Spot energy detection device and detection method

Abstract

This invention discloses a light spot energy detection device and method. The light spot energy detection device includes a light source, a moving platform, an energy detector, and a light shield. The light source emits a light beam to form a light spot. The moving platform is disposed on the light-emitting side of the light source, and the energy detector is disposed on the moving platform, including a detection part facing the light-emitting side of the light source. The light shield is disposed on the moving platform and located between the light source and the detection part. In the light-emitting direction perpendicular to the light source, the vertical projection of the light shield completely covers the vertical projection of the detection part. The light shield has a perforation for projecting a portion of the light spot onto the detection part. The light shield of this invention enables different areas of the light spot to be sequentially projected onto the same part of the detection part, unifying the detection benchmark for each detection and improving detection accuracy.

Description

Technical Field

[0001] This invention belongs to the field of optical detection technology, and specifically relates to a spot energy detection device and detection method. Background Technology

[0002] Existing exposure machines typically have multiple lenses, and the energy of the light spots from each lens needs to be adjusted to similar levels. This requires measuring the energy distribution of the light spots from each lens, which is essential for subsequent adjustments. Currently, the common detection method involves photographing all light spots with a camera, processing the spots into grayscale values, and calculating and comparing the energy distribution curves based on the grayscale values. However, there is no unified measurement benchmark when photographing different areas of the light spot, leading to significant errors in the detection results and low accuracy.

[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0004] The purpose of this invention is to provide a spot energy detection device that solves the problem of low spot energy detection accuracy.

[0005] To achieve the above objectives, a specific embodiment of the present invention provides a light spot energy detection device, which includes a light source, a moving platform, an energy detector, and a light shield. The light source emits a light beam to form a light spot. The moving platform is disposed on the light-emitting side of the light source, and the energy detector is disposed on the moving platform, including a detection section facing the light-emitting side of the light source. The light shield is disposed on the moving platform and located between the light source and the detection section. In the light-emitting direction perpendicular to the light source, the vertical projection of the light shield completely covers the vertical projection of the detection section. The light shield has a perforation for a portion of the light spot to be projected onto the detection section.

[0006] In one or more embodiments of the present invention, the vertical projection area of ​​the detection part is larger than the vertical projection area of ​​the perforation in the light emission direction perpendicular to the light source.

[0007] In one or more embodiments of the present invention, the diameter of the perforation is 2 mm.

[0008] In one or more embodiments of the present invention, the energy detector is an illuminometer or an energy sensor.

[0009] In one or more embodiments of the present invention, the mobile platform is capable of moving along a first direction and a second direction, wherein the first direction is perpendicular to the second direction and both the first and second directions are perpendicular to the light emission direction of the light source.

[0010] In one or more embodiments of the present invention, the center of the detection section is located on the central axis of the perforation.

[0011] In one or more embodiments of the present invention, the light source is a laser source.

[0012] In one or more embodiments of the present invention, the shape of the light spot is rectangular or circular.

[0013] In one or more embodiments of the present invention, the vertical projection shape of the detection unit is rectangular or circular in the light emission direction perpendicular to the light source.

[0014] In one or more embodiments of the present invention, the size of the perforation gradually increases along the direction closer to the energy detector.

[0015] In one or more embodiments of the present invention, the perforation is constructed in the shape of a frustum or a pyramid, wherein the angle between the generatrix of the frustum-shaped perforation and a third direction is not greater than 10°, and the angle between the side edge of the pyramid-shaped perforation and a third direction is not greater than 10°.

[0016] Another specific embodiment of the present invention provides a light spot energy detection device, which includes a moving platform, a light source, an energy detector, and a light shield. The light source is disposed on the moving platform and is used to emit a light beam to form a light spot. The energy detector is disposed on the light-emitting side of the light source and includes a detection part for detecting the energy of the light spot. The light shield is disposed on the moving platform and located between the light source and the detection part. In the light-emitting direction perpendicular to the light source, the vertical projection of the light shield completely covers the vertical projection of the detection part. The light shield has a perforation for a portion of the light spot to be projected onto the detection part.

[0017] In another aspect, the present invention provides a method for detecting light spot energy, comprising the following steps:

[0018] The light source projects a light spot toward the light shield, and a portion of the light spot is projected to the detection unit through a perforation to detect the energy of that area of ​​the light spot.

[0019] The energy detector and the light shield remain relatively stationary, while the light source moves relative to the light shield. Other areas of the light spot are projected onto the detection unit through the perforation to detect the energy of that area of ​​the light spot.

[0020] Repeat the above steps until the energy of all areas of the light spot is detected.

[0021] Compared with the prior art, the light-shielding component of the present invention enables different areas of the light spot to be projected sequentially onto the same part of the detection unit, thereby unifying the detection benchmark for each detection and improving detection accuracy. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a spot energy detection device in one embodiment of the present invention;

[0024] Figure 2 This is a diagram showing the working state of the spot energy detection device in one embodiment of the present invention;

[0025] Figure 3 This is another working state diagram of the spot energy detection device in one embodiment of the present invention;

[0026] Figure 4 This is a planar projection view of the light spot and energy detector in one embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of the structure of the spot energy detection device in another embodiment of the present invention;

[0028] Figure 6 This is a flowchart of a spot energy detection method in one embodiment of the present invention.

[0029] Explanation of main reference numerals: 1. Light source, 11. Light spot, 2. Energy detector, 21. Detection unit, 3. Light shield, 31. Perforation. Detailed Implementation

[0030] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.

[0031] In the description of this invention, it should be understood that the terms "top", "bottom", "upper", "lower", "left", "right", "horizontal", "vertical", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0032] Furthermore, in the description of this invention, any two of the "first direction", "second direction" and "third direction" are perpendicular to each other, wherein the "third direction" is parallel to the arrangement direction of the energy detector 2 and the light shield 3.

[0033] In one embodiment, reference is made to Figures 1 to 4 As shown, the present invention provides a light spot energy detection device, which includes a light source 1, a moving platform, an energy detector 2, and a light shield 3. The light source 1 and the moving platform are arranged opposite to each other, with the light-emitting side of the light source 1 facing the moving platform. The energy detector 2 and the light shield 3 are both disposed on the moving platform and can move synchronously with the moving platform. The energy detector 2 includes a detection part 21 facing the light-emitting side of the light source 1, and the light shield 3 is located between the light-emitting side of the light source 1 and the detection part 21, with a perforation 31 on the light shield 3. In the light-emitting direction perpendicular to the light source 1, the vertical projection of the light shield 3 completely covers the vertical projection of the detection part 21, ensuring that the light shield 3 can block the light from the light source 1 to the detection part 21, and only part of the light can pass through the perforation 31 to reach the detection part 21, so that a part of the light spot 11 is projected onto the detection part 21, and the other part of the light spot 11 is projected onto the surface of the light shield 3 away from the detection part 21 or onto the moving platform.

[0034] In practical applications, the inspector turns on the light source 1, which emits a beam of light towards the moving platform, forming a light spot 11. Most of the beam is directed towards the light shield 3 and the moving platform, forming partial light spots 11 on the surfaces of the light shield 3 and the moving platform. A small portion of the beam is directed towards the perforation 31, and projected through the perforation 31 to the detection unit 21, forming a partial light spot 11 on the detection unit 21. The detection unit 21 then detects the energy in that specific area of ​​the light spot 11.

[0035] Next, the inspector drives the energy detector 2 and the light shield 3 to move synchronously a certain distance using a mobile platform. Because the energy detector 2 and the light shield 3 move synchronously, they remain relatively stationary, and the position of the detection unit 21 aligned with the perforation 31 remains unchanged. However, due to the relative movement between the light source 1 and the light shield 3, the relative position of the perforation 31 and the light source 1 also changes, causing another part of the light spot 11 to be projected onto the detection unit 21. At this time, the detection result of the detection unit 21 is the energy of the other part of the light spot 11.

[0036] By continuously moving the energy detector 2 and the light-shielding component 3, the inspector can obtain the energy distribution of all areas of the light spot 11. Since the light spot 11 is always projected and formed at the same position on the detection unit 21, the detection reference is completely consistent each time, resulting in a small error and high accuracy in the obtained detection results.

[0037] In one embodiment, reference is made to Figure 2 and Figure 3As shown, in the light emission direction perpendicular to the light source 1, the vertical projection area of ​​the detection unit 21 in this embodiment is greater than the vertical projection area of ​​the perforation 31, ensuring that the area of ​​the light spot 11 projected onto the detection unit 21 through the perforation 31 is smaller than the area of ​​the detection unit 21, so that the detection unit 21 only detects the energy of the light spot 11 at a partial position, thereby improving the detection accuracy.

[0038] In one embodiment, the light source 1 is a laser source, and the shape of the light spot 11 projected by it is rectangular or circular.

[0039] In one embodiment, the mobile platform is capable of moving along a first direction and a second direction, the first direction being perpendicular to the second direction, and both the first and second directions being perpendicular to the light emission direction of the light source 1. For example, in a three-dimensional coordinate system, the light emission direction of the light source 1 is the Z-axis direction, the first direction is the X-axis direction, and the second direction is the Y-axis direction.

[0040] In one embodiment, the aperture of the perforation 31 can be approximately set to 2 mm, and the cross-section of the perforation 31 can be set to other shapes such as circles or rectangles. Specifically, it can be set according to the detection requirements and the shape of the light spot 11 projected by the light source 1.

[0041] Furthermore, the perforation 31 extends along a straight line, and the axis of the perforation 31 is parallel to the light emission direction of the light source 1, so as to avoid the light beam being reflected in the perforation 31.

[0042] In one embodiment, the energy detector 2 is selected from illuminometers or energy sensors. Alternatively, the energy detector 2 may also be selected from other instruments in the prior art capable of detecting the energy of a light spot.

[0043] In one embodiment, the center of the detection unit 21 is located on the central axis of the perforation 31, that is, the light spot 11 projected onto the detection unit 21 through the perforation 31 is located in the central region of the detection unit 21.

[0044] In other embodiments, the light spot 11 can also be detected in other areas of the detection unit 21 besides the central area. The specific location can be selected according to the type of energy detector 2, its service life, and other factors.

[0045] Furthermore, in the light emission direction perpendicular to the light source 1, the vertical projection shape of the detection unit 21 is rectangular or circular.

[0046] In one embodiment, reference is made to Figure 5As shown, the present invention also provides another spot energy detection device, which also includes a light source 1, a moving platform, an energy detector 2, and a light shield 3. The difference from the above embodiment is that the perforation 31 on the light shield 3 is tapered, wherein the cross-sectional dimension of the perforation 31 near the light source 1 is relatively small, and the cross-sectional dimension of the perforation 31 near the energy detector 2 is relatively large. The lateral edge of the tapered perforation 31 has a certain angle with the third direction, i.e., from... Figure 5 From the perspective of the light source 1, it can be seen that the two sides of the perforation 31 are relatively tilted. When the position of the light source 1 is not correct, the light output direction of the light source 1 will also be relatively tilted. At this time, the perforation 31 with the two sides relatively tilted can adapt to the tilted light output direction and avoid the side wall of the perforation 31 blocking the light beam.

[0047] Furthermore, the perforation 31 is constructed as a frustum-shaped or truncated pyramidal hole structure. The angle between the generatrix of the frustum-shaped perforation 31 and the third direction is not greater than 10°, and the angle between the side edge of the truncated pyramidal perforation 31 and the third direction is not greater than 10°.

[0048] In one embodiment, the present invention also provides another spot energy detection device, which also includes a light source 1, a moving platform, an energy detector 2, and a light shield 3. The light source 1 is disposed on the moving platform, and the energy detector 2 and the light shield 3 are fixed to other objects. During the detection process, the moving platform drives the light source 1 to move, while the positions of the energy detector 2 and the light shield 3 remain unchanged, thereby changing the area of ​​the spot 11 projected onto the detection unit 21.

[0049] In one embodiment, reference is made to Figure 6 As shown, the present invention also provides a method for detecting light spot energy. This method utilizes the light spot energy detection device described in the above embodiments to detect the light spot energy. The detection method includes the following steps:

[0050] The inspector turns on the light source 1, and the light source 1 emits a beam of light towards the light shield 3. After the beam of light is projected onto the light shield 3, a light spot 11 is formed on the surface of the light shield 3. A part of the light spot 11 is projected to the detection unit 21 through the perforation 31. The detection unit 21 of the energy detector 2 detects the energy of that part of the light spot 11.

[0051] The energy detector 2 and the light shield 3 remain relatively stationary. The light source 1 moves relative to the light shield 3. Other areas of the light spot 11 are projected onto the detection unit 21 through the perforation 31. The detection unit 21 of the energy detector 2 detects the energy of that area of ​​the light spot 11.

[0052] Repeat the above steps until the energy of all areas of spot 11 is detected.

[0053] In addition, if there are multiple light sources 1, the energy distribution of the light spots of the multiple light sources 1 can be measured sequentially according to the above steps.

[0054] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0055] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A light spot energy detection device, characterized by, The light spot energy detection device includes: A light source (1) is used to emit a light beam to form a light spot (11); A mobile platform is located on the light-emitting side of the light source (1); An energy detector (2) is disposed on the mobile platform, and the energy detector (2) includes a detection part (21) facing the light-emitting side of the light source (1); A light-shielding member (3) is disposed on the moving platform and located between the light source (1) and the detection unit (21). In the light-emitting direction perpendicular to the light source (1), the vertical projection of the light-shielding member (3) completely covers the vertical projection of the detection unit (21). A perforation (31) is provided on the light-shielding member (3) for a portion of the light spot (11) to be projected onto the detection unit (21).

2. The spot size detection device of claim 1, wherein, In the light-emitting direction perpendicular to the light source (1), the vertical projection area of ​​the detection unit (21) is greater than the vertical projection area of ​​the perforation (31).

3. The spot size detection device of claim 1, wherein, The diameter of the perforation (31) is 2 mm.

4. The spot size detection device of claim 1, wherein, The energy detector (2) is an illuminometer or an energy sensor.

5. The spot size detection device of claim 1, wherein, The mobile platform can move along a first direction and a second direction, the first direction being perpendicular to the second direction, and both the first direction and the second direction being perpendicular to the light emission direction of the light source (1).

6. The spot size detection device of claim 1, wherein, The size of the perforation (31) gradually increases along the direction closer to the energy detector (2).

7. The spot size detection device of claim 1, wherein, The perforation (31) is constructed in the shape of a frustum or a pyramid. The angle between the generatrix of the frustum-shaped perforation (31) and the third direction is not greater than 10°, and the angle between the side edge of the pyramid-shaped perforation (31) and the third direction is not greater than 10°.

8. The spot size detection device of claim 1, wherein, The shape of the light spot (11) is rectangular or circular; and / or, In the light-emitting direction perpendicular to the light source (1), the vertical projection shape of the detection unit (21) is rectangular or circular; and / or, The light source (1) is a laser source; and / or, The center of the detection unit (21) is located on the central axis of the perforation (31).

9. A light spot energy detection device, characterized by, The light spot energy detection device includes: Mobile platform; A light source (1) is provided on the moving platform and is used to emit a light beam to form a light spot (11); An energy detector (2) is provided on the light-emitting side of the light source (1), and the energy detector (2) includes a detection unit (21) for detecting the energy of the light spot (11); A light-shielding member (3) is disposed on the moving platform and located between the light source (1) and the detection unit (21). In the light-emitting direction perpendicular to the light source (1), the vertical projection of the light-shielding member (3) completely covers the vertical projection of the detection unit (21). A perforation (31) is provided on the light-shielding member (3) for a portion of the light spot (11) to be projected onto the detection unit (21).

10. A detection method using the light spot energy detection device according to any one of claims 1 to 9, characterized by, The detection method includes the following steps: The light source (1) projects a light spot (11) toward the light shield (3), and a portion of the light spot (11) is projected to the detection unit (21) through the perforation (31) to detect the energy of that area of ​​the light spot (11); The energy detector (2) and the light shield (3) remain relatively stationary. The light source (1) moves relative to the light shield (3). Other areas of the light spot (11) are projected onto the detection unit (21) through the perforation (31) to detect the energy of the area of ​​the light spot (11). Repeat the above steps until the energy of all areas of the light spot (11) is detected.

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