A stray light detection device

Abstract

This invention discloses a stray light detection device, including a frame, a loading / unloading device, a light source device, a detection device, and a transfer device. The loading / unloading device is configured to move and store material trays. The light source device includes a mounting platform and a light source mounting rail rotatably connected to the mounting platform. The light source mounting rail is arc-shaped, and a light source is detachably mounted on the light source mounting rail. The light source mounting rail can rotate around the Z-axis, driving the light source to rotate around the workpiece to be detected. The detection device is configured to adjust the position of the workpiece to be detected. The transfer device is configured to transfer the workpiece between the detection device and the loading / unloading device. By using a single set of arc-shaped light source mounting rails with a structure that can rotate around the Z-axis, the device achieves omnidirectional light source coverage of the workpiece and multi-angle stray light detection, while significantly simplifying the light source architecture and avoiding the complex equipment structure and high manufacturing cost problems caused by multi-arc arm arrangements.

Description

Technical Field

[0001] This invention relates to the field of stray light detection equipment technology, and particularly to a stray light detection equipment. Background Technology

[0002] As electronic products rapidly evolve towards higher pixel counts and higher resolutions, the quality requirements for lenses, as a core component of optical imaging, are becoming increasingly stringent. Among these requirements, stray light (also known as ghosting or flare) is a key indicator affecting lens image quality. Lenses typically undergo stray light inspection before leaving the factory; only lenses that pass this inspection can proceed to the next stage or be delivered to the customer. In recent years, with the continuous growth in demand for lenses from mobile phones, security monitoring, and automotive applications, lens production capacity has increased significantly. Simultaneously, the performance parameters required by end-user applications are becoming increasingly stringent, placing higher demands on the efficiency, accuracy, and automation level of stray light inspection.

[0003] Traditional stray light inspection relies on manual visual inspection or semi-automatic equipment. Inspectors must visually inspect or use simple light sources to check each lens for stray light defects. This method is not only inefficient, but the results are also greatly affected by uncontrollable factors such as operator experience, fatigue, and subjective judgment, making consistency and reliability difficult to guarantee. With the rapid increase in lens production capacity, manual inspection methods are far from meeting the dual demands of modern large-scale production for inspection speed and accuracy. There is an urgent need for more automated and comprehensive stray light inspection equipment.

[0004] To meet the testing needs of lenses of different specifications, stray light inspection equipment employing a dome-shaped light source architecture has emerged in the industry. This type of equipment typically includes a support assembly and a dome-shaped light source assembly. The dome-shaped light source assembly has multiple arc arms arranged on the load-bearing fulcrum of the support assembly, and each arc arm is equipped with a light source that can move along the arc arm to project a test beam onto the lens under test from different angles, thereby covering the testing needs of different field of view angles. In this approach, the number of arc arms directly determines the number of achievable testing angles; more arc arms result in a wider range of testing angles and more comprehensive testing coverage. However, the increased number of arc arms and their associated light sources and drive mechanisms also means increased structural complexity and significantly higher manufacturing costs. Furthermore, the dense spatial arrangement of multiple arc arms to some extent limits the utilization efficiency of the internal operating space of the equipment, hindering its coordination with automated equipment such as automatic loading and unloading robots. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a stray light detection device that can solve the problem of insufficient accuracy in adjusting the illumination angle of existing dome-type multi-arc arm light sources.

[0006] According to an embodiment of the present invention, a stray light detection device includes: a frame; a loading and unloading device disposed on the frame, the loading and unloading device being configured to move and store a material tray; a light source device including a mounting platform and a light source mounting rail rotatably connected to the mounting platform, the light source mounting rail being arc-shaped, a light source being detachably disposed on the light source mounting rail, the light source mounting rail being rotatable about a Z-axis and driving the light source to rotate about the workpiece to be detected; a detection device disposed on the frame and located below the light source device, the detection device being configured to adjust the position of the workpiece to be detected; and a transfer device disposed on the frame, the transfer device being configured to transfer the workpiece between the detection device and the loading and unloading device.

[0007] According to an embodiment of the present invention, a stray light detection device has at least the following beneficial effects: The use of a single set of arc-shaped light source mounting rails in conjunction with a structure that can rotate around the Z-axis enables the light source to surround the workpiece in all directions and cover multiple angles for stray light detection, while significantly simplifying the light source architecture and avoiding the complex equipment structure and high manufacturing costs caused by multi-arc arm arrangements; the simple layout of the single set of light source mounting rails frees up internal operating space, facilitating collaboration with automated equipment such as automatic loading and unloading robots, and promoting the automated integration of the entire detection process; the coordinated linkage of the loading and unloading device, the transfer device, and the detection device enables fully automated flow of material tray storage, workpiece transfer, and detection positioning, significantly improving detection efficiency and work cycle.

[0008] According to some embodiments of the present invention, the light source device further includes an angle adjustment component connected to the light source mounting rail, the light source being connected to the angle adjustment component, and the angle adjustment component being configured to adjust the illumination angle of the light source.

[0009] According to some embodiments of the present invention, the angle adjustment assembly includes a connecting plate and an adjusting member. The connecting plate is slidably connected to the light source mounting rail and can slide along the arc-shaped structure of the light source mounting rail. The adjusting member is detachably connected to the connecting plate, and the included angle between the adjusting member and the connecting plate is continuously adjustable. A light source mounting seat is provided on the adjusting member, and the light source mounting seat is configured to fix the light source.

[0010] According to some embodiments of the present invention, the connecting plate is provided with a plurality of connecting holes, and the adjusting member is provided with an arc groove and a straight groove. The direction of the straight groove is collinear with the radial line of the arc groove. A plurality of fasteners pass through the arc groove and the connecting holes, and a plurality of fasteners pass through the straight groove and the connecting holes. The relative angle between the adjusting member and the connecting plate is adjusted by adjusting the relative position of the fasteners in the arc groove and the straight groove.

[0011] According to some embodiments of the present invention, the adjusting member includes a short side and a long side, the short side and the long side are perpendicular to each other, the arc groove is formed on the short side, and the straight groove is formed on the long side.

[0012] According to some embodiments of the present invention, the light source device includes at least four sets of light source mounting rails, and at least one light source is correspondingly disposed on each set of light source mounting rails.

[0013] According to some embodiments of the present invention, the light source device further includes a rotating bracket, the rotating bracket being rotatably connected to the mounting platform, the light source mounting rail being connected to the rotating bracket, and the rotating bracket being connected to a driving device.

[0014] According to some embodiments of the present invention, the loading and unloading device includes a plurality of storage mechanisms and a first gripping mechanism. The storage mechanisms are disposed on the frame and configured to store a tray for accommodating workpieces. The first gripping mechanism is configured to transfer workpieces between the storage mechanisms and the transfer device.

[0015] According to some embodiments of the present invention, the transfer device includes a transfer platform and a second gripping mechanism. The transfer platform is disposed on the frame and configured to place a workpiece. The second gripping mechanism is connected to the frame and configured to transfer the workpiece between the transfer platform and the detection device.

[0016] According to some embodiments of the present invention, the transfer platform is provided with a positioning detection mechanism and an air blowing cleaning mechanism. The positioning detection mechanism is configured to detect whether the workpiece is in position, and the air blowing cleaning mechanism is configured to blow air onto the workpiece to clean the workpiece surface.

[0017] According to some embodiments of the present invention, the detection device includes a first slide rail, a first sliding frame, a second slide rail, a second sliding frame, a third slide rail, a third sliding frame, a workpiece support, and a prism lifting support. The first slide rail is connected to the frame and extends along the X-axis direction. The first sliding frame is slidably disposed on the first slide rail. The second slide rail is disposed on the first sliding frame and extends along the Y-axis direction. The second sliding frame is slidably disposed on the second slide rail. The third slide rail is disposed on the second sliding frame. The extension direction of the third slide rail forms a certain angle with the horizontal plane. The third sliding frame is slidably disposed on the third slide rail. When the third sliding frame slides, the position of the third sliding frame along the X-axis direction and the position along the Z-axis direction change simultaneously. The workpiece support is disposed on the third sliding frame and is configured to accommodate a workpiece or a workpiece fixture. The prism lifting support is disposed on the frame and is configured to fix the prism and drive the prism to move along the Z-axis direction.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is a schematic diagram of the structure of an embodiment of the present invention; Figure 2 This is a schematic diagram of the loading and unloading device according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the detection device according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of the light source device according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the angle adjustment component according to an embodiment of the present invention.

[0020] Icon labels: Rack 10; 20, loading and unloading device; 21, storage mechanism; 22, first gripping mechanism; 30 trays; Light source device 40, mounting platform 41, light source mounting rail 42, light source 43, angle adjustment component 44, connecting plate 441, connecting hole 441a, adjusting component 442, arc groove 442a, straight groove 442b, short side 442c, long side 442d, light source mounting base 443, rotating bracket 45; Detection device 50, first slide rail 51, first sliding frame 52, second slide rail 53, second sliding frame 54, third slide rail 55, third sliding frame 56, workpiece support 57, prism lifting support 58; Transfer device 60, transfer platform 61, second gripping mechanism 62. Detailed Implementation

[0021] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0022] In the description of this invention, the use of "first" and "second" is for the purpose of distinguishing technical features only, and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of the technical features indicated.

[0023] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0024] Reference Figures 1 to 5 This invention proposes a stray light detection device, comprising a frame 10, a loading / unloading device 20, a light source device 40, a detection device 50, and a transfer device 60. The loading / unloading device 20 is mounted on the frame 10 and configured to move and store a material tray 30. The light source device 40 includes a mounting platform 41 and a light source mounting rail 42 rotatably connected to the mounting platform 41. The light source mounting rail 42 is arc-shaped, and a light source 43 is detachably mounted on the light source mounting rail 42. The light source mounting rail 42 can rotate around the Z-axis, driving the light source 43 to rotate around the workpiece to be detected. The detection device 50 is mounted on the frame 10 and located below the light source device 40. The detection device 50 is configured to adjust the position of the workpiece to be detected. The transfer device 60 is mounted on the frame 10 and configured to transfer workpieces between the detection device 50 and the loading / unloading device 20.

[0025] Understandably, the use of a single-set arc-shaped light source mounting rail 42 with a structure that can rotate around the Z-axis not only enables the light source 43 to surround the workpiece in all directions and cover the detection of stray light from multiple angles, but also significantly simplifies the light source architecture and avoids the problems of complex equipment structure and high manufacturing costs caused by multi-arc arm arrangement. The simple layout of the single-set light source mounting rail 42 frees up the internal operating space of the equipment, making it easier to cooperate with automated equipment such as automatic loading and unloading robots, which is conducive to realizing the automated integration of the entire inspection process. The coordinated linkage of the loading and unloading device 20, the transfer device 60 and the inspection device 50 realizes the fully automatic flow of material tray 30 storage, workpiece transfer and inspection positioning, which greatly improves inspection efficiency and operation cycle.

[0026] Reference Figure 4 and Figure 5 The light source device 40 also includes an angle adjustment component 44, which is connected to the light source mounting rail 42. The light source 43 is connected to the angle adjustment component 44, and the angle adjustment component 44 is configured to adjust the illumination angle of the light source 43.

[0027] The angle adjustment component 44 is independent of the rotation function of the light source mounting rail 42, so that while the light source 43 revolves around the Z-axis with the light source mounting rail 42, it can also independently adjust its own illumination tilt angle through the angle adjustment component 44, which further enriches the combination of incident angles of the detection light and improves the coverage accuracy and flexibility of stray light detection.

[0028] Reference Figure 5The angle adjustment component 44 includes a connecting plate 441 and an adjusting member 442. The connecting plate 441 is slidably connected to the light source mounting rail 42. The connecting plate 441 can slide along the arc-shaped structure of the light source mounting rail 42. The adjusting member 442 is detachably connected to the connecting plate 441. The included angle between the adjusting member 442 and the connecting plate 441 is continuously adjustable. A light source mounting seat 443 is provided on the adjusting member 442. The light source mounting seat 443 is configured to fix the light source 43.

[0029] The connecting plate 441 slides along the arc-shaped structure of the light source mounting rail 42, allowing the fixed position of the light source 43 on the light source mounting rail 42 to be freely adjusted along the arc, meeting the detection requirements of different specifications of workpieces for different incident angles; the included angle between the adjusting component 442 and the connecting plate 441 is continuously adjustable, and in conjunction with the sliding position adjustment, the light source 43 on the light source mounting base 443 can be adjusted in multiple degrees of freedom in two-dimensional space, which is highly flexible.

[0030] Reference Figure 5 The connecting plate 441 has several connecting holes 441a, and the adjusting member 442 has an arc groove 442a and a straight groove 442b. The direction of the straight groove 442b is collinear with the radial line of the arc groove 442a. Several fasteners pass through the arc groove 442a and the connecting hole 441a, and several fasteners pass through the straight groove 442b and the connecting hole 441a. The relative angle between the adjusting member 442 and the connecting plate 441 is adjusted by adjusting the relative position of the fasteners in the arc groove 442a and the straight groove 442b.

[0031] The fastener slides along the arc path in the arc groove 442a, and with the radial guidance of the straight groove 442b, the adjusting part 442 can rotate relative to the connecting plate 441 around a virtual rotation center, so as to realize continuous stepless adjustment of the angle. After the angle is determined, the fastener can be locked to fix the two. The adjustment operation is simple, the structure is compact, and the angle locking is reliable.

[0032] Reference Figure 5 The adjusting member 442 includes a short side 442c and a long side 442d, which are perpendicular to each other. An arc groove 442a is formed on the short side 442c, and a straight groove 442b is formed on the long side 442d.

[0033] The circular arc groove 442a and the straight groove 442b are respectively opened on the mutually perpendicular short side 442c and long side 442d, so that the adjustment path of the fastener is orthogonally distributed in space, avoiding motion interference between the fasteners of the two grooves during the adjustment process, and increasing the stroke range and adjustment accuracy of the angle adjustment.

[0034] Reference Figure 4 The light source device 40 includes at least four sets of light source mounting rails 42, and each set of light source mounting rails 42 is provided with at least one light source 43.

[0035] At least four sets of light source mounting rails 42 and at least four sets of corresponding light sources 43 are evenly distributed around the mounting platform 41. Each set of light sources 43 can synchronously project detection beams onto the workpiece from different directions, cooperating with each other to cover a wider range of incident angles, reducing the angle travel required for the rotation of a single set of light source mounting rails 42, and further improving the detection cycle and light source utilization efficiency.

[0036] Reference Figure 4 The light source device 40 also includes a rotating bracket 45, which is rotatably connected to the mounting platform 41. The light source mounting rail 42 is connected to the rotating bracket 45, and the rotating bracket 45 is connected to a drive device.

[0037] The rotating bracket 45 is connected to the drive device, which provides rotational power to drive the light source mounting rail 42 to rotate stably around the Z-axis, so that the light source 43 can scan the workpiece 360° around it. The rotating bracket 45 is rotatably connected to the mounting table 41. The rotating pair structure is simple and reliable, with high transmission accuracy and convenient maintenance.

[0038] Reference Figure 2 The loading and unloading device 20 includes several storage mechanisms 21 and a first gripping mechanism 22. The storage mechanisms 21 are mounted on the frame 10 and are configured to store trays 30 for holding workpieces. The first gripping mechanism 22 is configured to transfer workpieces between the storage mechanisms 21 and the transfer device 60.

[0039] Several storage mechanisms 21 can store trays to be inspected and trays that have been inspected respectively, so as to realize the orderly management of materials; the first gripping mechanism 22 reciprocates between the storage mechanism 21 and the transfer device 60 to transfer workpieces, so as to complete the automated connection of workpieces from the warehouse to the inspection transfer, reduce manual intervention, and improve the flow efficiency.

[0040] Reference Figure 2 and Figure 3 The transfer device 60 includes a transfer table 61 and a second gripping mechanism 62. The transfer table 61 is mounted on the frame 10 and is configured to place workpieces. The second gripping mechanism 62 is connected to the frame 10 and is configured to transfer workpieces between the transfer table 61 and the detection device 50.

[0041] The transfer station 61 serves as a temporary storage and transfer platform for workpieces between the loading / unloading device 20 and the testing device 50, acting as a buffer and connector to decouple the loading / unloading cycle from the testing cycle, allowing them to operate independently without interference. The second gripping mechanism 62 transfers the workpiece from the transfer station 61 to the testing device 50, completing the precise positioning and transfer before testing.

[0042] It is worth noting that in some embodiments of the present invention, the transfer station 61 is provided with a positioning detection mechanism and an air blowing cleaning mechanism. The positioning detection mechanism is configured to detect whether the workpiece is in position, and the air blowing cleaning mechanism is configured to blow air onto the workpiece to clean the workpiece surface.

[0043] The on-site inspection mechanism confirms the placement status of the workpiece on the transfer table 61 in real time, avoiding grasping errors caused by the workpiece not being in place or being misaligned, and ensuring the reliability of the handover; the air blowing cleaning mechanism blows away surface dust and foreign objects before the workpiece enters the inspection station, preventing dust particles from interfering with the light detection results and improving the accuracy and consistency of the inspection.

[0044] Reference Figure 3 The detection device 50 includes a first slide rail 51, a first sliding frame 52, a second slide rail 53, a second sliding frame 54, a third slide rail 55, a third sliding frame 56, a workpiece support 57, and a prism lifting support 58. The first slide rail 51 is connected to the frame 10 and extends along the X-axis. The first sliding frame 52 is slidably mounted on the first slide rail 51. The second slide rail 53 is mounted on the first sliding frame 52 and extends along the Y-axis. The second sliding frame 54 is slidably mounted on the second slide rail 53. The third slide rail 55 is mounted on the second slide rail 56. On frame 54, the extension direction of the third slide rail 55 is at a certain angle to the horizontal plane. The third sliding frame 56 is slidably mounted on the third slide rail 55. When the third sliding frame 56 slides, the position of the third sliding frame 56 along the X-axis direction and the position along the Z-axis direction change simultaneously. The workpiece support 57 is mounted on the third sliding frame 56. The workpiece support 57 is configured to accommodate the workpiece or workpiece fixture. The prism lifting support 58 is mounted on the frame 10. The prism lifting support 58 is configured to fix the prism and drive the prism to move along the Z-axis direction.

[0045] The first slide rail 51 and the second slide rail 53 form a two-dimensional translation adjustment in the XY plane, which enables the workpiece to be accurately positioned to the center of the detection optical path in the horizontal plane; the third slide rail 55 is inclined, and when the third sliding frame 56 slides along the third slide rail 55, it simultaneously generates a composite displacement in the X-axis and Z-axis directions, realizing single-axis linkage adjustment of workpiece focusing and center alignment, simplifying the design of the focusing mechanism and reducing the number of drive axes; the prism lifting bracket 58 independently drives the prism to move in the Z-axis direction, and cooperates with the detection optical path to complete imaging, realizing decoupled control of workpiece focusing and prism focusing, which is flexible and highly accurate.

[0046] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0047] Of course, the present invention is not limited to the above-described embodiments. Those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of the present invention. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A stray light detection device, characterized in that, include: Rack (10); A loading and unloading device (20) is provided on the frame (10), and the loading and unloading device (20) is configured to move and store the tray (30). The light source device (40) includes a mounting platform (41) and a light source mounting rail (42) rotatably connected to the mounting platform (41). The light source mounting rail (42) is arc-shaped, and a light source (43) is detachably mounted on the light source mounting rail (42). The light source mounting rail (42) can rotate around the Z-axis and drive the light source (43) to rotate around the workpiece to be tested. A detection device (50) is disposed on the frame (10) and located below the light source device (40), and the detection device (50) is configured to adjust the position of the workpiece to be detected; A transfer device (60) is provided on the frame (10) and is configured to transfer workpieces between the detection device (50) and the loading and unloading device (20); The detection device (50) includes a first slide rail (51), a first sliding frame (52), a second slide rail (53), a second sliding frame (54), a third slide rail (55), a third sliding frame (56), a workpiece support (57), and a prism lifting support (58). The first slide rail (51) is connected to the frame (10) and extends along the X-axis. The first sliding frame (52) is slidably mounted on the first slide rail (51). The second slide rail (53) is mounted on the first sliding frame (52) and extends along the Y-axis. The second sliding frame (54) is slidably mounted on the second slide rail (53). The third slide rail (55) is mounted on the first slide rail (51). On the second sliding frame (54), the extension direction of the third slide rail (55) is at a certain angle to the horizontal plane. The third sliding frame (56) is slidably disposed on the third slide rail (55). When the third sliding frame (56) slides, the position of the third sliding frame (56) along the X-axis direction and the position along the Z-axis direction change simultaneously. The workpiece support (57) is disposed on the third sliding frame (56). The workpiece support (57) is configured to accommodate the workpiece or workpiece fixture. The prism lifting support (58) is disposed on the frame (10). The prism lifting support (58) is configured to fix the prism and drive the prism to move along the Z-axis direction. The light source device (40) further includes an angle adjustment component (44), which is connected to the light source mounting rail (42), and the light source (43) is connected to the angle adjustment component (44). The angle adjustment component (44) is configured to adjust the illumination angle of the light source (43). The angle adjustment assembly (44) includes a connecting plate (441) and an adjusting member (442). The connecting plate (441) is slidably connected to the light source mounting rail (42). The connecting plate (441) can slide along the arc-shaped structure of the light source mounting rail (42). The adjusting member (442) is detachably connected to the connecting plate (441). The included angle between the adjusting member (442) and the connecting plate (441) is continuously adjustable. A light source mounting seat (443) is provided on the adjusting member (442). The light source mounting seat (443) is configured to fix the light source (43). The connecting plate (441) has a plurality of connecting holes (441a), and the adjusting member (442) has an arc groove (442a) and a straight groove (442b). The direction of the straight groove (442b) is collinear with the radial line of the arc groove (442a). A plurality of fasteners pass through the arc groove (442a) and the connecting holes (441a), and a plurality of fasteners pass through the straight groove (442b) and the connecting holes (441a). The relative angle between the adjusting member (442) and the connecting plate (441) is adjusted by adjusting the relative position of the fasteners in the arc groove (442a) and the straight groove (442b). The adjusting member (442) includes a short side (442c) and a long side (442d), the short side (442c) and the long side (442d) are perpendicular to each other, the arc groove (442a) is formed on the short side (442c), and the straight groove (442b) is formed on the long side (442d).

2. The stray light detection device according to claim 1, characterized in that, The light source device (40) includes at least four sets of light source mounting rails (42), and at least one light source (43) is correspondingly provided on each set of light source mounting rails (42).

3. The stray light detection device according to claim 2, characterized in that, The light source device (40) also includes a rotating bracket (45), which is rotatably connected to the mounting platform (41), and the light source mounting rail (42) is connected to the rotating bracket (45). The rotating bracket (45) is connected to a driving device.

4. The stray light detection device according to claim 1, characterized in that, The loading and unloading device (20) includes a plurality of storage mechanisms (21) and a first gripping mechanism (22). The storage mechanisms (21) are disposed on the frame (10) and are configured to store a tray for holding workpieces. The first gripping mechanism (22) is configured to transfer workpieces between the storage mechanisms (21) and the transfer device (60).

5. The stray light detection device according to claim 4, characterized in that, The transfer device (60) includes a transfer table (61) and a second gripping mechanism (62). The transfer table (61) is disposed on the frame (10) and is configured to place a workpiece. The second gripping mechanism (62) is connected to the frame (10) and is configured to transfer the workpiece between the transfer table (61) and the detection device (50).

6. The stray light detection device according to claim 5, characterized in that, The transfer station (61) is equipped with a positioning detection mechanism and an air blowing cleaning mechanism. The positioning detection mechanism is configured to detect whether the workpiece is in position, and the air blowing cleaning mechanism is configured to blow air onto the workpiece to clean its surface.

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