插洗机水质监测方法及插洗机
By monitoring the liquid parameters in the insertion and washing machine, the water quality of the chemical tank and the cleaning tank is automatically adjusted, filling the gap in water quality testing for the insertion and washing machine and realizing online monitoring and efficient production.
CN122409762APending Publication Date: 2026-07-17高测(盐城)技术有限公司
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 高测(盐城)技术有限公司
- Filing Date
- 2025-01-17
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
The existing insertion and washing machines lack water quality testing methods, which makes it impossible to determine the source of contamination when the silicon wafers are abnormal after cleaning. This requires a lot of time and money to investigate, which affects production efficiency.
Method used
By monitoring the free alkalinity of the liquid in the reagent tank and the conductivity of the liquid in the cleaning tank, alkaline reagents or pure water are automatically added to adjust the water quality, achieving online monitoring and timely adjustment.
Benefits of technology
It improved cleaning quality, reduced workload, decreased chemical consumption, and increased production efficiency and yield.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN122409762A_ABST
Abstract
本申请实施例提供一种插洗机水质监测方法及插洗机，其中，插洗机水质监测方法，包括：获取药剂槽中液体的游离碱度；当游离碱度低于碱度阈值时，向药剂槽中补充碱性药剂；获取清洗槽中液体的电导率；当电导率大于电导率阈值时，向清洗槽中补充纯水。本申请实施例提供的插洗机水质监测方法及插洗机能够及时发现药剂槽或清洗槽内液体的状态，并及时进行调整，以满足硅片的正常清洗需求，保证清洗质量，提高成品率。并且该方案能够自动进行，降低了人员的工作量；而且还不需要停机，实现在线监测，提高了生产效率。
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