Production system and process of g5 grade ammonia water

Abstract

This invention relates to the field of G5 grade ammonia water production technology, specifically to a G5 grade ammonia water production system and process. The technical solution includes a gas purification section, a purification and absorption section, a circulating cooling section, a cooling and storage section, an ultra-clean filtration section, and a sealed filling section. The gas purification section includes a liquid ammonia buffer tank. The liquid ammonia vaporizer includes a guide tank. One end of the guide tank is fitted with a vaporization tank, and the other end with a heating tank. A heater is installed inside the heating tank. A liquid collecting corrugated plate assembly is installed inside the vaporization tank. The liquid collecting corrugated plate assembly includes a guide inclined plate, and a liquid collecting groove is provided at the lower end of the guide inclined plate. A wire mesh demister is installed on the upper part of the inner wall of the vaporization tank. The beneficial effect of this invention is that the liquid collecting groove at the lower end of the guide inclined plate in the liquid collecting corrugated plate assembly locks the captured droplets in the dead zone of the airflow, thereby preventing the droplets from being entrained again by the high-speed rising airflow.

Description

Technical Field

[0001] This invention relates to the field of G5 grade ammonia water production technology, specifically to a G5 grade ammonia water production system and process. Background Technology

[0002] G5 grade ammonia (SEMI G5 standard) is an indispensable key material in advanced semiconductor manufacturing processes. Currently, market demand is growing rapidly, and domestic manufacturers are accelerating technological breakthroughs. However, high-end products are still in short supply. The core of G5 grade ammonia production lies in ultra-high purification. The mainstream process route involves dissolving high-purity liquid ammonia or ammonia gas in ultrapure water, followed by multi-stage purification processes such as distillation, filtration, ion exchange, and ultrafiltration, and finally ultra-clean packaging. However, conventional production processes have many drawbacks. For example, it is difficult to stably control the metal impurities in ammonia to meet the G5 grade requirement of <10PPT. Particulate matter removal is incomplete, and anion residues are difficult to remove. Furthermore, the process is affected by environmental, equipment, and material factors, resulting in poor process stability and product fluctuations and large batch-to-batch differences, which seriously restricts its large-scale, high-quality mass production. Furthermore, the existing liquid ammonia vaporizer in the production system also has certain defects in its hardware design. These defects directly affect the purity of the produced ammonia water. For example: 1. In traditional vaporizers, under high gas velocity conditions, the liquid film formed on the surface of the corrugated plate after the rising droplets hit the plate wall is easily blown back into fine droplets by the shearing force of the high-speed airflow and carried out with the airflow (i.e., secondary entrainment). In order to prevent entrainment, existing technologies are usually forced to reduce the gas velocity, sacrificing the upper limit of the equipment's capacity (low flooding gas velocity). 2. The existing corrugated plate design in vaporizers usually relies solely on gravity to allow the liquid to flow down the plate surface. The liquid will eventually flow back along the inner wall of the vaporizer. This method can easily lead to the formation of a liquid film on the inner wall. If the airflow turbulence is large, the liquid film on the inner wall is also at risk of being re-entrained, and may cause corrosion or contamination to the inner wall of the distillation column. 3. Traditional vaporizers lack efficient demisting structures, resulting in low collection efficiency for small droplets (such as <3-5um), leading to incomplete removal of impurities such as droplets, particles, and metal elements, and low impurity removal efficiency, which affects product purity. Therefore, it is necessary to invent a production system and process for G5 grade ammonia water. Summary of the Invention

[0003] To achieve the above objectives, the present invention provides the following technical solution: a production system for G5 grade ammonia water, comprising a gas purification section, a purification and absorption section, a circulating cooling section, a cooling and storage section, an ultra-clean filtration section, and a closed filling section; The gas purification section includes a liquid ammonia buffer tank, the output end of which is connected to a liquid ammonia precision filter, and the output end of the liquid ammonia precision filter is connected to a liquid ammonia vaporizer. The purification and absorption section includes a gas phase precision filter, the input end of which is connected to a liquid ammonia vaporizer, and the output end of which is connected to an ammonia buffer tank. The output end of the ammonia buffer tank is connected to a Venturi mixer. The circulating cooling section includes a pellet heat exchanger. The input end of the pellet heat exchanger is connected to the output end of the Venturi mixer. The output end of the pellet heat exchanger is connected to the circulating tank. The output end of the circulating tank is equipped with an absorption circulating pump and a discharge regulating valve. The absorption circulating pump is connected to the reflux end of the Venturi mixer. The output end of the discharge regulating valve is connected to the finished product intermediate tank. The cooling and storage section includes a finished product cooler, the input end of which is connected to the output end of the finished product intermediate tank. The ultra-clean filtration section includes a four-stage precision filter, the input end of which is connected to the output end of the finished intermediate tank. The closed filling section includes a 200L filling line and a tank truck filling cabinet. The input end of the 200L filling line is connected to the output end of a four-stage precision filter, and the input end of the tank truck filling cabinet is also connected to the output end of a four-stage precision filter. The liquid ammonia vaporizer includes a flow guide tank, with a vaporization tank installed at one end and a heating tank installed at the other end. A heater is installed inside the heating tank. A liquid collecting corrugated plate assembly is installed inside the vaporization tank. The liquid collecting corrugated plate assembly includes a flow guide inclined plate, with a liquid collecting groove at the lower end of the flow guide inclined plate. A flow guide pipe is installed on the flow guide tank, with one end of the flow guide pipe connected to the liquid collecting groove and the other end leading to the bottom of the vaporization tank. A wire mesh demister is installed on the upper part of the inner wall of the vaporization tank.

[0004] Preferably, the liquid collecting corrugated plate assembly includes corrugated plates, and multiple corrugated plates are arranged vertically to form the liquid collecting corrugated plate assembly. Two adjacent corrugated plates are arranged in a mirror image opposite each other. The corrugated plates include arched plates, and each corrugated plate is composed of a guide plate, a liquid collecting groove, and an arched plate.

[0005] Preferably, the upper end of the arched plate is fixedly connected to the lower end of the liquid collection groove. The corrugated plate is arranged in a cyclical manner from top to bottom as a guide plate, a liquid collection groove, and an arched plate. The uppermost structure of the corrugated plate starts with the guide plate, and the lowermost structure ends with the liquid collection groove.

[0006] Preferably, among several adjacent corrugated plates, several central support rods are distributed between two corrugated plates that are close to each other, and liquid collection grooves in the two corrugated plates that are close to each other are embedded on both sides of the central support rods. The two ends of the central support rods are respectively installed on the inner walls of the flow guide tank and the heating tank.

[0007] Preferably, among the several adjacent corrugated plates, the outermost two corrugated plates are provided with side support frames, and the liquid collection grooves in the outermost two corrugated plates are embedded in the surface of the side support frames. The side support frames are fixedly installed on both sides of the inner wall of the guide tank and the heating tank.

[0008] Preferably, among a plurality of adjacent corrugated plates, a plurality of flow dividers are distributed between two corrugated plates that are far apart from each other. The flow dividers are disposed between the guide ramps in the two corrugated plates that are far apart from each other, and the two ends of the flow dividers are respectively installed on the inner wall of the flow guide tank and the heating tank.

[0009] Preferably, the guide pipe includes a drain pipe, one end of which passes through the drain pipe and connects to one end of the collection ditch, and the other end is equipped with a collection pipe. The output ends of the collection pipe are fixedly connected to horizontal guide pipes. The horizontal guide pipes are horizontally distributed on both sides of the guide tank and the heating tank. Several liquid ammonia return pipes are arranged and installed on the side of the horizontal guide pipes. The output ends of the liquid ammonia return pipes are connected to the bottom sides of the guide tank and the heating tank.

[0010] Preferably, the heater includes a heating tube, which is disposed inside the lower side of the guide tank and the heating tank. The heating tube has a heat medium inlet and a heat medium outlet at both ends, which are respectively installed on the upper and lower sides of the heat medium outlet. The heat medium inlet is connected to a heat exchanger, and the input end of the heat exchanger is connected to a hot water tank. The heat medium outlet is connected to the input end of the hot water tank.

[0011] Preferably, a liquid ammonia feed pipe is installed at the bottom of the guide tank, and the liquid ammonia feed pipe is connected to the output end of the liquid ammonia precision filter; an ammonia vapor discharge pipe is installed at the top of the heating tank, and the ammonia vapor discharge pipe is connected to the gas phase precision filter; and a residual liquid discharge pipe is installed at the bottom of the heating tank, and the residual liquid discharge pipe is connected to the residual liquid discharge pipeline.

[0012] The production process of a G-grade ammonia water production system described above includes S1-S6; S1. The raw material liquid ammonia first enters the liquid ammonia buffer tank. The liquid ammonia in the liquid ammonia buffer tank is then transported to the liquid ammonia precision filter to remove trace amounts of oil and particulate matter. The filtered liquid ammonia enters the vaporization tank through the liquid ammonia feed pipe. The heat exchanger is started and low-pressure saturated steam is injected into the heating pipe through the heat medium inlet. The heating pipe indirectly heats the liquid ammonia in the vaporization tank, causing it to vaporize. S2. The vaporized liquid ammonia vapor rises through the collection corrugated plate assembly. The rising airflow is affected by the flow divider and impacts the guide plate. The droplets in the airflow slide quickly down the guide plate into the collection groove. The collection groove collects the droplets and then guides them from the outside of the guide tank to the bottom of the heating tank through the guide pipe. Finally, the liquid ammonia vapor passes through the wire mesh demister to further remove the entrained droplets and obtain high-purity ammonia gas. S3. The ammonia gas at the top of the heating tank is output from the ammonia gas discharge pipe to the gas phase precision filter, and then enters the ammonia gas buffer tank to stabilize the pressure. Subsequently, the ammonia gas is mixed with the absorbent from the circulation tank in the high-efficiency Venturi mixer. The mixed solution immediately enters the pellet heat exchanger and is rapidly cooled by chilled water. The cooled ammonia water flows into the circulation tank. S4. The circulation tank stabilizes the liquid level through a level control interlock discharge regulating valve. The absorption circulation pump sends most of the absorbent liquid to the Venturi mixer for circulation absorption, while the other part is sent to the finished product intermediate tank through the discharge regulating valve to form a continuous circulation absorption loop, achieving 100% automation. The concentration of the absorbent liquid must always be maintained at the specified 28%-30%. S5. The liquid ammonia in the intermediate finished product tank adopts a circulating cooling method. It is continuously cooled by the finished product cooler and circulated stably in the intermediate finished product tank. During the circulation process, the liquid ammonia in the intermediate finished product tank is analyzed online or by sampling. For products whose online or sampling analysis results do not meet the indicators, the system automatically interlocks and switches the pipeline to return to the industrial ammonia intermediate tank or the circulation loop for further processing. S6. After the product in the intermediate tank is sampled and qualified, it is circulated and filtered through the four-stage precision filter and then sent to the 200L filling line or tank truck filling cabinet for dispensing after passing the online particle detector test.

[0013] The beneficial effects of this invention are: This invention features a specially structured corrugated plate assembly for collecting liquid ammonia vaporizer. The collected droplets are locked in the dead zone of the airflow through the spiral groove at the lower end of the guide plate within the corrugated plate assembly. This prevents the droplets from being entrained by the high-speed rising airflow, allowing the liquid ammonia vaporizer to operate stably at high gas velocities close to the flooding point. This significantly improves the throughput of the liquid ammonia vaporizer and solves the problem of the efficiency of traditional packing materials dropping sharply under high loads. This invention uses a diversion plate set inside the liquid collection corrugated plate assembly to force the airflow to deflect. By utilizing the principles of inertial collision and centrifugal sedimentation, it guides the originally difficult-to-capture fine droplets to collide with the wall of the guide inclined plate, so that they quickly flow into the liquid collection groove, thereby actively enhancing the separation power and improving the separation efficiency to achieve the G5 level standard. This invention uses a guide pipe to guide the liquid in the collection groove out of the guide tank and directly return it to the bottom of the vaporization tank through an external pipe, avoiding the core area of ​​the airflow and the inner wall of the equipment. This prevents the liquid from being re-entrained when it flows down the inner wall of the tank, and also avoids the potential contamination of the high-purity gas by the liquid film on the inner wall, thus ensuring the high purity of the product. This invention utilizes a Venturi mixer to create a negative pressure zone in the contraction section using high-speed fluid, causing intense shearing and thorough mixing of the gas and liquid phases within a very short residence time. This significantly improves the gas-liquid contact efficiency. Furthermore, the Venturi mixer structure is free of packing material and internal tower components, ensuring a rapid and stable absorption process. Attached Figure Description

[0014] Figure 1 A flow chart of a G5 grade ammonia water production system provided by the present invention; Figure 2 A schematic diagram of the liquid ammonia vaporizer device provided by the present invention; Figure 3 This is a cross-sectional view of the liquid ammonia vaporizer tank provided by the present invention; Figure 4 This is a schematic diagram of the liquid collection corrugated plate assembly structure provided by the present invention; Figure 5 An exploded view of the liquid collection corrugated plate assembly provided by the present invention; Figure 6 A side view of the liquid ammonia vaporizer provided by the present invention; Figure 7 This is a side cross-sectional view of the liquid ammonia vaporizer provided by the present invention; Figure 8 This is a cross-sectional view of the end face of the vaporization tank provided by the present invention; Figure 9 This is a cross-sectional view of the end face of the vaporization tank provided by the present invention; Figure 10 Provided by the present invention Figure 9 Detailed image A.

[0015] In the diagram: 111. Vaporization tank, 112. Flow guide tank, 113. Heating tank, 114. Liquid ammonia feed pipe, 115. Ammonia vapor discharge pipe, 116. Residual liquid discharge pipe, 120. Diverter plate, 121. Side support frame, 122. Central support rod, 123. Flow guide plate, 124. Liquid collection groove, 125. Arched plate, 126. Drain pipe, 127. Liquid collection pipe, 128. Horizontal flow guide pipe, 129. Liquid ammonia return pipe, 131. Heat medium inlet, 132. Heating pipe, 133. Heat medium outlet, 141. Wire mesh demister. Detailed Implementation

[0016] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0017] like Figure 1 - Figure 10 As shown, a G5 grade ammonia water production system includes a gas purification section, a purification absorption section, a circulating cooling section, a cooling storage section, an ultra-clean filtration section, and a closed filling section. The gas purification section includes a liquid ammonia buffer tank, the output end of which is connected to a liquid ammonia precision filter, and the output end of the liquid ammonia precision filter is connected to a liquid ammonia vaporizer. The purification and absorption section includes a gas phase precision filter, the input end of which is connected to a liquid ammonia vaporizer, the output end of which is connected to an ammonia buffer tank, and the output end of the ammonia buffer tank is connected to a Venturi mixer. The circulating cooling section includes a pellet heat exchanger. The input end of the pellet heat exchanger is connected to the output end of the Venturi mixer. The output end of the pellet heat exchanger is connected to the circulating tank. The output end of the circulating tank is equipped with an absorption circulating pump and a discharge regulating valve. The absorption circulating pump is connected to the reflux end of the Venturi mixer. The output end of the discharge regulating valve is connected to the finished product intermediate tank. The cooling and storage section includes a finished product cooler, the input end of which is connected to the output end of the intermediate finished product tank; The ultra-clean filtration section includes a four-stage precision filter, with the input end of the four-stage precision filter connected to the output end of the finished product intermediate tank; The closed filling section includes a 200L filling line and a tank truck filling cabinet. The input end of the 200L filling line is connected to the output end of a four-stage precision filter, and the input end of the tank truck filling cabinet is also connected to the output end of a four-stage precision filter. The liquid ammonia vaporizer includes a flow guide tank 112, with a vaporization tank 111 installed at one end and a heating tank 113 installed at the other end. A heater is installed inside the heating tank 113. A liquid collecting corrugated plate assembly is installed inside the vaporization tank 111. The liquid collecting corrugated plate assembly includes a flow guide inclined plate 123. A liquid collecting groove 124 is provided at the lower end of the flow guide inclined plate 123. A flow guide pipe is installed on the flow guide tank 112. One end of the flow guide pipe is connected to the liquid collecting groove 124 and the other end leads to the bottom of the vaporization tank 111. A wire mesh demister 141 is installed on the upper part of the inner wall of the vaporization tank 111.

[0018] In the above embodiments, it should be noted that the tower body, storage tank and pipeline in the system of the present invention are all made of 304 stainless steel lined with APV / ultra-pure PFA material, Class 10000 production workshop and Class 100 bottling workshop; the entire conveying process is closed, which helps to maintain the clean boundary of the system, reduce the probability of external air, particles and impurities entering the system, and improve the stability of the finished product. The specific process breakdown and corresponding equipment are as follows: (1) Purification process: The pipeline between the liquid ammonia buffer tank and the liquid ammonia precision filter is equipped with a shielded pump, a flow meter, and a regulating valve. The raw liquid ammonia first enters the liquid ammonia buffer tank, is conveyed in a closed manner by the shielded pump, and is then controlled by the flow meter and regulating valve to enter the liquid ammonia precision filter to remove trace amounts of oil and particulate matter. The filtered liquid ammonia enters the vaporization tank 111 through the liquid ammonia feed pipe 114. The heat exchanger is started and low-pressure saturated steam is injected into the heating pipe 132 through the heat medium inlet 131. The heating pipe 132 indirectly heats the liquid ammonia in the vaporization tank 111, causing it to vaporize.

[0019] (2) Purification, absorption and circulating cooling process Ammonia gas from the top of the heating tank 113 is discharged from the ammonia gas discharge pipe 115 to the gas phase precision filter, and then enters the ammonia buffer tank to stabilize the pressure. Subsequently, the ammonia gas is mixed with the absorbent from the circulation tank in the high-efficiency Venturi mixer. The mixed solution immediately enters the circulation cooler and is rapidly cooled by chilled water to keep the absorption circulation system at a low temperature. The low temperature not only improves the absorption efficiency but also ensures the safe operation of the system. The cooled ammonia water returns to the circulation tank. The circulation tank stabilizes the liquid level in the circulation tank through the liquid level control interlock discharge regulating valve. The absorption circulation pump sends most of the absorbent to the Venturi mixer for circulation absorption, while the other part is sent to the finished product intermediate tank through the discharge regulating valve to form a continuous circulation absorption loop, achieving 100% automation. An online concentration meter is installed on the circulation pipeline connected to the circulation tank. The concentration of the absorbent is always maintained at the specified 28%-30%. The online concentration meter installed on the circulation pipeline detects the concentration in real time and controls the amount of high-purity water added by the interlocking pure water regulating valve, so as to achieve a constant ammonia concentration. (3) Cooling and storage process The finished product adopts a circulating cooling method. It is continuously cooled by the finished product cooler and circulated and stabilized in the finished product intermediate tank. For products whose online or sampling analysis results do not meet the indicators, the system automatically interlocks and switches the pipeline to return to the industrial ammonia intermediate tank or circulation loop for further processing, so as to prevent unqualified materials from entering the filling process and realize automatic and non-destructive diversion control throughout the entire process. (4) Ultra-clean filtration and closed filling process After the product in the intermediate tank is sampled and qualified, it is filtered through a four-stage precision filter and tested by an online particle detector before being sent to a 200L filling line or a tank truck filling cabinet for dispensing. Furthermore, in the liquid ammonia vaporizer of the purification process, the liquid collection groove 124, which is curled at the lower end of the guide plate 123 in the liquid collection corrugated plate assembly, uses the stagnation principle of fluid dynamics to firmly lock the captured droplets in the dead zone of the airflow, fundamentally cutting off the path of the droplets being entrained by the high-speed rising airflow (mist entrainment). Therefore, the distillation column can operate stably at high gas velocities close to the flooding point, significantly improving the column's throughput and solving the problem of the efficiency drop of traditional packing under high load. In addition, the liquid collection groove 124 adopts a connecting guide pipe reflux design, which forces the captured liquid to be discharged from the guide tank 112 instead of flowing down the inner wall of the tank. This design breaks the natural flow mode of "liquid tending to the wall" in the traditional vaporizer, forcing the liquid to return to the internal circulation of the column, effectively suppressing the wall flow effect, ensuring the uniformity of gas-liquid distribution on the column cross section, and improving the overall separation accuracy. The wire mesh demister 141 has a collection efficiency of 99%-99.8% for droplets with a particle size of ≥3-5um, while the pressure drop of the gas passing through the demister is very small, only 250-500Pa, which helps to improve the purification efficiency of the equipment and improve the removal of impurities (particles, metal elements and droplets). It can effectively capture tiny droplets and prevent droplets from being carried into subsequent processes. Furthermore, in the purification absorption and circulating cooling process, this invention uses a Venturi mixer to create a negative pressure zone in the contraction section using high-speed fluid, which causes strong shearing and thorough mixing of the gas and liquid phases within a very short residence time, thereby significantly improving the gas-liquid contact efficiency. Moreover, the Venturi mixer structure has no packing or internal tower components, which ensures that the absorption process is fast and stable.

[0020] like Figure 3 - Figure 5 and Figure 8 - Figure 10As shown, a G5 grade ammonia water production system further includes a liquid collection corrugated plate assembly comprising corrugated plates. Multiple corrugated plates are arranged vertically to form the liquid collection corrugated plate assembly. Adjacent corrugated plates are arranged in a mirror image. Each corrugated plate includes an arched plate 125. A single corrugated plate consists of a guide plate 123, a liquid collection groove 124, and an arched plate 125. The upper end of the arched plate 125 is fixedly connected to the lower end of the liquid collection groove 124. The corrugated plates are arranged sequentially from top to bottom as guide plates 123, liquid collection grooves 124, and arched plates 125, and are arranged in a cyclical pattern. The uppermost structure of the corrugated plates begins with the guide plate 123, and the lowermost structure ends with the liquid collection groove 124. Among several adjacent corrugated plates, several central support rods 122 are distributed between two adjacent corrugated plates. Liquid collection grooves 124 in the two adjacent corrugated plates are embedded on both sides of the central support rod 122. The two ends of the central support rod 122 are respectively installed on the inner walls of the guide tank 112 and the heating tank 113. Among several adjacent corrugated plates, the outermost two corrugated plates are provided with side support frames 121. Liquid collection grooves 124 in the outermost two corrugated plates are embedded on the surface of the side support frames 121. The side support frames 121 are fixedly installed on both sides of the inner walls of the guide tank 112 and the heating tank 113. Among several adjacent corrugated plates, several flow dividers 120 are distributed between two corrugated plates that are far apart from each other. The flow dividers 120 are arranged between the guide inclined plates 123 in the two corrugated plates that are far apart from each other. The two ends of the flow dividers 120 are respectively installed on the inner walls of the guide tank 112 and the heating tank 113.

[0021] In the above embodiments, it should be noted that the present invention forces the airflow to deflect by setting the diverter 120 in the liquid collection corrugated plate assembly. By utilizing the principles of inertial collision and centrifugal sedimentation, it guides the originally difficult-to-capture fine droplets to collide with the wall of the guide plate 123, so that they quickly flow into the liquid collection groove, thereby actively enhancing the separation power and improving the separation efficiency to the G5 level standard. When ammonia vapor passes through the guide plate 123, it forms a liquid film on the plate wall. The rising high-speed airflow exerts an upward shearing force on the liquid film on the plate wall of the guide plate 123. At the same time, the liquid's own gravity and its adhesion force (surface tension) to the wall of the guide plate 123 exert a downward pulling force. Since the liquid collection groove 124 is located in the dead zone of the airflow, the airflow shearing force there is almost zero. Therefore, once the liquid flows downward into the liquid collection groove 124 due to gravity, it enters the stagnation zone of the airflow. Since this area is blocked by the protruding guide plate 123 and the arched plate 125, the mainstream high-speed airflow cannot directly shear the liquid at this point, thus completely solving the problem of secondary entrainment. The liquid collection groove 124 is not only a liquid collection area, but also a low-pressure area. According to Bernoulli's principle, when a high-speed airflow passes through the hook, it will generate a weak negative pressure (or a very low positive pressure) inside the hook. This pressure difference helps to "draw" the liquid on the plate surface into the liquid collection groove 124, rather than letting the liquid stay at the top.

[0022] like Figure 2 - Figure 9 As shown, a G5 grade ammonia water production system further includes a guide pipe including a drain pipe 126. One end of the drain pipe 126 passes through the drain pipe 126 and connects to one end of the collection trough 124. The other end is equipped with a collection pipe 127. The output ends of the collection pipe 127 are fixedly connected to horizontal guide pipes 128. The horizontal guide pipes 128 are horizontally distributed on both sides of the guide tank 112 and the heating tank 113. Several liquid ammonia return pipes 129 are arranged and installed on the side of the horizontal guide pipes 128. The output ends of the liquid ammonia return pipes 129 are connected to the bottom sides of the guide tank 112 and the heating tank 113.

[0023] In the above embodiment, it should be noted that the drain pipe 126 guides the liquid in the liquid collection groove 124 into the liquid collection pipe 127, and then the liquid collection pipe 127 collects it and injects it into the horizontal guide pipe 128. After being distributed by the horizontal guide pipe 128, it enters the bottom of the guide tank 112 and the heating tank 113 through the liquid ammonia return pipe 129. This avoids the risk that the "liquid film" that may be formed when the liquid flows down the inner wall will be torn apart by the edge of the rising airflow again. At the same time, it also prevents the formation of "grooves" on the inner wall and ensures the dryness of the internal environment of the liquid ammonia vaporizer.

[0024] like Figure 6 - Figure 9 As shown, a G5 grade ammonia water production system further includes a heater comprising a heating tube 132, which is disposed on the lower side inside the guide tank 112 and the heating tank 113. The heating tube 132 has a heat medium inlet 131 and a heat medium outlet 133 at its two ends, respectively, installed on the upper and lower sides of the heat medium outlet 133. The heat medium inlet 131 is externally connected to a heat exchanger, with the input end of the heat exchanger connected to a hot water tank. The heat medium outlet 133 is connected to the input end of the hot water tank. A liquid ammonia feed pipe 114 is installed at the bottom of the guide tank 112, connected to the output end of a liquid ammonia precision filter. An ammonia vapor discharge pipe 115 is installed at the top of the heating tank 113, connected to a gas phase precision filter. A residual liquid discharge pipe 116 is installed at the bottom of the heating tank 113, connected to a residual liquid discharge pipeline.

[0025] In the above embodiment, it should be noted that the heat exchanger introduces high-temperature unsaturated steam into the heating tube 132 through the heat medium inlet 131, so that the heating tube 132 exchanges heat with the liquid ammonia in the tank to achieve the effect of heating the liquid ammonia and vaporizing it. After the heat exchange, the heat medium in the heating tube 132 is reintroduced into the heat exchanger through the heat medium outlet 133. Residual liquid treatment: A very small amount of non-volatile residual liquid (rich in heavy metals and other impurities) at the bottom of the vaporization tank 111 is automatically discharged into the dilute ammonia tank through the residual liquid discharge pipe 116 at regular intervals to ensure the purity of the gas phase.

[0026] The production process of a G-grade ammonia water production system of the present invention is as follows: Those skilled in the art transport liquid ammonia from a liquid ammonia buffer tank to a liquid ammonia precision filter to remove trace amounts of oil and particulate matter. The filtered liquid ammonia enters the vaporization tank 111 through the liquid ammonia feed pipe 114. A heat exchanger is started, and low-pressure saturated steam is injected into the heating pipe 132 through the heat medium inlet 131. The heating pipe 132 indirectly heats the liquid ammonia in the vaporization tank 111, causing it to vaporize. The vaporized liquid ammonia vapor rises through the liquid collecting corrugated plate assembly, and the rising airflow is diverted by the flow divider 120. The impact of the liquid on the guide plate 123 causes droplets in the airflow to slide rapidly down the guide plate 123 into the collection groove 124. After collecting the droplets, the collection groove 124 guides the droplets from the outside of the guide tank 112 to the bottom of the heating tank 113 through the guide pipe. Finally, the liquid ammonia vapor passes through the wire mesh demister 141 to further remove entrained droplets and obtain high-purity ammonia gas. The ammonia gas at the top of the heating tank 113 is output from the ammonia gas discharge pipe 115 to the gas phase precision filter and then enters the ammonia gas buffer tank to stabilize the pressure. Subsequently, the ammonia gas reacts with the suction from the circulation tank. The collected liquid is mixed in a high-efficiency Venturi mixer. The mixed solution immediately enters a pellet heat exchanger and is rapidly cooled by chilled water. The cooled ammonia water flows into a circulation tank. The circulation tank maintains a stable liquid level through a level control interlock discharge regulating valve. The absorption circulation pump sends most of the absorbent liquid to the Venturi mixer for circulation absorption, while the other part is sent to the finished product intermediate tank through the discharge regulating valve, forming a continuous circulation absorption loop, achieving 100% automation. The concentration of the absorbent liquid must always be maintained at the specified 28%-30%. The liquid ammonia in the finished product intermediate tank is cooled by circulation, continuously cooled by the finished product cooler, and stabilized in circulation within the tank. During the circulation process, the liquid ammonia in the finished product intermediate tank is analyzed online or by sampling. For products whose online or sampling analysis results do not meet the standards, the system automatically interlocks and switches the pipeline, returning the product to the industrial ammonia intermediate tank or circulation loop for further processing. After the product in the finished product intermediate tank passes the sampling test, it is filtered through a four-stage precision filter and then tested by an online particle detector before being sent to a 200L filling line or tank truck filling cabinet for dispensing.

[0027] The above description is merely a preferred embodiment of the present invention. Any person skilled in the art can modify the present invention or modify it into an equivalent technical solution using the technical solutions described above. Therefore, any simple modifications or equivalent substitutions made based on the technical solutions of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A production system for G5 grade ammonia water, comprising a gas purification section, a purification absorption section, a circulating cooling section, a cooling storage section, an ultra-clean filtration section, and a closed filling section, characterized in that: The gas purification section includes a liquid ammonia buffer tank, the output end of which is connected to a liquid ammonia precision filter, and the output end of the liquid ammonia precision filter is connected to a liquid ammonia vaporizer. The purification and absorption section includes a gas phase precision filter, the input end of which is connected to a liquid ammonia vaporizer, and the output end of which is connected to an ammonia buffer tank. The output end of the ammonia buffer tank is connected to a Venturi mixer. The circulating cooling section includes a pellet heat exchanger. The input end of the pellet heat exchanger is connected to the output end of the Venturi mixer. The output end of the pellet heat exchanger is connected to the circulating tank. The output end of the circulating tank is equipped with an absorption circulating pump and a discharge regulating valve. The absorption circulating pump is connected to the reflux end of the Venturi mixer. The output end of the discharge regulating valve is connected to the finished product intermediate tank. The cooling and storage section includes a finished product cooler, the input end of which is connected to the output end of the finished product intermediate tank. The ultra-clean filtration section includes a four-stage precision filter, the input end of which is connected to the output end of the finished intermediate tank. The closed filling section includes a 200L filling line and a tank truck filling cabinet. The input end of the 200L filling line is connected to the output end of a four-stage precision filter, and the input end of the tank truck filling cabinet is also connected to the output end of a four-stage precision filter. The liquid ammonia vaporizer includes a flow guide tank, with a vaporization tank installed at one end and a heating tank installed at the other end. A heater is installed inside the heating tank. A liquid collecting corrugated plate assembly is installed inside the vaporization tank. The liquid collecting corrugated plate assembly includes a flow guide inclined plate, with a liquid collecting groove at the lower end of the flow guide inclined plate. A flow guide pipe is installed on the flow guide tank, with one end of the flow guide pipe connected to the liquid collecting groove and the other end leading to the bottom of the vaporization tank. A wire mesh demister is installed on the upper part of the inner wall of the vaporization tank.

2. The production system for G5 grade ammonia water according to claim 1, characterized in that: The liquid collecting corrugated plate assembly includes corrugated plates, and multiple corrugated plates are arranged vertically to form the liquid collecting corrugated plate assembly. Two adjacent corrugated plates are arranged in a mirror image opposite each other. Each corrugated plate includes an arched plate, and each corrugated plate is composed of a guide plate, a liquid collecting groove, and an arched plate.

3. The production system for G5 grade ammonia water according to claim 2, characterized in that: The upper end of the arched plate is fixedly connected to the lower end of the liquid collection groove. The corrugated plate is arranged in a cyclical manner from top to bottom as a guide plate, a liquid collection groove, and an arched plate. The uppermost structure of the corrugated plate starts with the guide plate and the lowermost structure ends with the liquid collection groove.

4. The production system for G5 grade ammonia water according to claim 2, characterized in that: In a plurality of adjacent corrugated plates, a plurality of central support rods are distributed between two corrugated plates that are close to each other. Liquid collection grooves in the two corrugated plates that are close to each other are embedded on both sides of the central support rods. The two ends of the central support rods are respectively installed on the inner walls of the flow guide tank and the heating tank.

5. The production system for G5 grade ammonia water according to claim 2, characterized in that: Among several adjacent corrugated plates, side support frames are provided on the outer sides of the outermost two corrugated plates, and liquid collection grooves in the outermost two corrugated plates are embedded in the surface of the side support frames. The side support frames are fixedly installed on both sides of the inner wall of the guide tank and the heating tank.

6. The production system for G5 grade ammonia water according to claim 2, characterized in that: In a plurality of adjacent corrugated plates, a plurality of flow dividers are distributed between two corrugated plates that are far apart from each other. The flow dividers are disposed between the guide plates in the two corrugated plates that are far apart from each other, and the two ends of the flow dividers are respectively installed on the inner wall of the flow guide tank and the heating tank.

7. The production system for G5 grade ammonia water according to claim 1, characterized in that: The flow guiding pipeline includes a drain pipe, one end of which passes through the drain pipe and connects to one end of the liquid collection trench, and the other end is equipped with a liquid collection pipe. The output ends of the liquid collection pipe are fixedly connected to horizontal flow guiding pipes. The horizontal flow guiding pipes are horizontally distributed on both sides of the flow guiding tank and the heating tank. Several liquid ammonia return pipes are arranged and installed on the side of the horizontal flow guiding pipes. The output ends of the liquid ammonia return pipes are connected to the bottom sides of the flow guiding tank and the heating tank.

8. The production system for G5 grade ammonia water according to claim 1, characterized in that: The heater includes a heating tube, which is disposed inside the lower side of the flow guide tank and the heating tank. The heating tube has a heat medium inlet and a heat medium outlet at both ends, which are respectively installed on the upper and lower sides of the heat medium outlet. The heat medium inlet is connected to a heat exchanger, and the input end of the heat exchanger is connected to a hot water tank. The heat medium outlet is connected to the input end of the hot water tank.

9. A G5 grade ammonia water production system according to claim 1, characterized in that: The bottom of the diversion tank is equipped with a liquid ammonia inlet pipe, which is connected to the output end of the liquid ammonia precision filter. The top of the heating tank is equipped with an ammonia vapor discharge pipe, which is connected to the gas phase precision filter. The bottom of the heating tank is equipped with a residual liquid discharge pipe, which is connected to the residual liquid discharge pipeline.

10. The production process of a G5 grade ammonia water production system according to any one of claims 1-9, characterized in that: Including S1-S6; S1. The raw material liquid ammonia first enters the liquid ammonia buffer tank. The liquid ammonia in the liquid ammonia buffer tank is then transported to the liquid ammonia precision filter to remove trace amounts of oil and particulate matter. The filtered liquid ammonia enters the vaporization tank through the liquid ammonia feed pipe. The heat exchanger is started and low-pressure saturated steam is injected into the heating pipe through the heat medium inlet. The heating pipe indirectly heats the liquid ammonia in the vaporization tank, causing it to vaporize. S2. The vaporized liquid ammonia vapor rises through the collection corrugated plate assembly. The rising airflow is affected by the flow divider and impacts the guide plate. The droplets in the airflow slide quickly down the guide plate into the collection groove. The collection groove collects the droplets and then guides them from the outside of the guide tank to the bottom of the heating tank through the guide pipe. Finally, the liquid ammonia vapor passes through the wire mesh demister to further remove the entrained droplets and obtain high-purity ammonia gas. S3. The ammonia gas at the top of the heating tank is output from the ammonia gas discharge pipe to the gas phase precision filter, and then enters the ammonia gas buffer tank to stabilize the pressure. Subsequently, the ammonia gas is mixed with the absorbent from the circulation tank in the high-efficiency Venturi mixer. The mixed solution immediately enters the pellet heat exchanger and is rapidly cooled by chilled water. The cooled ammonia water flows into the circulation tank. S4. The circulation tank stabilizes the liquid level through a level control interlocking discharge regulating valve. The absorption circulation pump sends most of the absorbent liquid to the Venturi mixer for circulation absorption, while the other part is sent to the finished product intermediate tank through the discharge regulating valve to form a continuous circulation absorption loop, achieving 100% automation. The concentration of the absorbent liquid must always be maintained at the specified 28%-30%. S5. The liquid ammonia in the intermediate finished product tank adopts a circulating cooling method. It is continuously cooled by the finished product cooler and circulated stably in the intermediate finished product tank. During the circulation process, the liquid ammonia in the intermediate finished product tank is analyzed online or by sampling. For products whose online or sampling analysis results do not meet the indicators, the system automatically interlocks and switches the pipeline to return to the industrial ammonia intermediate tank or the circulation loop for further processing. S6. After the product in the intermediate tank is sampled and qualified, it is circulated and filtered through the four-stage precision filter and then sent to the 200L filling line or tank truck filling cabinet for dispensing after passing the online particle detector test.

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