Pressure self-balancing type split blade mounting rack of mup split blade machine

Abstract

The application relates to the technical field of wafer splitting equipment, in particular to a pressure self-balancing type splitting cutter mounting rack of an mup wafer splitting machine, which comprises a cutting table, a cutter mounting rack, a cutting splitting cutter and a driving motor, further comprises a gas buffer assembly, an isolation piston, a liquid buffer assembly, a metal bellows and a floating support assembly, the gas buffer assembly is installed below the driving motor and is located above the cutting splitting cutter, through the cooperative mode of the gas buffer assembly, the isolation piston, the liquid buffer assembly, the metal bellows and the floating support assembly, the problem of insufficient impact force buffering capacity of the existing splitting cutter mounting rack in the instant contact is solved, the impact buffering and absorbing effect is good, the uniformity and stability of the cutting pressure are ensured, the probability of material edge collapse and fragmentation in the cutting process is reduced, and the qualified rate of wafer splitting processing is improved.

Description

Technical Field

[0001] This invention relates to the field of wafer dicing equipment technology, specifically to a pressure self-balancing dicing blade mounting bracket for a mup dicing machine. Background Technology

[0002] In the fields of semiconductors, optoelectronic displays, and precision electronics manufacturing, mup usually refers to under-display microstructure technology and multifunctional composite panels. The mup slitting machine is mainly a precision slitting device used to process micron-level high-precision panels with under-display microstructures or ultra-thin glass / silicon-based panels. The slitting blade mounting bracket is the core motion and mechanical support component of this device that carries the cutting / slitting tools.

[0003] When cutting brittle and hard materials (sapphire / glass / wafer), the materials are extremely hard and prone to chipping and breakage. They are also highly sensitive to cutting pressure. When the cutting blade presses down on the material surface, slight variations in surface flatness or slight tilting of the cutting blade holder during long-distance downward pressure can lead to excessive or insufficient local pressure. This can cause chipping, breakage, or even failure to crack completely, resulting in dead cracks. Current technology incorporates a pressure self-balancing mechanism on the cutting blade holder. This mechanism automatically adjusts the blade's rigidity based on the reaction forces at various points upon contact with the material surface. (When the force on one end increases, the pressure self-balancing mechanism automatically distributes the force to the other end.) One end) allows the cutting blade to smoothly cut the material surface; however, when the cutting blade contacts the material surface, the motion state that was originally almost unforced will instantly become a state subject to cutting resistance. Compared to a sudden impact, the impact force generated when the cutting blade contacts the material will be transmitted through the blade to the mounting frame, thus forming instantaneous vibration. The existing pressure self-balancing structure is mainly used to realize the attitude and position compensation of the cutting blade. Its buffering capacity for sudden impact is limited, so it is difficult to effectively absorb the impact force in a very short time. This can easily lead to the vibration being further transmitted to the mounting frame. When the impact force is reflected inside the mounting frame, it can cause the stress sensor signal to become distorted, or even cause the cutting blade to break due to instantaneous high pressure fatigue in the local heat conduction area.

[0004] To address this, a pressure-balanced blade mounting bracket for the mup blade splitter is proposed. Summary of the Invention

[0005] The purpose of this invention is to provide a pressure self-balancing blade mounting bracket for a UP blade splitter. By using a gas buffer assembly, an isolation piston, a liquid buffer assembly, a metal bellows, and a floating support assembly in synergy, this invention solves the problem of insufficient buffering capacity of existing blade mounting brackets for instantaneous impact force. It has a good impact buffering and absorption effect, ensures uniform and stable cutting pressure, reduces the probability of material chipping and breakage during cutting, and improves the pass rate of blade splitting.

[0006] To achieve the above objectives, the present invention provides the following technical solution: A pressure-balanced dicing blade mounting bracket for a MUPU dicing machine includes a cutting table, a blade mounting bracket, a dicing blade, and a drive motor. It also includes a gas buffer assembly, an isolation piston, a liquid buffer assembly, a metal bellows, and a floating support assembly. The gas buffer assembly is mounted below the drive motor and above the dicing blade. The isolation piston is disposed within the gas buffer assembly. The liquid buffer assembly is fixed to the bottom end of the isolation piston and extends below the gas buffer assembly. The metal bellows is sleeved around the outer periphery of the gas buffer assembly, with its two ends connected to the gas buffer assembly and the liquid buffer assembly, respectively. The floating support assembly is mounted at the bottom end of the liquid buffer assembly and is connected to the dicing blade. When the drive motor... After the cutting blade, driven by the motor, presses down and contacts the glass surface, the cutting blade, under the reaction force of the glass, causes the floating support assembly to float slightly upward along the axial direction. At the same time, it causes the liquid buffer assembly to undergo axial compression displacement relative to the gas buffer assembly, causing the liquid inside the liquid buffer assembly to flow and buffer. When the liquid buffer assembly reaches its displacement limit, it pushes the isolation piston to compress the gas inside the gas buffer assembly. Thus, through the synergistic effect of gas elastic buffering and liquid viscous energy dissipation, the impact force generated when the cutting blade contacts the glass is buffered and absorbed. In addition, the metal bellows undergoes elastic deformation during the axial displacement of the liquid buffer assembly, so as to flexibly guide and support the liquid buffer assembly and reduce the transmission of impact vibration to the tool mounting bracket.

[0007] Preferably, the gas buffer assembly includes a gas chamber, a through groove, a partition plate, an interconnecting hole, and a top plate. The gas chamber is located below the drive motor. The through groove is formed at the bottom end of the gas chamber. The isolation piston is movably disposed in the middle part of the gas chamber. The partition plate is fixed inside the gas chamber and is located above the isolation piston. The interconnecting hole is formed through the top end of the partition plate. The top plate is fixed at the top end of the gas chamber and is fixedly connected to the bottom end of the drive motor.

[0008] Preferably, the liquid buffer assembly includes a liquid cavity, a through hole, a throttling plate, micropores, and a base plate. The liquid cavity is fixed to the bottom end of the isolation piston and is located inside the gas cavity. The through hole is opened at the bottom end of the liquid cavity. The throttling plate is disposed inside the liquid cavity, and its bottom end extends through the through hole and through groove to the bottom of the gas cavity. The micropores are opened at the top end of the throttling plate and are distributed in a ring array along the outer periphery of the throttling plate. The base plate is fixed to the bottom end of the throttling plate and is located below the gas cavity.

[0009] Preferably, the metal corrugated pipe is sleeved on the outer periphery of the gas cavity, and its two ends are connected to the top plate and the bottom plate respectively.

[0010] Preferably, the floating support assembly includes a limiting ring, a floating block, a fixed column, a connecting column, and a disc spring. The limiting ring is fixed to the bottom end of the base plate. The floating block is disposed inside the limiting ring, and its bottom end is fixedly connected to the top end of the cutting blade. The fixed column is fixed at the center of the bottom end of the base plate and is located above the floating block. The connecting column is fixed to the top end of the floating block and is slidably connected to the fixed column. The disc spring is fixed inside the fixed column, and its bottom end is in contact with the top end of the connecting column.

[0011] Preferably, the inner wall of the fixed column is provided with a guide groove, which is distributed in a ring array along the inner circumference of the fixed column. A guide block is fixed on the outer circumference of the connecting column, which is distributed in a ring array along the outer circumference of the connecting column. The guide block is slidably connected to the guide groove.

[0012] Preferably, the limiting ring has an internal flared structure, and the inner circumferential diameter of the flared structure decreases from bottom to top along its axial direction.

[0013] Preferably, the outer periphery of the top of the floating block has a circular arc transition structure, and the inner side of the limiting ring is a circular arc surface that matches the outer periphery of the top of the floating block, so that the floating block gradually forms a flexible contact limiting with the limiting ring during the axial floating process.

[0014] Preferably, the gas chamber is filled with high-pressure inert gas, and the liquid chamber is filled with damping silicone oil, so as to synergistically buffer the impact vibration generated when the cutting blade contacts the glass through the elastic compression of the high-pressure inert gas and the viscous energy dissipation of the damping silicone oil.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. In application, when the drive motor drives the cutting blade to press down and contact the glass surface, the cutting blade is subjected to the instantaneous reaction force of the glass surface and drives the floating support component to float upward along the axis. The floating support component can first adaptively and elastically buffer the impact force generated at the moment of cutting. At the same time, the damping silicone oil inside the hydraulic buffer component will generate different degrees of flow damping buffer through the throttling channel according to the impact pressure. The high-pressure inert gas inside the gas buffer component will also generate corresponding elastic compression buffer according to the compression pressure. Combined with the elastic deformation of the metal bellows, it provides flexible isolation and guiding support for the impact vibration. Thus, the entire buffer structure can form multi-level adaptive buffer according to the change of cutting pressure, avoiding the problems of instantaneous hard collision, secondary vibration and blade chipping in the high-frequency cutting process of traditional rigid installation structures, and improving the pressure stability, cutting consistency and continuous cutting stability of the cutting blade during the cutting process.

[0016] 2. By using a limiting ring, a floating block, and a disc spring, the instantaneous impact generated when the cutting blade contacts the material can be elastically buffered first. The gradual contact between the outer arc surface of the floating block and the inner arc surface of the limiting ring forms a progressive flexible limit, avoiding the instantaneous hard collision and secondary vibration of the traditional rigid limiting structure. This reduces the risk of blade chipping and improves the stability and continuous cutting accuracy of the cutting blade during the cutting process.

[0017] 3. By setting up a metal bellows, the hydraulic buffer assembly can generate flexible elastic deformation during axial floating. On the one hand, it can provide flexible guiding support for the hydraulic buffer assembly, avoiding offset and jamming during the buffering process. On the other hand, it can further block the transmission of impact vibration to the tool mounting bracket, thereby reducing the interference of vibration on the stress sensor detection signal and reducing the possibility of resonance of the tool mounting bracket under high-frequency cutting conditions, thus improving the cutting stability and service life of the splitting machine during long-term continuous operation. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a cross-sectional view of the overall structure of the present invention; Figure 3 This is a schematic diagram of the metal bellows structure of the present invention; Figure 4 This is a cross-sectional view of the metal bellows structure of the present invention; Figure 5 This is an exploded view of the gas buffer assembly structure of the present invention; Figure 6 This is an exploded cross-sectional view of the gas buffer assembly structure of the present invention; Figure 7 This is an exploded view of the floating support component structure of the present invention; Figure 8 This is an exploded cross-sectional view of the floating support component structure of the present invention.

[0019] In the diagram: 1. Cutting table; 2. Tool mounting bracket; 3. Cutting blade; 4. Drive motor; 5. Gas buffer assembly; 51. Gas chamber; 511. Through slot; 52. Divider plate; 521. Interconnecting hole; 53. Top plate; 6. Isolation piston; 7. Liquid buffer assembly; 71. Liquid chamber; 711. Through hole; 72. Throttling plate; 721. Micro-hole; 73. Base plate; 8. Metal bellows; 9. Floating support assembly; 91. Limiting ring; 92. Floating block; 93. Fixed column; 931. Guide slot; 94. Connecting column; 941. Guide block; 95. Disc spring. Detailed Implementation

[0020] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] Please see Figures 1 to 8 This invention provides a pressure self-balancing blade mounting bracket for a mup blade splitter, the technical solution of which is as follows: Reference Figure 1 , Figure 2 , Figure 3 and Figure 4A pressure-balanced cleaver mounting bracket for a MUPU cleaver includes a cutting table 1, a cleaver mounting bracket 2, a cleaver 3, and a drive motor 4. The cutting table 1 integrates a primary positioning camera, a cutting platform, a dust removal mechanism, a fine positioning camera, and an automatic loading and unloading mechanism. The cleaver mounting bracket 2 is fixed to the top of the cutting table 1. The cleaver 3 and the drive motor 4 are both mounted on the cleaver mounting bracket 2. The bracket also includes a gas buffer assembly 5, an isolation piston 6, a liquid buffer assembly 7, a metal bellows 8, and a floating support assembly 9. The gas buffer assembly 5 is installed below the drive motor 4 and above the cleaver 3. The gas buffer assembly 5 is used to generate elastic buffering through internal gas compression when the cleaver 3 is subjected to a reaction force upon contact with the glass. The impact force is buffered twice, and after cutting, the isolation piston 6 and the liquid buffer assembly 7 are pushed back to their initial positions by other rebound forces, thereby improving the pressure stability and reset stability during the cutting process. The isolation piston 6 is located inside the gas buffer assembly 5 and is used to isolate the gas buffer assembly 5 from the liquid buffer assembly 7 to prevent the gas and damping liquid from mixing. At the same time, when the liquid buffer assembly 7 moves, it transmits hydraulic pressure to the gas chamber 51 to achieve gas-liquid synergistic buffering. The liquid buffer assembly 7 is fixed to the bottom end of the isolation piston 6 and extends below the gas buffer assembly 5. The liquid buffer assembly 7 is used to generate viscous energy dissipation buffering through the internal damping liquid flow after the cutting blade 3 is subjected to the glass reaction force. The instantaneous impact of the cutting blade is buffered by an initial energy dissipation mechanism, forming a multi-stage buffer structure in conjunction with the gas buffer assembly 5. A metal bellows 8 is fitted around the outer periphery of the gas buffer assembly 5, with its two ends connected to both the gas buffer assembly 5 and the liquid buffer assembly 7. The metal bellows 8 connects the gas buffer assembly 5 and the liquid buffer assembly 7, allowing the liquid buffer assembly 7 to undergo a slight axial floating displacement. Upon impact, the liquid buffer assembly 7 uses its own elastic deformation to provide initial flexible buffering of the impact vibration, thereby reducing the transmission of vibration and impact towards the tool mounting bracket 2. A floating support assembly 9 is installed at the bottom of the liquid buffer assembly 7 and is connected to the cutting blade 3. The floating support assembly 9 is used to generate a slight axial floating when the cutting blade 3 is subjected to an instantaneous reaction force, further buffering the impact force. Initial buffering is performed, and secondary vibrations caused by rigid collisions are reduced through a progressive limiting structure. When the drive motor 4 drives the cutting blade 3 to press down and contact the glass surface, the cutting blade 3, under the reaction force of the glass, causes the floating support component 9 to float slightly upward along the axial direction. At the same time, it causes the liquid buffer component 7 to undergo axial compression displacement relative to the gas buffer component 5, causing the liquid inside the liquid buffer component 7 to flow and buffer. When the liquid buffer component 7 reaches its limit, it pushes the isolation piston 6 to compress the gas inside the gas buffer component 5. Thus, the impact force generated when the cutting blade 3 contacts the glass is buffered and absorbed through the synergistic effect of gas elastic buffering and liquid viscous energy dissipation. In addition, the metal bellows 8 undergoes elastic deformation during the axial displacement of the liquid buffer component 7.The liquid buffer assembly 7 is flexibly guided and supported to reduce the transmission of impact vibration to the tool mount 2; When the drive motor 4 drives the cutting blade 3 downward and it comes into contact with the glass surface, the glass surface will generate an upward reaction force on the cutting blade 3. When the cutting pressure is low, the floating block 92 only floats slightly upward, the disc spring 95 undergoes slight elastic compression, and the limiting ring 91 and the floating block 92 still maintain a gap. At this time, the slight impact vibration generated by the cutting blade 3 when it contacts the glass is mainly buffered by the elastic buffer of the disc spring 95, the small flow throttling of the damping silicone oil inside the liquid buffer assembly 7, and the slight elastic deformation of the metal bellows 8, so as to reduce the impact vibration during light-touch cutting. Rigid contact impact; as the cutting pressure increases, the floating block 92 will float further upward along the axial direction and compress the disc spring 95. At the same time, the fixed column 93 will drive the base plate 73 to move upward, causing the throttle plate 72 to move upward inside the liquid cavity 71. The flow velocity of the damping silicone oil through the micropores 721 increases, and the impact energy is dissipated and buffered by the viscous resistance of the damping silicone oil. When the liquid buffer assembly 7 continues to move upward, the isolation piston 6 will further compress the high-pressure inert gas inside the gas cavity 51, causing the high-pressure inert gas to generate elastic compression buffer, thereby dissipating the energy through the viscous energy dissipation of the liquid and the elastic energy storage of the gas. The synergistic effect of the components provides multi-stage buffering against impact vibrations during normal cutting. When the cutting blade 3 is subjected to a large instantaneous impact reaction force, the floating block 92 continues to float upward and gradually enters the constriction area of ​​the limiting ring 91, causing the outer arc surface of the floating block 92 to gradually form a progressive contact limit with the inner arc surface of the variable gap limiting ring 91. At this time, the overall stiffness of the buffer structure will adaptively increase with the increase of floating displacement to avoid excessive displacement of the floating block 92. Simultaneously, the damping silicone oil inside the liquid buffer component 7 will pass through the micropores 721 at high speed to form a high-damping energy dissipation state, and the high-damping silicone oil inside the gas cavity 51 will also contribute to the high-damping energy dissipation state. The pressurized inert gas also generates deep compression buffer, and together with the large elastic deformation of the metal bellows 8, it further blocks the transmission of impact vibration to the tool mounting bracket 2, thereby avoiding blade chipping, bottom impact of the buffer structure, and high-frequency resonance of the tool mounting bracket 2. After the cutting is completed, the drive motor 4 drives the cutting blade 3 to lift upward, the high-pressure inert gas releases the compression energy to push the isolation piston 6 and the liquid buffer assembly 7 to reset, the disc spring 95 pushes the floating block 92 to return to the initial position, and the metal bellows 8 simultaneously generates elastic rebound, thereby restoring the entire buffer structure to its initial state for the next cutting operation.

[0022] Reference Figure 5 and Figure 6In one embodiment of the present invention, the gas buffer assembly 5 specifically includes a gas cavity 51, a through groove 511, a partition plate 52, an interconnecting hole 521, and a top plate 53. The gas cavity 51 is located below the drive motor 4 and is used to contain high-pressure inert gas. When the isolation piston 6 moves upward, it compresses the high-pressure inert gas to form an elastic energy storage buffer effect. The through groove 511 is opened at the bottom end of the gas cavity 51 to provide axial movement space for the throttling plate 72, so that the liquid buffer assembly 7 can move stably along the inside of the gas cavity 51. The isolation piston 6 is movably located in the middle part of the gas cavity 51. An annular sealing ring is provided on the outer periphery of the isolation piston 6. The annular sealing ring forms a sliding seal with the inner wall of the gas cavity 51 to prevent high-pressure inert gas leakage and prevent damping liquid from entering the gas cavity 51. The partition plate 52 is fixed inside the gas cavity 51 and is located above the isolation piston 6. 52 divides the internal space of the gas chamber 51 and uses the interconnecting hole 521 to balance the gas pressure on the upper and lower sides, avoiding local pressure changes that could lead to compression instability. The interconnecting hole 521 is opened through the top of the partition plate 52, connecting the gas spaces on the upper and lower sides of the partition plate 52. This allows the pressure in the upper and lower chambers to gradually equalize during gas compression, thereby improving gas buffering stability. The interconnecting hole 521 is a throttling micro-orifice structure, with a diameter smaller than 5% of the flow area corresponding to the effective compression area of ​​the isolation piston 6. This is used to slowly balance the gas pressure on the upper and lower sides of the partition plate 52, avoiding local pressure changes and maintaining the compression buffering capacity of the gas chamber 51. The top plate 53 is fixed to the top of the gas chamber 51 and is fixedly connected to the bottom of the drive motor 4. The top plate 53 is fixed to the top of the gas chamber 51 and is used to fixally connect to the drive shaft of the drive motor 4. The top of the metal bellows 8 is fitted around the outer periphery of the gas chamber 51 and fixedly connected to the bottom of the top plate 53.

[0023] Reference Figure 5 and Figure 6In one embodiment of the present invention, the liquid buffer assembly 7 specifically includes a liquid cavity 71, a through hole 711, a throttling plate 72, a micropore 721, and a base plate 73. The liquid cavity 71 is fixed to the bottom end of the isolation piston 6 and is located inside the gas cavity 51. It is used to contain damping silicone oil and form a liquid flow buffer space during the movement of the throttling plate 72. The through hole 711 is opened at the bottom end of the liquid cavity 71 to provide a guiding movement space for the throttling plate 72 and improve its movement stability. The throttling plate 72 is disposed inside the liquid cavity 71, and its bottom end extends through the through hole 711 and the through groove 511 to the bottom of the gas cavity 51. The throttling plate 72 moves inside the liquid cavity 71 and through the micropore 721. The flow rate of the damping silicone oil is limited to form a liquid damping energy dissipation effect. Micropores 721 are opened through the top of the throttling plate 72 and are distributed in a ring array along the outer periphery of the throttling plate 72. When the base plate 73 pushes the throttling plate 72 to move upward inside the liquid cavity 71, it squeezes the damping silicone oil inside the liquid cavity 71, allowing the damping silicone oil to flow through the micropores 721. When the damping silicone oil is forced to pass through these micropores 721 at high frequency under pressure, it generates a large viscous resistance, which quickly converts the transient impact kinetic energy at the moment of contact into internal energy (heat energy) and dissipates it. The base plate 73 is fixed at the bottom of the throttling plate 72 and is located below the gas cavity 51. It is used to receive the impact force transmitted by the fixed column 93 and drive the throttling plate 72 and the liquid buffer assembly 7 to move as a whole. A polytetrafluoroethylene sealing ring or a fluororubber sealing ring is provided on the outer periphery of the throttling plate 72 to form a closed throttling cavity inside the liquid cavity 71, thereby ensuring that the damping silicone oil flows preferentially through the micropores 721 after being pressurized, thus generating throttling energy consumption.

[0024] Reference Figure 3 , Figure 4 , Figure 5 and Figure 6 In one embodiment of the present invention, the metal bellows 8 is sleeved on the outer periphery of the gas cavity 51, and its two ends are respectively connected to the top plate 53 and the bottom plate 73. It generates axial elastic compression or tension synchronously with the reciprocating motion of the bottom plate 73. Utilizing its "axial flexibility and lateral rigidity" characteristics, it provides high-precision guidance when the liquid buffer assembly 7 moves upward, locks the axis of the cutting blade 3, prevents lateral sway, and blocks and further absorbs residual high-frequency impact vibration, preventing the vibration from being transmitted upward to the tool mounting bracket 2. Thus, it protects the stress sensor signal from distortion from the physical source and prevents the cutting blade 3 from chipping due to high-pressure fatigue.

[0025] Reference Figure 3 , Figure 4 , Figure 7 and Figure 8As one embodiment of the present invention, specifically, the floating support assembly 9 includes a limiting ring 91, a floating block 92, a fixed column 93, a connecting column 94, and a disc spring 95. The limiting ring 91 is fixed to the bottom end of the base plate 73. An elastic buffer layer is provided on the inner side of the limiting ring 91. When the floating block 92 contacts the limiting ring 91, it first compresses the elastic buffer layer to achieve progressive variable stiffness buffer limiting. Specifically, when the upward compression stroke of the floating block 92 is about to end, the arc surface of the floating block 92 and the limiting ring 91 gradually fit together to form a flexible contact limiting, which completely avoids the secondary secondary vibration caused by the hard collision of metal rigidity. The floating block 92 is set inside the limiting ring 91, and its bottom end is fixedly connected to the top end of the cutting blade 3 to support the cutting blade 3 and to withstand the reaction force of the glass. The force drives the cutting blade 3 to float slightly axially to form an inertial floating buffer. The fixed column 93 is fixed at the center of the bottom end of the base plate 73 and is located above the floating block 92. It is used to provide axial guidance support for the connecting column 94 and transmit the impact force to the base plate 73. The connecting column 94 is fixed at the top of the floating block 92 and is slidably connected to the fixed column 93. It is used to connect the floating block 92 and the disc spring 95 and transmit the axial impact force. The disc spring 95 is fixed inside the fixed column 93 and its bottom end is in contact with the top end of the connecting column 94. When the cutting blade 3 touches the material, the floating block 92 and the connecting column 94 move upward to compress the disc spring 95 first, providing an "adaptive initial buffer" for the instantaneous impact force. After the cutting is completed, the floating block 92 is pushed back to its initial position.

[0026] Reference Figure 8 As one embodiment of the present invention, specifically, the inner wall of the fixed column 93 is provided with a guide groove 931, which is distributed in a ring array along the inner circumference of the fixed column 93. The outer circumference of the connecting column 94 is fixed with a guide block 941, which is distributed in a ring array along the outer circumference of the connecting column 94. The guide block 941 is slidably connected with the guide groove 931, which plays a precise axial movement guiding role, improves the movement stability of the floating block 92, and avoids the floating block 92 from deviating.

[0027] Reference Figure 4 and Figure 8 As one embodiment of the present invention, specifically, the limiting ring 91 has an flared structure inside, and the inner circumferential diameter of the flared structure decreases from bottom to top along its axial direction. In the vertical axial direction, it provides a non-rigid displacement guide channel for the floating block 92 below, with the space gradually narrowing. This gradually decreasing radial dimension restriction makes the lateral constraint force on the floating block 92 increase in a gradual (non-abrupt) manner when it moves upward, providing a spatial geometric basis for subsequent flexible locking.

[0028] Reference Figure 4 and Figure 8As one embodiment of the present invention, specifically, the outer periphery of the top of the floating block 92 is a circular arc transition structure, and the inner side of the limiting ring 91 is a circular arc surface that matches the outer periphery of the top of the floating block 92, so that the floating block 92 gradually forms a flexible contact limit with the limiting ring 91 during the axial floating process. When the cutting blade 3 moves upward to contact the material, the circular arc surfaces of the two gradually approach each other from the "separated" state, and finally achieve non-adhesive bonding between the surfaces. Through the "gradual contact" of the circular arc surfaces, the collision of the originally hard mechanical dead block is transformed into a progressive variable stiffness contact, which completely avoids the rebound and secondary high-frequency secondary vibration caused by the rigid hard collision of metal parts. Moreover, the matching circular arc surface has a self-centering effect during the bonding process, which can slightly adaptively correct the small tilt tolerance generated by the cutting blade 3 when it is pressed down, and ensure the perpendicularity when splitting.

[0029] Reference Figure 3 , Figure 4 , Figure 5 and Figure 6 In one embodiment of the present invention, the gas chamber 51 is filled with a high-pressure inert gas, namely nitrogen, and the liquid chamber 71 is filled with damping silicone oil. The impact vibration generated when the cutting blade 3 contacts the glass is buffered by the elastic compression of the high-pressure inert gas and the viscous energy dissipation of the damping silicone oil. In the millisecond time of the cutting blade 3 contacting the material, the high-pressure inert gas acts as a nonlinear mechanical spring and the damping silicone oil acts as an energy conversion medium (generating fluid shear through the micropores 721). Damping silicone oil utilizes its extremely high viscous resistance to instantly convert the destructive mechanical impact kinetic energy into fluid internal energy (heat energy) at the moment of contact with the material, thus smoothing out the peak value of the vibration waveform. High-pressure inert gas utilizes its compressibility to absorb the residual dynamic pressure transmitted from the liquid, providing fatigue-free and highly responsive elastic support, and driving the entire system to generate long-term dynamic reset after cutting. The two components combine rigidity and flexibility, and are connected in multiple stages, which completely solves the problems of stress sensor signal distortion caused by impact vibration transmitted to the tool mounting bracket 2 during high-frequency and high-load cutting, as well as the hard damage of local blade chipping due to high-pressure fatigue.

[0030] Working principle: When the drive motor 4 drives the cutting blade 3 to press down along the guide rail and contact the material surface for cutting, the cutting reaction force is instantaneously applied to the cutting blade 3. The cutting blade 3 causes the floating support assembly 9 to float slightly upward, allowing it to initially buffer the instantaneous impact force. Simultaneously, as the floating support assembly 9 floats upward, the reaction force is transmitted to the liquid buffer assembly 7, compressing the liquid inside. When the liquid buffer assembly 7 is compressed to its limit, it pushes the isolation piston 6 to compress the high-pressure inert gas inside the gas buffer assembly 5. This compression is then achieved through the gas buffer assembly 5 and the liquid... The buffer assembly 7 works in concert to further buffer the impact force, and during the upward movement of the liquid buffer assembly 7, it simultaneously compresses the metal bellows 8, so as to flexibly guide the displacement of the liquid buffer assembly 7 and suppress part of the impact vibration transmitted to the tool mounting bracket 2, thereby avoiding vibration-induced stress sensor signal distortion or blade breakage. After the cutting is completed, the drive motor 4 drives the cutting blade 3 to lift up, and the high-pressure inert gas pushes the isolation piston 6 and the liquid buffer assembly 7 to reset. At the same time, it drives the metal bellows 8 to elastically reset, and the floating support assembly 9 is also reset under the action of its internal elastic structure, thereby restoring the entire mechanism to its initial state and waiting for the next cutting operation.

[0031] Specifically, when the drive motor 4 drives the cutting blade 3 to press down along the guide rail and contact the material surface for cutting, the cutting reaction force is instantaneously applied to the cutting blade 3. The cutting blade 3 drives the floating block 92 to move upward through the connecting column 94 along the inside of the fixed column 93 and compress the disc spring 95. At the same time, the guide block 941 slides inside the guide groove 931 to provide a guiding function. The disc spring 95 can initially buffer the instantaneous impact force. During the upward floating process of the floating block 92, the outer arc surface of its top gradually comes into contact with the inner arc surface of the limiting ring 91. The gradual contact between the two achieves flexible limiting and avoids secondary vibration caused by rigid collision. While the floating block 92 compresses the disc spring 95, the reaction force is transmitted to the bottom plate 73 through the fixed column 93, which in turn drives the bottom plate 73 to push the throttling plate 72 to move upward in sequence inside the through groove 511 and through hole 711. This causes the top of the throttling plate 72 to move upward inside the liquid cavity 71. At this time, the damping silicone oil inside the liquid cavity 71 will be throttled. The flow in the micropores 721 on plate 72 relies on the viscous resistance of the damping silicone oil to consume the impact energy, achieving the first buffering energy dissipation. After the viscous resistance of the damping silicone oil is overcome, the liquid cavity 71 moves upward with the isolation piston 6 inside the gas cavity 51, compressing the high-pressure inert gas inside the gas cavity 51. The elastic compression of the high-pressure inert gas further buffers the impact. At the same time, the interconnecting holes 521 on the partition plate 52 balance the gas pressure on the upper and lower sides of the partition plate 52, ensuring the stability of the compression process. The metal bellows 8 moves upward with the base plate 73 and generates elastic compression synchronously. On the one hand, it provides flexible guidance for the entire buffer displacement process, and on the other hand, it further blocks the impact vibration from being transmitted upward to the tool mounting bracket 2, avoiding vibration-induced stress sensor signal distortion or blade breakage. After the cutting is completed, the drive motor 4 drives the cutting blade 3 to lift up, the high-pressure inert gas pushes the isolation piston 6 to reset, the disc spring 95 pushes the connecting column 94 and the floating block 92 to reset, the metal bellows 8 elastically resets, and the entire mechanism returns to its initial state, waiting for the next cutting operation.

[0032] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A pressure-balanced splitter mounting bracket for a MUPU splitter, comprising a cutting table, a blade mounting bracket, a cutting blade, and a drive motor, characterized in that: It also includes a gas buffer assembly, an isolation piston, a liquid buffer assembly, a metal bellows, and a floating support assembly. The gas buffer assembly is installed below the drive motor and above the cutting blade. The isolation piston is disposed inside the gas buffer assembly. The liquid buffer assembly is fixed to the bottom end of the isolation piston and extends below the gas buffer assembly. The metal bellows is sleeved on the outer periphery of the gas buffer assembly, and its two ends are connected to the gas buffer assembly and the liquid buffer assembly, respectively. The floating support assembly is installed at the bottom end of the liquid buffer assembly and is connected to the cutting blade. When the drive motor drives the cutting blade to press down and contact the glass surface, the... The cutting blade is driven by the reaction force of the glass, causing the floating support component to float slightly upward along the axis. At the same time, it causes the liquid buffer component to undergo axial compression displacement relative to the gas buffer component, causing the liquid inside the liquid buffer component to flow and buffer. When the liquid buffer component is displaced to its limit, it pushes the isolation piston to compress the gas inside the gas buffer component. Thus, the impact force generated when the cutting blade contacts the glass is buffered and absorbed through the synergistic effect of gas elastic buffering and liquid viscous energy dissipation. In addition, the metal bellows undergoes elastic deformation during the axial displacement of the liquid buffer component to provide flexible guidance and support for the liquid buffer component and reduce the transmission of impact vibration to the tool mounting bracket. The gas buffer assembly includes a gas chamber, a through groove, a partition plate, an interconnecting hole, and a top plate. The gas chamber is located below the drive motor. The through groove is opened at the bottom end of the gas chamber. The isolation piston is movably located in the middle part of the gas chamber. The partition plate is fixed inside the gas chamber and is located above the isolation piston. The interconnecting hole is opened through the top end of the partition plate. The top plate is fixed at the top end of the gas chamber and is fixedly connected to the bottom end of the drive motor. The liquid buffer assembly includes a liquid cavity, a through hole, a throttling plate, micropores, and a base plate. The liquid cavity is fixed to the bottom end of the isolation piston and is located inside the gas cavity. The through hole is opened at the bottom end of the liquid cavity. The throttling plate is disposed inside the liquid cavity, and its bottom end extends through the through hole and through groove to the bottom of the gas cavity. The micropores are opened at the top end of the throttling plate and are distributed in a ring array along the outer periphery of the throttling plate. The base plate is fixed to the bottom end of the throttling plate and is located below the gas cavity.

2. The pressure self-balancing blade mounting bracket for a mup blade splitter according to claim 1, characterized in that: The metal corrugated pipe is sleeved on the outer periphery of the gas cavity, and its two ends are connected to the top plate and the bottom plate respectively.

3. The pressure self-balancing blade mounting bracket for a mup blade splitter according to claim 1, characterized in that: The floating support assembly includes a limiting ring, a floating block, a fixed column, a connecting column, and a disc spring. The limiting ring is fixed to the bottom end of the base plate. The floating block is disposed inside the limiting ring, and its bottom end is fixedly connected to the top end of the cutting blade. The fixed column is fixed at the center of the bottom end of the base plate and is located above the floating block. The connecting column is fixed to the top end of the floating block and is slidably connected to the fixed column. The disc spring is fixed inside the fixed column, and its bottom end is in contact with the top end of the connecting column.

4. The pressure self-balancing blade mounting bracket for a mup blade splitter according to claim 3, characterized in that: The inner wall of the fixed column is provided with a guide groove, which is distributed in a ring array along the inner circumference of the fixed column. The outer circumference of the connecting column is fixed with a guide block, which is also distributed in a ring array along the outer circumference of the connecting column. The guide block is slidably connected to the guide groove.

5. A pressure self-balancing blade mounting bracket for a mup blade splitter according to claim 3, characterized in that: The limiting ring has an internal flared structure, and the inner diameter of the flared structure decreases from bottom to top along its axial direction.

6. A pressure self-balancing blade mounting bracket for a mup blade splitter according to claim 5, characterized in that: The top outer periphery of the floating block has a circular arc transition structure, and the inner side of the limiting ring is a circular arc surface that matches the top outer periphery of the floating block, so that the floating block gradually forms a flexible contact limit with the limiting ring during the axial floating process.

7. A pressure self-balancing blade mounting bracket for a mup blade splitter according to claim 2, characterized in that: The gas chamber is filled with high-pressure inert gas, and the liquid chamber is filled with damping silicone oil. The elastic compression of the high-pressure inert gas and the viscous energy dissipation of the damping silicone oil work together to buffer the impact vibration generated when the cutting blade contacts the glass.

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