Resonant pressure pneumatic sensor and measuring device for spatial micro-holes

Abstract

This invention discloses a resonant pressure pneumatic sensor and measuring device for spatial micro-holes. The measuring device includes a resonant pressure pneumatic sensor, a Z-axis precision displacement stage, a four-degree-of-freedom precision positioning platform, a micro-hole workpiece positioning and clamping mechanism, a pneumatic-electric conversion and processing module, and a flexible force signal acquisition module. The resonant pressure pneumatic sensor internally houses a working resonant pressure sensing component and a compensated resonant pressure sensing component. Its bottom end integrates a flexible adaptive nozzle with a flexible contact force-sensitive unit, which can form a leak-free constant force seal with the surface of the micro-hole under test through closed-loop contact force control, achieving spatial alignment in conjunction with the displacement stage and positioning platform. Based on the resonant pressure pneumatic sensing principle, this invention converts the back pressure caused by the flow resistance of the micro-hole into a resonator frequency shift. After dual-sided common-mode suppression, a differential frequency signal is output, effectively suppressing environmental drift and achieving high-precision, rapid, and non-destructive measurement of spatial micro-holes, suitable for measurement needs under complex working conditions.

Images