanism, located at one end of a polishing mechanism, includes a sleeve component that is fitted onto the outer wall of a connector and two of its connecting parts. A guide ball is fixedly connected to the side of the connector.

[0009] Preferably, the inner wall of the sleeve has a plurality of limiting protrusions evenly distributed along the circumferential direction at one end and the middle, the inner wall of the sleeve has a plurality of sealing joints evenly distributed along the circumferential direction at the other end, and the outer wall of the sleeve has a plurality of polishing protrusions evenly distributed along the circumferential direction.

[0010] Preferably, a water flow channel is formed through the inner side wall of the sleeve, and a plurality of drainage holes are uniformly formed on the outer wall of the sleeve, the drainage holes being connected to the interior of the water flow channel.

[0011] Preferably, the outer wall of the connector is evenly provided with a plurality of insertion holes along the circumferential direction, and the sealing joint is inserted and connected inside the insertion holes. The outer walls of the two sleeves are evenly distributed with a plurality of limiting grooves along the circumferential direction, and the limiting protrusion is connected to the inner side of the limiting groove.

[0012] Preferably, the output end of the first motor is provided with a drive shaft, and the first flexible hose is connected to one end of the drive shaft through a sleeve.

[0013] Preferably, the outer wall of the first hose has a plurality of sleeve rings evenly distributed thereon, the rotating parts are symmetrically connected to the outer wall of the sleeve rings, the side fitting has a through groove, and the U-shaped connector is symmetrically and movably connected to the inner side of the groove by a pin.

[0014] Preferably, a water conveying mechanism is provided on the side of the polishing mechanism. The water conveying mechanism includes a liquid storage tank, a delivery pump is provided on the top of the liquid storage tank, and a liquid inlet is provided on the top of the liquid storage tank.

[0015] Preferably, a right-angle pipe is fixedly connected to one side of the delivery pump, the right-angle pipe passing through the interior of the liquid storage tank, and a second hose is fixedly connected to the other side of the delivery pump. One end of the second hose is fixedly connected to a rotating connector, the rotating connector being rotatably connected to the outer wall of one of the sleeves.

[0016] Preferably, one end of the polishing mechanism is provided with a positioning mechanism, the positioning mechanism includes a positioning frame, clamping members are symmetrically arranged on the inner side of the positioning frame, and adjusting seats are slidably connected to both ends of the bottom of the positioning frame.

[0017] Preferably, the bottom of the first motor is provided with a sliding bracket, the bottom of the sliding bracket is slidably connected with a guide rail, one end of the guide rail is provided with an adjusting motor, and the output end of the adjusting motor is threadedly connected to the bottom of the sliding bracket.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] Existing technologies, which directly polish the inner wall of pipe fittings using polishing wheels, lack angle adjustment and are inconvenient for adjusting to different pipe fitting shapes during polishing. In this invention, the polishing mechanism employs a flexible hinged structure consisting of a first flexible hose, multiple sets of sleeves, side-mounted components, and U-shaped connectors, combined with adaptive reset by spring components. This allows the device to operate in both straight and curved states, flexibly adapting to various complex pipe fitting structures such as straight, curved, and right-angled shapes. The guide ball head provides guidance at pipe bends and corners, causing the flexible polishing structure to adaptively change direction according to the inner flow channel contour of the pipe fitting. This ensures the polishing sleeve mechanism maintains full contact with the inner wall of the pipe fitting, completely eliminating the polishing blind spots of traditional polishing wheels at corners and achieving precise polishing of the entire inner flow channel of the pipe fitting without dead angles. The flexible hinge structure, combined with the buffering effect of the spring components, ensures that the device does not experience rigid jamming when changing direction at the bending part of the pipe. This avoids the impact load caused by the jamming of traditional polishing wheels, preventing scratches on the inner wall of the pipe and significantly reducing wear on the polishing components. This greatly improves the stability and processing safety of the polishing process and extends the service life of the device. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the three-dimensional structure in this invention;

[0021] Figure 2 This is a three-dimensional structural diagram from another angle in the present invention;

[0022] Figure 3 This is a schematic diagram of the polishing mechanism in this invention.

[0023] Figure 4 This is a partial structural diagram of the polishing mechanism in this invention;

[0024] Figure 5 For the present invention Figure 4 Enlarged structural diagram at point A in the diagram;

[0025] Figure 6 This is a schematic diagram of the connector in the present invention;

[0026] Figure 7 This is a schematic diagram of the connecting component structure in this invention;

[0027] Figure 8 This is a schematic cross-sectional view of the polishing head in this invention;

[0028] Figure 9 For the present invention Figure 8 A magnified structural diagram at point B in the diagram.

[0029] In the diagram: 100, positioning mechanism; 101, positioning frame; 102, clamping component; 103, adjusting seat; 200, polishing mechanism; 201, first motor; 202, drive shaft; 203, first flexible hose; 204, socket; 205, limiting groove; 206, connector; 207, insertion hole; 208, fitting ring; 209, rotating component; 210, side mounting component; 211, rail groove; 212, U-shaped connector; 213 1. Rotating seat; 214. Spring component; 215. Guide ball head; 300. Polishing sleeve mechanism; 301. Sleeve component; 302. Limiting protrusion; 303. Sealing joint; 304. Water flow channel; 305. Drainage through hole; 306. Polishing protrusion; 400. Water conveying mechanism; 401. Liquid storage tank; 402. Liquid inlet; 403. Right angle pipe fitting; 404. Conveying pump; 405. Second hose; 406. Rotating connector. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Example 1

[0032] To address the issue of existing pipe fittings having varying shapes, making targeted polishing difficult, such as... Figures 1-9As shown, a CMP polishing device for the internal flow channel of a pipe is proposed, including a polishing mechanism 200, which has two states: a straight distribution and a curved distribution. It includes a first motor 201 and sockets 204 for rotary polishing, and the mechanism adjusts at the curved sections. The output end of the first motor 201 is connected to a first flexible tube 203. The sockets 204 are evenly distributed on the outer wall of the first flexible tube 203. One end of the first flexible tube 203 is fixedly connected to a connector 206. Side fittings 210 are symmetrically arranged between adjacent sockets 204. Rotating parts 209 are provided on the side of the side fittings 210 and rotatably connected to the outside of the first flexible tube 203. U-shaped connectors 212 are symmetrically and movably mounted on the side fittings 210. One end of the U-shaped connector 212 is rotatably connected to a rotating seat 213. The connector 206 is located at the end of the first flexible tube 203 away from the first motor 201. A connector 206 is located on the side of one of the sockets 204. Several springs 214 are evenly distributed along the circumferential direction between two adjacent sockets 204. A polishing sleeve mechanism 300 is located at one end of the polishing mechanism 200 and includes a sleeve 301. The sleeve 301 is fitted onto the outer wall of the connector 206 and two of the sockets 204. A guide ball head 215 is fixedly connected to the side of the connector 206. A drive shaft 202 is provided at the output end of the first motor 201. A first flexible hose 203 is connected to one end of the drive shaft 202 through the socket 204. Several sleeve rings 208 are evenly distributed on the outer wall of the first flexible hose 203. Rotating parts 209 are symmetrically connected to the outer wall of the sleeve rings 208. A rail groove 211 is provided through the side mounting part 210. A U-shaped connector 212 is symmetrically and movably connected to the inner side of the rail groove 211 through a pin.

[0033] The outer wall of the connector 206 is evenly provided with several insertion holes 207 along the circumferential direction. The sealing connector 303 is inserted and connected to the inside of the insertion hole 207. The outer wall of the two sockets 204 is evenly provided with several limiting grooves 205 along the circumferential direction. The limiting protrusion 302 is connected to the inner side of the limiting groove 205.

[0034] In this embodiment, the first motor 201 serves as the power source for the entire polishing mechanism. Its output end is equipped with a drive shaft 202 to achieve stable power transmission. Multiple sets of sockets 204 are arranged axially at the end of the drive shaft 202. Polishing protrusions 306 are directly installed on one set of sockets 204. The inside of the sockets 204 is in communication with the first hose 203 so that the polishing liquid can be smoothly delivered and provide chemical assistance for the polishing operation.

[0035] Each pair of adjacent sets of sockets 204 is provided with a fitting ring 208, which is fitted onto the outer wall of the first flexible hose 203, serving a positioning and support function. Rotating members 209 are provided on both sides of the fitting ring 208, forming a rotatable connection structure with the side mounting member 210, allowing for flexible deflection between adjacent components. The side mounting member 210 has a rail groove 211, which forms a movable fit connection with the U-shaped connector 212. One end of the U-shaped connector 212 is fixedly mounted on the side of the socket 204 via a rotating seat 213, ensuring smooth and flexible angle changes during angle adjustment and bending deformation, guaranteeing continuous movement. A connector 206 is provided at the end of the first flexible hose 203. The outer wall of the connector 206 has a insertion hole 207. The outer walls of the two sets of sleeves 204 near the connector 206 each have a limiting groove 205. This allows the corresponding limiting protrusion 302 on the inner wall of the sleeve 301 and the sealing joint 303 to be respectively engaged in the limiting groove 205 and the insertion hole 207, achieving rapid positioning, limiting, and installation fixation. This ensures structural stability and reliability during high-speed rotation, allowing the sleeve 301 to tightly fit the inner wall of the pipe for polishing. Simultaneously, the sleeve 301 is made of a flexible, bendable material, which can adaptively deform synchronously with changes in the angle between the sleeves 204, further enhancing structural adaptability.

[0036] During actual polishing operations, multiple sets of sockets 204 are inserted into the pipe fitting as a whole. The first motor 201 drives the drive shaft 202 to rotate, which in turn drives the first flexible hose 203 and each socket 204 to rotate synchronously. The sleeve 301 fitted on the outer wall of the connector 206 also rotates together. The polishing protrusions 306 on the outer wall of the sleeve 301 tightly adhere to the inner wall of the pipe fitting to achieve continuous polishing. While rotating and polishing, the sockets 204 and the guide ball heads 215 at the ends gradually advance deeper into the pipe fitting. When they reach the bend in the pipe fitting, under the guidance of the guide ball heads 215, and with the elastic reset function provided by the spring 214, combined with the coordinated cooperation of the side mounting parts 210, U-shaped connectors 212 and other linkage components, flexible and adaptive angle adjustment can be achieved. This allows the equipment to smoothly pass through the bend and maintain a stable polishing posture, significantly improving its adaptability to complex pipelines and enabling it to efficiently complete the inner wall polishing work for pipe fittings with different inner diameters and different bend shapes.

[0037] Example 2

[0038] like Figure 8 and Figure 9As shown, a number of limiting protrusions 302 are evenly distributed along the circumference at one end and the middle of the inner wall of the sleeve 301, a number of sealing joints 303 are evenly distributed along the circumference at the other end of the inner wall of the sleeve 301, a number of polishing protrusions 306 are evenly distributed along the circumference on the outer wall of the sleeve 301, a water flow channel 304 is opened through the inside of the side wall of the sleeve 301, and a number of drainage holes 305 are evenly opened on the outer wall of the sleeve 301, and the drainage holes 305 are connected to the inside of the water flow channel 304.

[0039] In this embodiment, the sleeve 301 is tightly fitted onto the outer wall of the connector 206 and reliably communicates with the insertion hole 207 on the connector 206 via the sealing joint 303. Simultaneously, a dedicated water flow channel 304 is formed inside the side wall of the sleeve 301, which communicates with the drainage hole 305 on the side wall, forming a smooth flow path for the polishing fluid. The sealing joint 303 is connected to the first flexible hose 203 installed inside the connector 206, thus constructing a complete and sealed polishing fluid delivery path. When the polishing fluid is delivered to the connector 206 via the first flexible hose 203, it can smoothly and stably enter the water flow channel 304 through the sealing joint 303, and finally be evenly sprayed out through the drainage hole 305. This structural design enables the polishing slurry to be precisely and evenly covered on the area to be polished while the polishing bump 306 performs physical polishing on the pipe. The chemical action of the polishing slurry itself provides effective assistance to the physical grinding of the polishing bump 306, realizing the synergistic effect of physical polishing and chemical polishing, greatly improving the polishing uniformity and surface finish, and effectively enhancing the overall polishing quality and processing effect.

[0040] Example 3

[0041] like Figure 1 and Figure 2 As shown, a water supply mechanism 400 is provided on the side of the polishing mechanism 200. The water supply mechanism 400 includes a liquid storage tank 401. A delivery pump 404 is provided on the top of the liquid storage tank 401. An inlet 402 is provided on the top of the liquid storage tank 401. A right-angle pipe 403 is fixedly connected to one side of the delivery pump 404. The right-angle pipe 403 passes through and is connected to the inside of the liquid storage tank 401. A second hose 405 is fixedly connected to the other side of the delivery pump 404. A rotating connector 406 is fixedly connected to one end of the second hose 405. The rotating connector 406 is rotatably connected to the outer wall of one of the sleeves 204.

[0042] In this embodiment, polishing fluid is injected into and stored in the storage tank 401 through the inlet 402. After the delivery pump 404 is started, the polishing fluid stored in the storage tank 401 can be stably extracted using the right-angle pipe fitting 403. The extracted polishing fluid is continuously transported to the rotating connector 406 via the second hose 405, and then further transported into the first hose 203 via the rotating connector 406. The rotating connector 406 adopts a special sealed rotating connection structure, which can maintain good sealing performance while ensuring smooth pipeline connection, even when the components are rotating relative to each other. This does not affect normal rotation and effectively prevents leakage or external discharge of the polishing fluid during transportation, ensuring a reliable and continuous transportation path for the polishing fluid.

[0043] Example 4

[0044] like Figure 1 and Figure 2 As shown, a positioning mechanism 100 is provided at one end of the polishing mechanism 200. The positioning mechanism 100 includes a positioning frame 101. Clamping members 102 are symmetrically arranged on the inner side of the positioning frame 101. Adjustment seats 103 are slidably connected to both ends of the bottom of the positioning frame 101. A sliding bracket is provided at the bottom of the first motor 201. A guide rail is slidably connected to the bottom of the sliding bracket. An adjustment motor is provided at one end of the guide rail. The output end of the adjustment motor is threadedly connected to the bottom of the sliding bracket.

[0045] In this embodiment, by evenly distributing multiple sets of clamping components 102 on the positioning frame 101, and cooperating with the matching adjusting seat 103 and corresponding adjusting control components, the pipe to be processed can be clamped and fixed in a comprehensive, stable and reliable manner. This effectively avoids problems such as shaking, displacement or loosening of the pipe during polishing, significantly improving clamping stability and positioning accuracy. This provides a solid guarantee for the smooth and efficient execution of subsequent polishing processes, ensuring continuous and smooth polishing operations. Simultaneously, a sliding bracket is provided at the bottom of the first motor 201, which is slidably mounted on a preset guide rail. By adjusting the threaded rod connected to the motor and its output end to form a transmission drive structure, precise driving and displacement adjustment of the sliding bracket and the overall position of the first motor can be achieved. The working posture and operating position can be flexibly adjusted according to actual processing needs, greatly improving the adjustability and adaptability of the equipment during use, and meeting the polishing requirements of pipes of different specifications.

[0046] In use, the pipe to be polished is first clamped and fixed stably by the clamping part 102 on the inner side of the positioning frame 101 of the positioning mechanism 100 in conjunction with the adjusting seat 103, ensuring that the pipe axis is coaxial with the feed axis of the polishing mechanism 200. Then, the appropriate CMP polishing liquid is injected into the storage tank 401 through the liquid inlet 402 of the water supply mechanism 400 to complete the pretreatment of the device. After the device is started, the adjusting motor drives the sliding bracket at the bottom of the first motor 201 to feed along the guide rail towards the pipe, so that the guide ball head 215 of the polishing mechanism 200 and the polishing sleeve mechanism 300 extend into the inner channel of the pipe in sequence. At the same time, the first motor 201 starts, and drives the first hose 203 and the sleeve 204 to rotate synchronously through the drive shaft 202. The sleeve 204 drives the sleeve 301 on its outer wall to rotate synchronously. The polishing protrusion 306 on the outer wall of the sleeve 301 fits against the inner wall of the pipe and performs rotational physical polishing on the inner channel of the pipe. At the same time, the pump 404 of the water conveying mechanism 400 is started, and the polishing liquid in the storage tank 401 is drawn out through the right-angle pipe fitting 403. It is then transported to the inside of the first hose 203 through the second hose 405 and the rotating connector 406. The polishing liquid is then transported along the first hose 203 to the connector 206, and then enters the water flow channel 304 inside the sleeve 301 through the insertion hole 207 of the connector 206 and the sealing joint 303 of the sleeve 301. Finally, it is evenly sprayed to the polishing area through the drainage hole 305 connected by the water flow channel 304, so that the polishing liquid continuously acts on the contact position between the polishing protrusion 306 and the inner wall of the pipe fitting. Through the synergistic effect of chemical corrosion and physical grinding, CMP composite polishing is achieved. During the process of the polishing mechanism 200 feeding along the inner flow channel of the pipe fitting, when encountering bending, right angle, or other changes in direction in the pipe fitting, the guide ball head 215 guides along the contour of the inner flow channel of the pipe fitting, driving the connector 206 and the sleeve 204 to change direction synchronously; between adjacent sleeves 204, the rotating part 209 on the outside of the sleeve ring 208 drives the side mounting part 210 to rotate around the first flexible tube 203, and the side mounting part 210 drives the U-shaped connector 212 to move through the rail groove 211, and the U-shaped connector 212 drives the adjacent sleeve 204 through the rotating seat 213. 04. The relative angle is adaptively adjusted, and the spring 214 between the adjacent sleeve 204 provides buffering and restoring force, so that the polishing mechanism 200 as a whole flexibly bends with the contour of the inner flow channel of the pipe, ensuring that the sleeve 301 always fits the inner wall of the pipe without rigid jamming, avoiding polishing blind spots and workpiece damage; after the polishing mechanism 200 completes the full-area feeding polishing of the inner flow channel of the pipe, the motor drives the sliding bracket to reset, the first motor 201 and the conveying pump 404 stop working, and the CMP polishing operation of the inner flow channel of the pipe is completed.

[0047] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A CMP polishing apparatus for the internal flow channel of a pipe fitting, characterized in that, include: The polishing mechanism (200) has two configurations: a straight-line distribution and a curved distribution. It includes a first motor (201) and sockets (204) for rotary polishing, and its configuration varies at curved sections. The output end of the first motor (201) is connected to a first flexible tube (203). The sockets (204) are evenly distributed on the outer wall of the first flexible tube (203). One end of the first flexible tube (203) is fixedly connected to a connector (206). Side fittings (210) are symmetrically arranged between adjacent sockets (204). The side of the side fitting (210)... A rotating component (209) is rotatably connected to the outside of the first flexible hose (203). A U-shaped connector (212) is symmetrically and movably installed on the side mounting component (210). One end of the U-shaped connector (212) is rotatably connected to a rotating seat (213). The connector (206) is located at the end of the first flexible hose (203) away from the first motor (201), and the connector (206) is located on the side of one of the sockets (204). Several spring components (214) are evenly distributed along the circumferential direction between two adjacent sockets (204). A polishing sleeve mechanism (300) is provided at one end of a polishing mechanism (200) and includes a sleeve (301). The sleeve (301) is sleeved on the outer wall of a connector (206) and two of the connecting parts (204). A guide ball (215) is fixedly connected to the side of the connector (206).

2. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 1, characterized in that: The inner wall of the sleeve (301) has a number of limiting protrusions (302) evenly distributed along the circumferential direction at one end and the middle. The inner wall of the sleeve (301) has a number of sealing joints (303) evenly distributed along the circumferential direction at the other end. The outer wall of the sleeve (301) has a number of polishing protrusions (306) evenly distributed along the circumferential direction.

3. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 2, characterized in that: The sleeve (301) has a water channel (304) extending through its side wall, and a plurality of drainage holes (305) are evenly provided on the outer wall of the sleeve (301), and the drainage holes (305) are connected to the interior of the water channel (304).

4. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 2, characterized in that: The outer wall of the connector (206) is evenly provided with a plurality of insertion holes (207) along the circumferential direction. The sealing connector (303) is inserted and connected inside the insertion holes (207). The outer walls of the two sleeves (204) are evenly distributed with a plurality of limiting grooves (205) along the circumferential direction. The limiting protrusion (302) is connected to the inner side of the limiting groove (205).

5. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 1, characterized in that: The output end of the first motor (201) is provided with a drive shaft (202), and the first hose (203) is connected to one end of the drive shaft (202) through a sleeve (204).

6. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 1, characterized in that: The outer wall of the first hose (203) is evenly distributed with several sleeve rings (208), and the rotating parts (209) are symmetrically connected to the outer wall of the sleeve rings (208). The side mounting part (210) has a through groove (211), and the U-shaped connector (212) is symmetrically and movably connected to the inner side of the groove (211) by a pin.

7. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 1, characterized in that: A water conveying mechanism (400) is provided on the side of the polishing mechanism (200). The water conveying mechanism (400) includes a liquid storage tank (401), a delivery pump (404) is provided on the top of the liquid storage tank (401), and a liquid inlet (402) is provided on the top of the liquid storage tank (401).

8. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 7, characterized in that: A right-angle pipe (403) is fixedly connected to one side of the delivery pump (404), and the right-angle pipe (403) is connected through the inside of the liquid storage tank (401). A second hose (405) is fixedly connected to the other side of the delivery pump (404), and a rotating connector (406) is fixedly connected to one end of the second hose (405). The rotating connector (406) is rotatably connected to the outer wall of one of the sleeves (204).

9. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 1, characterized in that: One end of the polishing mechanism (200) is provided with a positioning mechanism (100), the positioning mechanism (100) includes a positioning frame (101), the inner side of the positioning frame (101) is symmetrically provided with clamping members (102), and the bottom ends of the positioning frame (101) are slidably connected with adjusting seats (103).

10. The CMP polishing apparatus for the inner flow channel of pipe fittings according to claim 1, characterized in that: The first motor (201) has a sliding bracket at its bottom, and a guide rail is slidably connected to the bottom of the sliding bracket. An adjustment motor is provided at one end of the guide rail, and the output end of the adjustment motor is threadedly connected to the bottom of the sliding bracket.

Images