One-button flatness measurement method and system

Abstract

This invention discloses a one-click flatness measurement system and method. The system includes a 3D laser sensor, a movable stage, an industrial control all-in-one computer, and a display terminal. The movable stage is mounted on the top of the industrial control all-in-one computer, and the 3D laser sensor is mounted at the rear of the top of the industrial control all-in-one computer. The movable stage is located between the 3D laser sensor and the industrial control all-in-one computer. The display terminal is installed directly above or to the side of the 3D laser sensor. A laser emitter, a lens assembly, and a camera are installed inside the horizontal part of the 3D laser sensor, with the lens assembly positioned directly below the camera. Multiple concentric square positioning marks are provided on the movable stage. This system achieves automation and intelligence in flatness detection through a non-contact measurement method, effectively avoiding sample damage and improving measurement efficiency and result reliability.

Description

Technical Field

[0001] The present invention belongs to the technical field of the production of single-layer chip ceramic capacitors, and particularly relates to a one-key flatness measurement method and system. Background Art

[0002] The measurement of the warpage of a ceramic substrate is an essential part in the manufacturing process of the ceramic substrate, which directly relates to the quality, reliability and performance of the product. By accurately measuring and controlling the warpage, good assembly of the ceramic circuit can be ensured, excellent electrical and mechanical properties can be obtained, and ultimately the overall quality and market competitiveness of the product can be improved.

[0003] Currently, common methods such as "using a dial indicator + manual comparison" and "parallel plate plug gauge method" have problems such as low measurement efficiency, large errors, and inability to automatically record. In addition, although some three-dimensional measurement devices (such as image measuring instruments or confocal microscopes) can perform surface scanning, they require manual setting of the measurement path and programming, are not suitable for operators without an engineering background, and do not have the ability of real-time flatness evaluation and batch statistics.

[0004] The first prior art is contact direct measurement through parallel plates: making the specimen pass through the parallel plates with a set spacing at a 45° angle under the action of its own weight as qualified. However, the parallel plate measurement is a contact measurement, which is easy to damage the sample. Especially when measuring high-precision samples, it is difficult to obtain high-precision data without damaging the sample. In practice, the parallel plate measurement can only screen out defective products, but cannot quantify the warpage value, which is not conducive to engineering analysis and reducing the defective product rate. In addition, the efficiency, accuracy and safety of this method depend on the proficiency and concentration of the operator. When measuring after the worker has worked for a long time, the measurement accuracy and efficiency will inevitably decline.

[0005] The second prior art is plug gauge measurement, that is, measuring the gap between the measured surface and the reference plane to judge the warpage degree: by inserting the feeler gauge piece into the gap between the measured workpiece and the reference plane, determining the maximum insertable thickness, and this thickness is the warpage height. The measurement process: First, calibrate the reference plane: use a high-precision plane such as a marble platform or a cast iron plate as the reference; Second, gently insert the feeler gauge pieces (such as 0.01 mm) from thin to thick into the gap, and record the maximum insertable thickness as the warpage height at this position; Third, calculate the warpage degree. The second prior art is limited by the thickness accuracy of the feeler gauge piece, and this method is only applicable to workpieces with a large warpage degree; and it depends on the operator's judgment of "inserting with slight pressure", which affects the repeatability; it is a contact measurement, which is easy to damage the sample; it can only screen out defective products and cannot quantify the warpage value. Summary of the Invention

[0006] The main object of the present invention is to solve the problems of decreased measurement accuracy and efficiency and sample damage in the prior art, and proposes a one-key flatness measurement method and system.

[0007] To achieve the above objectives, the present invention adopts the following technical solution: A one-click flatness measurement system includes a 3D laser sensor, a movable platform, an industrial control all-in-one computer, and a display terminal. The movable platform is mounted on the top of the industrial control all-in-one computer, and the 3D laser sensor is mounted at the rear of the top of the industrial control all-in-one computer. The movable platform is located between the 3D laser sensor and the industrial control all-in-one computer. The display terminal is mounted directly above or to the side of the 3D laser sensor. A laser emitter, a lens group, and a camera are installed inside the horizontal part of the 3D laser sensor, with the lens group positioned directly below the camera.

[0008] Furthermore, the 3D laser sensor is inverted L-shaped.

[0009] Furthermore, the movable platform is equipped with five concentric squares of different sizes.

[0010] A one-click flatness measurement method and an automatic warpage measurement method include the following steps: Step 1, Sample Positioning: Obtain the length a and width b of the sample to be tested; among the five concentric squares of the movable stage, find the smallest square with a side length not less than a; take the lower right endpoint of this square as the starting point O, move point O to the left by a to determine point A, and move point O upward by b to determine point B; determine the placement position of the sample to be tested by the three points O, A, and B. Step 2: Calculation of Scan Count: The 3D laser sensor has a single scan width of 0.030m. For each scan, the effective data from the middle 0.025m and the width b of the measured object are used to calculate the number of scans. : in This is the floor function, representing rounding down to the nearest integer. The largest integer; Step 3: Automatic Path Design: Based on the square on the movable stage and the placement and size of the test object determined in Step 1, plan the scanning path to obtain the motion path of the movable stage. Step 4: Scan and calculate warpage: Scan the object under test using the planned path to acquire image data. Simultaneously, use a filter to remove outliers from the acquired image data. Record and update the maximum value of the object's height in the remaining valid image data in real time. and minimum value And calculate the warpage of the tested item. ; Step 5: Stitch together the obtained image data to obtain a three-dimensional image of the object being tested.

[0011] Furthermore, step three is detailed below: 1) Align the lower right starting point O of the square of the movable stage with the laser emitter of the 3D laser sensor; 2) Path of the first scan: based on the length of the sample being tested. Plan the length of this scan, and move the movable stage from left to right. If the number of scans is predetermined If so, the scan is complete; if If so, proceed to the next scan; 3) Path of the second scan: Move the movable stage 0.025m downwards, then move it from right to left; if the predetermined number of scans is reached, the scan is completed; otherwise... If so, proceed to the next scan; 4) No. The path for the next scan: move the movable stage 0.025m downwards; if If it is an odd number, then shift it from left to right. ; and if If it is even, shift it from right to left. Repeat this step until... .

[0012] Furthermore, the warpage of the tested sample The calculation formula is: ; Based on national standards GB / T14619—2013 and GB / T14620—2013, and international routine standards, if the warpage of the tested sample is greater than 0.3%, an abnormality is reported.

[0013] Furthermore, step five is detailed below: Image data obtained from an odd number of scans is saved directly. For image data from even-numbered scans, perform symmetrical processing: Based on the smallest square selected in step one, record the reference point. Coordinates are ,in, This refers to the number of scans performed; image data obtained from even-numbered scans will be based on... Save the data after performing symmetry processing; The image data obtained from odd-numbered scans and even-numbered scans are stitched together to obtain a three-dimensional image of the object being tested.

[0014] A one-click flatness measurement method and a manual warpage measurement method include the following steps: Step 1: Sample Positioning: If the sample is rectangular, its length is a and its width is b; if the sample is not rectangular, its longest side is a and its second longest side is b; among the five concentric squares of the movable stage, find the smallest square with a side length not less than a; take the lower right endpoint of this square as the starting point O, move point O to the left by a to determine point A, and move point O upwards by b to determine point B; determine the placement position of the sample by points O, A, and B. Step 2: Calculation of Scan Count: The 3D laser sensor has a single scan width of 0.030m. For each scan, the effective data from the middle 0.025m and the width b of the measured object are used to calculate the number of scans. ; Step 3, Scan Path Planning: Users can select automatic path planning in Step 3 of the automatic warp measurement method; or customize the motion trajectory of the movable stage by inputting commands. Step 4: Scan and calculate warpage: Scan the object under test using the planned path to acquire image data. Simultaneously, use a filter to remove outliers from the acquired image data. Record and update the maximum value of the object's height in the remaining valid image data in real time. and minimum value And calculate the warpage of the tested sample. : Step 5: Stitch together the obtained image data to obtain a three-dimensional image of the tested object; Step 6: Calculation of local warpage: The user selects a local area on the 3D image of the object being measured on the display terminal; the local area is measured using an automatic warpage measurement method, and the length and width of the selected rectangle are taken as a and b in the formula to calculate the warpage WD of the local area. Step 7: Calculation of warpage after removing local areas: The user selects the local area to be excluded on the 3D image of the object being tested on the display terminal; the object being tested is rescanned according to the scanning path in Step 3, but image data of the selected area is not collected; outliers are removed using a filter, and the maximum value of the height of the object being tested in the valid image data is recorded and updated. and minimum value Calculate the warpage WD after removing the local area; Step 8: Comparison of Height Differences at Different Locations: The user selects two different areas on the 3D image of the object being tested on the display terminal; the object is rescanned according to the scanning path in Step 3, and the maximum values ​​of the two areas are recorded and updated in real time. and minimum value After the measurement is completed, calculate and output the height difference between the two areas. .

[0015] Furthermore, in step three, the motion trajectory of the movable platform is customized by inputting commands as follows: The user selects the initial position of the movable stage and then plans its trajectory: Input the planned distance the movable stage will move from left to right during this scan, and confirm whether the scan covers the entire moving distance; if the scan covers the entire moving distance, then... for , This is the planned movement distance; if the current scan cannot cover the entire movement distance, you can customize the starting movement distance for this scan. and the distance traveled at the end After this scan is completed, if the tested items have not been completely scanned, the user can customize the next scan from right to left and plan the starting distance for this scan. and the distance traveled at the end Meanwhile, the movable stage 2 automatically plans to move 0.025m downwards after the first custom scan is completed; the second custom scan is an even-numbered scan, and if the sample is completely covered by the scan plan at this time, the scan ends.

[0016] Furthermore, step five is detailed below: Image data obtained from an odd number of scans is saved directly. For data from even-numbered scans, perform symmetrical processing: based on the smallest square selected in step one, select a reference point. And let its coordinates be ,in This refers to the number of scans performed; for even-numbered scans, the image data is based on the reference point of that scan. Perform symmetrical processing and save; The image data obtained from odd-numbered scans and even-numbered scans are stitched together to obtain a three-dimensional image of the object under test, which is then displayed on the display terminal.

[0017] The beneficial effects of this invention are as follows: 0. Safety: Compared with traditional contact measurement (such as parallel plate method, plug gauge method, dial indicator method), the present invention adopts a non-contact measurement method, which obtains multi-dimensional data containing position information of the test object through laser ranging imaging, avoiding the risk of sample surface damage during contact measurement, and is suitable for high-precision, high-value ceramic substrate or electronic component measurement.

[0018] 1. Quantifiability: Unlike traditional methods that require manual interpretation and rely on experience, this invention achieves a high degree of automation in the measurement process, reducing human error and operational complexity. Existing methods often only determine "whether it is qualified," while this invention supports real-time point cloud data generation and automatic result judgment, enabling quantitative analysis of flatness indicators. Furthermore, it incorporates anomaly alarms, image visualization, and statistical analysis modules to support online quality control.

[0019] 2. Simplicity: This invention includes an operating system that provides real-time feedback on measurement information. Measurement personnel can achieve efficient measurements by interacting with the system and running predetermined processes, without needing programming skills, thus realizing streamlined measurement processes, real-time feedback, and clear results.

[0020] 3. High efficiency: Traditional methods can only measure the warp of a sample, while other defects (such as burrs) need to be identified by visual inspection or other means. This invention, while measuring the warp of the sample, also uses point cloud technology to collect the color and reflectivity of each point on the sample, enabling the detection of multiple defect dimensions in a single scan. Attached Figure Description

[0021] Figure 1 This is the automatic measurement operation interface provided by the present invention; Figure 2 This invention provides a 3D laser warpage measuring instrument. Figure 3 This is a display of the 3D laser warp measuring instrument provided by the present invention from various angles; Figure 4 This is a top view of the platform provided by the present invention; Figure 5 This invention provides 3D line laser triangulation ranging. Figure 6 This is a flowchart of the flatness measurement method provided by the present invention.

[0022] Figure 7 This invention provides the operating procedure for the 3D laser warp measuring instrument. Figure 8 This is the abnormal pop-up window provided by the present invention; Figure 9 This is the manual measurement operation interface provided by the present invention; Figure 10 The sample reflected light provided by this invention; Figure 11 It is a three-dimensional point cloud data matrix image provided by the present invention; Figure 12 This is a sample image provided by the present invention; Figure 13 The warpage measurement results are displayed using the software provided by this invention. Figure 14 This invention provides a qualitative analysis of the precision of warpage measurement.

[0023] Reference numerals: 1-3D laser sensor, 2-movable stage, 3-industrial control computer, 4-display terminal, 5-laser emitter, 6-lens group, 7-camera. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0025] The application principle of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0026] The application principle of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0027] Please refer to Figures 1-4 The one-button flatness measurement system comprises a 3D laser sensor 1, a movable platform 2, an industrial control all-in-one computer 3, and a display terminal 4. The movable platform 2 is mounted on top of the industrial control all-in-one computer 3, and the 3D laser sensor 1, which is inverted L-shaped, is mounted near the rear of the top of the industrial control all-in-one computer 3. The movable platform 2 is located between the 3D laser sensor 1 and the industrial control all-in-one computer 3. The display terminal 4 is mounted directly above or to the side of the 3D laser sensor 1.

[0028] Please refer to Figure 5 The 3D laser sensor 1 has a laser emitter 5, a lens group 6 and a camera 7 installed inside its horizontal part, with the lens group 6 located directly below the camera 7.

[0029] Five concentric squares of different sizes are engraved on the movable stage 2, with side lengths of 0.060m, 0.080m, 0.100m, 0.120m, and 0.150m respectively.

[0030] Please refer to the image. Figure 6 and Figure 7 A one-click flatness measurement method, wherein the automatic warpage measurement method is as follows: Automatic warpage measurement is suitable for most scenarios, providing warpage and 3D visual images of rectangular samples in batches with a single click. The specific steps are as follows:

[0031] Step 1: Sample Positioning Obtain the dimensions of the measured object input by the user, and record its length and width as follows: and Among the five concentric squares of the movable platform, find the one with a side length not less than... Find the smallest square; take the lower right endpoint of this square as the starting point O, and translate it to the left by a distance of [length value]. Determine point A, and translate it upwards by a width from point O. Determine point B; the rectangle defined by OAB is the placement position of the sample to be measured in this measurement, and this position will be displayed on the terminal.

[0032] Step 2: Calculation of the number of scans The single scan length of the 3D laser sensor 1 depends on the length of the motion track of the movable stage 2, and the single scan width of the 3D laser sensor 1 is 0.030m. For each scan, 0.025m of the middle width is taken as the effective data for warpage calculation, thus determining the number of scans. It is determined by the width of the item being measured. Specifically:

[0033] ; in This is the floor function, representing rounding down to the nearest integer. The largest integer.

[0034] Step 3: Automatic Path Design 1) Scan position initialization: Move the movable stage 2 to the initial position of this measurement, that is, the position where the starting point O at the lower right end of the square is aligned with the laser emitter 5 of the 3D laser sensor 1.

[0035] 2) Scanning Path Planning: Based on the square on the movable stage 2 determined in step one and the placement and dimensions of the object to be measured, the scanning path is planned, which is the movement trajectory of the movable stage 2. Details are as follows:

[0036] a. Path of the first scan: based on the length of the item being tested. The length of this scan is planned, that is, the movable stage 2 is moved from left to right. If the number of scans is predetermined. If so, the scan is complete; if If so, proceed to the next scan.

[0037] b. Path of the second scan: Move the movable stage 2 0.025m downwards, then move it from right to left. If the number of scans is predetermined. If so, the scan is complete; if If so, proceed to the next scan.

[0038] c, the The path for this scan: Move the movable stage 2 0.025m downwards. If... If it is an odd number, then shift it from left to right. ; and if If it is even, shift it from right to left. Repeat this step until... .

[0039] Step 4: Scan and calculate the warpage. The system begins scanning the object under test along a planned path to acquire image data. Simultaneously, filters are used to remove outliers from the acquired data. All scanned and processed data is in point cloud format. The maximum height of the object under test within the remaining valid data is recorded and updated in real-time. and minimum value After the scanning process is completed, the warpage of the sample is calculated. The specific calculation method is as follows:

[0040] ; in This is the diagonal length of the rectangular test item. Based on national standards GB / T14619—2013 and GB / T14620—2013, and international routine standards, if the warpage of the test item is greater than 0.3%, an abnormality is reported (e.g., ...). Figure 8 ).

[0041] Step 5: Combine and present the images Image data obtained from odd-numbered scans are saved directly. Image data from even-numbered scans are processed symmetrically before use: based on the smallest square selected in step one, a reference point is recorded. Coordinates are ,in These are the length and width of the item being measured, respectively. This refers to the number of scans performed. Image data obtained from even-numbered scans will be based on... After symmetry processing, the data is saved. After scanning, all saved image data (image data obtained from odd-numbered scans and image data obtained from even-numbered scans) are stitched together to obtain a three-dimensional image of the object being measured. The three-dimensional image of the object being measured is then displayed on the display terminal 4, and each point is colored according to its height, with height differences distinguished by hue.

[0042] A one-click flatness measurement method, wherein the manual warpage measurement method is as follows: Manual warp measurement is suitable for personalized measurement needs. The measurement path is manually planned and the warp is calculated based on the shape of the sample and the user's specific requirements. It can be used to measure the local warp of the sample or to compare height differences at different locations. The specific steps are as follows:

[0043] Step 1: Sample Positioning If the sample being tested is rectangular, then record its length and width as follows: and If the measured item is not rectangular, then the longest side of the measured item is recorded as the length. The second longest side is the width. Find a side with a length not less than 1. Find the smallest square; take the lower right endpoint of this square as the starting point O, and extend leftward from point O by a length... Determine point A, and move upwards from point O by a width Determine point B; the rectangle defined by OAB is the placement range of the measured item in this measurement. At this time, the rectangle can always contain the measured item, and this position will be indicated by the display terminal 4.

[0044] Step 2: Calculation of the number of scans The single scan length of the 3D laser sensor 1 depends on the length of the motion track of the movable stage 2, and the single scan width of the 3D laser sensor 1 is 0.030m. Each scan uses the midpoint 0.025m of the width as the basis for warpage calculation, thus determining the number of scans. Depend on The decision is made and calculated according to formula (1). .

[0045] Step 3: Scanning Path Planning In the manual measurement method, the user can use the automatic path design in step three of the automatic warp measurement method to scan... , The warpage of the sample within the enclosed rectangle. Alternatively, the scanning path can be personalized by pre-setting the motion trajectory of the movable stage 2 through simple input commands.

[0046] Personalize the scanning path by inputting simple commands to predetermine the motion trajectory of the movable stage 2, such as... Figure 9 The details are as follows: The user first selects the initial position of the movable stage 2, and then plans its trajectory: inputting the planned distance the movable stage 2 will move from left to right during this scan, and confirming whether the scan covers the entire moving distance. If the scan covers the entire moving distance, then... for , This is the planned movement distance. If the current scan cannot cover the entire movement distance, you can customize the starting movement distance for this scan. and the distance traveled at the end After this scan is completed, if not all the items being tested have been scanned, the user can customize the next scan from right to left and plan the starting distance for this scan. and the distance traveled at the end Simultaneously, the movable stage 2 automatically plans to move 0.025m downwards after the first custom scan. The second custom scan is an even-numbered scan; if the sample can be completely covered by the scan plan at this point, the scan ends. If more scans are needed, repeat the above steps until the scan plan can cover the sample.

[0047] Step 4: Scan and calculate the warpage. The system begins scanning the object under test along a planned path to acquire image data. Simultaneously, filters are used to remove outliers from the acquired image data. The maximum value of the object's height within the remaining valid data is recorded and updated in real-time. and minimum value After the scanning process is completed, the warpage of the sample is calculated. Since non-rectangular samples may have no diagonals or multiple unequal diagonals, the diagonal length in formula (2) should not be used as a parameter. For regular polygonal samples, the specific calculation method for warpage is as follows:

[0048] ; For samples with highly irregular shapes, the calculation method for warpage needs to be analyzed specifically based on the sample shape, and there is no unified calculation method, so it will not be provided separately in this article. However, devices with extremely irregular shapes are relatively rare in industrial practice.

[0049] Based on national standards GB / T14619—2013, GB / T14620—2013, and international routine standards, if the warpage of the tested sample is greater than three per thousand ( If so, an error will be reported.

[0050] Step 5: Combine and present the images Based on the predetermined scanning path in step three, the 3D image of the object under test is stitched together using the motion trajectory of the movable stage 2. Image data obtained from odd-numbered scans are directly saved. Data from even-numbered scans are processed symmetrically before use: a reference point is selected based on the smallest square chosen in step one. And let its coordinates be ,in This refers to the number of scans performed. For even-numbered scans, the image data is based on the reference point of that scan. The images are processed symmetrically and saved. After scanning, all the saved image data are stitched together to obtain a three-dimensional image of the object being tested. The three-dimensional image of the object being tested is then displayed on the display terminal 4.

[0051] Step Six: Calculation of Local Warpage On the 3D image of the object being tested, the user can select a portion of the object on the display terminal 4 and measure its warpage. At this time, the system uses a fully automatic measurement method to measure the selected area, and... and The length and width of the rectangular selection box are calculated, and a filter is used to remove outliers from the collected data. The maximum value of the measured object height in the remaining valid data is recorded and updated in real time. and minimum value After the scanning process is completed, the warpage of the test sample is calculated according to formula (2). .

[0052] Step 7: Calculation of warpage after removing local areas On the 3D image of the object being tested, the user can select a portion of the object on the display terminal 4 and measure the warpage of the object outside the selected area. At this time, the system rescans the object using a pre-set scanning scheme, but does not collect data from the selected area. Simultaneously, a filter is used to remove outliers from the collected data, and the maximum value of the object's height in the remaining valid data is recorded and updated in real time. and minimum value After the scanning process is completed, the warpage of the test sample is calculated according to formula (3). .

[0053] Step 8: Compare the height differences at different locations. On the 3D image of the object being measured, the user can select two different parts of the object on the display terminal 4 and measure their height difference. At this time, the system rescans the object using a pre-set scanning scheme and records and updates the highest values ​​of the two areas in real time. and After the measurement is completed, calculate and give the height difference between the two parts. .

[0054] In this embodiment, the 3D laser sensor 3 configured within the device operates based on laser triangulation. It projects a line laser beam onto the surface of the object being measured and uses a camera to capture the reflected light, thereby acquiring the three-dimensional contour data of the object's surface. A schematic diagram of the laser scanning process and 3D image is shown below. Figure 10 , Figure 11 The details are as follows:

[0055] 1) Laser emission and projection: The 3D laser sensor 1 is equipped with a laser emitter 5, which emits a laser beam and projects it onto the surface of the object being measured to form a line.

[0056] 2) Light reflection and reception: The light reflected from the object's surface by the laser is focused by the lens group 6 and projected onto the photosensitive element inside the camera 7.

[0057] 3) Triangulation: Due to the angle and distance between the camera 7 and the laser emitter 5, the light reflected from the surface of objects at different heights will fall on different positions on the photosensitive element, forming different light spot positions.

[0058] 4) Data processing and calculation: Based on the geometric relationship between the laser emitter 5, the camera 7 and the reflected light from the object surface, the coordinates of each light spot in three-dimensional space can be calculated using the principle of triangulation, thereby reconstructing the three-dimensional contour data of the measured object.

[0059] 5) Contour acquisition and application: The 3D laser sensor 1 can acquire complete three-dimensional image data (point cloud format data) of the object under test by processing multiple contour image data of continuous scanning, which can be used for applications such as size measurement, defect detection, and three-dimensional modeling.

[0060] 3D image data refers to data obtained and processed by a warp measurement instrument using point cloud data as the 3D image processing format. Point cloud data is a collection of vectors in a 3D coordinate system. Image data is recorded in the form of points, each containing 3D coordinates and carrying other information about the point's attributes, such as color, reflectivity, and intensity. Point cloud data possesses high precision, high resolution, and high-dimensional geometric information, and can intuitively represent the shape, surface, and texture of objects in space. The processing and analysis of point cloud data typically require the use of computer vision and computer graphics techniques, such as point cloud filtering, registration, segmentation, reconstruction, recognition, and classification.

[0061] In this embodiment, the evaluation based on national standards GB / T14619—2013, GB / T14620—2013, and international routine standards is as follows: According to MSA theory, GR&R results can be used as a quantitative evaluation standard for the accuracy and stability of measuring instruments. To ensure the accuracy of GR&R results, each sample should be measured at least 3 times and the number of parts should be at least 10.

[0062] The definition of GR&R is: ; and They are respectively: ; ; in: ; ; This is the average of the sample ranges from repeated measurements of each sample; The moving range is the sample mean of repeated measurements for each sample. is a statistical estimation coefficient, which can be obtained by looking up a table, where: is the sample size when calculating the range; is the number of ranges used when calculating the average range. In this experiment, the coefficient is: , .

[0063] reflects the deviation generated by different operators measuring the same part using the same equipment. In this experiment, the 3D laser sensor is an automated detection device, without interference from human measurement errors. Therefore is , that is: , so equation (6) can be written as:

[0064] ; For the evaluation of the GRR analysis results, international routine specifications are adopted. The specific indicators are as follows: GR&R% < 10% ------------- Class A precision measuring tool (the most suitable) 10% < GR&R% < 30% ------ Class B accurate measuring tool (acceptable) GR&R% > 30% ------------- Class C inferior measuring tool (unacceptable).

[0065] Example 2: (1) Experimental method Use the LTCC ceramic substrate products provided by a certain manufacturer as the experimental object. The product requires that the warpage of the good products be controlled to be less than 0.3%. Randomly select 10 ceramic substrates from the same production batch as the experimental samples. The samples are 38 mm long and 27 mm wide. The physical samples are as Figure 12 . Number each sample and measure them in sequence. Each sample is measured 5 times repeatedly, and record the warpage measurement values of each test. The result data is shown in Figure 13 and Table 2 Warpage repeated measurement results.

[0066] Table 2 Warpage repeated measurement results Table 2 shows that for multiple repeated measurements of multiple different samples, the results of the warpage measuring instrument have high stability. <00​​​​​​​

[0068] Secondly, the precision of the warpage measurement was quantitatively analyzed. Using the raw data of the warpage repeatability measurement in Table 2, MSA analysis was performed on the warpage measuring instrument, and the GR&R result was 7.317%. Detailed GR&R calculation process data are shown in Table 3.

[0069] Table 3. Warpage GR&R Analysis Process Data The mean range of the samples was 0.000464. The value is 0.000198, and the average moving range is 0.003134911. It is 0.002702509. The value is 0.002709774, and the (GR&R)% is 0.073177324.

[0070] The above experiments and data analysis show that the warp measuring instrument meets the GR&R analysis requirements for all repeated measurements of warp, reaching the level of a Class A precision instrument, and the calculation results are accurate and reliable.

[0071] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A one-button flatness measurement system, characterized in that, It includes a 3D laser sensor, a movable platform, an industrial control all-in-one computer, and a display terminal; the movable platform is mounted on the top of the industrial control all-in-one computer, and the 3D laser sensor is mounted at the rear of the top of the industrial control all-in-one computer, with the movable platform located between the 3D laser sensor and the industrial control all-in-one computer; the display terminal is mounted directly above or to the side of the 3D laser sensor; the laser emitter, lens group, and camera are installed inside the horizontal part of the 3D laser sensor, with the lens group located directly below the camera.

2. The one-button flatness measurement system according to claim 1, characterized in that, The 3D laser sensor is inverted L-shaped.

3. The one-button flatness measurement system according to claim 1, characterized in that, The movable platform has five concentric squares of different sizes.

4. A one-click flatness measurement method, characterized in that, The automatic warpage measurement method includes the following steps: Step 1, Sample Positioning: Obtain the length a and width b of the sample to be tested; among the five concentric squares of the movable stage, find the smallest square with a side length not less than a; take the lower right endpoint of this square as the starting point O, move point O to the left by a to determine point A, and move point O upward by b to determine point B; determine the placement position of the sample to be tested by the three points O, A, and B. Step 2: Calculation of Scan Count: The 3D laser sensor has a single scan width of 0.030m. For each scan, the effective data from the middle 0.025m and the width b of the measured object are used to calculate the number of scans. : in This is the floor function, representing rounding down to the nearest integer. The largest integer; Step 3: Automatic Path Design: Based on the square on the movable stage and the placement and size of the test object determined in Step 1, plan the scanning path to obtain the motion path of the movable stage. Step 4: Scan and calculate warpage: Scan the object under test using the planned path to acquire image data. Simultaneously, use a filter to remove outliers from the acquired image data. Record and update the maximum value of the object's height in the remaining valid image data in real time. and minimum value And calculate the warpage of the tested item. ; Step 5: Stitch together the obtained image data to obtain a three-dimensional image of the object being tested.

5. The one-click flatness measurement method according to claim 4, characterized in that, Step three is as follows: 1) Align the lower right starting point O of the square of the movable stage with the laser emitter of the 3D laser sensor; 2) Path of the first scan: based on the length of the sample being tested. Plan the length of this scan, and move the movable stage from left to right. If the number of scans is predetermined If so, the scan is complete; if If so, proceed to the next scan; 3) Path of the second scan: Move the movable stage 0.025m downwards, then move it from right to left; if the predetermined number of scans is reached, the scan is completed; otherwise... If so, proceed to the next scan; 4) No. The path for the next scan: move the movable stage 0.025m downwards; if If it is an odd number, then shift it from left to right. ; and if If it is even, shift it from right to left. Repeat this step until... .

6. The one-click flatness measurement method according to claim 4, characterized in that, Warpage of the tested item The calculation formula is: ; Based on national standards GB / T14619—2013 and GB / T14620—2013, and international routine standards, if the warpage of the tested sample is greater than 0.3%, an abnormality is reported.

7. The one-click flatness measurement method according to claim 4, characterized in that, Step five is as follows: Image data obtained from an odd number of scans is saved directly. For image data from even-numbered scans, perform symmetrical processing: based on the smallest square selected in step one, record the reference point. Coordinates are ,in, This refers to the number of scans performed; image data obtained from even-numbered scans are based on... Save the data after performing symmetry processing; The image data obtained from odd-numbered scans and even-numbered scans are stitched together to obtain a three-dimensional image of the object being tested.

8. A one-click flatness measurement method, characterized in that, The manual warpage measurement method includes the following steps: Step 1: Sample Positioning: If the sample is rectangular, its length is a and its width is b; if the sample is not rectangular, its longest side is a and its second longest side is b; among the five concentric squares of the movable stage, find the smallest square with a side length not less than a; take the lower right endpoint of this square as the starting point O, move point O to the left by a to determine point A, and move point O upwards by b to determine point B; determine the placement position of the sample by points O, A, and B. Step 2: Calculation of Scan Count: The 3D laser sensor has a single scan width of 0.030m. For each scan, the effective data from the middle 0.025m and the width b of the measured object are used to calculate the number of scans. ; Step 3, Scan Path Planning: Users can select automatic path planning in Step 3 of the automatic warp measurement method; or customize the motion trajectory of the movable stage by inputting commands. Step 4: Scan and calculate warpage: Scan the object under test using the planned path to acquire image data. Simultaneously, use a filter to remove outliers from the acquired image data. Record and update the maximum value of the object's height in the remaining valid image data in real time. and minimum value And calculate the warpage of the tested sample. : Step 5: Stitch the obtained image data to obtain a three-dimensional image of the tested object; Step 6: Calculation of local warpage: The user selects a local area on the 3D image of the object being measured on the display terminal; the local area is measured using an automatic warpage measurement method, and the length and width of the selected rectangle are taken as a and b in the formula to calculate the warpage WD of the local area. Step 7: Calculation of warpage after removing local areas: The user selects the local area to be excluded on the 3D image of the object being tested on the display terminal; the object being tested is rescanned according to the scanning path in Step 3, but image data of the selected area is not collected; outliers are removed using a filter, and the maximum value of the height of the object being tested in the valid image data is recorded and updated. and minimum value Calculate the warpage WD after removing the local area; Step 8: Comparison of Height Differences at Different Locations: The user selects two different areas on the 3D image of the object being tested on the display terminal; the object is rescanned according to the scanning path in Step 3, and the maximum values ​​of the two areas are recorded and updated in real time. and minimum value After the measurement is completed, calculate and output the height difference between the two areas. .

9. The one-click flatness measurement method according to claim 8, characterized in that, In step three, the motion trajectory of the movable platform is customized by inputting commands as follows: The user selects the initial position of the movable stage and then plans its trajectory: Input the planned distance the movable stage will move from left to right during this scan, and confirm whether the scan covers the entire moving distance; if the scan covers the entire moving distance, then... for , This is the planned movement distance; if the current scan cannot cover the entire movement distance, you can customize the starting movement distance for this scan. and the distance traveled at the end After this scan is completed, if the tested items have not been completely scanned, the user can customize the next scan from right to left and plan the starting distance for this scan. and the distance traveled at the end Meanwhile, the movable stage 2 automatically plans to move 0.025m downwards after the first custom scan is completed; the second custom scan is an even-numbered scan, and if the sample is completely covered by the scan plan at this time, the scan ends.

10. The one-click flatness measurement method according to claim 8, characterized in that, Step five is as follows: Image data obtained from an odd number of scans is saved directly. For data from even-numbered scans, perform symmetrical processing: based on the smallest square selected in step one, select a reference point. And let its coordinates be ,in This refers to the number of scans performed; for even-numbered scans, the image data is based on the reference point of that scan. Perform symmetrical processing and save; The image data obtained from odd-numbered scans and even-numbered scans are stitched together to obtain a three-dimensional image of the object under test, which is then displayed on the display terminal.

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