A length-compatible high-precision ingot clamping device for semiconductors

Abstract

This application discloses a length-compatible high-precision crystal ingot clamping device for semiconductors, relating to the field of crystal ingot processing technology. It improves upon the problems of existing clamps, which suffer from uneven clamping force and easy damage to crystal ingots due to their inability to adapt to the shape of the crystal ingot, as well as poor versatility and difficulty in accommodating crystal ingots of various sizes. The device includes a lifting rod, a base disposed on the lifting rod, and clamping modules arranged at intervals. Each clamping module includes a first clamping part and a second clamping part disposed opposite to each other on the base. The first clamping part is disposed on the base, and the second clamping part is slidably disposed on the base. The base is provided with a control component for controlling the movement of the second clamping part. Floating clamping assemblies are respectively disposed on the opposing surfaces of the first and second clamping parts. Each floating clamping assembly includes a slider, a spring for pushing the slider to reset, and an inflatable bladder. The slider has an opening for the inflatable bladder to expand. When the inflatable bladder is inflated, it pushes the slider to overcome the elastic force of the spring and extend, causing the inflatable bladder to expand out of the opening to contact and clamp the crystal ingot.

Description

Technical Field

[0001] This application relates to the field of crystal rod processing technology, and in particular to a length-compatible high-precision crystal rod clamping device for semiconductors. Background Technology

[0002] In the semiconductor and photovoltaic industry chain, the cutting and grinding of brittle and hard crystal materials such as monocrystalline silicon are crucial upstream processes. During this process, the crystal ingot needs to be clamped and transported using a specialized clamping device, and the stability of the clamping determines the quality and yield of subsequent processing.

[0003] Currently, the traditional clamps commonly used in the industry are mostly rigid or hydraulic clamps designed for specific diameter specifications. These traditional clamps struggle to adapt to the inherent dimensional tolerances, cylindricity deviations, or variations in the specifications of different batches of crystal ingots. This results in uneven clamping force distribution, easily leading to excessive localized stress concentration and causing micro-cracks on the crystal ingot surface. Furthermore, the frequent clamp changes to accommodate different sized crystal ingots severely restrict the flexibility of the production line and reduce production efficiency.

[0004] Therefore, there is an urgent need for a length-compatible, high-precision ingot clamping device for semiconductors to improve the shortcomings of existing technologies. Summary of the Invention

[0005] In order to improve the problems of uneven clamping force and easy damage to crystal rods caused by the inability of existing clamps to adapt to the shape of crystal rods, as well as poor versatility and difficulty in compatibility with crystal rods of multiple sizes, this application provides a length-compatible high-precision crystal rod clamping device for semiconductors.

[0006] This application provides a length-compatible high-precision crystal rod clamping device for semiconductors, which adopts the following technical solution: A length-compatible high-precision crystal rod clamping device for semiconductors includes a lifting rod, a base disposed at the bottom end of the lifting rod, and clamping modules spaced apart along the length direction of the crystal rod. The clamping modules include a first clamping part and a second clamping part disposed opposite to each other on the base. The first clamping part is fixedly disposed on the base, and the second clamping part is slidably disposed on the base. The base is provided with a control component for controlling the movement of the second clamping part. Floating clamping assemblies are respectively provided on the opposing surfaces of the first clamping part and the second clamping part. The floating clamping assembly includes a slider, a spring for pushing the slider to reset, and an air bladder. The slider has an opening for the air bladder to expand. When the air bladder is inflated, the air bladder pushes the slider to overcome the elastic force of the spring and extend, so that the air bladder expands out of the opening to contact and clamp the crystal rod.

[0007] By adopting the above technical solution, the distance between the two clamping parts can be flexibly adjusted through the first clamping part and the slidable second clamping part, and equipped with control components, thereby adapting to crystal rods of different lengths and improving the versatility of the device. In addition, by inflating the air bag to push the slider out and directly contact the crystal rod, the flexible air bag can automatically conform to the irregular cylindrical surface of the crystal rod, changing the traditional rigid point / line contact into a uniform surface contact, effectively dispersing the clamping force and fundamentally preventing the generation of microcracks on the surface of the crystal rod.

[0008] Preferably, multiple floating clamping components are provided in the first clamping part and the second clamping part located in the same clamping module, and are arranged at intervals along the circumferential direction of the crystal rod.

[0009] By adopting the above technical solution, clamping force can be applied simultaneously and uniformly from multiple directions to form a stable force closed loop, which effectively prevents the crystal rod from rotating or shifting during processing or transportation, thus ensuring the processing accuracy.

[0010] Preferably, the structures of the first clamping part and the second clamping part are different. The first clamping part includes a V-shaped first clamping block; the second clamping part includes a hook-shaped second clamping block. The first clamping block and the second clamping block each have two mounting cavities that completely accommodate a set of sliders, springs and airbags. During installation, the airbag is fixed in the mounting cavity, and when the airbag is not inflated, the sliders and airbags are completely located inside the mounting cavity.

[0011] Using the above technical solution, the first clamping block of the V-shaped structure can perform preliminary axial positioning and centering of the crystal rod, while the hook-shaped second clamping block completes the envelopment from the other side, jointly restricting the crystal rod's degrees of freedom in the horizontal and vertical directions, making the initial positioning faster and more accurate.

[0012] Preferably, the control component is a drive cylinder, and the base includes a mounting plate for mounting the drive cylinder and a fixed plate for sliding connection of the mounting plate. The fixed plate is provided with a motor for driving the mounting plate to move, and the mounting plate is threadedly connected to the screw of the motor. The piston rod of the drive cylinder is fixedly connected to the second clamping part.

[0013] Preferably, the slider and the inner wall of the mounting cavity form a sliding pair, and one end of the spring abuts against the inner wall of the mounting cavity, while the other end abuts against the side wall of the slider.

[0014] By adopting the above technical solution, the design of the sliding pair ensures that the slider can only move in a straight line in the predetermined direction, avoiding jamming or swaying; while the spring's abutment installation method clarifies the force relationship, ensuring the timely and reliable reset action, thereby ensuring that the entire floating clamping mechanism can work stably and repeatedly.

[0015] Preferably, the airbag is connected to an air source via an air passage pipe, and the air passage pipe is equipped with a pneumatic control valve for controlling inflation and deflation; the airbag is made of a flexible material with high elasticity and low modulus, and after inflation, the airbag bulges out of the opening in an arc-shaped structure; a number of pinholes are spaced apart on the arc surface of the airbag.

[0016] Using the above technical solution, the air pressure of the inflatable bladder can be precisely adjusted via a pneumatic control valve, thereby accurately controlling the clamping force and enabling rapid clamping and releasing actions. Furthermore, the inflatable bladder utilizes a "highly elastic, low-modulus" material and forms an "arc-shaped structure," ensuring that after inflation, it gently conforms to the crystal rod surface with the largest contact area and optimal envelope shape, maximizing pressure dispersion and avoiding stress concentration.

[0017] Preferably, it also includes a control system, which is communicatively connected to the drive cylinder and the clamping module. The control system has pre-stored clamping parameters for crystal rods of different specifications, and can automatically control the drive cylinder to adjust the distance between the first clamping part and the second clamping part for coarse positioning according to the input crystal rod specification information. Then, it controls the inflation bag to inflate, so that the inflation bag extends out of the opening and fits against the surface of the crystal rod, applying a preset clamping force.

[0018] By adopting the above technical solution, the control system integrates the control of the drive cylinder and the air bladder, seamlessly connecting the two steps of coarse positioning (adjusting the spacing) and fine clamping (adjusting the clamping force) without manual intervention. Furthermore, it can call up the pre-stored clamping parameters to automatically apply the optimal and consistent clamping scheme to crystal rods of different specifications, thereby ensuring product yield.

[0019] In summary, this application includes at least one of the following beneficial effects: 1. This application provides a floating clamping assembly consisting of an airbag and a spring on the first clamping part and the second clamping part. When the airbag is inflated, it can push the slider out and bulge itself to adaptively fit the outer contour of the crystal rod. This flexible contact transforms the traditional concentrated point / line force into a uniformly distributed surface force, which can significantly reduce local stress, thereby avoiding the generation of microcracks on the surface of the crystal rod and improving the yield and quality of the product. 2. In addition, this application also achieves rapid adaptation to crystal rods of different lengths by using a second clamping part that can slide up and down in conjunction with a drive cylinder. At the same time, the expansion of the air bladder in the floating clamping assembly is controllable, which enables it to be compatible with diameter changes of crystal rods within a certain range. This "pneumatic diameter adjustment" method allows the device to adapt to crystal rods of different diameters, reducing downtime caused by frequent clamp changes due to product changes, and greatly improving production efficiency and equipment versatility. 3. By setting up a control system and pre-storing clamping parameters for different crystal rods, the system can automatically complete the process of "first driving the cylinder for coarse positioning, and then controlling the inflation bag to inflate for fine clamping" according to the input specification information. This process does not require manual intervention, is not only easy to operate, but also can accurately control the clamping force and positioning accuracy, effectively avoiding human error and ensuring the reliability and stability of each clamping operation. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the clamping module in the retracted state in this embodiment of the application; Figure 2 This is a partial cross-sectional schematic diagram of the clamping module clamping the crystal rod in this embodiment of the present application; Figure 3 yes Figure 2 Enlarged diagram of point A in the middle.

[0021] Explanation of reference numerals in the attached drawings: 1. Hanging rod; 2. Base; 21. Fixing plate; 211. Moving motor; 22. Mounting plate; 3. Clamping module; 31. First clamping part; 311. First clamping block; 32. Second clamping part; 321. Second clamping block; 33. Mounting cavity; 4. Control component; 5. Floating clamping assembly; 51. Slider; 511. Opening; 52. Spring; 53. Inflatable bladder. Detailed Implementation

[0022] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0023] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0024] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0025] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0026] In addition, the term "multiple" should mean two or more.

[0027] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0028] This application discloses a length-compatible high-precision crystal ingot clamping device for semiconductors, comprising a lifting rod 1, a base 2, and a clamping module 3. The top end of the lifting rod 1 is connected to a crane or robotic arm, and the bottom end of the lifting rod 1 is rotatably connected to the base 2. The clamping module 3 includes two sets of opposing first clamping parts 31 and second clamping parts 32. In use, the first clamping parts 31 and the second clamping parts 32 work together to clamp and transport the crystal ingot.

[0029] Furthermore, the first clamping part 31 is fixedly installed at the bottom of the base 2 as the reference end for clamping. The second clamping part 32 is slidably installed below the base 2, allowing it to move relative to the first clamping part 31 and adjust the distance between the first clamping part 31 and the second clamping part 32.

[0030] Specifically, the structures of the first clamping part 31 and the second clamping part 32 are different. The first clamping part 31 includes a V-shaped first clamping block 311, and the second clamping part 32 includes a hook-shaped second clamping block 321; the first clamping block 311 and the second clamping block 321 each have two mounting cavities 33 that completely accommodate a set of sliders 51, springs 52, and inflatable bladders 53. During installation, the inflatable bladder 53 is fixed in the mounting cavity 33, and when the inflatable bladder 53 is not inflated, the sliders 51 and the inflatable bladder 53 are completely located within the mounting cavity 33.

[0031] Furthermore, a sliding pair is formed between the slider 51 and the inner wall of the mounting cavity 33, and one end of the spring 52 abuts against the inner wall of the mounting cavity 33, while the other end abuts against the side wall of the slider 51.

[0032] A control component 4 is provided on the base 2 to control the movement of the second clamping part 32. In this embodiment, the control component 4 is a drive cylinder. The cylinder body of the drive cylinder is fixed to the top of the base 2, and the piston rod of the drive cylinder is fixedly connected to the top of the second clamping block 321.

[0033] In addition, the base 2 includes a mounting plate 22 for mounting the drive cylinder and a fixing plate 21 for sliding connection of the mounting plate 22. One end of the fixing plate is equipped with a motor 211 for driving the mounting plate to move. The mounting plate 22 is threadedly connected to the screw of the motor 211. In use, the mounting plate is driven to move by the motor 211, so as to drive the first clamping part 31 and the second clamping part 32 to move in opposite or opposite directions, and adjust the distance between the two to accommodate the clamping of crystal rods of different lengths.

[0034] Furthermore, the first clamping part 31 and the second clamping part 32 are each provided with two floating clamping components 5 on their opposing surfaces. The floating clamping components 5 of the first clamping part 31 and the second clamping part 32 located in the same clamping module 3 are arranged at intervals along the same circumference of the crystal rod.

[0035] In this embodiment, the floating clamping assembly 5 includes a slider 51, a spring 52, and an inflatable bladder 53. The slider 51 is slidably mounted in the mounting cavity 33 inside the first clamping part 31, forming a sliding pair. One end of the spring 52 abuts against the inner wall of the first mounting cavity 33, and the other end abuts against the side wall of the slider 51, providing a restoring force for the slider 51. An opening 511 is provided on the slider 51. Similarly, the floating clamping assembly 5 (slider 51, spring 52, and inflatable bladder 53) is mounted on the second clamping part 32.

[0036] When the airbag 53 is not inflated, the slider 51 is in the retracted position under the action of the spring 52 (located in the first mounting cavity 33 or the second mounting cavity 33). At this time, both the airbag 53 and the slider 51 are completely contained within the mounting cavity 33. When the airbag 53 is inflated, it pushes the slider 51 to extend forward against the force of the spring 52, causing the airbag 53 to bulge out from the opening 511 of the slider 51, forming an arc-shaped structure, and adaptably fitting and clamping the outer surface of the crystal rod.

[0037] Furthermore, the airbag 53 is made of a highly elastic, low-modulus flexible material, such as high-strength silicone, polyurethane, or silicone rubber. After inflation, the airbag 53 bulges out of the opening 511 in an arc-shaped structure to increase the contact area with the crystal rod and reduce stress concentration during clamping.

[0038] Furthermore, the inflatable bladder 53 is connected to an air source via an air passage, and the air passage is equipped with a pneumatic control valve for controlling inflation and deflation. Also, the inflatable bladders 53 located in the same first clamping part 31 or second clamping part 32 are controlled by independently provided air sources, so as to adjust the different diameter positions of the individual clamping modules 3 clamping the same crystal rod.

[0039] Furthermore, the curved surface of the airbag 53 is provided with several tiny pinholes at intervals. Before clamping the crystal rod, clean gas can be introduced and discharged through the pinholes to blow clean the surface of the crystal rod.

[0040] A length-compatible high-precision crystal ingot clamping device for semiconductors also includes a control system, which is communicatively connected to the drive cylinder and the pneumatic control valves of each clamping module 3. The control system has pre-stored clamping parameters for crystal ingots of different specifications, including clamping spacing and clamping force. During operation, only the crystal ingot specification information needs to be input, and the control system will automatically control the drive cylinder to adjust the spacing between the first clamping part 31 and the second clamping part 32 for coarse positioning, and then control the inflation bladder 53 to inflate, causing the inflation bladder 53 to extend and conform to the surface of the crystal ingot, applying a preset clamping force.

[0041] A length-compatible high-precision crystal ingot clamping device for semiconductors, the working principle of which is roughly as follows: First, the clamping device is moved to the crystal rod location. The crystal rod specifications are input through the control system, and the system automatically adjusts the distance between the first clamping part 31 and the second clamping part 32 in each clamping module 3. Then, the clamping device is lowered so that the crystal rod is placed between the first clamping block 311 and the second clamping block 321. Next, the control system controls the inflation bladder 53 to inflate, pushing the slider 51 to extend. The inflation bladder 53 bulges out and tightly adheres to the surface of the crystal rod, applying a uniform clamping force. After clamping is completed, transfer or processing operations can be performed. When it is necessary to release the crystal rod, the control system controls the inflation bladder 53 to deflate, the slider 51 retracts under the action of the spring 52, the inflation bladder 53 returns to its original shape, and the clamping device can be removed.

[0042] The inflatable bladder 53 in the floating clamping assembly 5 adapts to the shape of the crystal rod, transforming rigid contact into flexible surface contact, effectively dispersing clamping force and preventing damage to the crystal rod surface. Simultaneously, the adjustable-pitch clamping design accommodates crystal rods of different lengths, improving the equipment's versatility and production efficiency.

[0043] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A length-compatible high-precision crystal ingot clamping device for semiconductors, characterized in that: It includes a lifting rod (1), a base (2) disposed at the bottom end of the lifting rod (1), and clamping modules (3) spaced apart along the length of the crystal rod. The clamping modules (3) include a first clamping part (31) and a second clamping part (32) disposed opposite to each other on the base (2). The first clamping part (31) is fixedly disposed on the base (2), and the second clamping part (32) is slidably disposed on the base (2). The base (2) is provided with a control member (4) for controlling the movement of the second clamping part (32). A floating clamping assembly (5) is provided on the opposing surfaces of the first clamping part (31) and the second clamping part (32). The floating clamping assembly (5) includes a slider (51), a spring (52) for pushing the slider (51) to reset, and an air bladder (53). The slider (51) has an opening (511) for the air bladder (53) to bulge out. When the air bladder (53) is inflated, the air bladder (53) pushes the slider (51) to overcome the elastic force of the spring (52) and extend out, so that the air bladder (53) bulges out of the opening (511) to contact and clamp the crystal rod.

2. The semiconductor length-compatible high-precision ingot clamping device according to claim 1, characterized in that: Multiple floating clamping components (5) are provided in the first clamping part (31) and the second clamping part (32) located in the same clamping module (3), and are arranged at intervals along the circumferential direction of the crystal rod.

3. A semiconductor length-compatible high-precision ingot clamping device according to claim 2, characterized in that: The structures of the first clamping part (31) and the second clamping part (32) are different. The first clamping part (31) includes a V-shaped first clamping block (311); the second clamping part (32) includes a hook-shaped second clamping block (321). The first clamping block (311) and the second clamping block (321) each have two mounting cavities (33) that completely accommodate a set of sliders (51), springs (52), and airbags (53). During installation, the airbags (53) are fixed in the mounting cavities (33), and when the airbags (53) are not inflated, the sliders (51) and the airbags (53) are completely located in the mounting cavities (33).

4. The semiconductor length-compatible high-precision ingot clamping device according to claim 1, characterized in that: The control component (4) is a drive cylinder. The base (2) includes a mounting plate (22) for mounting the drive cylinder and a fixing plate (21) for sliding connection of the mounting plate (22). The fixing plate is provided with a motor (211) for driving the mounting plate to move. The mounting plate (22) is threadedly connected to the screw of the motor (211). The piston rod of the drive cylinder is fixedly connected to the second clamping part (32).

5. A semiconductor length-compatible high-precision ingot clamping device according to claim 3, characterized in that: The slider (51) and the inner wall of the mounting cavity (33) form a sliding pair. One end of the spring (52) abuts against the inner wall of the mounting cavity (33), and the other end abuts against the side wall of the slider (51).

6. The semiconductor length-compatible high-precision ingot clamping device according to claim 1, characterized in that: The inflatable bladder (53) is connected to the air source through an air passage pipe. The air passage pipe is equipped with a pneumatic control valve for controlling inflation and deflation. The inflatable bladder (53) is made of a flexible material with high elasticity and low modulus. After inflation, the inflatable bladder (53) bulges out of the opening (511) in an arc shape. Several gap holes are provided at intervals on the arc surface of the inflatable bladder (53).

7. A length-compatible high-precision ingot clamping device for semiconductors according to claim 1, characterized in that: It also includes a control system, which is connected in communication with the drive cylinder and the clamping module (3). The control system has pre-stored clamping parameters for crystal rods of different specifications, and can automatically control the drive cylinder to adjust the distance between the first clamping part (31) and the second clamping part (32) for coarse positioning according to the input crystal rod specification information. Then, it controls the inflation bag (53) to inflate, so that the inflation bag (53) extends out of the opening (511) and fits against the surface of the crystal rod, applying a preset clamping force.

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