Sensor device

By configuring an independent baffle for each pressure sensor in the sensor device and optimizing the distance, the problems of reduced response speed and poor space efficiency of the sensor device in wide-range pressure measurement are solved, and fast response and efficient pressure measurement are achieved.

CN122409052APending Publication Date: 2026-07-17AZBIL CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
AZBIL CORP
Filing Date
2025-08-12
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing sensor devices suffer from reduced response speed and poor space efficiency when measuring pressure over a wide range, especially in compact pressure adjustment chambers in semiconductor manufacturing equipment where space is limited.

Method used

Two pressure sensors are used, each with an independent baffle. By varying the distance between each baffle and the pressure-bearing diaphragm, the response speed is optimized. Furthermore, the structural design of connecting the sensor head with a second tube shortens these distances to improve the response speed.

Benefits of technology

It achieves rapid response of pressure sensors over a wide range, reduces foreign matter buildup, improves space efficiency, and is suitable for pressure regulation chambers in semiconductor manufacturing equipment.

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Abstract

本发明缩短两个压力传感器各自的受压膜片与折流挡板的各距离。传感器装置（10）包括传感器头（30）以及导压管（40）。传感器头（30）包括导压管（31）、以及分别固定在导压管（31）的左右两端的压力传感器（32）及压力传感器（33）。导压管（40）连接在导压管（31）的中途，将被测定流体的压力经由导压管（31）引导至压力传感器（32）及压力传感器（33）。传感器头（30）包括：折流挡板（36），配置在导压管（31）的内部，与传感器元件（32C）的受压膜片（32CA）相向；以及折流挡板（37），配置在导压管（31）的内部，与传感器元件（33C）的受压膜片（33CA）相向。
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