Six degree of freedom parallel positioner

Abstract

The invention relates to a support system (100) for generating movement of a support plate (102) configured to transfer, in use, a workpiece to be moved to a predetermined spatial position relative to a known default position, the system comprising: a plurality of support assemblies (200) each configured to be free to move in all axes (XYZ) and to rotate freely thereabout, and connected to the support plate (102) to translate movement of the support plate (102) in a number of degrees of freedom among six degrees of freedom based on the predetermined position; one or more motion units (108a-f) each associated with each of the plurality of support assemblies (200); a controller configured to drive one or more of the motion units (108a-f) in order to move the support plate (102) to the predetermined position, configured such that the number of motion units (108a-f) driven is equal to the number of degrees of freedom required for movement of the support plate (102) to the predetermined position.

Description

Technical Field

[0001] This invention relates to a system and corresponding method for moving a support plate in a processing environment (e.g., a processing environment for manufacturing electronic devices). Background Technology

[0002] The manufacture of electronic devices involves numerous processing steps and requires moving components from one step to another or placing the electronic device in a specific location using specific tools. This is particularly useful when handling semiconductor wafers and the like.

[0003] In a typical manufacturing environment, wafers undergo numerous processing steps to form the final wafer and all associated components. This requires the wafer to move within the manufacturing environment and always necessitates precise knowledge of its position and orientation. Furthermore, controlling this environment and limiting any human intervention are crucial. Consequently, automated systems with supports or platforms are used to move and position wafers within the manufacturing environment.

[0004] To achieve the required level of precision, robots must be able to move wafers with six degrees of freedom. Such robots already exist, but they suffer from performance issues in some situations. Furthermore, to date, robots have been bulky and occupy a large area relative to the size of the wafer. Therefore, moving one or more robots in a manufacturing environment is challenging. For some movements, several robots are often used, or robots are often stacked, to ensure that all six degrees of freedom are taken into account. This leads to additional disadvantages. Therefore, it is necessary to find better ways to carry and move wafers or similar objects in a manufacturing environment, potentially overcoming at least some of the problems associated with existing robots and systems.

[0005] It is necessary to remedy at least some of the known and existing shortcomings of support robots. Summary of the Invention

[0006] This invention relates to a support system for generating a movable support plate, which, in use, is assembled to convey a workpiece to be moved to a predetermined spatial position relative to a known default position. The system comprises: A plurality of support assemblies, each of which is configured to move freely along three axes (XYZ) and rotate freely about all of the axes (XYZ), and is connected to the support plate to translate the movement to the support plate in at least one of the six degrees of freedom based on the predetermined position; One or more motion units, each of which is associated with one of the plurality of support assemblies; A controller is configured to drive one or more of the motion units to move the support plate to the predetermined position, wherein the number of motion units configured to be driven is equal to the number of degrees of freedom required to move the support plate to the predetermined position.

[0007] According to at least one embodiment of the present invention, the support system includes three support assemblies connected to the support plate.

[0008] According to at least one embodiment of the invention, each support assembly includes two motion units configured to drive a movement along two different axes.

[0009] According to at least one embodiment of the invention, each of the support assemblies comprises two motion units connected to each other by a joint having six degrees of freedom.

[0010] According to at least one embodiment of the present invention, each of the support assemblies includes a first motion unit and a second motion unit, the first motion unit being given movement along a Z-axis relative to the default position, and the second motion unit being given movement in a plane of the support plate relative to the default position.

[0011] According to at least one embodiment of the invention, the first motion unit is located in a leg of the support system; the leg is configured to change the height of the system relative to the default position.

[0012] According to at least one embodiment of the invention, the second motion unit is located in a coupling member in the plane of the support plate of the support system, and is configured to change the position of the system in the plane of the support plate relative to the default position.

[0013] According to at least one embodiment of the present invention, the coupling member comprises two orthogonal portions: a first coupling member extending in one direction in the plane of the support plate and a second coupling member extending in one direction in the plane of the support plate, wherein the first coupling member is connected to the second coupling member and the coupling member is located below the support plate.

[0014] According to at least one embodiment of the present invention, the support system further includes a circular support plate attached to the plurality of support assemblies on one circumference.

[0015] According to at least one embodiment of the present invention, the support assemblies of the plurality of support assemblies are positioned equidistantly around the circumference.

[0016] According to at least one embodiment of the invention, the support assemblies of the plurality of support assemblies are positioned around the circumference of the support plate, and a first support assembly and a second support assembly are spaced 90° apart. For example, various movements that cause the position of the support plate can be measured.

[0017] According to at least one embodiment of the invention, the support system further includes at least one sensor for measuring the movement of the support plate.

[0018] According to at least one embodiment of the present invention, at least one sensor includes a component for measuring at least one movement of at least one part of the support system, and the support system includes a component for calculating a position of the support plate based on the measured movement.

[0019] In practice, for example, most sensors that measure the position of the support plate are indirect. Managing the movement of the motor by measuring the position of the support plate is quite difficult. Therefore, this invention makes it possible, for example, to manage at least some of various displacements or movements by measuring the positions of various motion units (or actuators) and calculating the position of the support plate.

[0020] According to at least one embodiment of the invention, the support system further includes a spring configured to bear a weight of the support plate before, during, or after the movement of the support plate in a Z direction.

[0021] According to at least one embodiment of the present invention, the present invention also relates to a method for moving a support plate in a support system as described in any of the foregoing technical solutions, the support plate being assembled to convey a workpiece to be moved to a predetermined spatial position relative to a known default position during use, the method comprising the following steps:

[0022] The method comprises moving one or more support assemblies, each of which is configured to move freely on all axes (XYZ) and rotate freely about all axes, and connected to the support plate to give the support plate movement in at least one of the six degrees of freedom based on the predetermined position by driving one or more motion units, so as to move the support plate to the predetermined position; and further comprising driving several motion units to move the support plate to the predetermined position. Attached Figure Description

[0023] Other features and advantages of the invention will become apparent from the following detailed description, which will be understood by referring to the accompanying drawings, in which:

[0024] Figure 1 A simplified diagram of a support platform for a workpiece to be processed (or "machined"), according to one embodiment of the present invention;

[0025] Figure 2 To illustrate one aspect of the invention, the relative positions of the support leg and the platform movement motor are shown in... Figure 1 A schematic top view of the support platform in the middle;

[0026] Figures 3a and 3b respectively show Figure 1 and Figure 2 The first coupler and the second coupler in the middle;

[0027] Figure 4 A schematic diagram illustrating alternative relative positions of the legs of a support platform according to one embodiment of the present invention;

[0028] Figure 5 According to one aspect of the present invention Figure 1 Technical diagram of the supporting platform. Detailed Implementation

[0029] Various embodiments of the fluid detector according to the present invention are described in more detail below with reference to the accompanying drawings.

[0030] Various embodiments of systems and corresponding methods for moving a support plate in a processing environment, such as a processing environment for manufacturing an electronic device according to the invention, are described in more detail below with reference to the accompanying drawings.

[0031] This invention relates to a system for moving a platform in an electronic device manufacturing environment, for example, to place a wafer in a processing position during one or more steps of a wafer or chip manufacturing process. The system is referred to herein as a system or robot because it includes robotic components capable of automatically moving from one position to another according to instructions. Depending on the specific circumstances, these instructions may be given directly by a user or through an interface and / or computer instructions. Various types of instructions will be discussed in more detail below. The system can also be used in methods for manufacturing wafers or the like, and various steps in these methods can be facilitated by the system through appropriate instructions.

[0032] Support system 100 Figure 1 The system is shown in three dimensions (3D). The system 100 includes a plate or platform 102 for carrying or transferring workpieces (not shown) from one location to another during various workpiece handling steps or for any other purpose.

[0033] The support platform is generally circular in shape, with a center point C and a radius r. The support platform can be any other shape, size, or orientation required for different applications. The exact size and shape of the platform are known to the system so that the relative movement of the platform can be programmed and executed.

[0034] In this invention, the workpiece to be processed / transported is one or more electronic devices, for example, in the form of a semiconductor wafer. The semiconductor wafer comprises, for example, several chips or similar components arranged in an array. An array comprises a certain number of columns and rows of chips or similar components arranged at known distances from each other in a known plane. The array may be centered at point C and have a diameter slightly smaller than the diameter of the support plate 102. During use, the workpiece is attached to the platform via an attachment interface suitable for the platform and the workpiece, or a tool designed to carry the workpiece. The position of the workpiece must be precisely known for each processing step so that the necessary processing steps conform to the predetermined plan for manufacturing the part. The position of the workpiece is directly related to the support platform 102 and can be determined by the system described below.

[0035] The ability to accurately know the position of a workpiece and move it to a new position for the next processing step or any other purpose depends on the precise knowledge of the workpiece's position at any given time. For this purpose, the workpiece position is known in six degrees of freedom, and the movement of the support plate 102 is also based on the programming of movements in these six degrees of freedom and existing position tracking devices.

[0036] Assume platform 102 lies in a known plane. For example, in an XY plane parallel to the floor. The XY plane includes the X direction (or longitudinal direction) and the Y direction (or lateral direction). The X and Y directions are... Figure 1 The S (or XYZ) coordinate system shown is a portion of the diagram, but should be understood to apply to all other diagrams (although not illustrated). This S coordinate system includes the X and Y directions forming the XY plane and the Z (or vertical) direction orthogonal to the XY plane. System 100 is designed to be able to move plate 102 in at least some of the six degrees of freedom. The six degrees of freedom include: translation Xi along the X direction; rotation θX about the X direction; translation Yi along the Y direction; rotation θY about the Y direction; translation Zi along the Z direction; and rotation θZ about the Z direction.

[0037] The coordinate system may include different naming conventions or diagrams, as will be understood by those familiar with this technology.

[0038] In the illustrated system, there are three legs 104(a), 104(b), and 104(c), which are triangularly spaced apart. Each leg is substantially 120° to the other two legs, as measured in the XY plane at the same distance from the center point C between the legs 104. This is illustrated in more detail in Figures 3a and 3b, and alternative solutions are also available. Figure 4Other angle values ​​are shown in the diagram. System 100 is designed to be carried or supported by a robot, from which legs 104 extend. Legs 104 extend from the robot through a support structure 106, which ensures that the legs (104) do not move relative to the support plate 102 except by the action of one or more motors 108a-c corresponding to each leg 104. At the top of each leg 104 is a ball joint 110. In the illustrated example, the top of the leg 104 includes a ball end 112, which is assembled to engage with individual cup-shaped parts 114 of the base of the plate 102. Each cup-shaped part 114 is connected to the base of the support plate by several connectors. Other types of joints may also be used, with constraints providing flexibility in all three rotations.

[0039] The first coupling member 116 is oriented in the plane of the support plate 102 and perpendicular to the radius r of the circle centered at C. The first coupling member 116 is attached to the base of the support plate 102 at the edge of its circumference. The second connector 118 is coupled to the first connector 116 and to the connector 110. The second connector 118 is perpendicular to the first connector 116 and extends along the radius r of the circle in the same plane as the support plate 102.

[0040] The robot includes at least one motion unit or motor 108d-f for moving the support plate 102 from one position to another in one or more of the six degrees of freedom.

[0041] The first connector 116 is oriented in the XY plane and aligns with the 60° position of the angle between each of the individual legs, such that they meet if the legs extend toward the center C. The second connector 118 connects the first connector 116 to the base of the support plate 102 and is oriented perpendicular to the axis of the first connector and in the same XY plane.

[0042] The robot includes at least one motion unit or motor 108 that enables the robot to move from one position to another in one or more of the six degrees of freedom.

[0043] In one example, each leg may include motors 108a, 108b, and 108c located above the end effector 120 closest to the robot. Each of these motors can move the respective leg in a positive or negative direction or along the Z-axis. To enable platform 102 to move in the X and Y directions, three additional motors are associated with connectors 116 and 118 and are capable of moving the support platform relative to the respective legs in the X and Y directions. In another example, three motors 108d-f are associated with connectors 116 and 118 and are capable of moving the support platform relative to the respective legs in the X, Y, and θZ directions, respectively.

[0044] Each motor 108 produces movement in at least one of the X, Y, and Z directions or rotation about at least one of the X, Y, and Z axes. In some systems 100, a single motor may be present for various types of movement, such as each of the six degrees of freedom, or fewer motors may be present when the same motor is used for more than one movement in different degrees of freedom.

[0045] At any time or at any step in the process, the current position of the workpiece is known. For a given manufacturing process, the next step in the process is determined. Based on this step, the desired position of the next desired workpiece position is determined. Depending on the difference between the known (current) position and the desired (next) position, a series of movements of the support plate 102 are required. One or more motors associated with the support plate 102 are then programmed to perform the required movements in at least one of the six degrees of freedom in order to position the workpiece in the desired position.

[0046] The controller (not shown) determines the movement and positioning of the workpiece or platform for the first step of the program and for each subsequent step. The program may consist of several steps, each occurring at a specific location, optionally using specific tools. The specific location is spatially known by a set of coordinates relative to a neutral point located somewhere in the processing environment. For example, the home position of the empty platform is defined as the initial position, where all coordinates of the six degrees of freedom are known to be zero. Subsequently, each step in the program occurs at a predetermined position and orientation defined by the coordinates of the default position. The controller commands the motors to move as needed to position the platform or workpiece at each of the successive sets of coordinates for processing. It should be noted that after each processing step, the size of the workpiece may have changed due to the existing processing steps, and this is taken into account when determining the next required position. For example, during a deposition step, the wafer thickness may change, and subsequent processing steps may adjust to this change. The controller recognizes such changes and calculates the required position for the next step accordingly.

[0047] It should be noted that the controller is part of a computer system comprising a processor, memory, and a series of other input and output mechanisms. A useful mechanism involves measuring the movement of the support platform and the anticipated movement required for the next step. The system includes several sensors that measure the amount of movement of the platform or support plate 102 in each of its degrees of freedom. Typical sensors include optical linear sensors that determine the movement of each leg and the movement of the motors corresponding to the first coupler 116 and the second coupler 118. Other measurements and other types of sensors can be used to measure these and other parameters. The controller can be used in conjunction with a list of executable program code stored in memory and managed by the processor. The processor can thus provide instructions to the motors to move the support plate at each step in a series of steps. Additionally, as stated above, the controller is aware of the base or neutral position on which all measurements are based.

[0048] Reference Figure 2 The method of platform movement is described in more detail. The support plate is supported by three support assemblies 200. Each support assembly 200 is assembled to movably secure the support plate 102 to the outrigger 104 by means of a combination of components. Figure 2 (Not shown). The combined support assembly should have a total of six degrees of freedom, of which six are required. In the illustrated example, the assembly includes a connector 110 (also not shown), a first connector 116, and a second connector 118. In some examples, there are as many motor directions as degrees of freedom.

[0049] It should be noted that more support assemblies may exist than the one shown, in which case the support assembly may not contain any motor and may simply move freely. For example, a fourth support member may exist that does not have a motor and moves freely along all axes.

[0050] like Figure 1 As shown, each of the support legs 104 is equipped with a motor 108a-c and is controlled to move separately relative to the support 106 where the motor 108a-c is located. The illustrated system orientation directs the motors 108a-c to move the support plate in the Z direction (up and down). When each motor 108a-c operates separately, the position of the joint 110, and therefore the position of the support plate 102, can move proportionally in different directions or not at all. This combination of movements causes a corresponding movement of the support plate 102. Using the three motors 108a-c, the support plate 102 can be moved to any height in the Z-axis or θX or θY rotation of the system. The precise movement of each support leg 104 is determined by the controller to position the workpiece at the desired precise location. The precise movement given by the motors 108a-c is determined by the controller and generated in combination with other movements in the XY plane, as described below.

[0051] Each first connector 116 is attached to and below a support plate 102, and each second connector 118 is connected between the first connector 116 and the connector 110. The system comprises three support structures 200 positioned at equal distances (i.e., at 120° angles to each other) around the edge of the support plate. Referring to FIG. 3a, each first connector 116 extends tangentially along the circumference of a circle having a center C, as previously described. Each first connector 116 includes an elongated guide 300 through which an elongated support rod 302 extends as a sliding connection. The elongated guide includes a connector 301 linking the first connector 116 to the second connector 118. At each end of the elongated rod 302, there are respective upwardly curved portions 304a and 304b, both extending to a support rod 306 attached to a base 308 of the support plate 102. Inside the guide member 300 is a motor 108, which, during operation, moves the elongated rod 302 within and relative to the elongated guide member 300. Any movement of the elongated rod 302 relative to the guide member 300 causes a corresponding movement of the support plate 102 and thus the workpiece. Any movement will cause movement in at least one degree of freedom of the system.

[0052] Similarly, Figure 3b shows the second connectors 118. Each second coupling 118 includes an elongated guide 310 through which an elongated support rod 312 extends. The elongated guide is attached to the first coupling 116 via a connector 311. At each end of the elongated rod 312 are downwardly curved portions 314a and 314b, both extending to the support rod 316 attached to the connector 110. The guide 310 does not contain a motor, but is free to move due to the movement of three motors 108d-f in the first coupling 116, which, during operation, move the elongated rod 302 within and relative to the elongated guide 300. As the second coupling moves freely, any movement given by other motors in the system will produce a corresponding movement of the support plate 102 relative to the second couplings 118 of each support assembly 200. Any movement performed by the first coupling member 116 or the second coupling member 118 due to movement induced by other motors will cause the support plate 102 to move in at least one degree of freedom of the system. As shown in the figure, there are six motors, each of which is associated with translational movement of the support plate and the corresponding workpiece in use in at least one of the six degrees of freedom. With the six motors 108a-f, full-range movement in all six degrees of freedom is possible.

[0053] In the illustrated configuration, motors are present for each degree of freedom, but it is also possible to have fewer motors and translational motion mechanisms to generate individual movements of the legs 104 or couplings 116. In this case, motors with multiple degrees of freedom or similar can be centrally positioned, for example, between the legs, and the necessary drive for moving each of the legs can be transmitted as needed via a translational system. It should be understood that the number, nature, and position of the motors can be further adjusted, as long as movement within the degrees of freedom required by the robot is possible.

[0054] like Figure 2 As shown, there are three support assemblies 200. Each support assembly is placed equidistantly around the circumference of the support plate and has the same angle relative to the center point. Figure 4 Another configuration of the support assembly 200 is shown, in which two support assemblies are perpendicular to each other and another support assembly is positioned around the circumference at a point equidistant from the other two support assemblies. This means that the angular separation is not equal. Two assemblies are perpendicular to each other and a third assembly is at 135° to the other two assemblies. This configuration has some additional advantages. By making the two motors perpendicular, the movement generated by the motors is smoother, especially in the XY direction, where the fact that the two motors 108e and 108f are perpendicular simplifies XY movement. As a result, the risk of stepping movement is lower, and the movement of the support plate 102 is smoother than in some other support assembly orientations. It should be noted that Figure 2 and Figure 4 These refer to two exemplary support assembly locations, and other support assembly locations may be used without departing from the present invention.

[0055] Figure 5 exhibit Figure 1 Technical diagram of the system. The motor, outriggers, and support assembly are not visible because they are enclosed for protection. Includes... Figure 5 To demonstrate another advantageous feature of the invention. Springs 500 are present between the various system supports or robot supports. The purpose of the spring array 500 (which may be of the coiled wire, magnetic, or gas type) is to compensate for a portion of the load on the support plate and thus limit the load on the legs 104. This is useful because it means that the total load on the support plate 102 (which may be several kilograms) is not solely supported by the legs 104. Therefore, when a set period of movement has been performed, the weight of the support plate 102 exerts less stress on the motor. In another example, the springs 500 extend or retract by a known amount after the legs have moved to bear the load after a leg has completed its movement. In both cases, the springs can disengage if necessary to allow movement to continue. In another option, in the prediction of subsequent movement in the XY plane, Z-shaped movement is completed and the springs are deployed within a certain tolerance.

[0056] It should be noted that, depending on the specific circumstances, the movement of the motor can occur in parallel or sequentially.

[0057] The system can move the workpiece to a predetermined position on the support plate with minimal potential deviation from the desired location. The deviation typically does not exceed 3 mm or 0.5°. This is consistent with the requirements necessary for operation under given environmental and usage conditions.

[0058] The system is shown as a fully supported support plate 102, movable in six degrees of freedom, with a stacked configuration of couplers at the top of the legs, all within the circumference of the support plate 102. As a result, the robot's footprint is limited by the support plate 102. This means that the space required in the XY plane does not exceed the size of the support plate. The height of the system or robot is limited to some extent by the height of the legs, and if the legs are fixed, their size is a known minimum. It should be noted that retractable legs can reduce the overall height of the system and can also be used to facilitate movement along the Z-axis. Motors 18a-c can be used to extend or compress the legs when they are inherently retractable.

[0059] The invention described above describes a scenario for manufacturing power supply devices for wafers or chips. It is also applicable to any other robot control environment, subject to necessary adaptations for different applications. For example, the support system can carry optical, mechanical, or other devices for measurement, program execution, and so on.

[0060] The various examples described are intended to include variations and other features that will make the scope of the appended claims clear. The above description includes various uses given only by way of example, and many other uses are foreseeable.

[0061] It should be noted that there are many variations of the features described above that are included within the scope of the appended claims.

[0062] Component Symbol List 100: Support System 102: Support plate 104(a), 104(b) and 104(c): Support legs 106: Supporting Structure 108、(108a-f): Motor 110: Connector 112: Spherical end 114: Cup-shaped parts 116: First coupling element 118: Second coupling component 200: Support Assembly 300: Slender guide component 301: Connector 302: Slender rod end 304a and 304b: Bending portion 306: Support rod 308: Base 310: Slender guide component 311: Connector 312: Slender rod end 314a and 314b: Bending portion 316: Support rod 318: Base 500: Spring

Claims

1. A support system (100) for generating a movement of a support plate (102), the support plate being assembled to convey a workpiece to be moved to a predetermined spatial position relative to a known default position during use, the system comprising: A plurality of support assemblies (200), each of which is configured to move freely along each of the three axes (XYZ) and rotate freely about all of the axes (XYZ), and connected to the support plate (102) to translate the movement to the support plate (102) in at least one of the six degrees of freedom based on the predetermined position; One or more motion units (108a-f), each associated with one of the plurality of support assemblies (200); A controller is configured to drive one or more of the motion units (108a-f) to move the support plate (102) to the predetermined position, wherein the number of the motion units (108a-f) configured to be driven is equal to the number of degrees of freedom required to move the support plate (102) to the predetermined position.

2. The support system (100) as described in claim 1, characterized in that, The support system includes three support assemblies (200) connected to the support plate (102).

3. The support system (100) as described in claim 1 or claim 2, characterized in that, Each support assembly (200) includes two motion units (108a-f) assembled to drive movement along two different axes.

4. The support system (100) as described in any one of the preceding claims, characterized in that, Each of the support assemblies (200) comprises two motion units (108a-f) connected to each other by a joint (110, 112, 114) having six degrees of freedom.

5. The support system (100) as described in any one of the preceding claims, characterized in that, Each of the support assemblies (200) includes a first motion unit (108a-c) and a second motion unit (108d-f), the first motion unit being given movement along a Z-axis relative to the default position, and the second motion unit being given movement in a plane of the support plate (102) relative to the default position.

6. The support system (100) as described in claim 5, characterized in that, The first motion unit (108a-c) is located in one of the legs (104) of the support system; the leg (104) is configured to change the height of the system relative to the default position.

7. The support system (100) as described in claim 5 or claim 6, characterized in that, The second motion unit (108d-f) is located in a coupling member in the plane of the support plate of the support system (102) and is configured to change the position of the system in the plane of the support plate relative to the default position.

8. The support system (100) as described in claim 7, characterized in that, The coupling comprises two orthogonal parts: a first coupling (116) extending in one direction in the plane of the support plate (102) and a second coupling (118) extending in one direction in the plane of the support plate (102), wherein the first coupling (116) is connected to the second coupling (118) and the coupling is located below the support plate (102).

9. The support system (100) as described in any one of the preceding claims, characterized in that, The system further includes a circular support plate (102) attached to the plurality of support assemblies (200) on one circumference.

10. The support system (100) as described in claim 9, characterized in that, The support assemblies (200) are positioned equidistantly around the circumference.

11. The support system (100) as described in claim 9, characterized in that, The support assemblies of the plurality of support assemblies are positioned around the circumference of the support plate, and a first support assembly and a second support assembly are spaced 90° apart.

12. The support system (100) as described in any one of the preceding claims, characterized in that, The support system further includes at least one sensor for measuring the movement of the support plate (102).

13. The support system (100) as described in claim 12, characterized in that, At least one sensor includes at least one component for measuring at least one movement of at least one part of the support system, and is characterized in that the support system includes a component for calculating a position of the support plate (102) based on the measured movement.

14. The support system (100) as described in any of the preceding claims, characterized in that, The support system further includes a spring (500) configured to bear a weight of the support plate (102) before, during, or after the movement of the support plate in a Z direction.

15. A method for moving a support plate in a support system (100) as claimed in any of the preceding claims, the support plate (102) being configured to, in use, convey a workpiece to be moved to a predetermined spatial position relative to a known default position, the method comprising the steps of: moving one or more support assemblies (200), each of the one or more support assemblies being configured to move freely on all axes (XYZ) and rotate freely about all axes, and being connected to the support plate (102) to give the support plate (102) movement in at least one of six degrees of freedom based on the predetermined position by driving one or more motion units (108a-f) to move the support plate (102) to the predetermined position; further comprising driving several motion units (108a-f) to move the support plate (102) to the predetermined position.

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