A device for testing the compressive strength of an LED epitaxial wafer graphene substrate
The LED epitaxial wafer graphene substrate compressive strength testing device, which integrates "downward pressure application" and "end-to-end stretching" dual detection modes, solves the problem of insufficient testing accuracy and safety under single detection mode, and achieves more accurate and safer mechanical performance evaluation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHANDONG QIANYUAN SEMICON TECH CO LTD
- Filing Date
- 2026-05-12
- Publication Date
- 2026-07-14
AI Technical Summary
Existing testing devices for the compressive strength of graphene substrates for LED epitaxial wafers only have a single vertical pressure test, which cannot comprehensively detect the true mechanical properties of the substrate under different stress states. Furthermore, the fragments generated by substrate breakage during the test lack effective protection, posing a safety hazard.
A testing device integrating "downward pressure" and "two-end tension" dual detection modes was designed. The mode switching is achieved by rotating a square plate 180° through a rotating shaft. The first and second load sensors monitor the compressive and tensile forces. The baffle and top box form a closed testing space to prevent fragments from splashing, and an automated fragment recycling system avoids manual contact.
It significantly improves the accuracy and safety of testing, ensures the accuracy and reliability of test results, avoids the risk of injury to operators, and enables a comprehensive evaluation of compressive and tensile strength data.
Smart Images
Figure CN122385331A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of graphene substrate testing technology, specifically a device for testing the compressive strength of LED epitaxial wafer graphene substrates. Background Technology
[0002] LED epitaxial wafers are the most core and critical basic material for manufacturing light-emitting diode chips. They refer to wafers formed by growing multiple thin layers of different semiconductor crystals layer by layer on a specific substrate, such as sapphire, silicon carbide, or silicon, according to specific structural requirements through precise epitaxial growth technology.
[0003] LED epitaxial wafers are typically grown at temperatures above approximately 1000°C using metal-organic chemical vapor deposition equipment. The coefficients of thermal expansion of graphene, the underlying sapphire substrate, and the upper gallium nitride epitaxial layer are all different. This mismatch generates enormous thermal stress, and the compressive strength test is to ensure that the graphene layer can withstand this stress without cracking or peeling. This requires the use of a compressive strength testing device.
[0004] Most existing testing devices for the compressive strength of LED epitaxial wafer graphene substrates only have a single testing mode, usually only performing vertical pressure tests. Single-mode testing cannot comprehensively detect and evaluate the true mechanical properties of the substrate under different stress states, leading to deviations in test results. In addition, there is no effective protection against the flying fragments generated by substrate breakage during the test, which can easily injure operators and pollute the environment, posing safety hazards. Summary of the Invention
[0005] The purpose of this invention is to provide a device for testing the compressive strength of graphene substrates for LED epitaxial wafers, so as to solve the problems mentioned in the background art.
[0006] The objective of this invention can be achieved through the following technical solutions: A device for testing the compressive strength of graphene substrates for LED epitaxial wafers includes a placement frame fixedly connected to the upper side of a base plate, a top box fixedly connected to the upper side of the placement frame, a rotating shaft connected to the inside of the top box via a motor, a square plate fixedly connected to the rotating shaft, a first electric push rod fixedly connected to both ends of the square plate, a first driving device fixedly connected to the output end of the first electric push rod, and two pressure plates symmetrically arranged above the first driving device for tensile testing at both ends. A baffle is attached to one side of the top box, and a fixed base is fixedly connected to the output end of another first electric push rod. A first load sensor is fixedly connected to the top of the fixed base. Two placement seats are symmetrically arranged above the placement frame. The placement seats are used to clamp the LED epitaxial wafer graphene substrate. Two first guide rods are fixedly connected to the outer side of each of the two placement seats. A connecting plate is fixedly connected to one side of each of the two first guide rods. A second load sensor is installed on the inner side of each of the two connecting plates.
[0007] Preferably, the first driving device is used to drive the two pressure plates to move towards each other or relative to each other. The fixed base has a sliding groove inside, and a sliding plate is slidably connected inside the sliding groove. A pressure block for compressive strength testing is fixedly connected to the lower side of the sliding plate. A No. 1 spring is arrayed between the fixed base and the sliding plate. The top box is fixedly connected to the upper side of the top box. A transparent glass window is fixedly connected inside the baffle. A lifting plate is fixedly connected to one side of the baffle. The second driving device is used to drive the lifting plate to move upward or downward. The upper side of the placement rack has a first square groove. The top of the placement rack has a second square groove. The area of the second square groove is larger than that of the first square groove. A flip plate is rotatably connected inside the second square groove.
[0008] Preferably, the flip plate has two symmetrically arranged sliding rods fixedly connected inside, and two symmetrically arranged slide brackets are slidably connected to the two sliding rods. Two No. 2 springs are fixedly connected between the two slide brackets. A side plate is fixedly connected to the outer side of each of the two slide brackets. Two first guide rods are slidably placed on the side plates. Two No. 3 springs are fixedly connected between the connecting plate and the side plates. A rubber pad is fixedly connected to the bottom of each of the two placement seats.
[0009] Preferably, both ends of the fixing base are fixedly connected to horizontal plates, and the interior of each horizontal plate is fixedly connected to a second guide rod. Two L-shaped sliders are symmetrically arranged and slidably connected to each of the two second guide rods. Bolts for positioning the L-shaped sliders are threadedly connected to the upper side of each of the two L-shaped sliders. A third guide rod is slidably connected to one side of each of the two L-shaped sliders. A positioning block for clamping the graphene substrate of the LED epitaxial wafer is fixedly connected to one side of each of the two third guide rods. The other side of the third guide rod passes through the L-shaped slider and extends to the other side of the L-shaped slider. A No. 4 spring is fixedly connected between each of the two L-shaped sliders and the third guide rod. Both ends of the first driving device are fixedly connected to two symmetrically arranged L-shaped blocks by screws.
[0010] Preferably, two L-shaped support plates are fixedly connected to each of the two placement seats in a symmetrical arrangement. A fourth guide rod is slidably connected to one side of each of the four L-shaped support plates. A round seat is fixedly connected to one side of each of the four fourth guide rods. The other side of the fourth guide rod passes through the L-shaped support plate and extends to the other side of the L-shaped support plate. A No. 5 spring is fixedly connected between each of the four round seats and the L-shaped support plates. The fourth guide rod and the L-shaped block are in one-to-one correspondence in position.
[0011] Preferably, a vertical plate is fixedly connected to the upper side of the base plate, a second electric push rod is fixedly connected to one side of the vertical plate, a first recess is fixedly connected to the output end of the second electric push rod, a rotating plate is rotatably connected inside the first recess, a second recess is fixedly connected to the lower side of the flip plate, and the other end of the rotating plate is rotatably connected inside the second recess.
[0012] Preferably, an inclined base box is fixedly connected to the upper side of the base plate, a third driving device is fixedly connected to one side of the inclined base box, two displacement plates are provided at both ends inside the inclined base box, and a mounting plate is fixedly connected to one side of each of the two displacement plates. The third driving device is used to drive the mounting plates to move towards each other or relative to each other.
[0013] Preferably, a rotating plate is rotatably connected inside the inclined surface of the inclined base box, and a mounting bracket is fixedly connected to the lower side of the inclined base box. A No. 6 spring is arrayed between the mounting bracket and the rotating plate.
[0014] Preferably, a collection box is placed on the upper side of the base plate, and a movable plate is rotatably connected inside the tilted base box, with the collection box located below the movable plate.
[0015] Preferably, both the movable plate and the underside of the tilted base box are fixedly connected to a fixing plate, and a locking plate is snapped onto both fixing plates.
[0016] The beneficial effects of this invention are: 1. This invention integrates two detection modes: "downward pressure" and "two-end tension." The mode switching is achieved by rotating a square plate 180° via a rotating shaft. In the first round of vertical pressure application, the pressure block presses down, causing a spring-loaded sliding plate to squeeze the first load sensor for force monitoring. In the second round of tension testing, the two pressure plates move relative to each other, applying tension to both ends of the substrate. Two second load sensors simultaneously collect tensile force data. This dual-mode collaborative detection allows for comprehensive testing of the mechanical properties of the LED epitaxial graphene substrate from both compressive and tensile perspectives. Compared to a single detection mode, this significantly improves the accuracy and reliability of the test. Furthermore, the sealed cooperation between the baffle and the top box forms a closed testing space. When the substrate breaks under pressure or tension, it effectively blocks flying micro-fragments, preventing injury to operators and improving the safety of the testing process.
[0017] 2. In this invention, after the "downward pressure" or "end-stretching" test is completed, the first electric push rod resets to release the substrate positioning. Then, the second electric push rod drives the rotating plate to rotate, causing the flip plate to tilt downwards and enter the tilted bottom box. The fragments automatically slide down and are collected due to gravity. Subsequently, the third driving device drives the two displacement plates to move relative to each other, further pushing the fragments onto the movable plate. When the second electric push rod resets, the sixth spring pushes the movable plate to rotate upwards, concentrating the fragments at the bottom of the tilted bottom box, achieving automated centralized recycling. This design eliminates the need for manual contact with the fragments, avoiding the risk of operators being scratched, and also prevents residual fragments from affecting the accuracy of subsequent test results. The entire cleaning process is time-saving, labor-saving, and improves operational safety.
[0018] 3. In this invention, the first electric push rod drives the fixed seat to move downward. The two positioning blocks are elastically clamped above the LED epitaxial wafer graphene substrate by the elastic force of the fourth spring, ensuring stability during the pressure test. In the "two-end stretching" mode, another first electric push rod drives the first driving device to move downward. The L-shaped block squeezes the fourth guide rod to move the round seat downward and position it. Together with the placement seat, it locks the left and right ends of the substrate. This elastic positioning structure can provide stable clamping force and avoid rigid overpressure damage to the substrate, effectively ensuring that the sample does not shift during the test, thereby improving the data accuracy of the dual-mode pressure and stretching tests. Attached Figure Description
[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0020] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the first driving device and the fixed base structure of the present invention; Figure 3 This is a schematic diagram of the installation of the slide and slide plate of the present invention; Figure 4 This is a schematic diagram of the installation of the baffle and lifting plate of the present invention; Figure 5 This is a schematic diagram of the structure of the first guide rod and the placement seat of the present invention; Figure 6 This is a schematic diagram of the installation of the placement base and rubber pad of the present invention; Figure 7 This is a schematic diagram of the installation of the first recess, the rotating plate, and the second recess of the present invention; Figure 8 This is a schematic diagram of the installation of the tilted base box and the rotating plate of the present invention; Figure 9 This is a schematic diagram of the installation of the tilted base box and the movable plate of the present invention; Figure 10 This is an enlarged view of point A in the present invention 9.
[0021] The attached figures are labeled as follows: 1. Base plate; 2. Placement rack; 3. Top box; 4. Rotating shaft; 5. Square plate; 6. First electric push rod; 7. First drive device; 8. Pressure plate; 9. Fixed seat; 10. First load sensor; 11. Slide groove; 12. Slide plate; 13. Spring No. 1; 14. Pressure block; 15. Second drive device; 16. Baffle; 17. Lifting plate; 18. First square groove; 19. Second square groove; 20. Flip plate; 21. Slide rod; 22. Slide frame; 23. Spring No. 2; 24. Side plate; 25. First guide rod; 26. Placement seat; 27. Connecting plate; 28. Spring No. 3; 29. Second load sensor; 30. Rubber pad; 31. Horizontal plate; 32. Second guide rod; 33. L-shaped slider; 34. Bolt; 35. Third guide rod; 36. Positioning block; 37. No. 4 spring; 38. L-shaped support plate; 39. Fourth guide rod; 40. Round seat; 41. No. 5 spring; 42. Vertical plate; 43. Second electric push rod; 44. First concave block; 45. Second concave block; 46. Rotating plate; 47. Inclined base box; 48. Third drive device; 49. Displacement plate; 50. Mounting plate; 51. Mounting bracket; 52. No. 6 spring; 53. Collection box; 54. Movable plate; 55. Fixed plate; 56. Clamping plate; 57. Transparent glass window; 58. Rotating plate; 59. L-shaped block. Detailed Implementation
[0022] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0023] Please see Figure 1-10 As shown, the present invention is a compressive strength testing device for LED epitaxial wafer graphene substrate, including a base plate 1, a placement frame 2 fixedly connected to the upper side of the base plate 1, a top box 3 fixedly connected to the upper side of the placement frame 2, a rotating shaft 4 connected to the inside of the top box 3 by a motor, a square plate 5 fixedly connected to the rotating shaft 4, a first electric push rod 6 fixedly connected to both ends of the square plate 5, a first driving device 7 fixedly connected to the output end of the first electric push rod 6, and two pressure plates 8 symmetrically arranged above the first driving device 7 for tensile testing at both ends; A baffle 16 is attached to one side of the top box 3. A fixed base 9 is fixedly connected to the output end of another first electric push rod 6. A first load sensor 10 is fixedly connected to the top of the fixed base 9. Two placement seats 26 are symmetrically arranged above the placement frame 2. The placement seats 26 are used to clamp the LED epitaxial wafer graphene substrate. Two first guide rods 25 are fixedly connected to the outer side of each of the two placement seats 26. A connecting plate 27 is fixedly connected to one side of each of the two first guide rods 25. A second load sensor 29 is installed on the inner side of each of the two connecting plates 27. When the baffle 16 moves to the front of the top box 3, the baffle 16 and the top box 3 form a sealed space to conduct the compressive strength test of the LED epitaxial wafer graphene substrate.
[0024] Furthermore, the first driving device 7 is a bidirectional screw transmission mechanism, which drives the bidirectional screw to rotate by the output shaft of the servo motor. Two pressure plates 8 are symmetrically arranged and threaded on the bidirectional screw, so that the two pressure plates 8 on the bidirectional screw can move towards each other or relative to each other. The first driving device 7 is prior art and is not limited thereto.
[0025] The first driving device 7 is used to drive the two pressure plates 8 to move towards each other or relative to each other. The fixed base 9 has a sliding groove 11 inside, and a sliding plate 12 is slidably connected inside the sliding groove 11. The pressure block 14 for compressive strength testing is fixedly connected to the lower side of the sliding plate 12. A No. 1 spring 13 is arrayed between the fixed base 9 and the sliding plate 12. The top box 3 is fixedly connected to the upper side of the second driving device 15. The baffle 16 has a transparent glass window 57 fixedly connected inside, and a lifting plate 17 is fixedly connected to one side of the baffle 16. The second driving device 15 is used to drive the lifting plate 17 to move upward or downward. The placement rack 2 has a first square groove 18 on the upper side, and a second square groove 19 is opened at the top inside the placement rack 2. The area of the second square groove 19 is larger than that of the first square groove 18. A flip plate 20 is rotatably connected inside the second square groove 19.
[0026] Furthermore, the second drive device 15 is a screw transmission mechanism, which drives the screw to rotate by the output shaft of the servo motor. The screw is threadedly connected to the lifting plate 17, so that the baffle 16 can be moved up and down for adjustment. At this time, the baffle 16 is close to the front side of the top box 3. When the baffle 16 moves downward, it is used to block the front side of the top box 3. During the test, the graphene substrate may generate high-speed flying micro-fragments when it breaks. The sealing fit between the baffle 16 and the top box 3 can effectively isolate the test area and prevent the fragments from flying and injuring people during the compressive strength test. When the baffle 16 moves upward, it opens the front side of the top box 3. The second drive device 15 is prior art and is not limited thereto.
[0027] The flip plate 20 has two symmetrically arranged sliding rods 21 fixedly connected inside. Two symmetrically arranged slide brackets 22 are slidably connected to the two sliding rods 21. Two No. 2 springs 23 are fixedly connected between the two slide brackets 22. Side plates 24 are fixedly connected to the outer side of each of the two slide brackets 22. Two first guide rods 25 are slidably placed on the side plates 24. Two No. 3 springs 28 are fixedly connected between the connecting plate 27 and the side plates 24. Rubber pads 30 are fixedly connected to the bottom of each of the two placement seats 26.
[0028] It can be explained that when conducting the compressive strength test, the LED epitaxial graphene substrate can be placed into the two placement seats 26. As the LED epitaxial graphene substrate is placed in, it will press the two elastic placement seats 26 to move and adjust on the two slide bars 21. In this way, the elasticity of the second spring 23 allows the two placement seats 26 to adapt to clamp LED epitaxial graphene substrates of different sizes, improving the applicability during clamping. At the same time, the rubber pad 30 at the bottom of the inner part of the placement seat 26 can not only play a protective role, but also increase the friction with the LED epitaxial graphene substrate, making it less prone to shaking and improving the stability of clamping the LED epitaxial graphene substrate.
[0029] The first detection mode: When the output end of the first electric push rod 6 drives the pressure block 14 to move downward and apply pressure, squeezing the first load sensor 10, the first load sensor 10 monitors the load. The second detection mode: When the output end of another first electric push rod 6 drives the pressure plate 8 to move downward to the positions of the two second load sensors 29, the first driving device 7 is activated. The first driving device 7 drives the two pressure plates 8 to squeeze the two second load sensors 29 and stretch the left and right ends of the LED epitaxial graphene substrate, allowing the second load sensors 29 to monitor the load. When the first load sensor 10 and the two second load sensors 29 are subjected to external pressure, their internal resistance... The value changes linearly with the pressure. When the pressure reaches the preset threshold or the substrate breaks, the test stops, and the recorded maximum pressure value is the compressive strength of the graphene substrate. The above-mentioned integrated "downward pressure application" and "end-stretching" detection modes can be switched in an orderly manner on the same device, eliminating the need for operators to transfer the substrate to be tested to different devices to complete the test separately. This reduces the detection time, reduces the operational error of repeated clamping and positioning, and allows for more accurate detection results in compressive strength testing. This makes the compressive and tensile data comparable and complementary, enabling a more comprehensive detection and evaluation of LED epitaxial wafer graphene substrates.
[0030] Furthermore, the two first electric push rods 6 are located at the center of the square plate 5, so that after the pressure block 14 assembly and the pressure plate 8 are rotated in sequence, they can be aligned with different test positions below, that is, aligned with the center of the substrate when resisting pressure, and aligned with the second load sensors on both sides when stretching.
[0031] The LED epitaxial graphene substrate can be loaded by applying pressure with the pressure block 14 and stretching with the placement seat 26, and its performance and compressive strength can be tested. The compressive strength performance can be tested by applying load until the LED epitaxial graphene substrate is damaged and then analyzing the experimental data. The recording and analysis of experimental data are existing technologies. In the compressive strength test of the existing technology, the data can be analyzed in real time by computer. This is common knowledge to those skilled in the art and will not be disclosed in detail here.
[0032] Both ends of the fixing base 9 are fixedly connected to horizontal plates 31. A second guide rod 32 is fixedly connected inside each of the two horizontal plates 31. Two symmetrically arranged L-shaped sliders 33 are slidably connected to each of the two second guide rods 32. Bolts 34 for positioning the L-shaped sliders 33 are threaded onto the upper side of each L-shaped slider 33. A third guide rod 35 is slidably connected to one side of each of the two L-shaped sliders 33. A positioning block 36 for clamping the graphene substrate of the LED epitaxial wafer is fixedly connected to one side of each of the two third guide rods 35. The other side of the third guide rod 35... The L-shaped slider 33 extends through and to the other side of the L-shaped slider 33. A No. 4 spring 37 is fixedly connected between the two L-shaped sliders 33 and the third guide rod 35. Two symmetrically arranged L-shaped blocks 59 are fixedly connected to both ends of the first drive device 7 by screws. The L-shaped slider 33 can drive the positioning block 36 to move and adjust on the second guide rod 32. Then, the bolt 34 is turned to lock the L-shaped slider 33. In this way, the positioning block 36 can be adapted to clamp LED epitaxial wafer graphene substrates of different sizes.
[0033] Two L-shaped support plates 38 are fixedly connected to each of the two placement seats 26. A fourth guide rod 39 is slidably connected to one side of each of the four L-shaped support plates 38. A round seat 40 is fixedly connected to one side of each of the four fourth guide rods 39. The other side of the fourth guide rod 39 passes through the L-shaped support plate 38 and extends to the other side of the L-shaped support plate 38. A No. 5 spring 41 is fixedly connected between each of the four round seats 40 and the L-shaped support plate 38. The fourth guide rod 39 and the L-shaped block 59 are in one-to-one correspondence.
[0034] Rubber strips are arrayed below both the circular base 40 and the positioning block 36. The rubber strips can ensure that the circular base 40 and the positioning block 36 are more stable when clamped, and are less likely to directly damage the graphene substrate of the LED epitaxial wafer.
[0035] When the output end of the first electric push rod 6 drives the fixed seat 9 to move down, the two positioning blocks 36 can then be placed against the upper part of the LED epitaxial graphene substrate. This allows the two third guide rods 35, which are equipped with the fourth spring 37, to slide on the two L-shaped sliders 33. In this way, the elastic force of the fourth spring 37 allows the two positioning blocks 36 to be elastically clamped above the LED epitaxial graphene substrate, ensuring the stability of the LED epitaxial graphene substrate during strength testing. Then, when the output end of the other first electric push rod 6 drives the first driving device 7 to move down, the four L-shaped blocks 59 at both ends of the first driving device 7 can press the four fourth guide rods 39, causing the four round seats 40, which are equipped with the fifth spring 41, to move down and be positioned above the LED epitaxial graphene substrate. Combined with the locking of the two placement seats 26, this is used to stabilize the left and right ends of the LED epitaxial graphene substrate in the "two-end stretching" testing mode.
[0036] In addition, both the first load sensor 10 and the second load sensor 29 are connected to the computer. The load sensors are used to monitor the load on the graphene substrate of the LED epitaxial wafer during the test. The connection between the load sensors and the computer is existing technology. The load sensors record and transmit the data to the computer, and then the computer quickly calculates the test data. This technology is widely used in compressive strength tests in the prior art, and will not be disclosed in detail here.
[0037] A vertical plate 42 is fixedly connected to the upper side of the base plate 1. A second electric push rod 43 is fixedly connected to one side of the vertical plate 42. A first recess 44 is fixedly connected to the output end of the second electric push rod 43. A rotating plate 46 is rotatably connected inside the first recess 44. A second recess 45 is fixedly connected to the lower side of the flip plate 20. The other end of the rotating plate 46 is rotatably connected inside the second recess 45.
[0038] An inclined base box 47 is fixedly connected to the upper side of the base plate 1. A third driving device 48 is fixedly connected to one side of the inclined base box 47. Two displacement plates 49 are provided at both ends inside the inclined base box 47. A mounting plate 50 is fixedly connected to one side of each of the two displacement plates 49. The third driving device 48 is used to drive the mounting plates 50 to move towards each other or relative to each other.
[0039] Furthermore, the third drive device 48 is a bidirectional screw drive mechanism. By driving the bidirectional screw to rotate through the output shaft of the servo motor, two symmetrically arranged mounting plates 50 are threadedly connected to the bidirectional screw. In this way, the two mounting plates 50 on the bidirectional screw can move towards each other or relative to each other, so that the two mounting plates 50 can drive the two displacement plates 49 to move relative to each other and push the fragments in the tilted bottom box 47 for centralized collection of fragments. The third drive device 48 is existing technology and is not limited thereto.
[0040] A rotating plate 58 is rotatably connected inside the inclined surface of the inclined base box 47. A mounting bracket 51 is fixedly connected to the lower side of the inclined base box 47. A No. 6 spring 52 is arrayed between the mounting bracket 51 and the rotating plate 58.
[0041] A collection box 53 is placed on the upper side of the base plate 1. A movable plate 54 is rotatably connected inside the tilted base box 47, and the collection box 53 is located below the movable plate 54.
[0042] Both the movable plate 54 and the tilted bottom box 47 are fixedly connected to a fixing plate 55, and a clamping plate 56 is snapped onto both fixing plates 55.
[0043] It can be explained that when the fragments are concentrated above the movable plate 54, the locking plates 56 on the two fixed plates 55 can be pulled out, and the locking plates 56 can lock the movable plate 54, allowing the movable plate 54 to rotate downwards. In this way, all the fragments will fall into the collection box 53 for convenient subsequent centralized processing.
[0044] In use, the invention is activated by starting the second drive device 15, which causes the lifting plate 17 on the second drive device 15 to move the baffle 16 downward, so that the baffle 16 is sealed on the front side of the top box 3. Then, the first electric push rod 6 is activated, and the output end of the first electric push rod 6 drives the pressure block 14 downward to apply pressure to the graphene substrate of the LED epitaxial wafer. After that, the slide plate 12, which is equipped with the first spring 13, can slide upward in the slide groove 11 of the fixed seat 9, so that the slide plate 12 squeezes the first load sensor 10. In this way, the first load sensor 10 can monitor the pressure applied by the pressure block 14 for the first time. At the same time, the first electric push rod 6 drives the pressure block 14 upward to reset. Next, the motor is started, which drives the square plate 5 on the rotating shaft 4 to rotate 180 degrees, causing the first drive device 7 to rotate to the lower position. Then, another first electric push rod 6 is started. The output end of the first electric push rod 6 drives the first drive device 7 to move down, allowing the two pressure plates 8 to move down to the positions of the two connecting plates 27. The first drive device 7 is started again, and the two pressure plates 8 on the first drive device 7 can move relative to each other to apply pressure to the two second load sensors 29, causing the two sets of first guide rods 25 to slide on the two side plates 24, allowing the two placement seats 26 to stretch the left and right ends of the LED epitaxial graphene substrate. At this time, the two first load sensors 10 can perform a second round of monitoring of the tensile force. The above-mentioned integration of "downward pressure application" and "end-to-end stretching" detection modes, compared with a single detection mode, allows for a more comprehensive test of the compressive strength of the LED epitaxial graphene substrate, improving the accuracy of the compressive strength testing device. At the same time, the combined use of the baffle 16 and the top box 3 can protect the broken and flying fragments, preventing the fragments from injuring the staff, and further improving the safety during the test.
[0045] After the "downward pressure" or "two-end stretching" test modes are performed, one of the first electric push rods 6 will be reset to release the positioning of the LED epitaxial graphene substrate by the round seat 40 or the positioning block 36. Then the second electric push rod 43 will be activated. The extension end of the second electric push rod 43 will retract, which will drive the first concave block 44 to move, causing the rotating plate 46 to rotate and drive the flip plate 20 to rotate downward, so that the flip plate 20 can enter the interior of the tilted bottom box 47. At the same time, the flip plate 20 will also squeeze the movable plate 54 with the No. 6 spring 52 installed. Since the flip plate 20 is in a tilted downward state, the larger brittle fragments generated during the test can slide downward from the placement seat 26 and the flip plate 20 due to gravity. This allows the fracture fragments generated by the LED epitaxial graphene substrate in the compression and tensile tests to enter the interior of the tilted bottom box 47. At the same time, the recovery of the fragments is also a key sample for subsequent analysis of material failure mechanism and optimization of epitaxial process. Next, the third drive device 48 is activated. The two mounting plates 50 on the third drive device 48 drive two displacement plates 49 to move towards each other inside the tilted box 47. This allows the two displacement plates 49 to push the fragments in the tilted box 47 onto the movable plate 54, avoiding the risk of operators being cut by fragments during manual cleaning and preventing residual fragments from affecting the accuracy of subsequent tests. This improves operational safety and ensures stable and reliable testing. The third drive device 48 then drives the two displacement plates 49 to move relative to each other to complete the reset. Then, the extension end of the second electric push rod 43 extends, causing the flip plate 20 to rotate upwards and reset, returning the flip plate 20 to its interior. At this point, the elasticity of the sixth spring 52 causes the movable plate 54 to rotate upwards, pushing the fragments to concentrate on the movable plate 54 at the bottom of the tilted box 47. This facilitates subsequent centralized collection of fragments, saving time and effort.
[0046] The above description is merely an example and illustration of the concept of the present invention. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the concept of the invention or exceed the scope defined in the claims, they should all fall within the protection scope of the present invention.
Claims
1. A device for testing the compressive strength of an LED epitaxial wafer graphene substrate, comprising a base plate (1), characterized in that, The base plate (1) is fixedly connected to the upper side of the placement frame (2), the placement frame (2) is fixedly connected to the upper side of the top box (3), the top box (3) is connected to the rotating shaft (4) through the motor, the rotating shaft (4) is fixedly connected to the square plate (5), the square plate (5) is fixedly connected to both ends of the square plate (5), the output end of the first electric push rod (6) is fixedly connected to the first drive device (7), and the first drive device (7) is symmetrically provided with two pressure plates (8) above it for tensile testing at both ends; The top box (3) is fitted with a baffle (16) on one side. The output end of the other first electric push rod (6) is fixedly connected to a fixed seat (9). The top of the fixed seat (9) is fixedly connected to a first load sensor (10). Two placement seats (26) are symmetrically arranged above the placement rack (2). The placement seats (26) are used to hold the LED epitaxial wafer graphene substrate. Two first guide rods (25) are fixedly connected to the outer side of the two placement seats (26). A connecting plate (27) is fixedly connected to one side of the two first guide rods (25). A second load sensor (29) is installed on the inner side of the two connecting plates (27).
2. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 1, characterized in that, The first driving device (7) is used to drive the two pressure plates (8) to move towards each other or relative to each other. The fixed seat (9) has a sliding groove (11) inside. The sliding groove (11) has a sliding plate (12) inside. The pressure block (14) for compressive strength testing is fixedly connected to the lower side of the sliding plate (12). A No. 1 spring (13) is connected in an array between the fixed seat (9) and the sliding plate (12). The top box (3) has a second driving device (15) fixedly connected to the upper side. The baffle (16) has a transparent glass window (57) fixedly connected to the inside. The baffle (16) has a lifting plate (17) fixedly connected to one side. The second driving device (15) is used to drive the lifting plate (17) to move upward or downward. The placement rack (2) has a first square groove (18) on the upper side. The placement rack (2) has a second square groove (19) at the top inside. The area of the second square groove (19) is larger than that of the first square groove (18). The second square groove (19) has a flip plate (20) rotatably connected inside.
3. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 2, characterized in that, The flap (20) is fixedly connected to two symmetrically arranged sliding rods (21), and two symmetrically arranged slides (22) are slidably connected to the two sliding rods (21). Two No. 2 springs (23) are fixedly connected between the two slides (22). A side plate (24) is fixedly connected to the outer side of each of the two slides (22). Two first guide rods (25) are slidably placed on the side plate (24). Two No. 3 springs (28) are fixedly connected between the connecting plate (27) and the side plate (24). A rubber pad (30) is fixedly connected to the bottom of each of the two placement seats (26).
4. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 3, characterized in that, Both ends of the fixed base (9) are fixedly connected to horizontal plates (31), and both horizontal plates (31) are fixedly connected to second guide rods (32). Both second guide rods (32) are slidably connected to two L-shaped sliders (33). Both L-shaped sliders (33) are threadedly connected to the upper side of the two L-shaped sliders (33) and bolts (34) for positioning the L-shaped sliders (33). Both L-shaped sliders (33) are slidably connected to one side of the two L-shaped sliders (33). Both third guide rods (35) are fixedly connected to one side of the two third guide rods (35) and positioning blocks (36) for clamping the graphene substrate of the LED epitaxial wafer are fixedly connected to one side of the two third guide rods (35). The other side of the third guide rods (35) passes through the L-shaped sliders (33) and extends to the other side of the L-shaped sliders (33). Both L-shaped sliders (33) and the third guide rods (35) are fixedly connected to a No. 4 spring (37). Both ends of the first driving device (7) are fixedly connected to two L-shaped blocks (59) symmetrically arranged by screws.
5. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 4, characterized in that, Two L-shaped support plates (38) are fixedly connected to each of the two placement seats (26). A fourth guide rod (39) is slidably connected to one side of each of the four L-shaped support plates (38). A round seat (40) is fixedly connected to one side of each of the four fourth guide rods (39). The other side of the fourth guide rod (39) passes through the L-shaped support plate (38) and extends to the other side of the L-shaped support plate (38). A No. 5 spring (41) is fixedly connected between each of the four round seats (40) and the L-shaped support plate (38). The fourth guide rod (39) and the L-shaped block (59) are in one-to-one correspondence.
6. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 1, characterized in that, A vertical plate (42) is fixedly connected to the upper side of the base plate (1). A second electric push rod (43) is fixedly connected to one side of the vertical plate (42). A first concave block (44) is fixedly connected to the output end of the second electric push rod (43). A rotating plate (46) is rotatably connected inside the first concave block (44). A second concave block (45) is fixedly connected to the lower side of the flip plate (20). The other end of the rotating plate (46) is rotatably connected inside the second concave block (45).
7. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 1, characterized in that, An inclined base box (47) is fixedly connected to the upper side of the base plate (1). A third driving device (48) is fixedly connected to one side of the inclined base box (47). Two displacement plates (49) are provided at both ends inside the inclined base box (47). An installation plate (50) is fixedly connected to one side of each of the two displacement plates (49). The third driving device (48) is used to drive the installation plates (50) to move towards each other or relative to each other.
8. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 7, characterized in that, The inclined bottom box (47) has a rotating plate (58) rotatably connected inside the inclined surface. The inclined bottom box (47) has a mounting bracket (51) fixedly connected to the lower side. A No. 6 spring (52) is arrayed between the mounting bracket (51) and the rotating plate (58).
9. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 1, characterized in that, A collection box (53) is placed on the upper side of the base plate (1), and a movable plate (54) is rotatably connected inside the inclined base box (47). The collection box (53) is located below the movable plate (54).
10. The compressive strength testing device for LED epitaxial wafer graphene substrate according to claim 9, characterized in that, The movable plate (54) and the inclined bottom box (47) are both fixedly connected to the lower side of the fixed plate (55), and the two fixed plates (55) are together secured with a card plate (56).