Exposure machine for semiconductor metal soft board carrier lead frame

Abstract

The application belongs to the technical field of semiconductor material processing equipment, and particularly relates to a carrier plate lead frame exposure machine winding and unwinding system for a semiconductor metal soft plate and a tensioning mechanism thereof, which comprises a cabinet, a motor, a first electric cylinder and a second electric cylinder are arranged at intervals in the cabinet, the first electric cylinder and the second electric cylinder are both used for moving a material roll, the cabinet is provided with a first pressing mechanism and a second pressing mechanism, the cabinet is provided with two hydraulic expansion shafts which are used for winding and unwinding in the cabinet, the hydraulic expansion shaft comprises a hydraulic cylinder and a flange which are connected with each other, a sliding groove, a first supporting plate and a hinge shaft are arranged on the flange around the central axis of the hydraulic cylinder, the hydraulic cylinder provides power for the hinge shaft in the axial direction of the hydraulic expansion shaft, and the first supporting plate slides along the sliding groove under the drive of the hinge shaft. The application winds and unwinds the material roll and leaves a physical space, and solves the problem of surface damage of the material roll caused by severe friction in the process of discharging.

Description

Technical Field

[0001] This invention belongs to the technical field of semiconductor material processing equipment, specifically relating to the unwinding and winding system of a carrier lead frame exposure machine for semiconductor metal flexible circuit boards and its tensioning mechanism. Background Technology

[0002] Semiconductor flexible metal circuit boards are fed into an exposure machine for non-contact processing. The purpose is to copy the designed high-precision circuit pattern onto a photosensitive material (photoresist) on the surface of a metal foil (such as copper foil). A winding and unwinding device travels within the exposure machine, enabling highly efficient, continuous, and automated production. An automated tension control system and vacuum adsorption platform smoothly transport extremely thin flexible circuit boards, effectively avoiding creases, wrinkles, and scratches that can occur with manual operation.

[0003] Existing flexible semiconductor metal circuit boards are often loaded and unloaded in rolls. For example, a Chinese invention patent application (publication number: CN117509254B) disclosed a roll-to-roll laser winding and unwinding machine, which includes an S-shaped material loading mechanism, enabling continuous feeding or unloading of the rolls, convenient replacement, and improved efficiency of laser drilling.

[0004] In the actual processing of semiconductor metal flexible circuit board rolls, two rolls are fed or unloaded separately. The load is concentrated on the contact interface between the roll and the carrier shaft, resulting in a significant increase in the contact pressure and excessive frictional resistance. During the unloading process, the intense friction can easily cause damage to the surface of the roll. Summary of the Invention

[0005] The purpose of this invention is to provide a carrier lead frame exposure machine winding and unwinding system and its tensioning mechanism for semiconductor metal flexible circuit boards, which can wind and unwind the material roll while leaving physical space, and solve the problem of surface damage to the material roll caused by severe friction during the unloading process.

[0006] The specific technical solution adopted by this invention is as follows: A semiconductor metal flexible circuit board carrier lead frame exposure machine winding and unwinding system includes a cabinet, wherein a motor, a first electric cylinder, and a second electric cylinder are spaced apart inside the cabinet, both of which are used to move the material roll; two cabinets are configured, and a first clamping mechanism and a second clamping mechanism are respectively installed on the two cabinets; the system also includes: Two hydraulic expansion shafts are used for winding and unwinding inside the two cabinets, respectively. Each hydraulic expansion shaft includes a hydraulic cylinder and a flange connected to each other. The flange is provided with a groove, a first support plate and a hinge shaft around the central axis of the hydraulic cylinder. The hydraulic cylinder provides power to the hinge shaft along the hydraulic expansion shaft axis, so that the first support plate slides along the slide groove under the drive of the hinge shaft, and can switch between the open state and the closed state. The first support plate is in a closed state to reduce the frictional resistance at the contact interface during the material roll unloading process.

[0007] As an optional solution, a lifting and diversion mechanism is also included; The lifting and diversion mechanism includes a second support plate, a first cylinder, and a third support plate connected sequentially along the vertical direction of the motor inside the cabinet; The third support plate is fixed with a second cylinder and a distance sensor at intervals, and the cylinder rod of the second cylinder is detachably mounted with a first pressure plate for clamping the flexible metal plate. In the clamped state, the first cylinder provides lifting force to the third support plate to drive the metal flexible plate to switch between the unwinding station and the tape application station.

[0008] As an alternative, the first support plate is provided with interlocking positioning grooves and clamps, the positioning grooves are fixed with limiting seats and strain gauges at intervals, and the clamps are bonded with magnetic suction components and elastic sheaths at intervals. In the case of magnetic attraction and limiting seat, when magnetically attracted, both provide clamping force to the clamping plate, so that the elastic sheath cooperates with the positioning groove to clamp the end of the material roll in the winding state, and a movable rod is inserted inside the elastic sheath; The movable rod, when disengaged from the elastic sheath, is used to release the clamping force at the end of the material roll.

[0009] As an optional solution, a coupling and a rotating shaft are sequentially connected between the hydraulic cylinder and the flange along their axial directions; The rotating shaft is connected to the motor via a coupling, and the hydraulic cylinder transmits power to the hinge shaft via the rotating shaft.

[0010] As an optional solution, a transmission mechanism is also included; The conveying mechanism includes a first roller, a second roller, a third roller, a fourth roller, and a guide rail, which are spaced apart inside the cabinet. A counterweight that is rotatably connected to the third roller is slidably mounted on the guide rail. The counterweight provides downward force to the third roller, which enables the third roller to switch the metal flexible plate between a tensioned state and a return state.

[0011] As an optional solution, the first clamping mechanism includes a first limiting frame, a third cylinder and a second pressure plate connected in sequence along the vertical direction of the cabinet, wherein the second pressure plate is used to clamp the metal flexible plate inside the first limiting frame; When the second pressure plate is pressing the flexible metal sheet, the hydraulic expansion shaft provides winding force to the coil to tension the flexible metal sheet.

[0012] As an optional solution, the second clamping mechanism includes a second limiting frame and a third limiting frame spaced apart on the cabinet; The second limiting frame is provided with a fourth cylinder and a first rotating seat at intervals, and the first rotating seat is provided with a first support roller rotatably mounted along the horizontal direction of the second limiting frame. The third limiting frame is equipped with a fifth cylinder and a second rotating seat at intervals, and the second rotating seat is rotatably mounted with a second support roller along the horizontal direction of the second limiting frame.

[0013] As an optional solution, the second clamping mechanism also includes a linear module fixed inside the cabinet, and a slide is connected between the linear module and the third limiting frame; The linear module is used to provide thrust to the third limiting frame, so that the third limiting frame is displaced relative to the second clamping mechanism.

[0014] As an alternative, the first support plate is connected to the rotating shaft via at least two sets of hinge shafts, with each set of two hinge shafts symmetrically arranged relative to the central axis of the first support plate.

[0015] A tensioning mechanism for adapting to the unwinding and rewinding system of a carrier lead frame exposure machine for semiconductor flexible metal circuit boards.

[0016] The technical effects achieved by this invention are as follows: This invention provides semiconductor material processing equipment that employs a hydraulic expansion shaft capable of opening or closing to perform material roll feeding or unloading operations. This design creates physical space between the material roll and the hydraulic expansion shaft, preventing excessive frictional resistance and solving the problem of surface damage to the material roll caused by severe friction during the unloading process.

[0017] This invention provides a semiconductor material processing device employing a counterweight capable of switching between a recirculation state and a tension state. The counterweight can provide a specified downward force according to user settings, which can either retract the flexible metal sheet from the exposure machine into the recirculation state, or apply a downward load to the flexible metal sheet, allowing it to enter the tension state without additional power, thus achieving continuous tension of the flexible metal sheet.

[0018] This invention provides semiconductor material processing equipment that uses clamps to hold and position flexible metal sheets on a hydraulic expansion shaft, replacing the manual pulling operation of workers to begin winding. The clamps are modular, monitoring pressure signal changes from different positions. If the difference between the maximum and minimum stress values ​​exceeds an upper threshold, a deviation alarm signal is triggered, enabling rapid determination of coil deviation. Attached Figure Description

[0019] Figure 1This is a schematic diagram of the carrier lead frame exposure machine unwinding and rewinding system for the semiconductor metal flexible circuit board of the present invention. Figure 2 This is a first perspective view of the semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system of the present invention. Figure 3 This is a second perspective view of the semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system of the present invention. Figure 4 This is the invention Figure 2 A schematic diagram of a hydraulic expansion shaft; Figure 5 This is the invention Figure 2 A schematic diagram of another hydraulic expansion shaft; Figure 6 This is the invention Figure 3 A schematic diagram of a hydraulic expansion shaft; Figure 7 This is the invention Figure 3 A schematic diagram of another hydraulic expansion shaft; Figure 8 This is the invention Figure 4 Side view of the first clamping mechanism; Figure 9 This is the invention Figure 5 A schematic diagram of the second clamping mechanism; Figure 10 This is the invention Figure 4 Side view of the central lifting and diversion mechanism; Figure 11 This is the invention Figure 4 A side view of a hydraulic expansion shaft; Figure 12 This is the invention Figure 5 A side view of another hydraulic expansion shaft; Figure 13 This is the invention Figure 11 Front view of the middle flange; Figure 14 This is the invention Figure 13 Enlarged view of point A in the middle; Figure 15 This is the invention Figure 13 Front view of the first support plate in the middle; Figure 16 This is the invention Figure 15 Enlarged view of point B in the middle; Figure 17 This is a system block diagram of the controller of the present invention.

[0020] The attached diagram lists the components represented by each number as follows: 1. Cabinet; 101. First slide rail; 102. Rack; 103. First electric cylinder; 104. Second slide rail; 105. Mounting bracket; 106. Second electric cylinder; 107. Motor; 2. Hydraulic expansion shaft; 201. Hydraulic cylinder; 202. Coupling; 203. Rotary shaft; 204. Flange; 205. Slide groove; 206. First support plate; 207. Hinge shaft; 3. Conveying mechanism; 301. First roller; 302. Second roller; 303. Third roller; 304. Fourth roller; 305. Guide rail; 306. Counterweight; 4. Lifting and diverting mechanism; 401. Second support plate; 402. First cylinder; 403. Third support plate; 404. Second cylinder; 405. First pressure plate; 406. Distance sensor; 5. First clamping mechanism; 501. First limiting frame; 502. Third cylinder; 503. Second pressure plate; 6. Second clamping mechanism; 601. Second limiting frame; 602. Third limiting frame; 603. Linear module; 604. Slide; 605. Fourth cylinder; 606. First rotating seat; 607. First support roller; 608. Fifth cylinder; 609. Second rotating seat; 610. Second support roller; 701. Positioning groove; 702. Limiting seat; 703. Magnetic suction component; 704. Strain gauge; 705. Clamping plate; 706. Elastic sheath tube; 707. Movable rod. Detailed Implementation

[0021] To make the objectives and advantages of this invention clearer, the invention will be specifically described below with reference to embodiments. It should be understood that the following text is merely used to describe one or more specific embodiments of the invention and does not strictly limit the scope of protection specifically claimed by the invention.

[0022] The processing of semiconductor flexible metal circuit boards involves "copying" a pre-set high-precision circuit pattern onto a photosensitive material (such as photoresist) coated on the surface of the flexible metal circuit board using an exposure machine, forming a carrier board lead frame. In terms of material supply, it can be purchased in rolls from suppliers or produced in-house. However, in terms of material loading, the roll is unwound and fed flat into the exposure machine.

[0023] like Figure 1 - Figure 17 As shown, the semiconductor metal flexible circuit board carrier lead frame exposure machine winding and unwinding system includes a cabinet 1. Two cabinets 1 are configured, each equipped with a first clamping mechanism 5 and a second clamping mechanism 6. Both cabinets 1 have hydraulic expansion shafts 2 inside, used for winding and unwinding within their respective cabinets. During preparation, the workers place the two cabinets 1 alternately in the workshop. Figure 1The exposure machine is placed at the intervals indicated by the dotted lines, so that the feeding channels of the two cabinets 1 are aligned with the feeding channels of the exposure machine, reducing the uneven wear between the system and the metal flexible board.

[0024] During operation, the staff puts the material roll into a cabinet 1 for unwinding, uses the corresponding hydraulic expansion shaft 2 to support the material roll, controls the hydraulic expansion shaft 2 to tighten the material roll and lock it, and then controls the hydraulic expansion shaft 2 to rotate forward to unwind the material roll, forming a continuous metal flexible plate, which passes through the first pressing mechanism 5, the exposure machine and the second pressing mechanism 6 to complete the loading operation. During exposure, the first pressing mechanism 5 and the second pressing mechanism 6 are controlled to press the metal plate, so that the part of the metal plate inside the exposure machine is in a tensioned state, preventing the pattern formed by the photosensitive material from being distorted or deformed.

[0025] See attached document Figure 6 and Figure 17 Inside the cabinet 1, there are spaced motors 107, a first electric cylinder 103, and a second electric cylinder 106. The motors 107, the first electric cylinder 103, and the second electric cylinder 106 are fixed by bolts to the threaded holes of the cabinet 1. The first electric cylinder 103 and the second electric cylinder 106 are used to move the material roll linearly along the horizontal direction of the cabinet 1. There are two motors 107, which are used to drive the two hydraulic expansion shafts 2 to rotate forward and reverse, respectively, so that the hydraulic expansion shafts 2 drive the material roll to rewind and unwind. When the photoelectric sensor detects a horizontal offset of the flexible metal sheet relative to the feeding channel, the first electric cylinder 103 or the second electric cylinder 106 is activated to move the hydraulic expansion shaft 2 and the material roll in the opposite direction of the offset until the photoelectric sensor detects that the distance signal of the flexible metal sheet meets the preset range, and then the movement stops.

[0026] As an optional embodiment, the motor 107 can be a geared motor to meet the requirement of low-speed rotation of the material roll, and when the material roll needs to stop, the motor 107 can brake and automatically lock.

[0027] See attached document Figure 3 , Figure 4 and Figure 17 The hydraulic expansion shaft 2 includes a hydraulic cylinder 201 and a flange 204 connected to each other. A groove 205 is provided on the flange 204 around the central axis of the hydraulic cylinder 201. A first support plate 206 is slidably installed on each groove 205. The number of grooves 205 is set to 4. A hinge shaft 207 is rotatably installed on each first support plate 206. The hydraulic cylinder 201 provides power to the hinge shaft 207 along the axial direction of the hydraulic expansion shaft 2.

[0028] When the cylinder rod of the hydraulic cylinder 201 extends forward, it pushes the hinge shaft 207 to swing relative to the first support plate 206 in a direction away from the flange 204, so that the first support plate 206 slides along the slide groove 205 towards the outer edge of the flange 204 under the drive of the hinge shaft 207, and reaches the open state to support the material roll. When the cylinder rod of the hydraulic cylinder 201 extends in the reverse direction, it pulls the hinge shaft 207 to swing relative to the first support plate 206 in a direction closer to the flange 204, so that the first support plate 206 slides along the slide groove 205 towards the inner edge of the flange 204 under the drive of the hinge shaft 207, and reaches the closed state to loosen the material coil. When the material roll is unloaded, a physical space is left between the material roll and the hydraulic expansion shaft 2 to prevent excessive frictional resistance between the two. During the unloading process, it is easy to remove the material roll and solve the problem of surface damage caused by severe friction.

[0029] To provide hydraulic pressure, each cabinet 1 is equipped with a hydraulic oil tank and a hydraulic oil pump. The hydraulic oil pump draws hydraulic oil from the hydraulic oil tank and delivers it to the hydraulic cylinder 201 to realize the transmission of hydraulic force.

[0030] See attached document Figure 6 , Figure 7 and Figure 17 A first slide rail 101 is detachably mounted on the bottom wall of the cabinet 1 via bolts and threaded holes. A frame 102 is slidably mounted on the first slide rail 101. A first electric cylinder 103 is used to push the frame 102 to move along the first slide rail 101. A second slide rail 104 is detachably mounted on the frame 102 via bolts and threaded holes. A mounting bracket 105 is slidably mounted on the second slide rail 104. A motor 107 and a hydraulic cylinder 201 are mounted on the mounting bracket 105 via bolt and nut assembly. A flange 204 is rotatably mounted on the mounting bracket 105 via bearings. A second electric cylinder 106 is used to push the mounting bracket 105 to move along the second slide rail 104, thereby driving the motor 107, the hydraulic expansion shaft 2, and the metal flexible plate to move for correction.

[0031] Both the first electric cylinder 103 and the second electric cylinder 106 can be equipped with an E-ECTL40 electric actuator.

[0032] See attached document Figure 11 , Figure 12 and Figure 13 A coupling 202 and a rotating shaft 203 are sequentially connected between the hydraulic cylinder 201 and the flange 204 along their axial direction. The rotating shaft 203 is connected to the motor 107 via the coupling 202. The coupling 202 is connected to the main shaft of the motor 107 via a gear set. The hydraulic cylinder 201 transmits power to the hinge shaft 207 via the rotating shaft 203, thereby achieving the deceleration rotation of the rotating shaft 203. To avoid interference between the axial movement and circumferential rotation of the shaft 203, this solution uses bearings to achieve the axial connection between the cylinder rod of the hydraulic cylinder 201 and the shaft 203, enabling power transmission along the axial direction. A key connection is used to connect the inner side of the coupling 202 and the outer side of the shaft 203, so that when the shaft 203 moves axially, it slides relative to the coupling 202 along the keyway. When the coupling 202 rotates, the key and keyway drive the shaft 203 to rotate relative to the bearing.

[0033] See attached document Figure 5 , Figure 13 and Figure 14 The first support plate 206 is connected to the rotating shaft 203 through at least two sets of hinge shafts 207 to ensure that at least two support points act on the first support plate 206. The two hinge shafts 207 in each set are symmetrically arranged relative to the central axis of the first support plate 206 to facilitate the balanced force on each set of hinge shafts 207. The two ends of two adjacent hinge shafts 207 are connected to the same short shaft. The short shaft is rotatably mounted on the outside of the rotating shaft 203 and the inside of the first support plate 206 through bearings.

[0034] To fit the curvature of the material roll, the first support plate 206 is designed as an arc-shaped plate with rounded edges to prevent scratching the material roll. The end of the arc-shaped plate away from the flange 204 is curved to facilitate insertion into the hole in the middle of the material roll.

[0035] See attached document Figure 6 and Figure 7 Both cabinets 1 are equipped with a transmission mechanism 3 inside; The conveying mechanism 3 includes a first roller 301, a second roller 302, a third roller 303, a fourth roller 304 and a guide rail 305, which are rotatably mounted inside the frame 102 via bearings. A hydraulic expansion shaft 2 unwinds the coiled material to form a flexible metal sheet. The flexible metal sheet is then passed sequentially around the first roller 301, the second roller 302, the third roller 303 and the fourth roller 304 inside a cabinet 1, passes through the first pressing mechanism 5, and is then fed into the exposure machine. When the flexible metal plate leaves the exposure machine, the operator passes the flexible metal plate through the second clamping mechanism 6 and then passes it around the fourth roller 304, the third roller 303, the second roller 302 and the first roller 301 inside another cabinet 1 in sequence, so that the flexible metal plate can be exposed in a flat position after being leveled by the above rollers. Meanwhile, a counterweight 306 is slidably mounted on the guide rail 305 and rotates with the third roller 303 via a bearing. The counterweight 306 provides downward force to the third roller 303. If the hydraulic expansion shaft 2 stops rotating, the counterweight 306 drives the third roller 303 to descend, causing the metal flexible plate to retract from the exposure machine and enter the return state. If the hydraulic expansion shaft 2 continues to rotate, the counterweight 306 drives the third roller 303 to apply a downward load to the metal flexible plate, which can enter the tensioning state without additional power, thus achieving continuous tensioning of the metal flexible plate.

[0036] See attached document Figure 7 , Figure 10 and Figure 17 It also includes a lifting and diverting mechanism 4, which includes a second support plate 401, a first cylinder 402 and a third support plate 403 connected sequentially along the vertical direction of the motor 107 inside the cabinet 1. The second support plate 401 is installed on the frame 102 by bolt and nut assembly. When the cylinder rod of the first cylinder 402 extends, it drives the third support plate 403 to rise, so as to lift the metal flexible plate until the metal flexible plate reaches the tape application station. When the cylinder rod of the first cylinder 402 shortens, it drives the third support plate 403 to lower, so that the metal flexible plate enters the winding and unwinding station until it is detached from the metal flexible plate.

[0037] The third support plate 403 is fixed with a second cylinder 404 and a distance sensor 406 (a laser sensor can be selected) at intervals by bolt and nut assembly. The cylinder rod of the second cylinder 404 is detachably mounted with a first pressure plate 405 for clamping the flexible metal plate by bolt and nut assembly. During operation, the distance sensor 406 monitors the position signal of the flexible metal plate in real time. If the position signal is triggered, the cylinder rod of the second cylinder 404 shortens, causing the first pressure plate 405 to cooperate with the third support plate 403 to clamp the flexible metal plate. At the same time, the cylinder rod of the first cylinder 402 extends, causing the third support plate 403 to rise, thereby lifting the flexible metal plate and causing the flexible metal plate to automatically reach the tape application station. When the flexible metal sheet is clamped, the first cylinder 402 provides lifting force to the third support plate 403 to drive the flexible metal sheet to switch between the unwinding station and the tape application station. The automation level is high, and it avoids the need for workers to pull the flexible metal sheet by hand. Both cylinder 402 (first cylinder) and cylinder 404 (second cylinder) can be CP96 type cylinders.

[0038] See attached document Figure 4 , Figure 8 and Figure 17The first pressing mechanism 5 includes a first limiting frame 501, a third cylinder 502, and a second pressure plate 503 connected vertically along the cabinet 1. The first limiting frame 501 is installed on the frame 102 by bolt and nut kit. The second pressure plate 503 is used to press the metal flexible plate inside the first limiting frame 501. When the metal flexible plate is exposed, the cylinder rod of the third cylinder 502 extends, driving the second pressure plate 503 to press the metal flexible plate, so that the part of the metal flexible plate inside the exposure machine enters a tensioned state, and can be "copied" on the flat metal flexible plate. If the flexible metal sheet bends, while the second pressure plate 503 is pressing the flexible metal sheet, the hydraulic expansion shaft 2 provides winding force to the coil to tension the flexible metal sheet inside the cabinet 1 and automatically flatten the flexible metal sheet.

[0039] See attached document Figure 7 , Figure 9 and Figure 17 The second clamping mechanism 6 includes a second limiting frame 601 and a third limiting frame 602 that are installed at intervals on the frame 102 by bolt and nut kits. The second limiting frame 601 and the third limiting frame 602 are used to pass through the flexible metal plate and guide the flexible metal plate. The second limiting frame 601 is equipped with a fourth cylinder 605 and a first rotating seat 606 at intervals by bolt and nut assembly. The first rotating seat 606 is rotatably mounted with a first support roller 607 along the horizontal direction of the second limiting frame 601. When the metal plate is conveyed along the second limiting frame 601, the first support roller 607 can roll to support the metal plate and prevent the second limiting frame 601 from rubbing against the metal plate.

[0040] During exposure, the cylinder rod of the fourth cylinder 605 extends, driving the third pressure plate to work with the second limit frame 601 to press the metal flexible plate, so that the part of the metal flexible plate inside the exposure machine enters a tensioned state, and can be "copied" on the flat metal flexible plate. The third limiting frame 602 is equipped with a fifth cylinder 608 and a second rotating seat 609 at intervals by bolt and nut kits. The second rotating seat 609 is rotatably mounted with a second support roller 610 along the horizontal direction of the second limiting frame 601. When the metal plate is conveyed along the third limiting frame 602, the second support roller 610 can roll to support the metal plate and prevent the third limiting frame 602 from rubbing against the metal plate. The counterweight 306 inside the cabinet 1 used for winding drives the third roller 303 to descend, causing the metal flexible plate to retract a certain distance from the corresponding hydraulic expansion shaft 2. The cylinder rod of the fifth cylinder 608 extends, causing the fourth pressure plate to cooperate with the third limit frame 602 to press the metal flexible plate, thus entering the return state.

[0041] See attached document Figure 7 , Figure 9 and Figure 17The second pressing mechanism 6 also includes a linear module 603 fixed inside the frame 102 by a bolt and nut assembly. A slide 604 is connected between the linear module 603 and the third limiting frame 602. The third limiting frame 602 and the slide 604 are connected by a bolt and nut assembly. The linear module 603 is used to provide thrust to the third limiting frame 602, so that the third limiting frame 602 is displaced relative to the second pressing mechanism 6, thereby changing the position of the fourth pressure plate cooperating with the third limiting frame 602 to press the metal flexible plate.

[0042] See attached document Figure 15 and Figure 16 The first support plate 206 has a positioning groove 701. The edge of the positioning groove 701 near the middle of the first support plate 206 is connected to a clamping plate 705 through a hinge seat. The positioning groove 701 has a limit seat 702 and a strain gauge 704 fixed at intervals inside. The clamping plate 705 has a magnetic suction element 703 and an elastic sheath 706 bonded at intervals. When winding, the operator inserts one end of the metal flexible plate into the positioning groove 701 and clamps it with the clamping plate 705 to complete the positioning operation, so that the first support plate 206 can pull the metal flexible plate to rotate around the rotating shaft 203 and automatically wind it up.

[0043] When the magnetic suction component 703 and the limiting seat 702 are magnetically attracted, they provide clamping force to the clamping plate 705, so that the elastic sheath tube 706 cooperates with the positioning groove 701 to clamp the end of the material roll in the winding state. When clamping, the elastic sheath tube 706 is equipped with a movable rod 707, which can provide support at the clamping position. Before the clamping plate 705 is fully clamped, the metal soft plate is pre-pressed. As the coil is wound up, the load acting on the clamping plate 705 gradually increases, which can cause the part of the clamping plate 705 to bulge inward to squeeze the strain gauge 704, triggering a pressure signal until the limit seat 702 and the magnetic suction component 703 contact, supporting the clamping plate 705, and the pressure signal no longer increases. After winding is completed, the worker manually pulls out the movable rod 707 inside the elastic sheath 706. With the movable rod 707 disengaged from the elastic sheath 706, it is used to release the clamping force at the end of the material roll, allowing the material roll to easily detach from the clamping plate 705.

[0044] As an optional embodiment, the limiting seat 702 and the positioning groove 701 are integrally milled and formed, the strain gauge 704 is bonded to the bottom wall of the positioning groove 701, and one end of the movable rod 707 has an inner layer of silicone material and an outer layer of high elastic rubber material, which can reduce the friction between it and the movable rod 707. At the same time, silicone oil is coated between the elastic sheath 706 and the movable rod 707, which can further reduce the friction between them and the movable rod 707, making it easier to insert or pull out the movable rod 707.

[0045] See attached document Figure 17The resistance change of strain gauge 704 is usually small. By using a Wheatstone bridge measurement circuit, the resistance change is converted into a voltage change, which is then amplified (by thousands of times) and sent to the controller via a signal converter. Since the strain value is proportional to the stress of the material, the stress value can be further calculated using Young's modulus. Meanwhile, this scheme arranges 16 strain gauges 704 at intervals along the length of the positioning groove 701, and divides the clamping plate 705 into 16 equal parts, each corresponding to an adjacent strain gauge 704, so that the 16 strain gauges 704 independently detect the stress value at different positions of the material roll, take the maximum and minimum stress values, calculate the difference between the two, and compare it with the preset upper limit threshold. When the material roll shifts, its center of gravity shifts, causing differences in the stress on different strain gauges 704. If the difference between the maximum and minimum stress values ​​exceeds the upper limit threshold, an offset alarm signal is triggered, which can quickly determine the offset of the material roll.

[0046] This solution also provides a tensioning mechanism for use in the unwinding and rewinding system of the carrier lead frame exposure machine for the aforementioned semiconductor metal flexible circuit board.

[0047] This solution uses a controller to control the operation of the entire take-up and unwinding system. For example, the controller's pins a, b, c, d, e, f, g, h, i, j, and k are electrically connected to the first electric cylinder 103, the second electric cylinder 106, the motor 107, the hydraulic cylinder 201, the first air cylinder 402, the second air cylinder 404, the distance sensor 406, the third air cylinder 502, the linear module 603, the fourth air cylinder 605, and the fifth air cylinder 608, respectively.

[0048] The working principle of this invention is as follows: During operation, the operator puts the material roll into a cabinet 1 for unwinding, and the corresponding hydraulic expansion shaft 2 carries the material roll.

[0049] When the cylinder rod of the hydraulic cylinder 201 extends forward, it pushes the hinge shaft 207 to swing relative to the first support plate 206 in a direction away from the flange 204, so that the first support plate 206 slides along the slide groove 205 towards the outer edge of the flange 204 under the drive of the hinge shaft 207, and reaches the open state to support the material roll.

[0050] Furthermore, a hydraulic expansion shaft 2 unwinds the coiled material to form a flexible metal sheet, which is then passed sequentially around the first roller 301, the second roller 302, the third roller 303, and the fourth roller 304 inside a cabinet 1, through the first pressing mechanism 5, and then fed into the exposure machine.

[0051] When the flexible metal plate leaves the exposure machine, the operator passes the flexible metal plate through the second clamping mechanism 6 and then passes it around the fourth roller 304, the third roller 303, the second roller 302 and the first roller 301 inside another cabinet 1 in sequence, so that the flexible metal plate can be exposed in a flat position after being leveled by the above rollers.

[0052] Meanwhile, the counterweight 306 provides downward force to the third roller 303. If the hydraulic expansion shaft 2 stops rotating, the counterweight 306 drives the third roller 303 to descend, causing the metal flexible plate to retract from the exposure machine and enter the return state. If the hydraulic expansion shaft 2 continues to rotate, the counterweight 306 drives the third roller 303 to apply a downward load to the metal flexible plate, and it can enter the tension state without additional power.

[0053] Finally, when the cylinder rod of the hydraulic cylinder 201 extends in the reverse direction, it pulls the hinge shaft 207 to swing relative to the first support plate 206 in a direction closer to the flange 204. This causes the first support plate 206 to slide along the slide groove 205 towards the inner edge of the flange 204 under the drive of the hinge shaft 207, reaching a closed state to loosen the material roll. When the material roll is unloaded, the workers lift the material roll with a forklift, leaving physical space between the material roll and the hydraulic expansion shaft 2.

[0054] The above description is merely an optional embodiment of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A carrier lead frame exposure machine winding and unwinding system for semiconductor metal flexible circuit boards, comprising a cabinet (1), wherein motors (107) are spaced apart inside the cabinet (1), and two cabinets (1) are configured, with a first clamping mechanism (5) and a second clamping mechanism (6) respectively provided on the two cabinets (1), characterized in that, Also includes: Two hydraulic expansion shafts (2) are used for winding and unwinding inside the two cabinets (1), respectively. The hydraulic expansion shafts (2) include hydraulic cylinders (201) and flanges (204) connected to each other. The flanges (204) are provided with a slide groove (205), a first support plate (206) and a hinge shaft (207) around the central axis of the hydraulic cylinders (201). The hydraulic cylinder (201) provides power to the hinge shaft (207) along the axial direction of the hydraulic expansion shaft (2), so that the first support plate (206) slides along the slide groove (205) under the drive of the hinge shaft (207), and can switch between the open state and the closed state; The first support plate (206) is in a closed state to reduce the frictional resistance of the contact interface during the material roll unloading process.

2. The semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system according to claim 1, characterized in that: It also includes a lifting and diversion mechanism (4); The lifting and diversion mechanism (4) includes a second support plate (401), a first cylinder (402) and a third support plate (403) connected in sequence along the vertical direction of the motor (107) inside the cabinet (1). The third support plate (403) is fixed with a second cylinder (404) and a distance sensor (406) at intervals. The cylinder rod of the second cylinder (404) is detachably mounted with a first pressure plate (405) for clamping the metal flexible plate. In the clamped state, the first cylinder (402) provides lifting force to the third support plate (403) to drive the metal flexible plate to switch between the winding and unwinding station and the tape application station.

3. The semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system according to claim 1, characterized in that: The first support plate (206) is provided with a positioning groove (701) and a clamping plate (705) that can interlock with each other. The positioning groove (701) is fixed with a limiting seat (702) and a strain gauge (704) at intervals. The clamping plate (705) is bonded with a magnetic suction element (703) and an elastic sheath (706) at intervals. When the magnetic suction element (703) and the limiting seat (702) are magnetically attracted, they provide clamping force to the clamping plate (705), so that the elastic sheath (706) cooperates with the positioning groove (701) to clamp the end of the material roll in the winding state. A movable rod (707) is inserted inside the elastic sheath (706). When the movable rod (707) is disengaged from the elastic sheath (706), it is used to release the clamping force at the end of the material roll.

4. The semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system according to claim 1, characterized in that: A coupling (202) and a rotating shaft (203) are sequentially connected between the hydraulic cylinder (201) and the flange (204) along their axial directions. The rotating shaft (203) is connected to the motor (107) via a coupling (202), and the hydraulic cylinder (201) transmits power to the hinge shaft (207) via the rotating shaft (203).

5. The semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system according to claim 1, characterized in that: It also includes a transmission mechanism (3); The conveying mechanism (3) includes a first roller (301), a second roller (302), a third roller (303), a fourth roller (304) and a guide rail (305) spaced apart inside the cabinet (1). A counterweight (306) slidably mounted on the guide rail (305) is rotatably connected to the third roller (303). The counterweight (306) provides downward force to the third roller (303), which is used to make the third roller (303) drive the metal flexible plate to switch between tension and return states.

6. The semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system according to claim 1, characterized in that: The first pressing mechanism (5) includes a first limiting frame (501), a third cylinder (502) and a second pressure plate (503) connected vertically along the cabinet (1). The second pressure plate (503) is used to press the metal flexible plate inside the first limiting frame (501). In the case where the second pressure plate (503) is pressing the metal flexible plate, the hydraulic expansion shaft (2) provides winding force to the material roll to tension the metal flexible plate.

7. The semiconductor metal flexible board carrier lead frame exposure machine unwinding and rewinding system according to claim 1, characterized in that: The second clamping mechanism (6) includes a second limiting frame (601) and a third limiting frame (602) spaced apart on the cabinet (1). The second limiting frame (601) is provided with a fourth cylinder (605) and a first rotating seat (606) spaced apart. The first rotating seat (606) is provided with a first support roller (607) rotatably mounted along the horizontal direction of the second limiting frame (601). The third limiting frame (602) is equipped with a fifth cylinder (608) and a second rotating seat (609) at intervals. The second rotating seat (609) is rotatably equipped with a second support roller (610) along the horizontal direction of the second limiting frame (601).

8. The semiconductor metal flexible board carrier lead frame exposure machine unwinding system according to claim 7, characterized in that: The second pressing mechanism (6) also includes a linear module (603) fixed inside the cabinet (1), and a slide (604) is connected between the linear module (603) and the third limiting frame (602). The linear module (603) is used to provide thrust to the third limiting frame (602), so that the third limiting frame (602) is displaced relative to the second pressing mechanism (6).

9. The semiconductor metal flexible board carrier lead frame exposure machine unwinding system according to claim 4, characterized in that: The first support plate (206) is connected to the rotating shaft (203) through at least two sets of hinge shafts (207), and the two hinge shafts (207) in each set are symmetrically arranged relative to the central axis of the first support plate (206).

10. A tensioning mechanism, applied to the unwinding and rewinding system of a carrier lead frame exposure machine for semiconductor flexible metal boards according to any one of claims 1-9, characterized in that: The tensioning mechanism is used to adapt to the unwinding and rewinding system of the semiconductor metal flexible circuit board carrier lead frame exposure machine.

Images