Substrate storage container

Abstract

The present application provides a substrate storage container. The substrate storage container (1) includes a container body (2) having a substrate storage space (27) formed therein, and a cover (3) capable of closing an opening portion (21) of the container body, and further includes a groove member (245) having a groove formation portion (2450b) having a groove opened downward, and a fixed portion (2450a) latched to a fixing portion (2401) of a lower wall (24), supported and fixed to the lower wall (24), and a bottom plate (244) fixed to the lower wall (24) and constituting a bottom portion of the container body (2) together with the lower wall (24), a portion of the groove member (245) being supported and fixed to the lower wall (24) in a state covered by the bottom plate (244).

Description

Technical Field

[0001] This invention relates to substrate storage containers used for storing, handling, and transporting substrates such as semiconductor wafers, masks, and printed circuit boards. Background Technology

[0002] As substrate storage containers for storing various substrates, substrates having a container body and a lid are known in the past (see, for example, Patent Documents 1 and 2).

[0003] One end of the container body has an opening. The other end of the container body has a closed cylindrical wall. A substrate storage space is formed within the container body. The substrate storage space is surrounded by the wall and is capable of storing substrates. A lid can be detached from the container body opening and can close the container body opening. Side substrate support portions are provided in pairs on the wall within the substrate storage space. When the container body opening is not closed by the lid, the side substrate support portions can support the edges of the substrates in a state where adjacent substrates are separated from each other at a predetermined interval and arranged.

[0004] A front retaining member (cover-side substrate support) is provided on a portion of the cover, specifically on the part opposite the substrate storage space when the container main body opening is closed. When the container main body opening is closed by the cover, the front retaining member supports the edge of the substrate. Additionally, a rear substrate support is provided on the wall portion in pair with the front retaining member. The rear substrate support supports the edge of the substrate. When the container main body opening is closed by the cover, the rear substrate support cooperates with the front retaining member to support the substrate, thereby supporting the substrate in a state where adjacent substrates are separated and arranged at a predetermined interval. Existing technical documents Patent documents

[0005] Patent Document 1: Japanese Patent No. 6652232 Patent Document 2: Japanese Patent No. 4921429 Summary of the Invention The problem to be solved by the present invention

[0006] A slide groove (movement slide groove) is fixedly provided on the lower wall of the lower part of the wall that constitutes the container body. When the container body is placed in a processing device that performs a prescribed process on the wafer, which is a substrate housed in the container body, the slide groove is supported by abutting against the guide pin (positioning pin) of the processing device.

[0007] Specifically, the substrate storage container is placed in the processing device, and the opening and closing of the lid and the loading and unloading of the substrate are automatically performed. Therefore, a positioning worktable is provided on the processing device, which is fixed by three positioning pins. In the part of the substrate storage container that contacts the positioning pins, a motion slide made of a material with good sliding properties is provided separately from the container body. The motion slide is installed on the container body by means of insert molding and assembly and fixing based on hooks, etc.

[0008] However, in structures based on hooks and other assembly methods, problems such as wobbling or detachment can occur due to interference from the moving slide and external factors. If detachment occurs, the device will shift in position, resulting in problems such as improper opening and closing of the cover and inability to allow the substrate to move in and out.

[0009] The purpose of this invention is to provide a substrate storage container with a structure that makes it difficult for the substrate to detach from the container body due to the movement of the sliding groove. Methods for solving problems

[0010] This invention relates to a substrate storage container, comprising: a container body having a cylindrical wall portion having a container body opening at one end and being closed at the other end, having a rear wall, an upper wall, a lower wall, and a pair of side walls, the container body opening being formed by one end of the upper wall, one end of the lower wall, and one end of the side walls, the container body forming a substrate storage space through the inner surfaces of the upper wall, the lower wall, the side walls, and the rear wall, the substrate storage space being capable of storing multiple substrates and communicating with the container body opening; a cover being detachable from the container body opening and capable of closing the container body opening; a groove member having a groove forming portion having a groove opening downwards; a fixing portion being engaged with the lower wall, the groove member being supported and fixed to the lower wall; and a bottom plate being fixed to the lower wall, forming the bottom of the container body together with the lower wall, a portion of the groove member being supported and fixed to the lower wall while covered by the bottom plate.

[0011] Preferably, the groove component is fixed to the lower wall by threaded fastening. Preferably, a portion of the groove component is a portion of its peripheral edge, and at least half of the peripheral edge of the groove component extending to the other end of the container body is covered by the base plate. Preferably, a portion of the groove component is a portion of its peripheral edge, and the entire peripheral edge of the groove component is covered by the base plate.

[0012] Preferably, the groove of the groove component is a V-shaped groove that mimics the shape of the front end of a kinematic pin used for positioning the container body. Preferably, the groove component is made of at least one thermoplastic resin selected from POM, PBT, and PEEK. Preferably, at least one of fluorine, PE, CF, CP, and CNT is added to the thermoplastic resin. Invention Effects

[0013] According to the present invention, a substrate storage container with a structure that makes it difficult for the sliding groove to detach from the container body can be provided. Attached Figure Description

[0014] Figure 1 This is an exploded perspective view showing a substrate storage container 1 containing multiple substrates W according to an embodiment of the present invention. Figure 2 This is a top perspective view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 3 This is a lower perspective view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 4 This is a side sectional view of the container body 2 of the substrate storage container 1 according to an embodiment of the present invention. Figure 5 It means to use Figure 3 An enlarged sectional view of the container body 2 cut by line AA. Figure 6 It means to use Figure 3 An enlarged sectional view of the container body 2 cut by the BB line. Detailed Implementation

[0015] [Overall structure of substrate storage container 1] The substrate storage container 1 of this embodiment will be described below with reference to the figures. Figure 1 This is an exploded perspective view showing the case where multiple substrates W are stored in the substrate storage container 1. Figure 2 This is a perspective view of the upper part of the container body 2 of the substrate storage container 1. Figure 3 This is a perspective view of the lower part of the container body 2 of the substrate storage container 1. Figure 4 It means to use Figure 3 A side sectional view of the container body 2 cut by the AA line.

[0016] For ease of explanation, the direction from the container body 2 towards the lid 3 will be described later. Figure 1The direction from the upper right to the lower left (as described later) is defined as the forward direction D11, and its opposite direction is defined as the backward direction D12. Together, they are defined as the forward-backward direction D1. Additionally, the direction from the lower wall 24 to the upper wall 23 (described later) is... Figure 1 The direction above (in the diagram) is defined as the upward direction D21, and its opposite direction is defined as the downward direction D22. Together, they are defined as the vertical direction D2. Additionally, the direction from the second sidewall 26 towards the first sidewall 25 (described later) Figure 1 The direction from the bottom right to the top left is defined as the left direction D31, its opposite direction as the right direction D32, and together they are defined as the left-right direction D3. Arrows representing these directions are illustrated in the main diagram.

[0017] Additionally, the substrate W stored in substrate storage container 1 (refer to...) Figure 1 The substrate (W) is a disc-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin substrate used in industry. In this embodiment, the substrate W is a silicon wafer with a diameter of 300 mm.

[0018] like Figures 1-4 As shown, the substrate storage container 1 stores a substrate W made of silicon wafers as described above, and serves as a process container for handling during processes within a factory, or as a shipping container for transporting the substrate via land, air, or sea transport. It includes a container body 2 and a cover 3. The container body 2 has a substrate support plate-like portion 5 serving as a side substrate support portion and a rear substrate support portion 6. The cover 3 has a front retaining member (not shown) serving as a cover side substrate support portion.

[0019] The container body 2 has a cylindrical wall 20 with a container body opening 21 at one end and closed at the other end. A substrate storage space 27 is formed within the container body 2. The substrate storage space 27 is formed by the wall 20. A substrate support plate 5 is disposed on a portion of the wall 20 that forms the substrate storage space 27. Figure 1 As shown, multiple substrates W can be stored in the substrate storage space 27.

[0020] The substrate support plate-shaped portion 5 is a built-in component arranged in pairs within the substrate storage space 27, and is detachably and fixedly mounted to the wall portion 20. By abutting against the edges of multiple substrates W, the substrate support plate-shaped portion 5 can support the edges of the multiple substrates W in a state where adjacent substrates W are separated from each other at a predetermined interval and arranged. A rear substrate support portion 6 is integrally formed with the substrate support plate-shaped portion 5 on its rear side.

[0021] The rear substrate support 6 is provided on the wall portion 20 within the substrate storage space 27 in a manner paired with the front holding member (not shown later). The rear substrate support 6 can support the rear portions of the edges of the plurality of substrates W by abutting against the edges of the plurality of substrates W.

[0022] The cover 3 is detachable from the periphery 28 of the opening 21 forming the container body opening, and is capable of closing the container body opening 21. A front retaining member (not shown) is provided on a part of the cover 3 and is the part opposite to the substrate storage space 27 when the container body opening 21 is closed by the cover 3. The front retaining member is configured to be paired with the rear substrate support 6 inside the substrate storage space 27.

[0023] When the container body opening 21 is closed by the cover 3, the front retaining member abuts against the edges of the multiple substrates W, thus supporting the front of the edges of the multiple substrates W. When the container body opening 21 is closed by the cover 3, the front retaining member cooperates with the rear substrate support 6 to support the multiple substrates W, thus holding the substrates W in a state in which adjacent substrates W are separated from each other at a predetermined interval and arranged.

[0024] The substrate storage container 1 is made of resin, such as plastic material. Unless otherwise specified, examples of resins used as this material include thermoplastic resins such as polycarbonate, cyclic olefin polymers, polyetherimide, polyetherketone, polybutylene terephthalate, polyetheretherketone, and liquid crystal polymers, as well as alloys thereof. To impart conductivity, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added to the resin of these molding materials. Furthermore, to improve rigidity, glass fibers, carbon fibers, etc., may also be added.

[0025] [Container Body 2] The following provides a detailed explanation of each part. For example... Figures 1-4 As shown, the wall portion 20 of the container body 2 includes a rear wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The rear wall 22, upper wall 23, lower wall 24, first side wall 25, and second side wall 26 are made of the aforementioned materials and are integrally formed.

[0026] The first sidewall 25 and the second sidewall 26 are opposite each other, and the upper wall 23 and the lower wall 24 are opposite each other. The rear ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 are all connected to the rear wall 22. The front ends of the upper wall 23, the lower wall 24, the first sidewall 25, and the second sidewall 26 form the periphery of the opening 28, which forms the container body opening 21 in a generally rectangular shape.

[0027] An opening periphery 28 is provided at one end of the container body 2, and a rear wall 22 is located at the other end of the container body 2. The container body 2, formed by the outer surface of the wall portion 20, has a box-shaped shape. The inner surfaces of the wall portion 20, namely the inner surfaces of the rear wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26, form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening periphery 28 communicates with the substrate storage space 27 surrounded by the wall portion 20 and formed inside the container body 2. Up to 25 substrates W can be stored in the substrate storage space 27.

[0028] A latching recess 231A, 23B, 241A, 241B is formed in a portion of the upper wall 23 and the lower wall 24, near the opening periphery 28, and recesses outward toward the substrate receiving space 27. One latching recess 231A, 23B, 241A, 241B is formed near each of the left and right ends of the upper wall 23 and the lower wall 24, for a total of four.

[0029] Ribs 235 are integrally formed on the outer surface of the upper wall 23. Ribs 235 improve the rigidity of the container body 2. In addition, a top flange 236 is fixed in the center of the upper wall 23. The top flange 236 is a component that is hooked and suspended in the substrate storage container 1 when suspended in AMHS (Automatic Wafer Transport System), PGV (Plane Transport Vehicle), etc.

[0030] like Figure 3 As shown, a base plate 244 is fixed to the lower wall 24. The base plate 244 is a plate-shaped structure disposed opposite to the lower surface constituting the outer surface of the lower wall 24, and is fixed to the lower wall 24, forming the bottom of the container body 2 together with the lower wall 24. Furthermore, in Figure 3 In the diagram, the base plate 244 is illustrated with solid lines for easy understanding, while other components are illustrated with double-dotted lines.

[0031] Specifically, the base plate 244 has a portion extending from the central portion opposite to the center of the lower wall 24 toward a pair of vent holes 243 described later, a portion opposite to the rear portion of the lower wall 24 further back than the central portion, and a portion extending along the end edges of the left and right lower walls 24 in the front-rear direction D1.

[0032] A portion of the base plate 244, extending from the central portion opposite to the center of the lower wall 24 toward the pair of vent holes 243 (described later), and a portion opposite the rear portion of the lower wall 24 further rearward, covers a part of the movement groove 245, which is a groove member (described later). Thus, the movement groove 245 is supported and fixed to the lower wall 24.

[0033] More specifically, such as Figure 5 As shown, the edge of the base plate 244 has: a supported portion 2443, a portion extending parallel to the lower wall 24, and an extension extending upward from one end thereto ( Figure 5 , Figure 6 The portion extending below and abutting the lower wall 24; and the inclined wall 2442 extending obliquely upward from the end edge of the supported portion 2443 (below) Figure 5 Extending diagonally downwards (in the middle). Additionally, as... Figure 6 As shown, the edge of the base plate 244 has: a supported portion 2448, a portion extending parallel to the lower wall 24, and an extension extending upward from one end thereto ( Figure 6 The portion extending below and abutting the lower wall 24; and the inclined wall 2447 extending obliquely upward from the end edge of the supported portion 2448 (below) Figure 6 (extends diagonally below) in the middle.

[0034] Near the four corners of the lower wall 24, there are air supply holes 242 and exhaust holes 243, which serve as two types of through holes. In this embodiment, the through holes at the two front parts of the lower wall 24 are exhaust holes 243 for discharging gas from the interior of the container body 2, and the through holes at the two rear parts are air supply holes 242 for supplying gas to the interior of the container body 2.

[0035] A gas supply filter section 98, serving as an additional component, is disposed in the through hole serving as a gas supply port 242, and an exhaust filter section 99 is disposed in the through hole serving as an exhaust port 243. That is, the gas flow channels inside the gas supply filter section 98 and the exhaust filter section 99 constitute part of a ventilation path that connects the substrate storage space 27 with the external space of the container body 2. Furthermore, the gas supply filter section 98 and the exhaust filter section 99 are disposed on the wall portion 20, allowing gas to pass through the filter (not shown) between the external space of the container body 2 and the substrate storage space 27. The purge gas supplied to the gas supply filter section 98 is supplied to the substrate storage space 27. The exhaust filter section 99 is configured to allow gas to pass from the substrate storage space 27 to the external space of the container body 2.

[0036] [Motion Slide 245] The kinematic slider 245, as a groove component, is a component fixedly installed on the lower wall 24 in such a manner that it abuts against a positioning pin on the processing device (not shown) when the substrate storage container 1 is placed in a processing device that automatically performs opening and closing of the cover 3 and entry and exit of the substrate W. Figure 5 As shown, the motion groove 245 has a left-right symmetrical shape centered on the central position when viewed from the long side direction of the groove component 245.

[0037] like Figure 3 As shown, the motion slide 245 includes: a fixed portion 2450a, which is formed by two ends in the long side direction, and a fixed portion 2401 that is fixed and supported on a portion of the lower wall 24 by means of screws 247 and fixes the motion slide 245 to the lower wall 24; and a groove forming portion 2450b, which is formed by the portion between the two ends and has a mountain-shaped portion 2454 with a groove that opens downward. The fixed portion 2450a and the groove forming portion 2450b are integrally formed and connected.

[0038] The gable portion 2454 has a gable roof shape. Through the lower surface of the gable portion 2454 ( Figure 5 , Figure 6 The upper pair of inclined surfaces) form a downward-facing ( Figure 5 , Figure 6 The upper part of the V-shaped groove is open. The shape of the V-shaped groove is modeled after the shape of the front end of the three positioning pins (moving pins) of the positioning worktable on the processing device (not shown) for placing the substrate storage container 1. A portion of the valley bottom of the V-shaped groove is formed by a portion of the lower wall 24.

[0039] like Figure 5 , Figure 6 As shown, on both sides of the width direction of the motion slide 245, the horizontal portion 2453 and the mountain-shaped portion 2454 are integrally connected. The horizontal portion 2453 extends from both ends of the mountain-shaped portion 2454 in a separate manner in the width direction, forming the periphery of the mountain-shaped portion 2454 of the motion slide 245. In addition, a portion of the fixed portion 2450a, excluding the portion of the fixed portion 2450a connected to the mountain-shaped portion 2454, forms the periphery of the motion slide 245. The other end of the horizontal portion 2453 connected to the mountain-shaped portion 2454 is integrally connected to the vertical portion 2452.

[0040] The vertical portion 2452 extends upwards from both ends of the horizontal portion 2453 in the width direction. Figure 5 , Figure 6 The lower part of the vertical portion 2452 extends from the middle part, and the upper part of the vertical portion 2452 extends from the lower part of the vertical portion. Figure 5 , Figure 6 The lower end of the middle part) is located at the upper end of the mountain-shaped part 2454 in the vertical direction. Figure 5 , Figure 6 The lower end of the vertical part 2452 is at the same position. The upper end of the vertical part 2452 is integrally connected to the vertical part 2452 with the abutment part 2451.

[0041] The contact portion 2451 has a portion that extends horizontally from the vertical portion 2452 in a mutually separated manner, and a portion extending upward from the middle of that portion. Figure 5 , Figure 6The portion extending below the middle wall (the abutting portion 2451 abuts against the lower wall 24).

[0042] like Figure 3 As shown, the upper end 2441 of the inclined wall 2442 of the base plate 244 surrounding the rear movable slide 245 of the three movable slides 245 is ( Figure 5 (lower end of the middle) such as Figure 5 As shown, it is located below the horizontal part 2453. Figure 5 The upper part of the middle). Part of the contact part 2451, the vertical part 2452 and a portion of the horizontal part 2453 become from the bottom ( Figure 5 The state shown above is covered by the inclined wall 2442 of the base plate 244 and the support portion 2443.

[0043] Furthermore, the portion of the fixed part 2450a other than the portion connected to the mountain-shaped part 2454 is also covered by the inclined wall 2442 of the base plate 244 and the support part 2443. Therefore, Figure 3 The peripheral portion of one of the three motion slides 245 shown is covered by the inclined wall 2442 of the base plate 244 and the support portion 2443 throughout its entire circumference.

[0044] In addition, such as Figure 3 , Figure 6 As shown, the periphery of the two front sliding grooves 245 is covered by the inclined wall 2447 of the base plate 244 and the support portion 2448 for half of the periphery.

[0045] Specifically, such as Figure 3 As shown, the upper end 2446 of the inclined wall 2447 of the base plate 244 surrounding the two front movable slides 245 of the three movable slides 245 is provided. Figure 6 (lower end of the middle) such as Figure 6 As shown, it is located below the horizontal part 2453. Figure 6 (Above). Part of the contact portion 2451, vertical portion 2452, and horizontal portion 2453, and the portion located on the rear side (in Figure 6 The middle part located at the bottom left of the valley of the V-shaped groove of the motion slide 245 becomes from below ( Figure 6 The portion shown above is covered by the inclined wall 2447 of the base plate 244 and the support portion 2448, but the portion located on the front side (in...) Figure 6 The portion located on the right side of the valley bottom of the V-shaped groove of the motion chute 245 is not covered by the inclined wall 2447 of the base plate 244, but by the support portion 2448.

[0046] Furthermore, the portion of the fixed part 2450a other than the portion of the fixed part 2450a connected to the mountain-shaped part 2454 is also covered by the inclined wall 2447 of the base plate 244 and the support part 2448. Specifically, Figure 3 The rear half of the fixed portion 2450a of each of the two front movable slides 245 shown in the diagram becomes the inclined wall 2447 of the base plate 244 (see reference). Figure 6 ) and the supported part 2448 (refer to Figure 6 The state of being covered, but the front half of the fixed part 2450a is not covered by the inclined wall 2447 of the base plate 244 and by the support part 2448.

[0047] thus, Figure 3 The two front-side motion slides 245 shown in the diagram are covered by the inclined wall 2447 of the bottom plate 244 and the support portion 2448, covering the rear half of the other end side of the container body 2.

[0048] Unlike the container body 2, the motion slide 245 is made of a thermoplastic resin with good sliding properties. Specifically, in this embodiment, it is made of at least one thermoplastic resin selected from POM (polyacetal resin), PBT (polybutylene terephthalate resin), and PEEK (polyether ether ketone resin). Furthermore, at least one of fluorine, PE (polyethylene), and CF (carbon filler, specifically CF (carbon fiber), CP (carbon powder), and CNT (carbon nanotubes)) may be added to these thermoplastic resins.

[0049] [Prominent part 8] The rear wall 22 has a protrusion 8 that serves as a gas ejection nozzle. Two protrusions 8 are provided in pairs. The base of each protrusion is airtightly connected to the air passage inside the gas supply filter section 98, and two protrusions (one for each) are inserted into holes in a portion of the lower wall 24 of the container body 2 near the two air supply holes 242 using an insertion structure, thereby fixing the protrusion 8 to the lower wall 24 of the container body 2. Furthermore, the upper part of the protrusion 8, which is the front end portion of the protrusion 8, is fixed to the rear wall 22 constituting the wall section 20 by a snap-fit ​​or welding.

[0050] With this configuration, a pair of protrusions 8 protrude in a rib-like manner from the rear wall 22 toward the container body opening 21, and extend parallel from the upper end to the lower end of the rear wall 22. The protrusions 8 are hollow and columnar.

[0051] The protrusion 8 supplies gas into the substrate storage space 27 via a ventilation path, which is a gas flow channel inside the gas supply filter section 98 that connects the substrate storage space 27 with the external space of the container body 2.

[0052] [Cover 3] like Figure 1 As shown, the lid 3 has a generally rectangular shape that is substantially the same as the shape of the opening periphery 28 of the container body 2. The lid 3 can be attached to and detached from the opening periphery 28 of the container body 2. By attaching the lid 3 to the opening periphery 28, the lid 3 can close the opening 21 of the container body in a positional relationship surrounded by the opening periphery 28.

[0053] On the inner surface of the cover 3 ( Figure 1 The surface of the cover 3 shown (the back side surface) and the surface opposite to the stepped portion (sealing surface 281) formed at the rearward direction D12 of the opening periphery 28 when the cover 3 closes the container body opening 21, are fitted with an annular sealing member 4 around the outer periphery of the cover 3. The sealing member 4 is configured to surround the cover 3. The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin, fluororubber, silicone rubber, etc., which are capable of elastic deformation.

[0054] When the lid 3 is installed on the periphery of the opening 28, the sealing member 4 is elastically deformed by being clamped between the sealing surface 281 of the container body 2 and the inner surface of the lid 3. That is, by clamping the sealing member 4 between the lid 3 and the container body 2, the lid 3 can close the opening 21 of the container body when the lid 3 is separated from the periphery of the opening and does not abut against each other. By removing the lid 3 from the periphery of the opening 28, the substrate W can be taken out or placed in relative to the substrate storage space 27 inside the container body 2.

[0055] A latching mechanism is provided in the cover 3. For example... Figure 1 As shown, the latching mechanism is located near the left and right ends of the cover 3, and includes two upper latching portions 32A, 32A that protrude upwards in a direction D21 from the top of the cover 3, and two lower latching portions 32B, 32B that protrude downwards in a direction D22 from the bottom of the cover 3. The two upper latching portions 32A, 32A are located near the left and right ends of the top of the cover 3, and the two lower latching portions 32B, 32B are located near the left and right ends of the bottom of the cover 3.

[0056] An operating part 33 is provided on the outer surface of the cover 3. By operating the operating part 33 from the front side of the cover 3, the upper latching parts 32A, 32A and the lower latching parts 32B, 32B can be made to protrude from the top and bottom of the cover 3 or not. The upper latching parts 32A, 32A protrude upward D21 from the top of the cover 3 and engage with the latching recesses 231A, 231B of the container body 2, and the lower latching parts 32B, 32B protrude downward D22 from the bottom of the cover 3 and engage with the latching recesses 241A, 241B of the container body 2, thereby fixing the cover 3 to the container body opening 21 of the container body 2.

[0057] On the inside of the cover 3 ( Figure 1 A recess (not shown) is formed on one side of the cover 3 in the rear direction (D12) that is recessed outward (in the front direction (D11)) toward the substrate receiving space 27. A front retaining member (not shown) is fixedly provided in the recess.

[0058] The front retaining member (not shown) includes a front retaining member substrate receiving portion (not shown). The front retaining member substrate receiving portion (not shown) is located at a central position in the left-right direction D3. The front retaining member substrate receiving portion is not limited to a central position in the left-right direction D3; it can be located at multiple positions, for example, two portions can be arranged in pairs at predetermined intervals. The front retaining member substrate receiving portions are arranged in such a manner that 25 pairs are arranged in the vertical direction. By storing the substrate W within the substrate storage space 27 and closing the cover 3, the front retaining member substrate receiving portion supports the edge of the substrate W.

[0059] [Effects of the Implementation Method] The substrate storage container 1 of this embodiment, constructed as described above, can achieve the following effects. The substrate storage container 1 of this embodiment includes: a container body 2, having a cylindrical wall portion 20, wherein the wall portion 20 has an opening periphery portion 28 forming an opening portion 21 of the container body at one end and is closed at the other end, and includes a rear wall 22, an upper wall 23, a lower wall 24 and a pair of side walls 25 and 26, wherein the opening portion 21 of the container body is formed through one end of the upper wall 23, one end of the lower wall 24 and one end of the side walls 25 and 26, and the substrate storage space 27 is formed by the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surfaces of the side walls 25 and 26 and the inner surface of the rear wall 22. It can accommodate multiple substrates W and communicate with the container body opening 21; the cover 3 can be detached from the container body opening 21 and can close the container body opening 21; the moving slide 245, which is a groove component, includes: a groove forming part 2450b, which forms a groove that opens downward; and a fixing part 2450a, which is fixed to the lower wall 24 and is fixed to the lower wall 24; and a bottom plate 244, which is fixed to the lower wall 24 and together with the lower wall 24 forms the bottom of the container body 2, and a part of the moving slide 245 is supported and fixed to the lower wall 24 while covered by the bottom plate 244.

[0060] With this configuration, even if other objects outside the substrate storage container 1 collide with the motion slide 245 and exert force on the motion slide 245, a portion of the motion slide 245 that is to detach from the lower wall 24 can abut against the inclined walls 2442 and 2447 of the bottom plate 244 covering the motion slide 245 to prevent detachment, thus making it difficult for the motion slide 24 to detach.

[0061] As a result, when the container body 2 is placed in a processing device (not shown) that performs the prescribed processing on the wafer, which is the substrate W housed in the container body 2, the container body 2 is fixed by three positioning pins of a positioning stage provided on the processing device. At this time, problems such as positional displacement of the container body 2 relative to the processing device, poor opening and closing of the cover 3, and inability of the substrate W to enter or exit can be suppressed.

[0062] Furthermore, in the substrate storage container 1 according to this embodiment, the movable slide 245, which is a groove component, is fixed to the lower wall 24 by threaded fastening. With this configuration, the movable slide 245 can be more securely fixed to the lower wall 24.

[0063] Furthermore, in the substrate storage container 1 according to this embodiment, a portion of the movable slide 245, which is a groove member, is a portion of its peripheral edge. Half of the peripheral edge of the movable slide 245, which extends to the other end of the container body 2, is covered by a bottom plate 244. With this configuration, even if the movable slide 245 is to detach from the lower wall 24, the bottom plate 244 covers half of the peripheral edge of the movable slide 245, and in that portion, the peripheral edge of the movable slide 245 abuts against the bottom plate 244, thereby preventing the movable slide 245 from detaching from the lower wall 24.

[0064] Furthermore, in the substrate storage container 1 according to this embodiment, a portion of the motion slide 245, which is a groove component, is the periphery of the motion slide 245, and the entire periphery of the motion slide 245 is covered by the base plate 244. With this configuration, even if the motion slide 245 is to detach from the lower wall 24, the entire periphery of the motion slide 245 is covered by the base plate 244, and the entire periphery of the motion slide 245 abuts against the base plate 244, thus reliably preventing the motion slide 245 from detaching from the lower wall 24.

[0065] Furthermore, in the substrate storage container 1 of this embodiment, the groove of the motion slide 245, which is a groove component, is formed by a V-shaped groove that mimics the shape of the front end of a motion pin (not shown) used for positioning the container body 2. This allows the front end of the motion pin to remain within the groove, relative to the lower surface of the mountain-shaped portion 2454 constituting the motion slide 245. Figure 5 , Figure 6 The bottom of the valley formed by a pair of inclined surfaces on the upper side of the middle is stably in contact with each other.

[0066] Furthermore, with the front end of the moving pin abutting against the moving slide 245 in the groove, the moving slide 245 can easily move relative to the front end of the moving pin. As a result, the container body 2, including the moving slide 245, can be easily positioned by the front end of the moving pin.

[0067] Furthermore, in the substrate storage container 1 of this embodiment, the motion groove 245, which serves as a groove component, is made of at least one thermoplastic resin selected from POM, PBT, and PEEK. This results in high sliding characteristics in the motion groove 245, allowing for smoother positioning when the front end of the motion pin abuts against the motion groove 245.

[0068] Furthermore, in the substrate storage container 1 of this embodiment, which includes resin components such as the aforementioned motion groove 245, at least one of fluorine, PE, CF, CP, and CNT can be added to the thermoplastic resin. This results in the motion groove 245 exhibiting high heat resistance, high chemical resistance, low friction, easy sliding, high non-adhesiveness (difficult to bond), and high conductivity (high effectiveness in preventing static electricity). Additionally, CF (carbon filler, specifically CF (carbon fiber), CP (carbon powder), and CNT (carbon nanotubes)) can improve the strength of the thermoplastic resin constituting the substrate storage container 1 including the motion groove 245.

[0069] [Variation Example] The present invention is not limited to the above embodiments, and modifications can be made within the technical scope described in the claims.

[0070] For example, the configuration of the base plate and the groove component is not limited to the configuration of the base plate 244 and the motion groove 245 in this embodiment. Furthermore, as... Figure 3 , Figure 6 As shown, the periphery of the two front sliding grooves 245 is partially covered by the inclined wall 2447 of the base plate 244 and the support portion 2448, but this configuration is not limited to this. Alternatively, the periphery of the sliding grooves 245 may be partially covered by the inclined wall 2447 of the base plate 244 and the support portion 2448.

[0071] Similarly, the peripheral portion of the rear movable slide 245 of the three movable slides 245 is covered by the inclined wall 2442 of the base plate 244 and the support portion 2443 throughout the entire circumference, but it is not limited to this, and it may also be covered by the inclined wall 2442 of the base plate 244 and the support portion 2443 throughout at least half of the circumference.

[0072] Furthermore, the shape of the container body and the lid, the number of substrates that can be accommodated in the container body, and the size are not limited to the shape of the container body 2 and the lid 3, the number of substrates W that can be accommodated in the container body 2, and the size of the container body 2 in this embodiment. Explanation of reference numerals in the attached figures:

[0073] 1: Substrate storage container 2: Container body 3: Lid 20: Wall 21: Container body opening 22: Rear wall 23: Upper wall 24: Lower wall 25: First side wall (side wall) 26: Second side wall (side wall) 27: Substrate storage space 244: Base plate 245: Motion slide (slot component) 247: Screw 2401: Fixing part 2450a: Fixed part (peripheral part) 2450b: Slot forming part 2451: Abutting part (peripheral part) 2452: Vertical part (peripheral part) 2453: Horizontal part (peripheral part) W: Substrate.

Claims

1. A substrate storage container, characterized in that, have: The container body has a cylindrical wall portion, which has a container body opening at one end and is closed at the other end. It has a rear wall, an upper wall, a lower wall, and a pair of side walls. The container body opening is formed by one end of the upper wall, one end of the lower wall, and one end of the side walls. The container body forms a substrate storage space by the inner surfaces of the upper wall, the lower wall, the side walls, and the rear wall. The substrate storage space can store multiple substrates and is connected to the container body opening. The lid is detachable from the opening of the container body and can close the opening of the container body. as well as A groove component having: a groove forming portion having a groove that opens downwards; And a fixed part, a fixed part that is locked to the lower wall, the groove component being supported and fixed to the lower wall; as well as The base plate is fixed to the lower wall and together with the lower wall forms the bottom of the container body. A portion of the groove component is supported and fixed to the lower wall while being covered by the base plate.

2. The substrate storage container according to claim 1, characterized in that, The groove component is fixed to the lower wall by threaded fastening.

3. The substrate storage container according to claim 1, characterized in that, A portion of the groove component is a portion of the peripheral portion of the groove component, and at least half of the peripheral portion of the groove component extending to the other end side of the container body is covered by the bottom plate.

4. The substrate storage container according to claim 1, characterized in that, A portion of the groove component is its periphery, and the entire periphery of the groove component is covered by the base plate.

5. The substrate storage container according to claim 1, characterized in that, The groove of the groove component is formed by a V-shaped groove that mimics the shape of the front end of a moving pin used for positioning the container body.

6. The substrate storage container according to claim 1, characterized in that, The groove component is made of at least one thermoplastic resin selected from POM, PBT, and PEEK.

7. The substrate storage container according to claim 6, characterized in that, The thermoplastic resin contains at least one of fluorine, PE, CF, CP, and CNT.

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