X-ray monochromator device and method of adjusting an x-ray monochromator device

Abstract

This invention relates to the field of synchrotron radiation optical elements and discloses an X-ray monochromator device and an adjustment method for the X-ray monochromator device. The device includes: a base assembly; a spectroscopic crystal assembly, including a single-crystal crystal plate and two flexible connectors, the single-crystal crystal plate having a front and a back, the front being configured to face the X-ray incident direction, and the two flexible connectors symmetrically arranged on one side of the back of the single-crystal crystal plate and connecting the single-crystal crystal plate and the base assembly; a deformation detection element, which monitors the curvature change of the single-crystal crystal plate in real time and generates a feedback signal; and a loading mechanism, including at least two force-applying parts, at least two force-applying parts disposed between the two flexible connectors, at least two force-applying parts acting on the back, and the loading mechanism being able to control the at least two force-applying parts to act on the single-crystal crystal plate according to the feedback signal. This invention operates entirely at room temperature, and can achieve continuously adjustable curvature of the single-crystal crystal plate, no thermally induced lattice damage, and high energy resolution.

Description

Technical Field

[0001] This invention relates to the field of synchrotron radiation optical element technology, and in particular to an X-ray monochromator device and an adjustment method for the X-ray monochromator device. Background Technology

[0002] Synchrotron radiation sources and high-end benchtop X-ray spectrometers are key tools in scientific research, and their performance is highly dependent on the accuracy and reliability of the curved crystal monochromator. This core component achieves monochromatization and focusing of X-rays through crystal diffraction. Its surface accuracy and lattice integrity directly determine key parameters such as beam flux and resolution. Flux directly affects signal intensity and experimental data acquisition speed, while resolution determines the instrument's ability to distinguish X-rays of different energies, directly affecting the quality of the spectrum and the precision of chemical state analysis.

[0003] Currently, most curved crystal monochromators in related technologies employ a thermoforming structure. This involves heating a relatively thick crystal material to its softening point and then pressing it onto a mold with a specific curvature to obtain the desired surface. However, this thermoforming method has several inherent hardware drawbacks: First, once the crystal is thermoformed, its radius of curvature is fixed, making real-time fine-tuning of the focal length impossible according to the actual optical path or experimental requirements, resulting in poor adaptability. Second, during the thermoforming process, due to the difference in thermal expansion coefficients between the crystal and the mold, as well as the release of internal stress during cooling, the formed crystal surface is prone to wavy errors of up to tens of micrometers, severely affecting the wavefront quality of the beam, and lacking effective mechanical correction methods for post-processing. More critically, the high-temperature and high-pressure process introduces a large number of permanent dislocations, slip bands, and other defects into the crystal, significantly reducing X-ray diffraction efficiency and leading to insufficient monochromator reflection intensity, which is particularly prominent in synchrotron radiation applications requiring high brightness or low-concentration sample analysis.

[0004] Based on the above analysis, the use of a hot-pressed structure for bent crystal monochromators not only limits their performance ceiling but also increases the debugging difficulty and maintenance cost of high-end scientific instruments. Therefore, there is an urgent need in this field for a novel monochromator hardware device and method that can overcome the limitations of hot-pressing to meet the pressing needs for precise optical path control in scientific experiments. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes an X-ray monochromator device that enables adjustable curvature of the focusing surface of a single crystal plate, and also avoids damage structures on the crystal surface, thereby increasing X-ray flux density and raising the performance limit of the monochromator.

[0006] The present invention also aims to provide an adjustment method for an X-ray monochromator device to apply the above-described X-ray monochromator device.

[0007] An X-ray monochromator device according to an embodiment of the present invention includes: a base assembly; a beam-splitting crystal assembly, the beam-splitting crystal assembly including a single-crystal crystal plate and two flexible connectors, the single-crystal crystal plate being elastically deformable and having a front and a back side, the front side being configured to face the X-ray incident direction, the two flexible connectors being symmetrically disposed on one side of the back side of the single-crystal crystal plate and connecting the single-crystal crystal plate and the base assembly; a deformation detection element disposed on the base assembly or the single-crystal crystal plate to monitor the curvature change of the single-crystal crystal plate in real time and generate a feedback signal; and a loading mechanism disposed on the base assembly, the loading mechanism including at least two force-applying parts disposed between the two flexible connectors, the at least two force-applying parts acting on the back side, the loading mechanism being able to control the at least two force-applying parts to act on the single-crystal crystal plate according to the feedback signal, so that the single-crystal crystal plate forms a focusing surface that meets the target requirements within the elastic limit.

[0008] According to an embodiment of the present invention, the X-ray monochromator device uses a spectroscopic crystal assembly as the core of X-ray diffraction. Focusing is achieved through the elastic deformation of a single-crystal plate. A loading mechanism provides a controllable torque at room temperature, driving the single-crystal plate to form a preset curved surface. A deformation detection element can capture the deformation state of the single-crystal plate in real time and feed it back to the control system to form a closed-loop adjustment. The X-ray monochromator device of the present invention does not require a heating device and operates entirely at room temperature, fundamentally avoiding permanent defects such as lattice dislocations and slip bands caused by high temperatures, ensuring the integrity of the crystal lattice, and significantly improving X-ray diffraction efficiency. It effectively solves the problems of insufficient reflection intensity and difficulty in adapting to high-brightness synchrotron radiation or low-concentration sample analysis in existing technologies. It avoids lattice damage caused by thermal processing and ensures the continuity and accuracy of curvature adjustment through closed-loop control between the loading mechanism and the deformation detection element. It fully meets the requirements of X-ray absorption fine structure (XAFS) and X-ray emission spectroscopy (XES) detection for fine control of the optical path, and can achieve continuously adjustable curvature of the single-crystal plate, no thermally induced lattice damage, and high energy resolution.

[0009] In some embodiments of the present invention, the loading mechanism includes a support frame and a drive component. The support frame is mounted on the base assembly, and the drive component is configured to perform submicron-level precision displacement. The drive component is mounted on the support frame and connected to the at least two force-applying parts to drive the at least two force-applying parts to move independently of each other.

[0010] In some embodiments of the present invention, the linear displacement resolution of the driving component is less than or equal to 14 nm.

[0011] In some embodiments of the present invention, the driving component is one of a piezoelectric ceramic actuator with closed-loop control, a voice coil motor with closed-loop control, an electromagnetic actuator with closed-loop control, or a stepper motor with grating ruler feedback.

[0012] In some embodiments of the present invention, the two flexible connectors and the at least two force-applying parts are arranged along the length direction of the single crystal plate, and the at least two force-applying parts are symmetrically arranged along the length direction of the single crystal plate.

[0013] In some embodiments of the present invention, the force-applying part is a push rod assembly, which is in close contact with the back side via a buffer pad.

[0014] In some embodiments of the present invention, the single crystal plate is rectangular, and the thickness of the single crystal plate is 0.3mm to 0.5mm.

[0015] In some embodiments of the present invention, the aspect ratio of the length of the long side to the width of the short side of the single crystal plate is between 1.8 and 3.2.

[0016] In some embodiments of the present invention, the roughness Ra of the front surface is less than or equal to 0.8 nm, and the lattice of the front surface matches the geometry of the Rowland circle.

[0017] In some embodiments of the present invention, the flexible connector includes a clamping seat and an elastic member. The clamping seat is disposed on the base assembly and has a clamping groove that opens toward one side of the single crystal plate. The end of the single crystal plate is disposed in the clamping groove, and the elastic member is disposed in the clamping groove and elastically abuts against the back side along the thickness direction of the single crystal plate.

[0018] In some embodiments of the present invention, the deformation detection element is a contact detection element and is closely attached to the back side, generating a feedback signal synchronously through the bending deformation of the single crystal plate; or, the deformation detection element is a non-contact detection element and is disposed on the base assembly, outputting a feedback signal by sensing the change in physical quantity generated by the bending deformation of the single crystal plate.

[0019] According to an embodiment of the present invention, an adjustment method for an X-ray monochromator device is provided, using an X-ray monochromator device as described in any of the preceding descriptions. The method includes: mounting the single-crystal crystal plate on the base assembly via the flexible connector; calculating the target radius of curvature of the single-crystal crystal plate based on the X-ray energy and focusing geometry requirements required for the experiment; controlling the operation of at least two force-applying parts of the loading mechanism, wherein the operation of the at least two force-applying parts applies a bending moment to the back surface of the single-crystal crystal plate, causing elastic deformation of the single-crystal crystal plate; the deformation detection element detects the actual curvature data of the surface of the single-crystal crystal plate in real time and generates the feedback signal; comparing the actual curvature data fed back by the feedback signal with the target radius of curvature, and controlling the output displacement of the at least two force-applying parts until the actual curvature of the single-crystal crystal plate reaches the target radius of curvature and remains stable.

[0020] The adjustment method of the X-ray monochromator device according to embodiments of the present invention eliminates the need for a heating device, allowing the X-ray monochromator device to operate entirely at room temperature. This fundamentally avoids permanent defects such as lattice dislocations and slip bands caused by high temperatures, ensuring the integrity of the crystal lattice and significantly improving X-ray diffraction efficiency. It effectively solves the problems of insufficient reflection intensity and difficulty in adapting to high-brightness synchrotron radiation or low-concentration sample analysis in existing technologies. It avoids lattice damage caused by thermal processing and ensures the continuity and accuracy of curvature adjustment through closed-loop control between the loading mechanism and the deformation detection device. This enables continuously adjustable curvature of single-crystal plates, no thermally induced lattice damage, and high energy resolution.

[0021] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0022] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 A schematic diagram of an X-ray monochromator device provided in some embodiments of the present invention; Figure 2 This is a partial schematic diagram of an X-ray monochromator device provided in some other embodiments of the present invention; Figure 3 A schematic diagram of a four-point bending structure formed between a single-crystal plate, a flexible connector, and a loading mechanism, provided in some embodiments of the present invention; Figure 4 A schematic diagram of an X-ray monochromator device provided in other embodiments of the present invention; Figure 5 This is a schematic diagram of a flexible connector and a single-crystal plate provided in some embodiments of the present invention; Figure 6 This is a flowchart illustrating the adjustment method of an X-ray monochromator device provided in some embodiments of the present invention.

[0023] Figure label: 100. X-ray monochromator device; 10. Base assembly; 20. Spectroscopic crystal assembly; 201. Single crystal plate; 201a. Front side; 201b. Back side; 202. Flexible connector; 2021. Clamping seat; 2021a. Clamping groove; 2021b. Bolt hole; 2022. Elastic element; 2001. Spring; 2023. Fixing bolt; 30. Deformation testing components; 40. Loading mechanism; 401. Force application part; 402. Support frame; 403. Drive component. Detailed Implementation

[0024] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0025] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more. In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] The following is for reference. Figures 1-5 The present invention describes an X-ray monochromator device 100 according to an embodiment of the present invention.

[0027] like Figure 1 and Figure 2 As shown, an X-ray monochromator device 100 according to an embodiment of the present invention includes: a base assembly 10, a spectrophotometer assembly 20, a deformation detection element 30, and a loading mechanism 40.

[0028] The spectroscopic crystal assembly 20 includes a single-crystal crystal plate 201 and two flexible connectors 202. The single-crystal crystal plate 201 is elastically deformable and has a front side 201a and a back side 201b. The front side 201a is positioned facing the X-ray incident direction. The two flexible connectors 202 are symmetrically arranged on one side of the back side 201b of the single-crystal crystal plate 201 and connect the single-crystal crystal plate 201 and the base assembly 10. A deformation detection element 30 is disposed on the base assembly 10 or the single-crystal crystal plate 201 to monitor the curvature change of the single-crystal crystal plate 201 in real time and generate a feedback signal. The loading mechanism 40 is disposed on the base assembly 10. The loading mechanism 40 includes at least two force-applying parts 401, which are disposed between two flexible connectors 202. The at least two force-applying parts 401 act on the back surface 201b. The loading mechanism 40 can control the at least two force-applying parts 401 to act on the single crystal plate 201 according to the feedback signal, so that the single crystal plate 201 forms a focused surface that meets the target requirements within the elastic limit.

[0029] The base assembly 10 is the fundamental framework of the entire device. Its core technical objective is to provide a high-rigidity and high-stability mounting platform while reserving precise assembly space for other components. The base assembly 10 can be integrally machined from high-strength aluminum alloy or stainless steel. The material selection for the base assembly 10 balances rigidity and lightweight, with an elastic modulus between 180 GPa and 210 GPa. Preferably, the elastic modulus can be greater than or equal to 200 GPa, which effectively suppresses the influence of environmental vibrations on the crystal surface shape, while maintaining a moderate density to avoid excessive overall weight affecting spectrometer integration. For example, the base assembly 10 can be made of aluminum alloy or stainless steel.

[0030] Optionally, the base assembly 10 has an overall U-shaped cavity structure with a horizontal rigid plane at the bottom for fixing the loading mechanism 40. Support platforms can be provided at both ends of the top of the base assembly 10 for mounting the flexible connectors 202 of the spectroscopic crystal assembly 20. A through hole can be pre-drilled in the middle of the cavity of the base assembly 10 to ensure that the force-applying part 401 of the loading mechanism 40 can extend vertically upwards and contact the back surface 201b of the crystal plate. The machining accuracy requirements for the base assembly 10 are: the horizontality error of the top support platform is less than or equal to 5μm, the dimensional tolerance of the support platform spacing is less than or equal to ±10μm, and the coaxiality error of the cavity through hole is less than or equal to 3μm. These accuracy indicators are achieved through precision milling and grinding processes, providing a benchmark for the precise assembly of subsequent components. Furthermore, the surface of the base assembly 10 is provided with shock-absorbing and anti-slip pads to further reduce the amplitude of external vibrations transmitted to the single-crystal crystal plate 201, ensuring stability during the testing process.

[0031] The spectroscopic crystal assembly 20 is the core functional unit for achieving X-ray monochromaticization and focusing. The spectroscopic crystal assembly 20 is configured to meet the requirements of "high elasticity, high lattice integrity, and low stress".

[0032] The single-crystal plate 201 can be made of materials such as silicon (Si), germanium (Ge), gallium arsenide (GaAs), or quartz (SiO2). These materials have stable crystal structures, high diffraction efficiency, and excellent elastic deformation properties, making them fully suitable for room-temperature mechanical bending. Furthermore, they exhibit superior diffraction efficiency in specific X-ray energy ranges (e.g., 8~20keV for GaAs). The front side 201a of the single-crystal plate 201 is the core functional area for achieving X-ray monochromaticization and focusing.

[0033] Flexible connectors 202 are installed at both ends of the monocrystalline plate 201 and fixed to the support platform on top of the base assembly 10 by bolts. Flexible connectors 202 achieve both rigid clamping and flexible connection. The function of flexible connectors 202 is to release the axial tensile stress (membrane stress) generated when the monocrystalline plate 201 bends. When at least two force-applying parts 401 of the loading mechanism 40 apply an upward torque to the middle of the monocrystalline plate 201, the ends of the monocrystalline plate 201 will experience inward contraction displacement and a small rotation angle. At this time, the flexible connectors 202 will undergo adaptive elastic deformation, allowing the ends of the monocrystalline plate 201 to move freely, ensuring that the monocrystalline plate 201 only undergoes pure elastic bending and avoiding stress concentration caused by rigid fixing. If traditional rigid clamping is used, the ends of the monocrystalline plate 201 cannot rotate when bending, resulting in huge axial tensile stress, causing the monocrystalline plate 201 to twist into an "S" shape or break directly.

[0034] Optionally, the flexible connector 202 can be an elastic component or a flexible bellows structure.

[0035] Optionally, the flexible connector 202 can also be a connecting rope, such as a steel wire with a diameter of 0.1~0.2mm and an elastic modulus greater than or equal to 200Gpa. In this example, the two ends of the monocrystalline plate 201 are connected to the base assembly 10 via steel wires, and the middle part is lifted by at least two force-applying parts 401. This approach can further reduce the stress constraints at both ends of the monocrystalline plate 201, making the bending of the monocrystalline plate 201 closer to the ideal elastic deformation. This approach eliminates the need for complex push rod assemblies, resulting in a simpler structure and lower maintenance costs.

[0036] The deformation detection element 30 is a key sensing unit for achieving closed-loop control. Its function is to monitor the curvature changes on the surface of the single-crystal plate 201 in real time and accurately, providing reliable feedback data for controlling the loading mechanism 40. Depending on the needs, the deformation detection element 30 can be directly mounted on the single-crystal plate 201 to directly detect curvature changes. Alternatively, the deformation detection element 30 can be mounted on the base assembly 10 to detect curvature changes of the single-crystal plate 201 through visual or laser scanning methods.

[0037] The loading mechanism 40 is a power unit that drives the single-crystal plate 201 to produce elastic deformation. The function of the loading mechanism 40 is to provide a controllable and uniform bending torque at room temperature, ensuring that the single-crystal plate 201 forms a preset focused surface. Optionally, the loading mechanism 40 can be a mechanical loading device. Optionally, the loading mechanism 40 can also be a pneumatic device such as an airbag. For example, the force-applying part 401 can be an inflatable or deflatable airbag, which abuts against the back surface 201b of the single-crystal plate 201. By controlling the air intake or exhaust of the airbag, the curvature of the single-crystal plate 201 can be adjusted. Using a pneumatic device such as an airbag in the loading mechanism 40 can reduce the number of mechanical contact points and lower the risk of crystal scratches. The number of at least two force-applying parts 401 can be, but is not limited to, two, three, four, etc.

[0038] refer to Figure 1 and Figure 2In an embodiment of the present invention, the upper surface of the single-crystal crystal plate 201 is the front surface 201a, which is the working surface facing the X-ray incident direction, and the lower surface is the back surface 201b, which contacts the loading mechanism 40. Both ends of the single-crystal crystal plate 201 are fixed to the base assembly 10 via flexible connectors 202, which can be used to release axial stress when the crystal bends. Under the action of at least two force-applying parts 401 of the loading mechanism 40, the middle part of the single-crystal crystal plate 201 can be made to bulge upwards, forming an arc-shaped curved surface that meets the focusing requirements. Simultaneously, the deformation detection element 30 senses the degree of crystal deformation on the back surface 201b of the single-crystal crystal plate 201 in real time and feeds back a signal, providing data support for closed-loop control. It is understood that the X-ray monochromator device 100 of this embodiment of the present invention can achieve continuous adjustment of the curvature of the single-crystal crystal plate 201 between 1m and 10m.

[0039] According to an embodiment of the present invention, the X-ray monochromator device 100 uses a spectroscopic crystal assembly 20 as the X-ray diffraction core, and focuses the X-rays through the elastic deformation of a single crystal plate 201. The loading mechanism 40 provides a controllable torque at room temperature to drive the single crystal plate 201 to form a preset curved surface. The deformation detection element 30 can capture the deformation state of the single crystal plate 201 in real time and feed it back to the control system to form a closed-loop adjustment. The X-ray monochromator device 100 of the present invention requires no heating device and operates entirely at room temperature, fundamentally avoiding permanent defects such as lattice dislocations and slip bands caused by high temperatures, ensuring the integrity of the crystal lattice, and significantly improving X-ray diffraction efficiency. It effectively solves the problems of insufficient reflection intensity and difficulty in adapting to high-brightness synchrotron radiation or low-concentration sample analysis in existing technologies. It can avoid lattice damage caused by thermal processing, and ensure the continuity and accuracy of curvature adjustment through closed-loop control between the loading mechanism 40 and the deformation detection element 30. It is fully adapted to the requirements of X-ray absorption fine structure (XAFS) and X-ray emission spectrum (XES) detection for fine control of the optical path, and can realize continuous adjustable curvature of single crystal plate 201, no thermal lattice damage, and high energy resolution.

[0040] In some embodiments of the present invention, such as Figure 2 As shown, the loading mechanism 40 includes a support frame 402 and a drive component 403. The support frame 402 is mounted on the base assembly 10. The drive component 403 is configured to perform submicron-level precision displacement. The drive component 403 is mounted on the support frame 402 and connected to at least two force-applying parts 401 to drive the at least two force-applying parts 401 to move independently of each other.

[0041] The support frame 402, made of stainless steel, is fixed to the bottom of the cavity of the base assembly 10 in a "door" shape to support the drive component 403. The height design of the support frame 402 ensures that the force-applying part 401 can extend vertically upwards and precisely fit against the back surface 201b of the single-crystal plate 201. The loading mechanism 40 is concealed within the base assembly 10 or in a lower recess, located directly below the spectrophotometer crystal assembly 20. This layout design reduces the overall size of the device while avoiding interference from the external environment on the drive unit, ensuring the stability of the torque output.

[0042] The driving component 403 is a precision displacement driving unit capable of submicron-level precision displacement, thereby enabling the driving component 403 to precisely drive the single crystal plate 201.

[0043] In the above technical solution, the loading mechanism 40 can achieve precise displacement at the nanometer and micrometer level, thereby accurately controlling the curvature change of the single crystal plate 201 to meet different application requirements.

[0044] In some embodiments of the present invention, the linear displacement resolution of the driving component 403 is less than or equal to 14 nm. It is understood that the linear displacement resolution of the driving component 403 can be, but is not limited to, 14 nm, 12 nm, 10 nm, 8 nm, etc. Optionally, the linear displacement stroke range of the driving component 403 can be 10 μm to 50 μm.

[0045] In some embodiments of the present invention, the drive component 403 is one of a piezoelectric ceramic actuator with closed-loop control, a voice coil motor with closed-loop control, an electromagnetic actuator with closed-loop control, or a stepper motor with grating ruler feedback.

[0046] The drive component 403 can be a closed-loop controlled piezoelectric ceramic actuator, which can meet the nanometer-level displacement accuracy required for crystal curvature adjustment. The technical advantages of the piezoelectric ceramic actuator are: it directly converts electrical signals into mechanical displacement, with fast response speed (millisecond level), no mechanical wear, and high stability, enabling sub-nanometer-level displacement control; it adopts a closed-loop control mode, using a built-in displacement sensor to provide real-time feedback of its own displacement, ensuring the accuracy of the output displacement. The piezoelectric ceramic actuator avoids the shortcomings of traditional drive methods. If pneumatic or hydraulic loading is used, it is difficult to achieve precise torque control in small areas, and fluid loading is easily affected by temperature and pressure fluctuations, making it impossible to maintain long-term curvature stability. The piezoelectric ceramic actuator and control system are connected through a high-voltage drive circuit, with a drive voltage range of 0~150V. The linearity error between voltage and displacement is less than or equal to 0.5%, ensuring precise correspondence between displacement output and control signal.

[0047] The drive component 403 can also be a voice coil motor with closed-loop control. A voice coil motor has a linear displacement resolution of less than or equal to 20 nm and a response speed of less than or equal to 0.5 ms, which can also meet the requirements for precision displacement. Alternatively, the drive component 403 can be an electromagnetic actuator. An electromagnetic actuator generates linear displacement through the electromagnetic force between a coil and a permanent magnet, achieving a resolution of less than or equal to 15 nm. Combined with the flexible connector 202, it absorbs lateral forces during the driving process, preventing the crystal from bearing additional torque. The drive component 403 can also be a stepper motor with grating ruler feedback, but this requires a resolution of less than or equal to 10 nm. Furthermore, stepper motors with grating ruler feedback have a wider stroke range, up to 100 μm.

[0048] In the above technical solutions, the drive component 403 has more options, which can meet different usage needs and reduce production and manufacturing costs.

[0049] In some embodiments of the present invention, such as Figure 2 As shown, two flexible connectors 202 and at least two force-applying parts 401 are arranged along the length direction of the single crystal plate 201, and the at least two force-applying parts 401 are symmetrically arranged along the length direction of the single crystal plate 201.

[0050] There can be two force-applying parts 401. The two force-applying parts 401 and the two flexible connectors 202 enable a four-point bending structure to be formed on the single-crystal plate 201. (Reference) Figure 3 The horizontally placed rectangular structure is a single-crystal plate 201, with its length direction being the main direction of force and deformation. This four-point bending structure includes two fixed support points F1 and F2 formed by two flexible connectors 202, and two movable loading points F3 and F4 formed by two force-applying parts 401. All support points and loading points can be symmetrically distributed along the length direction of the single-crystal plate 201. In the direction of force, the two movable loading points apply an upward force perpendicular to the upper surface of the single-crystal plate 201, while the two fixed support points generate a vertically downward reaction force, forming a symmetrical and uniform bending moment.

[0051] Optionally, the two support points F1 and F2 can be located at 1 / 4 and 3 / 4 of the length of the single-crystal plate 201, or at 1 / 6 and 5 / 6 of the length. Optionally, the two movable loading points F3 and F4 can be located at 1 / 3 and 2 / 3 of the length of the single-crystal plate 201, or at a symmetrical position at 1 / 2 of the length of the single-crystal plate 201. By setting the two support points F1 and F2 and the two movable loading points F3 and F4 in the above configuration, the single-crystal plate 201 generates a uniform bending moment when subjected to force, forming an ideal arc-shaped curved surface and improving the focusing effect.

[0052] In some embodiments of the present invention, the force-applying part 401 is a push rod assembly, which is attached to the back surface 201b by a buffer pad.

[0053] In the above technical solution, the push rod assembly can be made of high-strength titanium alloy, or it can be made of tungsten carbide, zirconium oxide ceramic, or other materials. The diameter of the push rod assembly is 5mm~8mm, and the length is customized according to the cavity height of the base assembly 10, ensuring that one end of the push rod assembly is rigidly connected to the output end of the drive component 403, and the other end is perpendicularly attached to the back surface 201b of the single crystal plate 201. The buffer pad serves two purposes: first, to prevent the hard metal push rod from directly contacting the back surface 201b of the single crystal plate 201, thus avoiding scratches on the crystal surface (scratches on the crystal surface will cause X-ray scattering and reduce diffraction efficiency); second, the Teflon material has excellent lubricity and buffering performance, which can disperse the stress at the loading point, avoid local stress concentration that could lead to crystal breakage, and prevent scratches on the crystal surface.

[0054] Optionally, the cushioning pad can be made of materials such as Teflon, polyetheretherketone (PEEK), and silicon nitride ceramic. Using these materials can achieve scratch resistance and stress dispersion. Among them, silicon nitride ceramic material can also be used in high-temperature environments (less than or equal to 150°C), which can expand the operating temperature range of the device.

[0055] Optionally, the thickness of the buffer pad is 1mm to 2mm, the surface is polished, the roughness Ra is less than or equal to 0.2nm, and the contact with the back side 201b of the single crystal plate 201 is a surface contact to ensure uniform force transmission.

[0056] In some embodiments of the present invention, the single-crystal plate 201 is rectangular. In this technical solution, the single-crystal plate 201 can be a rectangle with right-angled edges. The single-crystal plate 201 can also be a rectangle with rounded corners. Using a rounded corner design can further reduce the problem of edge stress concentration during bending.

[0057] In some embodiments of the present invention, the thickness of the single crystal plate 201 is 0.3 mm to 0.5 mm.

[0058] It is understandable that the thickness of the single-crystal plate 201 can be, but is not limited to, 0.3mm, 0.32mm, 0.35mm, 0.37mm, 0.4mm, 0.42mm, 0.45mm, 0.47mm, 0.5mm, etc. If the thickness of the single-crystal plate 201 is less than 0.3mm, the mechanical strength of the crystal will decrease significantly, and it will be prone to brittle fracture during assembly and transportation. Moreover, the excessively thin crystal is extremely sensitive to environmental vibration and acoustic noise, causing high-frequency jitter of the reflected light spot, which seriously affects the signal-to-noise ratio (SNR) of the spectral data. If the thickness of the single-crystal plate 201 exceeds 0.5mm, the bending stiffness of the crystal will increase cubically, and the loading force required to achieve the same curvature will increase significantly. This will not only increase the volume and mechanical stress of the cold bending loading mechanism 40, but may also cause the contact point between the crystal and the push rod to crack. At the same time, the shear stress generated when the thick crystal is bent will cause uneven lattice spacing, reducing energy resolution.

[0059] In other words, in the above technical solution, by setting the thickness of the single crystal plate 201 within the above range, the single crystal plate 201 can balance the elastic deformation capability and mechanical strength, ensuring both mechanical strength (no risk of assembly breakage) and anti-interference capability (reflected light spot jitter amplitude less than or equal to 0.8μm) and diffraction efficiency (relative to perfect crystal greater than or equal to 90%).

[0060] In some embodiments of the present invention, the aspect ratio of the long side length to the short side width of the single-crystal plate 201 is between 1.8 and 3.2. In the above technical solutions, the aspect ratio of the long side length to the short side width of the single-crystal plate 201 can be, but is not limited to, 1.8, 1.9, 2.0, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3.0, 3.1, 3.2, etc. This proportional design ensures that the curved surface formed by the single-crystal plate 201 when bent is closer to the ideal focusing geometry (such as a cylinder or torus), avoiding surface distortion caused by an imbalance in the aspect ratio.

[0061] In some embodiments of the present invention, the roughness Ra of the front surface 201a is less than or equal to 0.8 nm, and the lattice of the front surface 201a matches the Rowland circle geometry. In the above technical solution, the roughness Ra of the front surface 201a can be, but is not limited to, 0.8 nm, 0.7 nm, 0.6 nm, 0.5 nm, 0.4 nm, etc. By precision polishing the working surface (the surface facing the incident X-rays) of the single crystal plate 201, the lattice plane of the surface matches the Rowland circle geometry. This reduces scattering loss during X-ray reflection and ensures the accuracy and monochromaticity of the focused spot.

[0062] In some embodiments of the present invention, such as Figure 4 and Figure 5As shown, the flexible connector 202 includes a clamping seat 2021 and an elastic member 2022. The clamping seat 2021 is disposed on the base assembly 10. The clamping seat 2021 has a clamping groove 2021a that opens toward one side of the single crystal plate 201. The end of the single crystal plate 201 is disposed in the clamping groove 2021a. The elastic member 2022 is disposed in the clamping groove 2021a and elastically abuts against the back surface 201b along the thickness direction of the single crystal plate 201.

[0063] The elastic element 2022 can be, but is not limited to, a spring sheet or a flexible hinge. Optionally, the spring sheet is selected based on its moderate elastic modulus (approximately 130 GPa), high fatigue strength, and ability to maintain stable elastic properties during repeated bending. For example, the elastic element 2022 can be a beryllium bronze spring sheet. The flexible hinge can be manufactured using wire cutting technology to form a micron-scale elastic deformation region.

[0064] Optionally, the connection between the elastic element 2022 and the monocrystalline plate 201 adopts a low-stress bonding process. The adhesive is an epoxy-based low-temperature curing adhesive with a curing temperature of less than or equal to 80°C to avoid damage to the crystal lattice during the high-temperature curing process. The thickness of the adhesive layer is controlled at 10μm~20μm to ensure the connection strength without affecting the elastic deformation of the crystal.

[0065] In some embodiments of the present invention, such as Figure 5 As shown, the elastic element 2022 includes multiple spring pieces 2001, which are spaced apart along the thickness direction of the single-crystal plate 201 and connected at one end to the clamping seat 2021. In the above technical solution, the multiple spring pieces 2001 can provide multi-level elastic forces, allowing the two ends of the single-crystal plate 201 to undergo large bending angles and adapt to larger rotation angles, thereby better adapting to the bending deformation of the single-crystal plate 201.

[0066] Optionally, the spring sheet 2001 can be one of beryllium bronze spring sheet, phosphor bronze spring sheet, or thin fluororubber elastomer. Using this material can release the axial tensile stress during crystal bending, allowing rotation within a ±5° range at the end, and preventing surface distortion or breakage.

[0067] Furthermore, such as Figure 5 As shown, the clamping base 2021 is provided with bolt holes 2021b. The flexible connector 202 may also include fixing bolts 2023. The fixing bolts 2023 pass through the bolt holes 2021b. That is, multiple spring pieces 2001 are installed on the clamping base 2021 through the fixing bolts 2023. Then, a torque wrench is used to tighten them. The torque is controlled at 0.5 N·m to 1 N·m to avoid excessive torque causing initial stress concentration of the single crystal plate 201.

[0068] In some embodiments of the present invention, the deformation detection element 30 is a contact detection element and is closely attached to the back surface 201b, and generates a feedback signal synchronously through the bending deformation of the single crystal plate 201; or, the deformation detection element 30 is a non-contact detection element and is disposed on the base assembly 10, and outputs a feedback signal by sensing the change in physical quantity generated by the bending deformation of the single crystal plate 201.

[0069] The deformation detection element 30 is a contact-type detection element, such as a resistance strain gauge sensor. Specifically, a metal foil strain gauge (sensitivity coefficient K = 2.0~2.2) can be used, which is attached to the back surface 201b of the single-crystal plate 201 using a special adhesive. The attachment positions are the midpoint and symmetrical positions on both sides of the length direction of the single-crystal plate 201 (a total of 3~5 measuring points). The grid length of the metal foil strain gauge is 1mm~2mm and the grid width is 0.5mm to ensure that it can accurately capture local strain changes in the crystal. The bonding process between the single-crystal plate 201 and the resistance strain gauge sensor can be carried out at room temperature. After the adhesive cures, the strain gauge leads are soldered. Shielded wires are used for the leads to avoid electromagnetic interference.

[0070] When the single crystal plate 201 undergoes elastic deformation, the metal foil strain gauge will generate synchronous strain with the single crystal plate 201, causing its resistance value to change. The strain gauge converts the resistance change into an electrical signal (voltage signal range of 0~10V) and transmits it to the control system. The control system calculates the actual radius of curvature of the crystal based on the conversion relationship between strain value and curvature (based on the beam bending theory in mechanics of materials: κ=ε / h, where κ is curvature, ε is strain, and h is crystal thickness).

[0071] The deformation detection element 30 can also be a non-contact laser displacement sensor, installed on the side wall of the base assembly 10, with the emitting end of the non-contact laser displacement sensor aligned with the back surface 201b of the single-crystal plate 201. Optionally, the detection distance of the non-contact laser displacement sensor is 50mm~100mm, the measurement range is ±100μm, the resolution is less than or equal to 0.1nm, and the sampling frequency is 100Hz~1000Hz. The technical advantage of the non-contact laser displacement sensor is that it is non-contact measurement and will not interfere with the deformation of the single-crystal plate 201. It is suitable for scenarios with higher measurement accuracy requirements. Its working principle is to emit a laser beam to the crystal surface, receive the reflected beam, calculate the distance between the sensor and the crystal surface based on the laser propagation time difference or phase difference, and then fit the actual curved surface of the crystal through multi-point distance data to calculate the radius of curvature. Both types of sensors can be selected according to experimental requirements, and both can achieve real-time monitoring to ensure the timeliness and accuracy of closed-loop control.

[0072] The deformation detection element 30 can also be one of a fiber optic displacement sensor, a capacitive displacement sensor, or a holographic interferometer. Among these, the fiber optic displacement sensor has a resolution of 0.1 nm or less and stronger resistance to electromagnetic interference. The capacitive displacement sensor has a detection accuracy of 0.5 nm or less and is suitable for humid environments. The holographic interferometer can detect the crystal surface shape across the entire field and simultaneously acquire multi-point curvature data, improving the comprehensiveness of closed-loop control.

[0073] The following is combined Figures 1 to 5 This describes a specific embodiment of the X-ray monochromator device 100 of the present invention.

[0074] The X-ray monochromator device 100 includes: a base assembly 10, a spectroscopic crystal assembly 20, a deformation detection element 30, and a loading mechanism 40.

[0075] The spectroscopic crystal assembly 20 includes a single crystal plate 201 and two flexible connectors 202.

[0076] The single-crystal plate 201 is elastically deformable and has a front side 201a and a back side 201b, with the front side 201a facing the X-ray incident direction. The single-crystal plate 201 is rectangular and has a thickness of 0.3mm to 0.5mm. The aspect ratio of the length of the long side to the width of the short side of the single-crystal plate 201 is between 1.8 and 3.2.

[0077] Two flexible connectors 202 are symmetrically arranged on one side of the back surface 201b of the single-crystal plate 201. Each flexible connector 202 includes a clamping seat 2021 and an elastic element 2022. The clamping seat 2021 is mounted on the base assembly 10 and has a clamping groove 2021a opening towards one side of the single-crystal plate 201. The end of the single-crystal plate 201 is located within the clamping groove 2021a. The elastic element 2022 is located within the clamping groove 2021a and elastically abuts against the back surface 201b along the thickness direction of the single-crystal plate 201. The elastic element 2022 includes multiple spring pieces 2001, which are spaced apart along the thickness direction of the single-crystal plate 201 and connected at one end to the clamping seat 2021. The spring pieces 2001 are beryllium bronze spring pieces.

[0078] The deformation detection element 30 is a resistance strain gauge sensor, and multiple of them are set and bonded to the midpoint and symmetrical positions on both sides of the length direction of the single crystal plate 201 to monitor the curvature change of the single crystal plate 201 in real time and generate feedback signals.

[0079] The loading mechanism 40 is mounted on the base assembly 10 and includes a force-applying part 401, a support frame 402, and a driving component 403. The support frame 402 is mounted on the base assembly 10. The driving component 403 is capable of submicron-level displacement and uses a closed-loop controlled piezoelectric ceramic actuator with a resolution of less than 8 nm. The force-applying part 401 is a push rod assembly, consisting of two parts, and is connected to the output shaft of the piezoelectric ceramic actuator. The two force-applying parts 401 are in close contact with the back surface 201b of the single-crystal plate 201 via Teflon buffer pads. The loading mechanism 40 can control at least two force-applying parts 401 to act on the single-crystal plate 201 according to feedback signals, so that the single-crystal plate 201 forms a focusing surface that meets the target requirements within the elastic limit.

[0080] Two flexible connectors 202 and two force-applying parts 401 are arranged along the length of the single crystal plate 201, and the two force-applying parts 401 are symmetrically arranged along the length of the single crystal plate 201.

[0081] An adjustment method for an X-ray monochromator device 100 according to an embodiment of the present invention uses an X-ray monochromator device 100 as described in any of the preceding embodiments. Figure 6 As shown, the method of the X-ray monochromator device 100 according to an embodiment of the present invention includes: In step S1, the single crystal plate 201 is mounted on the base assembly 10 via the flexible connector 202.

[0082] The purpose of the above steps is to ensure that the initial state of the monocrystalline plate 201 after installation is flat and uniformly stressed, laying the foundation for subsequent deformation adjustment. The monocrystalline plate 201 is fixed to the top support platform of the base assembly 10 using the flexible connector 202. During installation, a level is used to calibrate the front side 201a of the monocrystalline plate 201 to ensure that the levelness error is less than or equal to 3μm. After installation, the initial curvature of the monocrystalline plate 201 is detected using the deformation detection component 30 to ensure that the initial curvature radius is greater than or equal to 10m (approximately flat state). If the initial curvature does not meet the requirements, the position of the flexible connector 202 is finely adjusted until the initial state requirements are met.

[0083] Step S2: Calculate the target radius of curvature required for the single crystal plate 201 based on the X-ray energy and focusing geometry requirements of the experiment.

[0084] Based on Bragg's law and focusing geometry requirements, the target radius of curvature required for the single-crystal plate 201 was determined through theoretical calculations. The experimenters input the required X-ray energy E (unit: keV), and calculated the corresponding X-ray wavelength according to the conversion relationship between X-ray wavelength and energy (λ=12.398 / E, where λ is the X-ray wavelength, unit: Å). According to Bragg's law (2dsinθ = nλ, where d is the interplanar spacing of the crystal, d=3.1355Å for Si(111), d=3.266Å for Ge(111); θ is the Bragg angle; n is the diffraction order, usually n=1), the Bragg angle θ required to achieve monochromaticity was calculated. Combining the focusing requirements of the experimental optical path (such as Rowland circle focusing geometry, the relationship between the Rowland circle radius R0 and the crystal radius of curvature R is R=2R0sinθ), the target radius of curvature R required for the single-crystal plate 201 was calculated. target All calculations are performed by algorithms built into the control system, with a calculation accuracy of less than or equal to 0.1 μm and a target radius of curvature ranging from 1 m to 10 m, which can cover the focusing requirements of most XAFS and XES experiments.

[0085] Step S3: Control the operation of at least two force-applying parts 401 of the loading mechanism 40. The operation of at least two force-applying parts 401 applies a bending moment to the back surface 201b of the single crystal plate 201, causing the single crystal plate 201 to undergo elastic deformation.

[0086] The control system is based on the calculated target radius of curvature R target This is converted into the target displacement ΔL of the piezoelectric ceramic actuator (the conversion relationship between displacement and radius of curvature is based on beam bending theory: ΔL=(L²) / (8R)). target (where L is the effective length of the crystal plate). The control system sends a driving voltage signal to the driving component 403, which converts the electrical signal into a nanometer-scale linear displacement. This displacement is then transmitted to the loading point on the back surface 201b of the single-crystal crystal plate 201 through the force application part 401. Under the action of the four-point bending structure, a uniform upward torque is applied to the loading point, driving the single-crystal crystal plate 201 to undergo bending deformation within its elastic range. The deformation direction is adapted to the X-ray incident direction, ensuring that the working surface forms a preset focusing surface. In this step, the displacement output of the driving component 403 adopts a step-by-step loading method, with each loading displacement increment being 50nm~100nm, avoiding excessive crystal stress caused by a single loading.

[0087] In step S4, the deformation detection component 30 detects the actual curvature data of the surface of the single crystal plate 201 in real time and generates a feedback signal.

[0088] Simultaneously with the deformation of the single-crystal plate 201, the deformation detection element 30 initiates real-time monitoring. For example, the deformation detection element 30 can be a resistance strain gauge sensor. The resistance strain gauge sensor collects the strain data of the single-crystal plate 201 in real time, outputting a resistance change signal every 10ms. This signal is converted into a strain value ε by a strain gauge, and the control system calculates the actual curvature κ based on κ=ε / h. actual This leads to the actual radius of curvature R. actual =1 / κ actual The deformation detection element 30 can also be a laser displacement sensor. The laser displacement sensor samples at multiple points (the number of sampling points is greater than or equal to 5, and they are evenly distributed along the length of the single crystal plate 201). It outputs the distance data of each sampling point every 20ms. The control system fits the actual surface equation of the crystal plate using the least squares method and calculates the actual radius of curvature R. actual The data collected by the deformation detection element 30 is transmitted in real time to the data processing module of the control system of the X-ray monochromator device 100, with a data transmission delay of less than or equal to 50ms, ensuring timely feedback.

[0089] Step S5: Compare the actual curvature data fed back by the feedback signal with the target curvature radius, and control the output displacement of at least two force-applying parts 401 until the actual curvature of the single crystal plate 201 reaches the target curvature radius and remains stable.

[0090] The closed-loop control module of the control system will use the actual radius of curvature R actual With the target radius of curvature R target By comparison, the deviation value ΔR = |R actual -R target If ΔR > 0.1μm (preset accuracy threshold), then based on the sign and magnitude of the deviation, the drive voltage output to the drive component 403 (e.g., piezoelectric ceramic actuator) is adjusted using a PID (proportional-integral-derivative) control algorithm: if R actual >R target (If the actual curvature is too large), increase the driving voltage to increase the displacement of the force-applying part 401, further bending the crystal; if R actual <R target(If the actual curvature is too small), reduce the driving voltage and the displacement of the force-applying part 401 to release some deformation. During fine-tuning, the displacement increment is reduced to 1nm~5nm to ensure the accuracy of the adjustment. After each fine-tuning, the detection step S4 is repeated until ΔR≤0.1μm. At this time, the control system maintains the current driving voltage, the driving component 403 maintains a stable displacement, and the curvature of the single crystal plate 201 remains stable, completing the adjustment process. The response time of the entire closed-loop adjustment is less than or equal to 1s, enabling fast and accurate adjustment. At the same time, it ensures that the curvature stability of the single crystal plate 201 is less than or equal to 0.05μm during long-term operation (greater than or equal to 8 hours), meeting the experimental requirements for beam stability.

[0091] According to the adjustment method of the X-ray monochromator device 100 of the present invention, the X-ray monochromator device 100 operates at room temperature without the need for a heating device, thus avoiding permanent defects such as lattice dislocations and slip bands caused by high temperature, ensuring the integrity of the crystal lattice, and significantly improving the X-ray diffraction efficiency. This effectively solves the problems of insufficient reflection intensity and difficulty in adapting to high-brightness synchrotron radiation or low-concentration sample analysis in the prior art. It can avoid lattice damage caused by thermal processing, and ensure the continuity and accuracy of curvature adjustment through closed-loop control between the loading mechanism 40 and the deformation detection element 30. It can achieve continuous adjustable curvature of the single crystal plate 201, no thermal lattice damage, and high energy resolution.

[0092] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0093] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An X-ray monochromator device, characterized in that, include: Base assembly; The beam splitter crystal assembly includes a single crystal plate and two flexible connectors. The single crystal plate is constructed to be elastically deformable and has a front and a back. The front is configured to face the X-ray incident direction. The two flexible connectors are symmetrically arranged on one side of the back of the single crystal plate and connect the single crystal plate and the base assembly. A deformation detection device is disposed on the base assembly or the single crystal plate to monitor the curvature change of the single crystal plate in real time and generate a feedback signal. A loading mechanism is provided on the base assembly. The loading mechanism includes at least two force-applying parts, which are located between the two flexible connectors. The at least two force-applying parts act on the back side. The loading mechanism can control the at least two force-applying parts to act on the single crystal plate according to the feedback signal, so that the single crystal plate forms a focused curved surface that meets the target requirements within the elastic limit.

2. The X-ray monochromator device according to claim 1, characterized in that, The loading mechanism includes a support frame and a drive component. The support frame is mounted on the base assembly, and the drive component is configured to perform submicron-level precision displacement. The drive component is mounted on the support frame and connected to the at least two force-applying parts to drive the at least two force-applying parts to move independently of each other.

3. The X-ray monochromator device according to claim 2, characterized in that, The linear displacement resolution of the driving component is less than or equal to 14 nm.

4. The X-ray monochromator device according to claim 3, characterized in that, The driving component is one of the following: a piezoelectric ceramic actuator with closed-loop control, a voice coil motor with closed-loop control, an electromagnetic actuator with closed-loop control, or a stepper motor with grating ruler feedback.

5. The X-ray monochromator apparatus according to any one of claims 2 to 4, characterized in that, The two flexible connectors and the at least two force-applying parts are arranged along the length direction of the single crystal plate, and the at least two force-applying parts are symmetrically arranged along the length direction of the single crystal plate.

6. The X-ray monochromator apparatus according to any one of claims 2 to 4, characterized in that, The force-applying part is a push rod assembly, which is attached to the back side by a buffer pad.

7. The X-ray monochromator apparatus according to claim 1, characterized in that, The single crystal plate is rectangular, and the thickness of the single crystal plate is 0.3mm~0.5mm.

8. The X-ray monochromator apparatus according to claim 7, characterized in that, The aspect ratio of the long side length to the short side width of the single crystal plate is between 1.8 and 3.

2.

9. The X-ray monochromator apparatus according to any one of claims 1, 7, or 8, characterized in that, The surface roughness Ra is less than or equal to 0.8 nm, and the lattice of the surface matches the geometry of the Rowland circle.

10. The X-ray monochromator apparatus according to claim 1, characterized in that, The flexible connector includes a clamping seat and an elastic element. The clamping seat is disposed on the base assembly and has a clamping groove that opens toward one side of the single crystal plate. The end of the single crystal plate is disposed in the clamping groove. The elastic element is disposed in the clamping groove and elastically abuts against the back side along the thickness direction of the single crystal plate.

11. The X-ray monochromator apparatus according to claim 1, characterized in that, The deformation detection element is a contact detection element and is closely attached to the back side, generating a feedback signal synchronously with the bending deformation of the single crystal plate; or, the deformation detection element is a non-contact detection element and is disposed on the base assembly, outputting a feedback signal by sensing the change in physical quantity generated by the bending deformation of the single crystal plate.

12. A method for adjusting an X-ray monochromator device, characterized in that, The method, using the X-ray monochromator apparatus as described in any one of claims 1 to 11, comprises: The single-crystal plate is mounted on the base assembly via the flexible connector; Calculate the target radius of curvature required for the single crystal plate based on the X-ray energy and focusing geometry requirements of the experiment. The loading mechanism controls the operation of at least two force-applying parts, which apply a bending moment to the back surface of the single crystal plate, causing the single crystal plate to undergo elastic deformation. The deformation detection device detects the actual curvature data of the surface of the single crystal plate in real time and generates the feedback signal. The actual curvature data fed back by the feedback signal is compared with the target curvature radius to control the output displacement of the at least two force-applying parts until the actual curvature of the single crystal plate reaches the target curvature radius and remains stable.

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