A pose calibration device for a surface shape detection apparatus

Abstract

The application discloses a pose calibration device of a surface shape detection equipment and belongs to the technical field of precise optical measurement, and aims to solve the technical problem of low pose monitoring precision of the existing surface shape detection equipment. The optical fiber light output joint assembly outputs a laser beam provided by a laser control assembly, the laser beam is sequentially incident to a beam splitter assembly after passing through a No. 2 mirror assembly, a beam splitting prism assembly and a No. 1 mirror assembly, and the reflected light of the beam splitter assembly is incident to a measured element after passing through a collimating and expanding main mirror; the laser beam reflected by the measured element is incident to the beam splitter assembly after passing through the collimating and expanding main mirror and is divided into a transmitted beam and a reflected beam, the transmitted beam is incident to a projection screen assembly after passing through a No. 5 mirror assembly and a No. 4 mirror assembly, a light spot image is formed, and the light spot image coordinates are detected through a pose monitoring camera assembly; and the reflected beam enters a diffraction light spot collection camera assembly after passing through the No. 1 mirror assembly, the beam splitting prism assembly, a No. 3 mirror assembly and a diaphragm assembly.

Description

Technical Field

[0001] This invention belongs to the field of precision optical measurement technology, and relates to the precision pose measurement of large-aperture optical elements, and particularly to a pose calibration device for a surface shape detection device. Background Technology

[0002] In recent years, my country's aerospace technology has developed rapidly, and technologies such as space optics and Earth remote sensing have also advanced rapidly. These advancements have placed higher demands on optical systems, especially on the surface shape error, roughness, and mid-to-high frequency control of optical components. Therefore, how to achieve efficient and high-quality manufacturing of optical components is a common problem faced by optical engineers.

[0003] Deviations in the surface shape of optical components can directly alter the optical path, degrade imaging / beam quality, and ultimately lead to optical system failure. Therefore, it is essential to detect and control the surface shape of optical components.

[0004] Surface shape inspection of optical components measures the deviation between the surface (shape) of the optical component and the ideal designed surface shape. The detection principle is to detect and determine the direction of light propagation. An ideal plane / sphere will reflect and refract the optical fiber according to the design rules, while the unevenness or undulation of the surface will cause additional refraction of the light, resulting in a larger beam divergence angle, beam distortion, uneven energy distribution, wavefront distortion, and deviation from the theoretical optical path.

[0005] Optical component surface shape inspection methods include interferometry, working template method, sub-aperture stitching method, and CGH compensation method. Interferometry utilizes the interference phenomenon of light, superimposing the reflected / transmitted light waves from the optical surface under test with a standard reference light wave to form interference fringes. By analyzing the fringe morphology, density, and distortion, the surface shape deviation of the component under test is calculated. The working template method is the most traditional and simple qualitative / semi-quantitative surface shape inspection method in optical processing. It relies on the fitting and comparison of a standard optical template with the component under test, and the surface shape deviation is judged by observing the interference rings (Newton's rings). The sub-aperture stitching method measures multiple sub-apertures in different areas and stitches them together to form the full-aperture surface shape, solving the problem of insufficient aperture in large-aperture interferometers. The CGH compensation method uses a computer-generated hologram (CGH) as a compensator to convert aspherical wavefronts into spherical / planar wavefronts, achieving zero-position interferometric detection.

[0006] Patent application number 202510066424.6 discloses an in-situ detection device and method for the surface shape of an optomechanical component. A laser beam generated by a laser sequentially passes through a beam isolator, a beam splitter, and a collimating lens A before being incident on the optomechanical component under test and reflected. The reflected light from the optomechanical component under test passes through collimating lens A and then enters the beam splitter, where it is reflected again. The reflected light from the beam splitter passes through a perforated screen, a collimating lens B, and a phase plate before being incident on a CCD camera. The CCD camera is connected to a computer system, and the light spot image recorded by the CCD camera is input into the computer system for in-situ surface shape detection. This method modulates the reflected light from the sample under test using a phase plate and employs a phase reconstruction algorithm based on optical field diffraction iteration to reconstruct the sample surface shape.

[0007] While the aforementioned detection devices and methods can achieve surface shape detection and reconstruction of optical elements, during the surface shape detection process, in addition to the detection optical path affecting the diffraction spot and ultimately the measurement results, the pose accuracy of the optical element under test will also directly affect the acquisition quality of the diffraction spot and ultimately the measurement results. Therefore, how to monitor the pose of the optical element under test is also crucial to the final surface shape detection results.

[0008] In existing technologies, pose monitoring often employs single-channel laser collimation or tilt sensors, which have low measurement accuracy and cannot meet the high-precision requirements of ≤2 arcseconds. Furthermore, they suffer from measurement blind zones; when measuring the edge region of the component under test, the monitoring optical path easily detaches from the measured surface. They also exhibit poor coordination with external devices such as robotic arms, failing to achieve real-time compensation feedback. The complex optical path design results in significant stray light interference, leading to a decrease in the quality of the diffraction spot. Therefore, there is an urgent need for a modular device that integrates high-precision pose monitoring, blind-zone-free measurement, and collaborative control with external devices to improve the automation level and measurement accuracy of pose monitoring in surface shape detection equipment. Summary of the Invention

[0009] The purpose of this invention is to provide a pose calibration device for surface shape detection equipment in order to solve the technical problem of low pose monitoring accuracy in existing surface shape detection equipment.

[0010] To achieve the above objectives, the present invention specifically adopts the following technical solution: A pose calibration device for a surface shape detection equipment includes a laser control component, an optical fiber output connector component, a second reflector component, a beam splitter component, a first reflector component, a beam splitter component, a collimating and expanding primary mirror, a third reflector component, an aperture component, a diffraction spot acquisition camera component, a fifth reflector component, a fourth reflector component, a projection screen component, and a pose monitoring camera component. The fiber optic connector assembly outputs a laser beam provided by the laser control assembly. The laser beam passes sequentially through mirror assembly 2, beam splitter assembly, and mirror assembly 1 before entering the beam splitter assembly. The reflected light from the beam splitter assembly passes through the collimating and expanding main mirror before entering the device under test (DUT). The laser beam reflected by the DUT passes through the collimating and expanding main mirror before entering the beam splitter assembly and splitting into a transmitted beam and a reflected beam. The transmitted beam passes through mirror assembly 5 and mirror assembly 4 before entering the projection screen assembly. The beam converges to the attitude monitoring camera assembly after passing through the projection screen assembly. The beam forms a spot on the diffuser plate inside the attitude monitoring camera assembly, and the coordinates of the spot image are detected. The reflected beam passes through mirror assembly 1, beam splitter assembly, mirror assembly 3, and aperture assembly before entering the diffraction spot acquisition camera assembly.

[0011] Furthermore, it also includes the enclosure, and the lower fixed base plate and the upper fixed base plate arranged in the upper and lower layers of the enclosure; The laser control assembly, fiber optic connector assembly, No. 2 reflector assembly, beam splitter assembly, No. 1 reflector assembly, No. 3 reflector assembly, aperture assembly, and diffraction spot acquisition camera assembly are all mounted on the upper fixed base plate. The beam splitter assembly, mirror No. 5 assembly, mirror No. 4 assembly, projection screen assembly, and pose monitoring camera assembly are all mounted on the lower fixed base plate; A through hole is provided at the position of the No. 1 reflector assembly on the upper fixed base plate, and the reflected beam of the beam splitter assembly passes through the through hole and enters the No. 1 reflector assembly.

[0012] Furthermore, the beam splitter assembly includes a beam splitter mount mounted on the lower fixed base plate and a beam splitter mounted on the beam splitter mount; The No. 5 reflector assembly includes a reflector mount mounted on the lower fixed base plate and a reflector mounted on the reflector mount; The No. 4 reflector assembly includes a reflector mount mounted on the lower fixed base plate and a reflector mounted on the reflector mount; The projection screen assembly includes a projection screen bracket mounted on the lower fixed base plate and a projection screen mounted on the projection screen bracket; The pose monitoring camera assembly includes a camera bracket on a lower fixed base plate and a board camera mounted on the camera bracket.

[0013] Furthermore, the laser control assembly includes a bracket mounted on an upper fixed base plate, on which a stable point source, an adjustable attenuator, and a laser are mounted; The No. 1 reflector assembly includes a reflector mount mounted on the upper fixed base plate and a reflector mounted on the reflector mount; The beam splitter assembly includes an adjustment base mounted on the upper fixed base plate, a bracket mounted on the adjustment base, and a prism mounted on the bracket; The No. 2 reflector assembly includes a reflector mount mounted on the upper fixed base plate and a reflector mounted on the reflector mount; The No. 3 reflector assembly includes a reflector mount mounted on the upper fixed base plate and a reflector mounted on the reflector mount; The diffraction spot acquisition camera assembly includes a translation guide rail mounted on the upper fixed base plate, a camera bracket mounted on the translation guide rail, and an IDS camera mounted on the camera bracket; The aperture assembly includes a bracket mounted on the upper fixed base plate, and a small aperture aperture and filter mounted on the bracket.

[0014] Furthermore, it also includes left and right panels located on the left and right sides of the enclosure; The left panel has a plug panel, and the collimating and beam-expanding primary lens is mounted on the right panel.

[0015] The beneficial effects of this invention are as follows: In this invention, the entire device has the advantages of integration, high precision, and synergy. All optical components, such as the pose monitoring component, measurement light source component, collimation and beam expansion component, and image acquisition component, are mounted on an integrated double-layer base plate to ensure stable support and synchronous changes with temperature variations. The common optical path scheme enables seamless integration of pose monitoring and diffraction imaging, greatly improving the flexibility and efficiency of pose calibration, reducing the errors caused by the previous need for different methods and experimental platforms, and exhibiting high consistency, effectively improving the pose monitoring accuracy of the surface shape detection equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the external structure of the present invention; Figure 2 This is a schematic diagram of the internal structure of the present invention; Figure 3 This is a schematic diagram of the internal structure from another perspective of the present invention; Figure 4 This is a schematic diagram of the plug panel structure in this invention; Figure 5 This is a schematic diagram of the internal optical path in this invention; Figure 6 This is a schematic diagram of the light spot generated when the tested element is perpendicular to the light beam in this invention; Figure 7 This is a schematic diagram of the light spot generated when the measured element and the light beam have an angle in this invention; The attached figures are labeled as follows: 100-Box body, 200-Left panel, 300-Right panel, 400-Lower fixed base plate, 500-Upper fixed base plate, 201-Plug panel, 301-Collimating and expanding primary mirror, 401-No. 5 reflector assembly, 402-Beam splitter assembly, 403-No. 4 reflector assembly, 404-Projection screen assembly, 405-Position monitoring camera assembly, 501-No. 1 reflector assembly, 502-Beam splitter prism assembly, 503-No. 2 reflector assembly, 504-Fiber optic output connector assembly, 505-No. 3 reflector assembly, 506-Diffraction spot acquisition camera assembly, 507-Aperture assembly, 508-Laser control assembly. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments.

[0018] Therefore, all other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0019] This embodiment provides a pose calibration device for a surface shape detection equipment, used for pose detection and calibration of surface shape detection equipment for large-aperture optical components. It is suitable for precision pose measurement and performance evaluation of large-aperture optical components and can be applied to advanced manufacturing, aerospace and other fields. It is convenient, fast and has broad application prospects.

[0020] like Figure 1 and Figure 2 As shown, the orientation calibration device of the surface shape detection equipment includes a housing 100, a left panel 200 and a right panel 300 disposed on the left and right sides of the housing 100, and a lower fixed base plate 400 and an upper fixed base plate 500 disposed on the upper and lower layers inside the housing. The housing 100, the left panel 200, the right panel 300 and the lower fixed base plate 400 can form a sealed environment and cover the upper fixed base plate 500 inside, which is used to protect the components inside the housing.

[0021] The enclosure 100 is detachable, with its lower part able to be attached to the lower fixed base plate 400, its left side able to be attached to the left panel 200, and its right side able to be attached to the right panel 300, forming a sealed environment.

[0022] like Figures 2-4 As shown, a plug panel 201 is provided on the left panel 200. The plug panel 201 can be used to connect the cables of the pose monitoring camera assembly 405, the laser control assembly 508, and the diffraction spot acquisition camera assembly 506 to an external computer and power supply.

[0023] A collimating and beam-expanding primary mirror 301 is provided on the right panel 300. The collimating and beam-expanding primary mirror 301 is used to output parallel light to the device under test and receive the reflected beam from the device under test.

[0024] like Figure 2 and Figure 3 As shown, the lower fixed base plate 400 is equipped with a No. 5 reflector assembly 401, a beam splitter assembly 402, a No. 4 reflector assembly 403, a projection screen assembly 404, and a pose monitoring camera assembly 405.

[0025] The No. 5 reflector assembly 401 includes a reflector mount mounted on the lower fixed base plate 400 and a reflector mounted on the reflector mount, used to reflect a beam of light (transmitted beam) split off from the beam splitter assembly 402 to the No. 4 reflector assembly 403.

[0026] The beam splitter assembly 402 includes a beam splitter mount mounted on the lower fixed base plate 400 and a beam splitter mounted on the beam splitter mount. It is used to reflect the beam emitted from the No. 1 reflector assembly 501 to the collimating and expanding primary mirror 301 and split the beam reflected back from the device under test into two beams. One beam (transmitted beam) enters the No. 5 reflector assembly 401, and the other beam (reflected beam) enters the No. 1 reflector assembly 501 vertically upward.

[0027] The fourth reflector assembly 403 includes a reflector mount mounted on the lower fixed base plate 400 and a reflector mounted on the reflector mount, used to reflect the light reflected by the fifth reflector assembly 401 into the projection screen assembly 404.

[0028] The projection screen assembly 404 includes a projection screen bracket mounted on the lower fixed base plate 400 and a projection screen mounted on the projection screen bracket, which is used to transmit the light reflected by the No. 4 reflector assembly 403 to the pose monitoring camera assembly 405 and form a light spot on the diffuser plate in the pose monitoring camera assembly 405.

[0029] The pose monitoring camera assembly 405 includes a camera bracket on a lower fixed base plate 400 and a board camera mounted on the camera bracket, used to detect the coordinates of the light spot formed on the diffuser plate inside the pose monitoring camera assembly 405.

[0030] like Figure 2 and Figure 3 As shown, the upper fixed base plate 500 is equipped with a No. 1 reflector assembly 501, a beam splitter assembly 502, a No. 2 reflector assembly 503, an optical fiber output connector assembly 504, a No. 3 reflector assembly 505, a diffraction spot acquisition camera assembly 506, an aperture assembly 507, and a laser control assembly 508.

[0031] The No. 1 reflector assembly 501 includes a reflector mount mounted on the upper fixed base plate 500 and a reflector mounted on the reflector mount, used to reflect the light emitted from the beam splitter assembly 502 to the beam splitter assembly 402 and to reflect a beam of light (reflected beam) split by the beam splitter assembly 402 to the beam splitter assembly 502.

[0032] The beam splitter prism assembly 502 includes an adjustment seat mounted on the upper fixed base plate 500, a bracket mounted on the adjustment seat, and a prism mounted on the bracket, for transmitting the light beam emitted from the second reflector assembly 503 to the first reflector assembly 501 and reflecting the light beam reflected from the first reflector assembly 501 to the third reflector assembly 505.

[0033] The No. 2 reflector assembly 503 includes a reflector mount mounted on the upper fixed base plate 500 and a reflector mounted on the reflector mount, used to reflect the laser beam output from the fiber optic connector assembly 504 to the beam splitter assembly 502.

[0034] The fiber optic output connector assembly 504 consists of a fiber optic flange, fiber optic head, fiber optic bracket, fiber optic adjustment base, and translation stage. It is used to output the laser beam provided by the laser control assembly 508. The laser beam can sequentially pass through the No. 2 reflector assembly 503, the beam splitter assembly 502, the No. 1 reflector assembly 501, the beam splitter assembly 402, and the collimating and expanding primary mirror 301 to illuminate the component under test.

[0035] The No. 3 reflector assembly 505 includes a reflector mount mounted on the upper fixed base plate 500 and a reflector mounted on the reflector mount, used to reflect the light beam emitted from the beam splitter assembly 502 to the aperture assembly 507.

[0036] The aperture assembly 507 includes a bracket mounted on the upper fixed base plate 500, and a small aperture aperture and a filter mounted on the bracket, used to filter out stray interference fringes of the incident light, prevent stray light from entering the diffraction imaging camera, and transmit the light beam emitted from the No. 3 reflector assembly 505 to the diffraction spot acquisition camera assembly 506.

[0037] The diffraction spot acquisition camera assembly 506 includes a translation guide rail mounted on the upper fixed base plate 500, a camera bracket mounted on the translation guide rail, and an IDS camera mounted on the camera bracket, for acquiring diffraction spots.

[0038] The laser control assembly 508 includes a bracket mounted on an upper fixed base plate 500, on which a stable point source, an adjustable attenuator, and a laser are mounted to provide a laser source with adjustable power, which is emitted through the fiber optic output connector assembly 504.

[0039] A through hole is provided on the upper fixed base plate 500 at the position corresponding to the No. 1 reflector assembly 501, and the reflected beam of the beam splitter assembly 402 can pass through the through hole and enter the No. 1 reflector assembly 501.

[0040] The device comprises at least a pose monitoring component consisting of a pose monitoring camera assembly 405, a projection screen assembly 404, and a fourth reflector assembly 403. This component enables real-time, high-precision monitoring and data feedback of the perpendicularity of the device to the optical element under test. A measurement light source assembly, consisting of at least a laser control assembly 508, a measurement light source assembly, and a fiber optic output connector assembly 504, generates a parallel output beam that, after reflection from the device under test, forms a diffraction image. A collimation and beam expanding assembly, consisting of at least a collimating and beam expanding primary mirror 301 and a beam splitter assembly 402, outputs parallel light to the principal light plane. An image acquisition assembly, consisting of at least a diffraction spot acquisition camera assembly 506 and an aperture assembly 507, uses a host computer for image acquisition and processing, and adjusts the CCD target surface and beam focus via a displacement mechanism. The support structure adopts an integrated base plate design, with the upper and lower base plates being a single unit. All optical components, including the pose monitoring component, measurement light source assembly, collimation and beam expanding assembly, and image acquisition assembly, are mounted on the same component, ensuring stable support and synchronous changes with temperature variations, thus maintaining optical path stability.

[0041] When performing pose calibration, its optical path is as follows: Figure 5 As shown, the fiber optic output connector assembly 504 outputs a laser beam provided by the laser control assembly 508. The laser beam passes sequentially through the second reflector assembly 503, the beam splitter assembly 502, and the first reflector assembly 501 before entering the beam splitter assembly 402. The reflected light from the beam splitter assembly 402 passes through the collimating and beam expanding primary mirror 301 before entering the device under test. The laser beam reflected by the device under test passes through the collimating and beam expanding primary mirror 301 before entering the beam splitter assembly 402 and splitting into a transmitted beam and a reflected beam. The transmitted beam passes through mirror assembly 5 (401) and mirror assembly 403 and then enters projection screen assembly 404. After passing through projection screen assembly 404, the beam converges to pose monitoring camera assembly 405. The beam forms a light spot on the diffuser plate in pose monitoring camera assembly 405 and the coordinates of the light spot image are detected. The reflected beam passes through mirror assembly 1 (501), beam splitter assembly 502, mirror assembly 3 (505), and aperture assembly 507 and then enters diffraction spot acquisition camera assembly 506.

[0042] Based on the above optical path, the principle of this embodiment for calibrating the pose of the face shape detection device is as follows: Figure 5As shown, to maintain consistency with the diffraction imaging component, a diffraction light source (wavelength 632.8nm) is used. The beam reflected by the device under test (DUT) is focused by the collimating and beam-expanding primary mirror 301 and split into two beams by the beam splitter assembly 402. One beam goes to the diffraction spot acquisition camera assembly 506, and the other beam converges to the projection screen assembly 404. The pose monitoring camera assembly 405 detects the spot coordinates. When the DUT is perpendicular to the beam, the beam reflected by the DUT returns along the same path. At this time, the converged spot is located at the initial position of the diffuser plate. The position of the spot on the diffuser plate at this time is as follows: Figure 6 As shown; when the measured element and the light beam have a certain angle, the position of the light spot formed by the reflected light beam on the diffuser plate will deviate from the initial position. At this time, the position of the light spot on the diffuser plate is as follows. Figure 7 As shown. Therefore, based on the focal length of the projection screen assembly 404 And the distance the light spot deviates from its initial position The angle of the measured element can then be calculated. .angle The calculation formula is: ; When the component under test has When there is an error, the reflected light path will have 2 The angle error. Therefore, the above calculation formula will be divided by 2 at the end.

[0043] The collimation measurement resolution is affected by the detector resolution and the focal length of the collimating lens. Considering the overall margin, the design self-collimation overall accuracy should reach 2″, which is theoretically higher than the accuracy requirement of "pose measurement accuracy ≤ 5". This device adopts coaxial measurement, which makes the measurement data more reliable.

Claims

1. A pose calibration device for a surface shape detection equipment, characterized in that: The enclosure includes a housing (100), a left panel (200) and a right panel (300) located on the left and right sides of the housing (100), and a lower fixed base plate (400) and an upper fixed base plate (500) located on the upper and lower layers of the housing. A collimating and beam expanding primary mirror (301) is installed on the right panel (300), and a first reflector assembly (501), a beam splitter assembly (502), a second reflector assembly (503), an optical fiber output connector assembly (504), a third reflector assembly (505), and a diffraction spot acquisition camera assembly (506) are installed on the upper fixed base plate (500). The lower fixed base plate (400) is provided with a fifth reflector assembly (401), a beam splitter assembly (402), a fourth reflector assembly (403), a projection screen assembly (404), and a pose monitoring camera assembly (405); the upper fixed base plate (500) is provided with a through hole at the position corresponding to the first reflector assembly (501), and the reflected beam of the beam splitter assembly (402) can pass through the through hole and enter the first reflector assembly (501); The fiber optic output connector assembly (504) outputs a laser beam provided by the laser control assembly (508). The laser beam passes sequentially through the No. 2 reflector assembly (503), the beam splitter assembly (502), and the No. 1 reflector assembly (501) before being incident on the beam splitter assembly (402). The reflected light from the beam splitter assembly (402) passes through the collimating and beam expanding primary mirror (301) before being incident on the device under test. The laser beam reflected by the component under test is incident on the beam splitter assembly (402) after passing through the collimating and expanding primary mirror (301) and split into a transmitted beam and a reflected beam. The transmitted beam is incident on the projection screen assembly (404) after passing through the No. 5 reflector assembly (401) and the No. 4 reflector assembly (403). The beam is then focused on the pose monitoring camera assembly (405) after passing through the projection screen assembly (404). The beam forms a light spot on the diffuser plate in the pose monitoring camera assembly (405). The pose monitoring camera assembly (405) detects the coordinates of the light spot image. The reflected beam enters the diffraction spot acquisition camera assembly (506) after passing through the No. 1 reflector assembly (501), the beam splitter assembly (502), the No. 3 reflector assembly (505), and the aperture assembly (507).

2. The pose calibration device for a surface shape detection equipment as described in claim 1, characterized in that: The laser control assembly (508), fiber optic connector assembly (504), No. 2 reflector assembly (503), beam splitter assembly (502), No. 1 reflector assembly (501), No. 3 reflector assembly (505), aperture assembly (507), and diffraction spot acquisition camera assembly (506) are all mounted on the upper fixed base plate (500). The beam splitter assembly (402), mirror assembly No. 5 (401), mirror assembly No. 4 (403), projection screen assembly (404), and pose monitoring camera assembly (405) are all mounted on the lower fixed base plate (400); A through hole is provided on the upper fixed base plate (500) at the position corresponding to the No. 1 reflector assembly (501), and the reflected beam of the beam splitter assembly (402) passes through the through hole and enters the No. 1 reflector assembly (501).

3. The pose calibration device for a surface shape detection equipment as described in claim 2, characterized in that: The beam splitter assembly (402) includes a beam splitter mount mounted on a lower fixed base plate (400) and a beam splitter mounted on the beam splitter mount; The No. 5 reflector assembly (401) includes a reflector mount mounted on the lower fixed base plate (400) and a reflector mounted on the reflector mount; The No. 4 reflector assembly (403) includes a reflector mount mounted on the lower fixed base plate (400) and a reflector mounted on the reflector mount; The projection screen assembly (404) includes a projection screen bracket mounted on a lower fixed base plate (400) and a projection screen mounted on the projection screen bracket; The pose monitoring camera assembly (405) includes a camera bracket mounted on a lower fixed base plate (400) and a board camera mounted on the camera bracket.

4. The pose calibration device for a surface shape detection equipment as described in claim 2, characterized in that: The laser control assembly (508) includes a bracket mounted on an upper fixed base plate (500), on which a stable point source, an adjustable attenuator, and a laser are mounted; The No. 1 reflector assembly (501) includes a reflector mount mounted on the upper fixed base plate (500) and a reflector mounted on the reflector mount; The beam splitter prism assembly (502) includes an adjustment seat mounted on the upper fixed base plate (500), a bracket mounted on the adjustment seat, and a prism mounted on the bracket; The No. 2 reflector assembly (503) includes a reflector mount mounted on the upper fixed base plate (500) and a reflector mounted on the reflector mount; The No. 3 reflector assembly (505) includes a reflector mount mounted on the upper fixed base plate (500) and a reflector mounted on the reflector mount; The diffraction spot acquisition camera assembly (506) includes a translation rail mounted on the upper fixed base plate (500), a camera bracket mounted on the translation rail, and an IDS camera mounted on the camera bracket; The aperture assembly (507) includes a bracket mounted on an upper fixed base plate (500), and a small aperture aperture and a filter mounted on the bracket.

5. The pose calibration device for a surface shape detection equipment as described in claim 2, characterized in that: A plug panel (201) is provided on the left panel (200), and a collimating and beam-expanding primary lens (301) is installed on the right panel (300).

Images