Magnetic levitation turbo-molecular pump
By employing a final stage stationary vane array and a variable cross-section guide channel design in the magnetic levitation turbomolecular pump, the problem of poor outlet flow field stability was solved, resulting in more stable gas discharge and higher adaptability, thus improving the overall operational reliability of the machine.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Filing Date
- 2026-06-11
- Publication Date
- 2026-07-17
AI Technical Summary
Existing magnetic levitation turbomolecular pumps exhibit poor outlet flow field stability under high vacuum conditions. In particular, during semiconductor etching and thin film deposition processes, gas reflection and backflow lead to increased pressure fluctuations in the outlet flow field, affecting the stability of pumping speed and compression ratio.
The system employs a final stage of stationary blades in conjunction with a guide vane. The final stage of stationary blades is responsible for rectification, while the variable cross-section guide vane is responsible for smooth exhaust. Through the coordinated design of the final stage of stationary blades and the variable cross-section guide vane, the velocity gradient and pressure abrupt changes in the outlet channel are reduced, thereby minimizing local stagnation and recirculation zones.
It improves the stability of the outlet flow field, enhances the adaptability of the molecular pump under different outlet back pressure conditions, improves the overall manufacturing consistency and long-term operational reliability, and avoids additional disturbances to high vacuum and ultra-high vacuum systems.
Smart Images
Figure CN122407580A_ABST