Reflection power management method, buck response device and radio frequency power supply equipment

Abstract

This application provides a reflection power management method, a buck response device, and an RF power supply device. The reflection power management method is applied to the buck response device, which includes N capacitor-selected branches positioned between a DC power supply and an RF power amplifier. The reflection power management method includes: continuously detecting the reflection power of the RF power amplifier at a first preset interval to obtain a reflection power detection value. When any obtained reflection power detection value exceeds a protection threshold, at least based on the currently obtained reflection power detection value, a required buck response level L is determined. L of the N capacitor-selected branches are controlled to be in an open state, disconnecting the power transmission path between the DC power supply and the RF power amplifier, thereby reducing the voltage supplied by the DC power supply to the RF power amplifier. This application can provide fast, reliable, and graded buck management of the reflection power of the RF power amplifier.

Description

Technical Field

[0001] This application relates to the field of radio frequency technology, and in particular to a reflection power management method, a buck response device, and a radio frequency power supply device. Background Technology

[0002] Currently, with the application and popularization of radio frequency (RF) technology, RF power supply equipment is widely used in plasma processing, medical equipment, communication systems, and other fields. During the application of RF power supply equipment, due to changes in load impedance or other reasons, RF power amplifiers may generate significant reflected power, leading to overheating, breakdown, or even permanent damage to electronic components within the RF power amplifier, severely impacting the reliability and lifespan of the RF power supply. Therefore, how to achieve rapid, reliable, and graded control of the reflected power of RF power amplifiers through voltage reduction management has become a problem that needs to be considered. Summary of the Invention

[0003] This application provides a reflection power management method, a buck response device, and an RF power supply device, which can perform fast, reliable, and graded buck management of the reflection power of an RF power amplifier device.

[0004] Firstly, a reflection power management method is provided, applied to a buck response device. The buck response device includes N capacitor-selected branches, which are positioned between a DC power supply and an RF power amplifier. Each capacitor-selected branch has an on state and an off state, where N is an integer greater than or equal to 2. The reflection power management method includes: continuously detecting the reflection power of the RF power amplifier at a first preset interval to obtain a reflection power detection value. When any obtained reflection power detection value is greater than a protection threshold, at least based on the currently obtained reflection power detection value, a required buck response level L is determined, where L is an integer between 1 and N. L of the N capacitor-selected branches are controlled to be in an off state, disconnecting the power transmission path between the DC power supply and the RF power amplifier, thereby reducing the voltage value supplied by the DC power supply to the RF power amplifier.

[0005] In one possible implementation, the N capacitor-selecting branches are connected in parallel between the DC power supply and the RF power amplifier. Each capacitor-selecting branch includes a capacitor unit and a switching unit. The switching unit is disposed in the power transmission path between the DC power supply and the RF power amplifier, and the capacitor unit is connected to the power transmission path between the DC power supply and the RF power amplifier. Controlling L of the N capacitor-selecting branches to be in an open state includes: controlling L of the N switching units to open, thereby placing the L capacitor-selecting branches in an open state.

[0006] In one possible implementation, determining the required voltage reduction response level L based at least on the currently acquired reflected power detection value includes: determining the required voltage reduction response level L by looking up a table using a preset mapping relationship between reflected power detection values ​​and voltage reduction response levels, based on the currently acquired reflected power detection value. Alternatively, the required voltage reduction response level L can be determined based on the difference between the currently acquired reflected power detection value and the protection threshold and / or the difference between the currently acquired reflected power detection value and the previously acquired reflected power detection value.

[0007] In one possible implementation, controlling L of the N capacitor selection branches to be in an open state includes: controlling L of the N capacitor selection branches to be in an open state sequentially at a second preset interval, such that the i-th capacitor selection branch is in an open state after a second preset interval following the opening of the (i-1)-th capacitor selection branch, where i is an integer between 1 and L.

[0008] In one possible implementation, the capacitance value of the k-th capacitor unit is C×2^(k-1), where C is the unit capacitance value and k is an integer between 1 and N.

[0009] In one possible implementation, the reflected power management method further includes: when the reflected power detection value obtained in any instance is less than or equal to the protection threshold, controlling all N capacitor selection branches to be in the conducting state, so that the power transmission path between the DC power supply and the RF power amplifier device is conducted, so as to maintain the voltage value of the DC power supply to the RF power amplifier device as the target voltage value.

[0010] In one possible implementation, the reflection power management method further includes: when L capacitor selection branches are in the off state, continuously detecting the voltage value of the RF power amplifier at a third preset interval to obtain a voltage detection value. If any voltage detection value obtained is greater than a safety threshold, controlling at least one capacitor selection branch in the on state to switch to the off state, or controlling the RF power amplifier to stop working.

[0011] In one possible implementation, when the L capacitor selection branches are in the off state, the voltage value of the RF power amplifier device is continuously detected at a third preset interval. After obtaining the voltage detection value, the reflection power management method further includes: when any voltage detection value obtained is less than the recovery threshold, controlling the L capacitor selection branches in the off state to switch to the on state.

[0012] Secondly, a buck response device is also provided, comprising N capacitor-selective branches, a detection unit, and a control unit. The N capacitor-selective branches are positioned between a DC power supply and an RF power amplifier device. Each capacitor-selective branch has an on state and an off state, where N is an integer greater than or equal to 2. The detection unit continuously detects the reflected power of the RF power amplifier device at a first preset interval, acquiring a reflected power detection value. The control unit, when any acquired reflected power detection value exceeds a protection threshold, determines at least the required buck response level L based on the currently acquired reflected power detection value, where L is an integer between 1 and N, and controls L of the N capacitor-selective branches to be in the off state, disconnecting the power transmission path between the DC power supply and the RF power amplifier device, thereby reducing the voltage value supplied by the DC power supply to the RF power amplifier device.

[0013] Thirdly, a radio frequency (RF) power supply device is also provided, comprising a DC power supply, an RF power amplifier, and a buck response device. The DC power supply outputs DC power. The RF power amplifier converts the DC power into RF power. The buck response device manages the reflected power of the RF power amplifier. The buck response device includes N capacitor-selective branches, a detection unit, and a control unit. The N capacitor-selective branches are positioned between the DC power supply and the RF power amplifier, each having an on state and an off state, where N is an integer greater than or equal to 2. The detection unit continuously detects the reflected power of the RF power amplifier at a first preset interval to obtain a reflected power detection value. The control unit is used to determine the required buck response level L based at least on the currently acquired reflection power detection value when the reflected power detection value is greater than the protection threshold, where L is an integer between 1 and N, and controls L of the N capacitor selection branches to be in the disconnected state, disconnecting the power transmission path between the DC power supply and the RF power amplifier device, so as to reduce the voltage value of the DC power supply to the RF power amplifier device.

[0014] The reflected power management method, buck response device, and RF power supply equipment of this application continuously detect the reflected power of the RF power amplifier device at a first preset interval. When the detected reflected power value exceeds the protection threshold, the required buck response level L is dynamically determined based on the current detected value. This allows for the disconnection of L capacitor selection branches, thereby achieving graded voltage reduction from the DC power supply to the RF power amplifier device. Furthermore, by directly disconnecting the corresponding capacitor selection branches, the reflected power of the RF power amplifier device can be managed quickly and reliably. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.

[0016] Figure 1 This is a first flowchart of a reflection power management method in some embodiments of this application.

[0017] Figure 2 This is a second flowchart of a reflection power management method in some embodiments of this application.

[0018] Figure 3 This is a third flowchart of a reflection power management method in some embodiments of this application.

[0019] Figure 4 This is a fourth flowchart of a reflection power management method in some embodiments of this application.

[0020] Figure 5 This is a fifth flowchart of a reflection power management method in some embodiments of this application.

[0021] Figure 6 This is a sixth flowchart of a reflection power management method in some embodiments of this application.

[0022] Figure 7 This is the seventh flowchart of a reflection power management method in some embodiments of this application.

[0023] Figure 8 This is the eighth flowchart of a reflection power management method in some embodiments of this application.

[0024] Figure 9 This is a schematic diagram of a voltage reduction response device in some embodiments of this application.

[0025] Figure 10 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application.

[0026] Explanation of reference numerals in the attached figures: 10, step-down response device; 100, capacitor selection branch; 110, capacitor unit; 120, switching unit; 300, control unit; 200, detection unit; 20, DC power supply; 30, RF power amplifier device; 1, RF power supply equipment. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0028] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0029] In the description of the embodiments of this application, it should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein.

[0030] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or server that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0031] Please see Figure 1 , Figure 1 This is a first flowchart of a reflection power management method according to some embodiments of this application. This application provides a reflection power management method applied to a buck response device. The buck response device includes N capacitor-selective branches, which are positioned between a DC power supply and an RF power amplifier. Each capacitor-selective branch has an on state and an off state, where N is an integer greater than or equal to 2. For example... Figure 1 As shown, the reflection power management method includes: Step S100: Continuously detect the reflected power of the RF power amplifier device at a first preset interval to obtain the reflected power detection value.

[0032] Step S200: When the detected value of reflected power obtained in any instance is greater than the protection threshold, the required step-down response level L shall be determined at least based on the detected value of reflected power obtained in the current instance, where L is an integer between 1 and N.

[0033] Step S300: Control L of the N capacitor selection branches to be in the open state, disconnect the power transmission path between the DC power supply and the RF power amplifier device, so as to reduce the voltage value of the DC power supply to the RF power amplifier device.

[0034] The reflection power management method further includes: controlling the other NL capacitor selection branches to be in the conducting state, and supplying power to the RF power amplifier device through at least one of the other NL capacitor selection branches.

[0035] Furthermore, the N capacitor selection branches are connected in series, and at least one of the other NL capacitor selection branches is a capacitor selection branch close to the RF power amplifier device, that is, it is in the on state, and there is no capacitor selection branch in the off state between it and the RF power amplifier device.

[0036] Therefore, the above-mentioned reflection power management method in this application continuously detects the reflection power of the RF power amplifier device at a first preset interval, and dynamically determines the required step-down response level L based on the current detection value when the reflection power detection value exceeds the protection threshold, thereby controlling the disconnection of L capacitor selection branches to realize the step-down reduction of DC power supply to the RF power amplifier device. By directly disconnecting the corresponding capacitor selection branches, the reflection power of the RF power amplifier device can be managed quickly and reliably.

[0037] Specifically, the staged disconnection strategy using capacitor-selected branches allows for precise voltage reduction based on the severity of reflected power. The remaining capacitor-selected branches provide freewheeling current to the RF power amplifier, preventing system malfunctions or load fluctuations caused by sudden voltage drops. Furthermore, since the capacitor-selected branches can change the equivalent series capacitance or filtering characteristics simply by switching them on and off, their response speed is fast, completing the voltage reduction action in microseconds or even less, effectively handling sudden spikes in reflected power. Secondly, N branches can provide 2^N different voltage reduction combinations, achieving a wide range of voltage regulation with fewer branches, reducing the complexity and cost of the buck response device.

[0038] In some embodiments, the value of N can be determined based on one or more of the required buck range, response speed, and size of the buck response device. For example, the value of N can be 4 or 5, which can meet the reflection power protection requirements of most RF power amplifier devices without excessively increasing the complexity of switching control.

[0039] In some embodiments, the value of L can be equal to N to make full use of the N capacitor-gated branches.

[0040] In some embodiments, in order to obtain a more uniform voltage reduction effect, the capacitor selection branch with the smaller capacitance value is usually disconnected first, or the capacitor selection branches are disconnected sequentially in a preset order.

[0041] Please see Figure 2 , Figure 2This is a second flowchart of a reflection power management method in some embodiments of this application. N capacitor-selecting branches are connected in parallel between the DC power supply and the RF power amplifier device. Each capacitor-selecting branch includes a capacitor unit and a switching unit. The switching unit is located in the power transmission path between the DC power supply and the RF power amplifier device, and the capacitor unit is connected in the power transmission path between the DC power supply and the RF power amplifier device. Wherein, as... Figure 2 As shown, the reflection power management method may include: Step S100: Continuously detect the reflected power of the RF power amplifier device at a first preset interval to obtain the reflected power detection value.

[0042] Step S200: When the detected value of reflected power obtained in any instance is greater than the protection threshold, the required step-down response level L shall be determined at least based on the detected value of reflected power obtained in the current instance, where L is an integer between 1 and N.

[0043] Step S310: Control L switches in the N switching units to open, so that the L capacitor selection branches are in the open state, disconnecting the power transmission path between the DC power supply and the RF power amplifier device, so as to reduce the voltage value of the DC power supply to the RF power amplifier device.

[0044] Among them, such as Figure 2 Step S310 shown can also be as follows: Figure 1 The sub-step of step S300 shown. That is, as... Figure 1 , Figure 2 As shown, step S300 controls L of the N capacitor selection branches to be in an open state, which may specifically include: step S310 controls L of the N switching units to be turned off, so that the L capacitor selection branches are in an open state.

[0045] Therefore, the reflected power management method described in this application, by arranging N capacitor selection branches in parallel, with each branch containing a switching unit connected in series in the power transmission path and a capacitor unit connected thereto, allows for the direct disconnection of L switching units when voltage reduction is needed, thereby quickly cutting off the corresponding L capacitor units. Furthermore, by designing the capacitance value of each capacitor unit, the voltage drop caused by disconnecting each switching unit can be precisely controlled. In addition, since only L switching units are disconnected, the remaining NL capacitor units remain connected to the RF power amplifier, allowing the RF power amplifier to still receive a certain voltage to maintain low-voltage operation or standby mode. This avoids instantaneous interruption of RF output, process failure, or data loss caused by hard shutdown, improving robustness and process continuity.

[0046] The capacitor unit can be connected to ground at any point on the power transmission path between the DC power supply and the RF power amplifier.

[0047] Please refer to the following: Figure 3 , Figure 4 , Figure 3 This is a third flowchart of the reflection power management method in some embodiments of this application. Figure 4 This is a fourth flowchart of a reflection power management method in some embodiments of this application. In some embodiments, such as Figure 3 As shown, the reflection power management method may include: Step S100: Continuously detect the reflected power of the RF power amplifier device at a first preset interval to obtain the reflected power detection value.

[0048] Step S210: When the detected reflected power value is greater than the protection threshold at any time, the required voltage reduction response level L is determined by looking up a table based on the current detected reflected power value and the preset mapping relationship between the detected reflected power value and the voltage reduction response level, where L is an integer between 1 and N.

[0049] Step S300: Control L of the N capacitor selection branches to be in the open state, disconnect the power transmission path between the DC power supply and the RF power amplifier device, so as to reduce the voltage value of the DC power supply to the RF power amplifier device.

[0050] Therefore, the above-mentioned reflected power management method in this application determines L by looking up a table based on the preset mapping relationship between the reflected power detection value and the buck response level, avoiding complex real-time calculations. It can determine the number of capacitor selection branches to be disconnected in a very short time after the reflected power exceeds the limit, further improving the real-time performance of the buck response. At the same time, the mapping relationship can be flexibly preset according to the tolerance characteristics and process requirements of different RF power amplifier devices, making the buck strategy highly adaptable to specific application scenarios. Under the premise of ensuring the protection effect, it minimizes unnecessary voltage drop and maintains the stability of system operation.

[0051] In other embodiments, such as Figure 4 As shown, the reflection power management method may also include: Step S100: Continuously detect the reflected power of the RF power amplifier device at a first preset interval to obtain the reflected power detection value.

[0052] Step S220: When the reflected power detection value obtained in any instance is greater than the protection threshold, determine the required step-down response level L based on the difference between the current reflected power detection value and the protection threshold and / or the difference between the current reflected power detection value and the previous reflected power detection value, where L is an integer between 1 and N.

[0053] Step S300: Control L of the N capacitor selection branches to be in the open state, disconnect the power transmission path between the DC power supply and the RF power amplifier device, so as to reduce the voltage value of the DC power supply to the RF power amplifier device.

[0054] Among them, such as Figure 3 Step S210 as shown and as Figure 4 Step S220 shown can also be as follows: Figure 1 The sub-steps of step S200 shown. That is, as... Figure 1 , Figure 3 , Figure 4 As shown, step S200, which determines the required voltage reduction response level L based at least on the currently acquired reflected power detection value, may specifically include: step S210 determining the required voltage reduction response level L by looking up a table based on the currently acquired reflected power detection value through a preset mapping relationship between reflected power detection values ​​and voltage reduction response levels; or step S220 determining the required voltage reduction response level L based on the difference between the currently acquired reflected power detection value and the protection threshold and / or the difference between the currently acquired reflected power detection value and the previously acquired reflected power detection value.

[0055] Therefore, the reflected power management method described above in this application determines the step-down response level L based on the difference between the currently acquired reflected power detection value and the protection threshold and / or the difference between the previously acquired reflected power detection value. This allows the selection of the step-down amplitude to not only reflect the absolute degree of deviation of the current reflected power from the safety threshold (e.g., the larger the difference, the larger L, achieving stronger step-down protection), but also to reflect the changing trend of the reflected power. For example, when the current value rises rapidly compared to the previous value, a higher level of step-down is adopted in advance, and when the current value tends to stabilize or decrease, excessive step-down is avoided. This achieves an adaptive response to the dynamic characteristics of the reflected power, thus providing greater flexibility and robustness in scenarios where the reflected power fluctuates drastically or the rate of change is unpredictable. It can quickly increase the step-down level to protect the RF power amplifier device when the reflected power rises sharply, and avoid unnecessary over-stepping when the reflected power slightly exceeds the limit, achieving a better balance between protection effect and continuous operation capability.

[0056] Please see Figure 5 , Figure 5 This is a fifth flowchart of a reflection power management method in some embodiments of this application. Figure 5 As shown, the reflection power management method may include: Step S100: Continuously detect the reflected power of the RF power amplifier device at a first preset interval to obtain the reflected power detection value.

[0057] Step S200: When the detected value of reflected power obtained in any instance is greater than the protection threshold, the required step-down response level L shall be determined at least based on the detected value of reflected power obtained in the current instance, where L is an integer between 1 and N.

[0058] Step S320: Control L of the N capacitor selection branches to be in the open state in sequence at a second preset interval, so that the i-th capacitor selection branch is in the open state after a second preset interval after the (i-1)-th capacitor selection branch is opened, where i is an integer between 1 and L. Disconnect the power transmission path between the DC power supply and the RF power amplifier device to reduce the voltage value of the DC power supply to the RF power amplifier device.

[0059] Among them, such as Figure 5 Step S320 shown can also be as follows: Figure 1 Another sub-step of step S300 shown. That is, as... Figure 1 , Figure 5 As shown, step S300 controls L of the N capacitor selection branches to be in an open state, which may specifically include: step S320 controlling L of the N capacitor selection branches to be in an open state sequentially at a second preset interval, such that the i-th capacitor selection branch is in an open state after the (i-1)-th capacitor selection branch is opened, delayed by a second preset interval, where i is an integer between 1 and L.

[0060] Therefore, the above-mentioned reflected power management method in this application controls the L capacitor selection branches to be disconnected sequentially at a second preset interval, that is, disconnecting one capacitor selection branch at a fixed second preset time interval. This ensures that the i-th capacitor selection branch is disconnected only after the (i-1)-th capacitor selection branch is disconnected, which delays the disconnection by the second preset interval. This avoids the instantaneous voltage drop caused by the simultaneous disconnection of the L capacitor selection branches, and distributes the voltage drop process across multiple second preset intervals to complete it gradually. This significantly reduces the current surge and voltage overshoot risk of voltage mutations on the RF power amplifier device, which is beneficial for maintaining the basic operating state of the RF power amplifier device during the voltage reduction process. It also avoids secondary faults or protection malfunctions caused by drastic voltage fluctuations, further improving the smoothness of the reflected power protection action and the system reliability.

[0061] Furthermore, the capacitance value of the k-th capacitor unit is C×2^(k-1), where C is the unit capacitance value and k is an integer between 1 and N.

[0062] Therefore, the above-mentioned reflection power management method in this application sets the capacitance value of the capacitor unit in the k-th capacitor selection branch to C×2^(k-1), that is, the binary weight increases, so that when the N capacitor selection branches are turned on or off, the equivalent total capacitance value can be precisely adjusted in steps of C within the range of 0 to C×(2^k-1). When L branches are controlled to be disconnected according to the voltage drop response level L, since the capacitance values ​​of each branch are in a binary weight relationship, it is possible to flexibly select which L branches to disconnect to approximate any desired capacitance reduction, thereby achieving fine control of the voltage drop of the RF power amplifier device, and better adapting to the differentiated requirements of the power supply voltage drop for different reflection power severity levels.

[0063] Please see Figure 6 , Figure 6 This is a sixth flowchart of a reflection power management method in some embodiments of this application. Figure 6 As shown, the reflection power management method may include: Step S100: Continuously detect the reflected power of the RF power amplifier device at a first preset interval to obtain the reflected power detection value.

[0064] Step S200: When the detected value of reflected power obtained in any instance is greater than the protection threshold, the required step-down response level L shall be determined at least based on the detected value of reflected power obtained in the current instance, where L is an integer between 1 and N.

[0065] Step S400: When the detected value of reflected power is less than or equal to the protection threshold, control all N capacitor selection branches to be in the conducting state, so that the power transmission path between the DC power supply and the RF power amplifier is connected, so as to maintain the voltage value of the DC power supply to the RF power amplifier as the target voltage value.

[0066] Therefore, the above-mentioned reflected power management method in this application controls all N capacitor selection branches to be in a conducting state when the reflected power detection value is less than or equal to the protection threshold, so that the power transmission path between the DC power supply and the RF power amplifier device is fully connected, and the power supply voltage automatically recovers to the target voltage value. This realizes the automatic recovery function after the reflected power exceeds the protection limit. The normal power supply of the RF power amplifier device can be quickly restored when the reflected power returns to the safe range without external intervention, ensuring the continuity of the process and the working efficiency of the RF power amplifier device. At the same time, since the recovery condition is directly related to the protection threshold, the oscillation phenomenon caused by frequent switching near the threshold is avoided. The recovery action is only performed when the reflected power has indeed fallen back to the safe range, which takes into account both the reliability of protection and the stability of system operation.

[0067] Please see Figure 7 , Figure 7This is the seventh flowchart of a reflection power management method in some embodiments of this application. Figure 7 As shown, the reflection power management method may include: Step S500: When the L capacitor selection branches are in the open state, the voltage value of the RF power amplifier is continuously detected at a third preset interval to obtain the voltage detection value.

[0068] Step S600: When the voltage detection value obtained in any instance is greater than the safety threshold, control at least one capacitor selection branch that is in the conducting state to switch to the disconnected state, or control the RF power amplifier device to stop working.

[0069] Among them, such as Figure 7 Step S500 shown can also be as follows: Figure 1 Following step S300, the reflection power management method further includes the following steps: [e.g., ...] Figure 1 , Figure 7 As shown, in step S300: after controlling L of the N capacitor selection branches to be in the open state, disconnecting the power transmission path between the DC power supply and the RF power amplifier device, so as to reduce the voltage value of the DC power supply to the RF power amplifier device, the reflection power management method may further include: Step S500: When the L capacitor selection branches are in the open state, the voltage value of the RF power amplifier is continuously detected at a third preset interval to obtain the voltage detection value.

[0070] Therefore, the above-mentioned reflected power management method in this application, based on the fact that L capacitor selection branches have been disconnected according to the reflected power exceeding the limit, further continuously detects the voltage value of the RF power amplifier device at a third preset interval, and when the voltage detection value exceeds the safety threshold, controls at least one capacitor selection branch that is still in the conducting state to switch to the disconnected state to continue to reduce the supply voltage, or directly controls the RF power amplifier device to stop working. This introduces a further protection mechanism based on voltage monitoring, effectively avoiding overvoltage damage to the RF power amplifier device caused by insufficient voltage reduction due to reflected power protection. It can also flexibly select according to the severity of the voltage exceeding the limit, thereby maintaining the continuous operation capability of the RF power amplifier device as much as possible while ensuring the safety of the power amplifier device, and further improving the reliability and adaptability of the reflected power management method.

[0071] Please see Figure 8 , Figure 8 This is the eighth flowchart of a reflection power management method in some embodiments of this application. Figure 8 As shown, the reflection power management method may include: Step S500: When the L capacitor selection branches are in the open state, the voltage value of the RF power amplifier is continuously detected at a third preset interval to obtain the voltage detection value.

[0072] Step S700: When the voltage detection value obtained in any instance is less than the recovery threshold, control the L capacitor selection branches that are in the off state to switch to the on state.

[0073] Therefore, the above-mentioned reflected power management method in this application continuously detects the voltage value of the RF power amplifier device at a third preset interval during the buck protection period when the L capacitor selection branches are in the open state. When the voltage detection value is less than the recovery threshold, it controls all the originally open L capacitor selection branches to switch to the conducting state. In the case where the reflected power has fallen back and the voltage is too low to affect the normal operation of the power amplifier, it can automatically restore the supply voltage to the normal level, avoiding insufficient power amplifier output power or abnormal process interruption caused by long-term buck state. At the same time, the setting of the recovery threshold is independent of the safety threshold and protection threshold, and can be flexibly adjusted according to the minimum operating voltage requirement of the RF power amplifier device, ensuring that the voltage recovery action is only performed under the premise of actual need and safety, further improving the intelligence level and process continuity of the system.

[0074] Among them, such as Figures 2-6 For details of step S100 shown, please refer to [reference needed]. Figure 1 The details of step S100 shown will not be repeated here.

[0075] Among them, such as Figure 2 , Figure 5 , Figure 6 For details of step S200 shown, please refer to the following: Figure 1 The details of step S200 shown will not be repeated here.

[0076] Among them, such as Figure 3 , Figure 4 For details of step S300 shown, please refer to the following: Figure 1 The details of step S300 shown will not be repeated here.

[0077] The reflected power management method of this application, through the above steps, continuously detects the reflected power and dynamically determines the voltage reduction response level L according to its severity when it exceeds the limit. Then, it controls the disconnection of L capacitor selection branches to achieve graded voltage reduction. At the same time, combined with voltage monitoring and automatic recovery mechanism, it can avoid process interruption caused by sudden drop in power supply voltage or hard shutdown while quickly responding to sudden changes in reflected power and effectively protecting the RF power amplifier device. It can also automatically restore normal power supply when the reflected power drops or the voltage is too low, thereby significantly improving the flexibility, reliability and process continuity of reflected power management.

[0078] Please see Figure 9 , Figure 9 This is a schematic diagram of a voltage reduction response device in some embodiments of this application. For example... Figure 9As shown, this application also provides a buck response device 10, which includes N capacitor-selective branches 100, a detection unit 200, and a control unit 300. The N capacitor-selective branches 100 are configured between a DC power supply 20 and an RF power amplifier device 30. Each capacitor-selective branch 100 has an on state and an off state, where N is an integer greater than or equal to 2. The detection unit 200 continuously detects the reflected power of the RF power amplifier device 30 at a first preset interval to obtain a reflected power detection value. The control unit 300, when any obtained reflected power detection value is greater than a protection threshold, determines at least the required buck response level L based on the currently obtained reflected power detection value, where L is an integer between 1 and N, and controls L of the N capacitor-selective branches 100 to be in an off state, disconnecting the power transmission path between the DC power supply 20 and the RF power amplifier device 30 to reduce the voltage value supplied by the DC power supply 20 to the RF power amplifier device 30.

[0079] like Figure 9 As shown, N capacitor selection branches 100 are connected in parallel between the DC power supply 20 and the RF power amplifier device 30. Each capacitor selection branch 100 includes a capacitor unit 110 and a switching unit 120. The switching unit 120 is located in the power transmission path between the DC power supply 20 and the RF power amplifier device 30, and the capacitor unit 110 is connected to the power transmission path between the DC power supply 20 and the RF power amplifier device 30.

[0080] The operations performed by the buck response device 10 or the control unit 300 correspond to the steps in the reflection power management method of any of the foregoing embodiments. Further operations that the buck response device 10 or the control unit 300 can perform are detailed in the relevant content of the reflection power management method of any of the foregoing embodiments, and will not be repeated here.

[0081] The detection unit 200 is mainly used to perform the relevant steps of detecting the reflected power and voltage value of the RF power amplifier device 30 in the above-mentioned reflection power management method. The detection unit 200 may include detection circuits such as power detection circuit and voltage detection circuit.

[0082] The control unit 300 is mainly used to execute other specific steps of the above-mentioned reflection power management method. The control unit 300 may include a processor, which may be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), application specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, or other logic control devices. It may also be a microprocessor such as a micro control unit (MCU).

[0083] The reflected power management method and buck response device 10 of this application, through the above steps and structure, continuously detects the reflected power and dynamically determines the buck response level L according to its severity when it exceeds the limit, thereby controlling the disconnection of L capacitor selection branches to achieve graded bucking. At the same time, combined with voltage monitoring and automatic recovery mechanism, it can avoid process interruption caused by sudden drop in power supply voltage or hard shutdown while quickly responding to sudden changes in reflected power and effectively protecting the RF power amplifier device 30. It can also automatically restore normal power supply when the reflected power drops or the voltage is too low, thereby significantly improving the flexibility, reliability and process continuity of reflected power management.

[0084] Please see Figure 10 , Figure 10 This is a schematic diagram of a radio frequency power supply device in some embodiments of this application. For example... Figure 10 As shown, this application also provides an RF power supply device 1, which includes a DC power supply 20, an RF power amplifier 30, and a buck response device 10. The DC power supply 20 is used to output DC power. The RF power amplifier 30 is used to convert DC power into RF power. The buck response device 10 is used to manage the reflected power of the RF power amplifier 30.

[0085] Please refer to it again. Figure 9 .like Figure 9As shown, the buck response device 10 includes N capacitor-selective branches 100, a detection unit 200, and a control unit 300. The N capacitor-selective branches 100 are positioned between a DC power supply 20 and an RF power amplifier device 30. Each capacitor-selective branch 100 has an on state and an off state, where N is an integer greater than or equal to 2. The detection unit 200 continuously detects the reflected power of the RF power amplifier device 30 at a first preset interval, acquiring a reflected power detection value. The control unit 300, when any acquired reflected power detection value exceeds a protection threshold, determines the required buck response level L based at least on the currently acquired reflected power detection value, where L is an integer between 1 and N, and controls L of the N capacitor-selective branches 100 to be in the off state, disconnecting the power transmission path between the DC power supply 20 and the RF power amplifier device 30, thereby reducing the voltage value supplied by the DC power supply 20 to the RF power amplifier device 30.

[0086] For a more detailed description of the structure of the buck response device 10, please refer to the relevant content of the buck response device 10 in any of the foregoing embodiments, which will not be repeated here.

[0087] The reflected power management method, buck response device 10, and RF power supply device 1 of this application, through the above steps and structure, continuously detect the reflected power and dynamically determine the buck response level L according to its severity when it exceeds the limit, thereby controlling the disconnection of L capacitor selection branches to achieve graded bucking. At the same time, combined with voltage monitoring and automatic recovery mechanism, it can avoid process interruption caused by sudden drop in power supply voltage or hard shutdown while quickly responding to sudden changes in reflected power and effectively protecting the RF power amplifier device 30. It can also automatically restore normal power supply when the reflected power drops or the voltage is too low, thereby significantly improving the flexibility, reliability, and process continuity of reflected power management.

[0088] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Where there is no conflict, the embodiments and features in the embodiments of this application can be combined with each other. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A reflection power management method, applied to a buck response device, characterized in that, The buck response device includes N capacitor gate branches, which are used to be set between a DC power supply and an RF power amplifier device. Each capacitor gate branch has an on state and an off state, where N is an integer greater than or equal to 2. The reflection power management method includes: The reflected power of the radio frequency power amplifier device is continuously detected at a first preset interval to obtain the reflected power detection value; If the detected reflected power value is greater than the protection threshold at any time, the required voltage reduction response level L shall be determined at least based on the detected reflected power value at the current time, where L is an integer between 1 and N; By controlling L of the N capacitor selection branches to be in the open state, the power transmission path between the DC power supply and the RF power amplifier is disconnected, thereby reducing the voltage value of the DC power supply to the RF power amplifier.

2. The reflection power management method according to claim 1, characterized in that, The N capacitor selection branches are connected in parallel between the DC power supply and the RF power amplifier device. Each capacitor selection branch includes a capacitor unit and a switching unit. The switching unit is located in the power transmission path between the DC power supply and the RF power amplifier device, and the capacitor unit is connected to the power transmission path between the DC power supply and the RF power amplifier device. Wherein, controlling L of the N capacitor selection branches to be in the off state includes: Control the L switches in the N switching units to open, so that the L capacitor selection branches are in the open state.

3. The reflection power management method according to claim 1, characterized in that, The determination of the required buck response level L based at least on the currently acquired reflected power detection value includes: Based on the currently acquired reflected power detection value, the required voltage reduction response level L is determined by looking up a table using the preset mapping relationship between reflected power detection values ​​and voltage reduction response levels; or The required voltage reduction response level L is determined based on the difference between the currently acquired reflected power detection value and the protection threshold and / or the difference between the currently acquired reflected power detection value and the previously acquired reflected power detection value.

4. The reflection power management method according to claim 1, characterized in that, The control of L capacitor selection branches out of N capacitor selection branches to be in the off state includes: The L capacitor selection branches among the N capacitor selection branches are controlled to be in the open state in sequence at a second preset interval, so that the i-th capacitor selection branch is in the open state after the (i-1)-th capacitor selection branch is opened, and then after a second preset interval, i is an integer between 1 and L.

5. The reflection power management method according to claim 4, characterized in that, The capacitance of the kth capacitor unit is C×2^(k-1), where C is the unit capacitance and k is an integer between 1 and N.

6. The reflection power management method according to claim 1, characterized in that, The reflection power management method further includes: When the detected reflected power value is less than or equal to the protection threshold, all N capacitor selection branches are controlled to be in the conducting state, so that the power transmission path between the DC power supply and the RF power amplifier is conducted, so as to maintain the voltage value of the DC power supply to the RF power amplifier as the target voltage value.

7. The reflection power management method according to claim 1, characterized in that, The reflection power management method further includes: When the L capacitor selection branches are in the open state, the voltage value of the RF power amplifier is continuously detected at the third preset interval to obtain the voltage detection value. If any voltage detection value obtained exceeds the safety threshold, control at least one capacitor selection branch that is in the conducting state to switch to the disconnected state, or control the RF power amplifier to stop working.

8. The reflection power management method according to claim 7, characterized in that, When the L capacitor selection branches are in the open state, the voltage value of the RF power amplifier is continuously detected at a third preset interval. After obtaining the voltage detection value, the reflection power management method further includes: When any voltage detection value is less than the recovery threshold, the L capacitor selection branches that are in the off state are switched to the on state.

9. A voltage reduction response device, characterized in that, include: N capacitor-selected branches are used to be set between a DC power supply and an RF power amplifier device. Each capacitor-selected branch has an on state and an off state, where N is an integer greater than or equal to 2. The detection unit is used to continuously detect the reflected power of the radio frequency power amplifier device at a first preset interval and obtain the reflected power detection value. The control unit is configured to determine the required buck response level L based at least on the currently acquired reflected power detection value when the reflected power detection value is greater than the protection threshold, wherein L is an integer between 1 and N, and control L of the N capacitor selection branches to be in the disconnected state, thereby disconnecting the power transmission path between the DC power supply and the RF power amplifier device to reduce the voltage value supplied by the DC power supply to the RF power amplifier device.

10. A radio frequency power supply device, characterized in that, include: A DC power supply is used to output DC electrical energy. A radio frequency power amplifier device is used to convert the DC power into radio frequency power; The buck response device as described in claim 9 is used to manage the reflected power of the radio frequency power amplifier device.

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