A flatness detection device for integrated circuit substrate processing

Abstract

The present application relates to the technical field of flatness detection, in particular to a flatness detection device for integrated circuit substrate processing, which comprises a detection machine table, a scanning machine beam frame, a detection laser head, a guide base and a reciprocating screw rod, the outer thread of the reciprocating screw rod is sleeved with a ball transmission seat, the outer part of the ball transmission seat is provided with a tool bearing assembly, the tool bearing assembly comprises a bearing rotating seat, a clamping seat and a horizontal stop plate, and the side away from each other of the two horizontal stop plates is provided with a half-turn rotating assembly, the present application realizes the flatness detection of the front and back surfaces of the integrated circuit substrate through the linkage cooperation of the turnover trigger stop block, the turnover drive screw rod and the turnover drive nut seat, the manual turnover operation link is completely saved, the overall detection efficiency is significantly improved, and the problems such as substrate scratching and positioning deviation caused in the manual turnover process are effectively avoided, and the consistency and accuracy of the double-sided detection results are ensured.

Description

Technical Field

[0001] This invention relates to the technical field of flatness testing, and in particular to a flatness testing device for integrated circuit substrate processing. Background Technology

[0002] In the manufacturing process of integrated circuit substrates, the flatness of the substrate surface is a key parameter affecting the quality of subsequent chip mounting and soldering. Therefore, strict flatness testing must be performed on both sides of the substrate. Integrated circuit substrates typically have dedicated process edges for transfer and clamping operations throughout the production process to avoid contact damage to the effective circuit areas on the substrate.

[0003] Currently, laser scanning inspection equipment is commonly used for flatness testing of integrated circuit substrates. The standard layout involves the laser detection head being vertically mounted above the substrate under test, and full-area scanning is achieved by the horizontal movement of the substrate. However, existing equipment generally has the following shortcomings: most inspection equipment does not fully utilize the reserved process edges of the substrate for clamping, but instead directly clamps the effective circuit surface of the substrate, which can easily cause irreversible damage such as circuit scratches and pressure marks during clamping; some equipment that uses process edge clamping design can only complete flatness testing on one side of the substrate. After completing the front side inspection, the operator needs to manually remove the substrate from the process edge clamping mechanism, flip it over, and re-clamp and position it before the back side inspection can be performed. This not only significantly increases the auxiliary time of the inspection process and seriously restricts the overall inspection efficiency, but also the positioning offset caused by re-clamping the process edge will lead to inconsistent inspection benchmarks on both sides, directly affecting the accuracy of the inspection results. A few testing devices with automatic flipping functions usually require additional independent flipping drive units such as motors and cylinders. This not only makes the overall structure of the equipment complex and bulky, and significantly increases the manufacturing and maintenance costs, but also makes the flipping action and the testing motion independent of each other. Additional positioning and calibration steps are required during the connection process, making it difficult to achieve continuous operation of the testing process. Summary of the Invention

[0004] To overcome the shortcomings of the prior art, the present invention provides a flatness detection device for integrated circuit substrate processing.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a flatness detection device for integrated circuit substrate processing, comprising a detection machine base, a scanning machine beam, and a detection laser head. The scanning machine beam is fixedly connected to the outside of the detection machine base, and the detection laser head is disposed outside the scanning machine beam. The detection laser head is used to detect the integrated circuit substrate. A guide base is fixedly connected to the outside of the detection machine base. A groove is provided at the upper end of the guide base. A reciprocating lead screw is rotatably connected inside the groove of the guide base. A drive motor is fixedly connected to one end of the guide base. The output shaft of the drive motor movably passes through the outside of the guide base and is coaxial with one end of the reciprocating lead screw. The fixed connection is driven by a motor that starts to rotate its output shaft and drives a reciprocating screw to rotate inside the groove of the guide base. A ball drive seat is fitted on the external thread of the reciprocating screw. The ball drive seat is located inside the groove of the guide base. The reciprocating screw drives the ball drive seat to slide along the groove of the guide base. The bottom wall of the ball drive seat fits against the inner wall of the groove outside the guide base, thereby limiting its circumferential movement. The reciprocating screw rotates around its own axis to drive the ball drive seat to make it slide in a stable lateral linear reciprocating motion inside the groove outside the guide base. The outside of the ball drive seat is provided with a tooling support assembly for placing an integrated circuit substrate. The tooling support assembly includes a rotating support base, which is fixedly connected to the outside of the ball drive base. Clamping seats are provided on both sides inside the rotating support base. The opposing sides of the two clamping seats are slotted, and the corners of the opposing sides are inclined to guide the process edge of the integrated circuit substrate into the substrate. Horizontal stop plates are fixedly connected to the opposite sides of the two clamping seats. The tooling support assembly also includes a wing-shaped adjusting screw. The lower end of the wing-shaped adjusting screw spirally penetrates the outside of the clamping seat and extends into its interior. The upper end of the wing-shaped adjusting screw is wing-shaped, and the lower end has a T-shaped structure. The clamping base has a movably connected clamping block inside. The clamping block is used to clamp the process edge of the integrated circuit substrate. The clamping block has an adapter groove on its outside. The outline of the adapter groove is adapted to the T-shaped structure at the lower end of the airfoil adjusting screw. The lower end of the airfoil adjusting screw is movably connected inside the adapter groove. By matching the outline of the adapter groove with the T-shaped structure at its lower end, the airfoil adjusting screw is prevented from axially disengaging from the clamping block. When the airfoil adjusting screw is rotated forward, the airfoil adjusting screw rotates downward along the axial direction, driving the clamping block to move downward synchronously within the clamping base, thereby forming a squeezing clamp on the process edge of the integrated circuit substrate.

[0006] In a preferred embodiment of the present invention, a semi-circular rotating assembly is provided on each of the two horizontal stop plates on opposite sides. Each semi-circular rotating assembly includes a tilting drive screw, a rotary bearing, and a bearing connecting shaft. The rotary bearing is fixedly embedded inside the bearing rotating seat, with its outer ring connected to the interior of the bearing rotating seat. The bearing connecting shaft is fixedly connected to the inner ring of the rotary bearing, and rotates within the bearing rotating seat via the rotary bearing. The bearing connecting shaft is fixedly connected to the end of the horizontal stop plate away from the clamping seat, and the clamping seat and the horizontal stop plate rotate within the bearing rotating seat via the bearing connecting shaft. The end of the bearing connecting shaft away from the horizontal stop plate is fixedly connected to the tilting drive screw, and nut guides are provided on both sides of the external surface of the tilting drive screw. The base consists of two nut guide seats, both fixedly connected to the outside of the bearing rotating base. Each of the two nut guide seats has a guide groove on its opposite side, and a guide slider is slidably connected inside each guide groove. A flip drive nut seat is fixedly connected to the opposite side of the two guide sliders. The flip drive nut seat is threaded onto the outside of the flip drive screw. By resisting the flip drive nut seat, it moves between the two nut guide seats. The movement of the flip drive nut seat drives the flip drive screw and causes the bearing connecting shaft to rotate synchronously. Flip trigger blocks are fixedly connected to both sides of the outside of the guide base. The two flip trigger blocks are located on opposite sides of the flip drive nut seats in the two half-circle rotating components, and the flip trigger blocks are correspondingly located on the lower side of the outside of the flip drive nut seat.

[0007] As a preferred embodiment of the present invention, a circumferential positioning component for positioning the rotation angle of the tooling bearing assembly is provided on the outside of the bearing rotating seat. The circumferential positioning component includes an installation slot and two support slots. The installation slot is located on the outside of the bearing rotating seat, and the two support slots are respectively located on both sides of the outside of the bearing rotating seat. Limiting transverse slots are provided on both sides inside the installation slot. A horizontal positioning clamp is slidably connected inside each support slot. The side of the horizontal positioning clamp near the horizontal stop plate is open. The horizontal positioning clamp is engaged with the outside of the horizontal stop plate. A rack connecting plate is slidably connected inside each limiting transverse slot. The two rack connecting plates pass through the two limiting transverse slots and are fixedly connected to the two horizontal positioning clamps. A transmission rack plate is fixedly connected to the end of each limiting transverse slot away from the horizontal positioning clamp. The opposing side of the two transmission rack plates is toothed. The two transmission rack plates are arranged in a mirror-image staggered manner with the longitudinal central axis of the length direction of the installation slot as the symmetry reference. The two transmission rack plates have identical structural dimensions and are located on the left and right sides of the central axis. Each of the two transmission rack plates is fixedly connected to the end of the two rack connecting plates away from the horizontal positioning clamp. The two rack connecting plates are paired mating parts of the same specification. Their structural forms and end connection interfaces are completely identical. Only the axial length is adjusted according to the staggered installation spacing of the corresponding transmission rack plates to match the installation distance difference under the mirror symmetrical layout. A gear mounting shaft is rotatably connected to the center inside the mounting slot. A transmission gear is fixedly connected to the outside of the gear mounting shaft. The transmission gear meshes with the two transmission rack plates on both sides. The rotation of the transmission gear drives the two transmission rack plates to move laterally towards or away from each other inside the mounting slot. A return torsion spring is movably sleeved on the outside of the gear mounting shaft. The two ends of the return torsion spring are fixedly connected to the side of the transmission gear facing the bottom wall of the mounting slot. By rotating the transmission gear, it causes the return torsion spring to contract, and the contraction elastic force of the return torsion spring drives the transmission gear to reset.

[0008] As a preferred embodiment of the present invention, transmission components for adjusting the circumferential positioning components are provided on both sides of the outer side of the guide base. Each transmission component includes a fixed base, which is fixedly connected to the upper part of the outer side of the guide base. A sliding cavity is formed inside the fixed base, and a trigger plate is movably connected inside the sliding cavity. One end of the trigger plate away from the inside of the sliding cavity extends through the cavity and outward from the fixed base. A trigger tooth plate is fixedly connected to the other end of the trigger plate away from the inside of the sliding cavity. The trigger tooth plate is positioned above the transmission rack plate. When the rotating bearing seat moves as a whole, driving the mounting slot and causing the transmission gear to move synchronously, the teeth on the end face of the trigger tooth plate contact the transmission gear and perform [operation / action]. In the meshing transmission, it should be noted that the two trigger teeth plates in the two circumferential positioning components are respectively located on the left and right sides of the two trigger plates facing each other, arranged in an alternating configuration. A limiting sleeve plate is movably connected inside the sliding cavity. The limiting sleeve plate is fixedly sleeved on the outside of the trigger plate. The movement of the limiting sleeve plate inside the sliding cavity limits the lateral movement distance of the trigger plate inside the sliding cavity, preventing the trigger plate from dislodging from the limiting sleeve plate during lateral movement. A return spring is fixedly connected to the end of the trigger plate away from the trigger teeth plate. The end of the return spring away from the trigger plate is fixedly connected to the inner wall of the sliding cavity. The return spring provides elastic force to the trigger plate, keeping the trigger plate in its initial elastically open position inside the sliding cavity.

[0009] Compared with the prior art, the beneficial effects that this invention can achieve are: This invention, through the coordinated operation of the flip trigger stop, flip drive screw, and flip drive nut seat, can automatically and accurately flip the integrated circuit substrate after the front side inspection is completed. It eliminates the need for an additional independent flip drive unit, resulting in a compact structure and stable and reliable operation. This automatic flip function is seamlessly integrated with the lateral reciprocating inspection motion, enabling the flatness inspection of both sides of the integrated circuit substrate to be completed in a single clamping operation. This completely eliminates the manual flipping operation, significantly improving the overall inspection efficiency and effectively avoiding problems such as substrate scratches and positioning misalignment that may occur during manual flipping, thus ensuring the consistency and accuracy of the double-sided inspection results.

[0010] This invention employs a process edge clamping mechanism that combines an airfoil adjusting screw with a clamping block. The T-shaped structure at the lower end of the airfoil adjusting screw with the anti-disengagement design of the clamping block's adapter groove enables rapid clamping and stable fixation of integrated circuit substrates, ensuring continuous and stable transmission of clamping force. This effectively prevents substrate displacement or shaking during testing. Simultaneously, the inclined guiding structure at the corners of the clamping seat facilitates rapid alignment and insertion of the integrated circuit substrate's process edge, significantly improving clamping efficiency.

[0011] This invention employs a reciprocating lead screw and ball drive seat combination structure, along with a guide base groove for circumferentially limiting the ball drive seat, to achieve uniform lateral reciprocating motion of the bearing rotating seat. This eliminates radial movement during transmission, ensures consistency of the detection path and smoothness of substrate movement, effectively guarantees the detection accuracy of the detection laser head, and allows the entire lateral detection motion of the substrate to be completed with only a single drive motor. This simplifies the transmission system structure and reduces equipment failure rate and operating costs.

[0012] This invention utilizes a purely mechanical linkage between a transmission component and a circumferential positioning component to automatically lock the clamping seat circumferentially during the horizontal movement of the integrated circuit substrate. This effectively eliminates circumferential wobbling of the clamping seat, ensuring the integrated circuit substrate maintains a stable horizontal posture during inspection and guaranteeing laser inspection accuracy. Simultaneously, it automatically unlocks the circumferentially before the integrated circuit substrate reaches the flipping position, creating conditions for subsequent automatic flipping actions. Furthermore, precise timing design ensures that the unlocking and flipping actions are seamlessly connected, avoiding action conflicts. The entire positioning and unlocking process requires no additional independent drive unit; it can be completed solely using the lateral movement power of the integrated circuit substrate. The structure is simple and compact, and the operation is stable and reliable. Combined with the built-in reset mechanism, continuous cyclic operation can be achieved, further improving the automation level and operating efficiency of the inspection equipment. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the testing machine of the present invention; Figure 2 This is a schematic diagram of the structure of the ball drive seat of the present invention; Figure 3 This is a schematic diagram of the structure of the clamping base after it has been flipped over; Figure 4 This is a schematic diagram of the structure of the rotating support of the present invention; Figure 5 This is a schematic diagram of the structure of the flip drive screw of the present invention; Figure 6 This is a schematic diagram of the clamping block of the present invention; Figure 7 This is a schematic diagram of the mounting slot structure of the present invention; Figure 8 This is a schematic diagram of the transmission rack plate of the present invention; Figure 9 This is a schematic diagram of the transmission gear of the present invention; Figure 10 For the present invention Figure 1 A magnified schematic diagram of the local structure at point A; Figure 11 This is a schematic diagram of the trigger plate structure of the present invention.

[0014] The components include: 10. Inspection machine base; 11. Scanner beam; 12. Inspection laser head; 13. Guide base; 14. Drive motor; 15. Ball bearing drive seat; 16. Reciprocating lead screw; 17. Tilting trigger stop; 20. Bearing rotating seat; 21. Clamping seat; 22. Airfoil adjusting screw; 23. Clamping block; 24. Horizontal stop plate; 25. Adaptor groove; 30. Tilting drive lead screw; 31. Rotary bearing; 32. Bearing connecting shaft; 33. Tilting drive... 34. Moving nut seat; 35. Nut guide seat; 36. Guide groove; 47. Guide slider; 48. Mounting slot; 49. Transmission rack plate; 40. Rack connecting plate; 41. Limiting transverse slot; 42. Horizontal positioning clamp; 43. Support slot; 44. Transmission gear; 45. Gear mounting shaft; 46. Return torsion spring; 57. Fixed base; 58. Trigger plate; 59. Trigger toothed plate; 50. Sliding cavity; 51. Limiting sleeve; 52. Return spring. Detailed Implementation

[0015] To make the technical means, creative features, and achieved objectives and effects of this invention easier to understand, the invention is further described below with reference to specific embodiments. However, the following embodiments are merely preferred embodiments of this invention and not all of them. Other embodiments obtained by those skilled in the art based on the embodiments described herein without creative effort are all within the protection scope of this invention. Unless otherwise specified, the experimental methods in the following embodiments are conventional methods, and the materials and reagents used in the following embodiments are commercially available unless otherwise specified.

[0016] Example: Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6As shown, a flatness inspection device for integrated circuit substrate processing includes an inspection platform 10, a scanning beam 11, and an inspection laser head 12. The scanning beam 11 is fixedly connected to the outside of the inspection platform 10, and the inspection laser head 12 is disposed outside the scanning beam 11. The inspection laser head 12 is used to inspect the integrated circuit substrate. A guide base 13 is fixedly connected to the outside of the inspection platform 10. The upper end of the guide base 13 has a groove. A reciprocating lead screw 16 is rotatably connected inside the groove of the guide base 13. A drive motor 14 is fixedly connected to one end of the guide base 13. The output shaft of the drive motor 14 movably passes through the outside of the guide base 13 and is coaxially fixed to one end of the reciprocating lead screw 16. The drive motor 14 is started, causing its output shaft to rotate and driving the reciprocating screw 16 to rotate inside the groove of the guide base 13. A ball drive seat 15 is threaded onto the external part of the reciprocating screw 16, and the ball drive seat 15 is confined within the groove of the guide base 13. Driven by the reciprocating screw 16, the ball drive seat 15 slides along the groove of the guide base 13. The bottom wall of the ball drive seat 15 fits against the inner wall of the groove outside the guide base 13, thus circumferentially limiting its movement. The reciprocating screw 16 rotates around its own axis, driving the ball drive seat 15 to perform stable transverse linear reciprocating sliding within the groove outside the guide base 13. The external part of the ball drive seat 15 is provided with a space for placing integrated circuits. The tooling support assembly for the circuit board includes a rotating support 20, which is fixedly connected to the outside of the ball drive seat 15. Clamping seats 21 are provided on both sides inside the rotating support 20. The opposing sides of the two clamping seats 21 are slotted, and the corners of the opposing sides of the two clamping seats 21 are inclined to guide the process edge of the integrated circuit board into the circuit. Horizontal stop plates 24 are fixedly connected to the opposite sides of the two clamping seats 21. The tooling support assembly also includes a wing-shaped adjusting screw 22. The lower end of the wing-shaped adjusting screw 22 spirally penetrates the outside of the clamping seat 21 and extends into its interior. The upper end of the wing-shaped adjusting screw 22 is wing-shaped, and the lower end is T-shaped. The clamping base 21 has a clamping block 23 movably connected inside. The clamping block 23 is used to clamp the process edge of the integrated circuit substrate. The clamping block 23 has an adapter groove 25 on its outside. The outline of the adapter groove 25 is adapted to the T-shaped structure at the lower end of the airfoil adjusting screw 22. The lower end of the airfoil adjusting screw 22 is movably connected inside the adapter groove 25. By matching the outline of the adapter groove 25 with the T-shaped structure at its lower end, the airfoil adjusting screw 22 is prevented from axially separating from the clamping block 23. When the airfoil adjusting screw 22 is rotated in the forward direction, the airfoil adjusting screw 22 rotates downward along the axial direction, driving the clamping block 23 to move downward synchronously within the clamping base 21, forming a squeezing clamp on the process edge of the integrated circuit substrate.

[0017] The integrated circuit substrate is placed inside the carrier rotating seat 20, with the process edges on both sides of the integrated circuit substrate positioned below the two clamping blocks 23 and placed inside the clamping seats 21 on both sides. The wing-shaped adjusting screw 22 is rotated forward so that its lower end is screwed downward along the thread. The wing-shaped adjusting screw 22 pushes the adapter groove 25 downward and drives the clamping blocks 23 to move downward synchronously, forming a squeezing clamp on the process edges of the integrated circuit substrate. At this time, the integrated circuit substrate is fixed inside the carrier rotating seat 20.

[0018] Then, the drive motor 14 is started, and its output shaft drives the reciprocating screw 16 to rotate. The rotation of the reciprocating screw 16 drives the ball transmission seat 15 to move forward along the groove of the guide base 13. The ball transmission seat 15 simultaneously drives the rotating support seat 20 and the fixed integrated circuit substrate to move at a constant speed under the detection laser head 12. The detection laser head 12 detects the surface of the integrated circuit substrate, thereby completing the flatness detection of the integrated circuit substrate surface.

[0019] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6As shown, each of the two horizontal stop plates 24 has a semi-circular rotating assembly on its opposite side. Each semi-circular rotating assembly includes a tilting drive screw 30, a rotary bearing 31, and a bearing connecting shaft 32. The rotary bearing 31 is fixedly embedded inside the bearing rotating seat 20, and its outer ring is connected to the inside of the bearing rotating seat 20. The bearing connecting shaft 32 is fixedly connected to the inner ring of the rotary bearing 31. The bearing connecting shaft 32 rotates inside the bearing rotating seat 20 via the rotary bearing 31. The bearing connecting shaft 32 is fixedly connected to the end of the horizontal stop plate 24 away from the clamping seat 21, and the clamping seat 21 and the horizontal stop plate 24 rotate inside the bearing rotating seat 20 via the bearing connecting shaft 32. The bearing connecting shaft 32 is located away from the horizontal stop plate 24. One end of 4 is fixedly connected to the flip drive screw 30. Nut guide seats 34 are provided on both sides of the flip drive screw 30. Both nut guide seats 34 are fixedly connected to the outside of the bearing rotating seat 20. Guide grooves 35 are provided on the opposite sides of the two nut guide seats 34. A guide slider 36 is slidably connected inside each guide groove 35. A flip drive nut seat 33 is fixedly connected to the opposite side of the two guide sliders 36. The flip drive nut seat 33 is threaded onto the outside of the flip drive screw 30. By pushing and flipping the flip drive nut seat 33, it moves between the two nut guide seats 34. The movement of the flip drive nut seat 33 drives the flip drive screw 30 and causes the bearing connecting shaft 32 to rotate synchronously. The guide base 13 is located outside... Both sides of the rotating assembly are fixedly connected with a flip trigger stop 17. The two flip trigger stops 17 are respectively located on opposite sides of the flip drive nut seat 33 in the two half-circle rotating assemblies, and the flip trigger stops 17 are correspondingly located on the lower side of the outside of the flip drive nut seat 33. The flip drive screws 30 in the two half-circle rotating assemblies have the same thread direction on the same axis. The outer surface of the flip drive screw 30 is machined with an effective thread section, and its axial length corresponds exactly to the stroke required for the flip drive nut seat 33 to drive the flip drive screw 30 to rotate 180°. The flip drive nut seat 33 adopts a ball nut structure, and its internal balls roll along the helical raceway of the flip drive screw 30. When the flip drive nut seat 33 is subjected to axial thrust, the balls roll along the helical raceway of the flip drive screw 30. The meshing transmission with the helical raceway converts its axial linear motion into the circumferential rotation of the flip drive screw 30. When the flip drive nut seat 33 moves to the end of the effective thread section, the flip drive screw 30 is mechanically and rigidly stopped, preventing it from continuing to rotate. This achieves a precise 180° fixed-angle rotation. While the flip drive nut seat 33 on one side moves and drives the flip drive screw 30 to rotate, the integrated circuit substrate drives the flip drive screw 30 on the other side to rotate synchronously, thereby driving the flip drive nut seat 33 on the other side to move in the same direction. It should be noted that when the flip drive nut seat 33 on one side is away from the outer surface of the bearing rotating seat 20, the flip drive nut seat 33 on the other side is close to the bearing rotating seat 20.Therefore, when the flip drive nut seat 33 rotates, because the flip drive screw 30 is coaxially threaded, one side of the flip drive nut seat 33 moves closer to the bearing rotating seat 20, while the other side moves away from the bearing rotating seat 20, thus completing the reciprocating flipping operation.

[0020] When the rotating support 20 drives the integrated circuit substrate to complete the front flatness detection below the detection laser head 12 and moves laterally to the end of the guide base 13 away from the drive motor 14, the rotating support 20 simultaneously drives the flip drive screw 30 and the flip drive nut seat 33 to move towards the flip trigger stop 17 until the lower end face of the flip drive nut seat 33 is tightly abutted against the end face of the flip trigger stop 17. At this time, the flip trigger stop 17 applies an axial thrust to the flip drive nut seat 33, pushing the flip drive nut seat 33 to move along the axis of the flip drive screw 30 towards the drive motor 14.

[0021] During the movement of the flip drive nut seat 33, the guide sliders 36 fixedly connected on both sides slide synchronously along the guide grooves 35 on the nut guide seat 34. The sliding cooperation between the guide grooves 35 and the guide sliders 36 limits the circumferential movement of the flip drive nut seat 33, ensuring that the flip drive nut seat 33 can only make stable linear movements in the axial direction between the two nut guide seats 34. Since the flip drive nut seat 33 is circumferentially limited and cannot rotate, its axial movement will be converted into the rotational movement of the flip drive screw 30, which in turn drives the bearing connecting shaft 32 to rotate synchronously under the support of the rotating bearing 31. The bearing connecting shaft 32 drives the clamping seat 21 and the clamped integrated circuit substrate to rotate 180° as a whole through the horizontal stop plate 24, thus completing the automatic flipping of the integrated circuit substrate.

[0022] Subsequently, the drive motor 14 rotates in the opposite direction, driving the rotating support 20 and the flipped integrated circuit substrate to move in the opposite direction to the initial position. When it passes under the detection laser head 12 again, the detection laser head 12 completes the flatness detection of the back of the integrated circuit substrate.

[0023] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 , Figure 10 and Figure 11As shown, the outer side of the rotating support 20 is provided with a circumferential positioning component for positioning the rotation angle of the tooling support assembly. The circumferential positioning component includes a mounting slot 40 and two support slots 45. The mounting slot 40 is opened on the outside of the rotating support 20, and the two support slots 45 are respectively opened on both sides of the outside of the rotating support 20. Limiting transverse slots 43 are opened on both sides inside the mounting slot 40. A horizontal positioning clamp 44 is slidably connected inside each support slot 45. The side of the horizontal positioning clamp 44 near the horizontal stop plate 24 is open. The horizontal positioning clamp 44 is locked. Outside the horizontal stop plate 24, each limiting transverse slot 43 is slidably connected to a rack connecting plate 42. Two rack connecting plates 42 pass through two limiting transverse slots 43 and are fixedly connected to two horizontal positioning clamps 44. A transmission rack plate 41 is fixedly connected to the end of each limiting transverse slot 43 away from the horizontal positioning clamp 44. The opposing sides of the two transmission rack plates 41 are toothed. The two transmission rack plates 41 are arranged in a mirror-like staggered pattern with the longitudinal central axis of the mounting slot 40 as a symmetrical reference. The structural dimensions of the two transmission rack plates 41 are complete. The two transmission rack plates 41 are completely identical, located on the left and right sides of the central axis. Each rack plate 42 is fixedly connected to one end of the rack connecting plate 42 away from the horizontal positioning clamp 44. The two rack connecting plates 42 are paired mating parts of the same specification, with identical structures and end connections. Only their axial lengths are adjusted to match the staggered installation spacing of the corresponding transmission rack plates 41, thus accommodating the installation distance differences under a mirror-symmetric layout. A gear mounting shaft 47 is rotatably connected to the center inside the mounting slot 40. A transmission gear 46 is fixedly connected to the outside of the gear mounting shaft 47. 6 is meshed with the two transmission rack plates 41 on both sides. The transmission gear 46 is located between the two transmission rack plates 41. The rotation of the transmission gear 46 drives the two staggered transmission rack plates 41 to move laterally towards or away from each other inside the mounting slot 40. The gear mounting shaft 47 is externally fitted with a return torsion spring 48. The two ends of the return torsion spring 48 are respectively fixedly connected to the side of the transmission gear 46 facing the bottom wall of the mounting slot 40. By rotating the transmission gear 46, it causes the return torsion spring 48 to contract, and the contraction elastic force of the return torsion spring 48 drives the transmission gear 46 to reset.

[0024] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 , Figure 9 , Figure 10 and Figure 11As shown, transmission components for adjusting the circumferential positioning components are provided on both sides of the guide base 13. Each transmission component includes a fixed base 50, which is fixedly connected to the upper part of the guide base 13. A sliding cavity 53 is opened inside the fixed base 50. A trigger plate 51 is movably connected inside the sliding cavity 53. One end of the trigger plate 51 away from the inside of the sliding cavity 53 extends through the cavity and outward from the fixed base 50. A trigger toothed plate 52 is fixedly connected to the other end of the trigger plate 51 away from the sliding cavity 53. The trigger toothed plate 52 is positioned above the transmission rack plate 41. When the bearing rotating seat 20 moves as a whole, driving the mounting slot 40 and causing the transmission gear 46 to move synchronously, the teeth on the end face of the trigger toothed plate 52 contact and mesh with the transmission gear 46, requiring... The two trigger teeth 52 in the two circumferential positioning components are respectively located on opposite sides of the two trigger plates 51, arranged in an alternating pattern. A limiting sleeve 54 is movably connected inside the sliding cavity 53. The limiting sleeve 54 is fixedly sleeved on the outside of the trigger plate 51. The movement of the limiting sleeve 54 inside the sliding cavity 53 limits the lateral movement distance of the trigger plate 51 inside the sliding cavity 53, preventing the trigger plate 51 from coming out of the limiting sleeve 54 during lateral movement. A return spring 55 is fixedly connected to the end of the trigger plate 51 away from the trigger teeth 52. The end of the return spring 55 away from the trigger plate 51 is fixedly connected to the inner wall of the sliding cavity 53. The return spring 55 provides elastic force to the trigger plate 51, keeping the trigger plate 51 in the initial elastically open position inside the sliding cavity 53.

[0025] After the integrated circuit substrate is placed in the rotating support 20 and its process edge is clamped by the clamping seat 21, the drive motor 14 is started. The drive motor 14 drives the reciprocating lead screw 16 to rotate, which in turn drives the ball transmission seat 15 to move laterally along the guide base 13. At this time, the initial position of the rotating support 20 is located on the side of the guide base 13 close to the drive motor 14. During the movement of the rotating support 20, the transmission gear 46 moves laterally synchronously. When the transmission gear 46 moves to the point where it meshes with the teeth of the trigger tooth plate 52 on that side, the reset torque is applied. Under the restoring force of the spring 48, the transmission gear 46 rotates, which in turn drives the transmission rack plates 41 on both sides to move towards each other. The transmission rack plates 41 drive the two horizontal positioning clamps 44 to move towards each other synchronously through the rack connecting plate 42, so that the two horizontal positioning clamps 44 are respectively engaged with the outside of the horizontal stop plates 24 on both sides. By locking the horizontal stop plates 24 circumferentially through the horizontal positioning clamps 44, the overall circumferential position of the two clamping seats 21 is fixed, ensuring that the clamping seats 21 clamp the integrated circuit substrate and make stable horizontal lateral movement.

[0026] As the rotating support 20 continues to move, it causes the transmission gear 46 to disengage from the trigger tooth plate 52 on one side. Then, it continues to move the transmission gear 46 until it contacts and engages with the trigger tooth plate 52 on the other side. The rotation of the transmission gear 46 causes the transmission rack plates 41 on both sides to move in opposite directions. This, in turn, causes the two horizontal positioning clamps 44 to move in opposite directions synchronously through the rack connecting plate 42. This disengages the horizontal positioning clamps 44 from the horizontal stop plates 24 on both sides. After the transmission gear 46 engages with the trigger tooth plate 52 on the other side, as the rotating support 20 continues to move, the transmission gear 46 rotates and causes the return torsion spring 48 to generate torque compression. When the horizontal positioning clamps 44 on both sides move in opposite directions to fit against the inner wall of the limiting transverse groove 43, the transmission gear 46 can no longer rotate and forms a rigid meshing connection with the trigger tooth plate 52.

[0027] As the rotating support 20 continues to move, the rigidly meshing transmission gear 46 and trigger tooth plate 52 drive the trigger plate 51 to retract into the sliding cavity 53 inside the fixed base 50. At the same time as the trigger plate 51 retracts, the return spring 55 is compressed. Through timing design, this device ensures that the end face of the flip drive nut seat 33 only contacts the surface of the flip trigger stop 17 after the two horizontal positioning clamps 44 are completely separated from the horizontal stop plate 24. As the rotating support 20 continues to move, the flip trigger stop 17 applies an axial thrust to the flip drive nut seat 33. When the trigger plate 51 moves to the point where the return spring 55 is compressed to a rigid state, the flip drive nut seat 33, under the continuous thrust of the flip trigger stop 17, drives the flip drive screw 30 to rotate precisely 180°.

[0028] The flip drive screw 30 drives the clamping seat 21 to automatically flip the clamped integrated circuit substrate 180° simultaneously through the rotary bearing 31, the bearing connecting shaft 32 and the horizontal stop plate 24. Then the drive motor 14 keeps running, and the reciprocating screw 16 drives the ball transmission seat 15 to move the bearing rotating seat 20 back to the initial position. When the integrated circuit substrate passes under the detection laser head 12 again, the back flatness is detected. When the bearing rotating seat 20 returns to the initial position, the detected integrated circuit substrate can be removed and the next substrate can be detected.

[0029] Working principle: In use: First, place the integrated circuit substrate into the carrier rotating seat 20, so that the two process edges are positioned below the clamping blocks 23 in the clamping seat 21. Rotate the wing-shaped adjusting screw 22 in the forward direction to drive the clamping blocks 23 to move downward, thereby completing the extrusion clamping and fixing of the process edges of the integrated circuit substrate.

[0030] The second step is to start the drive motor 14, which drives the bearing rotating seat 20 to move laterally from left to right through the reciprocating screw 16 and the ball transmission seat 15. During the movement, the transmission gear 46 meshes with the trigger tooth plate 52 on the same side. Under the action of the reset torsion spring 48, the horizontal positioning clamps 44 on both sides move towards each other and engage with the horizontal stop plate 24, thereby achieving circumferential locking of the clamping seat 21. The integrated circuit substrate passes under the detection laser head 12 at a uniform speed to complete the front flatness detection.

[0031] In the third step, the rotating support 20 continues to move. After the transmission gear 46 disengages from the trigger tooth plate 52 on this side, it meshes with the trigger tooth plate 52 on the other side, causing the horizontal positioning clamp 44 to move in opposite directions and disengage from the horizontal stop plate 24, thus completing the circumferential unlocking. When the horizontal positioning clamp 44 is in contact with the inner wall of the limiting transverse groove 43, the transmission gear 46 and the trigger tooth plate 52 form a rigid meshing connection.

[0032] In the fourth step, the bearing rotating seat 20 continues to move, and through rigid engagement, it drives the trigger plate 51 to retract and compress the reset spring 55. After the horizontal positioning clamp 44 is fully unlocked, the flip drive nut seat 33 abuts against the flip trigger stop 17 and moves along the axial direction, driving the flip drive screw 30 to rotate precisely 180°, completing the automatic flipping of the integrated circuit substrate. The drive motor 14 continues to run, driving the bearing rotating seat 20 to reset and move. The integrated circuit substrate passes under the detection laser head 12 again, completing the back flatness detection.

[0033] Fifth step: After the rotating support 20 returns to its initial position, rotate the wing-shaped adjusting screw 22 in the opposite direction to loosen the clamping block 23, remove the tested integrated circuit substrate, and then proceed with the testing of the next substrate.

[0034] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited thereto. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention.

Claims

1. A flatness inspection device for integrated circuit substrate processing, comprising an inspection table (10), a scanning beam (11), and an inspection laser head (12), characterized in that, The testing machine (10) is fixedly connected to a guide base (13). The upper end of the guide base (13) is provided with a groove. A reciprocating screw (16) is rotatably connected inside the groove of the guide base (13). A drive motor (14) is fixedly connected to one end of the guide base (13). The output shaft of the drive motor (14) is coaxially fixedly connected to one end of the reciprocating screw (16). A ball drive seat (15) is threaded on the outside of the reciprocating screw (16). A tooling support assembly for placing integrated circuit substrates is provided on the outside of the ball drive seat (15). The tooling bearing assembly includes a bearing rotating seat (20), which is fixedly connected to the outside of the ball transmission seat (15). Both sides of the bearing rotating seat (20) are provided with clamping seats (21). A horizontal stop plate (24) is fixedly connected to the side of the two clamping seats (21) that is far apart. A half-turn rotating assembly is provided on the side of the two horizontal stop plates (24) that is far apart. Each half-turn rotating assembly includes a flip drive screw (30), a rotary bearing (31), a bearing connecting shaft (32), and a flip drive nut seat (33). The rotary bearing (31) is fixedly embedded inside the bearing rotating seat (20). The bearing connecting shaft (32) is fixedly connected to the inner ring of the rotary bearing (31). The bearing connecting shaft (32) is fixedly connected to the end of the horizontal stop plate (24) away from the clamping seat (21). The end of the bearing connecting shaft (32) away from the horizontal stop plate (24) is fixedly connected to the flip drive screw (30). The flip drive nut seat (33) is threaded onto the outside of the flip drive screw (30). Both sides of the guide base (13) are fixedly connected with flip trigger blocks (17). The two flip trigger blocks (17) are respectively located on opposite sides of the flip drive nut seat (33) in the two half-circle rotating components, and the flip trigger blocks (17) are respectively located on the lower side of the flip drive nut seat (33). The flip drive screws (30) in the two half-circle rotating components have the same thread direction on the same axis. The outer surface of the flip drive screw (30) is machined with an effective thread section, and its axial length is exactly the stroke required for the flip drive nut seat (33) to drive the flip drive screw (30) to rotate 180°.

2. The flatness detection device for integrated circuit substrate processing according to claim 1, characterized in that, The tooling support assembly also includes an airfoil adjusting screw (22), the lower end of which spirally penetrates the outside of the clamping seat (21) and extends into its interior. The lower end is configured as a T-shaped structure. A clamping block (23) is movably connected inside the clamping seat (21). An adapter groove (25) is provided on the outside of the clamping block (23). The lower end of the airfoil adjusting screw (22) is movably connected inside the adapter groove (25).

3. The flatness detection device for integrated circuit substrate processing according to claim 1, characterized in that, The bearing rotating seat (20) is provided with a circumferential positioning component for positioning the rotation angle of the tooling bearing assembly. The circumferential positioning component includes an installation slot (40) and two support slots (45). The installation slot (40) is opened on the outside of the bearing rotating seat (20), and the two support slots (45) are respectively opened on both sides of the outside of the bearing rotating seat (20). Limiting transverse slots (43) are opened on both sides inside the installation slot (40). A horizontal positioning clamp (44) is slidably connected inside each support slot (45). A rack connecting plate (42) is slidably connected inside each limiting transverse slot (43). The two rack connecting plates (42) pass through the two limiting transverse slots (43) and are fixedly connected to the two horizontal positioning clamps (44). A transmission rack plate (41) is fixedly connected to the end of the two limiting transverse slots (43) away from the horizontal positioning clamps (44). The opposing side of the two transmission rack plates (41) is set as teeth.

4. The flatness detection device for integrated circuit substrate processing according to claim 3, characterized in that, The two transmission rack plates (41) are arranged in a mirror-like staggered manner with the longitudinal central axis of the mounting slot (40) as the symmetrical reference. The structural dimensions of the two transmission rack plates (41) are completely identical, and they are located on the left and right sides of the central axis. The two transmission rack plates (41) are respectively fixedly connected to the end of the two rack connecting plates (42) away from the horizontal positioning clamp (44).

5. The flatness detection device for integrated circuit substrate processing according to claim 4, characterized in that, The center of the mounting slot (40) is rotatably connected to a gear mounting shaft (47), and a transmission gear (46) is fixedly connected to the outside of the gear mounting shaft (47). The transmission gear (46) meshes with the transmission rack plates (41) on both sides.

6. The flatness detection device for integrated circuit substrate processing according to claim 5, characterized in that, The gear mounting shaft (47) is externally fitted with a reset torsion spring (48), and the two ends of the reset torsion spring (48) are respectively fixedly connected to the side of the transmission gear (46) and the bottom wall of the mounting slot (40) facing each other.

7. The flatness detection device for integrated circuit substrate processing according to claim 3, characterized in that, Both sides of the guide base (13) are provided with transmission components for adjusting the circumferential positioning components. Each transmission component includes a fixed base (50). The fixed base (50) is fixedly connected to the upper part of the guide base (13). A sliding cavity (53) is opened inside the fixed base (50). A trigger plate (51) is movably connected inside the sliding cavity (53). One end of the trigger plate (51) away from the inside of the sliding cavity (53) moves through its interior and extends to the outside of the fixed base (50). A trigger tooth plate (52) is fixedly connected to one end of the trigger plate (51) away from the inside of the sliding cavity (53).

8. The flatness detection device for integrated circuit substrate processing according to claim 7, characterized in that, The sliding cavity (53) is movably connected to a limiting sleeve (54), which is fixedly sleeved on the outside of the trigger plate (51). A reset spring (55) is fixedly connected to one end of the trigger plate (51) away from the trigger tooth plate (52), and the other end of the reset spring (55) away from the trigger plate (51) is fixedly connected to the inner wall of the sliding cavity (53).

9. The flatness detection device for integrated circuit substrate processing according to claim 1, characterized in that, Nut guide seats (34) are provided on both sides of the outside of the flip drive screw (30). Guide grooves (35) are provided on the opposite side of the two nut guide seats (34). Guide sliders (36) are slidably connected inside each guide groove (35). The opposite side of the two guide sliders (36) is fixedly connected to the flip drive nut seat (33).

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