A three-dimensional guide rail vibration isolator having a multi-layer structure

Abstract

The three-dimensional guide rail vibration isolator with a multilayer structure comprises a horizontal vibration isolation unit, a vertical vibration isolation unit and a multi-degree-of-freedom connecting mechanism; two vertical vibration isolation units are respectively arranged on the two sides of the horizontal vibration isolation unit and are respectively connected with the guide rail through the multi-degree-of-freedom connecting mechanism; and the horizontal vibration isolation unit is connected with the guide rail through a guide rail connecting rod. The number of the horizontal vibration isolation units is four, which are respectively a first horizontal vibration isolation unit, a second horizontal vibration isolation unit, a third horizontal vibration isolation unit and a fourth horizontal vibration isolation unit; the bottom ends of the horizontal vibration isolation units are fixedly connected with a vibration isolation shell; the top end surfaces of the horizontal vibration isolation units are in close contact with the guide rail connecting rod; and the guide rail connecting rod moves along the direction of the top end surface of the horizontal vibration isolation unit. The three-dimensional guide rail vibration isolator with a multilayer structure has superior reliability and applicability and effectively improves the vibration control ability of the system in a wide frequency band range by combining various vibration isolation materials and structures to cope with multi-degree-of-freedom vibration input under complex working conditions.

Description

Technical Field

[0001] This invention relates to the field of vibration isolation technology, specifically a three-dimensional guide rail vibration isolator with a multi-layered structure. Background Technology

[0002] With the increasing demands of modern industry for precision machining, nanoscale measurement, and high-sensitivity detection equipment, vibration control has become a crucial aspect of ensuring system performance. In high-end equipment, low-frequency vibrations caused by the external environment can significantly affect the positioning accuracy and operational stability of the equipment. Traditional vibration isolation systems often employ elastic support structures in a single direction or at a single level. While these structures possess some vibration isolation capability in the mid-to-high frequency range, they often fail to meet the vibration isolation requirements of ultra-precision systems in the low-frequency range. Furthermore, most existing vibration isolation devices are single-degree-of-freedom systems, lacking effective vibration isolation capabilities against multi-dimensional coupled vibrations. To improve the low-frequency vibration isolation performance of the system, some studies have introduced quasi-zero stiffness structures or active control mechanisms; however, such solutions generally suffer from problems such as structural complexity, high cost, and insufficient reliability. Summary of the Invention

[0003] This invention addresses the problems of existing technologies by proposing a three-dimensional guide rail vibration isolator with a multi-layered structure. This invention is achieved through the following technical solution:

[0004] A three-dimensional guide rail vibration isolator with a multi-layer structure includes a horizontal vibration isolation unit, a vertical vibration isolation unit, and a multi-degree-of-freedom connection mechanism; two vertical vibration isolation units are respectively placed on both sides of the horizontal vibration isolation unit and are respectively connected to the guide rail 1 through the multi-degree-of-freedom connection mechanism, and the horizontal vibration isolation unit is connected to the guide rail 1 through the guide rail connecting rod 2.

[0005] Furthermore, there are four horizontal vibration isolation units, namely the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9. Their bottom ends are fixed to the vibration isolation shell 4, and their top surfaces are in close contact with the guide rail connecting rod 2. The guide rail connecting rod 2 moves along the direction of the top surface of the horizontal vibration isolation unit.

[0006] Furthermore, the top surface of the vibration isolation housing 4 is connected to the horizontal vibration isolation top cover 3 by screws, and the bottom surface is connected to the vibration isolation base 5 by threads. The vibration isolation base 5 is connected to other platforms by screws or the like.

[0007] Furthermore, the vertical vibration isolation unit includes a medium-high frequency vibration isolation unit, a disc spring, and a low-frequency vibration isolation unit;

[0008] The high vibration isolation unit includes a left medium-high vibration isolation unit 18 and a right medium-high vibration isolation unit 19;

[0009] The disc spring includes a first disc spring 22 and a second disc spring 23, the top end of which is fixed to the vertical first rigid connecting layer 20 and the bottom end of which is fixed to the third rigid connecting layer 26; it also includes a third disc spring 24 and a fourth disc spring 25, the top end of which is fixed to the second rigid connecting layer 21 and the bottom end of which is fixed to the fourth rigid connecting layer 27.

[0010] The low-frequency vibration isolation unit includes a left low-frequency vibration isolation unit 28 and a right low-frequency vibration isolation unit 29; its top end is fixedly connected to the bottom end of the third rigid connecting layer 26 and the fourth rigid connecting layer 27, and its bottom end is fixedly connected to the top end of the first unit base 30 and the second base connecting unit 31.

[0011] Furthermore, the top of the vertical vibration isolation unit is also provided with a left vertical vibration isolation unit top 16 and a right vertical vibration isolation unit top 17; the tops of the left medium-high vibration isolation unit 18 and the right medium-high vibration isolation unit 19 are fixedly connected to the bottoms of the left vertical vibration isolation unit top 16 and the right vertical vibration isolation unit top 17, and their bottoms are fixedly connected to the tops of the first rigid connection layer 20 and the second rigid connection layer 21.

[0012] Furthermore, the first vertical vibration isolation unit base 30 and the second vertical vibration isolation unit base 31 are connected to the first base connection unit 32 and the second base connection unit 33 by threads, and are connected to other platforms by screws or the like.

[0013] Furthermore, the multi-degree-of-freedom connection mechanism includes a left multi-degree-of-freedom connection mechanism 10 and a right multi-degree-of-freedom connection mechanism 11. The guide rail 1 and the guide rail connecting rod 2 are connected by screws, and are also connected to the left multi-degree-of-freedom connection mechanism 10 and the right multi-degree-of-freedom connection mechanism 13 by screws.

[0014] Furthermore, the left multi-degree-of-freedom connection mechanism 10 and the right multi-degree-of-freedom connection mechanism 13 are sleeved with the left multi-degree-of-freedom connection mechanism 11 and the right multi-degree-of-freedom connection mechanism 14, and the left multi-degree-of-freedom connection mechanism 11 and the right multi-degree-of-freedom connection mechanism 14 are sleeved with the left multi-degree-of-freedom connection mechanism 12 and the right multi-degree-of-freedom connection mechanism 15; the bottom of the left multi-degree-of-freedom connection mechanism 12 and the right multi-degree-of-freedom connection mechanism 15 are connected to the top of the left vertical vibration isolation unit 16 and the top of the right vertical vibration isolation unit 17 by screws.

[0015] Furthermore, the first horizontal vibration isolation unit 6 includes a top 601, a soft mid-to-high frequency vibration isolation layer 602, a first rigid connection layer 603, a second rigid connection layer 605, a linear vibration isolation layer 604, a high-damping low-frequency vibration isolation layer 606, and a bottom 607.

[0016] Furthermore, the top 601 is in close contact with the guide rail connecting rod 2, the soft mid-to-high frequency vibration isolation layer 602 is located below the top 601, the rigid connecting layer 603 is located below the soft mid-to-high frequency vibration isolation layer 602, the linear vibration isolation layer 604 is located below the rigid connecting layer 603, the rigid connecting layer 605 is located below the linear vibration isolation layer 604, the high-damping low-frequency vibration isolation layer 606 is located below the rigid connecting layer 605, and the bottom 607 is located below the high-damping low-frequency vibration isolation layer 606 and is fixedly connected to the horizontal vibration isolation shell 4.

[0017] Beneficial effects

[0018] The three-dimensional guide rail vibration isolator with a multi-layered structure provided by this invention effectively improves the vibration control capability of the system over a wide frequency range by combining various vibration isolation materials and structures. Employing a three-layer composite vibration isolation unit, combining a soft mid-to-high frequency vibration isolation layer and a high-damping low-frequency vibration isolation layer, the equivalent stiffness of the system in the low-frequency range can be effectively reduced, achieving effective control of vibration components in different frequency bands. Simultaneously, the sliding fit between the guide rail connecting rod and the top surface of the vibration isolation unit ensures low-friction guiding characteristics for horizontal movement. The multi-degree-of-freedom connection mechanism adopts a three-stage socket design, allowing adjacent layers to move independently in mutually perpendicular directions, thereby achieving coordination of multi-degree-of-freedom displacements, avoiding stress concentration within the structure, and improving the dynamic stability and reliability of the system. While maintaining a certain load-bearing capacity, the vibration isolator can cope with multi-dimensional vibration input under complex working conditions, exhibiting superior reliability and applicability. Attached Figure Description

[0019] Figure 1 This is a structural diagram of the three-dimensional guide rail vibration isolator of the present invention;

[0020] Figure 2 This is a structural diagram of the vertical vibration isolation unit of the three-dimensional guide rail vibration isolator of the present invention;

[0021] Figure 3 This is a cross-sectional view of the vertical vibration isolation unit of the three-dimensional guide rail vibration isolator of the present invention;

[0022] Figure 4 This is a structural diagram of the horizontal vibration isolation unit of the three-dimensional guide rail vibration isolator of the present invention;

[0023] Figure 5 This is an exploded view of the horizontal vibration isolation unit of the three-dimensional guide rail vibration isolator of the present invention;

[0024] Figure 6 This is a schematic diagram of the multi-degree-of-freedom connection mechanism of the three-dimensional guide rail vibration isolator of the present invention;

[0025] Figure 7 This is an exploded view of the multi-degree-of-freedom connection mechanism of the three-dimensional guide rail vibration isolator of the present invention;

[0026] Figure 8This is an exploded view of the multi-layer vibration isolation unit of the three-dimensional guide rail vibration isolator of the present invention;

[0027] Figure 9 This is a schematic diagram of the multi-layer vibration isolation unit structure of the three-dimensional guide rail vibration isolator of the present invention.

[0028] The component numbers are as follows:

[0029] 1. Guide rail; 2. Guide rail connecting rod; 3. Top cover; 4. Vibration isolation shell; 5. Vibration isolation base; 6. First horizontal vibration isolation unit; 7. Second horizontal vibration isolation unit; 8. Third horizontal vibration isolation unit; 9. Fourth horizontal vibration isolation unit; 10. First left-side multi-degree-of-freedom connection mechanism; 11. Second left-side multi-degree-of-freedom connection mechanism; 12. Third left-side multi-degree-of-freedom connection mechanism; 13. First right-side multi-degree-of-freedom connection mechanism; 14. Second right-side multi-degree-of-freedom connection mechanism; 15. Top of left-side vertical vibration isolation unit; 16. Top of right-side vertical vibration isolation unit; 17. Left-side medium-high vibration isolation unit; 18. Right-side medium-high vibration isolation unit; 19. First rigid connection layer. 20. Second rigid connection layer; 21. First disc spring; 22. Second disc spring; 23. Third disc spring; 24. Fourth disc spring; 25. Third rigid connection layer; 26. Fourth rigid connection layer; 27. Left vertical vibration isolation unit low-frequency vibration isolation unit; 28. Right vertical vibration isolation unit low-frequency vibration isolation unit; 29. ​​First unit base; 30. Second base connection unit; 31. First base connection unit; 32. Second base connection unit; 33. Top; 601. Soft mid-to-high frequency vibration isolation layer; 602. First rigid connection layer; 603. Linear vibration isolation layer; 604. Second rigid connection layer; 605. High-damping low-frequency vibration isolation layer; 606. Bottom; 607. Detailed Implementation

[0030] The following is in conjunction with the appendix Figures 1 to 9 The three-dimensional guide rail vibration isolator of the present invention will be described in further detail.

[0031] like Figure 1 As shown, a three-dimensional guide rail vibration isolator with a multi-layer structure according to the present invention includes a horizontal vibration isolation unit, a vertical vibration isolation unit, and a multi-degree-of-freedom connection mechanism; two vertical vibration isolation units are respectively placed on both sides of the horizontal vibration isolation unit and connected to the guide rail 1 through the multi-degree-of-freedom connection mechanism; the horizontal vibration isolation unit is connected to the guide rail 1 through the guide rail connecting rod 2. The guide rail 1 and the guide rail connecting rod 2 are connected by screws, and are also connected to the left multi-degree-of-freedom connection mechanism 10 and the right multi-degree-of-freedom connection mechanism 13 by screws.

[0032] like Figure 2 , Figure 3As shown, the tops of the left-side medium-high vibration isolation unit 18 and the right-side medium-high vibration isolation unit 19 are fixedly connected to the bottoms of the left-side vertical vibration isolation unit top 16 and the right-side vertical vibration isolation unit top 17, respectively, and their bottoms are fixedly connected to the tops of the first rigid connecting layer 20 and the second rigid connecting layer 21. The tops of the left-side vertical vibration isolation unit low-frequency vibration isolation unit 28 and the right-side vertical vibration isolation unit low-frequency vibration isolation unit 29 are fixedly connected to the bottoms of the third rigid connecting layer 26 and the fourth rigid connecting layer 27, respectively, and their bottoms are fixed to the tops of the first unit base 30 and the second base connecting unit 31. End fixed connection; the first disc spring 22 and the second disc spring 23 are fixed at their top ends to the rigid connection layer 20 of the vertical vibration isolation unit and at their bottom ends to the rigid connection layer 26 of the vertical vibration isolation unit; the third disc spring 24 and the fourth disc spring 25 are fixed at their top ends to the second rigid connection layer 21 and at their bottom ends to the fourth rigid connection layer 27; the first base connection unit 32 and the second base connection unit 33 are connected to the first unit base 30 and the second base connection unit 31 by threads, and are connected to other platforms by screws, etc.

[0033] like Figure 4 , Figure 5 As shown, the vibration isolation housing 4 is a hollow cuboid structure, with positioning holes for fixing the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9. The vibration isolation top cover 3 is connected to the vibration isolation housing 4 by screws, and the vibration isolation base 5 is connected to the vibration isolation housing 4 by screws and fixed to the external foundation platform by anchor bolts. The bottom ends of the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9 are fixed to the vibration isolation housing 4, and their top surfaces are in close contact with the guide rail connecting rod 2. The guide rail connecting rod 2 can move along the direction of the top surface of the horizontal vibration isolation unit. The upper top surface of the vibration isolation housing 4 is connected to the vibration isolation top cover 3 by screws, and its lower bottom surface is connected to the vibration isolation base 5 by threads. The vibration isolation base 5 can be connected to other platforms by screws, etc.

[0034] The top of the left vertical vibration isolation unit 16 and the top of the right vertical vibration isolation unit 17 have through holes. The top of the first left multi-degree-of-freedom connecting mechanism 10 and the first right multi-degree-of-freedom connecting mechanism 13 have threaded holes. The bottom of the left multi-degree-of-freedom connecting mechanism 12 and the right multi-degree-of-freedom connecting mechanism 15 has threaded holes.

[0035] like Figure 6 , Figure 7As shown, the first left-side multi-degree-of-freedom connecting mechanism 10 and the first right-side multi-degree-of-freedom connecting mechanism 13 are connected to the second left-side multi-degree-of-freedom connecting mechanism 11 and the right-side multi-degree-of-freedom connecting mechanism 14. The second left-side multi-degree-of-freedom connecting mechanism 11 and the second right-side multi-degree-of-freedom connecting mechanism 14 are connected to the third left-side multi-degree-of-freedom connecting mechanism 12 and the third right-side multi-degree-of-freedom connecting mechanism 15. The first left-side multi-degree-of-freedom connecting mechanism 10 and the first right-side multi-degree-of-freedom connecting mechanism 13 can perform single-degree-of-freedom motion with the second left-side multi-degree-of-freedom connecting mechanism 11 and the second right-side multi-degree-of-freedom connecting mechanism 14. The second left-side multi-degree-of-freedom connecting mechanism 11 and the second right-side multi-degree-of-freedom connecting mechanism 14 can perform single-degree-of-freedom motion perpendicular to the former. The bottom of the third left-side multi-degree-of-freedom connecting mechanism 12 and the third right-side multi-degree-of-freedom connecting mechanism 15 is connected to the top of the left vertical vibration isolation unit 16 and the top of the right vertical vibration isolation unit 17 by screws.

[0036] The three-level nested structure of the multi-degree-of-freedom connection mechanism allows adjacent levels to move independently in mutually perpendicular directions. Specifically, the left multi-degree-of-freedom connection mechanism 10 and the second left multi-degree-of-freedom connection mechanism 11 can perform single-degree-of-freedom movement in the X direction, and the second left multi-degree-of-freedom connection mechanism 11 and the third right multi-degree-of-freedom connection mechanism 15 can perform single-degree-of-freedom movement in the Y direction. The right multi-degree-of-freedom connection mechanism 13 and the second right multi-degree-of-freedom connection mechanism 14 can perform single-degree-of-freedom movement in the X direction, and the second right multi-degree-of-freedom connection mechanism 14 and the third right multi-degree-of-freedom connection mechanism 15 can perform single-degree-of-freedom movement in the Y direction.

[0037] The internal structure of the three-layer vibration isolation unit in the horizontal direction is as follows: Figure 8 As shown, its principle is as follows Figure 9 As shown. The first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9 include a top 601, a flexible mid-to-high frequency vibration isolation layer 602, a first rigid connection layer 603, a second rigid connection layer 605, a linear vibration isolation layer 604, a high-damping low-frequency vibration isolation layer 606, and a bottom 607. The top 601 is in close contact with the guide rail connecting rod 2. The flexible mid-to-high frequency vibration isolation layer 602 is located below the top 601. The rigid connection layer 603 is located below the flexible mid-to-high frequency vibration isolation layer 602. The linear vibration isolation layer 604 is located below the rigid connection layer 603. The rigid connection layer 605 is located below the linear vibration isolation layer 604. The high-damping low-frequency vibration isolation layer 606 is located below the rigid connection layer 605. The bottom 607 is located below the high-damping low-frequency vibration isolation layer 606 and is fixedly connected to the horizontal vibration isolation shell 4.

[0038] The guide rail connecting rod 2 does not contact the vibration isolation base 5, but makes close contact with the surfaces of the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9, although they are not connected, allowing for relative sliding. During installation, a preload is applied to the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9 to achieve horizontal positioning of the guide rail connecting rod 2. The influence of frictional damping on the vibration isolation effect is reduced by using lubricating oil or surface treatment on the upper surfaces of the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9 and the side of the guide rail connecting rod 2.

[0039] External vibrations are transmitted through the first unit base 30, the second base connecting unit 31, and the horizontal vibration isolation base 5, which are mounted on an external foundation platform. In the multi-layer vibration isolation, the mid-to-high frequency vibration isolation layer uses soft materials such as PU foam, while the low-frequency vibration isolation layer uses materials such as high-damping butyl rubber and high-damping polyurethane. When the vibration isolator is working, external vibrations are transmitted through the first unit base 30, the second base connecting unit 31, and the horizontal vibration isolation base 5. Vertical vibrations are transmitted through the left vertical vibration isolation unit low-frequency vibration isolation unit 28, the right vertical vibration isolation unit low-frequency vibration isolation unit 29, the first disc spring 22, the second disc spring 23, the third disc spring 24, the fourth disc spring 25, the left mid-to-high frequency vibration isolation unit 18, the right mid-to-high frequency vibration isolation unit 19, the top of the left vertical vibration isolation unit 16, the top of the right vertical vibration isolation unit 17, the first left multi-degree-of-freedom connection mechanism 10, the second left multi-degree-of-freedom connection mechanism 11, and the third left... The side multi-degree-of-freedom connection mechanism 12, the first right-side multi-degree-of-freedom connection mechanism 13, the second right-side multi-degree-of-freedom connection mechanism 14, and the third right-side multi-degree-of-freedom connection mechanism 15 transmit the vibration to the guide rail link 2. At the same time, the horizontal vibration is transmitted through the horizontal vibration isolation base 5 and the horizontal vibration isolation shell 4 to the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9. After being attenuated by each layer of vibration isolation structure, it acts on the guide rail link 2. With the support of the top surface of the three layers of horizontal vibration isolation units, the guide rail link 2 can move freely in the horizontal direction, thereby achieving effective vibration isolation of the horizontal vibration.

[0040] Principle Explanation

[0041] The three-dimensional guide rail vibration isolator of the present invention, containing a multi-layer structure, works by effectively suppressing three-dimensional vibration based on a multi-layer structure design and a multi-degree-of-freedom coordination mechanism. In the horizontal direction, vibration energy is transmitted through the horizontal isolation base 5; in the vertical direction, external vibration is transmitted through the first base connection unit 32 and the second base connection unit 33. Because the multi-layer isolation unit contains a soft mid-to-high frequency isolation layer and a high-damping low-frequency isolation layer, vibrations of different frequency components are selectively absorbed and dissipated. The linear isolation layer provides wide-spectrum vibration isolation while ensuring structural stability.

[0042] The three-stage nested structure of the multi-degree-of-freedom connecting mechanism allows adjacent layers to move independently in mutually perpendicular directions. Specifically, the first left-side multi-degree-of-freedom connecting mechanism 10 and the second left-side multi-degree-of-freedom connecting mechanism 11 can perform single-degree-of-freedom relative motion in the X direction, and multi-degree-of-freedom connecting mechanisms 11 and 12 can perform single-degree-of-freedom relative motion in the Y direction. The right-side structure has the same motion characteristics, thereby achieving decoupling of complex input vibrations and preventing response amplification caused by directional coupling. The guide rail 1, connected to the relatively sliding multi-degree-of-freedom connecting mechanism, allows for smooth transmission of horizontal displacement, while surface treatment and lubrication prevent additional friction from introducing nonlinear disturbances.

[0043] The layered structure of the three-layer vibration isolation unit creates a gradient stiffness distribution, enabling the system to have targeted vibration isolation capabilities in different frequency bands. The multi-degree-of-freedom connection mechanism ensures the coordination of motion in all directions and structural integrity. The entire system works in parallel through horizontal and vertical dual channels, combining material damping, structural stiffness gradient, and geometric nonlinear effects to effectively suppress multi-degree-of-freedom vibrations.

[0044] Example

[0045] The multi-degree-of-freedom connection mechanism of this embodiment includes a first left-side multi-degree-of-freedom connection mechanism 10, a second left-side multi-degree-of-freedom connection mechanism 11, a third left-side multi-degree-of-freedom connection mechanism 12, a first right-side multi-degree-of-freedom connection mechanism 13, a second right-side multi-degree-of-freedom connection mechanism 14, and a third right-side multi-degree-of-freedom connection mechanism 15. The top of the vertical vibration isolation unit includes a left-side vertical vibration isolation unit top 16 and a right-side vertical vibration isolation unit top 17. The high-frequency vibration isolation unit of the vertical vibration isolation unit includes a left-side high-frequency vibration isolation unit 18 and a right-side high-frequency vibration isolation unit 19. The low-frequency vibration isolation unit of the vertical vibration isolation unit includes a left-side low-frequency vibration isolation unit 28 and a right-side low-frequency vibration isolation unit 29.

[0046] The guide rail 1 and the guide rail connecting rod 2 are connected by screws. The guide rail 1 is also connected to the left multi-degree-of-freedom connecting mechanism 10 and the right multi-degree-of-freedom connecting mechanism 13 by screws. The left multi-degree-of-freedom connecting mechanism 10 and the right multi-degree-of-freedom connecting mechanism 13 are respectively fitted with the left multi-degree-of-freedom connecting mechanism 11 and the right multi-degree-of-freedom connecting mechanism 14. The left multi-degree-of-freedom connecting mechanism 11 and the right multi-degree-of-freedom connecting mechanism 14 are respectively fitted with the left multi-degree-of-freedom connecting mechanism 12 and the right multi-degree-of-freedom connecting mechanism 15. The multi-degree-of-freedom connecting mechanisms 10 and 13 can achieve relative movement in a single direction with the multi-degree-of-freedom connecting mechanisms 11 and 14, and relative movement in a single direction perpendicular to the aforementioned directions with the multi-degree-of-freedom connecting mechanisms 12 and 15. The lower ends of the left multi-degree-of-freedom connecting mechanism 12 and the right multi-degree-of-freedom connecting mechanism 15 are connected to the upper ends of the top 16 of the left vertical vibration isolation unit and the top 17 of the right vertical vibration isolation unit by screws.

[0047] The upper ends of the high-frequency isolation unit 18 in the left vertical vibration isolation unit and the high-frequency isolation unit 19 in the right vertical vibration isolation unit are fixedly connected to the lower ends of the top 16 of the left vertical vibration isolation unit and the top 17 of the right vertical vibration isolation unit, respectively. Their lower ends are fixedly connected to the upper ends of the first rigid connecting layer 20 and the second rigid connecting layer 21. The upper ends of the low-frequency isolation unit 28 in the left vertical vibration isolation unit and the low-frequency isolation unit 29 in the right vertical vibration isolation unit are fixedly connected to the lower ends of the third rigid connecting layer 26 and the fourth rigid connecting layer 27, respectively. Their lower ends are fixedly connected to the upper ends of the first unit base 30 and the second base connecting unit 31. The upper ends of the first disc spring 22 and the second disc spring 23 are fixedly connected to the rigid connecting layer 20 of the vertical vibration isolation unit, and the lower ends are fixedly connected to the rigid connecting layer 26 of the vertical vibration isolation unit. The upper ends of the disc springs 24 and 25 are fixedly connected to the rigid connecting layer 21 of the vertical vibration isolation unit, and the lower ends are fixedly connected to the rigid connecting layer 27 of the vertical vibration isolation unit. The first base connecting unit 32 and the second base connecting unit 33 are connected to the first unit base 30 and the second base connecting unit 31 by threads, and can be connected to the external platform by screws or other connection methods.

[0048] The lower ends of the first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9 are fixedly connected to the horizontal vibration isolation shell 4, and their upper surfaces are in close contact with the guide rail connecting rod 2, allowing the guide rail connecting rod 2 to move along the direction of the upper surface of the three horizontal vibration isolation units. The upper surface of the vibration isolation shell 4 is connected to the vibration isolation top cover 3 by screws, and its lower surface is connected to the vibration isolation base 5 by threads. The vibration isolation base 5 can be connected to the external platform by screws or other connection methods. The first horizontal vibration isolation unit 6, the second horizontal vibration isolation unit 7, the third horizontal vibration isolation unit 8, and the fourth horizontal vibration isolation unit 9 are composed of a top 601, a soft mid-to-high frequency vibration isolation layer 602, a rigid connection layer 603, a linear vibration isolation layer 604, a second rigid connection layer 605, a high-damping low-frequency vibration isolation layer 606, and a bottom 607.

Claims

1. A three-dimensional guide rail vibration isolator with a multi-layer structure, characterized in that, It includes a horizontal vibration isolation unit, a vertical vibration isolation unit and a multi-degree-of-freedom connection mechanism; the two vertical vibration isolation units are respectively placed on both sides of the horizontal vibration isolation unit and are respectively connected to the guide rail (1) through the multi-degree-of-freedom connection mechanism, and the horizontal vibration isolation unit is connected to the guide rail (1) through the guide rail connecting rod (2).

2. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 1, characterized in that, There are four horizontal vibration isolation units, namely the first horizontal vibration isolation unit (6), the second horizontal vibration isolation unit (7), the third horizontal vibration isolation unit (8), and the fourth horizontal vibration isolation unit (9). Their bottom ends are fixed to the vibration isolation shell (4), and their top surfaces are in close contact with the guide rail connecting rod (2). The guide rail connecting rod (2) moves along the direction of the top surface of the horizontal vibration isolation unit.

3. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 2, characterized in that, The top surface of the vibration isolation shell (4) is connected to the horizontal vibration isolation top cover (3) by screws, and the bottom surface is connected to the vibration isolation base (5) by threads. The vibration isolation base (5) is connected to other platforms by screws, etc.

4. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 1, characterized in that, The vertical vibration isolation unit includes a medium-high frequency vibration isolation unit, a disc spring, and a low-frequency vibration isolation unit; The high vibration isolation unit includes a left medium-high vibration isolation unit (18) and a right medium-high vibration isolation unit (19); The disc spring includes a first disc spring (22) and a second disc spring (23), the top end of which is fixed to a vertical first rigid connecting layer (20) and the bottom end of which is fixed to a third rigid connecting layer (26); it also includes a third disc spring (24) and a fourth disc spring (25), the top end of which is fixed to a second rigid connecting layer (21) and the bottom end of which is fixed to a fourth rigid connecting layer (27); The low-frequency vibration isolation unit includes a left low-frequency vibration isolation unit (28) and a right low-frequency vibration isolation unit (29); its top end is fixedly connected to the bottom end of the third rigid connection layer (26) and the fourth rigid connection layer (27), and its bottom end is fixedly connected to the top end of the first unit base (30) and the second base connection unit (31).

5. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 4, characterized in that, The top of the vertical vibration isolation unit is also provided with a left vertical vibration isolation unit top (16) and a right vertical vibration isolation unit top (17); the top of the left medium-high vibration isolation unit (18) and the right medium-high vibration isolation unit (19) are fixedly connected to the bottom of the left vertical vibration isolation unit top (16) and the right vertical vibration isolation unit top (17), and their bottoms are fixedly connected to the top of the first rigid connection layer (20) and the second rigid connection layer (21).

6. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 4, characterized in that, The first vertical vibration isolation unit base (30) and the second vertical vibration isolation unit base (31) are connected to the first base connection unit (32) and the second base connection unit (33) by threads, and are connected to other platforms by screws or the like.

7. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 1, characterized in that, The multi-degree-of-freedom connection mechanism includes a left multi-degree-of-freedom connection mechanism (10) and a right multi-degree-of-freedom connection mechanism (11). The guide rail (1) and the guide rail connecting rod (2) are connected by screws, and are connected to the left multi-degree-of-freedom connection mechanism (10) and the right multi-degree-of-freedom connection mechanism (13) by screws.

8. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 6, characterized in that, The left multi-degree-of-freedom connection mechanism (10) and the right multi-degree-of-freedom connection mechanism (13) are connected to the left multi-degree-of-freedom connection mechanism (11) and the right multi-degree-of-freedom connection mechanism (14), and the left multi-degree-of-freedom connection mechanism (11) and the right multi-degree-of-freedom connection mechanism (14) are connected to the left multi-degree-of-freedom connection mechanism (12) and the right multi-degree-of-freedom connection mechanism (15). The bottom of the left multi-degree-of-freedom connection mechanism (12) and the right multi-degree-of-freedom connection mechanism (15) are connected to the top of the left vertical vibration isolation unit (16) and the top of the right vertical vibration isolation unit (17) by screws.

9. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 1, characterized in that, The first horizontal vibration isolation unit (6) includes a top (601), a soft mid-to-high frequency vibration isolation layer (602), a first rigid connection layer (603), a second rigid connection layer (605), a linear vibration isolation layer (604), a high-damping low-frequency vibration isolation layer (606), and a bottom (607).

10. The three-dimensional guide rail vibration isolator with a multi-layer structure according to claim 9, characterized in that, The top (601) is in close contact with the guide rail connecting rod (2). The soft mid-to-high frequency vibration isolation layer (602) is located below the top (601). The rigid connection layer (603) is located below the soft mid-to-high frequency vibration isolation layer (602). The linear vibration isolation layer (604) is located below the rigid connection layer (603). The rigid connection layer (605) is located below the linear vibration isolation layer (604). The high-damping low-frequency vibration isolation layer (606) is located below the rigid connection layer (605). The bottom (607) is located below the high-damping low-frequency vibration isolation layer (606) and is fixedly connected to the horizontal vibration isolation shell (4).

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