Liquid multi-nozzle jet impingement cooling device

Abstract

A liquid multi-nozzle jet impingement cooling device can include a micro-jet multi-nozzle plate, an outflow plate, an inflow plate, an outflow flow plate, and a cover plate. The cover plate is coupled to the outflow flow plate, which is coupled to the inflow plate, which is coupled to the outflow plate, which is coupled to the micro-jet multi-nozzle plate. First inflow through-holes of the cover plate and outflow through-holes of one or more sub-outlet setting portions of the cover plate are respectively fluidically coupled to cavities of the micro-jet multi-nozzle plate. The cavities are sealably mounted to a surface of a processor. A plurality of third inlet arrays of the micro-jet multi-nozzle plate direct cooling liquid to the surface of the processor and a plurality of first outlet arrays of the micro-jet multi-nozzle plate direct the cooling liquid away from the surface of the processor.

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