A semiconductor electromechanical integrated device leakage detection mechanism

By designing an automated semiconductor mechatronics equipment leakage current detection mechanism, the automatic alignment and positioning of the detection pen is achieved using adsorption components and drive components, thus solving the risk problems caused by handheld detection and improving detection efficiency and safety.

CN122330757APending Publication Date: 2026-07-03湖北经济管理大学
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
湖北经济管理大学
Filing Date
2026-03-23
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

Existing leakage current detection mechanisms for semiconductor mechatronics equipment require users to hold the testing pen during testing, which poses a risk of electric shock to the user due to operational errors, resulting in significant testing risks.

Method used

A leakage current detection mechanism for semiconductor mechatronics equipment was designed, including a detection meter, a detection pen, a housing, a slider, a connecting block, an adsorption component, a driving component, and a positioning connection component. The device is fixed to the housing by the adsorption component, and the driving component drives the housing to move. Combined with friction enhancement structure and remote control, the detection pen can be automatically aligned and positioned, avoiding manual contact.

Benefits of technology

It enables hands-free operation without the need for a handheld inspection pen, reducing inspection risks, and improves work efficiency through rapid positioning via laser alignment.

✦ Generated by Eureka AI based on patent content.

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Abstract

This invention relates to the field of leakage current detection technology and discloses a leakage current detection mechanism for a semiconductor mechatronics device, comprising: a detection meter for performing leakage current detection; a detection pen connected to the detection meter for cooperating with the detection meter to perform leakage current detection; a housing connected to the outside of the detection pen; a slider slidably disposed inside the housing; a connecting block disposed below the slider; a positioning and connecting assembly for connecting the slider and the connecting block; an adsorption member connected to the bottom of the connecting block for adsorbing and fixing it to the device housing; and a driving assembly. This invention enables hands-free operation when using the detection pen to detect the area to be tested, allowing the user to operate without touching the detection pen, greatly reducing the risk of detection operations. It also enables rapid positioning and alignment of the detection pen with the area to be tested, saving alignment time and improving work efficiency.
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Description

Technical Field

[0001] This invention belongs to the field of leakage current detection technology, and specifically relates to a leakage current detection mechanism for semiconductor mechatronics equipment. Background Technology

[0002] The core of leakage current detection is to identify leakage currents that deviate from the predetermined circuit in electrical systems / equipment. By monitoring the magnitude of the leakage current, zero-sequence current imbalance, or the insulation status of the equipment / line to ground, it is determined whether there are leakage problems such as insulation damage or grounding faults, ultimately achieving electric shock protection and electrical fire prevention.

[0003] During the maintenance of semiconductor mechatronics equipment, leakage current detection is required. Existing leakage current detection agencies require users to hold the testing pen throughout the entire testing process, which is prone to operational errors and could result in electric shocks to the user, posing a significant testing risk.

[0004] Therefore, it is necessary to invent a leakage current detection mechanism for semiconductor mechatronics equipment to solve the above problems. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a leakage current detection mechanism for semiconductor mechatronics equipment, thereby resolving the issues raised in the background section.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a leakage current detection mechanism for semiconductor mechatronics equipment, comprising: A test gauge is used for leakage current detection. A testing pen, connected to the testing meter, is used to perform leakage current detection in conjunction with the testing meter. The housing is attached to the outside of the detection pen; The slider is slidably disposed inside the housing; A connecting block is positioned below the slider; A positioning and connecting component is used to connect the slider and the connecting block; An adsorption element, connected to the bottom of the connecting block, is used to adsorb and fix it to the equipment housing; A drive assembly, disposed on the housing, is used to drive the housing to move relative to the slider.

[0007] Furthermore, the positioning connection component includes: The ball head is rotatably mounted on the slider and the connecting block, respectively. A friction-enhancing structure is fitted onto the outside of the ball head to increase the friction between the ball head and the slider and the connecting block; A telescopic assembly connects the two ball heads.

[0008] Furthermore, the telescopic component includes: The inner rod is connected to one of the ball heads; The sleeves are configured in multiple ways, and the multiple sleeves slide and nest in sequence. One end of the inner rod extends into the interior of the sleeve with the smallest diameter, and the bottom of the sleeve with the largest diameter is connected to another ball head. A friction positioning assembly is disposed at one end of the inner rod and the end of the sleeve, and is used to position the inner rod and the sleeve, as well as the nested sleeves.

[0009] Furthermore, the friction positioning assembly includes: The collars are respectively fitted onto one end of the inner rod and the ends of the remaining sleeves except for the one with the largest diameter; A rubber ring is fitted over the outside of the sleeve, and the rubber ring abuts against the inner wall of the sleeve.

[0010] Furthermore, the friction-increasing structure is specifically configured as a spherical sleeve made of rubber, which abuts against the inner walls of the slider and the connecting block respectively.

[0011] Furthermore, the driving component includes: A lead screw is rotatably mounted inside the housing, and the lead screw is threadedly connected to the slider; A first motor is connected to the bottom of the housing, and the output shaft of the first motor is connected to one end of the lead screw; The controller is located inside the detection pen; A remote control is used in conjunction with the controller to control the first motor.

[0012] Furthermore, a laser light is provided above the detection end of the detection pen, and the laser light is connected to the detection pen through a storage component. The storage component can drive the laser light away from the top of the detection pen.

[0013] Furthermore, the storage component includes: The connecting frame is connected at one end to the laser light; A ring seat is fitted over the outside of the detection pen; A rotating shaft is rotatably mounted inside the ring seat, and the other end of the connecting bracket is fixedly connected to the rotating shaft; The second motor is fixedly mounted on the outside of the ring seat via a carrier plate, and one end of the output shaft of the second motor is connected to one end of the rotating shaft.

[0014] Furthermore, the friction-increasing structure and the rubber ring can fix the position of the ball head and the collar by means of friction.

[0015] The technical effects and advantages of this invention are as follows: 1. This invention enables hands-free operation when using a testing pen to test the area to be tested, so that the user does not need to touch the testing pen, greatly reducing the risk of testing operations; 2. This invention enables rapid positioning and alignment between the detection pen and the area to be detected, saving alignment time and improving work efficiency. Attached Figure Description

[0016] Figure 1 A schematic diagram of the leakage current detection mechanism of a semiconductor mechatronics device according to an embodiment of the present invention is shown; Figure 2 A schematic diagram of the detection pen according to an embodiment of the present invention is shown; Figure 3 A cross-sectional view of the positioning connection component according to an embodiment of the present invention is shown; Figure 4 An embodiment of the present invention is shown. Figure 2 Enlarged structural diagram at point A in the middle; In the diagram: 1. Test gauge; 2. Test pen; 3. Housing; 4. Slider; 5. Connecting block; 6. Adsorption component; 7. Ball head; 8. Inner rod; 9. Sleeve; 10. Collar; 11. Rubber ring; 12. Lead screw; 13. First motor; 14. Laser light; 15. Connecting frame; 16. Ring seat; 17. Second motor; 18. Friction-increasing structure. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0018] This invention provides a leakage current detection mechanism for semiconductor mechatronics equipment, such as... Figures 1 to 4 As shown, it includes: a detection table 1, a detection pen 2, a housing 3, a slider 4, a connecting block 5, a positioning connection assembly, an adsorption component 6, and a driving assembly; Test meter 1 is used for leakage current detection. Test meter 1 is a multimeter in the prior art. Test probe 2 is connected to test meter 1 and is used to cooperate with test meter 1 for leakage current detection. Test probe 2 is a test probe on a multimeter in the prior art. Housing 3 is fixedly connected to the outside of test probe 2. Slider 4 is slidably disposed inside housing 3. Connecting block 5 is disposed below slider 4. Positioning connection assembly is used to connect slider 4 and connecting block 5. Adsorption element 6 is fixedly connected to the bottom of connecting block 5 and is used to adsorb and fix it to the device housing. Adsorption element 6 is a magnet. Drive assembly is disposed on housing 3 and is used to drive housing 3 to move relative to slider 4.

[0019] In use, the device is fixed to the housing by the adsorption component 6. Then, the detection pen 2 is pulled to move the housing 3 and slider 4 to adjust the position of the detection pen 2 so that the pen tip is facing the area to be tested. After adjustment, the positioning connection component fixes the position between the slider 4 and the connecting block 5. At this time, the detection pen 2 does not move. Then, the drive component drives the housing 3 to move relative to the slider 4, so that the pen tip of the detection pen 2 moves closer to the area to be tested. Finally, the detection pen 2 contacts the area to be tested and performs the test with the test gauge 1. After the test is completed, the drive component drives the housing 3 to move, so that the detection pen 2 returns to its original position. Then, the above operation can be repeated to test other areas. During the entire testing process, the user does not need to touch the detection pen 2, which greatly reduces the risk of testing operations.

[0020] like Figure 2 and Figure 3 As shown, the positioning connection assembly includes: a ball head 7, a friction-increasing structure 18, and a telescopic assembly; Ball heads 7 are rotatably mounted on slider 4 and connecting block 5 respectively. Specifically, the surfaces of slider 4 and connecting block 5 are provided with grooves that match ball heads 7. Ball heads 7 are located in the grooves. Slider 4 has an opening that communicates with the grooves. Friction increasing structure 18 is sleeved on the outside of ball heads 7 to increase the friction between ball heads 7 and slider 4 and connecting block 5. Telescopic component connects the two ball heads 7.

[0021] Pulling the detection pen 2 causes it to rotate relative to the ball head 7 along with the housing 3 and slider 4, allowing the angle of the detection pen 2 to be adjusted. Pulling the detection pen 2 in conjunction with the telescopic component allows the distance between the detection pen 2 and the adsorption component 6 to be adjusted, thus achieving the overall position adjustment of the detection pen 2 to meet the operational requirements. By increasing the friction between the structure 18, the slider 4, and the connecting block 5, the position of the detection pen 2 after adjustment can be located.

[0022] like Figure 2 and Figure 3 As shown, the telescopic assembly includes: inner rod 8, sleeve 9, and friction positioning assembly; The inner rod 8 is fixedly connected to one of the ball heads 7. Multiple sleeves 9 are provided, and the multiple sleeves 9 are slidably nested among each other. One end of the inner rod 8 extends into the interior of the sleeve 9 with the smallest diameter, and the bottom of the sleeve 9 with the largest diameter is fixedly connected to another ball head 7. The friction positioning component is set at one end of the inner rod 8 and the end of the sleeve 9, and is used to position the inner rod 8 and the sleeve 9 and the nested sleeves 9.

[0023] Pulling the detection pen 2 causes the housing 3, slider 4, ball head 7, and inner rod 8 to move, allowing the inner rod 8 to slide along the sleeve 9. Continuing to pull the pen further causes the other sleeves 9 to slide relative to each other, thus adjusting the position of the detection pen 2 relative to the adsorption component 6. After adjustment, the friction positioning component positions the adjusted inner rod 8 and sleeve 9, pushing the detection pen 2 to retract the inner rod 8 into the sleeve 9, ultimately achieving the reset of the inner rod 8 and sleeve 9.

[0024] The sleeve 9 can pass through the opening to retract the adsorption element 6 and the connecting block 5, so that the adsorption element 6 and the connecting block 5 can be parallel to the detection pen 2.

[0025] like Figure 3 As shown, the friction positioning assembly includes: a collar 10 and a rubber ring 11; The collar 10 is fixedly sleeved on one end of the inner rod 8 and the ends of the sleeves 9 except for the one with the largest diameter. The rubber ring 11 is fixedly sleeved on the outside of the collar 10 and abuts against the inner wall of the sleeve 9.

[0026] The inner rod 8 moves along the inside of the sleeve 9, carrying the collar 10 and the rubber ring 11. After the collar 10 comes into contact with the top wall of the sleeve 9, the inner rod 8 is pulled further, causing the collar 10 to move along with the sleeve 9. The subsequent sleeves 9 can move along with the adjacent sleeves by relying on the collar 10. After the adjustment is completed, the friction between the rubber ring 11 and the sleeve 9 can achieve the positioning of the inner rod 8 and the sleeve 9.

[0027] like Figure 3 As shown, the friction-increasing structure 18 is specifically configured as a spherical sleeve made of rubber, and the friction-increasing structure 18 abuts against the inner walls of the slider 4 and the connecting block 5 respectively.

[0028] The structure 18, which increases friction, can use the friction between itself and the groove to position the ball head 7 and the slider 4, as well as the ball head 7 and the connecting block 5.

[0029] like Figure 2 As shown, the drive assembly includes: a lead screw 12, a first motor 13, a controller (not shown in the diagram), and a remote controller (not shown in the diagram). The lead screw 12 is rotatably installed inside the housing 3. The lead screw 12 is threadedly connected to the slider 4. The first motor 13 is fixedly connected to the bottom of the housing 3. The output shaft of the first motor 13 is connected to one end of the lead screw 12. The controller is set inside the detection pen 2. The remote control is used to cooperate with the controller to control the first motor 13.

[0030] The output shaft of the first motor 13 is controlled to rotate forward by the remote control, which in turn drives the lead screw 12 to rotate, thereby driving the housing 3 to move relative to the slider 4, so that the detection pen 2 moves accordingly, thus driving the detection pen 2.

[0031] like Figure 2 and Figure 4 As shown, a laser light 14 is provided above the detection end of the detection pen 2. The laser emitted by the laser light 14 is coaxial with the pen tip of the detection pen 2. The laser light 14 is connected to the detection pen 2 through a storage component. The storage component can drive the laser light 14 away from the top of the detection pen 2.

[0032] The laser light 14 is turned on by remote control. The laser light 14 emits a laser beam that shines on the device. The position of the detection pen 2 is adjusted according to the position of the laser beam so that the laser beam shines on the area to be detected. At this time, the laser light 14 is driven away from the top of the detection pen 2 by the storage component to avoid delaying the contact between the detection pen 2 and the area to be detected. The laser beam can quickly align the tip of the detection pen 2 with the area to be detected, saving alignment time and improving work efficiency.

[0033] like Figure 2 and Figure 4 As shown, the storage assembly includes: a connecting frame 15, a ring seat 16, a rotating shaft, and a second motor 17; One end of the connecting frame 15 is fixedly connected to the laser lamp 14, the ring seat 16 is fixedly sleeved on the outside of the detection pen 2, the rotating shaft is rotatably installed inside the ring seat 16, the other end of the connecting frame 15 is fixedly connected to the rotating shaft, the second motor 17 is fixedly installed on the outside of the ring seat 16 through the carrier plate, and one end of the output shaft of the second motor 17 is fixedly connected to one end of the rotating shaft.

[0034] The output shaft of the second motor 17 is controlled to rotate by the remote control, which in turn rotates the rotating shaft and the connecting bracket 15, thereby rotating the laser light 14 to a position above the tip of the detection pen 2, so as to prevent the laser light 14 from affecting the detection operation of the detection pen 2. The output shaft of the second motor 17 is controlled to rotate and reset. Conversely, the laser light 14 can be reset so that it is positioned above the tip of the detection pen 2.

[0035] The friction-increasing structure 18 and the rubber ring 11 can fix the position of the ball head 7 and the sleeve 10 by relying on friction. Specifically, the friction between the friction-increasing structure 18 and the groove can position the ball head 7, the slider 4, and the connecting block 5. The friction between the rubber ring 11 and the sleeve 9 can position the inner rod 8 and the sleeve 9.

[0036] Working Principle: In use, the detector pen 2 is fixed to the housing of the device by adsorption component 6. Then, pulling the detector pen 2 causes the housing 3, slider 4, ball head 7, and inner rod 8 to move. This causes the inner rod 8 to slide along the sleeve 9, and the inner rod 8, along with the collar 10 and rubber ring 11, moves along the inside of the sleeve 9. After the collar 10 contacts the top wall of the sleeve 9, further pulling of the inner rod 8 causes the collar 10 to move along the sleeve 9. Subsequent sleeves 9 can move along with the collar 10. After adjustment, the friction between the rubber ring 11 and the sleeve 9 allows for positioning of the inner rod 8 and sleeve 9, thus adjusting the position of the detector pen 2 relative to the adsorption component 6. Pulling the detector pen 2 causes the housing 3 and slider 4 to rotate relative to the ball head 7. Simultaneously, the ball head 7 rotates relative to the connecting block 5, causing... The angle of the detection pen 2 can be adjusted, and the friction between the structure 18, the slider 4, and the connecting block 5 is increased by friction, so that the position of the detection pen 2 after adjustment can be located. This completes the adjustment of the detection pen 2, so that the pen tip is facing the area to be tested. The output shaft of the first motor 13 is controlled to rotate forward by the remote control, which drives the lead screw 12 to rotate, thereby driving the housing 3 to move relative to the slider 4, so that the detection pen 2 moves with it, thus driving the detection pen 2. The pen tip of the detection pen 2 moves closer to the area to be tested, and finally the detection pen 2 contacts the area to be tested, and the detection is performed in conjunction with the detection gauge 1. After the test is completed, the detection pen 2 is driven to reset, and then the above operation can be repeated to test other areas. During the entire testing process, the user does not need to touch the detection pen 2, which greatly reduces the risk of the testing operation. The laser light 14 is turned on by remote control. The laser emitted by the laser light 14 shines on the device. The position of the detection pen 2 is adjusted according to the position of the laser, and the laser is adjusted to shine on the area to be detected. Through the illumination of the laser, the pen tip of the detection pen 2 can be quickly aligned with the area to be detected, saving alignment time and improving work efficiency. After the adjustment is completed, the output shaft of the second motor 17 is controlled to rotate by remote control, which in turn rotates the rotating shaft and the connecting bracket 15, and then rotates the laser light 14 to move away from the pen tip of the detection pen 2, so as to avoid the laser light 14 affecting the detection operation of the detection pen 2.

[0037] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it.

Claims

1. A leakage current detection mechanism for semiconductor mechatronics equipment, characterized in that, include: Test table (1) is used for leakage current detection; The test pen (2) is connected to the test meter (1) and is used to cooperate with the test meter (1) to perform leakage current detection; The housing (3) is connected to the outside of the detection pen (2); The slider (4) is slidably disposed inside the housing (3); Connecting block (5) is located below the slider (4); A positioning connection component is used to connect the slider (4) and the connecting block (5); Adsorption element (6) is connected to the bottom of the connecting block (5) and is used to adsorb and fix it on the equipment housing; A drive assembly, disposed on the housing (3), is used to drive the housing (3) to move relative to the slider (4).

2. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 1, characterized in that: The positioning connection component includes: The ball head (7) is rotatably mounted on the slider (4) and the connecting block (5), respectively; A friction-increasing structure (18) is fitted onto the outside of the ball head (7) to increase the friction between the ball head (7) and the slider (4) and the connecting block (5); A telescopic assembly connects the two ball heads (7).

3. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 2, characterized in that: The telescopic component includes: The inner rod (8) is connected to one of the ball heads (7); A plurality of sleeves (9) are provided, and the plurality of sleeves (9) are slidably nested among each other. One end of the inner rod (8) extends into the interior of the sleeve (9) with the smallest diameter, and the bottom of the sleeve (9) with the largest diameter is connected to another ball head (7). A friction positioning assembly is disposed at one end of the inner rod (8) and the end of the sleeve (9) for positioning the inner rod (8) and the sleeve (9) and the nested sleeves (9).

4. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 3, characterized in that: The friction positioning component includes: The collars (10) are respectively fitted onto one end of the inner rod (8) and the ends of the sleeves (9) except for the largest diameter; A rubber ring (11) is fitted on the outside of the sleeve (10), and the rubber ring (11) abuts against the inner wall of the sleeve (9).

5. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 4, characterized in that: The friction-increasing structure (18) is specifically configured as a spherical sleeve made of rubber, and the friction-increasing structure (18) abuts against the inner walls of the slider (4) and the connecting block (5).

6. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 5, characterized in that: The driving component includes: A lead screw (12) is rotatably installed inside the housing (3), and the lead screw (12) is threadedly connected to the slider (4); A first motor (13) is connected to the bottom of the housing (3), and the output shaft of the first motor (13) is connected to one end of the lead screw (12); The controller is located inside the detection pen (2); The remote control is used in conjunction with the controller to control the first motor (13).

7. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 6, characterized in that: A laser lamp (14) is provided above the detection end of the detection pen (2). The laser lamp (14) is connected to the detection pen (2) through a storage component. The storage component can drive the laser lamp (14) away from the top of the detection pen (2).

8. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 7, characterized in that: The storage component includes: A connecting bracket (15) is connected at one end to the laser lamp (14); The ring seat (16) is fitted onto the outside of the detection pen (2); A rotating shaft is rotatably installed inside the ring seat (16), and the other end of the connecting frame (15) is fixedly connected to the rotating shaft; The second motor (17) is fixedly mounted on the outside of the ring seat (16) via a carrier plate, and one end of the output shaft of the second motor (17) is connected to one end of the rotating shaft.

9. The leakage current detection mechanism for semiconductor mechatronics equipment according to claim 8, characterized in that: The friction-increasing structure (18) and the rubber ring (11) can fix the position of the ball head (7) and the collar (10) by means of friction.