A semiconductor material cutting apparatus

The semiconductor material cutting device, which uses sliding, deflection, and rotation cutting mechanisms, solves the problems of insufficient cutting quality and precision, equipment stability and heat dissipation and chip removal, as well as inadequacy in flexibility and adaptability, achieving efficient and stable cutting results and extending equipment life.

CN122401671APending Publication Date: 2026-07-17SHENZHEN DELTA INNOVATION SEMICON CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHENZHEN DELTA INNOVATION SEMICON CO LTD
Filing Date
2026-06-03
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing semiconductor material cutting equipment has shortcomings in cutting quality and precision, equipment stability and heat dissipation and chip removal, flexibility and adaptability, resulting in low cutting efficiency, high cost and short equipment life.

Method used

A semiconductor material cutting device employing sliding, deflection, and rotation cutting mechanisms is used. The sliding mechanism enables coarse adjustment of the cutting position, the deflection adjustment mechanism changes the spatial angle of the cutting head, and the rotation cutting mechanism enables short-distance rotation of the cutting line. Combined with precise cooling and chip removal, the cutting stability and adaptability are improved.

Benefits of technology

It significantly improves cutting quality and precision, enhances equipment stability and flexibility, extends the service life of the cutting line, and reduces production costs.

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Abstract

本发明涉及半导体技术领域,具体是一种半导体材料切割装置,包括正对设置的两个支撑安装板,支撑安装板的上端均设置有V型安装架,V型安装架的端部均设置有固定安装环,还包括:滑移机构、偏转调节机构、周转切割机构。本半导体材料切割装置采用创新周转切割方式,使切割线始终保持较短作业长度,显著抑制振动、磨损与应力,从而大幅提升切割面质量与尺寸精度;装置集成多自由度调节与稳定导向系统,具备灵活适应性;其精准冷却与辅助排屑设计有效控制产热并导出碎屑;切割线的自动张紧能进一步保障切割的稳定性;整体结构在提升切割效率与质量的同时,显著延长了切割线与装置的使用寿命。
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