抗腐蚀涂层沉积方法、前驱体输送管路系统、原子层沉积机台
By forming a dense, corrosion-resistant coating on the pipes and inner walls of the reaction chamber of the atomic layer deposition machine, the problems of reliability and insufficient equipment performance of the transport pipeline system are solved, achieving effective protection against corrosive precursors and long service life of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- CHENWEI EQUIP TECH (SUZHOU) CO LTD
- Filing Date
- 2026-06-16
- Publication Date
- 2026-07-17
AI Technical Summary
The reliability and performance of the precursor transport pipeline system of atomic layer deposition equipment are insufficient. Existing anti-corrosion treatment methods are prone to failure when faced with corrosive precursors, resulting in corrosion of the pipeline substrate and process contamination.
An anti-corrosion coating is formed on the inner wall surface of the pipeline and reaction chamber. Through multiple film deposition processes, the pipeline is heated to the deposition temperature using external heating components, and the temperature of the reaction chamber is independently controlled to form a dense anti-corrosion coating to block the penetration of corrosive precursors.
It improves the reliability of the piping system and equipment performance, avoids disassembly damage, ensures complete coverage of the anti-corrosion coating, enhances protection against corrosive precursors, extends equipment life and reduces process contamination.
Smart Images
Figure CN122406192A_ABST