A MEMS accelerometer with stiffness adjustment

Abstract

This invention relates to the field of accelerometer technology and discloses a MEMS accelerometer with stiffness adjustment, comprising a sensitive structure consisting of an anchor point, a sensitive elastic beam, and a mass block. The sensitive direction of the sensitive structure is used as the sensitive axis, and the axis orthogonal to the sensitive axis is used as the non-sensitive axis. Multiple sets of symmetrically distributed comb-tooth structures are arranged with the sensitive axis and / or the non-sensitive axis as references. By optimizing the structure of existing MEMS accelerometers, a method is proposed that negative stiffness comb teeth be added to the existing MEMS accelerometer structure. The electrostatic negative stiffness principle is used to offset part of the mechanical positive stiffness, thereby effectively improving its sensitivity without sacrificing mechanical stability.

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