Capacitance diaphragm gauge readout circuit
By integrating a Wien bridge excitation source and a transformer-coupled differential bridge into a capacitive thin-film vacuum gauge readout circuit, the problems of large measurement error and complex structure in the existing technology are solved, and a high-precision, stable, and easily automated capacitive thin-film vacuum gauge readout circuit is realized.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
- Filing Date
- 2026-04-17
- Publication Date
- 2026-07-17
AI Technical Summary
Existing capacitive thin-film vacuum gauge readout circuits suffer from large measurement errors, low signal-to-noise ratios, susceptibility to interference, complex structures, and cumbersome debugging, making it difficult to meet the requirements for high precision, stability, and ease of automated production.
A modular capacitive thin-film vacuum gauge readout circuit was designed by adopting an integrated Wien bridge excitation source and automatic amplitude stabilization circuit, combined with transformer-coupled differential bridge and phase-sensitive detection technology. The circuit includes excitation signal generation, transformer bridge, signal amplification, phase-sensitive detection and low-pass filtering modules, which provide a highly stable signal and suppress common-mode interference.
It achieves high-precision, long-term stable, and easy-to-debug measurement results, adapts to automated production, improves the signal-to-noise ratio and detection sensitivity, simplifies the circuit structure, and facilitates mass production.
Smart Images
Figure CN122409053A_ABST