Drive device for a valve plate and transfer valve

Abstract

The application provides a valve plate driving device and a transmission valve, which comprises a shell, a horizontal carrier movably arranged in the shell, a driving shaft movably arranged in the horizontal carrier, one end of the driving shaft extending to the outside of the shell for connecting a valve plate, a first driver arranged in the horizontal carrier and connected with the driving shaft for driving the driving shaft to move along the axial direction, and a second driver arranged in the horizontal carrier for driving the horizontal carrier to move along the direction perpendicular to the plane where the horizontal carrier is arranged. The driving device provided by the application is characterized in that the first driver is arranged in the interior of the horizontal carrier, the second driver is arranged in the exterior of the horizontal carrier, and the first driver and the second driver are cooperated to enable the driving shaft to realize "L" type movement, so that the overall structure is simple and the reliability of the transmission valve during work is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and in particular to a valve plate driving device and a transmission valve. Background Technology

[0002] In semiconductor equipment, transfer valves play a crucial role, primarily used to isolate vacuum chambers with different functions within the equipment. These transfer valves are typically equipped with rectangular transfer channels, with a valve plate at the channel opening to seal the valve port. The opening and closing of the valve plate is generally achieved by pneumatic actuation. Various designs exist for the valve plate's movement trajectory: some use only vertical up-and-down movement to perform the opening and closing operation; others combine vertical and horizontal movement; and still others add a swinging motion to the vertical movement to achieve valve closure. Among these, the combination of independent vertical and independent horizontal movement, commonly known as "L"-shaped movement, is highly favored due to its superior performance.

[0003] Regardless of the motion method used, the control of the valve plate relies on a series of cylinders, supplemented by a complete guiding and transmission mechanism. Taking "L"-shaped motion as an example, this requires both vertical cylinders and their transmission mechanisms for vertical movement, and horizontal cylinders and their transmission mechanisms for horizontal movement. During vertical movement, the horizontal direction must remain completely fixed and must not move at all; similarly, during horizontal movement, the vertical cylinders and transmission mechanisms must also remain stable and avoid any movement.

[0004] However, existing drive mechanisms, due to their large number of cylinders and complex overall structure, are prone to cylinder asynchrony, leading to problems such as jamming or tilting, significantly increasing the probability of failure. Furthermore, the presence of numerous relatively moving parts intensifies friction between internal mechanical components, not only causing wear but also potentially leading to contamination from wear particles. Summary of the Invention

[0005] The technical problem to be solved by this application is to provide a valve plate driving device and a transmission valve, which has a simple structure, greatly improves the reliability of use, and reduces the pollution to the process environment.

[0006] To solve the above-mentioned technical problems, in a first aspect, this application provides a valve plate driving device, comprising: case; A horizontal platform is movably disposed within the housing; A drive shaft is movably mounted on the horizontal platform, with one end of the drive shaft extending to the outside of the housing for connecting a valve plate; A first driver is disposed on the horizontal platform and connected to the drive shaft, for driving the drive shaft to move along its axial direction; The second driver is located on the horizontal platform and is used to drive the horizontal platform to move in a direction perpendicular to the plane on which the horizontal platform is located. In some embodiments of this application, a drive channel is provided within the horizontal platform; The drive shaft is movably inserted into the drive channel; The first driver is located in the drive channel and connected to the drive shaft, and is used to drive the drive shaft to reciprocate along its axial direction.

[0007] In some embodiments of this application, the first driver includes a drive ring, a first axial air chamber, and a second axial air chamber; The drive ring is movably located within the drive channel and divides the drive channel into a first axial air chamber and a second axial air chamber. The first axial air chamber is close to the valve plate, and the drive ring is fixedly sleeved on the drive shaft. When the first axial air chamber is inflated, the pressure inside the first axial air chamber increases and pushes the drive ring to move, thereby causing the drive shaft to extend. When the second axial air chamber is inflated, the pressure inside the second axial air chamber increases and pushes the drive ring to move, thereby causing the drive shaft to retract towards the outside of the housing.

[0008] In some embodiments of this application, the driving device further includes a first guide sleeve and a second guide sleeve located within the housing; The first guide sleeve and the second guide sleeve are respectively located on both sides of the horizontal platform and fixedly connected to the horizontal platform, and both the first guide sleeve and the second guide sleeve are sleeved on the drive shaft.

[0009] In some embodiments of this application, the drive device further includes a first sealing ring and a second sealing ring; The inner sidewall of the first guide sleeve is provided with an annular first sealing groove, and the first sealing ring is disposed in the first sealing groove and sleeved on the drive shaft; The inner sidewall of the second guide sleeve is provided with an annular second sealing groove, and the second sealing ring is disposed in the second sealing groove and sleeved on the drive shaft.

[0010] In some embodiments of this application, the second driver includes a top air chamber and a bottom air chamber, the top air chamber being located at the top of the horizontal stage and the bottom air chamber being located at the bottom of the horizontal stage; When the top air chamber is inflated, the increased pressure inside the top air chamber pushes the horizontal platform to move towards the bottom air chamber; when the bottom air chamber is inflated, the increased pressure inside the bottom air chamber pushes the horizontal platform to move towards the top air chamber.

[0011] In some embodiments of this application, the number of the top groove and the number of the bottom groove are both even. The top groove and the bottom groove are both located on opposite sides of the drive shaft.

[0012] In some embodiments of this application, the drive device further includes a guide shaft; The horizontal platform is provided with a guide hole that extends from the top to the bottom of the horizontal platform to conduct the horizontal platform. The guide shaft passes through the guide hole and is fixedly connected to the housing.

[0013] In some embodiments of this application, the sidewall of the housing is provided with an elongated hole corresponding to the drive shaft, the extension direction of the elongated hole is opposite to the movement direction of the second driver driving the horizontal platform, and the width of the elongated hole is greater than the diameter of the drive shaft; One end of the drive shaft passes through the elongated hole to connect to the valve plate.

[0014] In a second aspect, embodiments of this application provide a transmission valve, including a valve plate, a connecting plate, and the aforementioned driving device; The connecting plate is used to connect to the vacuum chamber, and the connecting plate is provided with a transmission port; The drive device is connected to the connecting plate, and one end of the drive shaft extends to the transmission port; The valve plate is located at the transmission port and connected to one end of the drive shaft.

[0015] The advantages of the valve plate drive device and transmission valve provided in this application are as follows: 1. The present application has a first driver installed inside the horizontal stage and a second driver installed outside the horizontal stage. The first driver and the second driver cooperate to enable the drive shaft to achieve "L" shaped movement. The overall structure is simple and improves the reliability of the transmission valve during operation.

[0016] 2. Both the first and second actuators in this application are airbags. By using airbags for driving, the fit between rigid components is reduced, which solves the problem of structural jamming during the driving process from the root and reduces the pollution particles caused by structural wear, thereby improving the reliability of use and reducing pollution. Attached Figure Description

[0017] Figure 1 A schematic diagram of the drive device and valve plate after being connected in the embodiments provided in this application; Figure 2 This is a schematic diagram of the internal structure of the driving device provided in the embodiments of this application; Figure 3 The rear view of the drive device after disassembly of the housing provided in the embodiments of this application; Figure 4 for Figure 3 Sectional view at point AA along the middle; Figure 5 Exploded view of the driving device for the embodiments provided in this application; Figure 6 A schematic diagram of the transmission valve provided in the embodiments of this application.

[0018] Figure label: 1. Housing; 2. Horizontal platform; 21. Drive channel; 22. Top groove; 23. Bottom groove; 24. Guide hole; 3. Drive shaft; 4. First driver; 41. Drive ring; 42. First axial air chamber; 421. First axial air bladder; 43. Second axial air chamber; 431. Second driver; 5. Top air chamber; 51. Top air bladder; 511. Bottom air chamber; 52. Bottom air bladder; 521. First guide sleeve; 61. Second guide sleeve; 62. First sealing ring; 71. Second sealing ring; 72. Guide shaft; 8. Bushing; 9. Drive device; 100. Valve plate; 200. Connecting plate; 300. Transmission port; 310. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this application pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, the term "connection" as used herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0020] Furthermore, it should be understood that the orientations or positional relationships indicated by terms such as "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" in this document are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. The terms "first" and "second" in this document are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "multiple" means two or more.

[0021] To address the problems existing in the prior art, embodiments of this application provide a valve plate driving device, which is used for a transfer valve in a semiconductor device. (Refer to...) Figure 1 and Figure 2 As shown, the driving device includes a housing 1, a horizontal platform 2, a drive shaft 3, a first driver 4, and a second driver 5. The horizontal platform 2 is movably disposed within the housing 1. The drive shaft 3 is movably disposed on the horizontal platform 2, with one end extending outside the housing 1 to connect to the valve plate 200. The first driver 4 is disposed on the horizontal platform 2 and connected to the drive shaft 3, driving the drive shaft 3 to move linearly along its axial direction. The second driver 5 is disposed on the horizontal platform 2, driving the horizontal platform 2 to move in a direction perpendicular to the plane containing the horizontal platform 2. The cooperation of the first driver 4 and the second driver 5 allows the drive shaft 3 to achieve an "L"-shaped movement, thereby driving the valve plate 200 to seal the vacuum chamber.

[0022] In this embodiment, the first driver 4 is located inside the horizontal platform 2 to drive the drive shaft 3, while the second driver 5 is located on the outer surface of the horizontal platform 2 to drive the horizontal platform 2. The cooperation of the first driver 4 and the second driver 5 allows the drive shaft 3 to achieve an "L"-shaped movement, resulting in a simple overall structure. More importantly, this design ensures that the first driver 4 and the second driver 5 do not interfere with each other during operation, thus greatly improving the reliability of the transmission valve during operation.

[0023] Specifically, refer to Figures 2 to 5As shown, a drive channel 21 is provided inside the horizontal platform 2. The drive channel 21 is located in the middle region of the horizontal platform 2 and passes through the horizontal platform 2. The drive shaft 3 is movably inserted through the drive channel 21. The first driver 4 is disposed in the drive channel 21 and connected to the drive shaft 3, and is used to drive the drive shaft 3 to reciprocate along its axial direction.

[0024] It is understandable that, since the first driver 4 is located within the drive channel 21, this specific arrangement creates a close and orderly linkage between the first driver 4, the second driver 5, the drive shaft 3, and the horizontal platform 2. When the second driver 5 is activated and drives the horizontal platform 2 to move, the horizontal platform 2, as a motion platform supporting key components, does not move in isolation, but rather drives the first driver 4 and the drive shaft 3 mounted on it to move together.

[0025] From a mechanical perspective, the horizontal platform 2 undergoes translational motion under the action of the second driver 5. Since the first driver 4 and the drive shaft 3 are physically connected to the horizontal platform 2, they maintain the same motion state as the horizontal platform 2 and move together with it. This linkage ensures that when the horizontal platform 2 is adjusted in position, the first driver 4 and the drive shaft 3 can move synchronously as a whole, avoiding problems such as friction and jamming caused by relative movement between components. This ensures the smoothness and precision of the movement, and thus guarantees the reliability of the drive device's operation.

[0026] refer to Figure 2 , Figure 3 and Figure 4 As shown, in some specific embodiments, the first actuator 4 includes a drive ring 41, a first axial air chamber 42, and a second axial air chamber 43. The drive ring 41 is movably located within the drive channel 21, dividing the drive channel 21 into the first axial air chamber 42 and the second axial air chamber 43. The second axial air chamber 43 is located on the side closer to the valve plate 200, and the drive ring 41 is fixedly sleeved on the drive shaft 3.

[0027] In this embodiment, an air pump is installed on the housing 1, and an air supply channel (not shown in the figure) is provided inside the horizontal platform 2. The air pump is connected to the first axial air chamber 42 and the second axial air chamber 43 through the air supply channel. When the first axial air chamber 42 is inflated, the internal pressure of the first axial air chamber 42 increases, thereby pushing the drive ring 41 to move, so as to drive the drive shaft 3 to extend. When the second axial air chamber 43 is inflated, the internal pressure of the second axial air chamber 43 increases, thereby pushing the drive ring 41 to move, so as to drive the drive shaft 3 to retract towards the outside of the housing 1.

[0028] refer to Figure 5 As shown, in another specific embodiment, the first actuator 4 includes a drive ring 41, a first axial airbag 421, and a second axial airbag 431. The drive ring 41 is movably located within the drive channel 21, dividing the drive channel 21 into an inner air chamber and an outer air chamber. The outer air chamber is located on the side closest to the valve plate 200, and the drive ring 41 is fixedly sleeved on the drive shaft 3. The first axial airbag 421 is disposed within the inner air chamber to form the first axial air cavity 42. The second axial airbag 431 is disposed within the outer air chamber to form the second axial air cavity 43.

[0029] refer to Figure 4 or Figure 5 As shown, in some embodiments, the driving device further includes a first guide sleeve 61 and a second guide sleeve 62 located within the housing 1. The first guide sleeve 61 and the second guide sleeve 62 are respectively disposed on both sides of the horizontal platform 2 corresponding to the driving channel 21 and fixedly connected to the horizontal platform 2, and both the first guide sleeve 61 and the second guide sleeve 62 are sleeved on the driving shaft 3.

[0030] In this embodiment, the first guide sleeve 61 and the second guide sleeve 62 are precisely positioned on both sides of the horizontal platform 2, corresponding to the drive channel 21, based on the internal spatial layout of the housing 1 and the movement trajectory of the drive shaft 3. The horizontal platform 2, as a crucial structure in the drive device that supports key components and participates in movement, has carefully designed positions on both sides to ensure that the first guide sleeve 61 and the second guide sleeve 62 can provide comprehensive and stable support for the drive shaft 3.

[0031] The first guide sleeve 61 and the second guide sleeve 62 can be fixedly connected to the horizontal platform 2 with high precision, for example, by fastening with multiple high-strength bolts. The specifications and number of bolts are precisely calculated and selected according to the load borne by the first guide sleeve 61, the second guide sleeve 62 and the horizontal platform 2 and the operating environment to ensure that the connection is firm and reliable and that there will be no loosening during the frequent extension and retraction of the drive shaft 3.

[0032] refer to Figure 4 As shown, in some embodiments, the drive device further includes a first sealing ring 71 and a second sealing ring 72. The inner wall of the first guide sleeve 61 has an annular first sealing groove, and the first sealing ring 71 is disposed in the first sealing groove and sleeves the drive shaft 3. The inner wall of the second guide sleeve 62 has an annular second sealing groove, and the second sealing ring 72 is disposed in the second sealing groove and sleeves the drive shaft 3.

[0033] In this embodiment, by providing the first sealing ring 71 in the first guide sleeve 61 and the second sealing ring 72 in the second guide sleeve 62, the sealing performance of the first axial air cavity 42 and the second axial air cavity 43 is ensured.

[0034] Understandably, based on this sealing design, the air pump can directly deliver gas to the first axial air chamber 42 and the second axial air chamber 43 through the air supply channel opened on the horizontal platform 2, and the edge of the drive ring 41 has a sealing ring to prevent air leakage between the first axial air chamber 42 and the second axial air chamber 43. The horizontal platform, as an important supporting structure of the drive device, has sufficient space and strength to open the air supply channel. The design of the air supply channel adopts advanced fluid dynamics principles, and its inner diameter and length are optimized to ensure smooth gas flow and reduce pressure loss.

[0035] By connecting the air pump to the air supply channel, precise control of the reciprocating movement of the drive ring 41 can be achieved. The air pump, as the pneumatic power source of the drive device, can provide gas at different pressures and flow rates according to the instructions of the control system. When the drive ring 41 needs to move in one direction, the air pump fills the first axial air chamber 42 or the second axial air chamber 43 with high-pressure gas through the air supply channel, increasing the air pressure in that chamber and generating a force that pushes the drive ring 41 to move. Conversely, when the drive ring 41 needs to move in the opposite direction, the air pump fills the other air chamber while releasing the gas in the original chamber, causing the drive ring 41 to move in the opposite direction under the action of the pressure difference.

[0036] This air supply scheme has many advantages. First, it eliminates the need for the first and second axial airbags, simplifying the structure of the drive device, reducing the number of parts, and lowering manufacturing costs and maintenance difficulty. Second, by directly controlling the inflation and deflation of the air pump, more precise control over the moving speed and position of the drive ring 41 can be achieved, improving the response speed and motion accuracy of the drive device. Furthermore, this scheme offers better reliability and stability, reducing the probability of malfunctions caused by aging or leakage of the first and second axial airbags.

[0037] refer to Figure 2 As shown, in some embodiments, the second driver 5 includes a top air chamber 51 and a bottom air chamber 52, the top air chamber 51 being located at the top of the horizontal stage 2 and the bottom air chamber 52 being located at the bottom of the horizontal stage 2.

[0038] When the top air chamber 51 is inflated, the horizontal platform 2 is pushed to move towards the bottom air chamber 52. When the bottom air chamber 52 is inflated, the horizontal platform 2 is pushed to move towards the top air chamber 51.

[0039] In this embodiment, both the top air chamber 51 and the bottom air chamber 52 are cavity structures, and the edges of the top air chamber 51 and the bottom air chamber 52 are sealed to the horizontal platform 2 through elastic sealing rings. This ensures the sealing of the top air chamber 51 and the bottom air chamber 52 while allowing the connection between the top air chamber 51 and the bottom air chamber 52 and the horizontal platform 2 to undergo a certain deformation, thereby realizing the movement of the horizontal platform 2.

[0040] Furthermore, the top air chamber 51 and the bottom air chamber 52 are symmetrically distributed on the horizontal platform 2, and their shapes and sizes are optimized according to the overall structure of the horizontal platform 2 and the required motion characteristics. For example, the air chambers may be designed as regular cuboids or cylinders to ensure that the gas can uniformly fill the entire air chamber, thereby generating a stable force.

[0041] refer to Figure 5 As shown, in some other embodiments, the top of the horizontal platform 2 has a top groove 22, and the bottom of the horizontal platform 2 has a bottom groove 23. The second actuator 5 includes a top airbag 511 and a bottom airbag 521. The top airbag 511 is disposed in the top groove 22 to form the top air chamber 51, and the bottom airbag 521 is disposed in the bottom groove 23 to form the bottom air chamber 52.

[0042] When the top air chamber 51 is inflated, the horizontal platform 2 is pushed to move towards the bottom air chamber 52. When the bottom air chamber 52 is inflated, the horizontal platform 2 is pushed to move towards the top air chamber 51.

[0043] In this embodiment, the top groove 22 and the bottom groove 23 are symmetrically distributed on the horizontal platform 2, and their shape and size are optimized according to the overall structure of the horizontal platform 2 and the required motion characteristics.

[0044] Furthermore, the top airbag 511 and the bottom airbag 521 are made of highly elastic and high-strength materials, such as rubber or silicone. These materials have good flexibility and durability, and can maintain stable performance during repeated inflation and deflation. The shapes of the top air chamber 51 and the bottom air chamber 52 match the top groove 22 and the bottom groove 23 to ensure a tight fit against the inner wall of the groove.

[0045] In some embodiments, the number of the top air chamber 51 and the bottom air chamber 52 is even, and the top air chamber 51 and the bottom air chamber 52 are located on opposite sides of the drive shaft 3.

[0046] In this embodiment, by setting the number of the top air chamber 51 and the bottom air chamber 52 to an even number, and by arranging the top air chamber 51 and the bottom air chamber 52 opposite each other on both sides of the drive shaft 3, a symmetrical force distribution can be formed during the inflation-driven movement of the horizontal platform 2, thereby improving the stability when pushing the horizontal platform 2 to move.

[0047] In some embodiments, the drive device further includes a guide shaft 8, and a guide hole 24 is provided on the horizontal platform 2. The guide hole 24 extends from the top to the bottom of the horizontal platform 2 to conduct the horizontal platform 2. The guide shaft 8 passes through the guide hole 24 and is fixedly connected to the housing 1.

[0048] In this embodiment, by passing the guide shaft 8 through the guide hole 24, the stability of the horizontal platform during movement is further ensured.

[0049] In some embodiments, the side wall of the housing 1 has an elongated hole corresponding to the drive shaft 3. The extending direction of the elongated hole corresponds to the movement direction of the horizontal platform 2 driven by the second driver 5. The width of the elongated hole is greater than the diameter of the drive shaft 3. One end of the drive shaft 3 passes through the elongated hole for connecting to the valve plate 200.

[0050] In this embodiment, the elongated hole is opened in the side wall of the housing 1 to guide the drive shaft 3 and prevent the drive shaft 3 from shaking during movement.

[0051] Furthermore, the drive device also includes a bushing 9, which is elastic and is fitted onto the drive shaft 3 located on the outside. One end of the bushing 9 is sealed to the side wall of the housing 1 and blocks the elongated hole, while the other end of the bushing 9 is sealed to the outer side wall of the drive shaft 3.

[0052] refer to Figure 6 As shown, in another embodiment of the present invention, a transmission valve is provided, including a valve plate 200, a connecting plate 300, and the aforementioned driving device 100. The connecting plate 300 is used to connect to a vacuum chamber, and a transmission port 310 is provided on the connecting plate 300. The driving device 100 is connected to the connecting plate 300, one end of the driving shaft 3 extends to the transmission port 310, and the valve plate 200 is located at the transmission port 310 and connected to one end of the driving shaft 3.

[0053] In this embodiment, by using the driving device 100 provided in the above embodiment to drive the valve plate 200 to move, the reliability of use is greatly improved and the pollution to the process environment is reduced.

[0054] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A driving device for a valve plate of a transmission valve, characterized in that, include: case; A horizontal platform is movably disposed within the housing; A drive shaft is movably mounted on the horizontal platform, with one end of the drive shaft extending to the outside of the housing for connecting a valve plate; A first driver is disposed on the horizontal platform and connected to the drive shaft, for driving the drive shaft to move along its axial direction; A drive channel is provided inside the horizontal platform; The drive shaft is movably inserted into the drive channel; the first driver is disposed in the drive channel and connected to the drive shaft, for driving the drive shaft to reciprocate along its axial direction; the first driver includes a drive ring, a first axial air chamber and a second axial air chamber; the drive ring is movably located in the drive channel and divides the drive channel into the first axial air chamber and the second axial air chamber, the second axial air chamber being close to the valve plate, and the drive ring being fixedly sleeved on the drive shaft; when the first axial air chamber is inflated, the pressure in the first axial air chamber increases and pushes the drive ring to move, thereby causing the drive shaft to extend; when the second axial air chamber is inflated, the pressure in the second axial air chamber increases and pushes the drive ring to move, thereby causing the drive shaft to retract toward the outside of the housing; The second actuator is disposed on the horizontal platform and is used to drive the horizontal platform to move in a direction perpendicular to the plane where the horizontal platform is located; the side wall of the housing is provided with an elongated hole corresponding to the drive shaft, the extension direction of the elongated hole is opposite to the movement direction of the horizontal platform driven by the second actuator, and the width of the elongated hole is greater than the diameter of the drive shaft. One end of the drive shaft passes through the elongated hole to connect to the valve plate; The second actuator includes a top air chamber and a bottom air chamber, the top air chamber being located at the top of the horizontal stage and the bottom air chamber being located at the bottom of the horizontal stage; both the top air chamber and the bottom air chamber are cavity structures, and the edges of the top air chamber and the bottom air chamber are sealed to the horizontal stage by elastic sealing rings; When the top air chamber is inflated, the increased pressure inside the top air chamber pushes the horizontal platform to move towards the bottom air chamber; when the bottom air chamber is inflated, the increased pressure inside the bottom air chamber pushes the horizontal platform to move towards the top air chamber.

2. The driving device according to claim 1, characterized in that, It also includes a first guide sleeve and a second guide sleeve located within the housing; The first guide sleeve and the second guide sleeve are respectively located on both sides of the horizontal platform and fixedly connected to the horizontal platform, and both the first guide sleeve and the second guide sleeve are sleeved on the drive shaft.

3. The driving device according to claim 2, characterized in that, It also includes a first sealing ring and a second sealing ring; The inner sidewall of the first guide sleeve is provided with an annular first sealing groove, and the first sealing ring is disposed in the first sealing groove and sleeved on the drive shaft; The inner sidewall of the second guide sleeve is provided with an annular second sealing groove, and the second sealing ring is disposed in the second sealing groove and sleeved on the drive shaft.

4. The driving device according to claim 1, characterized in that, The number of the top air chamber and the number of the bottom air chamber are both even. The top air chamber and the bottom air chamber are both located on opposite sides of the drive shaft.

5. The driving device according to claim 1, characterized in that, It also includes guide shafts; The horizontal platform is provided with a guide hole that extends from the top to the bottom of the horizontal platform to conduct the horizontal platform. The guide shaft passes through the guide hole and is fixedly connected to the housing.

6. A transfer valve, characterized in that, Includes a valve plate, a connecting plate, and a drive device as described in any one of claims 1 to 5; The connecting plate is used to connect to the vacuum chamber, and the connecting plate is provided with a transmission port; The drive device is connected to the connecting plate, and one end of the drive shaft extends to the transmission port; The valve plate is located at the transmission port and connected to one end of the drive shaft.

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