Glue bottle dispensing device, mounting method, and glue coating and developing apparatus

Abstract

The application relates to the field of liquid distribution devices, in particular to a glue bottle liquid distribution device, a mounting method and a glue coating and developing equipment. The glue bottle liquid distribution device comprises a liquid storage bottle connected with a liquid outlet pipe and a liquid distribution main body. The liquid distribution main body comprises a liquid distribution connector and a plurality of liquid conveying pipes. The liquid distribution connector comprises a shell, an input port and a plurality of output ports arranged on the shell. An intersection chamber and a plurality of branch flow channels communicated with the intersection chamber are arranged in the shell. The input port is communicated with one of the branch flow channels, and each output port is communicated with the rest of the branch flow channels one by one. The input port is connected with the other end of the liquid outlet pipe, and each output port is connected with each liquid conveying pipe one by one. The application significantly reduces the installation operation space requirement through the liquid distribution main body, eliminates the interference risk between connectors, greatly reduces the operation space required in the equipment, is especially suitable for the highly integrated internal environment of the glue coating and developing equipment, and is beneficial to the miniaturization and integration of the equipment.

Description

Technical Field

[0001] This application relates to the field of liquid separation device technology, specifically to a glue bottle liquid separation device, installation method, and glue coating and developing equipment. Background Technology

[0002] In semiconductor photolithography, photoresist coating and developing equipment is used to sequentially complete processes such as photoresist coating and development on the wafer surface. This equipment typically includes a reservoir and multiple buffer bottles to stably supply photoresist to the coating unit. With the continuous improvement of semiconductor device integration, photoresist coating and developing equipment is also developing towards higher integration and compactness.

[0003] However, as Figure 1 As shown in the dotted circle, in existing dispensing systems for plastic bottles, multiple multi-port connectors (such as PFA connectors) are typically used for connection. There are currently two installation methods for PFA connectors: ringing and flaring. Both methods require the use of specialized tube expanders or ringing tools to flare or ring-form the PFA tube ends. However, the aforementioned existing installation methods have the following drawbacks: First, a large operating space is required. Whether it's ring making or flaring, operators need to use specialized tools to process the pipe ends, requiring sufficient axial and radial operating space. Within the highly integrated interior of the coating and developing equipment, tools often cannot be deployed, making installation difficult.

[0004] Secondly, the PFA connector body is relatively large. When multiple dispensing buffer bottles are closely arranged, physical interference can easily occur between adjacent PFA connectors, or the fastening tools cannot be accommodated, resulting in unreliable tightening.

[0005] Therefore, there is an urgent need for a glue bottle dispensing device, an installation method, and a glue coating and developing equipment to solve the problems of insufficient space and inability to install in the existing technology. Summary of the Invention

[0006] The technical problem to be solved by this application is to provide a glue bottle dispensing device, an installation method, and a glue coating and developing equipment, thereby solving the problems of insufficient space and inability to install in the prior art.

[0007] According to a first aspect of the embodiments of this application, a dispensing device for dispensing liquid from a glue bottle is provided, comprising: A liquid storage bottle, connected to one end of the liquid outlet tube; The main body of the diversion system includes a diversion connector and multiple infusion tubes; the diversion connector includes a housing and an inlet and multiple outlets disposed on the housing, the housing having a confluence chamber and multiple branch channels communicating with the confluence chamber; the inlet is connected to one of the branch channels, and each of the outlets is connected to the other branch channels in a corresponding manner; The inlet is connected to the other end of the outlet tube, and each outlet is connected to each infusion tube in a corresponding manner.

[0008] In one embodiment, there are three output ports, namely a first output port, a second output port and a third output port. The first output port, the second output port and the third output port are distributed in a T-shape on the vertical reference plane, and the first output port and the second output port are coaxially arranged. The infusion tubes connected to the first and second output ports are bent, while the infusion tubes connected to the third output port are straight, so that the output ends of each infusion tube are at the same horizontal height.

[0009] In one embodiment, the input port is arranged in a T-shape with the first output port and the second output port on a horizontal reference plane.

[0010] In one embodiment, each of the output ports is provided with a first connecting cavity at its end, the inner diameter of the first connecting cavity being the same as the outer diameter of the infusion tube, and the inner diameter of the infusion tube being the same as the inner diameter of the branch channel; the input port is provided with a second connecting cavity at its end, the inner diameter of the second connecting cavity being the same as the outer diameter of the outlet tube, and the inner diameter of the outlet tube being the same as the inner diameter of the branch channel.

[0011] In one embodiment, the inner wall of the confluence chamber and the inner wall of each of the branch channels form a smooth transition.

[0012] In one embodiment, the liquid outlet pipe is arranged in a spiral coil.

[0013] In one embodiment, each of the infusion tubes is provided with a pre-installed connector for connecting to a dispensing device for dispensing vials.

[0014] According to a second aspect of the embodiments of this application, an installation method for a glue bottle dispensing device is provided, applicable to the aforementioned glue bottle dispensing device, comprising the following steps: Install a pre-installed connector at one end of each infusion tube and flare it. Insert the other end of each infusion tube into the corresponding output port of the housing. Bend and shape the infusion tube so that each pre-installed connector is on the same horizontal plane. Connect one end of the outlet tube to the storage bottle and insert the other end into the inlet of the housing; Fix the outlet tube to the inlet, and fix each infusion tube to the corresponding outlet.

[0015] In one embodiment, the outlet tube and the inlet, as well as the infusion tube and the outlet, are connected by welding or adhesive bonding.

[0016] According to a third aspect of the embodiments of this application, a coating and developing apparatus is provided, which employs the glue bottle dispensing device described in any of the above embodiments, and further includes a plurality of dispensing buffer bottles and a plurality of control valves connected to each dispensing buffer bottle. Each of the control valves is connected to the infusion tube and is used to control the on / off state, flow rate, or distribution sequence of the liquid delivered from the corresponding infusion tube to the dispensing buffer bottle.

[0017] Compared with the prior art, the beneficial effects of this application are as follows: (1) This application replaces the existing structure with a main branch for branch connection by using multiple multi-port connectors to connect the pipelines, which significantly reduces the installation and operation space requirements. Operators no longer need to use special tools to operate each pipeline individually, greatly reducing the operating space required within the equipment. This is especially suitable for the highly integrated internal environment of coating and developing equipment, making pipeline installation work that was originally difficult to carry out due to space constraints possible. At the same time, it eliminates the need for multiple independent multi-port connectors and their matching fastening structures, thus eliminating the risk of interference between connectors. The main branch can be customized according to the bottle layout, making the pipeline connection more regular and compact, which is conducive to the miniaturization and integration of the equipment.

[0018] (2) By setting a first connecting cavity at the output end and a second connecting cavity at the input end, this application ensures that after the infusion tube or outlet tube is inserted, the inner wall of the infusion tube or outlet tube is exactly on the same plane as the inner wall of the branch channel, forming a seamless and smooth transition. This structure completely eliminates the steps, gaps or dead angles caused by abrupt changes in the inner diameter in traditional connectors, and avoids the accumulation of particles caused by the stagnation of adhesive in local areas during the flow process, thereby meeting the stringent requirements of semiconductor manufacturing for ultra-high cleanliness and process stability.

[0019] (3) This application makes the dispensing tube flexible by setting it to a spiral coiled structure, thereby allowing the plastic bottle to be moved a short distance while still connected to the dispensing tube. Operators can move the plastic bottle to a safe and open location before opening or replacing it, avoiding the safety risks associated with moving the bottle after opening.

[0020] (4) This application provides a pre-installed connector for connecting the dispensing device to the end of each infusion tube, so that it can be quickly connected to other supporting equipment without tools, making installation quick and convenient, and saving space for tool operation. Attached Figure Description

[0021] Figure 1 This is a connection diagram of an existing bottle dispensing device; Figure 2 This is a schematic diagram of a bottle dispensing device according to an exemplary embodiment; Figure 3It is a cross-sectional view of the splitter connector in the vertical direction; Figure 4 This is a connection diagram of a glue bottle dispensing device used in a coating and developing equipment.

[0022] The meanings of the reference numerals in the attached figures are as follows: 100. Storage bottle; 110. Dispensing pipe; 200. Dispensing buffer bottle; 300. Diverting body; 310. Diverting connector; 311. Stepped surface; 312. Converging chamber; 313. Branch channel; 314. First connecting chamber; 320. Infusion tube; 400. Control valve; 500. Pre-assembled connector; 600. Plug. Detailed Implementation

[0023] Unless otherwise defined, the technical or scientific terms used in this specification and claims shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. Specific embodiments of this application will be described below in conjunction with the accompanying drawings. It should be noted that, in order to provide a concise description, this specification cannot exhaustively describe all features of the actual embodiments. Without departing from the spirit and scope of this application, those skilled in the art can modify and substitute the embodiments of this application, and the resulting embodiments are also within the protection scope of this application.

[0024] To address the problems existing in the prior art, this application provides a glue bottle dispensing device, an installation method, and a glue coating and developing device, solving the problems of insufficient space and inability to install in the prior art.

[0025] like Figures 2-4 As shown, in one specific embodiment, a dispensing device for dispensing liquid from a plastic bottle is provided, comprising: A liquid storage bottle 100 is connected to one end of a liquid outlet pipe 110; The diversion body 300 includes a diversion connector 310 and multiple infusion tubes 320. The diversion connector 310 includes a housing with an inlet and multiple outlets. Inside the housing, there is a confluence chamber 312 and multiple branch channels 313 communicating with the confluence chamber 312. The inlet is connected to one of the branch channels 313, and each outlet is connected to the other branch channels 313 in a corresponding manner. The inlet is connected to the other end of the outlet tube 110, and each outlet is connected to each infusion tube 320 in a corresponding manner.

[0026] This embodiment replaces the existing structure's use of multiple multi-port connectors for pipe branching with a branching main body 300, significantly reducing the installation and operation space requirements. Operators no longer need to use specialized tools to operate each pipe individually at the ends, greatly reducing the operating space required within the equipment. This is particularly suitable for the highly integrated internal environment of coating and developing equipment, enabling pipe installation work that was previously difficult to carry out due to space constraints to be carried out smoothly. At the same time, it eliminates the need for multiple independent multi-port connectors and their matching fastening structures, eliminating the risk of interference between connectors. The branching main body can be customized according to the bottle layout, making the pipe connection more regular and compact, which is conducive to the miniaturization and integration of the equipment.

[0027] like Figure 3 As shown, in one specific embodiment, there are three output ports, namely a first output port, a second output port and a third output port. The first output port, the second output port and the third output port are distributed in a T-shape on the vertical reference plane, and the first output port and the second output port are coaxially arranged. The infusion tube 320 connected to the first and second output ports has a bent tube structure, while the infusion tube 320 connected to the third output port has a straight tube structure, so that the output ends of each infusion tube 320 are at the same horizontal height.

[0028] In this embodiment, the three output ports are distributed in a T-shape on the vertical reference plane. This can be understood as follows: the first and second output ports are set coaxially in a straight line. On the vertical reference plane, the third output port is set perpendicular to the axis of the first and second output ports. This provides reasonable space for the infusion tube 320 to be curved and straight. At the same time, the curved tube structure ensures that the output ends of each infusion tube 320 are at the same horizontal height. This means that the devices connected to the output ends can be arranged neatly in a row on the same plane, minimizing the area occupied.

[0029] In one specific embodiment, the input port is distributed in a T-shape with the first output port and the second output port on the horizontal reference plane. This can be understood as follows: the first output port and the second output port are arranged coaxially in a straight line, and the input port is arranged perpendicular to the axis of the first output port and the second output port on the horizontal reference plane.

[0030] In this embodiment, the arrangement of the input port and each output port enables the pipeline to be arranged in a three-dimensional staggered manner, avoiding pipeline crossing interference and greatly saving installation area and height space.

[0031] like Figures 3-4As shown, in one specific embodiment, each output port is provided with a first connecting cavity 314 at its end. The inner diameter of the first connecting cavity 314 is the same as the outer diameter of the infusion tube 320, and the inner diameter of the infusion tube 320 is the same as the inner diameter of the branch channel 313. The input port is provided with a second connecting cavity (not shown in the figure). The inner diameter of the second connecting cavity is the same as the outer diameter of the outlet tube 110, and the inner diameter of the outlet tube 110 is the same as the inner diameter of the branch channel 313.

[0032] In this embodiment, a first connecting cavity 314 is provided at the output port end and a second connecting cavity is provided at the input port end. This can be understood as a connecting cavity with an inner diameter larger than the inner diameter of the branch channel 313 being provided at both the output port end and the input port end. That is, both the input port and the output port are stepped in the axial section, and the width of the step surface 311 is the same as the wall thickness of the infusion tube 320 or the outlet tube 110. This ensures that when the infusion tube 320 or the outlet tube 110 is inserted and abuts against the step surface 311, the inner wall of the infusion tube 320 or the outlet tube 110 is exactly on the same plane as the inner wall of the branch channel 313, forming a seamless and smooth transition. This structure completely eliminates the gaps or dead angles caused by abrupt changes in inner diameter in traditional connectors, and avoids the accumulation of particles caused by the adhesive stagnating in local areas during the flow process, thereby meeting the stringent requirements of semiconductor manufacturing for ultra-high cleanliness and process stability.

[0033] like Figure 3 As shown, in one specific embodiment, the inner wall of the confluence chamber 312 and the inner walls of each branch channel 313 form a smooth transition. In this embodiment, the smooth transition between the inner walls reduces sharp corners and dead zones inside the branch connector 310, preventing the adhesive from accumulating in localized areas during flow.

[0034] like Figure 2 , Figure 4 As shown, in one specific embodiment, the liquid outlet pipe 110 is arranged in a spiral coil.

[0035] In existing technologies, replacing a liquid storage bottle typically requires opening the bottle and removing it from the equipment. However, once opened, the bottle is prone to tilting, leaking, or accidental collisions during movement, leading to chemical splashes and posing a safety threat to operators. It may also contaminate the internal environment of the equipment. This embodiment addresses this by designing the outlet pipe 110 as a spiral coiled structure, making it extendable and allowing the liquid storage bottle 100 to be moved short distances while remaining connected to the outlet pipe 100. Operators can move the liquid storage bottle 100 to a safe, open location before opening or replacing it, avoiding the safety risks associated with moving it after opening.

[0036] like Figure 2 , Figure 4As shown, in one specific embodiment, each infusion tube 320 is provided with a pre-installed connector 500 for connecting the dispensing device to other equipment at its end.

[0037] In this embodiment, each infusion tube 320 is provided with a pre-installed connector 500 for connecting the dispensing device to the bottle, so that it can be quickly connected to other supporting equipment without tools, making installation quick and convenient, and saving space for tool operation.

[0038] like Figure 2 As shown, in some specific embodiments, each pre-installed connector 500 may also be equipped with a plug 600 for sealing the port of the infusion tube 320 when not in use, to prevent dust, microorganisms or particulate contaminants from entering the junction chamber and pipeline system through the open interface.

[0039] like Figures 2-3 As shown, according to a second aspect of the embodiments of this application, an installation method for a glue bottle dispensing device is provided, applicable to the above-described glue bottle dispensing device, comprising the following steps: Install a pre-installed connector 500 at one end of each infusion tube 320 and flare it. Insert the other end of each infusion tube 320 into the corresponding output port of the housing. Bend and shape the infusion tube 320 so that each pre-installed connector 500 is on the same horizontal plane. Connect one end of the outlet pipe 110 to the storage bottle 100, and insert the other end into the inlet of the housing; Fix the outlet tube 110 to the inlet, and fix each infusion tube 320 to its corresponding outlet.

[0040] In this embodiment, the pre-installed connector 500 is first fitted onto the infusion tube 320. Then, a special tool, such as a flaring gun, is used to clamp the output end of the infusion tube 320 and flare it. The diameter of the flared output end is increased, which can hold the pre-installed connector 500 in place, preventing the pre-installed connector 500 from detaching from the infusion tube 320. Then, the subsequent tube bending and shaping and pipeline fixing installation steps are carried out. This avoids the situation where the flaring gun cannot clamp the infusion tube 320 for flaring after the tube is bent and shaped.

[0041] In one embodiment, the outlet pipe 110 and the inlet, and the infusion pipe 320 and the outlet are connected by welding or adhesive bonding.

[0042] In this embodiment, welding or adhesive bonding eliminates the need for threaded grooves, ferrule steps, or sealing ring grooves at the joint, ensuring a completely flush transition of the inner surface and preventing particle retention and accumulation in the fluid. Welding or adhesive bonding eliminates the need for additional nuts, clamps, or sealing rings, allowing for tight arrangement of multiple pipelines and further reducing equipment size.

[0043] like Figure 4As shown, according to a third aspect of the embodiments of this application, a coating and developing device is provided, which employs the glue bottle dispensing device described in any of the above specific embodiments, and further includes a plurality of dispensing buffer bottles 200 and a plurality of control valves 400 connected one-to-one with each dispensing buffer bottle 200. Each control valve 400 is connected to an infusion tube 320 to control the on / off state, flow rate, or distribution sequence of the liquid delivered from the corresponding infusion tube 320 to the liquid distribution buffer bottle 200.

[0044] The storage bottle 100 stores photoresist. Opening the control valve 400 creates a passage, allowing the photoresist to be drawn from the storage bottle 100. The photoresist flows through the outlet pipe 110, the diversion connector 310, and the delivery pipe 320 corresponding to the control valve 400 into the dispensing buffer bottle 200. The bottom of the dispensing buffer bottle 200 connects to subsequent process equipment, supplying photoresist to them. The dispensing buffer bottle 200 is also connected to a pump, providing power for liquid delivery. In this embodiment, the three output ports of the dispensing device are arranged in a T-shape on the vertical reference plane, providing reasonable space for the delivery pipe 320 to be both curved and straight. Simultaneously, the curved pipe structure ensures that the output ends of each delivery pipe are at the same horizontal height. The dispensing buffer bottles 200 are neatly arranged in a row on the same plane, minimizing the occupied area.

[0045] The above description of the embodiments is intended to enable those skilled in the art to understand and apply this application. It will be apparent to those skilled in the art that various modifications can be easily made to these embodiments, and the general principles described herein can be applied to other embodiments without creative effort. Therefore, this application is not limited to the embodiments described herein, and any improvements and modifications made by those skilled in the art based on the disclosure of this application without departing from the scope and spirit of this application are within the scope of this application.

Claims

1. A dispensing device for plastic bottles, characterized in that, include: A liquid storage bottle, connected to one end of the liquid outlet tube; The main body of the diversion system includes a diversion connector and multiple infusion tubes; the diversion connector includes a housing and an inlet and multiple outlets disposed on the housing. The housing is provided with a confluence chamber and multiple branch channels communicating with the confluence chamber. The inlet is connected to one of the branch channels, and each outlet is connected to the other branch channels in a corresponding manner. The inlet is connected to the other end of the outlet tube, and each outlet is connected to each infusion tube in a corresponding manner.

2. The dispensing device for a glue bottle according to claim 1, characterized in that, There are three output ports, namely the first output port, the second output port and the third output port. The first output port, the second output port and the third output port are distributed in a T-shape on the vertical reference plane, and the first output port and the second output port are coaxially arranged. The infusion tubes connected to the first and second output ports are bent, while the infusion tubes connected to the third output port are straight, so that the output ends of each infusion tube are at the same horizontal height.

3. The dispensing device for a glue bottle according to claim 2, characterized in that, The input port is arranged in a T-shape with the first output port and the second output port on the horizontal reference plane.

4. The dispensing device for a glue bottle according to claim 1, characterized in that, Each of the output ports is provided with a first connecting cavity at its end, the inner diameter of the first connecting cavity being the same as the outer diameter of the infusion tube, and the inner diameter of the infusion tube being the same as the inner diameter of the branch channel; each of the input ports is provided with a second connecting cavity at its end, the inner diameter of the second connecting cavity being the same as the outer diameter of the outlet tube, and the inner diameter of the outlet tube being the same as the inner diameter of the branch channel.

5. A dispensing device for a glue bottle according to claim 1, characterized in that, The inner wall of the confluence chamber and the inner wall of each of the branch channels form a smooth transition.

6. The dispensing device for a plastic bottle according to claim 1, characterized in that, The liquid outlet pipe is arranged in a spiral shape.

7. A dispensing device for a rubber bottle according to any one of claims 1-6, characterized in that, Each of the infusion tubes is provided with a pre-installed connector at its end.

8. A method for installing a glue bottle dispensing device, applicable to the glue bottle dispensing device of claim 7, comprising the following steps: Install a pre-installed connector at one end of each infusion tube and flare it. Insert the other end of each infusion tube into the corresponding output port of the housing. Bend and shape the infusion tube so that each pre-installed connector is on the same horizontal plane. Connect one end of the outlet tube to the storage bottle and insert the other end into the inlet of the housing; Fix the outlet tube to the inlet, and fix each infusion tube to the corresponding outlet.

9. The installation method of the glue bottle dispensing device according to claim 8, characterized in that, The outlet pipe and the inlet, as well as the infusion pipe and the outlet, are connected by welding or adhesive bonding.

10. A coating and developing apparatus, characterized in that, The dispensing device for dispensing liquids in a bottle according to any one of claims 1-7 further includes a plurality of dispensing buffer bottles and a plurality of control valves connected to each dispensing buffer bottle; Each of the control valves is connected to the infusion tube and is used to control the on / off state, flow rate, or distribution sequence of the liquid delivered from the corresponding infusion tube to the dispensing buffer bottle.

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