Semiconductor vacuum valve adaptive control system and method based on cavity pressure feedback

Abstract

The application discloses a semiconductor vacuum valve self-adaptive control system and method based on cavity pressure feedback, collects a current pressure sequence of a process cavity, a target pressure value, a vacuum valve feedback opening sequence and a pump end boundary pressure sequence, intercepts a pumping-stabilizing transition section sample according to a corresponding relationship between a swing position where a cavity pressure deviation relative to the target pressure value reverses and a single stroke displacement section of the vacuum valve, and decomposes the pumping-stabilizing transition section sample into a flow conductance bearing section and a cavity pressure bearing section; establishes a valve position-local flow conductance bearing relationship and a flow conductance-cavity pressure bearing relationship based on the flow conductance bearing section and the cavity pressure bearing section, and merges to form a transition section connection relationship; and then limits local flow conductance landing points and valve position landing points according to the target pressure value and the pump end boundary pressure sequence, determines a transition section connection valve position, and takes the transition section connection valve position as a valve position landing point where the vacuum valve is switched from a pumping stroke to a stabilizing stroke. The method is suitable for vacuum valve control in a pumping and stabilizing switching process of a semiconductor process cavity.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment pressure control technology, and more specifically to an adaptive control system and method for semiconductor vacuum valves based on cavity pressure feedback. Background Technology

[0002] In semiconductor manufacturing, processes such as chemical vapor deposition, etching, ashing, and cleaning typically require pressure control within the process chamber. The effectiveness of chamber pressure control affects process stability and consistency. To achieve chamber pressure regulation, a vacuum valve is usually installed between the process chamber and the vacuum pump. By adjusting the opening of the vacuum valve, the downstream exhaust capacity is changed, thereby controlling the actual pressure within the chamber. Therefore, the vacuum valve is a key actuator in process chamber pressure control.

[0003] In existing technologies, one approach primarily controls the evacuation stage by installing a variable-opening valve between the process chamber and the vacuum pump, and adjusting the exhaust state during evacuation based on pump-end pressure detection results. Another approach focuses on the pressure stabilization stage, using chamber pressure measurements, target pressure values, and vacuum valve opening measurements to form a closed-loop control system, and correcting the pressure regulation process by considering the relationship between vacuum valve opening and system conductance. Still other approaches infer the valve opening corresponding to the target pressure based on the current opening and pressure, or establish a control model through valve calibration and process calibration to generate control parameters for subsequent process control.

[0004] While the aforementioned solutions have improved aspects such as evacuation flow control, pressure regulation, opening correction, target opening inference, and calibration parameter generation, most optimizations target a single control element and lack continuous control over the transition from the evacuation to the pressure regulation stage. In the evacuation-pressure regulation transition zone, the vacuum valve is typically in a region where opening changes are sensitive and system conductance changes rapidly. The local correspondence between cavity pressure, vacuum valve opening, and system conductance is easily affected by factors such as process gas conditions, exhaust boundary conditions, pump-end pumping capacity, and valve body state changes. If stage-switching control logic, pre-stored mapping relationships, or fixed control parameters are still used, it will be difficult to reflect local dynamic changes in the transition zone in a timely manner, easily leading to discontinuous valve position adjustment and causing cavity pressure overshoot, oscillation, or decreased convergence performance.

[0005] In view of this, the present invention provides an adaptive control system and method for a semiconductor vacuum valve based on cavity pressure feedback, thereby solving the above problems. Summary of the Invention

[0006] The purpose of this invention is to provide an adaptive control system and method for semiconductor vacuum valves based on cavity pressure feedback, which realizes the process determination of the vacuum valve connection position in the evacuation-pressure stabilization transition zone, and is beneficial to maintaining the consistency of the process cavity pressure switching process.

[0007] To achieve the above objectives, the present invention provides the following technical solution: In a first aspect, the present invention provides an adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback, comprising the following steps: S101: Collect the current pressure sequence of the process chamber, the target pressure value, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence; according to the correspondence between the swing position where the chamber pressure deviation reverses direction relative to the target pressure value and the single-stroke displacement section of the vacuum valve, extract the evacuation-stabilization transition section sample, and according to the order of transmission from the pump end boundary pressure to the chamber pressure, decompose the evacuation-stabilization transition section sample into the flow conduction receiving section and the chamber pressure receiving section; S102: Establish the valve position-local flow conduction connection relationship based on the displacement order of the vacuum valve feedback opening sequence in the flow conduction connection section; establish the flow conduction-cavity pressure connection relationship based on the response order of the current pressure sequence of the process cavity in the cavity pressure connection section, and merge the valve position-local flow conduction connection relationship and the flow conduction-cavity pressure connection relationship into a transition section connection relationship according to the connection endpoint of the same evacuation-pressure stabilization transition section; S103: The local flow conductance landing point is defined by the continuous swing stroke corresponding to the target pressure value in the flow conductance-cavity pressure connection relationship, and the valve position landing point is defined by the boundary propagation beat group corresponding to the pump end boundary pressure sequence in the valve position-local flow conductance connection relationship; the transition section connecting valve position is determined according to the correspondence between the local flow conductance landing point and the valve position landing point. S104: The transition section connecting valve position is used as the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke.

[0008] As a preferred embodiment of the present invention, the step of extracting the sample from the evacuation-stabilization transition section includes: The current pressure sequence of the process chamber output by the pressure sampling board, the vacuum valve feedback opening sequence output by the valve control board, and the pump end boundary pressure sequence output by the pump side sampling board are recombined into a cross-board synchronous frame series with each frame aligned according to a unified master clock beat number. In the cross-board simultaneous frame series, a pressure swing locking frame is formed by a continuous frame group in which the cavity pressure deviation changes from a single-sided deviation to a reverse deviation, and a single-stroke displacement frame group is formed by a frame group in which the vacuum valve feedback opening changes continuously along the same displacement direction. The simultaneous frame segments of cross-board cards that pass through the pressure swing lock group and whose start and end numbers are both within the single-stroke displacement group are extracted as samples of the evacuation-stabilization transition section.

[0009] As a preferred embodiment of the present invention, the evacuation-stabilization transition section sample is decomposed into a flow conduction receiving section and a cavity pressure receiving section, including: Within the evacuation-stabilization transition section sample, the leading edge beat group at the boundary where the pump end boundary pressure begins to deviate from the previous pressure holding state is extracted, and the rear edge beat group at the reverse deviation of the cavity pressure is extracted. The cross-board transfer part continuously distributed on the main clock beat axis between the leading edge beat group and the rear edge beat group is determined as the foldback transfer chain. The sample section in the reversible transfer chain that is located before the leading edge of the boundary and whose displacement is continuously in the same direction as the vacuum valve feedback opening is defined as the flow guide receiving section, and the sample section in the reversible transfer chain that is located after the leading edge of the boundary and whose displacement is continuously swinging back with the cavity pressure deviation is defined as the cavity pressure receiving section.

[0010] As a preferred embodiment of the present invention, the flow-conducting receiving section and the cavity pressure receiving section are corrected and defined based on the same cross-board foldback receiving relationship, including: Extract the last valve position beat group in the flow guide receiving section that is adjacent to or partially overlaps with the boundary leading edge beat group on the main clock beat axis, and extract the first cavity pressure beat group in the cavity pressure receiving section that is adjacent to or partially overlaps with the swing back edge beat group on the main clock beat axis. Pair the valve position beat group and the cavity pressure beat group according to their respective corresponding main clock beat positions to form a foldback receiving beat group. According to the return receiving beat group, the sample portion that is continuously connected forward to the return receiving beat group on the master clock beat number axis is retained as the flow guide receiving section, and the sample portion that is continuously connected backward to the return receiving beat group on the master clock beat number axis is retained as the cavity pressure receiving section.

[0011] As a preferred embodiment of the present invention, establishing a flow conductance-cavity pressure connection relationship includes: The boundary propagation beat group of the pump end boundary pressure in the pump side sampling plate is connected to the swing response beat group of the cavity pressure deviation in the pressure sampling plate along the back of the folding and receiving beat group, forming a flow conduction-cavity pressure receiving chain. In the flow conduction-cavity pressure bearing chain, the initial local flow conduction beat group corresponding to the starting position of the cavity pressure deviation swing and the continuous local flow conduction beat group corresponding to the continuation position of the cavity pressure deviation swing are extracted. Based on the sequential positions of the initial local flow guiding camera group, the continued local flow guiding camera group, and the corresponding cavity pressure return camera group on the master clock beat axis, the preceding and following connection positions between the local flow guiding camera group and the cavity pressure return camera group are determined, and these preceding and following connection positions are written into the flow guiding-cavity pressure connection relationship.

[0012] As a preferred embodiment of the present invention, the flow conductance-cavity pressure bearing relationship is corrected and limited based on the same local flow conductance band, including: Extract the initial local flow guide group corresponding to the first continuous swing of the cavity pressure deviation in the flow guide-cavity pressure connection relationship, and extract the final local flow guide group corresponding to the last continuous same-direction displacement of the vacuum valve feedback opening in the valve position-local flow guide connection relationship. The overlapping or adjacent consecutive beat number intervals of the starting local flow guide group and the ending local flow guide group on the main clock beat number axis are defined as the same local flow guide zone. Based on the starting position of the same local flow guide strip in the flow guide-cavity pressure connection relationship and the ending position of the same local flow guide strip in the valve position-local flow guide connection relationship, the preceding and following connection positions between the two types of connection relationships are determined, and the preceding and following connection positions are written into the flow guide-cavity pressure connection relationship.

[0013] As a preferred embodiment of the present invention, the definition of the local flow guide landing point and the valve position landing point includes: In the flow conduction-cavity pressure receiving relationship, the first cavity pressure tapping group and the second cavity pressure tapping group, whose cavity pressure values ​​are located on both sides of the target pressure value and within the same continuous swing tapping stroke, are extracted, and the continuous receiving range between the local flow conduction tapping groups connected to the first cavity pressure tapping group and the second cavity pressure tapping group is determined as the local flow conduction landing area. In the valve position-local flow conduction relationship, the pump end boundary pressure propagation direction is determined according to the change direction of the current pump end boundary pressure sequence in the boundary propagation beat group. The first valve position beat group and the second valve position beat group, which have the same sequential bearing direction as the pump end boundary pressure propagation direction on the master clock beat axis, are extracted. The continuous valve position range between the valve position positions connected to the first valve position beat group and the second valve position beat group respectively is determined as the valve position closed landing area. The local flow guide landing area and the valve position closure landing area are mapped to the same transition section connection relationship, and the common receiving position of the two in the transition section connection relationship is determined as the local flow guide landing point and the valve position landing point.

[0014] As a preferred embodiment of the present invention, the local flow guide landing point and the valve position landing point are constrained by the current single-stroke displacement beat group, including: Extract valve position beat groups that maintain connection with the local flow guide landing area in the transition section connection relationship, and retain the successor candidate beat groups located in the current single stroke displacement beat groups from the valve position beat groups; In the successive candidate batches, the valve position is selected if it is located within the valve position area and its corresponding local flow guiding batch and the current pump end boundary pressure propagation direction are in the same sequential direction on the main clock batch number axis. The local flow guide receiving position and the valve position receiving position corresponding to the selected valve position in the transition section connection relationship are determined as the local flow guide landing point and the valve position landing point.

[0015] As a preferred embodiment of the present invention, the step of using the transition section connecting valve position as the valve position landing point when the vacuum valve transitions from the evacuation stroke to the pressure stabilization stroke includes: The valve position that corresponds to both the local flow guide landing point and the valve position landing point in the transition section connection relationship is determined as the transition section connection valve position, and the valve control board card master clock number corresponding to the transition section connection valve position is written into the evacuation stroke termination clock position. Write the valve position corresponding to the transition section valve position into the starting position of the pressure stabilizing stroke, thus forming the valve position landing point when the vacuum valve transitions from the evacuation stroke to the pressure stabilizing stroke.

[0016] In a second aspect, the present invention provides an adaptive control system for a semiconductor vacuum valve based on cavity pressure feedback, for implementing the first aspect, including a pressure sampling board, a valve control board, a pump-side sampling board, and a main control board; The pressure sampling board is used to collect the current pressure sequence of the process chamber, the valve control board is used to collect the vacuum valve feedback opening sequence and execute vacuum valve position control, and the pump-side sampling board is used to collect the pump end boundary pressure sequence. The pressure sampling board, the valve control board, and the pump-side sampling board are all communicatively connected to the main control board. The main control board is equipped with a pressure acquisition interface, a pump-side sampling interface, and a valve control communication interface. The pressure acquisition interface is connected to the pressure acquisition board, the pump-side sampling interface is connected to the pump-side sampling board, and the valve control communication interface is connected to the valve control board. The main control board outputs the evacuation stroke termination position and the pressure stabilization stroke start position to the valve control board through the valve control communication interface. The valve control board generates vacuum valve drive commands based on the evacuation stroke termination position and the pressure stabilization stroke start position. The main control board includes a data acquisition and sample decomposition module, a connection relationship construction module, a valve position determination module, and a valve position connection control module. The data acquisition and sample decomposition module is used to acquire the current pressure sequence of the process chamber, the target pressure value, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence; according to the correspondence between the swing position where the chamber pressure deviation reverses direction relative to the target pressure value and the single-stroke displacement section of the vacuum valve, the evacuation-stabilization transition section sample is extracted, and according to the order of transmission from the pump end boundary pressure to the chamber pressure, the evacuation-stabilization transition section sample is decomposed into the flow conduction receiving section and the chamber pressure receiving section. The connection relationship construction module is used to establish a valve position-local flow conduction connection relationship based on the displacement order of the vacuum valve feedback opening sequence in the flow conduction connection section; to establish a flow conduction-cavity pressure connection relationship based on the response order of the current pressure sequence of the process cavity in the cavity pressure connection section; and to merge the valve position-local flow conduction connection relationship and the flow conduction-cavity pressure connection relationship into a transition section connection relationship according to the connection endpoint of the same evacuation-pressure stabilization transition section. The connecting valve position determination module is used to limit the local flow conduction landing point by the continuous swing stroke corresponding to the target pressure value in the flow conduction-cavity pressure connection relationship, and to limit the valve position landing point by the boundary propagation beat group corresponding to the pump end boundary pressure sequence in the valve position-local flow conduction connection relationship; and to determine the transition section connecting valve position according to the correspondence between the local flow conduction landing point and the valve position landing point; The valve position connection control module is used to determine the transition section connection valve position as the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke.

[0017] The technical effects and advantages provided by the present invention in the above technical solution are as follows: This invention extracts samples of the evacuation-stabilization transition segment by focusing on the correspondence between the current pressure sequence of the process chamber, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence during the evacuation-stabilization transition phase. These samples are further decomposed into a flow conduction segment and a cavity pressure segment. This separates the valve position changes, boundary propagation, and cavity pressure fluctuations that were originally mixed in the same control process within the transition interval into interconnected processing links. As a result, it avoids the distortion of the transition relationship caused by relying solely on a single pressure feedback or a fixed switching position for stage switching, and establishes the transition from the evacuation phase to the stabilization phase based on the actual transmission relationship of the current operating process.

[0018] This invention constructs valve position-local flow conduction connection relationships and flow conduction-cavity pressure connection relationships separately, and merges the two types of connection relationships into a transition section connection relationship according to the connection endpoint of the same evacuation-pressure stabilization transition section. This creates a continuous connection structure between the vacuum valve operation process, local flow state changes, and process cavity pressure response process. Accordingly, it can solve the problem of the separation between valve position control relationship and cavity pressure response relationship in the prior art. The control basis in the transition section includes not only pressure side information, but also connection information between the valve position side and the exhaust side, thereby improving the consistency of connection between the end of the evacuation section and the beginning of the pressure stabilization section.

[0019] This invention defines the local flow conduction landing point by using the continuous swing stroke corresponding to the target pressure value in the flow conduction-cavity pressure bearing relationship, and defines the valve position landing point by using the boundary propagation beat group corresponding to the pump end boundary pressure sequence in the valve position-local flow conduction bearing relationship. Then, the transition section connecting valve position is determined according to the correspondence between the local flow conduction landing point and the valve position landing point. This makes the valve position landing point of the vacuum valve from the evacuation stroke to the pressure stabilization stroke jointly formed by the dual bearing constraints under the current transition condition. In this way, the disconnection phenomenon between the end position of evacuation control and the start position of pressure stabilization control can be reduced, and the pressure stabilization access position can be coordinated with the boundary propagation state and cavity pressure response state in the current process. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0021] Figure 1 This is a connection diagram of the semiconductor vacuum valve adaptive control system based on cavity pressure feedback as described in this invention. Figure 2 This is a schematic diagram of the overall process of the adaptive control method for semiconductor vacuum valves based on cavity pressure feedback described in this invention. Figure 3 This is a schematic diagram illustrating the extraction of cross-board synchronous frame sequences and evacuation-stabilization transition section samples in this invention; Figure 4 This is a schematic diagram showing the decomposition of the transition section sample into a flow-conducting receiving section and a cavity pressure receiving section in this invention; Figure 5 This is a schematic diagram illustrating the formation of the transition section connection relationship and the determination of the transition section connection valve position in this invention. Detailed Implementation

[0022] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, they are provided so that the description of this disclosure will be more complete and fully convey the concept of the exemplary embodiments to those skilled in the art. The drawings are merely illustrative of this disclosure and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0023] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more exemplary embodiments. Numerous specific details are provided in the following description to give a full understanding of exemplary embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure may be practiced with one or more specific details omitted, or methods, components, steps, etc. In other instances, well-known structures, methods, implementations, or operations are not shown or described in detail to avoid obscuring various aspects of this disclosure.

[0024] Example 1 like Figure 1As shown, this embodiment provides an adaptive control system for a semiconductor vacuum valve based on cavity pressure feedback, applied to the pressure control process of a process cavity in a semiconductor manufacturing equipment. The semiconductor manufacturing equipment includes a process cavity, a vacuum valve disposed on the exhaust passage of the process cavity, a vacuum pump connected downstream of the vacuum valve, a pressure sampling board, a valve control board, a pump-side sampling board, and a main control board.

[0025] The process chamber is connected to the vacuum valve, and the vacuum valve is connected to the vacuum pump. The pressure sampling board is used to collect the current pressure sequence of the process chamber; the valve control board is used to collect the vacuum valve feedback opening sequence and execute vacuum valve position control based on the valve position control information output by the main control board; the pump-side sampling board is used to collect the pump end boundary pressure sequence downstream of the vacuum valve. The pressure sampling board, the valve control board, and the pump-side sampling board are all communicatively connected to the main control board.

[0026] The main control board is used to distribute a unified master clock sequence number to the pressure sampling board, valve control board, and pump-side sampling board. Each board completes sampling, buffering, and data reporting under the corresponding master clock sequence number, so that the current pressure sequence of the process chamber, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence can be time-correlated on the same master clock sequence number axis.

[0027] The main control board includes a data acquisition and sample decomposition module, a connection relationship construction module, a valve position determination module, and a valve position connection control module.

[0028] The data acquisition and sample decomposition module is used to receive the current pressure sequence of the process cavity output by the pressure sampling board, the vacuum valve feedback opening sequence output by the valve control board, the pump end boundary pressure sequence output by the pump side sampling board, and the target pressure value corresponding to the current process step; and according to the correspondence between the cavity pressure deviation swing position and the single-stroke displacement section of the vacuum valve, it extracts the evacuation-stabilization transition section sample, and then decomposes the evacuation-stabilization transition section sample into the flow conduction receiving section and the cavity pressure receiving section according to the order of the pump end boundary pressure to the cavity pressure.

[0029] The connection relationship construction module is used to establish a valve position-local flow conduction connection relationship based on the displacement order of the vacuum valve feedback opening sequence in the flow conduction connection section; and to establish a flow conduction-cavity pressure connection relationship based on the response order of the current pressure sequence of the process cavity in the cavity pressure connection section; and then merge the valve position-local flow conduction connection relationship and the flow conduction-cavity pressure connection relationship into a transition section connection relationship according to the connection endpoint in the same evacuation-pressure stabilization transition section.

[0030] The connecting valve position determination module is used to limit the local flow conduction landing point according to the corresponding position of the target pressure value in the flow conduction-cavity pressure connection relationship, and to limit the valve position landing point according to the corresponding position of the pump end boundary pressure sequence in the valve position-local flow conduction connection relationship; then, the connecting valve position of the transition section is determined according to the correspondence between the local flow conduction landing point and the valve position landing point in the transition section connection relationship.

[0031] The valve position transition control module is used to designate the transition section valve position as the valve position landing point when the vacuum valve transitions from the evacuation stroke to the pressure stabilization stroke, and outputs the corresponding control information to the valve control board. The valve control board controls the vacuum valve to enter the pressure stabilization stroke according to the control information.

[0032] During process execution, there is a temporal sequence relationship between changes in process chamber pressure, changes in vacuum valve feedback opening, and the propagation of pump end boundary pressure. When the current pressure in the process chamber approaches the target pressure value, if stage switching is based solely on a single pressure deviation or a fixed valve position, the termination position of the evacuation stroke and the start position of the pressure stabilization stroke may become disconnected. In this embodiment, the above multi-source sequence is organized on the same master clock axis by the main control board, and a succession relationship is established based on the evacuation-pressure stabilization transition section sample, so that the succession valve position of the vacuum valve is determined by the actual succession relationship in the current transition process.

[0033] Example 2 like Figure 2 As shown, this embodiment, based on Embodiment 1, provides an adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback, including the following steps: S101: Collect the current pressure sequence of the process chamber, the target pressure value, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence; according to the correspondence between the swing position where the chamber pressure deviation reverses direction relative to the target pressure value and the single-stroke displacement section of the vacuum valve, extract the evacuation-stabilization transition section sample, and according to the order of transmission from the pump end boundary pressure to the chamber pressure, decompose the evacuation-stabilization transition section sample into the flow conduction receiving section and the chamber pressure receiving section.

[0034] Specifically, the pressure sampling board, valve control board, and pump-side sampling board output the current pressure sequence of the process chamber, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence, respectively, under a unified master clock sequence. The target pressure value is written into the main control board by the process recipe corresponding to the current process step and serves as the pressure control reference value for the current process step.

[0035] Furthermore, such as Figure 3 As shown, the logic for extracting samples from the evacuation-stabilization transition section is as follows: The main control board reads the sampling results from the buffers of each board and aggregates them according to the same master clock sequence number. The current pressure of the process chamber, the feedback opening degree of the vacuum valve, and the pump end boundary pressure under the same master clock sequence number are written into the same frame record, forming a cross-board synchronous frame series. Each frame record in the cross-board synchronous frame series includes at least the current pressure field of the process chamber, the feedback opening degree field of the vacuum valve, and the pump end boundary pressure field.

[0036] The main control board constructs a cavity pressure deviation sequence based on the current pressure sequence and the target pressure value of the process cavity, and determines the pressure deviation swing position based on the direction of deviation of the cavity pressure deviation relative to the target pressure value. When the cavity pressure deviation in the continuous pulse group changes from one side of the target pressure value to the other side, the main control board extracts the continuous pulse group covering the process of reversal in that direction, forming a pressure swing locking pulse group.

[0037] Simultaneously, the main control board traverses the vacuum valve feedback opening sequence and determines the displacement direction of the vacuum valve based on the direction of feedback opening change between adjacent master clock beats. When the vacuum valve feedback opening maintains the same displacement direction within a continuous beat group, and there is no reverse displacement within that continuous beat group, the main control board identifies that continuous beat group as a single-stroke displacement beat group.

[0038] The main control board searches for consecutive frame segments that simultaneously traverse the pressure swing lock group and whose start and end beat numbers are both within the single-stroke displacement group in the cross-board synchronous frame series, and extracts these consecutive frame segments as evacuation-stabilization transition section samples. The start and end positions of the evacuation-stabilization transition section samples are jointly defined by the pressure deviation swing position and the single-stroke displacement group, rather than by the fixed number of sampling points.

[0039] Specifically, such as Figure 4 As shown, the evacuation-stabilization transition section sample is decomposed into a flow conduction receiving section and a cavity pressure receiving section, including: Within the evacuation-stabilization transition section sample, the main control board extracts the continuous beat sequence where the pump-end boundary pressure begins to deviate from the previous pressure holding state, as the boundary leading edge beat sequence; and extracts the continuous swing-back beat sequence formed after the cavity pressure deviation enters the reverse deviation, as the swing-back trailing edge beat sequence. The main control board defines the cross-board transmission portion continuously distributed on the main clock beat axis between the boundary leading edge beat sequence and the swing-back trailing edge beat sequence as the zigzag transmission chain. The zigzag transmission chain is used to represent the beat sequence of the pump-end boundary pressure change transmitted to the cavity pressure deviation swing-back response via the flow state change corresponding to the vacuum valve feedback opening.

[0040] The main control board divides the reversing transmission chain into sections using the leading edge of the boundary as the dividing point. The sample section in the reversing transmission chain located before the leading edge of the boundary and corresponding to the continuous unidirectional displacement of the vacuum valve feedback opening is defined as the flow guide receiving section; the sample section in the reversing transmission chain located after the leading edge of the boundary and corresponding to the continuous oscillation of the cavity pressure deviation is defined as the cavity pressure receiving section.

[0041] To ensure that the flow-conducting receiving section and the cavity pressure receiving section correspond to the same cross-board foldback receiving benchmark, the main control board extracts the last valve position beat group in the flow-conducting receiving section that is adjacent to or partially overlaps with the boundary leading edge beat group on the master clock beat number axis, and extracts the first cavity pressure beat group in the cavity pressure receiving section that is adjacent to or partially overlaps with the swing-back edge beat group on the master clock beat number axis; then the valve position beat group and the cavity pressure beat group are paired according to their respective master clock beat number positions to form a foldback receiving beat group.

[0042] Subsequently, the main control board, based on the foldback receiving beat group, retains the sample portion continuously connected forward to the foldback receiving beat group on the master clock beat number axis as the flow guide receiving segment, and retains the sample portion continuously connected backward to the foldback receiving beat group on the master clock beat number axis as the cavity pressure receiving segment. After the above processing, both the flow guide receiving segment and the cavity pressure receiving segment correspond to the same foldback receiving beat group.

[0043] S102: Establish the valve position-local flow conduction connection relationship based on the displacement order of the vacuum valve feedback opening sequence in the flow conduction connection section; establish the flow conduction-cavity pressure connection relationship based on the response order of the current pressure sequence of the process cavity in the cavity pressure connection section, and merge the valve position-local flow conduction connection relationship and the flow conduction-cavity pressure connection relationship into a transition section connection relationship according to the connection endpoint of the same evacuation-pressure stabilization transition section.

[0044] Before establishing the valve position-local flow conductance connection relationship, the main control board first obtains the local flow conductance beat group within the flow conductance connection section. In this embodiment, the local flow conductance beat group is not limited to the direct calculation result of the absolute flow conductance value of the vacuum system, but refers to the beat number interval jointly defined by the continuous displacement state of the vacuum valve feedback opening and the propagation state of the pump end boundary pressure on the unified master clock beat number axis. This beat number interval is used to characterize the local connection position of the valve position change on the exhaust flow state within the current evacuation-pressure stabilization transition section.

[0045] Specifically, the main control board extracts valve position beat groups where the vacuum valve feedback opening changes continuously in the same direction according to the master clock beat number sequence, and extracts boundary propagation beat groups where the pump end boundary pressure changes from the previous pressure holding state to the boundary propagation state. When the valve position beat group and the boundary propagation beat group are adjacent, partially overlap, or connected by consecutive beat numbers on the master clock beat number axis, the beat number interval between the valve position beat group and the boundary propagation beat group is determined as a local flow guiding beat group. The local flow guiding beat group is used to represent the intermediate receiving interval in which the change in vacuum valve feedback opening is transmitted to the propagation state of pump end boundary pressure.

[0046] The main control board writes the preceding and following connection positions between the valve position tap group and the local flow guide tap group into the valve position-local flow guide connection relationship based on the displacement order of the vacuum valve feedback opening sequence in the flow guide connection section. The valve position-local flow guide connection relationship is used to characterize the correspondence between the vacuum valve feedback opening displacement order and the local flow guide connection position.

[0047] The main control board also connects the boundary propagation beat group of the pump end boundary pressure in the pump-side sampling board to the swing response beat group of the cavity pressure deviation in the pressure sampling board along the back-receiving beat group, forming a flow conduction-cavity pressure receiving chain. In the flow conduction-cavity pressure receiving chain, the main control board extracts the initial local flow conduction beat group corresponding to the starting position of the cavity pressure deviation swing, and the continuing local flow conduction beat group corresponding to the continuation position of the cavity pressure deviation swing; and determines the front and back receiving positions between the local flow conduction beat group and the cavity pressure swing beat group according to the sequential positions of the initial local flow conduction beat group, the continuing local flow conduction beat group, and the corresponding cavity pressure swing beat group on the master clock beat axis, and then writes the front and back receiving positions into the flow conduction-cavity pressure receiving relationship.

[0048] To ensure that the flow conductance-cavity pressure connection and the valve position-local flow conductance connection are aligned within the same local flow conductance range, the main control board extracts the initial local flow conductance beat group corresponding to the first continuous swing of the cavity pressure deviation in the flow conductance-cavity pressure connection, and extracts the final local flow conductance beat group corresponding to the last continuous unidirectional displacement of the vacuum valve feedback opening in the valve position-local flow conductance connection. The main control board then defines the overlapping beat number interval or adjacent consecutive beat number interval of the initial and final local flow conductance beat groups on the master clock beat number axis as the same local flow conductance beat zone.

[0049] The main control board determines the preceding and following connection positions between the two types of connection relationships based on the starting position of the same local flow guide strip in the flow guide-cavity pressure connection relationship and the ending position of the same local flow guide strip in the valve position-local flow guide connection relationship, and writes the preceding and following connection positions into the flow guide-cavity pressure connection relationship. After this correction, the main control board merges the valve position-local flow guide connection relationship and the flow guide-cavity pressure connection relationship according to the connection endpoint of the same evacuation-pressure stabilization transition section, forming a transition section continuity relationship.

[0050] S103: The local flow conductance landing point is defined by the continuous swing stroke corresponding to the target pressure value in the flow conductance-cavity pressure relationship, and the valve position landing point is defined by the boundary propagation beat group corresponding to the pump end boundary pressure sequence in the valve position-local flow conductance relationship; the transition section connecting valve position is determined according to the correspondence between the local flow conductance landing point and the valve position landing point.

[0051] The main control board does not directly generate the vacuum valve switching position based on the target pressure value. Instead, it first determines the local flow conduction position corresponding to the target pressure value in the flow conduction-cavity pressure relationship, and then determines the valve position corresponding to the current pump end boundary pressure propagation state in the valve position-local flow conduction relationship. Since the vacuum valve switching position in the evacuation-stabilization transition section is simultaneously constrained by the process cavity pressure target, pump end boundary propagation, and the continuous movement state of the valve position, using only a single pressure position or a single valve position as the basis for connection cannot fully reflect the connection conditions under the current transitional operating condition. This step determines the transitional section connection valve position by separately defining the local flow conduction landing point and the valve position landing point, and then determining their correspondence in the same transitional section connection relationship. This ensures that the transitional section connection valve position simultaneously meets the requirement that the process cavity pressure approaches the target pressure value and the valve position connection requirement under the pump end boundary propagation direction. This process helps ensure that the determined transitional section connection valve position is established based on the actual connection relationship of the current transitional operating condition.

[0052] Furthermore, such as Figure 5 As shown, the main control board extracts the first and second cavity pressure tapping groups based on the flow conduction-cavity pressure reception relationship. These groups are located on both sides of the target pressure value and within the same continuous swing stroke. The first and second cavity pressure tapping groups correspond to adjacent swing positions of the cavity pressure deviation on both sides of the target pressure value. The main control board defines the continuous reception range between the local flow conduction tapping groups connected to the first and second cavity pressure tapping groups as the local flow conduction landing area.

[0053] The main control board determines the direction of pump end boundary pressure propagation based on the changing direction of the current pump end boundary pressure sequence within the boundary propagation beat group. It then extracts the first and second valve position beat groups from the valve position-local flow conduction relationship, ensuring they maintain the same sequential connection direction on the master clock beat axis as the direction of pump end boundary pressure propagation. The main control board defines the continuous valve position range between the valve positions connected to the first and second valve position beat groups as the valve position closure zone.

[0054] The main control board maps the local flow guide landing area and the valve position closure landing area to the same transition section connection relationship, and determines the common receiving position of the two in the transition section connection relationship as the local flow guide landing point and the valve position landing point.

[0055] Furthermore, the main control board extracts valve position beat groups that maintain continuity with the local flow guide landing area from the transition section connection relationship, and retains candidate beat groups for succession located within the current single-stroke displacement beat group from the valve position beat groups. The continuity means that the valve position beat groups can continuously correspond to the local flow guide landing area through the connection link in the transition section connection relationship.

[0056] In the successive candidate beat groups, the main control board selects valve positions that are located within the valve position landing area, and whose corresponding local flow guiding beat group and the current pump end boundary pressure propagation direction maintain the same sequential acceptance direction on the main clock beat number axis. The main control board then determines the local flow guiding landing point and valve position landing point based on the local flow guiding acceptance position and valve position acceptance position corresponding to the selected valve positions in the transition section succession relationship.

[0057] Subsequently, the main control board determines the valve position that corresponds to both the local flow guide landing point and the valve position landing point in the transition section connection relationship as the transition section connection valve position.

[0058] S104: The transition section connecting valve position is used as the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke.

[0059] The main control board determines the common valve position based on the local flow guide landing point and the valve position landing point within the transition section connection relationship, and uses this valve position as the transition section connection valve position. This transition section connection valve position is not directly given by a preset fixed opening, empirically switched valve positions, or a global mapping table, but is jointly defined by the local flow guide bearing relationship, cavity pressure swing relationship, and valve position bearing relationship within the current evacuation-pressure stabilization transition section. Therefore, the valve position landing point when the vacuum valve transitions from the evacuation stroke to the pressure stabilization stroke corresponds to the actual bearing position under the current operating condition. This process helps improve the accuracy of valve position connection between the evacuation stroke and the pressure stabilization stroke.

[0060] Furthermore, the step of using the transition section connecting valve position as the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke includes: The overlapping valve position of the local flow guide landing point and the valve position landing point in the transition section connection relationship is determined as the transition section connection valve position, and the valve control board card master clock number corresponding to the transition section connection valve position is written into the evacuation stroke termination clock position. The main control board reads the common valve position position of the local flow guide landing point and the valve position landing point in the transition section connection relationship, and determines this common valve position position as the transition section connection valve position. Subsequently, the main control board queries the master clock sequence number position of this transition section connection valve position in the valve control board, and writes this master clock sequence number to the evacuation stroke termination sequence number. Through this write operation, the vacuum valve evacuation stroke ends at the corresponding termination sequence number, and its ending position is the transition section connection valve position.

[0061] After writing the master clock sequence number corresponding to the transition section connection valve position into the evacuation stroke termination sequence position, the termination position of the evacuation stroke is no longer triggered solely by the single condition that the current pressure in the process chamber approaches the target pressure value. Instead, it is determined by the actual connection position formed in the current transition section connection relationship. This process helps to ensure that the termination position of the evacuation stroke is consistent with the local flow conduction connection state.

[0062] Write the same valve position corresponding to the transition section valve position into the starting position of the pressure stabilizing stroke, thus forming the valve position landing point when the vacuum valve transitions from the evacuation stroke to the pressure stabilizing stroke.

[0063] The main control board writes the master clock sequence number of the valve control board corresponding to the transition valve position to the evacuation stroke termination sequence number, and writes the valve position corresponding to the transition valve position to the pressure stabilization stroke start sequence number. The valve control board controls the vacuum valve to complete the switch from the evacuation stroke to the pressure stabilization stroke based on the evacuation stroke termination sequence number and the pressure stabilization stroke start sequence number.

[0064] Through the above processing, the valve position at which the vacuum valve transitions from the evacuation stroke to the pressure stabilization stroke is no longer determined by a fixed valve position or a single pressure deviation, but rather by the combined relationships of valve position-local flow conductance, flow conductance-cavity pressure, and transition segment continuity within the same evacuation-pressure stabilization transition section. This processing ensures that the initial valve position of the pressure stabilization stroke corresponds to the pump end boundary pressure propagation state, vacuum valve feedback opening displacement state, and cavity pressure swing state in the current process.

[0065] Example 3 Based on Examples 1 and 2, this example describes the control process of the present invention by combining the operation process of the process cavity from the evacuation state to the voltage stabilization state.

[0066] After the semiconductor process step begins, the vacuum pump evacuates the process chamber, and the vacuum valve is within its evacuation stroke. The pressure sampling board acquires the current pressure of the process chamber under a unified master clock cycle, the valve control board acquires the vacuum valve feedback opening under the same master clock cycle, and the pump-side sampling board acquires the pump end boundary pressure under the same master clock cycle. After receiving the above data, the main control board writes the current process chamber pressure, vacuum valve feedback opening, and pump end boundary pressure under the same master clock cycle into the same frame record, forming a cross-board synchronous frame series.

[0067] During the later stages of the evacuation process, the current pressure in the process chamber gradually approaches the target pressure value corresponding to the current process step. The main control board generates a chamber pressure deviation sequence based on the direction of the difference between the current and target pressure values. When the chamber pressure deviation shifts from one side of the target pressure value to the other, and a direction reversal occurs within a consecutive sequence of beats, the main control board extracts the consecutive beats covering this reversal process, forming a pressure swing-locking beat.

[0068] Simultaneously, the main control board determines the displacement direction of the vacuum valve between adjacent master clock beats based on the vacuum valve feedback opening sequence. When the vacuum valve feedback opening maintains the same displacement direction within consecutive beats and no reverse displacement occurs, the main control board identifies this consecutive beat group as a single-stroke displacement beat group. Subsequently, the main control board extracts consecutive frame segments from the cross-board synchronous frame series that simultaneously traverse the pressure swing lock beat group and whose start and end beat numbers are both within the single-stroke displacement beat group, as samples for the evacuation-stabilization transition section.

[0069] After obtaining the evacuation-stabilization transition section sample, the main control board extracts the leading edge beat group from the pump-end boundary pressure sequence, indicating the point where the pump-end boundary pressure begins to deviate from the previous pressure holding state, and extracts the trailing edge beat group from the cavity pressure deviation sequence, indicating the point where the pressure deviates in the opposite direction. The main control board defines the cross-board transmission section between the leading edge beat group and the trailing edge beat group, which is continuously distributed on the master clock beat axis, as a zigzag transmission chain. This zigzag transmission chain represents the beat sequence of the cavity pressure deviation zigzag response, where the change in pump-end boundary pressure is transmitted via the change in flow state corresponding to the vacuum valve feedback opening.

[0070] The main control board uses the leading edge beat group as the dividing position. The sample portion in the foldback transfer chain located before the leading edge beat group and corresponding to the continuous unidirectional displacement of the vacuum valve feedback opening is defined as the flow guide receiving segment. The sample portion in the foldback transfer chain located after the leading edge beat group and corresponding to the continuous swing of the cavity pressure deviation is defined as the cavity pressure receiving segment. To ensure that the two sample segments correspond to the same receiving benchmark, the main control board extracts the end valve position beat group in the flow guide receiving segment that is adjacent to or partially overlaps with the leading edge beat group on the master clock beat number axis, and extracts the beginning cavity pressure beat group in the cavity pressure receiving segment that is adjacent to or partially overlaps with the swing-back edge beat group on the master clock beat number axis. The two are then paired according to the master clock beat number position to form a foldback receiving beat group.

[0071] Within the flow-guiding section, the main control board extracts the valve position beat group where the vacuum valve feedback opening changes continuously in the same direction, and extracts the boundary propagation beat group where the pump end boundary pressure transitions from the previous pressure holding state to the boundary propagation state. When the valve position beat group and the boundary propagation beat group are adjacent, partially overlap, or connected by consecutive beat numbers on the master clock beat number axis, the main control board defines the beat number interval between them as the local flow-guiding beat group. The local flow-guiding beat group is used to characterize the intermediate receiving interval in which the vacuum valve feedback opening change is transmitted to the pump end boundary pressure propagation state.

[0072] Subsequently, the main control board, based on the displacement order of the vacuum valve feedback opening sequence in the flow guide receiving section, writes the preceding and following receiving positions between the valve position beat group and the local flow guide beat group into the valve position-local flow guide receiving relationship. Simultaneously, the main control board connects the boundary propagation beat group of the pump end boundary pressure along the return receiving beat group to the return swing response beat group of the cavity pressure deviation, forming a flow guide-cavity pressure receiving chain. Based on the sequential positions of the local flow guide beat group and the cavity pressure return swing beat group on the master clock beat axis, the preceding and following receiving positions between them are written into the flow guide-cavity pressure receiving relationship.

[0073] To ensure the valve position-side connection and the cavity pressure-side connection are aligned within the same local flow conductance interval, the main control board extracts the initial local flow conductance beat group corresponding to the first continuous swing of the cavity pressure deviation in the flow conductance-cavity pressure connection, and extracts the final local flow conductance beat group corresponding to the last continuous unidirectional displacement of the vacuum valve feedback opening in the valve position-local flow conductance connection. The main control board identifies the overlapping beat number interval or adjacent consecutive beat number interval of the initial and final local flow conductance beat groups on the master clock beat number axis as the same local flow conductance beat band, and determines the preceding and following connection positions between the two types of connections based on the corresponding positions of this same local flow conductance beat band in the two types of connections. After this correction, the main control board merges the valve position-local flow conductance connection and the flow conductance-cavity pressure connection into a transition section connection relationship.

[0074] After determining the transition section connection relationship, the main control board extracts the first and second cavity pressure tapping groups from the flow conduction-cavity pressure bearing relationship. These groups have cavity pressure values ​​located on both sides of the target pressure value and are within the same continuous swing stroke. The continuous bearing range between the local flow conduction tapping groups connected to the first and second cavity pressure tapping groups is defined as the local flow conduction landing area. This local flow conduction landing area is used to define the local flow conduction bearing range corresponding to the target pressure value in the current swing stroke.

[0075] Simultaneously, the main control board determines the direction of pump end boundary pressure propagation based on the changing direction of the current pump end boundary pressure sequence within the boundary propagation beat group. It then extracts the first and second valve position beat groups from the valve position-local flow conduction relationship, ensuring they maintain the same sequential connection direction on the master clock beat axis as the direction of pump end boundary pressure propagation. The main control board defines the continuous valve position range between the valve position positions connected to the first and second valve position beat groups as the valve position closure zone.

[0076] The main control board maps the local flow guide landing area and the valve position closure landing area to the same transition section connection relationship, and extracts the valve position beat group that maintains a connection with the local flow guide landing area. For the extracted valve position beat group, the main control board further retains the successor candidate beat group located within the current single-stroke displacement beat group, and selects the valve position from the successor candidate beat group whose valve position is located within the valve position landing area, and whose corresponding local flow guide beat group and the current pump end boundary pressure propagation direction maintain the same sequential connection direction on the master clock beat number axis.

[0077] The main control board determines the local flow guide receiving position and the valve position receiving position corresponding to the selected valve position in the transition section connection relationship as the local flow guide landing point and the valve position landing point, and determines the valve position corresponding to the local flow guide landing point and the valve position landing point together as the transition section connection valve position.

[0078] When the vacuum valve transitions from the evacuation stroke to the pressure stabilization stroke, the main control board writes the valve control board master clock sequence number corresponding to the transition section valve position to the evacuation stroke end sequence number, and writes the valve position corresponding to the transition section valve position to the pressure stabilization stroke start sequence number. The valve control board ends the evacuation stroke according to the evacuation stroke end sequence number, and controls the vacuum valve to enter the pressure stabilization stroke according to the pressure stabilization stroke start sequence number.

[0079] Through the above operation process, when the process chamber enters the pressure stabilization state from the evacuation state, the connecting valve position of the vacuum valve is not determined by a fixed switching valve position or a single pressure deviation, but is jointly limited by the pump end boundary pressure propagation state, vacuum valve feedback opening displacement state, local flow conduction state, and chamber pressure swing state within the current evacuation-pressure stabilization transition section.

[0080] Therefore, the end position of the evacuation stroke and the start position of the pressure stabilization stroke can be connected under the same transition section. This connection process is different from the method of triggering pressure stabilization control based on a fixed valve position, a preset pressure-valve position mapping relationship, or a single pressure deviation. Its connection valve position is jointly defined by the valve position displacement state, pump end boundary propagation state, local flow conduction state, and cavity pressure swing state within the current transition section.

[0081] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. An adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback, characterized in that, Includes the following steps: S101: Collect the current pressure sequence of the process chamber, the target pressure value, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence; according to the correspondence between the swing position where the chamber pressure deviation reverses direction relative to the target pressure value and the single-stroke displacement section of the vacuum valve, extract the evacuation-stabilization transition section sample, and according to the order of transmission from the pump end boundary pressure to the chamber pressure, decompose the evacuation-stabilization transition section sample into the flow conduction receiving section and the chamber pressure receiving section; S102: Establish the valve position-local flow conduction connection relationship based on the displacement order of the vacuum valve feedback opening sequence in the flow conduction connection section; establish the flow conduction-cavity pressure connection relationship based on the response order of the current pressure sequence of the process cavity in the cavity pressure connection section, and merge the valve position-local flow conduction connection relationship and the flow conduction-cavity pressure connection relationship into a transition section connection relationship according to the connection endpoint of the same evacuation-pressure stabilization transition section; S103: The local flow conductance landing point is defined by the continuous swing stroke corresponding to the target pressure value in the flow conductance-cavity pressure connection relationship, and the valve position landing point is defined by the boundary propagation beat group corresponding to the pump end boundary pressure sequence in the valve position-local flow conductance connection relationship; the transition section connecting valve position is determined according to the correspondence between the local flow conductance landing point and the valve position landing point. S104: The transition section connecting valve position is used as the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke.

2. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 1, characterized in that, The extraction of samples from the evacuation-stabilization transition section includes: The current pressure sequence of the process chamber output by the pressure sampling board, the vacuum valve feedback opening sequence output by the valve control board, and the pump end boundary pressure sequence output by the pump side sampling board are recombined into a cross-board synchronous frame series with each frame aligned according to a unified master clock beat number. In the cross-board simultaneous frame series, a pressure swing locking frame is formed by a continuous frame group in which the cavity pressure deviation changes from a single-sided deviation to a reverse deviation, and a single-stroke displacement frame group is formed by a frame group in which the vacuum valve feedback opening changes continuously along the same displacement direction. The simultaneous frame segments of cross-board cards that pass through the pressure swing lock group and whose start and end numbers are both within the single-stroke displacement group are extracted as samples of the evacuation-stabilization transition section.

3. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 2, characterized in that, The evacuation-stabilization transition section sample is decomposed into a flow conduction receiving section and a cavity pressure receiving section, including: Within the evacuation-stabilization transition section sample, the leading edge beat group at the boundary where the pump end boundary pressure begins to deviate from the previous pressure holding state is extracted, and the rear edge beat group at the reverse deviation of the cavity pressure is extracted. The cross-board transfer part continuously distributed on the main clock beat axis between the leading edge beat group and the rear edge beat group is determined as the foldback transfer chain. The sample section in the reversible transfer chain that is located before the leading edge of the boundary and whose displacement is continuously in the same direction as the vacuum valve feedback opening is defined as the flow guide receiving section, and the sample section in the reversible transfer chain that is located after the leading edge of the boundary and whose displacement is continuously swinging back with the cavity pressure deviation is defined as the cavity pressure receiving section.

4. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 3, characterized in that, The flow-conducting receiving section and the cavity pressure receiving section are corrected and limited based on the same cross-board foldback receiving relationship, including: Extract the last valve position beat group in the flow guide receiving section that is adjacent to or partially overlaps with the boundary leading edge beat group on the main clock beat axis, and extract the first cavity pressure beat group in the cavity pressure receiving section that is adjacent to or partially overlaps with the swing back edge beat group on the main clock beat axis. Pair the valve position beat group and the cavity pressure beat group according to their respective corresponding main clock beat positions to form a foldback receiving beat group. According to the return receiving beat group, the sample portion that is continuously connected forward to the return receiving beat group on the master clock beat number axis is retained as the flow guide receiving section, and the sample portion that is continuously connected backward to the return receiving beat group on the master clock beat number axis is retained as the cavity pressure receiving section.

5. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 1, characterized in that, Establishing the conductance-cavity pressure relationship includes: The boundary propagation beat group of the pump end boundary pressure in the pump-side sampling plate is connected to the swing response beat group of the cavity pressure deviation in the pressure sampling plate along the back bearing beat group, forming a flow conduction-cavity pressure bearing chain. In the flow conduction-cavity pressure bearing chain, the initial local flow conduction beat group corresponding to the starting position of the cavity pressure deviation swing and the continuous local flow conduction beat group corresponding to the continuation position of the cavity pressure deviation swing are extracted. Based on the sequential positions of the initial local flow guiding camera group, the continued local flow guiding camera group, and the corresponding cavity pressure return camera group on the master clock beat axis, the preceding and following connection positions between the local flow guiding camera group and the cavity pressure return camera group are determined, and these preceding and following connection positions are written into the flow guiding-cavity pressure connection relationship.

6. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 5, characterized in that, The flow conductance-cavity pressure bearing relationship is corrected and limited based on the same local flow conductance band, including: Extract the initial local flow guide group corresponding to the first continuous swing of the cavity pressure deviation in the flow guide-cavity pressure connection relationship, and extract the final local flow guide group corresponding to the last continuous same-direction displacement of the vacuum valve feedback opening in the valve position-local flow guide connection relationship. The overlapping or adjacent consecutive beat number intervals of the starting local flow guide group and the ending local flow guide group on the main clock beat number axis are defined as the same local flow guide zone. Based on the starting position of the same local flow guide strip in the flow guide-cavity pressure connection relationship and the ending position of the same local flow guide strip in the valve position-local flow guide connection relationship, the preceding and following connection positions between the two types of connection relationships are determined, and the preceding and following connection positions are written into the transition section connection relationship.

7. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 1, characterized in that, The defined local flow guide landing point and valve position landing point include: In the flow conduction-cavity pressure receiving relationship, the first cavity pressure tapping group and the second cavity pressure tapping group, whose cavity pressure values ​​are located on both sides of the target pressure value and within the same continuous swing tapping stroke, are extracted, and the continuous receiving range between the local flow conduction tapping groups connected to the first cavity pressure tapping group and the second cavity pressure tapping group is determined as the local flow conduction landing area. In the valve position-local flow conduction relationship, the pump end boundary pressure propagation direction is determined according to the change direction of the current pump end boundary pressure sequence in the boundary propagation beat group. The first valve position beat group and the second valve position beat group, which have the same sequential bearing direction as the pump end boundary pressure propagation direction on the master clock beat number axis, are extracted. The continuous valve position range between the valve position positions connected to the first valve position beat group and the second valve position beat group respectively is determined as the valve position landing area. The local flow guide landing area and the valve position landing area are mapped to the same transition section connection relationship, and the common receiving position of the two in the transition section connection relationship is determined as the local flow guide landing point and the valve position landing point.

8. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 7, characterized in that, The local flow guide landing point and valve position landing point are constrained by the current single-stroke displacement beat group, including: Extract valve position beat groups that maintain connection with the local flow guide landing area in the transition section connection relationship, and retain the successor candidate beat groups located in the current single stroke displacement beat groups from the valve position beat groups; In the successive candidate batches, the valve position is selected if it is located within the valve position area and its corresponding local flow guiding batch and the current pump end boundary pressure propagation direction are in the same sequential direction on the main clock batch number axis. The local flow guide receiving position and the valve position receiving position corresponding to the selected valve position in the transition section connection relationship are determined as the local flow guide landing point and the valve position landing point.

9. The adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback according to claim 8, characterized in that, The method of using the transition section connecting valve position as the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke includes: The valve position that corresponds to both the local flow guide landing point and the valve position landing point in the transition section connection relationship is determined as the transition section connection valve position. The valve control board card master clock number corresponding to the transition section connection valve position is written into the evacuation stroke termination clock position in the valve position connection control data. Write the valve position corresponding to the transition section connecting valve position into the pressure stabilization stroke start position in the valve position connecting control data to form the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke.

10. An adaptive control system for a semiconductor vacuum valve based on cavity pressure feedback, used to implement the adaptive control method for a semiconductor vacuum valve based on cavity pressure feedback as described in any one of claims 1-9, characterized in that, This includes pressure sampling boards, valve control boards, pump-side sampling boards, and main control boards; The pressure sampling board is used to collect the current pressure sequence of the process chamber, the valve control board is used to collect the vacuum valve feedback opening sequence and execute vacuum valve position control, and the pump-side sampling board is used to collect the pump end boundary pressure sequence. The pressure sampling board, the valve control board, and the pump-side sampling board are all communicatively connected to the main control board. The main control board includes a data acquisition and sample decomposition module, a connection relationship construction module, a valve position determination module, and a valve position connection control module. The data acquisition and sample decomposition module is used to acquire the current pressure sequence of the process chamber, the target pressure value, the vacuum valve feedback opening sequence, and the pump end boundary pressure sequence; according to the correspondence between the swing position where the chamber pressure deviation reverses direction relative to the target pressure value and the single-stroke displacement section of the vacuum valve, the evacuation-stabilization transition section sample is extracted, and according to the order of transmission from the pump end boundary pressure to the chamber pressure, the evacuation-stabilization transition section sample is decomposed into the flow conduction receiving section and the chamber pressure receiving section. The connection relationship construction module is used to establish a valve position-local flow conduction connection relationship based on the displacement order of the vacuum valve feedback opening sequence in the flow conduction connection section; to establish a flow conduction-cavity pressure connection relationship based on the response order of the current pressure sequence of the process cavity in the cavity pressure connection section; and to merge the valve position-local flow conduction connection relationship and the flow conduction-cavity pressure connection relationship into a transition section connection relationship according to the connection endpoint of the same evacuation-pressure stabilization transition section. The connecting valve position determination module is used to limit the local flow conduction landing point by the continuous swing stroke corresponding to the target pressure value in the flow conduction-cavity pressure connection relationship, and to limit the valve position landing point by the boundary propagation beat group corresponding to the pump end boundary pressure sequence in the valve position-local flow conduction connection relationship; and to determine the transition section connecting valve position according to the correspondence between the local flow conduction landing point and the valve position landing point; The valve position connection control module is used to determine the transition section connection valve position as the valve position landing point when the vacuum valve switches from the evacuation stroke to the pressure stabilization stroke.

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