Integrated sintering furnace for sintering ITO target material and recycling oxygen

Abstract

This invention discloses an integrated sintering furnace for ITO target sintering and oxygen recycling, relating to the field of sintering furnace technology. It includes a furnace chamber, a high-temperature oxygen treatment system, and a bottom frame. The furnace chamber is mounted on the top of the bottom frame via a support, and a first gas collection hood is installed on the side wall of the furnace chamber. A connecting duct is installed at the bottom of the first gas collection hood, and a circulating duct is installed on one side of the connecting duct. A second gas collection hood is installed on the side of the furnace chamber away from the first gas collection hood, and a ceramic filter is installed below the second gas collection hood. This device allows the filtered gas to pass through two water coolers before being input into a vacuum dust collection filter. Then, by activating the high-temperature oxygen treatment system, the gas is circulated through the circulating duct and the inlet at the furnace chamber at the output end of the first gas collection hood connected to the connecting duct, re-entering the furnace chamber to achieve energy saving and emission reduction.

Description

Technical Field

[0001] This invention relates to the field of sintering furnace technology, specifically to an integrated sintering furnace for ITO target sintering and oxygen recycling. Background Technology

[0002] A sintering furnace is an industrial device that uses high temperatures to form powder materials (such as metals or ceramics) into a dense solid. It is widely used in industries such as powder metallurgy, electronics, and ceramics, and is a key component in many modern manufacturing processes.

[0003] However, existing integrated sintering furnaces for ITO target sintering and oxygen recycling have the following problems during use: traditional pusher furnaces are characterized by small batches, heating, sintering and cooling, and cannot achieve oxygen recycling, which fails to meet the market's requirements for energy conservation and emission reduction, making later maintenance inconvenient. Summary of the Invention

[0004] The purpose of this invention is to provide an integrated sintering furnace for ITO target sintering and oxygen recycling, so as to solve the related problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: an integrated sintering furnace for ITO target sintering and oxygen recycling, comprising a furnace chamber, a high-temperature oxygen treatment system, and a bottom frame. The furnace chamber is mounted on the top of the bottom frame via a support, and a first gas collection hood is installed on the side wall of the furnace chamber. A connecting air duct is installed at the bottom of the first gas collection hood, and a circulating air duct is installed on one side of the connecting air duct. A second gas collection hood is installed on the side of the furnace chamber away from the first gas collection hood, and a ceramic filter is installed below the second gas collection hood. A water cooler is connected below the ceramic filter, and a vacuum pump dust collection filter is installed on one side of the water cooler. A sealing flange is installed on one side of the connecting air duct, which is connected to one side of the circulating air duct. A lifting mechanism is installed on the top of the bottom frame.

[0006] As a preferred embodiment of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention, the input end and output end of the high-temperature oxygen treatment system are respectively connected to one end of the vacuum pump dust collection filter barrel and the circulating air duct through sealing flanges, and the high-temperature oxygen treatment system is a heat-resistant fan.

[0007] As a preferred embodiment of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention, the lifting mechanism includes a motor lead screw, motors are provided on both sides of the top of the bottom frame, and the output end of the motor is connected to the lifting mechanism via a coupling.

[0008] As a preferred embodiment of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention, the outer wall of the lifting mechanism is fitted with a furnace bed, and the inner sides of the furnace bed are engaged with the outer wall of the lifting mechanism by threads.

[0009] As a preferred embodiment of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention, the upper part of the furnace bed and the bottom part of the furnace chamber are sealed and fitted by a weather-resistant O-ring.

[0010] As a preferred embodiment of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention, the vacuum pump dust collection filter barrel includes a dust collection cylinder and a sealing base. The dust collection cylinder has a sealing base inside through an internal thread, and the outer wall of the sealing base is fitted with a dust collection filter element that contacts the gasket on the inner wall of the dust collection cylinder.

[0011] As a preferred embodiment of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention, the outer walls of the second gas collection hood and the ceramic filter are both wrapped with ceramic fibers and ceramic tubes.

[0012] As a preferred embodiment of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention, the ceramic fiber and the ceramic tube are fixed together by aerogel bonding.

[0013] The beneficial effects of the integrated sintering furnace for ITO target sintering and oxygen recycling of the present invention are as follows: 1. This invention allows gas to enter the furnace from the exhaust port on the right side of the furnace under negative pressure. After entering the second gas collection hood, it flows through a pipe containing ceramic fibers and ceramic tubes with insulation material into a ceramic filter. The ceramic filter removes impurities such as mud, bacteria, and chemicals from the exhaust gas in one pass, offering the advantage of low emissions. Furthermore, the ceramic filter element has a long service life. After filtration, the gas passes through two water coolers before being fed into the vacuum pump dust collection filter. Then, it is circulated through the high-temperature oxygen treatment system via the circulating air duct and the inlet port at the output end of the first gas collection hood at the connection point to the air duct, re-entering the furnace to achieve circulation and cool the workpiece. This structure offers advantages such as energy saving, emission reduction, and rapid heat dissipation.

[0014] 2. This invention uses a starting motor to drive the lead screw to rotate, which in turn moves the furnace bed up and down, allowing the furnace bed to fit against the bottom of the furnace chamber. A weather-resistant O-ring is then used to fit against the bottom of the furnace chamber, achieving a rapid sealing fit. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention; Figure 2 This is a three-dimensional schematic diagram of the oxygen circulation structure of the present invention; Figure 3 This is a schematic diagram of the furnace structure from below according to the present invention; Figure 4 This is a schematic diagram of the main cross-sectional structure of the vacuum pump dust collection filter barrel of the present invention.

[0016] In the diagram: 1. Furnace chamber; 2. First gas collection hood; 3. Connecting air duct; 4. Second gas collection hood; 5. Ceramic filter; 6. Water cooler; 7. Circulating air duct; 8. Vacuum pump dust collection filter barrel; 801. Dust collection cylinder; 802. Sealing base; 803. Dust collection filter element; 9. High-temperature oxygen treatment system; 10. Lifting mechanism; 11. Furnace bed; 12. Bottom frame. Detailed Implementation

[0017] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0018] Example 1, such as Figure 1-2As shown, the present invention provides a technical solution: an integrated sintering furnace for ITO target sintering and oxygen recycling, comprising a furnace chamber 1, a high-temperature oxygen treatment system 9, and a bottom frame 12. The furnace chamber 1 is mounted on the top of the bottom frame 12 via a support, and a first gas collection hood 2 is installed on the side wall of the furnace chamber 1. A connecting air duct 3 is installed at the bottom end of the first gas collection hood 2, and a circulating air duct 7 is installed on one side of the connecting air duct 3. A second gas collection hood 4 is installed on the side of the furnace chamber 1 away from the first gas collection hood 2, and a ceramic filter 5 is installed below the second gas collection hood 4. The high-temperature oxygen treatment system 9 is a heat-resistant fan. A lifting mechanism 10 is installed on the top of the bottom frame 12. A water cooler 6 is connected below the ceramic filter 5. The outer walls of both the second gas collection hood 4 and the ceramic filter 5 are wrapped with ceramic fibers and ceramic materials. The tubes, ceramic fibers, and ceramic tubes are bonded together using aerogel. A vacuum pump draws air from the furnace chamber 1, while the ventilation gas enters the furnace chamber 1 under negative pressure from the exhaust port on the right side. It then enters the second gas collection hood 4 and flows through the pipes containing the ceramic fibers and ceramic tubes with insulation material into the ceramic filter 5. The ceramic filter 5 filters impurities in the exhaust gas, such as mud, bacteria, and chemicals, providing a significant advantage in terms of air quality. Furthermore, the ceramic filter 5 has a long service life. After filtration, the gas passes through two water coolers 6 and is then filtered again at the vacuum pump dust collection filter 8. Finally, it is circulated through the high-temperature oxygen treatment system 9 via the circulating air duct 7 and the air inlet at the output end of the first gas collection hood 2 connected to the air duct 3, re-entering the furnace chamber 1 to achieve circulation and cool the workpiece. This structure offers advantages such as energy saving, emission reduction, and rapid heat dissipation.

[0019] Example 2, as Figure 1-4 As shown, the present invention provides a technical solution: an integrated sintering furnace for ITO target sintering and oxygen recycling, including a vacuum pump dust collection filter barrel 8 installed on one side of a water cooler 6. The vacuum pump dust collection filter barrel 8 includes a dust collection cylinder 801 and a sealing base 802. The sealing base 802 is provided inside the dust collection cylinder 801 through an internal thread, and a dust collection filter element 803 is sleeved on the outer wall of the sealing base 802 and contacts the gasket on the inner wall of the dust collection cylinder 801. By rotating the sealing base 802, the dust collection filter element 803 is separated, which facilitates the removal and replacement of the dust collection filter element 803.

[0020] Example 3, as Figure 1-4As shown, the present invention provides a technical solution: an integrated sintering furnace for ITO target sintering and oxygen recycling, including a connecting air duct 3 with one side connected to the circulating air duct 7 via a sealing flange, a high-temperature oxygen treatment system 9 with its input and output ends connected to a vacuum pump dust collection filter 8 and one end of the circulating air duct 7 via sealing flanges, a lifting mechanism 10, the lifting mechanism 10 including a motor screw, motors on both sides of the top of the bottom frame 12, and the output end of the motors being connected to the lifting mechanism 10 via a coupling, a furnace bed 11 fitted on the outer wall of the lifting mechanism 10, and the inner sides of the furnace bed 11 engaging with the outer wall of the lifting mechanism 10 via threads, the top of the furnace bed 11 being sealed to the bottom of the furnace chamber 1 by weather-resistant O-rings, the motor being started to drive the screw to rotate, thereby the screw driving the furnace bed 11 to move up and down, and then the furnace bed 11 to fit against the bottom of the furnace chamber 1, and the weather-resistant O-rings to fit against the bottom of the furnace chamber 1, completing a rapid sealing fit.

[0021] Working principle: First, connect the external power supply. The operator can place the workpiece above the furnace bed 11. Then, start the motor to drive the lead screw to rotate, which in turn moves the furnace bed 11 up and down. The furnace bed 11 then fits against the bottom of the furnace chamber 1. A weather-resistant O-ring is used to seal the workpiece against the bottom of the furnace chamber 1, achieving a rapid seal. The workpiece is then heated inside the furnace chamber 1. The vacuum pump is started, and negative pressure is applied. Gas enters from the outside through the exhaust port on the right side of the furnace chamber 1 and then enters the second gas collection hood 4. It flows along the ceramic fibers and ceramic tubes with insulation material. The gas enters the ceramic filter 5 through the pipeline, where it filters impurities such as mud, bacteria, and chemicals from the exhaust gas. This has the advantage of being easy to clean and has a long service life. After filtration, the gas passes through the water cooler 6 twice and is then filtered again at the vacuum pump dust collection filter 8. After that, the gas is circulated through the high-temperature oxygen treatment system 9, through the circulating air pipe 7, and through the air inlet at the output end of the first gas collection hood 2 connected to the air pipe 3. The gas then enters the furnace 1 again to achieve circulation and cool the workpiece. This structure has the advantages of energy saving, emission reduction, and rapid heat dissipation.

[0022] Finally, it should be noted that the above content is only used to illustrate the technical solution of the present invention, and is not intended to limit the scope of protection of the present invention. Simple modifications or equivalent substitutions made by those skilled in the art to the technical solution of the present invention do not depart from the essence and scope of the technical solution of the present invention.

Claims

1. An integrated sintering furnace for ITO target sintering and oxygen recycling, comprising a furnace chamber (1), a high-temperature oxygen treatment system (9), and a bottom frame (12), characterized in that: The bottom frame (12) has a furnace (1) mounted on the top via a bracket, and a first gas collection hood (2) is installed on the side wall of the furnace (1). A connecting air duct (3) is installed at the bottom of the first gas collection hood (2). A circulating air duct (7) is installed on one side of the connecting air duct (3). A second gas collection hood (4) is installed on the side of the furnace (1) away from the first gas collection hood (2). A ceramic filter (5) is installed below the second gas collection hood (4). A water cooler (6) is connected below the ceramic filter (5). A vacuum pump dust collection filter bucket (8) is installed on one side of the water cooler (6). A sealing flange is installed on one side of the connecting air duct (3) and connected to one side of the circulating air duct (7). A lifting mechanism (10) is installed at the top of the bottom frame (12). The high-temperature oxygen treatment system (9) is a heat-resistant fan.

2. The integrated sintering furnace for ITO target sintering and oxygen recycling according to claim 1, characterized in that: The input and output ends of the high-temperature oxygen treatment system (9) are connected to one end of the vacuum pump dust collection filter barrel (8) and the circulating air duct (7) respectively via sealing flanges.

3. The integrated sintering furnace for ITO target sintering and oxygen recycling according to claim 1, characterized in that: The lifting mechanism (10) includes a motor screw. Motors are provided on both sides of the top of the bottom frame (12), and the output end of the motor is connected to the lifting mechanism (10) via a coupling.

4. The integrated sintering furnace for ITO target sintering and oxygen recycling according to claim 3, characterized in that: The outer wall of the lifting mechanism (10) is fitted with a furnace bed (11), and the inner sides of the furnace bed (11) are engaged with the outer wall of the lifting mechanism (10) by threads.

5. The integrated sintering furnace for ITO target sintering and oxygen recycling according to claim 4, characterized in that: The upper part of the hearth (11) and the bottom part of the furnace (1) are sealed together by a weather-resistant O-ring.

6. The integrated sintering furnace for ITO target sintering and oxygen recycling according to claim 1, characterized in that: The vacuum pump dust collection filter barrel (8) includes a dust collection cylinder (801) and a sealing base (802). The dust collection cylinder (801) is provided with a sealing base (802) through an internal thread, and the outer wall of the sealing base (802) is fitted with a dust collection filter element (803) that contacts the gasket on the inner wall of the dust collection cylinder (801).

7. The integrated sintering furnace for ITO target sintering and oxygen recycling according to claim 1, characterized in that: The outer walls of the second gas collection hood (4) and the ceramic filter (5) are both wrapped with ceramic fibers and ceramic tubes.

8. The integrated sintering furnace for ITO target sintering and oxygen recycling according to claim 7, characterized in that: The ceramic fibers and ceramic tubes are fixed together by aerogel bonding.

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