金属薄膜电容真空计
By integrating protection and cleaning mechanisms at the connector of the metal thin-film capacitive vacuum gauge, and utilizing a stroke linkage transmission mechanism and elastic reset component, automatic gas filling and sealing, vacuuming, and cleaning are achieved, solving the connector oxidation problem, improving signal stability and measurement accuracy, and simplifying the maintenance process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- TSINGHUA UNIVERSITY
- Filing Date
- 2026-06-18
- Publication Date
- 2026-07-17
AI Technical Summary
The connectors of existing metal thin-film capacitive vacuum gauges are prone to oxidation when exposed to air for a long time, which leads to signal attenuation and noise interference, affecting measurement accuracy. Moreover, existing protective measures cannot effectively suppress oxidation, and maintenance operations are cumbersome.
The connector integrates a protection mechanism and a cleaning mechanism. Utilizing a stroke linkage transmission mechanism and an elastic reset component, it automatically achieves air inflation and vacuuming during insertion and removal. Combined with the cleaning mechanism, it automatically wipes the pins, achieving fully mechanical linkage protection and cleaning.
It effectively inhibits pin oxidation, stabilizes signal transmission and measurement accuracy, simplifies maintenance operations, reduces maintenance costs, and extends service life.
Smart Images
Figure CN122409054A_ABST