A dressing device and method for a damped cloth polishing pad

Abstract

The present application relates to the technical field of precision grinding and polishing, and particularly relates to a finishing device and method for a damping cloth polishing pad, the finishing device comprising a lifting arm mounted on a grinding and polishing machine, a rotary finishing assembly with the functions of suction, blowing, flushing and trimming integrated being arranged at the end of the lifting arm, the finishing assembly being connected to a gas pump device and a liquid storage device through a valve assembly; the finishing device further comprises a detection device for real-time detection of the surface topography of the polishing pad; the detection device, the lifting drive, the rotary drive and the valve assembly are electrically connected and controlled by a control system; the finishing method is based on the finishing device, the surface cleanliness of the polishing pad is obtained through real-time detection, and the rotation and the corresponding finishing function combination are automatically started and stopped according to different cleanliness levels, so that closed-loop intelligent finishing is realized. The present application realizes online and real-time sensing and on-demand, accurate and integrated finishing of the surface state of the damping cloth polishing pad, and significantly improves the automatic finishing degree, process stability and service life of the polishing pad.

Description

Technical Field

[0001] This invention relates to the field of precision grinding and polishing technology, and specifically to a dressing device and method for a damping cloth polishing pad. Background Technology

[0002] In chemical mechanical polishing (CMP) processes, damping cloth polishing pads are widely used due to their excellent surface morphology preservation and stable material removal rate. However, during the polishing process, polishing slurry residue, abrasive particles, and removed material debris gradually accumulate on the surface of the polishing pad, while its surface microstructure also becomes passivated. These factors collectively lead to the deterioration of the polishing pad's surface condition, directly affecting the stability of the polishing process and the surface finish of the workpiece. Therefore, it is crucial to repair the polishing pad to restore its surface morphology and cleanliness.

[0003] Traditional dressing methods primarily rely on offline manual operation or simple online mechanical dressing devices. Offline dressing requires stopping the machine to remove the polishing pads, which is inefficient and disrupts production cycles. Common online dressing devices are limited in function, typically offering only one of the mechanical scraping or rinsing capabilities, making them ill-suited for complex contamination situations. They also lack real-time sensing and feedback on the polishing pad surface condition, and the dressing process is often based on fixed times or experience, easily leading to under- or over-dressing. Under-dressing fails to effectively restore the polishing pad's performance, while over-dressing accelerates pad wear, shortens its lifespan, and increases production costs.

[0004] Therefore, how to realize an automated dressing scheme that can monitor the status of the polishing pad online and in real time, and intelligently and accurately call up multiple dressing functions to maximize the utilization rate of the polishing pad and improve the process stability while ensuring the dressing effect is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0005] In order to achieve an automated dressing scheme that can monitor the status of the polishing pad online and in real time, and intelligently and accurately call up multiple dressing functions, thereby maximizing the utilization rate of the polishing pad and improving the process stability while ensuring the dressing effect, this application provides a dressing device and method for damping cloth polishing pads.

[0006] The technical solution of the dressing device and method for damping cloth polishing pad provided in this application is as follows: First aspect A dressing device for a damping cloth polishing pad includes a first mounting base and a second mounting base fixedly mounted on a grinding and polishing machine. A lifting arm is slidably connected to the first mounting base, and a lifting drive assembly, which is throttle-connected to the lifting arm, is mounted on the first mounting base. The lifting arm extends above a rotating platform on the grinding and polishing machine. A damping cloth polishing pad is fixedly mounted on the rotating platform. A rotating seat is rotatably connected to the lifting arm. A bushing is fixedly mounted at the bottom of the rotating seat. A drive shaft is rotatably connected inside the bushing. A rotating drive assembly is fixedly mounted inside the rotating seat, and the rotating drive assembly is throttle-connected to the drive shaft. The bottom of the bushing... A trimming assembly with integrated suction, blowing, rinsing, and scraping functions is installed, and the trimming assembly is drivenly connected to the drive shaft. The trimming assembly is connected to a valve assembly, and the valve assembly is connected to an air pump device and a liquid storage device. An arc-shaped plate is slidably connected to the second mounting base. The arc-shaped plate surrounds the trimming assembly along the radius of the damping cloth polishing pad. A detection device is installed on the inner side of the arc-shaped plate near its top. A scraping guide assembly is fixedly connected to the bottom of the arc-shaped plate. The detection device is electrically connected to a control system. The control system is electrically connected to the lifting drive assembly, the rotating drive assembly, the valve assembly, and the air pump device.

[0007] By adopting the above technical solution, suction, blowing, rinsing, and scraping functions are highly integrated into a single dressing component. A rotary drive component drives its rotation, creating relative motion with the rotating damping cloth polishing pad, achieving synergy and combination of multiple dressing actions. By incorporating a sliding, arc-shaped plate surrounding the dressing component and its onboard detection device, in-situ, real-time online monitoring of the dressing area can be performed without interfering with the dressing operation. The control system receives the detection data and performs closed-loop control of lifting, rotating, and valve actuators, thereby achieving intelligent sensing of the polishing pad surface condition and adaptive, precise control of the dressing process. This significantly improves dressing efficiency and automation levels, ensuring the stability of the polishing process.

[0008] Furthermore, the lifting drive assembly includes a lifting motor, which is electrically connected to the control system. The output shaft of the lifting motor is driven by a lead screw, which is vertically arranged. A drive plate that is threadedly connected to the lead screw is fixedly connected to the lifting arm.

[0009] By adopting the above technical solution, the transmission method of using a motor to drive the lead screw has a compact structure, smooth transmission, and high positioning accuracy. It can achieve precise and reliable control of the height of the lifting arm and trimming components, providing a foundation for obtaining stable trimming pressure.

[0010] Furthermore, the rotary drive assembly includes a rotary motor, which is electrically connected to the control system. The rotary motor is fixedly installed inside the rotating base, and a through hole is provided at the bottom of the rotating base. The output shaft of the rotary motor passes through the through hole and is coaxially and fixedly connected to the drive shaft.

[0011] By adopting the above technical solution, the rotary motor is directly fixed inside the rotating base and directly connected to the drive shaft through the through hole. The structure is simple and direct, the transmission chain is short, the intermediate transmission links are reduced, the transmission efficiency and response speed are improved, and vibration and noise are reduced.

[0012] Furthermore, the trimming assembly includes a sealing disc, which is centrally and fixedly installed at the bottom end of the bushing. The bottom surface of the sealing disc has a first annular groove, a second annular groove, a third annular groove, and a fourth annular groove arranged coaxially. The top surface of the sealing disc has a first connecting hole, a second connecting hole, a third connecting hole, and a fourth connecting hole for connection with the valve assembly. The first connecting hole communicates with the first annular groove, the second connecting hole communicates with the second annular groove, the third connecting hole communicates with the third annular groove, and the fourth connecting hole communicates with the fourth annular groove. A mounting sleeve is fixedly and sealed to the bottom surface of the sealing disc near its outer side. A working disc is rotatably connected inside the mounting sleeve. The working disc is coaxially and fixedly connected to the drive shaft. The top surface of the working disc is slidably and sealed to the bottom surface of the sealing disc. The bottom surface of the working disc has several centrally symmetrically arranged... The system comprises a first working chamber, a second working chamber, a third working chamber, and a fourth working chamber. The top surface of the turntable is correspondingly provided with a first working hole, a second working hole, a third working hole, and a fourth working hole. The first working hole connects the first annular groove to the first working chamber; the second working hole connects the second annular groove to the second working chamber; the third working hole connects the third annular groove to the third working chamber; and the fourth working hole connects the fourth annular groove to the fourth working chamber. A blow-off block with an air-blowing hole is fixedly installed inside the first working chamber. A rinsing block with a rinsing hole is fixedly installed inside the second working chamber. A scraping block with a scraping blade is slidably connected inside the third working chamber. A suction block with a suction groove is fixedly installed inside the fourth working chamber.

[0013] By adopting the above technical solution, utilizing the sealed sliding connection between the sealing disc and the working turntable, and the interconnection design between the annular groove and the working hole, the static media supply channel is cleverly dynamically coupled with the high-speed rotating functional execution component. This structure enables the selective execution of four functions—suction, blowing, flushing, and scraping—on a compact rotating body. It features high functional integration, rapid action switching, and independent media paths for each function, ensuring no interference between them.

[0014] Furthermore, the valve assembly includes a first connecting pipe, a second connecting pipe, a third connecting pipe, and a fourth connecting pipe; the first connecting pipe is sealed and fixedly connected to the first connecting hole, the second connecting pipe is sealed and fixedly connected to the second connecting hole, the third connecting pipe is sealed and fixedly connected to the third connecting hole, and the fourth connecting pipe is sealed and fixedly connected to the fourth connecting hole; a first electrically controlled valve is installed on the first connecting pipe, and the first electrically controlled valve is connected to the positive pressure output end of the air pump device; a second electrically controlled valve is installed on the second connecting pipe, and the second electrically controlled valve is connected to the liquid output end of the liquid storage device. The top of the liquid storage device is connected to the positive pressure output end of the air pump device; a third solenoid valve and a fourth solenoid valve are installed side by side on the third connecting pipe, the third solenoid valve is connected to the positive pressure output end of the air pump device, and the fourth solenoid valve is connected to the negative pressure input end of the air pump device; a fifth solenoid valve is installed on the fourth connecting pipe, and the fifth solenoid valve is sealed to a waste liquid collection tank, which is connected to the negative pressure input end of the air pump device; the first solenoid valve, the second solenoid valve, the third solenoid valve, the fourth solenoid valve, and the fifth solenoid valve are all electrically connected to the control system.

[0015] By adopting the above technical solution, independent electrically controlled valves are used to control different functional media pathways, enabling the control system to flexibly and precisely program and control the start, stop, timing, and combination of various trimming functions. The top of the liquid storage device is connected to positive pressure, allowing for stable delivery of the flushing fluid using air pressure. The valve assembly is the core control unit for realizing multi-functional on-demand calling and process automation.

[0016] Furthermore, the bottom of the mounting sleeve is sealed and fixedly connected with a semi-circular fixed blow-out box and a fixed suction box. The fixed blow-out box and the fixed suction box surround the outside of the working turntable. The fixed blow-out box and the fixed suction box are arranged sequentially along the rotation direction of the damping cloth polishing pad. Fixed blow-out pipes and fixed suction pipes are fixedly installed on both sides of the mounting sleeve. One end of the fixed blow-out pipe is sealed and connected to the fixed blow-out box, and the fixed suction pipe is sealed and connected to the fixed suction box. The other end of the fixed blow-out pipe is sealed and connected to the first connecting pipe through a T-connector. The other end of the fixed suction pipe is sealed and connected to the fourth connecting pipe through a T-connector.

[0017] By adopting the above technical solution, a static auxiliary cleaning zone is formed by a fixed blow-off box and a fixed suction box. The static auxiliary cleaning zone works in conjunction with the dynamic cleaning zone formed by the rotating trimming components. This allows for preliminary blowing before the polishing pad enters the dynamic cleaning zone and secondary suction after the polishing pad passes through the dynamic cleaning zone, further ensuring thorough cleaning, effectively eliminating cleaning dead corners, and improving the overall trimming and cleaning effect.

[0018] Furthermore, the scraping guide assembly includes a scraping guide strip, which is fixedly installed on the bottom surface of the arc-shaped plate. The bottom surface of the scraping guide strip is provided with a scraper portion that fits against the surface of the damping cloth polishing pad along its length direction. The interior of the scraping guide strip is provided with a drainage groove corresponding to the scraper portion along its length direction.

[0019] By adopting the above technical solution, the scraper effectively blocks and removes splashed liquid and particles, preventing them from affecting the inner detection device and trimming components, thus protecting the core working area. The internal drainage channel guides the collected waste liquid to the outside in an orderly manner for discharge, playing a key role in cleaning, isolation, and drainage, ensuring detection accuracy and the stability of the trimming process.

[0020] Furthermore, the detection device includes a surface topography sensor, which is one of a confocal white light interferometer, a laser triangulation sensor, a spectral confocal sensor, or an optical profilometer; its measuring probe is tilted at a non-perpendicular angle toward the surface of the damping cloth polishing pad and avoids the direct working area of ​​the trimming workpiece, but the measuring spot can cover the area in front of the trimming position; the surface topography sensor is electrically connected to the control system.

[0021] By employing the above technical solution, a high-precision non-contact optical sensor can acquire real-time microscopic information such as the three-dimensional morphology and roughness of the polishing pad surface without contact or damage. The design of tilting the probe and covering the pre-treatment area enables pre-inspection of the area to be treated, providing a forward-looking decision-making basis for the control system, which is a prerequisite for realizing intelligent closed-loop feedback control.

[0022] Second aspect A method for dressing a damping cloth polishing pad, applied to the dressing device for a damping cloth polishing pad as described in the first aspect, includes the following steps: S1. Drive the lifting arm to a set height via the lifting drive assembly, and simultaneously lift the arc plate so that the trimming assembly and scraping guide assembly leave the upper surface of the rotating platform; S2. Prepare the workpiece for polishing according to the standard workflow of the grinding and polishing machine, including installing the damping cloth polishing pad on the rotating platform; S3. Drive the lifting arm to descend to the set height through the lifting drive assembly, while releasing the arc plate, so that the trimming assembly is suspended above the damping cloth polishing pad, and at the same time, the scraping guide assembly is attached to the damping cloth polishing pad; S4. Start the rotating platform of the grinding and polishing machine to drive the damping cloth polishing pad to rotate. During the operation of the grinding and polishing machine, use the detection device to detect the damping cloth polishing pad in real time. The detection items include the three-dimensional morphology of the surface. S5. Automatically control the rotary drive assembly to start and stop according to the detection results, and simultaneously control the start and stop of one or more functions of suction, blowing, rinsing and scraping integrated in the trimming assembly according to the detection results.

[0023] By adopting the above methods, a complete automated workflow has been formed. From preparation and positioning to closed-loop trimming based on real-time detection, the steps are clear and the logic is rigorous. By adopting a method of detection first, decision-making later, and execution later, the trimming action is no longer triggered by a fixed time or cycle, but is intelligently triggered according to the actual condition of the polishing pad. This avoids damage to the polishing pad caused by over-trimming and prevents under-trimming from affecting the polishing quality, significantly improving the refinement of the process and the efficiency of resource utilization.

[0024] Furthermore, S5 includes: S51. Determine the surface cleanliness of the damping cloth polishing pad based on the three-dimensional morphology data, and classify the surface cleanliness into first-level cleanliness, second-level cleanliness, third-level cleanliness, and fourth-level cleanliness; S52. When the cleanliness of the surface of the damping cloth polishing pad is at level one cleanliness, the rotary drive component is controlled to stop running, and the suction, blowing, rinsing and scraping functions integrated in the trimming component are stopped. S53. When the cleanliness of the surface of the damping cloth polishing pad is level two, the rotary drive component is started, and the suction and blowing functions integrated in the trimming component are activated. S54. When the cleanliness of the surface of the damping cloth polishing pad is level three, the rotary drive component is controlled to start, and the suction, blowing, and rinsing functions integrated in the dressing component are activated. S55. When the cleanliness of the surface of the damping cloth polishing pad is level four, the rotary drive component is started, and the suction, blowing, rinsing and scraping functions integrated in the dressing component are activated.

[0025] By adopting the above technical solutions, cleaning is quantified and graded, and precisely matched with different combinations and intensities of trimming functions, forming a tiered and intelligent trimming strategy. From air-only cleaning to combined air-liquid cleaning, to deep cleaning including mechanical scraping, and finally to stopping, the system can automatically match the most economical and effective trimming solution. This state-based precise control maximizes trimming results, saves energy and consumables, and extends the service life of polishing pads and trimming tools.

[0026] This application provides a dressing device and method for damping cloth polishing pads. Through a highly integrated rotary multi-functional dressing component, an in-situ online detection system, an intelligent valve control unit, and a closed-loop control system, it achieves fully automatic, real-time sensing and precise dressing of the surface condition of the damping cloth polishing pad. Its beneficial effects mainly include: 1. High degree of automation and intelligence: It realizes full-process automation from detection and judgment to execution, reduces manual intervention, and improves production efficiency and consistency.

[0027] 2. Excellent and controllable finishing effect: It integrates suction, blowing, rinsing and scraping functions, and can intelligently match the finishing intensity according to the degree of contamination, ensuring thorough finishing and consistent surface condition.

[0028] 3. Process optimization and material saving: The on-demand dressing mode based on real-time status avoids unnecessary dressing actions and resource waste, effectively extends the service life of polishing pads, and reduces production costs.

[0029] 4. Ensure stable polishing process: Real-time cleanliness monitoring and adjustment ensure that the polishing pad is always in good working condition, thereby ensuring the stability of subsequent workpiece polishing processes and the reliability of product processing quality.

[0030] 5. Compact structure and high integration: The device is reasonably designed and modular in function, realizing complex functions in a limited space, and is easy to install and integrate on existing polishing equipment. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the overall structure of one embodiment of this application.

[0032] Figure 2 yes Figure 1 Schematic diagram of the structure in direction A.

[0033] Figure 3 yes Figure 2 Schematic diagram of the cross-sectional structure along the BB direction.

[0034] Figure 4 yes Figure 2 Schematic diagram of the cross-sectional structure along the CC direction.

[0035] Figure 5 yes Figure 2 Schematic diagram of the cross-sectional structure along the DD direction.

[0036] Figure 6 This is a bottom-view exploded view of the trimming component in one embodiment of this application.

[0037] Figure 7 This is a top-view exploded view of the trimming component in one embodiment of this application.

[0038] Figure 8 This is a schematic diagram of the connection relationship of the valve assembly in one embodiment of this application.

[0039] Figure 9 yes Figure 3 Enlarged schematic diagram of Part I of the structure.

[0040] Figure 10 yes Figure 4 Enlarged schematic diagram of Part II of the structure.

[0041] Figure 11 yes Figure 5 Enlarged schematic diagram of Part III of the structure.

[0042] Explanation of reference numerals in the attached drawings: 100, Grinding and polishing machine; 101, First mounting base; 102, Second mounting base; 103, Lifting arm; 104, Rotating platform; 105, Damping cloth polishing pad; 106, Rotating seat; 107, Bushing; 108, Drive shaft; 109, Air pump device; 110, Liquid storage device; 111, Arc plate; 112, Detection device; 200, Lifting drive assembly; 201, Lifting motor; 202, Lead screw; 203, Drive arm. 300. Moving plate; 301. Rotary drive assembly; 302. Rotary motor; 400. Through hole; 401. Dressing assembly; 402. Sealing disc; 403. First annular groove; 404. Second annular groove; 405. Third annular groove; 406. Fourth annular groove; 407. First connecting hole; 408. Second connecting hole; 409. Third connecting hole; 410. Mounting sleeve; 411. Working turntable; 412. First working chamber; 413. Second working chamber 414. Third working chamber; 415. Fourth working chamber; 416. First working hole; 417. Second working hole; 418. Third working hole; 419. Fourth working hole; 420. Blow-out block; 421. Air blowing hole; 422. Rinsing block; 423. Rinsing hole; 424. Scraping block; 425. Scraping blade; 426. Suction block; 427. Suction groove; 428. Fixed blow-out box; 429. Fixed suction box; 430. Fixed blow-out pipe; 431. Fixed suction pipe; 500. Valve assembly; 501. First connecting pipe; 502. Second connecting pipe; 503. Third connecting pipe; 504. Fourth connecting pipe; 505. First solenoid valve; 506. Second solenoid valve; 507. Third solenoid valve; 508. Fourth solenoid valve; 509. Fifth solenoid valve; 510. Waste liquid collection tank; 600. Scraping guide assembly; 601. Scraping guide strip; 602. Scraper section; 603. Drainage channel. Detailed Implementation

[0043] The following combination Figures 1-11 This application will be described in further detail.

[0044] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0045] This application discloses a dressing device and method for a damping cloth polishing pad.

[0046] Example 1

[0047] Please refer to the above as well. Figures 1 to 11 In one embodiment of this application, a dressing device for a damping cloth polishing pad includes a first mounting base 101 and two second mounting bases 102 fixedly mounted on a grinding and polishing machine 100. The first mounting base 101 is disposed between the two second mounting bases 102. A lifting arm 103 is slidably connected to the first mounting base 101. A lifting drive assembly 200, which is pulsatorically connected to the lifting arm 103, is mounted on the first mounting base 101. One end of the lifting arm 103 away from the first mounting base 101 extends above a rotating platform 104 on the grinding and polishing machine 100. A damping cloth polishing pad 105 is fixedly mounted on the rotating platform 104. A rotating seat 106 is rotatably connected to the end of the lifting arm 103 away from the first mounting base 101. A bushing 107 is fixedly mounted at the bottom of the rotating seat 106. A drive shaft 108 is rotatably connected inside the bushing 107. A rotating drive assembly is fixedly mounted inside the rotating seat 106. The moving component 300 and the rotary drive component 300 are connected to the drive shaft 108. The bottom of the bushing 107 is equipped with a trimming component 400 that integrates suction, blowing, rinsing and scraping functions. The trimming component 400 is connected to the drive shaft 108. The trimming component 400 is connected to a valve component 500, which is connected to an air pump device 109 and a liquid storage device 110. An arc plate 111 is slidably connected between two second mounting seats 102. The arc plate 111 surrounds the trimming component 400 along the radius of the damping cloth polishing pad 105. A detection device 112 is installed on the inner side of the arc plate 111 near its top. A scraping guide component 600 is fixedly connected to the bottom of the arc plate 111. The detection device 112 is electrically connected to a control system. The control system is electrically connected to the lifting drive component 200, the rotary drive component 300, the valve component 500 and the air pump device 109.

[0048] During operation, the rotating platform 104 of the grinding and polishing machine 100 drives the damping cloth polishing pad 105 on it to rotate. The control system controls the lifting drive assembly 200 to drive the lifting arm 103 to rise and fall; after the lifting arm 103 rises, it moves the dressing assembly 400 away from the rotating platform 104, so that the damping cloth polishing pad 105 can be installed on the rotating platform 104; after the lifting arm 103 falls, it allows the dressing assembly 400 installed at its end to contact the surface of the damping cloth polishing pad 105. The rotating drive assembly 300 can drive the dressing assembly 400 to rotate at high speed via the drive shaft 108. The trimming component 400 can trim the surface of the rotating damping cloth polishing pad 105 as needed, removing the attached polishing residue and passivation layer. It can also spray the rinsing liquid in the liquid storage device 110 to rinse the surface of the damping cloth polishing pad 105 as needed. It can also remove debris from the surface of the damping cloth polishing pad 105 by positive pressure blowing as needed, and can also recycle waste liquid by negative pressure suction as needed.

[0049] Throughout the process, the arc-shaped plate 111 surrounding the trimming assembly 400 and sliding along the second mounting base 102, along with the detection device 112 on it, monitor the surface morphology of the damping cloth polishing pad 105 in real time and feed the surface morphology data back to the control system. The control system automatically adjusts the trimming assembly 400 to perform corresponding trimming on the surface of the damping cloth polishing pad 105 based on the surface morphology of the damping cloth polishing pad 105.

[0050] Please refer to the above as well. Figures 1 to 11 In one specific embodiment of this application, the lifting drive assembly 200 includes a lifting motor 201, which is electrically connected to the control system. The output shaft of the lifting motor 201 is driven by a lead screw 202, which is vertically arranged. A drive plate 203 that is threadedly connected to the lead screw 202 is fixedly connected to the lifting arm 103.

[0051] During operation, when the control system issues a lifting command, the lifting drive assembly 200 begins to operate. Specifically, the control system controls the lifting motor 201 to start, and its output shaft drives the lead screw 202, which is connected to it, to rotate. Since the lead screw 202 is vertically oriented and forms a threaded pair with the drive plate 203 fixedly connected to the lifting arm 103, the rotational motion of the lead screw 202 is converted into linear motion of the drive plate 203 along the axis of the lead screw 202. This precisely drives the entire lifting arm 103 and the trimming assembly 400 installed at its end to rise or fall smoothly, thereby controlling the working height of the trimming assembly 400.

[0052] Please refer to the above as well. Figures 1 to 11In one specific embodiment of this application, the rotary drive assembly 300 includes a rotary motor 301, which is electrically connected to the control system. The rotary motor 301 is fixedly installed inside the rotating seat 106. A through hole 302 is provided at the bottom of the rotating seat 106, and the output shaft of the rotary motor 301 passes through the through hole 302 and is coaxially fixedly connected to the drive shaft 108.

[0053] During operation, when the control system issues a rotation command, the rotation drive assembly 300 starts to operate. Specifically, the control system controls the rotation motor 301, which is fixedly installed inside the rotating base 106, to start. The output shaft of the rotation motor 301 passes through the through hole 302 at the bottom of the rotating base 106 and is coaxially fixedly connected to the drive shaft 108 inside the bushing 107. This allows the power of the rotation motor 301 to be directly and without deviation transmitted to the drive shaft 108, ultimately driving the trimming assembly 400, which is connected to the drive shaft 108, to rotate at high speed to perform tasks such as scraping and rinsing.

[0054] Please refer to the above as well. Figures 1 to 11In one specific embodiment of this application, the trimming assembly 400 includes a sealing disc 401, which is centrally fixedly installed at the bottom end of the bushing 107. The bottom surface of the sealing disc 401 has a first annular groove 402, a second annular groove 403, a third annular groove 404, and a fourth annular groove 405 coaxially arranged. The top surface of the sealing disc 401 has a first connecting hole 406, a second connecting hole 407, a third connecting hole 408, and a fourth connecting hole 409 connected to the valve assembly 500. The first connecting hole 406 and the first annular groove 405 are connected together. 2. The second connecting hole 407 communicates with the second annular groove 403, the third connecting hole 408 communicates with the third annular groove 404, and the fourth connecting hole 409 communicates with the fourth annular groove 405; the bottom surface of the sealing disc 401 is fixedly and sealed to the outer side with an installation sleeve 410, and a working turntable 411 is rotatably connected inside the installation sleeve 410. The working turntable 411 is coaxially and fixedly connected to the drive shaft 108, and the top surface of the working turntable 411 is sealed and slidably connected to the bottom surface of the sealing disc 401; the bottom surface of the working turntable 411 has several centrally symmetrically arranged openings. The first working chamber 412, the second working chamber 413, the third working chamber 414, and the fourth working chamber 415 are provided. The top surface of the working turntable 411 is correspondingly provided with a first working hole 416, a second working hole 417, a third working hole 418, and a fourth working hole 419. The first working hole 416 connects the first annular groove 402 to the first working chamber 412; the second working hole 417 connects the second annular groove 403 to the second working chamber 413; the third working hole 418 connects the third annular groove 404 to the third working chamber 414; and the fourth working hole 419... The fourth annular groove 405 is connected to the fourth working chamber 415; a blow-out block 420 is fixedly installed inside the first working chamber 412, and a blow-out hole 421 is opened on the blow-out block 420; a flushing block 422 is fixedly installed inside the second working chamber 413, and a flushing hole 423 is opened on the flushing block 422; a scraping block 424 is slidably connected inside the third working chamber 414, and a scraping blade 425 is provided on the bottom surface of the scraping block 424; a suction block 426 is fixedly installed inside the fourth working chamber 415, and a suction groove 427 is opened on the suction block 426.

[0055] During operation, when purging is required, the valve assembly 500 switches the positive pressure gas passage generated by the air pump device 109 to connect with the first connection hole 406 on the sealing disc 401. The positive pressure gas enters the first annular groove 402 on the bottom surface of the sealing disc 401 through the first connection hole 406. As the working turntable 411 rotates, its top surface first working hole 416 periodically sweeps across the area of ​​the first annular groove 402. The first working hole 416 is always connected to the first annular groove 402, and the gas enters the rotating first working chamber 412 through the first working hole 416, and is finally sprayed downward from the air blowing hole 421 on the blow-off block 420 fixed in the chamber, to disperse and remove droplets and light debris from the surface of the damping cloth polishing pad 105.

[0056] When rinsing is required, the valve assembly 500 switches the rinsing fluid passage of the liquid storage device 110 to communicate with the second connection hole 407 on the sealing disc 401. The rinsing fluid flows into the second annular groove 403 through the second connection hole 407. Similarly, as the working turntable 411 rotates, its second working hole 417 will always be in communication with the second annular groove 403, guiding the rinsing fluid into the second working chamber 413 and spraying it out from the rinsing hole 423 of the rinsing block 422 fixed in the chamber to rinse the surface of the polishing pad.

[0057] When scraping is required, the scraping action is performed by the retractable scraping block 424. When the control system connects the third connecting hole 408 on the sealing disc 401 to the positive pressure end of the air pump device 109 through the valve assembly 500, positive pressure gas enters the third annular groove 404 and then enters the third working chamber 414 through the third working hole 418 on the rotating working disc 411, acting on the top of the scraping block 424 which is slidably connected in the chamber. Under pressure, the scraping block 424 overcomes internal resistance and moves slightly downward, causing the scraping blade 425 on its bottom surface to protrude from the bottom surface of the working disc 411, thereby scraping the surface of the rotating damping cloth polishing pad 105 to remove stubborn deposits and passivation layers. Conversely, when the control system connects the third connecting hole 408 on the sealing disc 401 to the negative pressure end of the air pump device 109 through the valve assembly 500, the scraping block 424 will retract under negative pressure.

[0058] When suction is required, the valve assembly 500 switches the negative pressure passage generated by the air pump device 109 to connect with the fourth connection hole 409 on the sealing disc 401. The negative pressure is transmitted to the fourth annular groove 405 through the fourth connection hole 409. When the working turntable 411 rotates, its fourth working hole 419 periodically connects with the fourth annular groove 405, transmitting the negative pressure to the fourth working chamber 415. The suction groove 427 on the suction block 426 fixed in this chamber then generates suction, powerfully sucking away the waste liquid generated from the previous rinsing and blowing, as well as the debris generated from scraping, completing the cleaning and recycling process.

[0059] Please refer to the above as well. Figures 1 to 11In one specific embodiment of this application, the valve assembly 500 includes a first connecting pipe 501, a second connecting pipe 502, a third connecting pipe 503, and a fourth connecting pipe 504; the first connecting pipe 501 is sealed and fixedly connected to the first connecting hole 406, the second connecting pipe 502 is sealed and fixedly connected to the second connecting hole 407, the third connecting pipe 503 is sealed and fixedly connected to the third connecting hole 408, and the fourth connecting pipe 504 is sealed and fixedly connected to the fourth connecting hole 409; a first solenoid valve 505 is installed on the first connecting pipe 501, and the first solenoid valve 505 is connected to the positive pressure output end of the air pump device 109; a second solenoid valve 506 is installed on the second connecting pipe 502, and the second solenoid valve 506 is connected to the liquid storage device 110. The liquid output end is connected, and the top of the liquid storage device 110 is connected to the positive pressure output end of the air pump device 109; a third solenoid valve 507 and a fourth solenoid valve 508 are installed side by side on the third connecting pipe 503. The third solenoid valve 507 is connected to the positive pressure output end of the air pump device 109, and the fourth solenoid valve 508 is connected to the negative pressure input end of the air pump device 109; a fifth solenoid valve 509 is installed on the fourth connecting pipe 504. The fifth solenoid valve 509 is sealed to a waste liquid collection tank 510, and the waste liquid collection tank 510 is connected to the negative pressure input end of the air pump device 109; the first solenoid valve 505, the second solenoid valve 506, the third solenoid valve 507, the fourth solenoid valve 508, and the fifth solenoid valve 509 are all electrically connected to the control system.

[0060] During operation, the control system independently and precisely controls the opening, closing, and switching of each electrically controlled valve in the valve assembly 500 to coordinate the supply and recovery of the functional medium in the trimming assembly 400.

[0061] When the purging function needs to be performed, the control system opens the first solenoid valve 505, so that the positive pressure gas generated by the air pump device 109 is delivered to the purging block 420 of the trimming assembly 400 through the first connecting pipe 501 and the first connecting hole 406.

[0062] When the flushing function needs to be performed, the control system opens the second solenoid valve 506. At this time, the liquid storage device 110, driven by the positive pressure gas connected at the top, presses out the flushing liquid inside through the second connecting pipe 502 and the second connecting hole 407 and delivers it to the flushing block 422.

[0063] When the scraping function needs to be performed, the control system controls the opening of the third solenoid valve 507 and the closing of the fourth solenoid valve 508. Positive pressure gas pushes the scraping block 424 downward through the third connecting pipe 503 and the third connecting hole 408. When the scraping operation is completed, the control system controls the closing of the third solenoid valve 507 and the opening of the fourth solenoid valve 508. Negative pressure gas drives the scraping block 424 upward through the third connecting pipe 503 and the third connecting hole 408.

[0064] When the suction function is required, the control system controls the opening of the fifth solenoid valve 509. The negative pressure generated by the air pump device 109 is transmitted to the suction block 426 through the waste liquid collection box 510, the fourth connecting pipe 504, and the fourth connecting hole 409, and the waste liquid is sucked into the collection box.

[0065] Please refer to the above as well. Figures 1 to 11 In one specific embodiment of this application, the bottom of the mounting sleeve 410 is sealed and fixedly connected with a fixed blow-out box 428 and a fixed suction box 429 arranged in a semi-circular shape. The fixed blow-out box 428 and the fixed suction box 429 surround the outside of the working turntable 411. The fixed blow-out box 428 and the fixed suction box 429 are arranged sequentially along the rotation direction of the damping cloth polishing pad 105. The two sides of the mounting sleeve 410 are fixedly installed with a fixed blow-out pipe 430 and a fixed suction pipe 431. One end of the fixed blow-out pipe 430 is sealed and connected to the fixed blow-out box 428, and the fixed suction pipe 431 is sealed and connected to the fixed suction box 429. The other end of the fixed blow-out pipe 430 is sealed and connected to the first connecting pipe 501 through a three-way pipe, and the other end of the fixed suction pipe 431 is sealed and connected to the fourth connecting pipe 504 through a three-way pipe.

[0066] During operation, the fixed blow-out box 428 and the fixed suction box 429 constitute a static cleaning system, which works in conjunction with the dynamic cleaning function on the rotating work turntable 411.

[0067] The continuously rotating damping cloth polishing pad 105 first moves to the area below the fixed blow-off box 428. The fixed blow-off box 428 is connected to the first connecting pipe 501 via the fixed blow-off pipe 430 and the three-way pipe, thereby continuously receiving positive pressure gas from the air pump device 109 to perform a large-area, stable secondary purging on the polishing pad surface below, initially removing residues. Subsequently, this area moves to the area below the rotating work turntable 411 for dynamic processing. Finally, it exits through the area below the fixed suction box 429. When this area moves to the area below the fixed suction box 429, the fixed suction box 429 is connected to the fourth connecting pipe 504 via the fixed suction pipe 431 and the three-way pipe, continuously utilizing the negative pressure generated by the air pump device 109 to perform a large-area secondary suction on the surface that has undergone secondary purging, ensuring that waste liquid and debris are thoroughly removed. In this way, the fixed static cleaning system and the rotating dynamic cleaning system complement each other, significantly expanding the effective coverage area and cleanliness of a single cleaning operation, and improving the overall finishing efficiency and effect.

[0068] Please refer to the above as well. Figures 1 to 11In one specific embodiment of this application, the scraping guide assembly 600 includes a scraping guide strip 601, which is fixedly installed on the bottom surface of the arc plate 111. The bottom surface of the scraping guide strip 601 is provided with a scraper portion 602 that is in contact with the surface of the damping cloth polishing pad 105 along its length direction. The interior of the scraping guide strip 601 is provided with a drainage groove 603 corresponding to the scraper portion 602 along its length direction.

[0069] During operation, as the damping cloth polishing pad 105 rotates, the cutting fluid and rinsing waste fluid on its surface also rotate. At this time, the scraping guide strip 601 fixed to the bottom of the arc plate 111, with its scraper portion 602 tightly adhering to the surface of the damping cloth polishing pad 105, forms a continuous physical barrier. This barrier can effectively scrape off and block liquids and solid particles from crossing its position, thereby preventing them from flowing to the inner area of ​​the arc plate 111 and protecting the working environment of the detection device 112 and trimming assembly 400 located on the inner side from contamination and interference. At the same time, the liquid blocked by the scraper portion 602 will enter the drainage groove 603 opened inside the scraping guide strip 601 under its own flow and rotation. The drainage groove 603 extends along the length of the scraping guide strip 601, which can guide the collected liquid in an orderly manner to the outer side of the arc plate 111 for discharge, thereby isolating the used cutting fluid from the working area and guiding it to the other side, ensuring that the subsequent polishing area can have the auxiliary effect of cutting fluid.

[0070] Please refer to the above as well. Figures 1 to 11 In one specific embodiment of this application, the detection device 112 includes a surface topography sensor for real-time measurement of the surface of the damping cloth polishing pad 105 during the finishing process. The surface topography sensor is one of a confocal white light interferometer, a laser triangulation sensor, a spectral confocal sensor, or an optical profilometer. Its measuring probe is oriented at a certain angle toward the surface of the damping cloth polishing pad 105 and avoids the direct working area of ​​the finishing work component, but the measuring spot can cover the area in front of the finishing position. The surface topography sensor is electrically connected to the control system and transmits the collected surface topography signal to the data processing module of the control system in real time. The control system can obtain the surface cleanliness index of the damping cloth polishing pad 105 in the detection area in real time by solving and analyzing these signals.

[0071] During operation, the detection device 112, installed inside the arc-shaped plate 111, continuously performs online, non-contact measurements on the surface of the rotating damping cloth polishing pad 105. Its measuring probe is angled towards the polishing pad surface, and its measuring spot covers the area in front of the working position of the trimming assembly 400, thus acquiring surface morphology information before the area is trimmed. Raw signals such as surface height, texture, or spectral reflectance collected in real time by the sensor are synchronously transmitted to the electrically connected control system. The control system's data processing module performs high-speed calculations and analyses on these signals, converting them into quantifiable cleanliness and morphology indicators such as surface roughness, residue coverage area, or microgroove depth. Based on these real-time indicators, the control system compares them with preset process thresholds and generates closed-loop control commands accordingly. It dynamically and precisely adjusts the downward pressure of the lifting drive assembly 200, the rotation speed of the rotary drive assembly 300, and the opening and closing sequence and duration of each solenoid valve in the valve assembly 500. This controls the intensity and time of rinsing, blowing, and scraping, achieving real-time adaptive optimization of the trimming process parameters and ensuring the consistency of the trimming effect and optimal control of the polishing pad surface condition.

[0072] Example 2

[0073] A method for dressing a damping cloth polishing pad, applied to a dressing device for a damping cloth polishing pad according to Example 1, includes the following steps: S1. The lifting arm 103 is driven to rise to a set height by the lifting drive assembly 200, and the arc plate 111 is lifted at the same time, so that the trimming assembly 400 and the scraping guide assembly 600 leave the upper surface of the rotating platform 104. S2. Prepare the workpiece for polishing according to the conventional working process of the grinding and polishing machine 100, including installing the damping cloth polishing pad 105 on the rotating platform 104. S3. Drive the lifting arm 103 to descend to the set height through the lifting drive assembly 200, and at the same time relax the arc plate 111 so that the trimming assembly 400 is suspended above the damping cloth polishing pad 105, and at the same time the scraping guide assembly 600 is attached to the damping cloth polishing pad 105. S4. Start the rotating platform 104 of the grinding and polishing machine 100 to drive the damping cloth polishing pad 105 to rotate. During the operation of the grinding and polishing machine 100, the detection device 112 is used to detect the damping cloth polishing pad 105 in real time. The detection items include the three-dimensional morphology of the surface. S5. Automatically control the rotary drive assembly 300 to start and stop according to the detection results, and at the same time control one or more functions of suction, blowing, rinsing and scraping integrated in the trimming assembly 400 to start and stop according to the detection results.

[0074] During operation, this trimming method achieves a fully automated, real-time feedback-based closed-loop trimming process through the timing control of each step and the coordinated operation of each component.

[0075] First, in steps S1 and S3, the control system precisely controls the lifting arm 103 through the lifting drive component 200, thereby driving the trimming component 400 and the arc plate 111 and the scraping guide component 600 at its bottom to be lifted and lowered synchronously to ensure that the trimming component 400 can be accurately suspended at the starting point of the work before the trimming operation, and that the scraper part 602 of the scraping guide rubber strip 601 can be closely attached to the surface of the damping cloth polishing pad 105, thus creating a physical barrier for subsequent operations.

[0076] In step S4, the rotating platform 104 drives the damping cloth polishing pad 105 to rotate. At the same time, the arc plate 111, which can slide along the second mounting base 102, ensures that the detection device 112 on it is always aligned with the front of the trimming area, and acquires data such as the three-dimensional morphology of the surface in real time and transmits it to the control system.

[0077] The core S5 step forms the core of the closed-loop control: the data processing module of the control system analyzes the detection data in real time to obtain the cleanliness index of the polishing pad surface. Based on this analysis result, the system automatically makes decisions and issues commands to precisely control the start, stop and speed of the rotary drive component 300. At the same time, by controlling the opening and closing of each electrically controlled valve in the valve component 500, it flexibly starts, stops or adjusts the operation intensity and duration of one or more functions such as suction, blowing, rinsing and scraping in the trimming component 400.

[0078] In one specific embodiment of this application, S5 includes: S51. Determine the surface cleanliness of the damping cloth polishing pad 105 based on the three-dimensional morphology data, and classify the surface cleanliness into first-level cleanliness, second-level cleanliness, third-level cleanliness, and fourth-level cleanliness; S52. When the surface cleanliness of the damping cloth polishing pad 105 is at level one cleanliness, the rotary drive assembly 300 is controlled to stop running, and the suction, blowing, rinsing and scraping functions integrated in the dressing assembly 400 are stopped. S53. When the surface cleanliness of the damping cloth polishing pad 105 is at level 2 cleanliness, the rotary drive assembly 300 is started, and the suction and blowing functions integrated in the dressing assembly 400 are activated. S54. When the cleanliness of the surface of the damping cloth polishing pad 105 is level three, the rotary drive component 300 is started, and the suction, blowing and rinsing functions integrated in the dressing component 400 are activated. S55. When the surface cleanliness of the damping cloth polishing pad 105 is level four, the rotary drive assembly 300 is started, and the suction, blowing, rinsing and scraping functions integrated in the dressing assembly 400 are activated.

[0079] During operation, step S5 implements closed-loop control based on real-time detection. Its core working principle is as follows: The control system receives and processes the three-dimensional topography data collected in real-time by the detection device 112, calculates the quantitative indicators of surface cleanliness of the damping cloth polishing pad 105 using a built-in algorithm, and classifies it into four levels accordingly. Subsequently, the system automatically executes the corresponding trimming strategy: When the cleanliness level is determined to be Level 1, it indicates that the surface condition of the polishing pad is good and no trimming is required. The control system then instructs the rotary drive assembly 300 to stop and simultaneously closes all the electrically controlled valves in the valve assembly 500, thereby stopping all functions of suction, blowing, rinsing, and trimming integrated in the trimming assembly 400, and the system enters standby monitoring mode.

[0080] When the surface is determined to be at level 2 cleanliness, it indicates that there are only minor contaminants on the surface. The control system activates the rotary drive assembly 300 to drive the trimming assembly 400 to rotate, and precisely controls the valve assembly 500 to open only the first solenoid valve 505 and the fifth solenoid valve 509, thereby activating the suction and blowing function in the trimming assembly 400. The surface is cleaned by airflow without the need for liquid rinsing or mechanical scraping.

[0081] When the cleanliness level is determined to be level three, it indicates that there are a lot of particulate matter on the surface. Based on the activation of the rotary drive assembly 300, the control system further opens the second electrically controlled valve 506 through the valve assembly 500. While retaining the suction and blowing functions, it activates the flushing function, sprays flushing liquid onto the surface, and blows away and removes the waste liquid through airflow.

[0082] When the cleanliness level is determined to be level four, it indicates that there are hardened deposits or a severe passivation layer on the surface. The control system will execute the most intensive trimming procedure: while starting the rotary drive assembly 300 and maintaining the suction, blowing, and rinsing functions, the pressure medium is controlled by the valve assembly 500 to drive the trimming block 424 downward, starting the trimming function to mechanically scrape the surface to completely restore its surface morphology.

[0083] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A dressing device for a damping cloth polishing pad, characterized in that: The system includes a first mounting base and a second mounting base fixedly mounted on a grinding and polishing machine. A lifting arm is slidably connected to the first mounting base, and a lifting drive assembly, which is throttle-connected to the lifting arm, is mounted on the first mounting base. The lifting arm extends above a rotating platform on the grinding and polishing machine. A damping cloth polishing pad is fixedly mounted on the rotating platform. A rotating seat is rotatably connected to the lifting arm. A bushing is fixedly mounted at the bottom of the rotating seat. A drive shaft is rotatably connected inside the bushing. A rotating drive assembly is fixedly mounted inside the rotating seat and is throttle-connected to the drive shaft. A trimming assembly integrating suction, blowing, rinsing, and scraping functions is mounted at the bottom of the bushing. The trimming assembly is connected to the drive shaft. The dressing assembly is connected by a drive shaft; the dressing assembly is connected to a valve assembly, and the valve assembly is connected to an air pump device and a liquid storage device; an arc-shaped plate is slidably connected to the second mounting base, the arc-shaped plate surrounds the dressing assembly along the radius of the damping cloth polishing pad, a detection device is installed on the inner side of the arc-shaped plate near its top, a scraping guide assembly is fixedly connected to the bottom of the arc-shaped plate, the detection device is electrically connected to a control system, and the control system is electrically connected to the lifting drive assembly, the rotating drive assembly, the valve assembly, and the air pump device; the dressing assembly includes a sealing disc, the sealing disc is centrally fixedly installed at the bottom end of the bushing, and the bottom surface of the sealing disc has a first annular groove and a second annular groove arranged coaxially. The sealing disc has a second annular groove, a third annular groove, and a fourth annular groove. The top surface of the sealing disc has a first connecting hole, a second connecting hole, a third connecting hole, and a fourth connecting hole for connection to the valve assembly. The first connecting hole communicates with the first annular groove, the second connecting hole communicates with the second annular groove, the third connecting hole communicates with the third annular groove, and the fourth connecting hole communicates with the fourth annular groove. A mounting sleeve is fixedly and sealed to the bottom surface of the sealing disc near its outer side. A working disc is rotatably connected inside the mounting sleeve. The working disc is coaxially and fixedly connected to the drive shaft. The top surface of the working disc is slidably and sealed to the bottom surface of the sealing disc. The bottom surface of the working disc has several centrally symmetrically arranged first and second working chambers. The turntable comprises a third working chamber and a fourth working chamber. A first working hole, a second working hole, a third working hole, and a fourth working hole are correspondingly provided on the top surface of the turntable. The first working hole connects the first annular groove to the first working chamber; the second working hole connects the second annular groove to the second working chamber; the third working hole connects the third annular groove to the third working chamber; and the fourth working hole connects the fourth annular groove to the fourth working chamber. A blow-off block is fixedly installed inside the first working chamber, and the blow-off block has a blow-off hole. A rinsing block is fixedly installed inside the second working chamber, and the rinsing block has a rinsing hole. A scraping block is slidably connected inside the third working chamber, and the bottom surface of the scraping block is provided with a scraping blade.A suction block is fixedly installed inside the fourth working chamber, and a suction groove is formed on the suction block; the valve assembly includes a first connecting pipe, a second connecting pipe, a third connecting pipe, and a fourth connecting pipe; the first connecting pipe is sealed and fixedly connected to the first connecting hole, the second connecting pipe is sealed and fixedly connected to the second connecting hole, the third connecting pipe is sealed and fixedly connected to the third connecting hole, and the fourth connecting pipe is sealed and fixedly connected to the fourth connecting hole; a first electrically controlled valve is installed on the first connecting pipe, and the first electrically controlled valve is connected to the positive pressure output end of the air pump device; the bottom of the mounting sleeve is sealed and fixedly connected to... A fixed blow-off box and a fixed suction box are arranged in a semi-circular configuration, surrounding the outer side of the working turntable. The fixed blow-off box and the fixed suction box are sequentially arranged along the rotation direction of the damping cloth polishing pad. Fixed blow-off pipes and fixed suction pipes are fixedly installed on both sides of the mounting sleeve. One end of the fixed blow-off pipe is sealed and connected to the fixed blow-off box, and the fixed suction pipe is sealed and connected to the fixed suction box. The other end of the fixed blow-off pipe is sealed and connected to the first connecting pipe via a T-junction, and the other end of the fixed suction pipe is sealed and connected to the fourth connecting pipe via a T-junction.

2. The dressing device for a damping cloth polishing pad according to claim 1, characterized in that: The lifting drive assembly includes a lifting motor, which is electrically connected to the control system. The output shaft of the lifting motor is driven by a lead screw, which is vertically arranged. A drive plate that is threadedly connected to the lead screw is fixedly connected to the lifting arm.

3. The dressing device for a damping cloth polishing pad according to claim 1, characterized in that: The rotary drive assembly includes a rotary motor, which is electrically connected to the control system. The rotary motor is fixedly installed inside the rotating base. A through hole is provided at the bottom of the rotating base, and the output shaft of the rotary motor passes through the through hole and is coaxially and fixedly connected to the drive shaft.

4. The dressing device for a damping cloth polishing pad according to claim 1, characterized in that: A second electrically controlled valve is installed on the second connecting pipe. The second electrically controlled valve is connected to the liquid output end of the liquid storage device, and the top of the liquid storage device is connected to the positive pressure output end of the air pump device. A third electrically controlled valve and a fourth electrically controlled valve are installed side by side on the third connecting pipe. The third electrically controlled valve is connected to the positive pressure output end of the air pump device, and the fourth electrically controlled valve is connected to the negative pressure input end of the air pump device. A fifth electrically controlled valve is installed on the fourth connecting pipe. The fifth electrically controlled valve is sealed to a waste liquid collection tank, and the waste liquid collection tank is connected to the negative pressure input end of the air pump device. The first electrically controlled valve, the second electrically controlled valve, the third electrically controlled valve, the fourth electrically controlled valve, and the fifth electrically controlled valve are all electrically connected to the control system.

5. The dressing device for a damping cloth polishing pad according to claim 1, characterized in that: The scraping guide assembly includes a scraping guide strip, which is fixedly installed on the bottom surface of the arc plate. The bottom surface of the scraping guide strip has a scraper portion that fits against the surface of the damping cloth polishing pad along its length direction. The interior of the scraping guide strip has a drainage groove corresponding to the scraper portion along its length direction.

6. The dressing device for a damping cloth polishing pad according to claim 1, characterized in that: The detection device includes a surface topography sensor, which is one of a confocal white light interferometer, a laser triangulation sensor, a spectral confocal sensor, or an optical profilometer; its measuring probe is tilted at a non-perpendicular angle toward the surface of the damping cloth polishing pad and avoids the direct working area of ​​the trimming workpiece, but the measuring spot can cover the area in front of the trimming position; the surface topography sensor is electrically connected to the control system.

7. A method for dressing a damping cloth polishing pad, characterized in that, The dressing device applied to the damping cloth polishing pad according to claim 1 includes the following steps: S1. Drive the lifting arm to a set height via the lifting drive assembly, and simultaneously lift the arc plate so that the trimming assembly and scraping guide assembly leave the upper surface of the rotating platform; S2. Prepare the workpiece for polishing according to the standard workflow of the grinding and polishing machine, including installing the damping cloth polishing pad on the rotating platform; S3. Drive the lifting arm to descend to the set height through the lifting drive assembly, while releasing the arc plate, so that the trimming assembly is suspended above the damping cloth polishing pad, and at the same time, the scraping guide assembly is attached to the damping cloth polishing pad; S4. Start the rotating platform of the grinding and polishing machine to drive the damping cloth polishing pad to rotate. During the operation of the grinding and polishing machine, use the detection device to detect the damping cloth polishing pad in real time. The detection items include the three-dimensional morphology of the surface. S5. Automatically control the rotary drive assembly to start and stop according to the detection results, and simultaneously control the start and stop of one or more functions of suction, blowing, rinsing and scraping integrated in the trimming assembly according to the detection results.

8. The method for dressing a damping cloth polishing pad according to claim 7, characterized in that: S5 include: S51. Determine the surface cleanliness of the damping cloth polishing pad based on the three-dimensional morphology data, and classify the surface cleanliness into first-level cleanliness, second-level cleanliness, third-level cleanliness, and fourth-level cleanliness; S52. When the cleanliness of the surface of the damping cloth polishing pad is at level one cleanliness, the rotary drive component is controlled to stop running, and the suction, blowing, rinsing and scraping functions integrated in the trimming component are stopped. S53. When the cleanliness of the surface of the damping cloth polishing pad is level two, the rotary drive component is started, and the suction and blowing functions integrated in the trimming component are activated. S54. When the cleanliness of the surface of the damping cloth polishing pad is level three, the rotary drive component is controlled to start, and the suction, blowing, and rinsing functions integrated in the dressing component are activated. S55. When the cleanliness of the surface of the damping cloth polishing pad is level four, the rotary drive component is started, and the suction, blowing, rinsing and scraping functions integrated in the dressing component are activated.

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