Process for purification of electronic grade CO2
By employing side-stream gas phase extraction and multi-stage precision filtration processes, combined with cryogenic dehydration, dehydrocarbonization, and deacidification units, the problems of high energy consumption and incomplete impurity removal in existing electronic-grade CO2 purification processes have been solved. This enables the efficient and economical preparation of high-purity CO2, meeting the requirements of high-end semiconductor manufacturing processes.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- AISHENGKE (JIANGSU) CHEM TECH CO LTD
- Filing Date
- 2026-04-23
- Publication Date
- 2026-07-17
AI Technical Summary
Existing electronic-grade CO2 purification processes suffer from high energy consumption, low impurity removal efficiency, short adsorbent regeneration cycle, and insufficient product cleanliness, failing to meet the 7N and above purity requirements of high-end semiconductor manufacturing processes.
The method employs side-stream gas phase extraction combined with multi-stage precision filtration, first filtering and then condensing and liquefying, combined with cryogenic dehydration, dehydrocarbon removal and deacidification units, and reduces energy consumption through mild distillation conditions, thoroughly removing difficult-to-adsorb hydrocarbon impurities and particulate matter, and stably producing high-purity CO2.
It effectively reduces equipment investment and energy consumption, extends the adsorbent regeneration cycle, avoids metal ion pollution, improves product purity, and solves the problems of high energy consumption and incomplete impurity removal in traditional processes, stably preparing electronic-grade CO2 with a purity of 7N and above.
Smart Images
Figure CN122403451A_ABST