一种适用于人形机器人的柔性电容式触觉阵列传感器制备方法
By employing plasma surface activation treatment and gradient drying and shaping processes, combined with high-precision photolithography masks and composite conductive pastes, the interlayer adhesion and consistency issues of humanoid robot tactile array sensors under dynamic working conditions were resolved, achieving high-resolution and high-precision tactile detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 杨世斌
- Filing Date
- 2026-06-17
- Publication Date
- 2026-07-17
AI Technical Summary
In existing technologies, flexible tactile array sensors for humanoid robots are prone to failures such as interlayer bubbling, delamination, and structural cracking under dynamic working conditions, resulting in large dispersion and poor consistency of capacitance parameters, which affects the resolution and positioning accuracy of tactile detection.
Plasma surface activation treatment and gradient drying and shaping process are adopted, combined with high-precision photolithography mask, vacuum debubbling, high-speed spin coating and visual alignment system, and silver nanowire and carbon nanotube composite conductive paste is used to precisely prepare electrodes and dielectric layers. The overall sealing and signal output of the sensor are completed by flexible FPC pin integration and solder joint reinforcement.
It significantly improves the interlayer adhesion of the sensor and the consistency of the electrode array, enhances the resolution and positioning accuracy of tactile detection, and ensures the stability and reliability of the sensor's signal transmission under irregular dynamic structures.
Smart Images
Figure CN122409012A_ABST